CN109825810A - Alarm device is worn in a kind of plating of vacuum coating sputtering target material - Google Patents
Alarm device is worn in a kind of plating of vacuum coating sputtering target material Download PDFInfo
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- CN109825810A CN109825810A CN201910271492.0A CN201910271492A CN109825810A CN 109825810 A CN109825810 A CN 109825810A CN 201910271492 A CN201910271492 A CN 201910271492A CN 109825810 A CN109825810 A CN 109825810A
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- China
- Prior art keywords
- air pressure
- annular hollow
- pressure piece
- hollow air
- target
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- 238000007747 plating Methods 0.000 title claims abstract description 20
- 238000005477 sputtering target Methods 0.000 title claims abstract description 17
- 239000013077 target material Substances 0.000 title claims abstract description 17
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 12
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000498 cooling water Substances 0.000 claims abstract description 18
- 229910052802 copper Inorganic materials 0.000 claims abstract description 18
- 239000010949 copper Substances 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 238000013461 design Methods 0.000 abstract description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of platings of vacuum coating sputtering target material to wear alarm device, it is characterized in that, including metal fixing seat, metal fixing seat center is equipped with mounting hole, target, annular hollow air pressure piece and cooling water copper sheet are equipped in the mounting hole, the target, annular hollow air pressure piece and cooling water copper sheet, which are sequentially overlapped, to be arranged in mounting hole, the external connecting leg of annular hollow air pressure piece, the connecting leg end is equipped with barometric indicator, and passes through the air pressure inside barometric indicator real-time measurement annular hollow air pressure piece.Beneficial effects of the present invention: it is ingenious in design, it is structurally reasonable, it is easy to use.
Description
Technical field
The invention belongs to sputter coating safe operation fields, and in particular to alarm dress is worn in a kind of plating of vacuum coating sputtering target material
It sets.
Background technique
The requirement of sputtering target material is high compared with traditional material industry, general that such as size, flatness, purity, every impurity is required to contain
Amount, density, crystallite dimension and powder injection molding etc..Magnetron sputtering plating is a kind of novel physical vapor plated film mode, is exactly used
Electron gun system is electron emission and focuses on plated material, and the atom for making it be sputtered out follows momentum transfer principle
Material is detached from higher kinetic energy and flies to substrate deposition film forming, and this plated material is just sputtering target material.Sputtering target material has gold
Belong to, alloy, ceramic compound etc..
Currently, the observation experience for relying primarily on people is worn to prevent the plating of target, and after target plating is worn, there is no alarm system
System, machine will continue to sputter cooling water copper sheet, can generate great danger at this time.Therefore how rapidly, at low cost, operation
It easily realizes that target plating wears that alarm is very crucial, has become the crucial problem for influencing film research and development field.
Summary of the invention
For the above-mentioned problems in the prior art, the purpose of the present invention is to provide a kind of vacuum coating sputtering target materials
Alarm device is worn in plating, realizes that alarm is worn in target plating rapidly, at low cost, easy to operately to realize.
The invention adopts the following technical scheme:
Alarm device is worn in a kind of plating of vacuum coating sputtering target material, which is characterized in that including metal fixing seat, the metal fixing seat
Center is equipped with mounting hole, is equipped with target, annular hollow air pressure piece and cooling water copper sheet in the mounting hole, the target,
Annular hollow air pressure piece and cooling water copper sheet, which are sequentially overlapped, to be arranged in mounting hole, the external connecting leg of annular hollow air pressure piece,
The connecting leg end is equipped with barometric indicator, and passes through the air pressure inside barometric indicator real-time measurement annular hollow air pressure piece.
Alarm device is worn in a kind of vacuum coating sputtering target material plating, which is characterized in that the annular hollow air pressure piece
Inside is equipped with one group of annular hollow room from inside to outside, and outlet passageway, and annular are additionally provided with inside the annular hollow air pressure piece
The air inlet/outlet of hollow chamber is connected with outlet passageway respectively, and is connected by outlet passageway with connecting leg.
Alarm device is worn in a kind of vacuum coating sputtering target material plating, which is characterized in that at the top of the metal fixed station
Marginal position is in the clamp clips of 120 ° of distributions there are three setting, and will be pressed abd fixed on metal fixed station at the top of target by clamp clip
On.
A kind of sputter coating semiconductor chilling plate target cooling device, which is characterized in that the metal fixed station
Using cylindrical structure, the mounting hole is looping pit, and the target, annular hollow air pressure piece and cooling water copper sheet are circle
Structure, the target, annular hollow air pressure piece and cooling water copper sheet are equipped in looping pit.
Beneficial effects of the present invention: it is ingenious in design, it is structurally reasonable, it is easy to use, sputtering target material plating is realized using the present apparatus
Alarm is worn, the observation operating process of people has been significantly simplified, the risk after sputtering target material plating is worn is reduced, improves safety, it is right
The research field of film has great importance.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is annular hollow air pressure piece schematic diagram of internal structure of the invention；
In figure: 1- metal fixing seat, 2- target, 3- clamp clip, 4- annular hollow air pressure piece, 5- cooling water copper sheet, 6- air pressure refer to
Show device, 7- connecting leg.
Specific embodiment
Technical solution of the present invention is further described below in conjunction with Figure of description:
As shown in Figs. 1-2, alarm device, including metal fixing seat 1, target 2, clamp clip are worn in a kind of vacuum coating sputtering target material plating
3, annular hollow air pressure piece 4, cooling water copper sheet 5, barometric indicator 6 and connecting leg 7.
Alarm device, including metal fixing seat 1 are worn in sputtering coating target plating, and 1 center of metal fixing seat is equipped with installation
Hole, mounting hole is interior to be equipped with target 2, annular hollow air pressure piece 4 and cooling water copper sheet 5, target 2, annular hollow air pressure piece 4 and cooling
Water copper sheet 5 be sequentially overlapped be arranged in mounting hole, 1 top edge position of metal fixed station set there are three in 120 ° distribution clampings
Piece 3, and will be pressed abd fixed on metal fixed station 1 at the top of target 2 by clamp clip 3；The external connecting leg 7 of annular hollow air pressure piece 4,
7 end of connecting leg is equipped with barometric indicator 6, and passes through the air pressure inside 6 real-time measurement annular hollow air pressure piece 4 of barometric indicator.
One group of annular hollow room 401 from inside to outside is equipped with inside annular hollow air pressure piece 4, in annular hollow air pressure piece 4
Portion is additionally provided with outlet passageway 403, and the air inlet/outlet 402 of annular hollow room 401 is connected with outlet passageway 403 respectively, and leads to
Outlet passageway 403 is crossed to be connected with connecting leg 7.Argon gas filled with 100Pa air pressure in the hollow chamber of annular hollow air pressure piece 4, annular
Hollow air pressure piece 4 is connected by connecting leg 7 with barometric indicator 6.Barometric indicator 6 can be with real-time measurement annular hollow air pressure piece 4
Internal air pressure is worn if target 2 is plated, and the upper end thin-walled of annular hollow air pressure piece 4 can also be plated wear quickly, annular hollow gas
Argon gas inside tabletting 4 can be discharged into vacuum chamber at once, and the registration of barometric indicator 6 can sharply decline, and generate alerting effects.
Wherein metal fixed station 6 uses cylindrical structure, and the mounting hole is looping pit, target 2, annular hollow air pressure piece
4 and cooling water copper sheet 5 be circular configuration, target 2, annular hollow air pressure piece 4 and cooling water copper sheet 5 are equipped in annular
In hole.
The course of work:
First by target 2, annular hollow air pressure piece 4 and cooling water copper sheet 5 are sequentially arranged at 1 on metal fixed station, then tighten
Target 2 is fixed in the clamp clip 3 of 120 ° of circle distributions.Sputter coating process is then carried out, as the time of plated film increases,
Target is gradually consumed, and thickness reduces, until plated wear.Later, the upper end thin-walled of annular hollow air pressure piece 4 can be also plated quickly
It wears, the argon gas inside annular hollow air pressure piece 4 can be discharged into vacuum chamber at once, and the registration of barometric indicator 6 can sharply decline,
Generate alerting effects.
Claims (4)
1. alarm device is worn in a kind of vacuum coating sputtering target material plating, which is characterized in that including metal fixing seat (1), the metal
Fixing seat (1) center is equipped with mounting hole, is equipped with target (2), annular hollow air pressure piece (4) and cooling water in the mounting hole
Copper sheet (5), the target (2), annular hollow air pressure piece (4) and cooling water copper sheet (5), which are sequentially overlapped, to be arranged in mounting hole, institute
Annular hollow air pressure piece (4) external connecting leg (7) is stated, connecting leg (7) end is equipped with barometric indicator (6), and refers to by air pressure
Show the internal air pressure of device (6) real-time measurement annular hollow air pressure piece (4).
2. alarm device is worn in a kind of vacuum coating sputtering target material plating according to claim 1, which is characterized in that the annular
One group of annular hollow room (401) from inside to outside is equipped with inside hollow air pressure piece (4), the annular hollow air pressure piece (4) is internal
It is additionally provided with outlet passageway (403), and the air inlet/outlet (402) of annular hollow room (401) is connected with outlet passageway (403) respectively
It is logical, and be connected by outlet passageway (403) with connecting leg (7).
3. alarm device is worn in a kind of vacuum coating sputtering target material plating according to claim 1, which is characterized in that the metal
Fixed station (1) top edge position is in the clamp clips (3) of 120 ° of distributions there are three setting, and is pushed up target (2) by clamp clip (3)
Portion is pressed abd fixed on metal fixed station (1).
4. a kind of sputter coating semiconductor chilling plate target cooling device according to claim 1, which is characterized in that described
Metal fixed station (6) uses cylindrical structure, and the mounting hole is looping pit, the target (2), annular hollow air pressure piece (4)
And cooling water copper sheet (5) is circular configuration, the target (2), annular hollow air pressure piece (4) and cooling water copper sheet (5) are matched
It closes and is arranged in looping pit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910271492.0A CN109825810A (en) | 2019-04-04 | 2019-04-04 | Alarm device is worn in a kind of plating of vacuum coating sputtering target material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910271492.0A CN109825810A (en) | 2019-04-04 | 2019-04-04 | Alarm device is worn in a kind of plating of vacuum coating sputtering target material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109825810A true CN109825810A (en) | 2019-05-31 |
Family
ID=66874879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910271492.0A Pending CN109825810A (en) | 2019-04-04 | 2019-04-04 | Alarm device is worn in a kind of plating of vacuum coating sputtering target material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109825810A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070068804A1 (en) * | 2005-09-26 | 2007-03-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pvd target with end of service life detection capability |
| DE102010052341A1 (en) * | 2010-11-25 | 2012-05-31 | Von Ardenne Anlagentechnik Gmbh | Protection device on tube target in vacuum process chamber, useful for detecting its minimum cross-sectional minimum diameter predetermined by diameter, comprises radially directed capillary line running from interior of the tube target |
| CN102953038A (en) * | 2011-08-18 | 2013-03-06 | 台湾积体电路制造股份有限公司 | Sputtering target with reverse erosion profile surface and sputtering system and method using the same |
| US20140110254A1 (en) * | 2012-10-19 | 2014-04-24 | Infineon Technologies Ag | Backing Plate for a Sputter Target, Sputter Target, and Sputter Device |
| CN210176939U (en) * | 2019-04-04 | 2020-03-24 | 浙江工业大学 | Vacuum coating sputtering target material plating through alarm device |
-
2019
- 2019-04-04 CN CN201910271492.0A patent/CN109825810A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070068804A1 (en) * | 2005-09-26 | 2007-03-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Pvd target with end of service life detection capability |
| DE102010052341A1 (en) * | 2010-11-25 | 2012-05-31 | Von Ardenne Anlagentechnik Gmbh | Protection device on tube target in vacuum process chamber, useful for detecting its minimum cross-sectional minimum diameter predetermined by diameter, comprises radially directed capillary line running from interior of the tube target |
| CN102953038A (en) * | 2011-08-18 | 2013-03-06 | 台湾积体电路制造股份有限公司 | Sputtering target with reverse erosion profile surface and sputtering system and method using the same |
| US20140110254A1 (en) * | 2012-10-19 | 2014-04-24 | Infineon Technologies Ag | Backing Plate for a Sputter Target, Sputter Target, and Sputter Device |
| CN210176939U (en) * | 2019-04-04 | 2020-03-24 | 浙江工业大学 | Vacuum coating sputtering target material plating through alarm device |
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