CN109860011A - The X-ray tube of integrated ionic pump - Google Patents

The X-ray tube of integrated ionic pump Download PDF

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Publication number
CN109860011A
CN109860011A CN201811490794.9A CN201811490794A CN109860011A CN 109860011 A CN109860011 A CN 109860011A CN 201811490794 A CN201811490794 A CN 201811490794A CN 109860011 A CN109860011 A CN 109860011A
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ray
ionic pump
cathode
anode
transformer
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CN201811490794.9A
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CN109860011B (en
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姚智伟
孙泳海
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Abstract

A kind of X-ray tube of integrated ionic pump, including power supply unit, ion pump module and X-ray module;Said supply unit includes low-tension supply, and the low-tension supply connects the primary coil of a transformer;The X-ray module includes that anode and X-ray generation cathode occur for X-ray, and anode occurs for the X-ray and X-ray occurs cathode and connect by coupling circuit or voltage-multiplying circuit with the both ends of the first secondary coil of the transformer;The ion pump module includes vertically disposed ionic pump anode and ionic pump cathode, and the ionic pump anode and ionic pump cathode are connect by coupling circuit or voltage-multiplying circuit with the both ends of the second subprime coil of the transformer.The present invention integrates the high voltage power supply of the high voltage power supply of vacuum ion pump and x-ray source, so that the X-ray tube of integrated ionic pump provided by the invention has the advantages that small in size, light-weight, structure is simple, the service life is long.

Description

The X-ray tube of integrated ionic pump
Technical field
The present invention relates to Microfocus X-ray x-ray imaging, X-ray non-destructive testing, X-ray diffraction, X-ray fluorescence spectra and ion A kind of technical fields such as pump, and in particular to X-ray tube of integrated ionic pump.
Background technique
X-ray is that the metallic target for bombarding high atomic weight by high-velocity electrons generates.Typical X-ray tube includes metal sun Pole target, cathode electronics source, high voltage power supply.Traditional X-ray tube generates electron beam using heat emission tungsten cathode.
In the prior art, there is a kind of X-ray generator of small-sized middle low-power.The device is by pulsed high voltage generator Become one as shown in FIG. 1A and 1B with x-ray generation unit.The magnetic field generated by transformer is to Electron Beam Focusing.Packet It includes low-tension supply and anode 203 occurs for control circuit 201, glass evacuated room 213, X-ray, cathode 204, transformation occur for X-ray Device primary coil 211, the first secondary coil 205, cylinder-shaped magnetic core of transformer 206, the first rectifier diode 207 and the first coupling Capacitor 208.
Whole device is powered by the low-voltage dc power supply or battery of 12 to 24 volts, and low-tension supply and control circuit 201 generate The high-frequency signal equal with transformer resonance frequency is 72kHz in the present embodiment.Inside low-tension supply and control circuit 201, The switching for the H-shaped full-bridge circuit control power supply that high-frequency signal is made up of semiconductor field generates D' Arsonval current and is Transformer-supplied.Low-tension supply and control circuit 201 are placed in outside glass evacuated room 213, by lead and glass evacuated room 213 Transformer be connected.
Cathode 204 occurs for the X-ray based on Flied emission using the carbon nano pipe array of vertical arrangement, and carbon nanotube top is straight About 5 to 20 nanometers of diameter, length is 5 to 10 microns.10 microns of spacing.Cathode 204 occurs for the X-ray based on Flied emission by more than eight Thousand carbon nanotubes are constituted, and the X-ray based on Flied emission occurs about 0.8 square millimeter of 204 effective area of cathode.It can provide and be more than 20 milliamperes of pulsed field emission current.X-ray occur part anode 203 can for the metal of high atomic weights such as tungsten, molybdenum, gold or The high metal of the thermal conductivitys such as copper, silver.It can also be penetrated the metal of high atomic weight as the anode of target insertion high thermal conductivity with improving X Line yield, while improving heat dissipation performance.Anode occur for X-ray be made into thin cylindric to be placed in cylinder-shaped magnetic core of transformer 206 Center can reach best because in the present embodiment, the magnetic flux density at the center of the cylindrical shape magnetic core of transformer 213 is maximum Focusing effect.X-ray occurs anode 204 and cross-sectional area as small as possible is wanted to cause anode to generate heat to avoid eddy current.
The advantages that device has structure simple, reliable performance, the service life is long.But this kind of X-ray generator is in reality It needs to be cooperated with vacuum ion pump in use process, and the prior art can not be by X-ray generator and vacuum ion pump It is integrated, so that X-ray generator and vacuum ion pump is needed to be respectively necessary for respective power supply unit in actual use, So that area occupied is excessive and inconvenient when using.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is that overcoming X-ray generator in the prior art and vacuum ionic Pump needs two power supply units in use, and area occupied is excessive and inconvenient when use.
For this purpose, providing a kind of X-ray tube of integrated ionic pump, including power supply unit, ion pump module and X-ray mould Block;
Said supply unit includes low-tension supply, and the low-tension supply connects the primary coil of a transformer;
The X-ray module includes that anode and X-ray generation cathode occur for X-ray, and anode occurs for the X-ray and X is penetrated Both ends of the cathode by any one in coupling circuit or voltage-multiplying circuit with the first secondary coil of the transformer occur for line Connection;
The ion pump module includes vertically disposed ionic pump anode and ionic pump cathode, the ionic pump anode and from Son pump cathode is connected by the both ends of any one and the second subprime coil of the transformer in coupling circuit or voltage-multiplying circuit It connects.
Further,
Anode occurs for the X-ray and X-ray occurs cathode and is arranged in parallel one first rectifier diode.
Further,
Anode occurs for the X-ray and X-ray occurs cathode and is arranged in parallel one second rectifier diode.
Further,
The X-ray occurs anode and is connect by the first coupled capacitor with first secondary coil
First rectifier diode (207) and a coupled capacitor (208) constitute coupling circuit.
Further,
The ionic pump cathode is connect by the second coupled capacitor with first secondary coil;
Second rectifier diode (211) and two coupled capacitor (212) constitute coupling circuit.
Further,
The two sides of the ionic pump cathode are provided with ionic pump magnet.
Further,
Said supply unit, ion pump module and X-ray module are respectively arranged at a glass evacuated interior;
The X-ray module is located at the top setting of glass evacuated room;
Said supply unit is located at the middle part setting of glass evacuated room;
The ion pump module is located at the lower part setting of glass evacuated room.
Further,
The transformer further includes cylinder-shaped magnetic core of transformer, and the cylindrical shape magnetic core of transformer is located at the primary The inside of coil, the first secondary coil and second subprime coil is arranged.
Technical solution of the present invention has the advantages that
1. the high voltage power supply of the high voltage power supply of vacuum ion pump and x-ray source is integrated, so that provided by the invention integrated The X-ray tube of ionic pump has the advantages that small in size, light-weight, structure is simple, the service life is long.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor It puts, is also possible to obtain other drawings based on these drawings.
Figure 1A is the electrical block diagram of X-ray generator in the prior art;
Figure 1B is the electrical block diagram of X-ray generator in the prior art;
Fig. 2A is the electrical block diagram of the X-ray tube of integrated ionic pump;
Fig. 2 B is the mechanical structure schematic diagram of the X-ray tube of integrated ionic pump.
201, low-tension supply;202, primary coil;203, anode occurs for X-ray;204, cathode occurs for X-ray;205, One secondary coil;206, cylinder-shaped magnetic core of transformer;207, the first rectifier diode;208, the first coupled capacitor;209, ion Pump anode;210, ionic pump cathode;211, the second rectifier diode;212, the second coupled capacitor;213, glass evacuated room;214, Second subprime coil;215, ionic pump magnet.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical", The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ", " third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.In addition, invention described below Technical characteristic involved in different embodiments can be combined with each other as long as they do not conflict with each other.
A kind of X-ray tube of integrated ionic pump, as depicted in figs. 1 and 2, including power supply unit, ion pump module and X are penetrated Wire module, power supply unit include low-tension supply 201, and the low-tension supply 201 connects the primary coil 202 of a transformer, X-ray Module includes that anode 203 and X-ray generation cathode 204 occur for X-ray, and anode 203 occurs for the X-ray and yin occurs for X-ray Pole 204 is connect with the both ends of the first secondary coil 205 of the transformer respectively, and ion pump module includes vertically disposed ion Pump anode 209 and ionic pump cathode 210, the ionic pump anode 209 and ionic pump cathode 210 respectively with book transformer second The both ends of secondary coil 214 connect.
Effective effect of the invention is, ion pump module and X-ray module are carried out by a low-tension supply 201 Power supply is realized by one primary coil 202 of setting and two secondary coils respectively to ion pump module and X-ray module The purpose of power supply.And two secondary coils have different resonance frequencies.By the friendship for applying different frequency in primary coil 202 Galvanic electricity stream makes any one or more in ion pump module and X-ray module of equipment work work.Two frequencies By can be calculated, to avoid mutual crosstalk.
Usually, when equipment is in the work of ion pump module, the frequency of input signal is the resonance frequency of ion pump coil, is used To keep the vacuum degree in vacuum chamber.When needing to emit the work of X-ray module, the frequency of input signal is X-ray coil Resonance frequency, ion pump module break-off, X-ray module are started to work, and X-ray is issued.
In one embodiment, it is whole to be arranged in parallel one first for the X-ray generation anode 203 and X-ray generation cathode 204 Flow diode 207.Anode 203 occurs for the X-ray and X-ray occurs cathode 204 and is arranged in parallel one second rectifier diode 211.Make X-ray module and ion pump module by the first rectifier diode 207 of setting and the second rectifier diode 211 Obtain metastable voltage or electric current.
In one embodiment, X-ray occurs anode 203 and passes through the first coupled capacitor 208 and first secondary coil 205 connections.Ionic pump cathode 210 is connect by the second coupled capacitor 212 with first secondary coil 205.Pass through setting the One coupled capacitor 208 and the second coupled capacitor 212 make X-ray module and ion pump module obtain metastable voltage Or electric current.
In one embodiment, the two sides of the ionic pump cathode 210 are provided with ionic pump magnet 215, in ion Magnetic field is generated at pump module, works normally ion pump module.
In one embodiment, power supply unit, ion pump module and X-ray module are respectively arranged at a glass evacuated room In 213, X-ray module is located at the top setting of glass evacuated room 213, and said supply unit is located in glass evacuated room 213 Portion's setting, the ion pump module are located at the lower part setting of glass evacuated room 213.By the power supply unit difference for being set to middle part Ion pump module and X-ray module are powered.Transformer further includes cylinder-shaped magnetic core of transformer 206, the cylindrical shape Magnetic core of transformer 206 is located at the inside of the primary coil 202, the first secondary coil 205 and second subprime coil 214 Setting.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or It changes still within the protection scope of the invention.

Claims (8)

1. a kind of X-ray tube of integrated ionic pump, which is characterized in that including power supply unit, ion pump module and X-ray mould Block;
Said supply unit includes low-tension supply (201), and the low-tension supply (201) connects the primary coil of a transformer (202);
The X-ray module includes that anode (203) and X-ray generation cathode (204) occur for X-ray, and anode occurs for the X-ray (203) and first of cathode (204) by any one in coupling circuit or voltage-multiplying circuit with the transformer occurs for X-ray The both ends of secondary coil (205) connect;
The ion pump module includes vertically disposed ionic pump anode (209) and ionic pump cathode (210), the ionic pump sun Pole (209) and ionic pump cathode (210) by any one in coupling circuit or voltage-multiplying circuit with the transformer second The both ends of secondary coil (214) connect.
2. the X-ray tube of integrated ionic pump according to claim 1, which is characterized in that
Anode (203) occur for the X-ray and X-ray occurs cathode (204) and is arranged in parallel one first rectifier diode (207).
3. the X-ray tube of integrated ionic pump according to claim 1, which is characterized in that
Anode (203) occur for the X-ray and X-ray occurs cathode (204) and is arranged in parallel one second rectifier diode (211).
4. the X-ray tube of integrated ionic pump according to claim 2, which is characterized in that
The X-ray occurs anode (203) and is connect by the first coupled capacitor (208) with first secondary coil (205);
First rectifier diode (207) and a coupled capacitor (208) constitute coupling circuit.
5. the X-ray tube of integrated ionic pump according to claim 3, which is characterized in that
The ionic pump cathode (210) is connect by the second coupled capacitor (212) with first secondary coil (205);
Second rectifier diode (211) and two coupled capacitor (212) constitute coupling circuit.
6. the X-ray tube of integrated ionic pump according to claim 1, which is characterized in that
The two sides of the ionic pump cathode (210) are provided with ionic pump magnet (215).
7. any one into the X-ray tube of integrated ionic pump described in 6 according to claim 1, which is characterized in that
Said supply unit, ion pump module and X-ray module are respectively arranged in a glass evacuated room (213);
The X-ray module is located at the top setting of glass evacuated room (213);
Said supply unit is located at the middle part setting of glass evacuated room (213);
The ion pump module is located at the lower part setting of glass evacuated room (213).
8. the X-ray tube of integrated ionic pump according to claim 7, which is characterized in that
The transformer further includes cylinder-shaped magnetic core of transformer (206), and the cylindrical shape magnetic core of transformer (206) is located at institute State the inside setting of primary coil (202), the first secondary coil (205) and second subprime coil (214).
CN201811490794.9A 2018-12-06 2018-12-06 X-ray tube integrated with ion pump Active CN109860011B (en)

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Application Number Priority Date Filing Date Title
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CN109860011B CN109860011B (en) 2020-11-06

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6490340B1 (en) * 1997-08-29 2002-12-03 Varian Medical Systems, Inc. X-ray generating apparatus
US20070086572A1 (en) * 2005-10-18 2007-04-19 Robert Dotten Soft x-ray generator
CN104465279A (en) * 2013-09-18 2015-03-25 清华大学 X-ray device and CT device with same
CN108302007A (en) * 2017-12-24 2018-07-20 安徽万瑞冷电科技有限公司 Low-temperature ion pumps

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6490340B1 (en) * 1997-08-29 2002-12-03 Varian Medical Systems, Inc. X-ray generating apparatus
US20070086572A1 (en) * 2005-10-18 2007-04-19 Robert Dotten Soft x-ray generator
CN104465279A (en) * 2013-09-18 2015-03-25 清华大学 X-ray device and CT device with same
CN108302007A (en) * 2017-12-24 2018-07-20 安徽万瑞冷电科技有限公司 Low-temperature ion pumps

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ATSUO JYOUZUKA等: "Low-power-loss and high voltage X-ray tube with graphite nanospines cold cathode", 《NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH》 *
曲璐: "航天用离子泵高压开关电源研究与设计", 《中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑》 *

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