CN109827680B - 一种基于cmos传感器的三维高灵敏度测微力计 - Google Patents
一种基于cmos传感器的三维高灵敏度测微力计 Download PDFInfo
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- CN109827680B CN109827680B CN201910209253.2A CN201910209253A CN109827680B CN 109827680 B CN109827680 B CN 109827680B CN 201910209253 A CN201910209253 A CN 201910209253A CN 109827680 B CN109827680 B CN 109827680B
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- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical group [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 25
- 230000035945 sensitivity Effects 0.000 claims abstract description 15
- 239000000523 sample Substances 0.000 claims abstract description 10
- 235000014676 Phragmites communis Nutrition 0.000 claims description 25
- 238000005259 measurement Methods 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 6
- 238000011896 sensitive detection Methods 0.000 claims description 3
- 238000012805 post-processing Methods 0.000 description 3
- 244000273256 Phragmites communis Species 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
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Abstract
Description
靶面尺寸 | 1/2.3寸 |
水平/垂直分辨率 | 4608×3288 |
分辨率 | 14MP |
帧速率 | 10fps |
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CN1971248A (zh) * | 2006-11-17 | 2007-05-30 | 中国科学院上海光学精密机械研究所 | 高精度薄膜应力实时测量装置及测量方法 |
CN102507054A (zh) * | 2011-11-02 | 2012-06-20 | 中国人民解放军国防科学技术大学 | 基于y型腔正交偏振激光器的力和质量测量方法及装置 |
CN205373641U (zh) * | 2016-03-07 | 2016-07-06 | 安徽电气工程职业技术学院 | 三维微纳米触发式探头 |
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WO2007015616A1 (en) * | 2005-08-01 | 2007-02-08 | Nanotron Technologies, Inc. | Apparatus and method for measuring curvature using multiple beams |
CN101251472B (zh) * | 2008-03-19 | 2010-06-02 | 中国科学院上海光学精密机械研究所 | 双光束在线实时测量光学薄膜应力的装置及其测量方法 |
CN101308051B (zh) * | 2008-07-01 | 2011-01-12 | 西安交通大学 | 三维微力硅微传感器 |
CN102589423B (zh) * | 2012-01-10 | 2014-03-12 | 合肥工业大学 | 微纳米三维接触扫描测量探头 |
CN202537487U (zh) * | 2012-05-11 | 2012-11-21 | 浙江大学 | 基于oct的大动态范围流速的高灵敏度测量系统 |
CN104215367B (zh) * | 2014-08-28 | 2017-01-25 | 天津大学 | 多维应力光子晶体光纤测试装置及方法 |
CN104457613B (zh) * | 2014-12-26 | 2017-06-30 | 合肥工业大学 | 一种三维微纳米接触触发式探头 |
CN107131981B (zh) * | 2016-02-26 | 2019-07-19 | 西红柿科技(武汉)有限公司 | 一种用于研究应力和磁记忆效应关系的装置 |
CN105627949B (zh) * | 2016-03-07 | 2017-12-26 | 合肥工业大学 | 光学传感式三维高精度接触扫描测量探头 |
CN105547157B (zh) * | 2016-03-07 | 2018-04-06 | 安徽电气工程职业技术学院 | 三维微纳米触发式探头 |
CN207472201U (zh) * | 2017-10-09 | 2018-06-08 | 茂莱(南京)仪器有限公司 | 一种精密位移传感器 |
CN108317959A (zh) * | 2018-04-04 | 2018-07-24 | 孝感锐创机械科技有限公司 | 一种基于劈尖干涉的垂直振动位移检测装置 |
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CN1971248A (zh) * | 2006-11-17 | 2007-05-30 | 中国科学院上海光学精密机械研究所 | 高精度薄膜应力实时测量装置及测量方法 |
CN102507054A (zh) * | 2011-11-02 | 2012-06-20 | 中国人民解放军国防科学技术大学 | 基于y型腔正交偏振激光器的力和质量测量方法及装置 |
CN205373641U (zh) * | 2016-03-07 | 2016-07-06 | 安徽电气工程职业技术学院 | 三维微纳米触发式探头 |
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Denomination of invention: A 3D High Sensitivity Microforce Meter Based on CMOS Sensor Granted publication date: 20210115 Pledgee: China Co. truction Bank Corp Hefei Luyang branch Pledgor: ANHUI DINGLI NETWORK TECHNOLOGY Co.,Ltd. Registration number: Y2024980014561 |