CN109813762A - A kind of inductance type magnetic nano material sensor and production method - Google Patents
A kind of inductance type magnetic nano material sensor and production method Download PDFInfo
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- CN109813762A CN109813762A CN201910194478.5A CN201910194478A CN109813762A CN 109813762 A CN109813762 A CN 109813762A CN 201910194478 A CN201910194478 A CN 201910194478A CN 109813762 A CN109813762 A CN 109813762A
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Abstract
The present invention provides a kind of inductance type magnetic nano material sensor and production methods, including micro-fluidic detection chip and sensing unit；Micro-fluidic detection chip includes the chip body of substrate of glass and setting on the glass substrate；Chip body includes: that the one end being arranged in chip body is provided with oil liquid entrance, the other end is provided with the microchannel that oil liquid exports；Sensing unit includes solenoid coil and magnetic nano particle sublayer, is bonded completely inside solenoid coil with magnetic nano particle sublayer.Technical solution of the present invention solves in the prior art the problems such as traditional inductance type method detection accuracy is insufficient, and detection timeliness is low, operating difficulties.
Description
Technical field
The present invention relates to oil liquid detection technical fields, specifically, more particularly to a kind of inductance type magnetic nano material biography
Sensor and production method.
Background technique
Particulate pollutant in oil liquid is the main reason for leading to hydraulic decorum failure, is able to detect that particle in oil liquid
The information of pollutant is the reliable scheme that device systems are carried out with fault diagnosis.Studies have shown that when equipment normal operation, oil
Also metal worn particle can be generated in liquid, but grit size is smaller and concentration is stablized, usual grit size is between 10 μm to 20 μm, very
To less than 5 μm；And when equipment is abnormal abrasion, grit size will be rapidly increased to 50 μm even 100 μm, abrasive grain
Concentration can also increase therewith, and such as servicing machine equipment or replacement oil liquid, partial size and concentration can be all gradually increased not in time, and
When these wear particles enter moving component, mechanical breakdown will cause, cause equipment out of service, cause heavy losses.
With the continuous development of detection technique, developed the method for a variety of oil liquid particle detections analytical technologies in recent years,
Diversified trend development is presented in middle granule counting method, has evolved into one of the common method of oil-liquid-solid particle contamination detection.
Particles counting technique is the granule number of various sizes range endoparticle pollutant in analytical unit volume oil sample.It passes through measurement
Grain generate pulse signal amplitude and quantity come determine pollutant in oil liquid size distribution and pollution level, it is thus possible to realize
To the precise measurement of oil particle pollution degree.The technology is small in size, analysis precision is high, the consumption of sample is remarkably decreased, Yi Shixian
Integrated and automation.Currently, the main method of grain count includes resistance detection method, capacitance detecting method, inductance detection method etc..
Inductance detection method predominantly detects the metallic particles in oil liquid, and testing principle is according to by ferromagnetic metal particle and non-ferromagnetic
Property metallic particles is to the Different Effects of former alternating magnetic field, and then the principle for causing the inductance parameters of inductance coil to change distinguishes
Detection.Ferromagnetism and non-ferromagnetic metal particle are distinguished by the way that the inductance pulse of detection coil is positive and negative, is become by inductance parameters
The size of change detects the size of metallic particles particle size.
Summary of the invention
According to the technical problem of traditional inductance method detection accuracy deficiency set forth above, and provide a kind of inductance type magnetic nanometer
Material sensors and production method.Present invention combination magnetic Nano material devises a kind of new inductance detection coil, Neng Gougao
Effect sensitively distinguishes ferromagnetism and non ferromagnetic debris in oil liquid.
The technological means that the present invention uses is as follows:
A kind of inductance type magnetic nano material sensor, including micro-fluidic detection chip and sensing unit；The miniflow
Control detection chip includes the chip body of substrate of glass and setting on the glass substrate；The chip body includes:
The one end being arranged in chip body is provided with oil liquid entrance, the other end is provided with the microchannel that oil liquid exports；
The sensing unit includes solenoid coil and magnetic nano particle sublayer, and the solenoid coil is received with the magnetism
Grain of rice sublayer is bonded completely, and the magnetic nano particle sublayer is inside solenoid coil.
Further, the microchannel is in line type, and microchannel inside the solenoid coil of sensing unit by passing through, simultaneously
Penetrate magnetic nano particle sublayer.
Further, the microchannel diameter is 100-300 microns, and the solenoid coil is formed by enameled wire coiling,
Internal coil diameter is 1000-3000 microns, and enameled wire line footpath is 50-200 microns, and the number of turns is 300-600 circle.
Further, the ferroso-ferric oxide that the magnetic nano particle sublayer is 100 nanometers.
The present invention also provides a kind of production methods of inductance type magnetic nano material sensor, comprising the following steps:
Step 1: microchannel mold is attached on solenoid coil inner wall, then by PDMS material and magnetic by production sensing unit
Property nanoparticle mixed by proper ratio, be poured into inside solenoid coil and fill up, send to 80 DEG C of oven heats solidifications 15
Minute, form magnetic nano particle sublayer；
Step 2: the sensing unit after solidification is poured into PDMS material on the glass substrate by set position is fixed,
Two enamel-cover leads of middle solenoid coil are arranged in outside PDMS material, are poured it by PDMS material；It finally will casting
The chip of good PDMS material is placed to be toasted 1 hour with 80 DEG C of temperature in an oven, is solidified PDMS material, is formed PDMS base
Body；
Step 3: the mold of extraction production microchannel makes oil liquid entrance and oil with punch in microchannel punching two ends
Liquid outlet.
Compared with the prior art, the invention has the following advantages that
Inductance type magnetic nano material sensor provided by the invention, can be realized to 20 microns of iron particle and 40 microns
Copper particle distinguish detection, for the metal worn particle in oil liquid have higher discrimination, while propose production method
Easy to operate, cost of manufacture is cheap, and it is convenient to operate.
To sum up, it applies the technical scheme of the present invention, by what is be bonded completely inside solenoid coil with magnetic nano particle sublayer
Inductance type magnetic nano material sensor solves detection accuracy deficiency in the prior art, and detection timeliness is low, operating difficulties etc.
Problem.
The present invention can be widely popularized in fields such as oil liquid detections based on the above reasons.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to do simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without any creative labor, can be with
It obtains other drawings based on these drawings.
Fig. 1 is sensor of the invention structure chart.
Fig. 2 is the front view of sensing unit of the present invention.
Fig. 3 is sensing unit side view of the present invention.
Fig. 4 is inductance detection ferromagnetic particle signal graph.
Fig. 5 is inductance detection non-ferromagnetic debris signal graph.
In figure: 1, oil liquid entrance；2, oil liquid exports；3, microchannel；4, sensing unit；5, PDMS matrix；6, substrate of glass；
7, solenoid coil；8, magnetic nano particle sublayer.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
It is only a part of the embodiment of the present invention, instead of all the embodiments.It is real to the description of at least one exemplary embodiment below
It is merely illustrative on border, never as to the present invention and its application or any restrictions used.Based on the reality in the present invention
Example is applied, every other embodiment obtained by those of ordinary skill in the art without making creative efforts all belongs to
In the scope of protection of the invention.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to exemplary embodiments of the present invention.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
Unless specifically stated otherwise, positioned opposite, the digital table of the component and step that otherwise illustrate in these embodiments
It is not limited the scope of the invention up to formula and numerical value.Simultaneously, it should be clear that for ease of description, each portion shown in attached drawing
The size divided not is to draw according to actual proportionate relationship.Technology known for person of ordinary skill in the relevant, side
Method and equipment may be not discussed in detail, but in the appropriate case, and the technology, method and apparatus should be considered as authorizing explanation
A part of book.In shown here and discussion all examples, appointing should be construed as merely illustratively to occurrence, and
Not by way of limitation.Therefore, the other examples of exemplary embodiment can have different values.It should also be noted that similar label
Similar terms are indicated in following attached drawing with letter, therefore, once it is defined in a certain Xiang Yi attached drawing, then subsequent attached
It does not need that it is further discussed in figure.
In the description of the present invention, it is to be understood that, the noun of locality such as " front, rear, top, and bottom, left and right ", " it is laterally, vertical,
Vertically, orientation or positional relationship indicated by level " and " top, bottom " etc. is normally based on orientation or position shown in the drawings and closes
System, is merely for convenience of description of the present invention and simplification of the description, in the absence of explanation to the contrary, these nouns of locality do not indicate that
It must have a particular orientation or be constructed and operated in a specific orientation with the device or element for implying signified, therefore cannot manage
Solution is limiting the scope of the invention: the noun of locality " inside and outside " refers to inside and outside the profile relative to each component itself.
For ease of description, spatially relative term can be used herein, as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation of sign.It should be understood that spatially relative term is intended to comprising the orientation in addition to device described in figure
Except different direction in use or operation.For example, being described as if the device in attached drawing is squeezed " in other devices
It will be positioned as " under other devices or construction after part or construction top " or the device of " on other devices or construction "
Side " or " under its device or construction ".Thus, exemplary term " ... top " may include " ... top " and
" in ... lower section " two kinds of orientation.The device can also be positioned with other different modes and (is rotated by 90 ° or in other orientation), and
And respective explanations are made to the opposite description in space used herein above.
In addition, it should be noted that, limiting components using the words such as " first ", " second ", it is only for be convenient for
Corresponding components are distinguished, do not have Stated otherwise such as, there is no particular meanings for above-mentioned word, therefore should not be understood as to this
The limitation of invention protection scope.
As shown in Figure 1, 2, 3, the present invention provides a kind of inductance type magnetic nano material sensors, including micro-fluidic detection
Chip and sensing unit 4；Micro-fluidic detection chip includes substrate of glass 6 and the chip body that is arranged in substrate of glass 6；Institute
Stating chip body includes:
The one end being arranged in chip body is provided with oil liquid entrance 1, the other end is provided with the microchannel 3 that oil liquid exports 2；
Microchannel 3 is in line type, and microchannel 3 is passed through from 4 center of sensing unit.3 diameter of microchannel is 100-300 microns.
Sensing unit 4 includes solenoid coil 7 and magnetic nano particle sublayer 8, solenoid coil 7 and magnetic nano particle sublayer
8 fittings completely, inside solenoid coil 7, magnetic nanoparticle (ferroso-ferric oxide) itself has suitable magnetic nano particle sublayer 8
Magnetism, due to its in the distribution of coil inner surface be it is discontinuous, magnetic screen will not be generated, opposite, relative permeability is higher,
Magnetic field can be gathered on microchannel, increase the magnetic field strength of detection zone to improve detectability.Solenoid coil 7 is by enamel-cover
Line coiling forms, and internal coil diameter is 1000-3000 microns, and enameled wire line footpath is 50-200 microns, and the number of turns is 300-600 circle.
The present invention also provides a kind of production methods of inductance type magnetic nano material sensor, comprising the following steps:
Step 1: production sensing unit 4, microchannel mold is attached on 7 inner wall of solenoid coil, then by PDMS material with
Magnetic nano-particle is mixed by proper ratio, is poured into 7 inside of solenoid coil and is filled up, send to 80 DEG C of oven heats and solidify
15 minutes, form magnetic nano particle sublayer 8；
Step 2: the sensing unit 4 after solidification is fixed in substrate of glass 6 by set position, pours into PDMS material,
Wherein two enamel-cover leads of solenoid coil 7 are arranged in outside PDMS material, are poured it by PDMS material；It will finally pour
The chip for being poured in PDMS material is placed to be toasted 1 hour with 80 DEG C of temperature in an oven, is solidified PDMS material, is formed PDMS base
Body 5；
Step 3: the mold of extraction production microchannel makes oil liquid entrance 1 and oil with punch in microchannel punching two ends
Liquid outlet 2.
Embodiment
As a preferred embodiment of the present invention, the use process of inductance type magnetic nano material sensor of the present invention is such as
Under:
Step 1: oil liquid to be detected is delivered to microchannel 3 by oil liquid entrance 1；
Step 2: flowing through the oil liquid to be detected of sensing unit 4, high-frequency signal injection is applied by sensing unit 4, according to inspection
It surveys result and realizes that the differentiation to particulate pollutant in oil liquid detects；As shown in figure 4, when the sensor detects metal worn particle, abrasive grain
Generate magnetization in the alternating magnetic field that solenoid coil generates, generate new magnetic field after ferromagnetic particle magnetization, direction and
Coil magnetic field is consistent, and the inductance signal of detection, which is shown, to be increased up；As shown in figure 5, inside generates when non-ferromagnetic debris passes through
Eddy current effect be greater than magnetization, the signal opposite with magnetic field can be generated, inductance signal is shown downwards when detecting
Increase；It is distinguished with this and distinguishes ferromagnetic particle and non-ferromagnetic debris.
Step 3: oil liquid after tested is discharged from oil liquid outlet 2.
Technical solution of the present invention for the first time combines magnetic Nano material with solenoid coil 7, by solenoid coil 7
The superparamagnetism and magnetically attractive of surface magnetism nanoparticle layers 8 itself act on, and improve detection zone magnetic field strength, improve inductance
The precision of formula oil liquid detection.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (6)
1. a kind of inductance type magnetic nano material sensor, which is characterized in that including micro-fluidic detection chip and sensing unit；
The micro-fluidic detection chip includes the chip body of substrate of glass and setting on the glass substrate；The chip body includes:
The one end being arranged in chip body is provided with oil liquid entrance, the other end is provided with the microchannel that oil liquid exports；
The sensing unit includes solenoid coil and magnetic nano particle sublayer, the solenoid coil and the magnetic nano particle
Sublayer is bonded completely, and the magnetic nano particle sublayer is inside solenoid coil.
2. inductance type magnetic nano material sensor according to claim 1, which is characterized in that the microchannel is in line
Type, microchannel penetrate magnetic nano particle sublayer by passing through inside the solenoid coil of sensing unit.
3. inductance type magnetic nano material sensor according to claim 1 or 2, which is characterized in that the microchannel is straight
Diameter is 100-300 microns, and the solenoid coil is formed by enameled wire coiling, and internal coil diameter is 1000-3000 microns, enameled wire
Line footpath is 50-200 microns, and the number of turns is 300-600 circle.
4. inductance type magnetic nano material sensor according to claim 1, which is characterized in that the magnetic nano-particle
The ferroso-ferric oxide that layer is 100 nanometers.
5. a kind of production method of inductance type magnetic nano material sensor, which comprises the following steps:
Step 1: microchannel mold is attached on solenoid coil inner wall, then PDMS material and magnetism are received by production sensing unit
Rice corpuscles is mixed by proper ratio, is poured into inside solenoid coil and is filled up, and is sent to 80 DEG C of oven heats and is solidified 15 minutes,
Form magnetic nano particle sublayer；
Step 2: the sensing unit after solidification is fixed on the glass substrate by set position, PDMS material is poured into, wherein spiral shell
Two enamel-cover leads of spool coil are arranged in outside PDMS material, are poured it by PDMS material；It will finally pour and be poured in
The chip of PDMS material is placed to be toasted 1 hour with 80 DEG C of temperature in an oven, is solidified PDMS material, is formed PDMS matrix；
Step 3: the mold of extraction production microchannel makes oil liquid entrance and oil liquid goes out with punch in microchannel punching two ends
Mouthful.
6. the production method of inductance type magnetic nano material sensor according to claim 5, which is characterized in that described
PDMS material is dimethyl silicone polymer or polymethyl methacrylate.
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Cited By (4)
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| CN110243736A (en) * | 2019-07-30 | 2019-09-17 | 大连海事大学 | A kind of inductance type hydraulic oil abrasive grain differentiation monitoring device |
| CN110567860A (en) * | 2019-08-28 | 2019-12-13 | 广东工业大学 | Novel particle counter and particle counting method |
| CN111693408A (en) * | 2020-05-14 | 2020-09-22 | 东南大学 | Magnetic nanoparticle control device based on coil micro-control structure |
| CN115015372A (en) * | 2022-05-25 | 2022-09-06 | 苏州热工研究院有限公司 | Device and method for measuring content of ferromagnetic particles in solution on line |
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Application publication date: 20190528 |