CN109856336A - A kind of method of determining MEMS methane transducer recommended current - Google Patents
A kind of method of determining MEMS methane transducer recommended current Download PDFInfo
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Abstract
The invention discloses a kind of methods of the recommended current of determining MEMS methane transducer, include the following steps: initial current, stair step current, termination electric current that setting electric current source powers to MEMS methane transducer, the I-V data that scanning survey obtains, the current-resistance this time measured according to Ohm's law (I-R) data；Retest, until there is maximum resistance value, it is complete I-V data that note, which this time measures obtained I-V data,；The maximum voltage difference in the complete I-V data is found, remembers that electric current corresponding to maximum voltage difference is recommended current IW.Present invention may determine that MEMS methane transducer recommended current, be at optimum Working, output optimum sensitivity, the equipment used is simple, and step is clear, easily operated, it is reliable it is convenient, speed is fast, high-efficient.
Description
Technical field
Method of the invention is related to the working condition of MEMS methane transducer more particularly to MEMS methane transducer, that is, relates to
And make MEMS methane transducer that there is good sensitivity, MEMS methane transducer will be made to be in best using method of the invention
Working condition, output sensitivity reach maximum, to realize the Performance optimization of sensor.
Background technique
In patent of invention before, the MEMS methane transducer and the preparation method and application thereof based on silicon heater
(2014106070934), total silicon MEMS methane transducer and gas management application and preparation method (2014106070313), one
Kind MEMS methane transducer and its application and preparation method (201410606852.5), a kind of methane based on single heating element
Sensor and its preparation method and application (2014106059954) proposes MEMS methane transducer of the present invention.In reality
Border is in use, need to provide suitable electric current for MEMS methane transducer, and driving MEMS methane transducer work, performance is especially
It is that sensitivity is related with the driving current applied, i.e., locating working condition is related.Also that is, for MEMS methane transducer,
It needs to provide an appropriate driving current for it before measuring gas concentration, MEMS methane transducer is made to be in optimal work
State.In order to can generate maximum sensitivity it needs to be determined that and apply corresponding operating current, which is the best of sensing
Operating current.On the other hand, there is also quality conformance problem, MEMS methane transducers for the MEMS methane transducer of batch production
And its performance parameters inevitably have differences, it is therefore desirable to determine the recommended current of each MEMS methane transducer,
So that each MEMS methane transducer is in optimum Working.It can analyze according to the method for the present invention, control MEMS methane
The performance indicator of sensor, to guarantee the performance indicator of methane transducer and methane transducer instrument, thus for sensor
Production provides the Technical Reference of performance indicator control specification aspect.
Summary of the invention
Goal of the invention: discreteness and guarantee sensor for above-mentioned batch production sensor performance obtain peak response
Demand, a kind of method that the present invention proposes determining MEMS methane transducer operating current, a kind of both MEMS methane transducers
Operating point determines method, enables to generate maximum sensitivity when working sensor, and specification ginseng can be provided for the production of sensor
It examines
Technical solution:
A kind of method of determining MEMS methane transducer recommended current, it is real using MEMS methane transducer measuring circuit
Existing, which includes that current source, voltmeter, MEMS methane transducer and computer, current source provide for MEMS methane transducer
Electric current, voltmeter measurement MEMS methane transducer pass to generated voltage after electric current, " just " of the voltmeter terminals
End connect one end of MEMS methane transducer with the electric current outflow end of the current source, the voltmeter terminals it is " negative " hold and
The electric current of the current source flows into end and connects the MEMS methane transducer other end；Current source is connect with voltmeter with computer, meter
Calculation machine controls the size of current source output current value while the voltage of recording voltmeter, measuring process are as follows:
Step 1: initial current (the I that setting electric current source powers to MEMS methane transducerS), stair step current (IΔ), terminate
Electric current (IE), terminate electric current (IE) it is greater than initial current (IS), the termination electric current (IE) and initial current (IS) difference divided by
Stair step current (IΔ) be current marching technique step number (CS), current source is from initial current ISStart with stair step current IΔStep to termination
Electric current IEEach current point time span (t) it is identical；
Step 2: current source is from initial current (IS) start, with stair step current (IΔ) scanning extremely termination electric current (IE) terminate,
Completing entire grading current scanning is one-shot measurement, and what is generated on voltmeter measurement MEMS methane transducer is right with each electric current institute
The voltage answered, record apply n-th of current value InWhen voltage value Vn, InSize be IS+nIΔ, wherein serial number n is from 0 to CS
Integer, for the first time measure when select the lesser termination electric current (I of a numerical valueE), obtain the current-voltage (I-V) of the secondary measurement
Data；
Step 3: the I-V data obtained according to second step scanning survey, are calculated each electric current according to Ohm's law
It is worth (In) corresponding to resistance value (Rn) to get current-resistance (I-R) data measured to this；
Step 4: judging the resistance value (R in I-R datan) whether with application current value (In) be increased monotonically, if electric
Resistance value (Rn) with current value (In) be increased monotonically, then the step number for increasing current marching technique chooses a bigger termination electric current (IE),
And repeat second and repeatedly tested to third step, it is adjacent twice measurement between time interval be not less than 1 minute, it is adjacent twice
Time interval between measurement keeps identical, until resistance value (Rn) no longer with current value (In) increase with its reduction, that is, go out
Existing maximum resistance value, it is complete I-V data that note, which this time measures obtained I-V data, corresponding electric current when maximum resistance value occurs
Step number be CS,；
Step 5: successively calculating each step since the 1st stair step current using the complete I-V data in the 4th step
Into electric current (IΔ k) corresponding to voltage difference (VΔ k), voltage difference (VΔ k) calculation method be calculate k-th of electric current (Ik) when electricity
Press (Vk) and -1 electric current (I of kthk-1) when voltage (Vk-1) between voltage difference, i.e. VΔ k=Vk-Vk-1, at this time k from 1 to
CS, value and k are integer, as k=1, Vk-1=V0For initial current (IS) corresponding voltage；
Step 6: finding the maximum voltage difference (V in the complete I-V dataΔ max), remember maximum voltage difference (VΔ max)
Corresponding electric current is electric current (I corresponding when applying m-th of stair step currentm=IS+mIΔ), select this electric current (Im) be
The recommended current I of MEMS methane transducerW, i.e. the MEMS methane transducer work that is in required application when best operating point
Electric current is IW, the methane sensitivity of its output can be made maximum.
A kind of method of determining MEMS methane transducer recommended current, it is real using MEMS methane transducer measuring circuit
Existing, which includes that current source, voltmeter, MEMS methane transducer and computer, current source provide for MEMS methane transducer
Electric current, voltmeter measurement MEMS methane transducer pass to generated voltage after electric current, " just " of the voltmeter terminals
End connect one end of MEMS methane transducer with the electric current outflow end of the current source, the voltmeter terminals it is " negative " hold and
The electric current of the current source flows into end and connects the MEMS methane transducer other end；Current source is connect with voltmeter with computer, meter
Calculation machine controls the size of current source output current value while the voltage of recording voltmeter, measuring process are as follows:
Step 1: initial current (the I that setting electric current source powers to MEMS methane transducerS), stair step current (IΔ), terminate
Electric current (IE), terminate electric current (IE) it is greater than initial current (IS), the termination electric current (IE) and initial current (IS) difference divided by
Stair step current (IΔ) be current marching technique total step number (CS), current source is from initial current ISStart with stair step current (IΔ) step to
Terminate electric current IEEach current point time span (t) it is identical；
Step 2: current source is from initial current (IS) start, with stair step current (IΔ) scanning extremely termination electric current (IE) terminate,
Completing entire grading current scanning is one-shot measurement, and what is generated on voltmeter measurement MEMS methane transducer is right with each electric current institute
The voltage answered, record apply n-th of current value InWhen voltage value Vn, InSize be IS+nIΔ, wherein serial number n is from 0 to CS
Integer, for the first time measure when select the lesser termination electric current (I of a numerical valueE), obtain the current-voltage (I-V) of the secondary measurement
Data；
Step 3: calculating the voltage difference (V of current round I-V dataΔ k), specially since the 1st stair step current successively
Calculate each stair step current (IΔ k) corresponding to voltage difference (VΔ k), the voltage difference (VΔ k) calculation method be calculate kth
A electric current (Ik) when voltage (Vk) and -1 electric current (I of kthk-1) when voltage (Vk-1) between voltage difference, VΔ k=V-k-
Vk-1, k is from 1 to C at this timeSValue and k are integer, as k=1, Vk-1=V0For initial current (IS) corresponding to voltage；
Step 4: judge in current round I-V data whether with electric current increase voltage difference (VΔ k) occur greatly
It is worth (VΔ max), such as voltage difference (V of current round I-V dataΔ k) with electric current monotone increasing then increase termination electric current, repeat the
One step is to third step, until with the increase voltage difference (V of electric currentΔ k) there is maximum (VΔ max) until, remember the very big electricity
Pressure difference (VΔ max) corresponding to electric current be corresponding electric current (I when applying m-th of stair step currentm=IS+mIΔ), and select this
One electric current (Im) be MEMS methane transducer recommended current IW, i.e., when the electric current applied to MEMS methane transducer is
IWWhen the methane sensitivity that is exported it is maximum.
Further, the MEMS methane transducer measuring circuit can be replaced such as flowering structure, specially be sequentially connected, shape
At the single-chip microcontroller of loop, DAC converter, electric current source chip, MEMS methane transducer, impedance converter unit, voltage attenuation unit,
Adc circuit, the single-chip microcontroller control DAC output voltage are realized with controlling the electric current for flowing through MEMS methane transducer to sensing element
The measurement of part both end voltage, voltage data are read, storage is analyzed with calculating.
The utility model has the advantages that a kind of method of determining MEMS methane transducer recommended current of the present invention can by measurement analysis
With the operating current of quickly and accurately clear MEMS methane transducer sensing, to ensure that sensor is in good work well
Make state, its output signal is made to reach methane gas sensitivity maximum, that operating current is best, i.e., best.Theoretically same batch,
The product of same specification characteristic having the same, same to batch, most of Property comparisons of same specification product are close in practice, can have
There is preferable consistency, meets can be interchanged for certain standard.But always there is homogeneity of product poor, using method of the invention,
It can judge whether its consistency meets as parameter by using recommended current of the invention and its maximum voltage difference
It wants.Meanwhile if the drift of performance occurs in device after working long hours, recommended current and its maximum of the invention can also be used
Voltage difference provides the method for compensation or even judges whether to work on.Select lesser termination electric current that can guarantee for the first time
Its safety prevents larger current from damaging device, realizes the purpose by incrementally increasing electric current.Determining MEMS provided by the invention
The method of methane transducer operating current is connected, electricity using current source, voltmeter and computer with computer control interface
Stream source, voltmeter and MEMS methane transducer connect, simple using equipment, easy to operate, program control test speed is fast, can guarantee
The sensing capabilities of precise and high efficiency acquisition MEMS methane transducer.
Detailed description of the invention
Fig. 1 is the first measuring circuit connection schematic diagram of the MEMS methane transducer operating point of the invention patent；
Fig. 2 is MEMS methane transducer electric current and resistance, voltage, voltage difference curve graph；
Fig. 3 is second of measuring circuit schematic diagram of the MEMS methane transducer operating point of the invention patent；
Fig. 4 is connection schematic diagram between DAC, electric current source chip, sensing element and impedance convert.
Specific embodiment
Below in conjunction with specific embodiment, invention is further described in detail.
Embodiment 1, a kind of method of determining MEMS methane transducer operating current measure electricity using MEMS methane transducer
Road is realized, as shown in Figure 1, the circuit includes current source, voltmeter, MEMS methane transducer and computer, current source MEMS
Methane transducer provides electric current, voltmeter measurement MEMS methane transducer passes to generated voltage after electric current, the voltage
" just " end of table terminals connect one end of MEMS methane transducer with the electric current outflow end of the current source, and the voltmeter connects
" negative " end of line end flows into end with the electric current of the current source and connect the MEMS methane transducer other end；Current source and voltmeter with
Computer connection, computer control the size of current source output current value while the voltage of recording voltmeter；If using electricity
Such as accurate source table of the source table that stream source and voltmeter integrate, or the Auto-Test System with Automated library system, then will be accurate
Source table or Auto-Test System connect to form measuring circuit with MEMS methane transducer, and computer connect and controls with accurate source table
The current source of accurate source table provides electric current for MEMS methane transducer, accurate source table voltage measurement unit measures MEMS methane sensing
Device passes to generated voltage after electric current；
Step 1: the initial current I that selection current source powers to MEMS methane transducerS, stair step current IΔ, terminate electric current
IE, specifically:
Terminate electric current IEGreater than initial current IS, terminate electric current IEWith initial current ISDifference be stair step current I alwaysΔ
Integral multiple, the termination electric current IEWith initial current ISDifference divided by stair step current IΔFor the step number C of current marching techniqueS；Electric current
Source is applied to each current point on MEMS methane transducer from ISStart with IΔStep to IEEach current point time span
T is identical；Initial current I when specific implementationSIt is selected as 0.02mA, stair step current IΔIt is selected as 0.02mA, when measuring for the first time
Terminate electric current IEIt is selected as 1mA, the step number C of current marching technique when measuring for the first timeSFor 49 steps, time span t is set using accurate source table
It is set to the same value；
Step 2: current source is from initial current ISStart, with stair step current IΔScanning extremely terminates electric current IETerminate to complete entire
Grading current scanning is one-shot measurement, every time when measurement all as generate in voltmeter measurement sensor with corresponding to each electric current
Voltage, and n-th of current value I is applied to sensor by computer or Auto-Test System record current sourcenWhen voltage value
Vn, InSize be IS+nIΔ, n is from 0 to C at this timeSValue obtains the current-voltage I-V data of the secondary measurement；When measuring for the first time
Select the lesser termination electric current I of a numerical valueE, measurement thereafter can be by increasing or reducing the step number C of the current marching techniqueSIncrease
Big or reduction terminates electric current IE；Time span t when measurement all keeps identical setting constant every time；
Step 3: the I-V data obtained according to second step scanning survey, are calculated each electric current according to Ohm's law
Value InCorresponding resistance value RnTo get the current-resistance I-R data measured to this；
Step 4: judging the resistance value R in third step I-R datanWhether with application current value InIt is increased monotonically, if
Resistance value RnWith current value InIt is increased monotonically, then increases the step number C of current marching techniqueSChoose a bigger termination electric current IE, and
It repeats second repeatedly to be tested to third step, the time interval between adjacent measurement twice kept identical not less than 1 minute, tool
Time interval of body when implementing between adjacent measurement twice is taken as 2 minutes, termination electric current I when measuring for the second timeEIt can be taken as
The step number C of 1.4mA, corresponding current marching techniqueSTermination electric current I for 69 steps, when third time measuresEIt can be taken as 2mA, corresponding electricity
Flow the step number C of steppingSFor 99 steps, the stair step current IΔWith initial current ISImmobilizing is all 0.02mA, increases termination with this
Electric current IEIt takes multiple measurements, until resistance value RnNo longer with current value InIncrease with its reduction, that is, finds maximum resistance
Point, it is complete I-V data that note, which this time measures obtained I-V data, remembers corresponding CSFor complete CS,；
Step 5: successively calculating each stair step current since the 1st stair step current using the complete I-V data
IΔ kCorresponding voltage difference VΔ k, voltage difference VΔ kCalculation method be calculate k-th of electric current IkWhen voltage VkWith -1 electricity of kth
Flow Ik-1When voltage Vk-1Between voltage difference, that is, VΔ k=Vk-Vk-1, k is from 1 to complete C at this timeS, value, as k=1, Vk-1
=V0For initial current ISCorresponding voltage；
Step 6: finding the maximum voltage difference V in the complete I-V dataΔ max, remember maximum voltage difference VΔ maxInstitute is right
The electric current answered is electric current (I corresponding when applying m-th of stair step currentm=IS+mIΔ), as shown in Fig. 2, selecting this electric current Im
For the recommended current I of sensorW, i.e. the sensor operating current I that is in required application when best operating pointW=Im, this makes
The methane sensitivity of sensor output is in maximum state.
Embodiment 2: a kind of method of determining MEMS methane transducer operating current, using circuit same as Example 1,
Measuring process is as follows:
Step 1: the initial current I that setting electric current source powers to MEMS methane transducerS, stair step current IΔ, terminate electric current
IE, terminate electric current IEGreater than initial current IS, the termination electric current IEWith initial current ISDifference divided by stair step current IΔFor electricity
Flow the total step number C of steppingS, current source is from initial current ISStart with stair step current IΔIt steps to and terminates electric current IEEach electric current
The time span t of point is identical；
Step 2: current source is from initial current ISStart, with stair step current IΔScanning extremely terminates electric current IETerminate, completes whole
The scanning of a grading current is one-shot measurement, generated in voltmeter measurement sensor with voltage corresponding to each electric current, record
Current source applies n-th of current value I to sensornWhen voltage value Vn, InSize be IS+nIΔ, wherein n is from 0 to CSIt is whole
Number selects a numerical value lesser termination electric current I when measuring for the first timeE, obtain the current-voltage I-V data of the secondary measurement；
Step 3: calculating the voltage difference V of current round I-V dataΔ k, specially successively counted since the 1st stair step current
Calculate each stair step current IΔ kCorresponding voltage difference VΔ k, the voltage difference VΔ kCalculation method be calculate k-th of electric current Ik
When voltage VkWith -1 electric current I of kthk-1When voltage Vk-1Between voltage difference, VΔ k=Vk-Vk-1, k is from 1 to C at this timeSIt takes
It is worth and k is integer, as k=1, Vk-1=V0For initial current ISCorresponding voltage；
Step 4: judge in current round I-V data whether with electric current increase voltage difference VΔ kThere is maximum
VΔ max, such as voltage difference V of current round I-V dataΔ kThen increase termination electric current with electric current monotone increasing, repeats the first step extremely
Third step, until with the increase voltage difference V of electric currentΔ kThere is maximum VΔ maxUntil, remember the significant voltage difference VΔ max
Corresponding electric current is electric current (I corresponding when applying m-th of stair step currentm=IS+mIΔ), and select this electric current ImFor
The recommended current I of MEMS methane transducerW, i.e., when the electric current applied to MEMS methane transducer is IWWhen exported
Methane sensitivity is in maximum state.
As shown in figure 3, measuring circuit be the single-chip microcontroller for being sequentially connected, being formed loop, DAC converter, electric current source chip,
MEMS methane transducer, impedance converter unit, voltage attenuation unit, adc circuit, the single-chip microcontroller control DAC output voltage control
System flows through the electric current of MEMS methane transducer, realizes that the measurement to sensing element both end voltage, voltage data are read, stored and meter
Point counting analysis.DAC converter is at least 12；Electric current source chip uses LT3092；Impedance converter unit using LT6023,
LT6023-1 or AD8667；Voltage attenuation unit is carried out using operational amplifiers such as LT1997-3, LT1997-2 or AD8279
0.25 times of voltage attenuation；The voltage at sensing element both ends is converted through impedance using 24 ADC such as ADS124S06/ADS124S08
It is sampled with the voltage after voltage attenuation；Single-chip microcontroller control DAC exports different electric currents, and controls ADC, to obtain
Voltage under DAC output valve corresponding current；The included DAC module of single-chip microcontroller can also be used in DAC.
Connection figure between a kind of DAC as shown in Figure 4, electric current source chip, sensing element and impedance transformation, In, Out and
Set is three pins of electric current source chip LT3092, and the resistance R resistance value being connected with Out pin can use 100 Europe, can also make
With the resistance of other resistance values.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, is such as measured using voltage source
Electric current on to element and accordingly calculation analysis work point, these modifications and embellishments should also be considered as the scope of protection of the present invention.
Claims (4)
1. a kind of method of determining MEMS methane transducer recommended current, which is characterized in that use MEMS methane transducer
Measuring circuit realizes that the circuit includes current source, voltmeter, MEMS methane transducer and computer, and current source is MEMS methane
Sensors with current, voltmeter measurement MEMS methane transducer pass to generated voltage after electric current, and the voltmeter connects
" just " end of line end connect one end of MEMS methane transducer, the voltmeter terminals with the electric current outflow end of the current source
" negative " end connect the MEMS methane transducer other end with the electric current of current source inflow end；Current source and voltmeter and calculating
Machine connection, computer controls the size of current source output current value while the voltage of recording voltmeter, measuring process are as follows:
Step 1: initial current (the I that setting electric current source powers to MEMS methane transducerS), stair step current (IΔ), terminate electric current
(IE), terminate electric current (IE) it is greater than initial current (IS), the termination electric current (IE) and initial current (IS) difference divided by stepping
Electric current (IΔ) be current marching technique step number (CS), current source is from initial current ISStart with stair step current IΔStep to termination electric current
IEEach current point time span (t) it is identical；
Step 2: current source is from initial current (IS) start, with stair step current (IΔ) scanning extremely termination electric current (IE) terminate, it completes
Entire grading current scanning is one-shot measurement, generated on voltmeter measurement MEMS methane transducer with corresponding to each electric current
Voltage, record apply n-th of current value InWhen voltage value Vn, InSize be IS+nIΔ, wherein serial number n is from 0 to CSIt is whole
Number selects a numerical value lesser termination electric current (I when measuring for the first timeE), obtain current-voltage (I-V) data of the secondary measurement；
Step 3: the I-V data obtained according to second step scanning survey, are calculated each current value according to Ohm's law
(In) corresponding to resistance value (Rn) to get current-resistance (I-R) data measured to this；
Step 4: judging the resistance value (R in I-R datan) whether with application current value (In) be increased monotonically, if resistance value
(Rn) with current value (In) be increased monotonically, then the step number for increasing current marching technique chooses a bigger termination electric current (IE), lay equal stress on
Multiple second is repeatedly tested to third step, and the time interval between adjacent measurement twice is not less than T minutes, adjacent to measure twice
Between time interval keep identical, until resistance value (Rn) no longer with current value (In) increase with its reduction, that is, there is pole
Big resistance value, it is complete I-V data that note, which this time measures obtained I-V data, the step of corresponding electric current when maximum resistance value occurs
Number is CS'；
Step 5: successively calculating each stepping electricity since the 1st stair step current using the complete I-V data in the 4th step
Flow (IΔ k) corresponding to voltage difference (VΔ k), voltage difference (VΔ k) calculation method be calculate k-th of electric current (Ik) when voltage (Vk)
With -1 electric current (I of kthk-1) when voltage (Vk-1) between voltage difference, i.e. VΔ k=Vk-Vk-1, k is from 1 to C at this timeS' value
And k is integer, and as k=1, Vk-1For initial current (IS) corresponding to voltage；
Step 6: finding the maximum voltage difference (V in the complete I-V dataΔ max), remember maximum voltage difference (VΔ max) institute it is right
The electric current answered is electric current (I corresponding when applying m-th of stair step currentm=IS+mIΔ), select this electric current (Im) it is MEMS first
The recommended current I of alkane sensorW, i.e., the operating current of required application is when MEMS methane transducer is in best operating point
IW, the methane sensitivity of its output can be made maximum.
2. a kind of method of determining MEMS methane transducer recommended current according to claim 1, which is characterized in that
In 4th step, the value of T is 1.
3. a kind of method of determining MEMS methane transducer recommended current, which is characterized in that use MEMS methane transducer
Measuring circuit realizes that the circuit includes current source, voltmeter, MEMS methane transducer and computer, and current source is MEMS methane
Sensors with current, voltmeter measurement MEMS methane transducer pass to generated voltage after electric current, and the voltmeter connects
" just " end of line end connect one end of MEMS methane transducer, the voltmeter terminals with the electric current outflow end of the current source
" negative " end connect the MEMS methane transducer other end with the electric current of current source inflow end；Current source and voltmeter and calculating
Machine connection, computer controls the size of current source output current value while the voltage of recording voltmeter, measuring process are as follows:
Step 1: initial current (the I that setting electric current source powers to MEMS methane transducerS), stair step current (IΔ), terminate electric current
(IE), terminate electric current (IE) it is greater than initial current (IS), the termination electric current (IE) and initial current (IS) difference divided by stepping
Electric current (IΔ) be current marching technique total step number (CS), current source is from initial current ISStart with stair step current (IΔ) step to termination
Electric current IEEach current point time span (t) it is identical；
Step 2: current source is from initial current (IS) start, with stair step current (IΔ) scanning extremely termination electric current (IE) terminate, it completes
Entire grading current scanning is one-shot measurement, generated in voltmeter measurement sensing with voltage corresponding to each electric current, record
Apply n-th of current value InWhen voltage value Vn, InSize be IS+nIΔ, wherein serial number n is from 0 to CSInteger, survey for the first time
A numerical value lesser termination electric current (I is selected when amountE), obtain current-voltage (I-V) data of the secondary measurement；
Step 3: calculating the voltage difference (V of current round I-V dataΔ k), specially successively calculated since the 1st stair step current
Each stair step current (IΔ k) corresponding to voltage difference (VΔ k), the voltage difference (VΔ k) calculation method be calculate k-th electricity
Flow (Ik) when voltage (Vk) and -1 electric current (I of kthk-1) when voltage (Vk-1) between voltage difference, VΔ k=V-k-Vk-1, this
When k from 1 to CSValue and k are integer, as k=1, Vk-1=V0For initial current (IS) corresponding to voltage；
Step 4: judge in current round I-V data whether with electric current increase voltage difference (VΔ k) there is maximum
(VΔ max), such as voltage difference (V of current round I-V dataΔ k) being increased monotonically with electric current then increases termination electric current, repeat first
Step is to third step, until with the increase voltage difference (V of electric currentΔ k) there is maximum (VΔ max) until, remember the significant voltage
Difference (VΔ max) corresponding to electric current be corresponding electric current (I when applying m-th of stair step currentm=IS+mIΔ), and select this
Electric current (Im) be MEMS methane transducer recommended current IW, i.e., when the electric current applied to MEMS methane transducer is IW
When the methane sensitivity that is exported it is maximum.
4. a kind of method of determining MEMS methane transducer recommended current according to claim 1 or 3, feature exist
It can be replaced in, the MEMS methane transducer measuring circuit such as flowering structure, be specially sequentially connected, formed the monolithic of loop
Machine, DAC converter, electric current source chip, MEMS methane transducer, impedance converter unit, voltage attenuation unit, adc circuit, it is described
Single-chip microcontroller controls DAC output voltage to control the electric current for flowing through MEMS methane transducer, realizes to sensing element both end voltage
Measurement, voltage data are read, storage is analyzed with calculating.
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| CN108181350A (en) * | 2017-12-29 | 2018-06-19 | 中国矿业大学 | The resistors match method of adjustment of MEMS methane transducers |
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