CN109835869A - A kind of micro-nano through-hole template and the preparation method and application thereof - Google Patents
A kind of micro-nano through-hole template and the preparation method and application thereof Download PDFInfo
- Publication number
- CN109835869A CN109835869A CN201910092159.3A CN201910092159A CN109835869A CN 109835869 A CN109835869 A CN 109835869A CN 201910092159 A CN201910092159 A CN 201910092159A CN 109835869 A CN109835869 A CN 109835869A
- Authority
- CN
- China
- Prior art keywords
- template
- nano
- micro
- preparation
- blade
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Micromachines (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Catalysts (AREA)
Abstract
The invention discloses a kind of micro-nano through-hole template and the preparation method and application thereof, the preparation method of the micro-nano through-hole template includes the following steps: that S1. deposits hydrophilic film on blade；S2. after mixing by PDMS and curing agent, it is cast on hydrophilic film, obtains PDMS template；S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；S4. the antistructure template in reduction steps S3, obtains micro-nano through-hole template.The present invention deposits hydrophilic film on blade, prepares antistructure template using the micro-nano structure of blade surface, and by the way that antistructure template is thinned, obtain micro-nano through-hole template.Preparation method simple process provided by the invention, cost is relatively low, does not need complicated equipment, and environmental pollution degree is low, solves the problem of hole template preparation process complexity, higher cost.
Description
Technical field
The present invention relates to micro-nano device preparation and application technical field, more particularly, to a kind of micro-nano through-hole template and
Preparation method and application.
Background technique
Since German Gleiter in 1984 successfully prepares nanometer bulk metallic crystal iron, copper etc., to nanometer material
The research of material is increasingly becoming a hot spot of Material Field, and nano material is due to the characteristic in its structure in catalysis, medicine, water body
Processing, light absorption etc. have broad application prospects, and how to prepare ideal nano material and also become research heat
Point.In the preparation research of nano material, the control of the composition of material, structure, pattern, arrangement etc. all will affect nano material
Expected specific physical property.Therefore, template preparation nano material causes extensive attention, different from commonsense method,
Reaction is carried out in the range areas that effectively controls always, and template, which prepares nano material, has preferable flexibility, can be with
The size and structure for preferably controlling nano material, can also prevent the generation of nano material agglomeration.
Core of the hole template as template preparation nano material, is the key that prepare ideal nano material, and many
There is also higher cost in the preparation method of hole template, the problems such as complex process.Such as prepare anodic oxidation aluminium formwork (AAO mould
Plate) technique in, be related to high annealing, electrochemical polish, anodic oxidation, reaming etc. processing step, hole template not only exists
Preparation process challenge, the acidic electrolysis bath after use certain pollution is also resulted in environment.Therefore in hole template
In preparation process, how to realize low cost, cleaning, simply severe chooses be that template preparation field of nanometer material technology faces
War.
Therefore, it is necessary to study a kind of simple process, the preparation method of micro-nano through-hole template at low cost.
Summary of the invention
The present invention is to overcome the defect of the preparation process complexity and higher cost of hole template described in the above-mentioned prior art, is provided
A kind of preparation method of micro-nano through-hole template, the preparation method simple process provided, cost is relatively low, does not need complicated equipment,
And environmental pollution degree is low, solves the problem of hole template preparation process complexity, higher cost.
Another object of the present invention is to provide micro-nano through-hole templates obtained by above-mentioned preparation method.
A further purpose of the present invention is to provide above-mentioned micro-nano through-hole template in preparation nano material or micro-nano device
Using.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
A kind of preparation method of micro-nano through-hole template, includes the following steps:
S1. hydrophilic film is deposited on blade；
S2. after mixing by PDMS and curing agent, it is cast on hydrophilic film, obtains PDMS template；
S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；
S4. the antistructure template in reduction steps S3, obtains micro-nano through-hole template.
The preparation method of micro-nano through-hole template provided by the invention, is to deposit hydrophilic film on blade, utilizes blade table
The micro-nano structure in face prepares antistructure template, and by the way that antistructure template is thinned, obtains micro-nano through-hole template.Hydrophilic film is advantageous
The separation of blade and PDMS template in subsequent step, so that PDMS template more fully replicates the micro-nano knot of blade surface
Structure.The preparation method simple process, cost is relatively low, does not need complicated equipment, and environmental pollution degree is low.Solution of the present invention
The problem of hole template preparation process that determined is complicated, higher cost.
Preferably, hydrophilic film described in step S1 is aluminum oxide film, thin film of titanium oxide or HfO_2 film.It is more excellent
Selection of land, hydrophilic film described in step S1 are thin film of titanium oxide.
Hydrophilic film can increase the contact area of reverse solution and blade, so that PDMS template more fully replicates leaf
The micro-nano structure on piece surface, and hydrophilic film is conducive to the removing of PDMS template and blade in subsequent step.
Preferably, hydrophilic film described in step S1 with a thickness of the nm of 2 nm ~ 20.It is highly preferred that parent described in step S1
Water film with a thickness of 10 nm.
Preferably, blade described in step S1 is lotus leaf, Rice Leaf, roseleaf.
It is highly preferred that blade described in step S1 is lotus leaf.
Preferably, the lotus leaf is mature new new lotus leaf.Blade is cut into required shape.
Preferably, the shape is circle.
Preferably, the mastoid process height of blade described in step S1 is 6 ~ 13 μm.
Preferably, it is total that atomic layer deposition (ALD), molecular-layer deposition (MLD) or electron cyclotron are deposited as described in step S1
The plasmaassisted pulse laser that shakes deposits (ECR-PLD).It is highly preferred that being deposited as atomic layer deposition described in step S1
(ALD).
In the present invention, the PDMS is dimethyl silicone polymer.
Preferably, the curing agent is the crosslinking agent of dibutyl in February cinnamic acid tin.
Preferably, the mass ratio of PDMS described in step S2 and curing agent is 5 ~ 30: 1.It is highly preferred that described in step S2
The mass ratio of PDMS and curing agent is 10: 1.
Preferably, PDMS template described in step S2 with a thickness of 15 μm ~ 100 μm.It is highly preferred that described in step S2
PDMS template with a thickness of 15 μm.
Preferably, the preparation method of the PDMS template further includes the steps that baking and curing.
Preferably, the mode of removing described in step S3 is to be removed using micromanipulator.
Preferably, it is thinned described in step S4 and uses Ion Beam Milling Technique.
Preferably, micro-nano through-hole template described in step S4 is micron through-hole template or nanometer through-hole template.
Preferably, the micron through-hole template with a thickness of 4 ~ 12 μm.It is highly preferred that the thickness of the micron through-hole template
Degree is 11 μm.
Preferably, the aperture of the micron through-hole template is 3 ~ 10 μm.It is highly preferred that the aperture of the micron through-hole template
It is 5 μm.
Preferably, the nanometer through-hole template with a thickness of 5 ~ 13 μm.It is highly preferred that the thickness of the nanometer through-hole template
It is 12 μm.
Preferably, the aperture of the nanometer through-hole template is 5 ~ 100 nm.It is highly preferred that the hole of the nanometer through-hole template
Diameter is 20 nm.
The present invention protects micro-nano through-hole template made from above-mentioned preparation method simultaneously.
The present invention also protects application of the above-mentioned micro-nano through-hole template in preparation nano material or micro-nano device.
The present invention also protects application of the above-mentioned micro-nano through-hole template in quantum dot.
Compared with prior art, the beneficial effects of the present invention are:
The present invention deposits hydrophilic film on blade, prepares antistructure template using the micro-nano structure of blade surface, and by subtracting
Thin antistructure template, obtains micro-nano through-hole template.Preparation method simple process provided by the invention, cost is relatively low, does not need multiple
Miscellaneous equipment, and environmental pollution degree is low, solves the problem of hole template preparation process complexity, higher cost.
Detailed description of the invention
Fig. 1 is the process flow chart of the micro-nano through-hole template preparation method of embodiment 1.
Fig. 2 is the surface texture schematic diagram of lotus leaf.
Fig. 3 is the structural schematic diagram that presents in the micro-nano through-hole template preparation method step S1 of embodiment 1.
Fig. 4 is the structural schematic diagram that presents in the micro-nano through-hole template preparation method step S2 of embodiment 1.
Fig. 5 is the structural schematic diagram that presents in the micro-nano through-hole template preparation method step S3 of embodiment 1.
The axial direction of micron through-hole structure of the Fig. 6 to present in the micro-nano through-hole template preparation method step S4 of embodiment 1 is cut
Face figure.
The axial direction of micron through-hole structure of the Fig. 7 to present in the micro-nano through-hole template preparation method step S4 of embodiment 2 is cut
Face figure.
Wherein, 1, the lotus leaf of required shape, 2, hydrophilic film, 3, PDMS template, 30, micron through-hole template, 31, nanometer it is logical
Hole template.
Specific embodiment
The invention will be further described With reference to embodiment, but embodiments of the present invention are not limited to
This.Raw material in embodiment can be by being commercially available；Unless stated otherwise, the present invention uses reagent, method and apparatus for
The art conventional reagent, method and apparatus.
Please refer to Fig. 1 ~ 6.It should be noted that only the invention is illustrated in a schematic way for diagram provided in the present embodiment
Basic conception, only shown in schema then with related component in the present invention rather than component count, shape when according to actual implementation
Shape and size are drawn, when actual implementation kenel, quantity and the ratio of each component can arbitrarily change for one kind, and its component cloth
Office's kenel may also be increasingly complex.
Embodiment 1
A kind of preparation method of micro-nano through-hole template, includes the following steps:
S1. mature new new lotus leaf is cut into required shape, using atomic layer deposition method, deposits one on circular lotus leaf
10 nm thin film of titanium oxide of layer；
It S2. is in mass ratio 10: 1 after mixing casting by the crosslinking agent curing agent of PDMS and dibutyl in February cinnamic acid tin
On thin film of titanium oxide, baking and curing obtains the PDMS template with a thickness of 15 μm；
S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；
S4. using the antistructure template in Ion Beam Milling Technique reduction steps S3, the micron through-hole mould with a thickness of 11 μm is obtained
Plate, aperture are 5 μm.
Embodiment 2
A kind of preparation method of micro-nano through-hole template, includes the following steps:
S1. mature fresh paddy rice leaf is cut into required shape, using atomic layer deposition method, is deposited on circular lotus leaf
One layer of 2 nm aluminum oxide film；
It S2. is in mass ratio 5: 1 after mixing casting by the crosslinking agent curing agent of PDMS and dibutyl in February cinnamic acid tin
On aluminum oxide film, baking and curing obtains the PDMS template with a thickness of 15 μm；
S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；
S4. using the antistructure template in Ion Beam Milling Technique reduction steps S3, the micron through-hole mould with a thickness of 11 μm is obtained
Plate, aperture are 4 μm.
Embodiment 3
A kind of preparation method of micro-nano through-hole template, includes the following steps:
S1. mature fresh Folium Ipomoeae is cut into required shape, using atomic layer deposition method, is deposited on circular lotus leaf
One layer of 20 nm HfO_2 film；
It S2. is in mass ratio 30: 1 after mixing casting by the crosslinking agent curing agent of PDMS and dibutyl in February cinnamic acid tin
On HfO_2 film, baking and curing obtains the PDMS template with a thickness of 15 μm；
S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；
S4. using the antistructure template in Ion Beam Milling Technique reduction steps S3, the micron through-hole mould with a thickness of 11 μm is obtained
Plate, aperture are 9 μm.
Embodiment 4
The present embodiment the difference from embodiment 1 is that, the hydrophilic film of the present embodiment is aluminum oxide film, is obtained with a thickness of 11 μm
Micron through-hole template, aperture be 4 μm；
Other raw material stages and operating condition and embodiment 1 are consistent.
Embodiment 5
The present embodiment the difference from embodiment 1 is that, the hydrophilic film of the present embodiment is HfO_2 film, is obtained with a thickness of 11
μm micron through-hole template, aperture be 3 μm；
Other raw material stages and operating condition and embodiment 1 are consistent.
Embodiment 6
The present embodiment the difference from embodiment 1 is that, the present embodiment obtains the nanometer with a thickness of 12 μm by Ion Beam Milling Technique
Through-hole template, aperture 20nm；
Other raw material stages and operating condition and embodiment 1 are consistent.
Comparative example 1
A kind of preparation method of through-hole template, includes the following steps:
S1. mature new new lotus leaf is cut into required shape；
It S2. is in mass ratio 10: 1 after mixing casting by the crosslinking agent curing agent of PDMS and dibutyl in February cinnamic acid tin
On lotus leaf, baking and curing obtains the PDMS template with a thickness of 15 μm；
S3. stripping blade obtains antistructure template；
S4. using the antistructure template in Ion Beam Milling Technique reduction steps S3, it is unable to get a micron through-hole template, also can not
Obtain a nanometer through-hole template.
But due to covering one layer of hydrophilic film not on blade, causing PDMS template can not be completely in this comparative example 1
The structure on blade is replicated, therefore is thinned after template using Ion Beam Milling Technique and is unable to get micro through hole template.
Embodiment 1 and embodiment 4 ~ 5 are compared it is found that using the effect of thin film of titanium oxide better than aluminum oxide film and
HfO_2 film.Due to titanium oxide hydrophilic radical be more than aluminium oxide and hafnium oxide, the hydrophily of titanium oxide more preferably,
The mastoid process structure of blade surface can more fully be replicated.
In conclusion the present invention prepares micro-nano through-hole template, preparation method technique letter using the micro-nano structure of blade surface
Easily, cost is relatively low, does not need complicated equipment.And the present invention is based on the preparations of the micro-nano through-hole template of blade surface micro-nano structure
Method is to prepare micro-nano through-hole template using natural blades as plant template, has the characteristics that technique cleanliness without any pollution.Prepare work
Skill cleaning, environmental pollution degree are low.Micro-nano through-hole template preparation method provided by the invention solves the preparation work of hole template
The problem of skill is complicated, higher cost.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (10)
1. a kind of preparation method of micro-nano through-hole template, which comprises the steps of:
S1. hydrophilic film is deposited on blade；
S2. after mixing by PDMS and curing agent, it is cast on hydrophilic film, obtains PDMS template；
S3. stripping blade obtains the antistructure template of blade surface micro-nano structure；
S4. the antistructure template in reduction steps S3, obtains micro-nano through-hole template.
2. preparation method according to claim 1, which is characterized in that hydrophilic film described in step S1 is that titanium oxide is thin
Film, aluminum oxide film or HfO_2 film.
3. preparation method according to claim 2, which is characterized in that hydrophilic film described in step S1 is that titanium oxide is thin
Film.
4. described in any item preparation methods according to claim 1 ~ 3, which is characterized in that the thickness of hydrophilic film described in step S1
Degree is the nm of 2 nm ~ 20.
5. preparation method according to claim 1, which is characterized in that blade described in step S1 is lotus leaf, Rice Leaf, rose
Rare petal.
6. preparation method according to claim 1, which is characterized in that 6 ~ 13 μ of mastoid process height of blade described in step S1
m。
7. preparation method according to claim 6, which is characterized in that PDMS template described in step S2 with a thickness of 15 μm
~100 μm。
8. micro-nano through-hole template made from the described in any item preparation methods of claim 1 ~ 7.
9. application of the micro-nano through-hole template according to any one of claims 8 in preparation nano material or micro-nano device.
10. application of the micro-nano through-hole template according to any one of claims 8 in quantum dot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910092159.3A CN109835869B (en) | 2019-01-30 | 2019-01-30 | Micro-nano through hole template and preparation method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910092159.3A CN109835869B (en) | 2019-01-30 | 2019-01-30 | Micro-nano through hole template and preparation method and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109835869A true CN109835869A (en) | 2019-06-04 |
| CN109835869B CN109835869B (en) | 2021-03-30 |
Family
ID=66884451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910092159.3A Active CN109835869B (en) | 2019-01-30 | 2019-01-30 | Micro-nano through hole template and preparation method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109835869B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530313A (en) * | 2019-07-26 | 2019-12-03 | 西安交通大学 | One kind is across multiple dimensioned line width standard of magnitude and preparation method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050206048A1 (en) * | 2004-03-17 | 2005-09-22 | Ryu Wonhyoung | 3-D interconnected multi-layer microstructure of thermoplastic materials |
| JP2007136790A (en) * | 2005-11-16 | 2007-06-07 | Ricoh Elemex Corp | Process for producing through hole structure by imprinting method, and through hole structure produced by that method |
| JP2009061745A (en) * | 2007-09-08 | 2009-03-26 | Kagawa Univ | Method of manufacturing microneedle |
| CN101537682A (en) * | 2009-03-16 | 2009-09-23 | 浙江工业大学 | Method for preparing superhydrophobic surface by using nano-particles for assisting micromolding |
| CN101632903A (en) * | 2009-07-07 | 2010-01-27 | 河北工业大学 | Polyvinylidene fluoride microporous film and preparation method |
| CN102316823A (en) * | 2009-02-11 | 2012-01-11 | 新加坡南洋理工大学 | Multi-layered surgical prosthesis |
| US20140010994A1 (en) * | 2012-07-09 | 2014-01-09 | Massachusetts Institute Of Technology | Inverted Nanocone Structures for Multifunctional Surface and its Fabrication Process |
| CN104002474A (en) * | 2014-05-12 | 2014-08-27 | 华南理工大学 | Preparation method and application of super-hydrophobic and adhesion-adjustable surface with micro-nano composite structure |
| CN106185794A (en) * | 2016-08-24 | 2016-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of porous array polymethyl methacrylate template and preparation method thereof |
| CN108089398A (en) * | 2018-01-04 | 2018-05-29 | 大连大学 | A kind of nanometer of through-hole array polymer template and preparation method thereof |
-
2019
- 2019-01-30 CN CN201910092159.3A patent/CN109835869B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050206048A1 (en) * | 2004-03-17 | 2005-09-22 | Ryu Wonhyoung | 3-D interconnected multi-layer microstructure of thermoplastic materials |
| JP2007136790A (en) * | 2005-11-16 | 2007-06-07 | Ricoh Elemex Corp | Process for producing through hole structure by imprinting method, and through hole structure produced by that method |
| JP2009061745A (en) * | 2007-09-08 | 2009-03-26 | Kagawa Univ | Method of manufacturing microneedle |
| CN102316823A (en) * | 2009-02-11 | 2012-01-11 | 新加坡南洋理工大学 | Multi-layered surgical prosthesis |
| CN101537682A (en) * | 2009-03-16 | 2009-09-23 | 浙江工业大学 | Method for preparing superhydrophobic surface by using nano-particles for assisting micromolding |
| CN101632903A (en) * | 2009-07-07 | 2010-01-27 | 河北工业大学 | Polyvinylidene fluoride microporous film and preparation method |
| US20140010994A1 (en) * | 2012-07-09 | 2014-01-09 | Massachusetts Institute Of Technology | Inverted Nanocone Structures for Multifunctional Surface and its Fabrication Process |
| CN104002474A (en) * | 2014-05-12 | 2014-08-27 | 华南理工大学 | Preparation method and application of super-hydrophobic and adhesion-adjustable surface with micro-nano composite structure |
| CN106185794A (en) * | 2016-08-24 | 2016-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of porous array polymethyl methacrylate template and preparation method thereof |
| CN108089398A (en) * | 2018-01-04 | 2018-05-29 | 大连大学 | A kind of nanometer of through-hole array polymer template and preparation method thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530313A (en) * | 2019-07-26 | 2019-12-03 | 西安交通大学 | One kind is across multiple dimensioned line width standard of magnitude and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109835869B (en) | 2021-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Chu et al. | Fabrication and characteristics of ordered Ni nanostructures on glass by anodization and direct current electrodeposition | |
| CN101537682B (en) | Method for preparing superhydrophobic surface by using nano-particles for assisting micromolding | |
| CN107502936A (en) | A kind of method for obtaining large aperture doubled via AAO films | |
| CN102773026B (en) | Surface modification method for polytetrafluoroethylene separation membrane | |
| US11560635B2 (en) | Electrode for gas generation, method of preparing the electrode and device including the electrode for gas generation | |
| CN106435665B (en) | One kind having dendritic micropin wing copper surface texture of natural multi-resolution tree and preparation method thereof | |
| Yamada et al. | Fabrication of arrays of tapered silicon micro-/nano-pillars by metal-assisted chemical etching and anisotropic wet etching | |
| CN108459004A (en) | A kind of preparation method of silver and gold nano grain coating zinc oxide surface enhanced Raman scattering effect substrate | |
| CN104250813A (en) | Method for preparing super-hydrophobic self-cleaned corrosion-resisting surface of magnesium alloy | |
| CN109835869A (en) | A kind of micro-nano through-hole template and the preparation method and application thereof | |
| CN105908220B (en) | A kind of method that liquid electrodeposition prepares micro-nano silver dendrite | |
| CN105617881B (en) | A kind of preparation method for the inoranic membrane for repairing carrier surface defect | |
| CN110205587A (en) | A kind of method of template annealing preparation large area regular array gold nano grain array | |
| CN108424002B (en) | Cover plate and preparation method thereof | |
| CN103406248A (en) | Manufacturing method for copper-based super-hydrophobic surface structure | |
| CN110304636A (en) | A kind of method that vacuum filtration prepares photo crystal thick | |
| CN109081327A (en) | A kind of bowl-shape porous carbon microsphere and preparation method thereof | |
| CN104726920A (en) | Method for preparing and transferring ultrathin perforated anode alumina template | |
| Han et al. | Elimination of nanovoids induced during electroforming of metallic nanostamps with high-aspect-ratio nanostructures by the pulse reverse current electroforming process | |
| CN113862519A (en) | Shape memory alloy hollow micro-lattice material and preparation method thereof | |
| CN106554016B (en) | A kind of application of the method and silylene film of mechanical stripping preparation silylene film | |
| CN1731279A (en) | Method for preparing three-dimensional micro-configuration of unidimensional nanometer material | |
| CN105800681B (en) | A kind of TiO with photonic crystal properties2The preparation method of nano particle | |
| Choi et al. | Development of an air-knife system for highly reproducible fabrication of polydimethylsiloxane microstencils | |
| CN111029248B (en) | Method for directly writing high-precision third-generation semiconductor through EBL (electronic strip line) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yuan Zhishan Inventor after: Wu Dandan Inventor after: Wang Chengyong Inventor before: Wu Dandan Inventor before: Yuan Zhishan Inventor before: Wang Chengyong Inventor before: Ling Xinsheng |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |