CN109855813B - Simple detection device integrating pressure maintaining and helium leakage detection and operation method thereof - Google Patents
Simple detection device integrating pressure maintaining and helium leakage detection and operation method thereof Download PDFInfo
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- CN109855813B CN109855813B CN201910022320.XA CN201910022320A CN109855813B CN 109855813 B CN109855813 B CN 109855813B CN 201910022320 A CN201910022320 A CN 201910022320A CN 109855813 B CN109855813 B CN 109855813B
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- pressure maintaining
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- 238000001514 detection method Methods 0.000 title claims abstract description 84
- 239000001307 helium Substances 0.000 title claims abstract description 56
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 56
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims abstract description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 90
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 36
- 238000007599 discharging Methods 0.000 claims abstract description 4
- 239000002344 surface layer Substances 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 19
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 18
- 238000012360 testing method Methods 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 9
- 230000008676 import Effects 0.000 claims description 6
- 239000010410 layer Substances 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
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- Examining Or Testing Airtightness (AREA)
Abstract
The invention provides a simple detection device integrating pressure maintaining and helium leak detection, which comprises 1 or more simple detection units, wherein each simple detection unit comprises a chassis, a fixed seat, a sliding seat, a quick clamp and a clamping cylinder, wherein the fixed seat, the sliding seat, the quick clamp and the clamping cylinder are arranged on the chassis, the surface layer of the chassis is provided with a plurality of mounting grooves and 2 guide rails, the to-be-detected stick assembly is arranged in each mounting groove, and the bottom surface of the chassis is provided with a helium detection port valve for controlling helium detection to exhaust, a nitrogen inlet valve for controlling nitrogen to enter and a nitrogen outlet valve for discharging nitrogen after pressure maintaining. The invention also provides an operation method of the simple detection device integrating pressure maintaining and helium leakage detection. The invention integrates pressure maintaining and helium leakage detection, and can select a plurality of detection ports or a plurality of simple detection units to be connected in series according to the quantity and efficiency of the sticks to be detected, and simultaneously detect the plurality of sticks.
Description
Technical Field
The invention relates to the technical field of detection equipment, in particular to a simple detection device integrating pressure maintaining and helium leakage detection and an operation method thereof.
Background
As the global electronic and photovoltaic industries are vigorously developed, the government of China advocates the science and technology of China to develop the semiconductor and photovoltaic manufacturing industries rapidly. The photovoltaic industry rapidly develops in the last two years, and is the main force of new energy industry in the future. In the process commonly used in the semiconductor and photovoltaic related industries, on the premise of some non-high precision requirements, a large amount of stink, namely a pressure regulating valve group or a special gas using terminal, is needed, and is mainly used on equipment for continuously distributing process gas for a process machine in the semiconductor and photovoltaic industries, so that the use requirements of the process machine on fluid are met. The traditional stick detection mode can only detect singly one by one, and under the condition that the quantity of sticks needing to be detected is very large, the necessary test time is very long, the labor cost is too high, and the development of equipment capable of simultaneously detecting a plurality of sticks is urgently needed to improve the working efficiency.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the simple detection device integrating pressure maintaining and helium leakage detection and the operation method thereof.
According to one aspect of the invention, a simple detection device integrating pressure maintaining and helium leak detection is provided, the simple detection device comprises 1 or more simple detection units, the simple detection units comprise a chassis (1) serving as a reference table of the whole device, the surface layer of the chassis (1) is provided with a plurality of mounting grooves and 2 guide rails, a to-be-detected stick component (2) is mounted in each mounting groove, the rear end of each mounting groove is provided with a fixed seat (3) for controlling the stick component (2) to be mounted in place, the front end of each mounting groove is provided with a sliding seat (4) for clamping the front opening and the rear opening of the stick component (2), the front side wall of each sliding seat (4) is provided with a quick clamp (5) for pushing the corresponding sliding seat to move, the bottom layer of the chassis (1) is further provided with a plurality of clamping cylinders (6) for clamping the surface openings of the stick component (2), and the clamping cylinders (6) are in one-to-one correspondence with the stick component (2); the clamping cylinder (6) adopts a double-acting compressed air type clamping cylinder;
The gas transmission branch pipe connected with the inlet and the outlet of the stick component (2) is respectively connected to the gas inlet main pipe and the gas transmission main pipe (13), and the gas transmission main pipe (13) is provided with a pressure gauge (10) for checking the pressure of the whole pipeline after the test;
The bottom surface of chassis (1) is installed helium and is examined a mouthful valve (7), nitrogen gas import valve (8) and nitrogen gas outlet valve (9), and towards different three direction respectively, helium is examined mouthful valve (7) and is connected with gas transmission main pipe (13), and control helium examines the bleed, nitrogen gas import valve (8) are connected with the one end that the air inlet is responsible for, control nitrogen gas's entering, nitrogen gas outlet valve (9) are connected with the other end that the air inlet is responsible for, are used for discharging nitrogen gas after the pressurize or connect another simple and easy detecting element.
Preferably, the simple detection units are combined in series connection through a nitrogen outlet valve (9) and a nitrogen inlet valve (8) of two adjacent simple detection units. According to the quantity and efficiency of the stink to be detected, a plurality of detection ports can be selected, or a plurality of detection devices can be selected for series connection.
Preferably, the stick assembly (2) and the clamping cylinder (6) are provided with 5 groups.
Preferably, the sliding seat (4) is in a rectangular structure, and two ends of the bottom of the sliding seat are respectively provided with 1 sliding block which slides in a matched manner with the guide rail.
Preferably, the quick clamp (5) is provided with 2 groups which are respectively arranged at two ends of the pushing sliding seat (4), and the pushing handle is used for pushing the sliding seat (4) to clamp the front opening and the rear opening of the stick assembly (2).
Preferably, a first sealing ring is arranged at the clearance between the front opening and the rear opening of the stick component (2) and the fixed seat (3) and the sliding seat (4).
Preferably, a second sealing ring is arranged at the gap between the surface opening of the stick component (2) and the clamping cylinder (6) for sealing.
Preferably, the guide rail, the fixing seat (3), the quick clamp (5) and the clamping cylinder (6) are connected and fixed with the chassis (1) through screws.
Preferably, the four corners of the bottom layer of the chassis (1) are respectively provided with a supporting leg (11) of the supporting device.
In order to achieve the above purpose, the invention also provides an operation method of the simple detection device integrating pressure maintaining and helium leak detection, which comprises the following steps:
Step one, putting the stick component (2) into a mounting groove on the chassis (1), pushing the quick clamp (5), enabling the sliding seat (4) to slide and clamp two ends of the stick component (2), accessing an air source required by the clamping air cylinder (6), and clamping a meter port of the stick component (2);
closing a nitrogen outlet valve (9) and a helium detection port valve (7), communicating a nitrogen inlet valve (8), accessing nitrogen for test, and recording the reading of a pressure gauge (10) at the moment;
Thirdly, after introducing nitrogen for 24 hours, observing whether the reading of the pressure gauge (10) changes, and if not, passing a pressure maintaining test; if the reading is changed, the pressure maintaining test is not passed;
step four, after the pressure maintaining test is passed, a nitrogen outlet valve (9) is opened, and nitrogen in a pipeline is discharged;
Step five, closing a nitrogen inlet valve (8) and a nitrogen outlet valve (9); and (3) accessing a helium detector from the helium detecting port valve (7), and opening the helium detecting port valve (7) to detect helium.
Compared with the prior art, the invention has the following beneficial effects:
(1) The simple detection device integrating pressure maintaining and helium leakage detection and the operation method thereof integrate pressure maintaining and helium leakage detection, can detect a plurality of stinks at the same time, save test time, greatly improve working efficiency and reduce labor cost;
(2) The simple detection device integrating pressure maintaining and helium leak detection and the operation method thereof have the advantages of simple structure, ingenious design and obvious effect;
(3) The simple detection device integrating pressure maintaining and helium leakage detection and the operation method thereof have the advantages that the installation and replacement of the stick component are simple and convenient, the practicability is high, and the engineering application is easy;
(4) The simple detection device integrating pressure maintaining and helium leakage detection and the operation method thereof can select a plurality of detection ports or select a plurality of detection devices to be used in series according to the quantity and efficiency conditions of the stink to be detected, are flexible and changeable, and have wide application range;
(5) The simple detection device integrating pressure maintaining and helium leakage detection and the operation method thereof have the advantages of simple operation steps, safe operation and accurate and reliable test result;
(6) The simple detection device integrating pressure maintaining and helium leak detection and the operation method thereof have the advantages of low cost and high cost performance, and are suitable for large-scale popularization.
Drawings
Other features, objects and advantages of the present invention will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic diagram of a simple detection device integrating pressure maintaining and helium leak detection;
In fig. 1: the device comprises a chassis 1, a stick component 2, a fixed seat 3, a sliding seat 4, a quick clamp 5, a clamping cylinder 6, a helium check valve 7, a nitrogen inlet valve 8, a nitrogen outlet valve 9, a pressure gauge 10, a supporting foot 11, an air inlet main pipe 12 and an air transmission main pipe 13.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present invention.
Examples
The embodiment relates to a simple detection device integrating pressure maintaining and helium leakage detection, and the structure of the simple detection device is shown in the attached figure 1: the simple detection unit comprises a chassis 1 serving as a reference table top of the whole device, wherein the surface layer of the chassis 1 is provided with a plurality of mounting grooves and 2 guide rails, a to-be-detected stick component 2 is mounted in each mounting groove, the rear end of each mounting groove is provided with a fixing seat 3 for controlling the stick component 2 to be mounted in place, the front end of each mounting groove is provided with a sliding seat 4 for clamping the front opening and the rear opening of the stick component 2, the front side wall of each sliding seat 4 is provided with a quick clamp 5 for pushing the corresponding sliding seat to move, the bottom layer of the chassis 1 is also provided with a plurality of clamping cylinders 6 for clamping the surface opening of the stick component 2, and the clamping cylinders 6 are in one-to-one correspondence with the stick component 2; the clamping cylinder (6) adopts a double-acting compressed air type clamping cylinder;
The gas transmission branch pipe connected with the inlet and the outlet of the stick component 2 is respectively connected to the gas inlet main pipe 12 and the gas transmission main pipe 13, and the gas transmission main pipe 13 is provided with a pressure gauge 10 for checking the pressure of the whole pipeline after the test;
the bottom surface of chassis 1 installs helium and examines a mouthful valve 7, nitrogen gas import valve 8 and nitrogen gas outlet valve 9, and the orientation is different three directions respectively, helium examines a mouthful valve 7 and is connected with gas transmission person in charge 13, and control helium examines the bleed, nitrogen gas import valve 8 is connected with the one end of gas inlet person in charge 12, controls the entering of nitrogen gas, nitrogen gas outlet valve 9 is connected with the other end of gas inlet person in charge 12 for discharge nitrogen gas after the pressurize or connect another simple and easy detecting element.
Further, the simple detection units are connected in series and combined through the nitrogen outlet valve 9 and the nitrogen inlet valve 8 of two adjacent simple detection units. According to the quantity and efficiency of the stink to be detected, a plurality of detection ports can be selected, or a plurality of detection devices can be selected for series connection.
Further, the stick assembly 2 and the clamping cylinder 6 are provided with 5 groups.
Further, the sliding seat 4 has a rectangular structure, and two ends of the bottom of the sliding seat are respectively provided with 1 sliding block which slides in a matched manner with the guide rail.
Further, the quick clamp 5 is provided with 2 groups, which are respectively arranged at two ends of the pushing sliding seat 4, and the pushing sliding seat 4 is pushed by pulling the handle to clamp the front opening and the rear opening of the stick assembly 2.
Further, a first sealing ring is arranged at the gap between the front opening and the rear opening of the stick component 2 and the fixed seat 3 and the sliding seat 4 for sealing.
Further, a second sealing ring is arranged at the gap between the surface opening of the stick component 2 and the clamping cylinder 6 for sealing.
Further, the guide rail, the fixing seat 3, the quick clamp 5 and the clamping cylinder 6 are connected and fixed with the chassis 1 through screws.
Further, the four corners of the bottom layer of the chassis 1 are respectively provided with a supporting leg 11 of the supporting device.
In a second aspect, the embodiment further provides an operation method of the simple detection device integrating pressure maintaining and helium leak detection, which comprises the following steps:
firstly, placing the stick component 2 into a mounting groove on the chassis 1, pushing the quick clamp 5, enabling the sliding seat 4 to slide and clamp two ends of the stick component 2, accessing an air source required by the clamping air cylinder 6, and clamping a surface opening of the stick component 2;
Step two, closing a nitrogen outlet valve 9 and a helium detecting port valve 7, communicating a nitrogen inlet valve 8, accessing nitrogen for test, and recording the reading of a pressure gauge 10 at the moment;
Thirdly, after introducing nitrogen for 24 hours, observing whether the reading of the pressure gauge 10 changes, and if not, passing a pressure maintaining test; if the reading is changed, the pressure maintaining test is not passed;
Step four, after the pressure maintaining test is passed, opening a nitrogen outlet valve 9, and discharging nitrogen in the pipeline;
Step five, closing the nitrogen inlet valve 8 and the nitrogen outlet valve 9; and (3) accessing a helium detector from the helium detecting port valve 7, and opening the helium detecting port valve 7 to detect helium.
The foregoing describes specific embodiments of the present invention. It is to be understood that the invention is not limited to the particular embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the claims without affecting the spirit of the invention.
Claims (10)
1. The simple detection device integrating pressure maintaining and helium leakage detection is characterized by comprising 1 or more simple detection units, wherein each simple detection unit comprises a chassis (1) serving as a reference table top of a whole device, a plurality of mounting grooves and 2 guide rails are formed in the surface layer of the chassis (1), a to-be-detected stick component (2) is mounted in each mounting groove, a fixing seat (3) for controlling the stick component (2) to be mounted in place is arranged at the rear end of each mounting groove, a sliding seat (4) for clamping the front opening and the rear opening of the stick component (2) is arranged at the front end of each mounting groove, a quick clamp (5) for pushing the sliding seat to move is arranged on the front side wall of each sliding seat (4), a plurality of clamping cylinders (6) for clamping the surface opening of the stick component (2) are further arranged at the bottom layer of the chassis (1), and the clamping cylinders (6) are in one-to-one correspondence with the stick component (2);
The gas transmission branch pipe connected with the inlet and the outlet of the stick component (2) is respectively connected to the gas inlet main pipe and the gas transmission main pipe (13), and the gas transmission main pipe (13) is provided with a pressure gauge (10) for checking the pressure of the whole pipeline after the test;
The bottom surface of chassis (1) is installed helium and is examined a mouthful valve (7), nitrogen gas import valve (8) and nitrogen gas outlet valve (9), and towards different three direction respectively, helium is examined mouthful valve (7) and is connected with gas transmission main pipe (13), and control helium examines the bleed, nitrogen gas import valve (8) are connected with the one end that the air inlet is responsible for, control nitrogen gas's entering, nitrogen gas outlet valve (9) are connected with the other end that the air inlet is responsible for, are used for discharging nitrogen gas after the pressurize or connect another simple and easy detecting element.
2. The simple detection device integrating pressure maintaining and helium leak detection according to claim 1, wherein the simple detection units are connected in series and combined through a nitrogen outlet valve (9) and a nitrogen inlet valve (8) of two adjacent simple detection units.
3. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein 5 groups of the stick assembly (2) and the clamping cylinder (6) are respectively arranged.
4. The simple detection device integrating pressure maintaining and helium leakage detection according to claim 1, wherein the sliding seat (4) is of a rectangular structure, and two ends of the bottom of the sliding seat are respectively provided with 1 sliding block which slides in a matched manner with the guide rail.
5. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein the quick clamp (5) is provided with 2 groups, which are respectively arranged at two ends of the pushing sliding seat (4).
6. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein a first sealing ring is arranged at a gap between a front opening and a rear opening of the stick component (2) and the fixed seat (3) and the sliding seat (4).
7. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein a second sealing ring is arranged at a gap between a surface opening of the stick component (2) and the clamping cylinder (6).
8. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein the guide rail, the fixing seat (3), the quick clamp (5) and the clamping cylinder (6) are connected and fixed with the chassis (1) through screws.
9. The simple detection device integrating pressure maintaining and helium leak detection as claimed in claim 1, wherein the four corners of the bottom layer of the chassis (1) are provided with supporting legs (11) of a supporting device.
10. A method of operating a simple inspection apparatus incorporating pressure maintaining and helium leak detection, utilizing the inspection apparatus of any one of claims 1-9, comprising the steps of:
Step one, putting the stick component (2) into a mounting groove on the chassis (1), pushing the quick clamp (5), enabling the sliding seat (4) to slide and clamp two ends of the stick component (2), accessing an air source required by the clamping air cylinder (6), and clamping a meter port of the stick component (2);
closing a nitrogen outlet valve (9) and a helium detection port valve (7), communicating a nitrogen inlet valve (8), accessing nitrogen for test, and recording the reading of a pressure gauge (10) at the moment;
Thirdly, after introducing nitrogen for 24 hours, observing whether the reading of the pressure gauge (10) changes, and if not, passing a pressure maintaining test; if the reading is changed, the pressure maintaining test is not passed;
step four, after the pressure maintaining test is passed, a nitrogen outlet valve (9) is opened, and nitrogen in a pipeline is discharged;
Step five, closing a nitrogen inlet valve (8) and a nitrogen outlet valve (9); and (3) accessing a helium detector from the helium detecting port valve (7), and opening the helium detecting port valve (7) to detect helium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910022320.XA CN109855813B (en) | 2019-01-10 | 2019-01-10 | Simple detection device integrating pressure maintaining and helium leakage detection and operation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910022320.XA CN109855813B (en) | 2019-01-10 | 2019-01-10 | Simple detection device integrating pressure maintaining and helium leakage detection and operation method thereof |
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| Publication Number | Publication Date |
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| CN109855813A CN109855813A (en) | 2019-06-07 |
| CN109855813B true CN109855813B (en) | 2024-04-19 |
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| CN111157191A (en) * | 2019-11-29 | 2020-05-15 | 江苏亿阀股份有限公司 | Control valve multinomial check out test set |
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| Publication number | Publication date |
|---|---|
| CN109855813A (en) | 2019-06-07 |
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