CN109585509A - Display panel, display device and the method for making display panel - Google Patents
Display panel, display device and the method for making display panel Download PDFInfo
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- CN109585509A CN109585509A CN201811447669.XA CN201811447669A CN109585509A CN 109585509 A CN109585509 A CN 109585509A CN 201811447669 A CN201811447669 A CN 201811447669A CN 109585509 A CN109585509 A CN 109585509A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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Abstract
The present invention provides a kind of display panel, display device and the method for making display panel.The display panel includes substrate, and substrate includes the organic film, inorganic film and metal layer being cascading；Substrate is formed with viewing area and is connected to the bent area of edge of display area；Opening is formed on metal layer in bent area, opening extends in inorganic film, and metal layer is divided into a plurality of metal routing.Display panel, display device and the method for making display panel provided by the invention, the metal routing for avoiding opening two sides is connected with each other and short circuit occurs, and reduce the thickness of the inorganic film at aperture position, improve display panel flexibility, it avoids crackle to extend between the metal layer of opening two sides, improves the reliability of display panel and display device.
Description
Technical field
The present invention relates to display device technology field more particularly to a kind of display panels, display device and production display surface
The method of plate.
Background technique
Organic Light Emitting Diode (Organic Light Emitting Diode, abbreviation OLED) display device has because of it
Self-luminous, luminous efficiency is high, the response time is short, fine definition and the advantages that high contrast, becomes current most potential
Display device.Existing OLED display is broadly divided into AMOLED (Active Matrix OLED) and PMOLED (Passive
Matrix OLED) two major classes, wherein due to AMOLED low manufacture cost, operating temperature range is big, can be used for portable device
DC driven, can be used as the advantages that large scale display device high-definition, increasingly approved by people, also become OLED
The mainstream development trend of display device.How the hot spot that one kind preferably OLED display is increasingly becoming research is provided.
Summary of the invention
The present invention provides a kind of display panel, display device and the method for making display panel, to solve in the prior art
Some problems of OLED display.
The present invention provides a kind of display panel, including substrate, and the substrate includes the organic film being cascading, nothing
Machine film layer and metal layer.
The substrate is formed with viewing area and is connected to the bent area of the edge of display area.
Opening is formed on the metal layer in the bent area, the opening extends in the inorganic film, and
And the metal layer is divided into a plurality of metal routing.
Display panel as described above, wherein the opening is through the inorganic film and terminates in the organic film.
Display panel as described above, wherein the thickness of the inorganic film in the viewing area is greater than the bending
The thickness of the inorganic film in area.
Display panel as described above, wherein the inorganic film include successively contact and be stacked it is first inorganic
Film layer and the second inorganic film, first inorganic film are located in the viewing area and the bent area, second nothing
Machine film layer is located in the viewing area.
Display panel as described above, wherein first inorganic film include successively contact and be stacked it is multiple
The material of first sub- inorganic film, the two neighboring first sub- inorganic film is different, and the opening is at least through described in one
First sub- inorganic film.
Preferably, first inorganic film is arranged alternately by the sublayer of two kinds of unlike materials.
Display panel as described above, wherein second inorganic film include successively contact and be stacked it is multiple
The material of second sub- inorganic film, the two neighboring second sub- inorganic film is different.
Display panel as described above, wherein side is formed with organic layer on the metal layer, and one of the organic layer
Divide in the opening.
The present invention also provides a kind of display devices, including display panel as described above.
The present invention also provides a kind of methods for making display panel, comprising: inorganic film is formed on organic film；Institute
It states and forms metal layer on inorganic film；The metal layer being located in bent area is performed etching to form opening, and described opened
The metal layer is divided into a plurality of metal routing by mouth；Corresponded to the inoranic membrane of the aperture position by means of the opening removal
Layer.
Method as described above, wherein forming inorganic film on the organic film includes: on the organic film
Form the first inorganic film；The second inorganic film is formed on first inorganic film；First inorganic film and described
Second inorganic film constitutes the inorganic film；Etching removes second inorganic film in the bent area；Wherein, described
First inorganic film includes the multiple first sub- inorganic films, and the material of the two neighboring first sub- inorganic film is different, described
Second inorganic film includes the multiple second sub- inorganic films, and the material of the two neighboring second sub- inorganic film is different.
Display panel, display device and the method for making display panel provided by the invention, by the way that substrate, substrate packet is arranged
Include the organic film, inorganic film and metal layer being cascading；Substrate is formed with viewing area and is connected to viewing area
The bent area at edge；Opening is formed on metal layer in bent area, opening extends in inorganic film, and metal layer is drawn
It is divided into a plurality of metal routing, the metal routing for avoiding opening two sides is connected with each other and short circuit occurs, and reduces opening position
The thickness for setting the inorganic film at place improves display panel flexibility, avoids crackle and occurs between the metal layer of opening two sides
Extension, improves the reliability of display panel and display device.
Detailed description of the invention
Below in conjunction with attached drawing, detailed description of the preferred embodiments, it should be appreciated that retouches in this place
The specific embodiment stated is merely to illustrate and explain the present invention, and the present invention is not limited to following specific embodiments.
Fig. 1 is that the invention shows the overall structure diagrams one of panel；
Fig. 2 is that the invention shows the overall structure diagrams two of panel；
Fig. 3 is the expanded schematic diagram of Fig. 2；
Fig. 4 is the structural schematic diagram of bent area embodiment one in Fig. 3；
Fig. 5 is the structural schematic diagram of bent area embodiment two in Fig. 3；
Fig. 6 is that the invention shows the cross-sectional views of panel embodiments one；
Fig. 7 is that the invention shows the cross-sectional views of panel embodiments two；
Fig. 8 is that the invention shows the cross-sectional views of panel embodiments three；
Fig. 9 is that the invention shows the cross-sectional views of panel embodiments four；
Figure 10 is that the invention shows the cross-sectional views of panel embodiments five；
Figure 11 is the structural schematic diagram of bent area embodiment three in Figure 10；
Figure 12 is the structural schematic diagram of bent area example IV in Figure 10.
Description of symbols:
100: organic film；
200: inorganic film；
210: the first inorganic films；
211: the first sub- inorganic films；
220: the second inorganic films；
221: the second sub- inorganic films；
300: metal layer；
310: metal routing；
400: opening；
500: viewing area；
600: bent area.
Specific embodiment
Below in conjunction with attached drawing, detailed description of the preferred embodiments, it should be appreciated that retouches in this place
The specific embodiment stated is merely to illustrate and explain the present invention, and the present invention is not limited to following specific embodiments.
Fig. 1 is that the invention shows the overall structure diagrams one of panel；Fig. 2 is that the invention shows the overall structures of panel to show
It is intended to two；Fig. 3 is the expanded schematic diagram of Fig. 2；Fig. 4 is the structural schematic diagram of bent area embodiment one in Fig. 3.
Please refer to figs. 1 to 4, and the present embodiment provides a kind of display panel, including substrate, substrate includes being cascading
Organic film 100, inorganic film 200 and metal layer 300；Substrate is formed with viewing area 500 and is connected to viewing area 500
The bent area 600 at edge；Opening 400 is formed on metal layer 300 in bent area 600, opening 400 extends to inorganic film
In 200, and metal layer 300 is divided into a plurality of metal routing 310.
Specifically, display panel can be OLED display panel, and display panel can have substrate, and substrate includes in Fig. 4
Organic film 100, inorganic film 200 and the metal layer 300 being cascading from top to bottom.
Wherein, organic film 100 can be the film layer by there is the organic materials such as polyimides to constitute, and organic film 100 can
With with certain flexibility, so that display panel is easy to bend.
Inorganic film 200 can be the film layer being made of inorganic material such as silicon oxide or silicon nitrides, by the way that inoranic membrane is arranged
Metal layer 300 200 and is formed on inorganic film 200 by layer, is formed directly on organic film 100 compared to metal layer 300,
The adhesive force that metal layer 300 can be improved, when display panel being avoided to be bent, metal layer 300 is separated or is shelled with other layers
From.
Metal layer 300 can be the film layer being made of conductive materials such as silver, aluminium, aerdentalloy.Metal layer 300 can pass through
Patterned process forms multiple metal routings 310, to provide various signals for display panel.Here before patterning can be
Opening 400 described in text.
Viewing area 500 and bent area 600 are all a certain regions in substrate.Therefore, viewing area 500 and bent area 600 be all
It may include the organic film 100, inorganic film 200 and metal layer 300 being cascading.It can battle array on viewing area 500
Column-shaped is placed with multiple pixels, and each pixel can independently shine, so that viewing area 500 can show preset picture.
Bent area 600 can be located at the edge of viewing area 500, it will be understood that viewing area 500 can be located at entire display dress
The middle position set, bent area 600 can connect in at least partly edge of viewing area 500.Such as shown in Fig. 1, viewing area
500 can be square structure, and bent area 600 can be for around the ring structure of all marginal positions in viewing area 500.In another example figure
Shown in 2, bent area 600 be can be set in one of edge of viewing area 500.Bent area 500 is processed in display panel
Need to occur the bending of certain angle in journey, so as to be formed with Curved screen or the display device shielded comprehensively.
Metal layer 300 in bent area 600 is formed with opening 400, and opening 400 can run through metal layer 300, and prolong
It reaches in inorganic film 200, so that 400 two sides of opening form metal routing 310.Opening 400 quantity can be
It is multiple, shape can also there are many, thus make metal layer 300 formed different shape (such as fold-line-shaped, linear type etc.) it is more
Metal routing 310.
During manufacturing display panel, organic film layer 100, inorganic film 200 and metal layer can be first sequentially formed
300, then metal layer 300 is performed etching by patterned process, to form opening 400, and etches away the corresponding position of opening 400
The part inorganic film 200 set.Opening 400 extends in inorganic film 200, it is ensured that all gold in removal opening 400
Belong to layer 300, the metal routing 310 for 400 two sides that are open is contactless, avoids that short circuit phenomenon occurs between metal routing 310.Meanwhile
Part inorganic film 200 is removed, the flexibility of the bent area 600 of display panel can be improved, avoids display panel hair in bending
Raw fracture.In addition, since the inorganic film 200 at opening 400 is relatively thin, when display panel bending, if 400 sides of opening
It is cracked in metal routing 310, crackle is difficult to expand to the other side of opening 400 by inorganic film 200, avoids opening
The metal routing 310 of 400 other sides is broken, and improves the service life of display panel.
Display panel provided in this embodiment, by the way that substrate is arranged, substrate includes the organic film being cascading, nothing
Machine film layer and metal layer；Substrate is formed with viewing area and is connected to the bent area of edge of display area；Metal in bent area
Opening is formed on layer, opening extends in inorganic film, and metal layer is divided into a plurality of metal routing, avoids opening
The metal routing of two sides is connected with each other and short circuit occurs, and reduces the thickness of the inorganic film at aperture position, improves
Display panel is flexible, avoids crackle and extends between the metal layer of opening two sides, improves display panel and display dress
The reliability set.
Fig. 5 is the structural schematic diagram of bent area embodiment two in Fig. 3；Referring to FIG. 5, opening 400 runs through inorganic film 200
And terminate in organic film 100.
Specifically, at once etching off remove opening 400 corresponding positions metal layer 300 after, can also remove in the position
All inorganic films 200 thoroughly avoid crackle through inorganic film so that the inorganic film 200 of 400 two sides of opening is contactless
200 expand to the other side from the side of opening 400, while can cause chamber contamination problem to avoid organic film 100 is etched into.
Fig. 6 is that the invention shows the cross-sectional views of panel embodiments one, referring to FIG. 6, on the basis of the above embodiments, showing
Show that the thickness of the inorganic film 200 in area 500 is greater than the thickness of the inorganic film 200 in bent area 600.
Specifically, in Fig. 6, the region on the left of center line is viewing area 500, and the region on the right side of center line is bent area 600,
Thickness can be for perpendicular to the size on the direction of organic film 100, thickness direction can be the up and down direction in figure in Fig. 6.
The thickness of inorganic film 200 can be greater than the thickness of the inorganic film 200 in bent area 600 in viewing area 500.For example, inorganic
Film layer 200 can be made of same material, and when forming inorganic film 200, it is aobvious covering can first to be formed on organic film 100
Then the inorganic film 200 for showing a flood of area 500 and bent area 600 etches away the part inoranic membrane in bent area 600
Layer 200, so that the thickness of inorganic film 200 can be greater than the inorganic film 200 in bent area 600 in viewing area 500
Thickness, inventors have found that by the thickness for reducing the inorganic film 200 in bent area 600, it can be to avoid bent area 600 curved
It is broken when folding, further increases the service life of display panel.
Fig. 7 is that the invention shows the cross-sectional views of panel embodiments two；Referring to FIG. 7, the present embodiment is the embodiment to Fig. 6
In inorganic film 200 improve, inorganic film 200 include the first inorganic film 210 for successively contacting and be stacked with
And second inorganic film 220, the first inorganic film 210 are located in viewing area 500 and bent area 600, the second inorganic film 220
In in viewing area 500.
Specifically, inorganic film 200 may include the first inorganic film 210 and the second inorganic film 220, the second inoranic membrane
220 contact of layer is arranged on the first inorganic film 210, and the first inorganic film 210 and the second inorganic film 220 can be by different
Inorganic material is constituted, such as the first inorganic film 210 can be silicon nitride, and the second inorganic film 220 can be silica.
When forming inorganic film 200, one layer of first inorganic film 210 can be first formed on organic film 100, then,
One layer of second inorganic film 220 is formed on the first inorganic film 210.First inorganic film 210 and the second inorganic film 220 are all
Cover viewing area 500 and bent area 600.Then the second inorganic film 220 in bent area 600 is etched away, so that bent area 600
In only exist the first inorganic film 210.Since the first inorganic film 210 and the second inorganic film 220 are unlike material, the two
Etch product is different, can be by the change of etch product to determine whether to etch into the first inorganic film 210 and second inorganic
The intersection of film layer 220, the accurate interface grabbed between the first inorganic film 210 and the second inorganic film 220, to accurately grab
Etching curve is taken, etch thicknesses are accurately controlled, avoids the occurrence of the problem of organic film 100 is etched and leads to chamber contamination.
Fig. 8 is that the invention shows the cross-sectional views of panel embodiments three；Referring to FIG. 8, further, the first inorganic film
211 include the multiple first sub- inorganic films 211 for successively contacting and being stacked, two neighboring first sub- inorganic film 211
Material is different, and opening 400 at least runs through a first sub- inorganic film 211.
Specifically, the first sub- inorganic film 211 that the first inorganic film 210 can be made of multiple and different materials successively layer
It is folded to be formed, since the two neighboring first sub- inorganic film 211 is made of unlike material, so as to provide multiple crawl etchings eventually
The interface of point, this is because can be by analysis etch product to determine whether reaching two neighboring first sub- inorganic film 211
Interface, and then realize control etch thicknesses, avoid etching into organic film 100 and causing chamber contamination.
Preferably, the first inorganic film 210 is arranged alternately by the sublayer of two kinds of unlike materials.For example, first is inorganic
Film layer 210 can be arranged by silicon oxide layer or silicon nitride layer are overlapping, and each silicon oxide layer or each silicon nitride layer are constituted
One the first sub- inorganic film 211, so as to reduce processing cost.
Fig. 9 is that the invention shows the cross-sectional views of panel embodiments four；Incorporated by reference to Fig. 9, the second inorganic film 220 includes successively
The material of the multiple second sub- inorganic films 221 for contacting and being stacked, two neighboring second sub- inorganic film 221 is different.
Specifically, the second sub- inorganic film 221 that the second inorganic film 220 can also be made of multiple and different materials is successively
Stacking is formed, since the two neighboring second sub- inorganic film 221 is made of unlike material, so as to provide multiple crawl etchings
The interface of terminal, this is because can be by analysis etch product to determine whether reaching two neighboring second sub- inorganic film
221 interface, and then realize control etch thicknesses, it avoids etching into organic film 100 and causing chamber contamination.
Preferably, the second inorganic film 220 is arranged alternately by the sublayer of two kinds of unlike materials.For example, second is inorganic
Film layer 220 can be arranged by silicon oxide layer or silicon nitride layer are overlapping, and each silicon oxide layer or each silicon nitride layer are constituted
One the second sub- inorganic film 221, so as to reduce processing cost.
In addition, the first inorganic film 210 is the film layer that homogenous material is constituted in Fig. 9, Figure 10 is that the invention shows panel realities
The cross-sectional view for applying example five, incorporated by reference to Figure 10, in the present embodiment, the first inorganic film 210 is by the multiple first sub- inorganic films
211 multilayered structures constituted, the second inorganic film 220 are also the multilayered structure being made of the multiple second sub- inorganic films 221, position
The second sub- inorganic film 221 in bottom and the first sub- inorganic film 211 positioned at the top can be by different material structures
At.
Further, when the inorganic film 200 in bent area 600 includes multiple first sub- inorganic films 211, opening
400 can run through at least one first sub- inorganic film 211, and Figure 11 is the structural schematic diagram of bent area embodiment three in Figure 10；
Figure 11 is please referred to, the first sub- inorganic film 211 may include two layers in figure, and opening 400 can be only inorganic through one layer of first son
Film layer 211 both ensure that short circuit phenomenon will not occur for the metal routing 310 of 400 two sides of opening.Meanwhile and improving display surface
The flexibility of plate bent area 600 avoids display panel from being broken in bending.Furthermore it is also possible to which Crack prevention is from opening 400
Side expands to the other side, improves the service life of display panel.
Figure 12 is the structural schematic diagram of bent area example IV in Figure 10.Figure 12 is please referred to, opening 400 may also extend through institute
The sub- inorganic film 211 of first had.I.e. on the basis of Figure 11, the of 100 top of organic film in Figure 11 can also be etched away
One sub- inorganic film 211, forms the structure of Figure 12.
In the present embodiment, the first sub- inorganic film 211 with a thickness of determine value, multiple first sub- 211 materials of inorganic film
Matter is different, after grabbing the etching terminal interface between two the first sub- inorganic films 211, can determine institute in opening 400
The thickness of remaining first sub- inorganic film 211, and the thickness is less than the thickness of inorganic film in the prior art, etches error
Smaller, etch thicknesses controllable precise can reduce while further decreasing 200 thickness of inorganic film and etch into organic film
The probability of layer 100, avoids chamber contamination.
On the basis of the above embodiments, organic layer is formed with above metal layer 300, a part of organic layer, which is in, to be opened
In mouthful.Organic layer is also possible to the film layer of the organic materials such as polyimides composition.It, can be by bent area by forming organic layer
The position of 600 neutral surface in bending is adjusted in metal layer 300, to reduce the risk that metal layer 300 is broken.Its
In, neutral surface refers to: when bent area 600 is bent, elongate layer and the layer institute for neither extending nor shortening for shortening layer intersection
Face.
The present embodiment also provides a kind of display device, including display panel.The structure and function of display panel and above-mentioned reality
It is identical to apply example, can specifically refer to above-described embodiment, then this is repeated no more.
Display device provided in this embodiment, by the way that substrate is arranged, substrate includes the organic film being cascading, nothing
Machine film layer and metal layer；Substrate is formed with viewing area and is connected to the bent area of edge of display area；Metal in bent area
Opening is formed on layer, opening extends in inorganic film, and metal layer is divided into a plurality of metal routing, avoids opening
The metal routing of two sides is connected with each other and short circuit occurs, and reduces the thickness of the inorganic film at aperture position, improves
Display panel is flexible, avoids crackle and extends between the metal layer of opening two sides, improves display panel and display dress
The reliability set.
The present embodiment also provides a kind of method for making display panel, comprising the following steps:
Step 1, inorganic film 200 is formed on organic film 100.
Step 2, metal layer 300 is formed on inorganic film 200.
Step 3, the metal layer 300 being located in bent area 600 is performed etching to form opening 400, and opening 400 will be golden
Belong to layer 300 and is divided into a plurality of metal routing 310.
Step 4, the inorganic film 200 of 400 positions of opening is corresponded to by means of 400 removal of opening.
Wherein, the material of organic film 100, inorganic film 200 and metal layer 300 can refer to above-described embodiment, have
Machine film layer 100, inorganic film 200 and metal layer 300 can add by the way that deposition, vapor deposition or sputtering etc. are common in the art
Work mode is formed.
Display panel may include viewing area 500 and bent area 600, when bent area 600 forms opening 400, opening 400
Metal layer 300 at position carried out quarter, i.e., not only completely removes metal layer 300, the also inorganic film to 300 lower section of metal layer
200 have carried out partial etching, both ensure that short circuit phenomenon will not occur for the metal routing 310 of 400 two sides of opening.Meanwhile it and mentioning
The high flexibility of display panel, avoids display panel from being broken in bending.Furthermore it is also possible to Crack prevention from opening 400
The metal routing 310 of side expand to the metal routing 310 of the other side, improve the service life of display panel.
Preferably, step 1 can be with including the following steps:
Step 11, the first inorganic film 210 is formed on organic film 100.
Step 12, the second inorganic film 220 is formed on the first inorganic film 210；First inorganic film 210 and the second nothing
Machine film layer 220 constitutes inorganic film 200.
Step 13, the second inorganic film 220 in etching removal bent area 600.
Specifically, when forming inorganic film 200, one layer of first inorganic film can be first formed on organic film 100
210, then, one layer of second inorganic film 220 is formed on the first inorganic film 210, the first inorganic film 210 and second is inorganic
Film layer 220 all covers viewing area 500 and bent area 600, then etches away the second inorganic film 220 in bent area 600, so that
The first inorganic film 210 is only existed in bent area 600.Since the first inorganic film 210 and the second inorganic film 220 are different materials
The etch product of matter, the two is different, can be by the change of etch product to determine whether etching into 210 He of the first inorganic film
The intersection of second inorganic film 220, the accurate interface grabbed between the first inorganic film 210 and the second inorganic film 220, from
And etching terminal is accurately grabbed, etch thicknesses are accurately controlled, organic film 100 is avoided the occurrence of and is etched and leads to chamber contamination
Problem.
Further, the first inorganic film 210 includes the multiple first sub- inorganic films 211, two neighboring first sub- nothing
The material of machine film layer 211 is different, and the second inorganic film 220 includes the multiple second sub- inorganic films 221, two neighboring second sub- nothing
The material of machine film layer 221 is different.The multiple first sub- inorganic films 211 can be sequentially formed on organic film 100, then existed
The multiple second sub- inorganic films 221 are formed, so as to provide multiple interfaces for grabbing etching terminal, to avoid etched
Some interface is missed in journey and causes to etch into the problem of organic film 100 pollutes chamber generation.
In addition, step 4 can also include: to remove at least one first sub- inorganic film 211 by means of opening 400.To
Metal layer 300 is not only completely removed, partial etching also has been carried out to the inorganic film 200 of 300 lower section of metal layer, both ensure that out
Short circuit phenomenon will not occur for the metal routing 310 of 400 two sides of mouth.Meanwhile and improve the flexibility of display panel, avoid display surface
Plate is broken in bending.Furthermore it is also possible to which Crack prevention expands to the other side from the side of opening 400, display is improved
The service life of panel.
In addition, step 4 can also remove the sub- inorganic film 211 of all first, due to that can grab the boundary of etching terminal
Face, so that step etching error is smaller, etch thicknesses controllable precise can further decrease 200 thickness of inorganic film
Meanwhile the probability for etching into organic film 100 is reduced, avoid chamber contamination.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include at least one this feature.In the description of the present invention, " multiple " are meant that at least two, such as two, three
It is a etc., unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected or can communicate each other；It can be directly connected, can also indirectly connected through an intermediary, it can be with
It is the interaction relationship of the connection or two elements inside two elements, unless otherwise restricted clearly.For this field
For those of ordinary skill, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature " upper " or " under " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and the fisrt feature " above " that can be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be the
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the above description, reference term " one embodiment ", " some embodiments ", " example ", " specific example " or "
" equal description means that particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained in some examples
In at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms are necessarily directed to
Be identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can any one or it is more
It can be combined in any suitable manner in a embodiment or example.In addition, without conflicting with each other, those skilled in the art can
The feature of different embodiments or examples described in this specification and different embodiments or examples to be combined.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of display panel, which is characterized in that including substrate, the substrate includes the organic film being cascading, nothing
Machine film layer and metal layer；
The substrate is formed with viewing area and is connected to the bent area of the edge of display area；
Opening is formed on the metal layer in the bent area, the opening extends in the inorganic film, and institute
It states metal layer and is divided into a plurality of metal routing.
2. display panel according to claim 1, which is characterized in that the opening is through the inorganic film and terminates in
The organic film.
3. display panel according to claim 1, which is characterized in that the thickness of the inorganic film in the viewing area
Greater than the thickness of the inorganic film in the bent area.
4. display panel according to claim 3, which is characterized in that the inorganic film includes successively contacting and being laminated to set
The first inorganic film and the second inorganic film set, first inorganic film are located at the viewing area and the bent area
Interior, second inorganic film is located in the viewing area.
5. display panel according to claim 4, which is characterized in that first inorganic film includes successively contact and layer
The material of multiple first sub- inorganic films of folded setting, the two neighboring first sub- inorganic film is different, and the opening is at least
Through a first sub- inorganic film,
Preferably, first inorganic film is arranged alternately by the sublayer of two kinds of unlike materials.
6. display panel according to claim 4, which is characterized in that second inorganic film includes successively contact and layer
The material of multiple second sub- inorganic films of folded setting, the two neighboring second sub- inorganic film is different.
7. display panel according to claim 1-6, which is characterized in that side has been formed on the metal layer
A part of machine layer, the organic layer is in the opening.
8. a kind of display device, which is characterized in that including the described in any item display panels of claim 1-7.
9. a kind of method for making display panel characterized by comprising
Inorganic film is formed on organic film；
Metal layer is formed on the inorganic film；
The metal layer being located in bent area is performed etching to form opening, and the metal layer is divided by the opening
A plurality of metal routing；
Corresponded to the inorganic film of the aperture position by means of the opening removal.
10. according to the method described in claim 9, it is characterized in that, formation inorganic film includes: on the organic film
The first inorganic film is formed on the organic film；
The second inorganic film is formed on first inorganic film；First inorganic film and the second inorganic film structure
At the inorganic film；
Etching removes second inorganic film in the bent area；Wherein, first inorganic film includes multiple first
The material of sub- inorganic film, the two neighboring first sub- inorganic film is different, and second inorganic film includes multiple second
The material of sub- inorganic film, the two neighboring second sub- inorganic film is different.
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| WO2020108017A1 (en) * | 2018-11-29 | 2020-06-04 | 昆山国显光电有限公司 | Display panel, display device, and method for manufacturing substrate for display panel |
| CN115331548A (en) * | 2022-07-21 | 2022-11-11 | 武汉天马微电子有限公司 | Display module, manufacturing method thereof and display device |
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| CN114079021A (en) * | 2020-08-20 | 2022-02-22 | 上海和辉光电股份有限公司 | Low-temperature polycrystalline silicon frame and OLED screen |
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