CN109817555A - A kind of PECVD film thickness programming count compensation system - Google Patents
A kind of PECVD film thickness programming count compensation system Download PDFInfo
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- CN109817555A CN109817555A CN201910095562.1A CN201910095562A CN109817555A CN 109817555 A CN109817555 A CN 109817555A CN 201910095562 A CN201910095562 A CN 201910095562A CN 109817555 A CN109817555 A CN 109817555A
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- film thickness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a kind of PECVD film thickness programming count compensation systems, belong to silicon solar cell manufacturing field, its object is to: solving the problems, such as in PECVD process in the prior art that film thickness is difficult to obtain timely and effective monitoring causes product defect rate high, the present invention includes PECVD furnace tube device, automated handling piece equipment, it is characterized in that, further including ATM system and middle control computer；ATM system is transferred in middle control computer for acquiring the solar battery sheet film thickness data conveyed between PECVD furnace tube device and automated handling piece equipment, and by the collected film thickness data of institute；Middle control computer, for calculating the time of compensation needed for solar battery sheet coating process in PECVD furnace tube device and the time being sent to PECVD furnace tube device progress technological compensa tion.The present invention is by timely measuring film thickness data, the complete complete monitoring to cell piece Thickness Variation, and can the adjust automatically process time, improve the whole final product quality of solar battery sheet.
Description
Technical field
The invention belongs to silicon solar cell manufacturing fields, and in particular to a kind of PECVD film thickness programming count compensation system.
Background technique
There is a process to be called PECVD process in manufacture of solar cells, the effect of PECVD process is in silicon solar
One layer of silicon nitride film is deposited on battery, reduces the reflectivity of sunlight, the transfer efficiency of Lai Tigao battery.And in the process mistake
Cheng Zhong, since PECVD furnace tube device uses graphite boat as the carrier of cell piece plating anti oxidation layer, graphite boat is with access times
Increase can accumulate silicon nitride layer on boat body, this silicon nitride layer will affect electric conductivity of the cell piece in graphite boat and then influence
Whole uniformity after plated film will ultimately result in the generation of batch chromatism piece, influence if not carrying out effective monitoring in time to film thickness
The fraction defective of product.
Existing treating method is monitored the uniformity of film thickness generally by piece is taken manually, but the method is often fast
Degree is not comprehensive enough compared with slow and data, leads to that whole efficiency is low, treatment effect is poor, therefore, design one kind can it is more accurate,
Efficiently, the system for monitoring the film thickness data of each boat in time is particularly important.
Summary of the invention
It is an object of the invention to: solve in the prior art that film thickness is difficult to obtain timely and effective monitoring and leads in PECVD process
The problem for causing product defect rate high provides a kind of higher PECVD film thickness programming count benefit of silicon solar cell final product quality
Repay system.
The technical solution adopted by the invention is as follows:
A kind of PECVD film thickness programming count compensation system, including PECVD furnace tube device, automated handling piece equipment, it is special
Sign is, further includes ATM system and middle control computer；
ATM system, for acquiring the solar battery sheet conveyed between PECVD furnace tube device and automated handling piece equipment
Film thickness data, and the collected film thickness data of institute are transferred in middle control computer.
Then middle control computer is counted for setting film thickness monitoring central value, film thickness monitoring line and film thickness exception piece control number
It calculates the time compensated needed for solar battery sheet coating process in PECVD furnace tube device and the time is sent to PECVD boiler tube
Equipment carries out technological compensa tion.
Wherein, ATM system includes film thickness acquisition module and signal delivery module, and film thickness acquisition module is to every a piece of sun
The film thickness data of energy cell piece are acquired；Signal delivery module all sends out the collected film thickness data of film thickness acquisition module institute
It send into middle control computer.
Wherein, middle control computer includes communication module and data processing module, and communication module is for collecting ATM system transmission
Film thickness data and manually set film thickness monitoring central value, film thickness monitoring line and film thickness exception piece control number；Data processing
Module is i.e. to being collected on the basis of the film thickness monitoring central value of setting, film thickness monitoring line and film thickness exception piece control number
Film thickness data handled；Data after communication module is again handled data processing module are transmitted to PECVD furnace tube device.
On this basis, for the film thickness monitoring central value set in middle control computer as M nm, film thickness monitoring line is M ± 10nm,
Film thickness exception piece controls number as Z.
The film thickness data according to measured by ATM system, middle control computer can the progress of the thickness according to set by film thickness monitoring line
It screens out, solar battery sheet film thickness is film thickness exception piece beyond film thickness monitoring line, and the film thickness data of film thickness exception piece are not
It can enter in data pool collected, after the solar battery sheet film thickness of a graphite boat passes through ATM system measurement, such as
The quantity of fruit film thickness exception piece controls number not less than film thickness exception piece, then PECVD furnace tube device is compensated without the process time；Such as
The quantity of fruit film thickness exception piece is less than film thickness exception piece and controls number, then to the film thickness data of all solar battery sheets of the graphite boat
It carries out statistics and calculates average value, the corresponding technological compensa tion time is calculated according to the average value ranges of setting, then again by the information
It feeds back in PECVD furnace tube device, PECVD furnace tube device makes corresponding process time compensation.
In actual production process, the solar battery sheet of a graphite boat is W, and after being measured eventually by ATM system
Entering the solar battery sheet in data pool is H, then its technological compensa tion time T are as follows:
As W-H > Z, then T=0；
As W-H≤Z, then the average film thickness of H solar battery sheets is calculated, sets it as X；
When -1.2≤X-M≤1.2, and when X-M ≠ 0, T is ± 5s,
When -2.4≤X-M≤2.4, and | X-M | when > 1.2, T is ± 10s,
When -3.6≤X-M≤3.6, and | X-M | when > 2.4, T is ± 15s,
When -4.8≤X-M≤4.8, and | X-M | when > 3.6, T is ± 20s,
When -6.0≤X-M≤6.0, and | X-M | when > 4.8, T is ± 25s,
When -7.2≤x-M≤7.2, and | X-M | when > 6.0, T is ± 30s,
When -8.4≤X-M≤8.4, and | X-M | when > 7.2, T is ± 35s,
When -9.6≤X-M≤9.6, and | X-M | when > 8.4, T is ± 40s,
When -10.0≤X-M≤10.0, and | X-M | when > 9.6, T is ± 45s；
Wherein, it as X-M > 0, then needs to increase the corresponding time, as X-M < 0, then needs to reduce the corresponding time.
And more specifically: the solar battery sheet of a graphite boat is 416, and after being measured eventually by ATM system
Entering the solar battery sheet in data pool is H, sets film thickness exception piece control number as 30, and is set in film thickness monitoring
Center value is 76nm, and measuring all film thickness average values into data pool of the graphite boat is X, when needing to carry out process time compensation
When, that is, meet 416-H≤30, offset rule are as follows:
When -1.2≤X-76≤1.2, and when X-M ≠ 0, T is ± 5s,
When -2.4≤X-76≤2.4, and | X-M | when > 1.2, T is ± 10s,
When -3.6≤X-76≤3.6, and | X-M | when > 2.4, T is ± 15s,
When -4.8≤X-76≤4.8, and | X-M | when > 3.6, T is ± 20s,
When -6.0≤X-76≤6.0, and | X-M | when > 4.8, T is ± 25s,
When -7.2≤X-76≤7.2, and | X-M | when > 6.0, T is ± 30s,
When -8.4≤X-76≤8.4, and | X-M | when > 7.2, T is ± 35s,
When -9.6≤X-76≤9.6, and | X-M | when > 8.4, T is ± 40s,
When -10.0≤X-76≤10.0, and | X-M | when > 9.6, T is ± 45s；
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
In the present invention, film thickness data are timely measured by the way that ATM system is arranged, it is complete to the change of cell piece film thickness
The complete monitoring changed, and it can be directed to the access times adjust automatically process time of graphite boat, the control of film thickness average value is existed
Within ideal range, reduce because graphite boat access times difference can not color difference piece caused by the adjusting process time in time.Simultaneously
The problems such as also avoiding the fragment for taking built-in testing to generate manually, scuffing, finger-marks.
Detailed description of the invention
Fig. 1 is the schematic diagram of PECVD film thickness programming count compensation system of the present invention；
Fig. 2 is the flow chart of PECVD film thickness programming count compensation system of the present invention；
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
Embodiment 1
A kind of PECVD film thickness programming count compensation system, including PECVD furnace tube device, automated handling piece equipment, it is special
Sign is, further includes ATM system and middle control computer；ATM system, for acquiring PECVD furnace tube device and automated handling piece
The solar battery sheet film thickness data conveyed between equipment, and the collected film thickness data of institute are transferred in middle control computer；In
Computer is controlled, for calculating the time of compensation needed for solar battery sheet coating process in PECVD furnace tube device and sending out the time
It send to PECVD furnace tube device and carries out technological compensa tion.
Embodiment 2
On the basis of embodiment 1, ATM system includes film thickness acquisition module and signal delivery module, and film thickness acquires mould
Block is acquired the film thickness data of every a piece of solar battery sheet；Signal delivery module is collected by film thickness acquisition module institute
Film thickness data are all sent in middle control computer；And middle control computer further includes communication module and data processing module, communicates mould
Film thickness monitoring central value, film thickness monitoring line and the film thickness that block is used to collect the film thickness data of ATM system transmission and manually sets
Abnormal piece controls number；Data processing module is i.e. in the film thickness monitoring central value of setting, film thickness monitoring line and film thickness exception piece control
The collected film thickness data of institute are handled on the basis of number processed；Communication module data processing module is handled again after number
According to being transmitted to PECVD furnace tube device.
Embodiment 3
On the basis of the above embodiments, when film thickness exception piece quantity is beyond film thickness exception piece control number, PECVD boiler tube
Equipment will be compensated without the process time.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (4)
1. a kind of PECVD film thickness programming count compensation system, including PECVD furnace tube device, automated handling piece equipment, feature
It is, further includes ATM system and middle control computer；
ATM system, for acquiring the solar battery sheet film thickness conveyed between PECVD furnace tube device and automated handling piece equipment
Data, and the collected film thickness data of institute are transferred in middle control computer；
Middle control computer, for calculating the time of compensation needed for solar battery sheet coating process in PECVD furnace tube device and should
Time is sent to PECVD furnace tube device and carries out technological compensa tion.
2. a kind of PECVD film thickness programming count compensation system as described in claim 1, which is characterized in that ATM system includes film
Thick acquisition module and signal delivery module, film thickness acquisition module adopt the film thickness data of every a piece of solar battery sheet
Collection；The collected film thickness data of film thickness acquisition module institute are all sent in middle control computer by signal delivery module.
3. a kind of PECVD film thickness programming count compensation system as claimed in claim 1 or 2, which is characterized in that middle control computer is also
Including communication module and data processing module, communication module is used to collect the film thickness data and artificial setting of ATM system transmission
Film thickness monitoring central value, film thickness monitoring line and film thickness exception piece control number；Data processing module is the film thickness control in setting
Central value, film thickness monitoring line and film thickness exception piece processed are handled the collected film thickness data of institute on the basis of controlling number；
Data after communication module is again handled data processing module are transmitted to PECVD furnace tube device.
4. a kind of PECVD film thickness programming count compensation system as claimed in claim 3, which is characterized in that when film thickness exception piece
When quantity is beyond film thickness exception piece control number, PECVD furnace tube device will be compensated without the process time.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201910095562.1A CN109817555B (en) | 2019-01-30 | 2019-01-30 | Automatic PECVD film thickness statistics and compensation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910095562.1A CN109817555B (en) | 2019-01-30 | 2019-01-30 | Automatic PECVD film thickness statistics and compensation system |
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| CN109817555A true CN109817555A (en) | 2019-05-28 |
| CN109817555B CN109817555B (en) | 2022-01-18 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115305461A (en) * | 2022-09-29 | 2022-11-08 | 江苏邑文微电子科技有限公司 | Automatic control method and device for wafer long film under abnormal working condition |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8796048B1 (en) * | 2011-05-11 | 2014-08-05 | Suvolta, Inc. | Monitoring and measurement of thin film layers |
| CN104979228A (en) * | 2014-04-11 | 2015-10-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film thickness control method and semiconductor processing device |
| CN107331734A (en) * | 2017-08-14 | 2017-11-07 | 通威太阳能（安徽）有限公司 | Done over again after a kind of cell piece PECVD plated films the processing method of piece |
-
2019
- 2019-01-30 CN CN201910095562.1A patent/CN109817555B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8796048B1 (en) * | 2011-05-11 | 2014-08-05 | Suvolta, Inc. | Monitoring and measurement of thin film layers |
| CN104979228A (en) * | 2014-04-11 | 2015-10-14 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Film thickness control method and semiconductor processing device |
| CN107331734A (en) * | 2017-08-14 | 2017-11-07 | 通威太阳能（安徽）有限公司 | Done over again after a kind of cell piece PECVD plated films the processing method of piece |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115305461A (en) * | 2022-09-29 | 2022-11-08 | 江苏邑文微电子科技有限公司 | Automatic control method and device for wafer long film under abnormal working condition |
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| CN109817555B (en) | 2022-01-18 |
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