CN109860435A - Mask plate, display panel and its packaging method, display device - Google Patents
Mask plate, display panel and its packaging method, display device Download PDFInfo
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- CN109860435A CN109860435A CN201910044434.4A CN201910044434A CN109860435A CN 109860435 A CN109860435 A CN 109860435A CN 201910044434 A CN201910044434 A CN 201910044434A CN 109860435 A CN109860435 A CN 109860435A
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- layer
- occlusion part
- mask plate
- linking arm
- substrate
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Abstract
The disclosure is directed to a kind of mask plate, the packaging method of display panel, display panel and display devices.Mask plate includes occlusion part, mask frame and linking arm, and the mask frame surrounds the occlusion part, and the linking arm connects the mask frame and the occlusion part, and the width of the linking arm is between 0.1mm~5mm.The mask plate that the disclosure provides, can block the predeterminable area of display panel, to be packaged to display panel.
Description
Technical field
This disclosure relates to field of display technology, in particular to the packaging method, aobvious of a kind of mask plate, display panel
Show panel and display device.
Background technique
In recent years, with the development of science and technology abnormity screen has gradually entered into everybody visual field with screen comprehensively.Whether special-shaped
Or screen comprehensively, purpose is provided to promote the screen accounting of display equipment, to promote the competitiveness of product in market.
In order to realize higher screen accounting, need the position of camera or some relevant sensors on the screen
Reserved, the scheme being open in screen has also been increasingly becoming the direction of technical staff's consideration.But the envelope of special-shaped screen
Dress problem gradually reveals.
Currently, being to make encapsulated layer that screen be completely covered using more packaging method, then again will using the methods of etching
Expose in the region of screen opening.And in this way, situations such as operation of manufacturing process is more, is easy to appear package failure,
Reduce the production yield of product.
It should be noted that information is only used for reinforcing the reason to the background of the disclosure disclosed in above-mentioned background technology part
Solution, therefore may include the information not constituted to the prior art known to persons of ordinary skill in the art.
Summary of the invention
The disclosure is designed to provide a kind of mask plate, the packaging method of display panel, display panel and display device,
The predeterminable area of display panel can be blocked, to be packaged to display panel.
According to one aspect of the disclosure, a kind of mask plate is provided.The mask plate includes:
Occlusion part;
Mask frame surrounds the occlusion part;
Linking arm connects the mask frame and the occlusion part, and the width of the linking arm is between 0.1mm~5mm.
In a kind of exemplary embodiment of the disclosure, there are two the linking arm settings, is respectively used to cover described in connection
Mould frame and the occlusion part.
In a kind of exemplary embodiment of the disclosure, the angle of two linking arms is between 60 °~180 °.
In a kind of exemplary embodiment of the disclosure, the length of the linking arm is not more than 2cm.
A kind of packaging method of display panel another aspect of the present disclosure provides.The packaging method includes:
A substrate for being formed with display device layer is provided, the display device layer has opening;
Encapsulated layer is formed on surface of the display device layer far from the substrate side, the encapsulated layer includes first
Inorganic layer, forming first inorganic layer includes:
A mask plate is provided, the mask plate includes occlusion part, mask frame and linking arm, and the mask frame surrounds institute
Occlusion part is stated, the linking arm connects the mask frame and the occlusion part;Wherein, the width of the linking arm is in 0.1mm
Between~5mm;
By the mask plate be set to the display device layer far from the substrate side, and with the display device interlayer every
Pre-determined distance, the occlusion part and the position of the opening are correspondingly arranged, and the orthographic projection position of the opening on the substrate
In in the orthographic projection of the occlusion part on the substrate;
Side from the mask plate far from the display device layer forms first inorganic layer by deposition.
In a kind of exemplary embodiment of the disclosure, the encapsulated layer further includes organic layer, forms the organic layer packet
It includes:
The organic layer is formed on the surface of first inorganic layer far from the substrate.
In a kind of exemplary embodiment of the disclosure, the encapsulated layer further includes the second inorganic layer, forms described second
Inorganic layer includes:
The mask plate is set to side of the organic layer far from the substrate, and with the organic layer interval it is default away from
From the occlusion part and the position of the opening are correspondingly arranged, and the orthographic projection of the opening on the substrate is positioned at described
In the orthographic projection of occlusion part on the substrate;
Side from the mask plate far from the organic layer forms second inorganic layer by deposition.
In a kind of exemplary embodiment of the disclosure, the occlusion part is in rounded, the occlusion part of the opening
Diameter and the opening diameter ratio between 1~1.1.
Still another aspect of the present disclosure provides a kind of display panels.The display panel uses above-mentioned packaging method
It is fabricated.
According to the another aspect of the disclosure, a kind of display device is provided.The display device includes above-mentioned display surface
Plate.
The mask plate that the disclosure provides, occlusion part can be suspended in mask frame by the support of linking arm, and be connected
For the width of arm between 0.1mm~5mm, width is smaller.Mask plate hides when the display layer progress exposure mask to display panel blocks
For stopper for blocking to the predeterminable area of display panel viewing area, predeterminable area can be for example the open region on display layer
Domain.When forming the inorganic layer in encapsulated layer on display layer, the mask plate can be used to be masked, occlusion part can be by open region
Domain is blocked, and open area is avoided to be deposited inorganic layer, simultaneously as the width of linking arm is smaller, inorganic layer is heavy using gas phase
The inorganic layer of two sides can be connected together by diffusion below linking arm when product, so that the thickness of the inorganic layer below linking arm is full
Foot requires.Meanwhile open area is blocked, therefore is formed without organic layer, avoiding subsequent will use etching technics by open region
The inorganic layer in domain etches, and avoids excessive technological operation, improves product yield.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The disclosure can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows the implementation for meeting the disclosure
Example, and together with specification for explaining the principles of this disclosure.It should be evident that the accompanying drawings in the following description is only the disclosure
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the structural schematic diagram for the mask plate that a kind of embodiment of the disclosure provides;
Fig. 2 is the flow chart for the display panel packaging method that a kind of embodiment of the disclosure provides;
The detail flowchart of step S200 in Fig. 2 that Fig. 3 provides for a kind of embodiment of the disclosure;
The detail flowchart of step S200 in Fig. 2 that Fig. 4 provides for another embodiment of the disclosure;
The detail flowchart of step S200 in Fig. 2 that Fig. 5 provides for another embodiment of the disclosure;
Fig. 6 is the top view for the display panel that a kind of embodiment of the disclosure provides;
Fig. 7 is the cross-sectional view of the Section A-A of Fig. 6.
Specific embodiment
Example embodiment is described more fully with reference to the drawings.However, example embodiment can be with a variety of shapes
Formula is implemented, and is not understood as limited to example set forth herein;On the contrary, thesing embodiments are provided so that the disclosure will more
Fully and completely, and by the design of example embodiment comprehensively it is communicated to those skilled in the art.Described feature, knot
Structure or characteristic can be incorporated in any suitable manner in one or more embodiments.In the following description, it provides perhaps
More details fully understand embodiment of the present disclosure to provide.It will be appreciated, however, by one skilled in the art that can
It is omitted with technical solution of the disclosure one or more in the specific detail, or others side can be used
Method, constituent element, device, step etc..In other cases, be not shown in detail or describe known solution to avoid a presumptuous guest usurps the role of the host and
So that all aspects of this disclosure thicken.
In addition, attached drawing is only the schematic illustrations of the disclosure, it is not necessarily drawn to scale.Identical attached drawing mark in figure
Note indicates same or similar part, thus will omit repetition thereof.Some block diagrams shown in the drawings are function
Energy entity, not necessarily must be corresponding with physically or logically independent entity.
Term "one", " one ", "the" and " described " to indicate there are one or more elements/component part/etc.;With
Language " comprising " and " having " is to indicate the open meaning being included and refer to element/composition portion in addition to listing
Also may be present except divide/waiting other element/component part/etc.;Term " first ", " second " etc. are only used as label, no
It is the quantity limitation to its object.
A kind of mask plate is provided firstly in this example embodiment.As shown in Figure 1, the mask plate includes mask frame
11, occlusion part 12 and linking arm 13, mask frame 11 surround occlusion part 12, and linking arm 13 connects mask frame 11 and blocks
Portion 12, occlusion part 12 can be suspended in mask frame 11 by the support of linking arm 13.
Wherein, the width of linking arm 13 is between 0.1mm~5mm.Such as the width of linking arm 13 be 0.1mm, 0.5mm,
1mm, 3mm or 5mm, the disclosure are without limitation.
The mask plate that the disclosure provides, occlusion part can be suspended in mask frame by the support of linking arm, and be connected
For the width of arm between 0.1mm~5mm, width is smaller.Mask plate hides when the display layer progress exposure mask to display panel blocks
For stopper for blocking to the predeterminable area of display panel viewing area, predeterminable area can be for example the open region on display layer
Domain.When forming the inorganic layer in encapsulated layer on display layer, the mask plate can be used to be masked, occlusion part can be by open region
Domain is blocked, and open area is avoided to be deposited inorganic layer, simultaneously as the width of linking arm is smaller, inorganic layer is heavy using gas phase
The inorganic layer of two sides can be connected together by diffusion below linking arm when product, so that the thickness of the inorganic layer below linking arm is full
Foot requires.Meanwhile open area is blocked, therefore is formed without organic layer, avoiding subsequent will use etching technics by open region
The inorganic layer in domain etches, and avoids excessive technological operation, improves product yield.
As shown in Figure 1, being respectively used to connection mask frame 11 and occlusion part 12 there are two the settings of linking arm 13.Setting two
A linking arm 13, what can be consolidated is supported on occlusion part 12 in mask frame 11, meanwhile, the negligible amounts of linking arm 13, energy
It is influenced caused by linking arm 13 is enough reduced in deposition, improves product yield.
Further, the angle of two linking arms 13 is between 60 °~180 °.As shown in Figure 1, such as two linking arms 13
Angle α can be 60 °, 90 °, 120 °, 150 ° or 180 °, the disclosure is without limitation.It is arranged using this angle, can be mentioned
The stability that high linking arm 13 supports occlusion part 12, the case where avoiding linking arm 13 from being broken.
Further, as shown in Figure 1, mask frame 11 is in rectangle, it is adjacent that two linking arms 13 are connected to mask frame 11
Two sides on.In addition, mask frame 11 or the shapes such as circle, ellipse, diamond shape, hexagon, the disclosure is to this
With no restrictions, those skilled in the art can choose according to actual needs.
Specifically, the length of linking arm 13 is not more than 2cm.The length of linking arm 13 refers to connection occlusion part 12 and mask side
The length of frame 11.Since the width of linking arm 13 is smaller, the length of linking arm 13 is arranged within 2cm, can guarantee linking arm
13 intensity avoids the too long the case where being broken of linking arm 13.Certainly, those skilled in the art can be by the length of linking arm 13
Degree is set greater than 2cm.
Specifically, occlusion part 12 can be the shapes such as circle, rectangle, ellipse, triangle.As shown in Figure 1, occlusion part 12
It is rounded.The size and shape of occlusion part 12 is corresponding with the size and shape of predeterminable area on display layer.In addition, the disclosure is to covering
The thickness of diaphragm plate with no restrictions, such as can be 1mm, 2mm equal thickness, and those skilled in the art can according to need carry out thickness
Design.
Specifically, the material of occlusion part 12, mask frame 11 and linking arm 13 is identical.Using identical material, mask plate can
It is formed by one-time process, production is simple, and mask plate is structure as a whole, and intensity is big.Certainly, the material of mask plate can not also
It together, can also be separate structure, the disclosure is without limitation.
The disclosure additionally provides a kind of packaging method of display panel.As shown in Figures 2 and 3, which includes:
Step S100, a substrate for being formed with display device layer is provided, display device layer has opening;
Step S200, encapsulated layer is formed on surface of the display device layer far from substrate side;Encapsulated layer includes the first nothing
Machine layer, forming the first inorganic layer includes:
Step S210, a mask plate is provided, mask plate includes occlusion part, mask frame and linking arm, and mask frame surrounds
Occlusion part, linking arm connect mask frame and occlusion part;Wherein, the width of linking arm is between 0.1mm~5mm;
Step S220, mask plate is set to display device layer far from substrate side, and with display device interlayer every it is default away from
From the position of occlusion part and opening is correspondingly arranged, and the orthographic projection being open in substrate is located at positive throwing of the occlusion part in substrate
In shadow;
Step S230, the side from mask plate far from display device layer forms the first inorganic layer by deposition.
The packaging method for the display panel that the disclosure provides, occlusion part can be suspended at mask side by the support of linking arm
In frame, and the width of linking arm, between 0.1mm~5mm, width is smaller.Mask plate is covered in the display layer to display panel
When film blocks, occlusion part is for blocking the open area of display panel viewing area.It is inorganic that first is formed on display layer
It when layer, is masked using the mask plate, occlusion part can block open area, avoid open area from being deposited first inorganic
Layer, simultaneously as the width of linking arm is smaller, in deposition, the inorganic layer of two sides can pass through expansion to the first inorganic layer below linking arm
It dissipates and connects together, so that the thickness of the inorganic layer below linking arm is met the requirements.Meanwhile open area is blocked without the first nothing
Machine layer is formed, and is avoided subsequent the first inorganic layer etching that use etching technics for open area, is avoided excessive technique
Operation, improves product yield.
In the following, by each step of the packaging method in this example embodiment is further detailed.
In the step s 100, a substrate for being formed with display device layer is provided, display device layer has opening.
Specifically, as shown in fig. 6, providing a substrate 14, substrate 14 can be flexible substrates, and flexible substrates can be by poly- to benzene
Naphthalate PET, polyethylene naphthalate PEN or polyimides PI etc. materials are made;Then in substrate 14
Upper formation display device layer, display device layer can not limit this for OLED display device layer or LCD display part layer, the disclosure
System.As shown in Figure 6 and Figure 7, display device layer includes semiconductor switch layer 15 and display layer 16.Specifically, shape on the substrate 14
At semiconductor switch layer 15, semiconductor switch layer 15 may include low temperature polycrystalline silicon LTPS structure, oxide semiconductor Oxide structure
Equal semiconductor switch structure;Then display layer 16, display are formed on surface of the semiconductor switch layer 15 far from 14 side of substrate
Layer 16 can be formed by vapor deposition, and display layer 16 may include by cathode layer, electron transfer layer ETL, luminescent layer EML, hole transmission layer
Each layer of the formation OLED illumination effect such as HIL, hole injection layer HTL.Wherein, there is opening 17, the opening 17 on display layer 16
Can be used for that the devices such as camera are arranged on a display panel.
In step s 200, encapsulated layer is formed on surface of the display device layer far from 14 side of substrate.Encapsulated layer includes
First inorganic layer.Specifically, as shown in figure 3, the first inorganic layer of formation includes:
Step S210, a mask plate is provided, mask plate includes occlusion part, mask frame and linking arm, and mask frame surrounds
Occlusion part, linking arm connect mask frame and occlusion part;Wherein, the width of linking arm is between 100um~5mm.
As shown in Figure 1, being respectively used to connection mask frame 11 and occlusion part 12 there are two the settings of linking arm 13.Setting two
A linking arm 13, what can be consolidated is supported on occlusion part 12 in mask frame 11, meanwhile, the negligible amounts of linking arm 13, energy
It is influenced caused by linking arm 13 is enough reduced in deposition, improves product yield.
Further, the angle of two linking arms 13 is between 60 °~180 °.As shown in Figure 1, such as two linking arms 13
Angle α can be 60 °, 90 °, 120 °, 150 ° or 180 °, the disclosure is without limitation.It is arranged using this angle, can be mentioned
The stability that high linking arm 13 supports occlusion part 12, the case where avoiding linking arm 13 from being broken.
Further, as shown in Figure 1, mask frame 11 is in rectangle, it is adjacent that two linking arms 13 are connected to mask frame 11
Two sides on.In addition, mask frame 11 or the shapes such as circle, ellipse, diamond shape, hexagon, the disclosure is to this
With no restrictions, those skilled in the art can choose according to actual needs.
Specifically, the length of linking arm 13 is not more than 2cm.The length of linking arm 13 refers to connection occlusion part 12 and mask side
The length of frame 11.Since the width of linking arm 13 is smaller, the length of linking arm 13 is arranged within 2cm, can guarantee linking arm
13 intensity avoids the too long the case where being broken of linking arm 13.Certainly, those skilled in the art can be by the length of linking arm 13
Degree is set greater than 2cm.
Specifically, occlusion part 12 can be the shapes such as circle, rectangle, ellipse, triangle.As shown in Figure 1, occlusion part 12
It is rounded.The size and shape of occlusion part 12 is corresponding with the size and shape of predeterminable area on display layer 16.In addition, the disclosure pair
The thickness of mask plate with no restrictions, such as can be 1mm, 2mm equal thickness, and it is thick that those skilled in the art can according to need progress
The design of degree.
Specifically, the material of occlusion part 12, mask frame 11 and linking arm 13 is identical.Using identical material, mask plate can
It is formed by one-time process, production is simple, and mask plate is structure as a whole, and intensity is big.Certainly, the material of mask plate can not also
It together, can also be separate structure, the disclosure is without limitation.
Display device layer is set in step S220, by mask plate far from substrate side, and with display device interlayer every default
The position of distance, occlusion part and opening is correspondingly arranged, and the orthographic projection in substrate of being open is located at occlusion part in substrate just
In projection.
Specifically, mask plate can by clamp, hang set, the modes such as bracket are suspended at the top of display device layer, and make to hide
Stopper 12 and the position of opening 17 are corresponding, so that 17 orthographic projections on the substrate 14 that are open are located at occlusion part 12 on the substrate 14
In orthographic projection, occlusion part 12 is avoided to misplace with opening 17 or do not block opening 17 completely, and then from avoiding the shape in opening 17
Occur at the case where inorganic layer.Wherein, mask plate and display device interlayer are mask plate and display device layer phase at a distance from
The distance between the surface of mutual direction, the spacing distance can also be smaller than 1mm certainly or be greater than 20mm between 1mm-20mm,
The disclosure is without limitation.In addition, occlusion part 12 and opening 17 are rounded, the diameter of occlusion part 12 and the diameter of opening 17
Ratio is between 1~1.1, i.e., opening 17 can be completely covered in occlusion part 12.
Side in step S230, from mask plate far from display device layer forms the first inorganic layer by deposition.
Specifically, it can be formed from mask plate far from the side of display device layer by using atomic vapor deposition first inorganic
Layer.Using when atomic vapor deposition plated film under mask plate edge, and the width of the linking arm 13 of mask plate larger to external diffusion
Smaller, using atomic vapor deposition, the characteristic can be such that the inorganic layer under 13 two sides of linking arm connects, so that under support arm
The thickness of the first inorganic layer can satisfy design requirement.In addition, opening 17, i.e. occlusion part can be completely covered in occlusion part 12
12 size for being sized slightly larger than opening 17 can be avoided using outside under atomic vapor deposition plated film Shi Yincong mask plate edge
The case where spreading and entering opening 17 occurs, and further improves the reliability of packaging method.
In one embodiment, encapsulated layer further includes organic layer.As shown in figure 4, formation organic layer includes:
Step S240, organic layer is formed on surface of first inorganic layer far from substrate.
Specifically, organic layer can be formed on a side surface of first inorganic layer far from substrate 14 by modes such as printings,
And opening 17 is enable to expose.The setting of organic layer can play the role of stress release and planarization, be able to ascend display
Performance after panel encapsulation.
In one embodiment, encapsulated layer further includes the second inorganic layer.As shown in figure 5, the second inorganic layer of formation includes:
Step S250, by mask plate be set to side of the organic layer far from substrate, and with organic layer interval pre-determined distance, block
Portion and the position of opening are correspondingly arranged, and the orthographic projection being open in substrate is located at occlusion part in the orthographic projection in substrate;
Step S260, the side from mask plate far from organic layer forms the second inorganic layer by deposition.
Specifically, the setting of the first inorganic layer and the second inorganic layer can play the function of water oxygen barrier, improve display
Performance after panel encapsulation.After completing encapsulation, opening 17 can be exposed from the first inorganic layer, organic layer and the second inorganic layer, avoid
It is subsequent also to be fallen the region etch for the 17 corresponding encapsulated layers that are open by techniques such as photoetching, dry etchings, it avoids waterline and causes
The problem of package failure, reduces technological operation, improves product yield.
The encapsulated layer that the disclosure provides is not limited only to above-mentioned three layers, may also include more organic layers and inorganic layer, and
Other encapsulated layers, the disclosure are without limitation.
This example embodiment additionally provides a kind of display panel.The display panel using above-mentioned packaging method manufacture and
At.Display panel can be display panel, and its advantages can refer to the beneficial effect of the packaging method of above-mentioned display panel, herein
It repeats no more.
This example embodiment additionally provides a kind of display device.The display device includes above-mentioned display panel, display dress
Setting can show that equipment, its advantages can refer to above-mentioned display for mobile phone, tablet computer, laptop, advertisement screen, TV etc.
The beneficial effect of the packaging method of panel, details are not described herein.
It should be noted that although describing each step of method in the disclosure in the accompanying drawings with particular order, this is simultaneously
Undesired or hint must execute these steps in this particular order, or have to carry out the ability of step shown in whole
Realize desired result.Additional or alternative, it is convenient to omit multiple steps are merged into a step and executed by certain steps,
And/or a step is decomposed into execution of multiple steps etc..
Those skilled in the art after considering the specification and implementing the invention disclosed here, will readily occur to its of the disclosure
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes or
Person's adaptive change follows the general principles of this disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.The description and examples are only to be considered as illustrative, and the true scope and spirit of the disclosure are by appended
Claim is pointed out.
Claims (10)
1. a kind of mask plate characterized by comprising
Occlusion part;
Mask frame surrounds the occlusion part;
Linking arm connects the mask frame and the occlusion part, and the width of the linking arm is between 0.1mm~5mm.
2. mask plate according to claim 1, which is characterized in that there are two the linking arm settings, is all connected with described cover
Mould frame and the occlusion part.
3. mask plate according to claim 2, which is characterized in that the angle of two linking arms 60 °~180 ° it
Between.
4. mask plate according to claim 1 or 2, which is characterized in that the length of the linking arm is not more than 2cm.
5. a kind of packaging method of display panel characterized by comprising
A substrate for being formed with display device layer is provided, the display device layer has opening;
Encapsulated layer is formed on surface of the display device layer far from the substrate side, the encapsulated layer includes first inorganic
Layer, forming first inorganic layer includes:
A mask plate is provided, the mask plate includes occlusion part, mask frame and linking arm, and the mask frame surrounds the screening
Stopper, the linking arm connect the mask frame and the occlusion part;Wherein, the width of the linking arm is in 0.1mm~5mm
Between;
The mask plate is set to the side of the display device layer far from the substrate, and with the display device interlayer every pre-
If distance, the occlusion part and the position of the opening are correspondingly arranged, and the orthographic projection of the opening on the substrate is located at
In the orthographic projection of the occlusion part on the substrate;
Side from the mask plate far from the display device layer forms first inorganic layer by deposition.
6. packaging method according to claim 5, which is characterized in that the encapsulated layer further includes organic layer, described in formation
Organic layer includes:
The organic layer is formed on the surface of first inorganic layer far from the substrate.
7. packaging method according to claim 6, which is characterized in that the encapsulated layer further includes the second inorganic layer, is formed
Second inorganic layer includes:
By the mask plate be set to side of the organic layer far from the substrate, and with organic layer interval pre-determined distance,
The occlusion part and the position of the opening are correspondingly arranged, and the orthographic projection of the opening on the substrate is located at described block
In the orthographic projection of portion on the substrate;
Side from the mask plate far from the organic layer forms second inorganic layer by deposition.
8. packaging method according to claim 5, which is characterized in that the occlusion part and rounded, the institute of the opening
The diameter of occlusion part and the diameter ratio of the opening are stated between 1~1.1.
9. a kind of display panel, which is characterized in that be fabricated using the described in any item packaging methods of claim 1-8.
10. a kind of display device, which is characterized in that including display panel as claimed in claim 9.
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JP2022541025A (en) * | 2019-07-31 | 2022-09-21 | 昆山国顕光電有限公司 | Mask assembly and display device |
US11957035B2 (en) * | 2019-07-31 | 2024-04-09 | Kunshan Go-Visionox Opto-Electronics Co., Ltd. | Mask assembly and display device including island shelters contacting substrate through mounting holes |
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