CN109804281A - Outer painting wire-grid polarizer - Google Patents
Outer painting wire-grid polarizer Download PDFInfo
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- CN109804281A CN109804281A CN201780061140.1A CN201780061140A CN109804281A CN 109804281 A CN109804281 A CN 109804281A CN 201780061140 A CN201780061140 A CN 201780061140A CN 109804281 A CN109804281 A CN 109804281A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Polarising Elements (AREA)
- Surface Treatment Of Optical Elements (AREA)
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Abstract
A kind of wire-grid polarizer (WGP) can be durable and have high-performance.The WGP may include 13 array of wire rod on substrate 11.External coating 32 can be located at the distal end of 13 array of wire rod and can be across the channel 15 between wire rod 13.Conformal coating 61 can between wire rod 13 and external coating 32 coated wire 13 side 13sWith distal end 13d.The external coating may include aluminium oxide.Antireflection layer 33 can be located at 32 top of external coating.
Description
Invention field
Present invention relates generally to wire-grid polarizers.
Background of invention
Wire-grid polarizer (WGP) can be used to split the light into two different polarization states.A kind of polarization of higher proportion
State can pass through WGP, and another polarization state of higher proportion can be absorbed or reflected.The validity or performance of WGP
The light transmission capacity (Ts) of light transmission capacity (Tp) and the smallest abnormal polorization based on very a high proportion of polarization.With high contrast (Tp/
It Ts may be) beneficial.The percent reflectivity (Rs) of abnormal polorization is also possible to the important indicator of polarizer performance.
It can have small, fine wire rod in particular for the wire rod of visible light or the WGP of the polarization of ultraviolet light, these
Wire rod has nanoscale spacing, nanoscale wire width and nanoscale wire rod height.WGP is for needing high performance system (example
Such as computer projection instrument, semiconductor inspection tool) in.WGP small imperfections (such as the wire rod of corrosion and the wire rod collapsed) can
To reduce system performance (such as fault image from computer projection instrument) significantly.Common processing may cause wire rod to collapse
It falls into.Therefore, protection wire rod may be important from corrosion and mechanical failure.
Oxidation may reduce performance by negatively affecting contrast and/or Rs.Due to the passage of aluminium wire at any time
Form native oxide, the substantially pure aluminium of bottom is consumed, therefore reduce substantially pure aluminium wire size and
Change the polarization characteristic of WGP.
Summary of the invention
It has realized that with high wire-grid polarizer (WGP) performance and protect wire rod from burn into mechanical failure and
Oxidation will be advantageous.The present invention relates to the production sides of the multiple and different embodiments and WGP for the WGP for meeting these demands
Method.Each embodiment or method can satisfy one of these demands, some or all of demands.
WGP may include wire array, which is located at the top in the face of transparent substrate, have between adjacent wire rod
There is channel.External coating can be located at the distal end of wire array and can be with crossing channel.
In one embodiment, moisture blocking layer can coat the side of these wire rods between these wire rods and the external coating
Side and distal end.In another embodiment, antireflection layer can be located above the external coating.
The method for manufacturing WGP may include the following steps carried out in the following order:
1. providing wire array, which has logical in the top in the face of transparent substrate between adjacent wire rod
Road.Channel can be full of air.Every wire rod can have base portion and be located most closely to the position of substrate and distally be located at
Farthest away from the cross section profile of the position of substrate.Every wire rod can have opposite side, these sides are respectively for wire rod
Channel on relative side and distal end is extended to from base portion.
2. moisture blocking layer is applied to side and is applied to the distal end of wire rod, at the same keep channel full of air
's.
3. external coating is applied to above moisture blocking layer simultaneously crossing channel by the far-end in wire array, and keeps logical
Road is filled with air.
Detailed description of the invention (attached drawing may not be drawn to scale)
Fig. 1 is the schematic section side view of the wire-grid polarizer (WGP) 10 of embodiment according to the present invention, and the wiregrating is inclined
Device shake in the face of transparent substrate 11 11fIt is upper that there is 13 array of wire rod, there is channel 15 between adjacent wire rod 13.
Fig. 2 is the perspective schematic view of the WGP 10 of Fig. 1 of embodiment according to the present invention.
Fig. 3-4 is the schematic section side view of the WGP 30 and WGP 40 of embodiment according to the present invention, with Fig. 1-2's
WGP 10 is similar, but further comprises in the distal end 13 of 13 array of wire roddThe external coating 32 at place, 32 crossing channel of external coating
15, and the antireflection layer 33 above external coating 32.
Fig. 5 is the schematic section side view of the WGP 50 of embodiment according to the present invention, 10 phase of WGP with Fig. 1-2
It seemingly, but further comprise in the distal end 13 of 13 array of wire roddThe external coating 32 at place, 32 crossing channel 15 of external coating and along
The side 13 of wire rod 13sFrom distal end 13dExtend downward into base portion 13b。
Fig. 6 is the signal of the amplification of a part of the WGP 60 (showing single line material 13) of embodiment according to the present invention
Property side cross-sectional view, it is similar to the WGP 10 of Fig. 1-2, but further comprise in the distal end of wire rod 13 13dThe external coating 32 at place
And between wire rod 13 and external coating 32 coated wire 13 side 13sWith the distal end 13 of wire rod 13dConformal coating 61.
Fig. 7-8 is embodiment according to the present invention respectively with the image projector 70 and 80 of at least one WGP 74
Schematic diagram.
Term
As used in this article, term " conformal coating " refers to the layer for meeting the topological structure of WGP.
As used in this article, term " Rs degeneration " refers to that the Rs for selective absorbing WGP increases or for reflection
Property WGP Rs reduce.
As used in this article, term " elongated " refers to that the length L of wire rod 13 is noticeably greater than wire width W or wire rod is thick
Spend Th13(see Fig. 1-2).For example, according to the application, it can have and received at 20 nanometers with 100 for the WGP of ultraviolet light or visible light
Wire width W between the rice and wire thickness Th between 50 nanometers and 500 nanometers13, and about 1 millimeter to 20 centimetres
Above length of wires L.Therefore, elongated wire rod 13 can have than wire width W and/or wire thickness Th13Big manyfold
The length L of (for example, at least 10 times, at least 100 times, at least 1000 times or at least 10,000 times).Term " elongated " can also refer to
Any wavelength in wave-length coverage that the length L of wire rod 13 is used than expected is longer.For example, length L can be greater than 700nm, i.e.,
The longest wavelength of visible light.
As used in this article, term " on being located at ... " refers to located immediately at there is some other solids thereon or therebetween
It is above in the case where material.
As used in this article, term " Tp " refers to the percent transmission of the polarization (usually p-polarization) based on transmiting；
Term " Ts " refers to the percent transmission of abnormal polorization (usually s is polarized)；And term " Rs " refers to the reflection of abnormal polorization
Percentage.
Specific embodiment
As Fig. 1-2 is shown, wire-grid polarizer (WGP) 10 is shown, which includes being located at transparent substrate
11 face 11f13 array of wire rod of top.13 array of wire rod can be substantially parallel and elongated, have between adjacent wire rod 13
There is channel 15.It channel 15 can be filled with gases such as solid, liquid, vacuum or air.Every wire rod 13 can have base
Portion 13bIt is located most closely to position, the distal end 13 of substrate 11dIt is located furthest from the cross section profile of the position of substrate 11 and opposite
Side 13s, relative side 13 of these sides respectively for the wire rodsOn channel 15 and from base portion 13bExtend to distal end
13d.Every wire rod 13 can be by for the material of light polarization to be made or including these materials, these materials include as typically
The metal used in the wire rod of wire-grid polarizer and/or dielectric.See, for example, US 7,961,393 and US8,755,113,
It is incorporated herein by reference.
As seen in figures 3-6, external coating 32 can be located at the distal end 13 of 13 array of wire roddAnd it can be with crossing channel 15.Outside
Coating 32 can provide structural support for wire rod 13 to prevent it from toppling, and can permit to WGP 30, WGP 40 or WGP
50 are handled and are cleaned.
As shown in Fig. 3-4 and Fig. 6, external coating 32 can be with crossing channel 15, wherein minimum external coating 32 enters channel 15.It replaces
For property, as shown in figure 5, external coating 32 can be along the side 13 of wire rod 13sLargely or entirely path extend downwardly.
External coating 32 can be transparent dielectric, such as silica.The material for carefully selecting external coating 32 can help
Avoid the performance degradation of WGP at any time.For example, external coating 32 may include aluminium oxide, aluminium oxide can protect wire rod 13 from
Oxidation.On the one hand the material composition of external coating 32 can be the aluminium oxide of at least 99 mass percents, on the other hand can be
On the other hand at least aluminium oxide of 90 mass percents can be the aluminium oxide of at least 50 mass percents, or on the other hand can
To be the aluminium oxide of at least 20 mass percents.
Due to the defect that external coating 32 deposits, the material of external coating 32 may not be accurate stoichiometric ratio.For example, art
Language aluminium oxide (Al2O3) referring to every three oxygen atoms, about there are two aluminium atoms, such as AlxOy, wherein 1.9≤x≤2.1 and
2.9≤y≤3.1。
As shown in figure 5, causing external coating 32 along side 13sSome or all of path from distal end 13dExtend downward into base
Portion 13b, can protect the side 13 of wire rod 13 in this waysFrom oxidation.External coating 32 may include along side 13sReceived 10
Thickness Th between rice and 100 nanometers32.External coating 32 can be along side 13sThere is the thickness at certain (multiple) positions
Th32, or along two sides 13sFrom distal end 13dTo base portion 13bWith the thickness.Even if having along the side of wire rod 13 13sTo downward
The external coating 32 stretched, channel 15 still can be full of air.Alternatively, because external coating 32 may due to its refractive index
Have an adverse effect to performance, thus the external coating can only along the part path of wire rod from distal end 13dExtend downward into base portion
13bSide 13s, such as the on the one hand path on edge < 25% or the on the other hand path between 10% and 50%.
WGP described herein can have it is following before durability test with the property that measures after the durability test results
One or more in difference between energy: Ts increases by < 0.01%, Ts and increases < 0.005%, Ts increase < 0.001%, Rs degeneration
< 1%, < 0.5% and Rs of Rs degeneration degeneration < 0.25%.These values can be for single WGP, or can be 100
The average value of WGP.Durability test be 300 DEG C at a temperature of carry out 168 hours or 500 hours.Durability test is to make
It is carried out after making at once, or WGP is made to be maintained at shielded environment (such as room temperature, from ultraviolet light, low humidity etc.)
In in the case where carry out in three weeks after the fabrication.In the case where no external coating 32, carried out in identical durability test
After 168 hours, Ts increases average out to about 0.04%, and it is average 3% that Rs, which degenerates,.
Before this invention, the main failure forms of WGP are that wire rod 13 is made to topple.Because wire rod 13 is higher (for example, about
200-400nm) but not it is very wide W (for example, about 50-70nm), and the distal end 13 of wire rod 13dIt does not fix, so wire rod 13
It is easy to topple.The present invention is not easy to the more robust WGP to topple it is desirable that generating a kind of wire rod 13.Relevant United States Patent (USP)
Disclosure includes US 2003/0224116, US 2012/0075699, US 6,288,840, US6,665,119 and US 7,026,
046, these U.S. Patent Publications include some ideas for improving durability, are asked even if durability has been very important
Topic, these ideas are again without being widely used, this is because some ideas in these ideas are also possible to cause WGP performance
It declines to a great extent.
The present invention is expected to cause performance to be remarkably decreased due to addition external coating 32, but since it is desired that increases stabilizer wire
Property, so external coating 32 will be added anyway.Present invention discover that the anti-reflection of 32 top of external coating can be located at by adding
It penetrates layer 33 (see Fig. 3-4) and avoids the performance decline caused due to addition external coating 32.External coating 32 can be provided for applying
The base portion of antireflection layer 33 or basis.Since any performance decline that addition external coating 32 causes can be by external coating 32
Fang Tianjia antireflection layer 33 and avoid or minimize.The quantization of the performance is described in the following method part.
As shown on the WGP 30 of Fig. 3, antireflection layer 33 may include multiple film layers 31, these multiple film layers are located at
It is extended continuously on external coating 32, on external coating 32 and reflection of the incident light on external coating 32 can be reduced.Film anti-reflection
An example for penetrating layer 33 is: at least two pairs of layers, wherein each pair of layer includes the ZrO of layer of silicon dioxide and one layer 95%2Add 5%
TiO2, and every layer of thickness is between 30 nanometers and 300 nanometers.
As shown on the WGP 40 of Fig. 4, antireflection layer 33 may include be formed as array, it is more on external coating 32
A protrusion 41.Protrusion 41 can be designed to reduce reflection of the incident light on external coating 32.For example, each protrusion
Object 41 can have the width W less than 700 nanometers41With height H41。
As shown in fig. 6, conformal coating 61 can be located at 13 top of wire rod.Conformal coating 61 can cover the exposure of wire rod 13
Surface.Conformal coating 61 may be located on the exposed surface of substrate 11, and (" exposed surface " refers to not covered by wire rod 13 for substrate
The surface of lid) top.The use of conformal coating 61 may be beneficial, because the profile and substrate 11 by following wire rod 13
Exposed surface, 61 thickness T of conformal coating61It can be minimized, therefore reduce conformal coating 61 to any harmful work of WGP performance
With.For example, conformal coating 61 maximum gauge on the one hand can < 5 nanometers (nm), another aspect < 10nm, another aspect < 25nm,
Or another aspect < 50nm.
Conformal coating 61 may include oxidation barrier layer, moisture blocking layer or both.The oxidation of WGP wire rod 13 can pass through
It negatively affects contrast or Rs and reduces the performance of WGP.Oxidation barrier layer can reduce the oxidation of wire rod 13, and therefore subtract
Less or avoid this WGP performance degradation.Term " oxidation barrier " be refer to reduce oxygen enter second material the first
Material, oxygen, which enters second of material, may cause second of material oxidation.Oxidation barrier can be placed on wire rod 13 with
Protect wire rod 13 from oxidation.The non-limiting example that may be used as the chemicals of oxidation barrier layer includes: aluminium oxide, titanium dioxide
Silicon, silicon nitride, silicon oxynitride, silicon carbide or combinations thereof.
WGP corrosion may be decreased WGP performance.For example, water can be agglomerated on WGP due to capillarity and be drawn onto wire rod
In slype 15 between 13.Then water may corrode wire rod 13.Corrosion area may have contrast to reduce, Rs changes,
Or it can make to polarize entirely ineffective.Moisture blocking layer can resist corrosion.Moisture blocking layer can protect wire rod 13 from water
Or other corrosion.The example that may be used as the chemicals of moisture blocking layer includes but is not limited to: hafnium oxide, zirconium oxide, phosphonic acids
Ester or combinations thereof.The reality of chemical attack protection is described in U.S. Patent Publication US 6,785,050 and US2016/0291209
Example, the two U.S. Patent Publications are all incorporated herein with entire contents by quoting.
Conformal coating 61 may include rare earth oxide, for example, scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, promethium, samarium, europium, gadolinium, terbium,
Dysprosium, holmium, erbium, thulium, ytterbium and lutetium oxide.These rare earth oxides can be at least oxidation barrier layer, moisture blocking layer or two
A part of person.
Conformal coating 61 can be different from wire rod 13, it is intended that (1) can deposit between wire rod 13 and conformal coating 61
In boundary line or boundary layer；Or the material of (2) conformal coating 61 may exist some differences relative to the material of wire rod 13.Example
Such as, natural alumina can be formed at the surface of aluminium wire 13.Then one layer of aluminium oxide (oxidation barrier layer) can be applied
At flank (such as passing through ALD).This layer addition aluminium oxide may it is critically important, this is because the thickness of natural alumina and/or
Density may be not enough to protect the core (e.g. substantially fine aluminium) of wire rod 13 from oxidation.In this example, although oxygen
Change barrier layer (Al2O3) with the surface (Al of wire rod 132O3) material composition having the same, but oxidation barrier layer may be due to
Following aspect is still different: (1) boundary layer between oxidation barrier layer and wire rod 13, and/or in terms of (2) material properties
Difference, such as natural alumina oxidation barrier layer density increase.
Image projector
WGP described herein can be used in image projectors, such as image projector shown in Fig. 7 70 or Fig. 8 institute
The image projector 80 shown.Image projector 70 or 80 may include the light source 71 or 81 that can emit light beam 73 or 83, (more
It is a) spatial light modulator 77 and (multiple) WGP 74 according to WGP embodiment described herein.
Spatial light modulator 77 can be positioned so that at least part for receiving light beam 73 or 83.Spatial light modulator 77 can
With with multiple pixels, each pixel can receive signal.The signal can be electric signal.Depend on whether that each pixel connects
The intensity of the collection of letters number or signal, pixel can make the polarization of a part of light beam 73 or 83 rotate or be transmitted or reflected to it
Without causing its polarization to change.(multiple) spatial light modulator 77 can be liquid-crystal apparatus/liquid crystal display (LCD) and can
To be radioparent, reflexive or semi-transparent reflection.
(multiple) WGP 74 can before entering spatial light modulator 77, leave after spatial light modulator 77 or at this
It is all located at least part of light beam 73 or 83 in the case of two kinds.(multiple) WGP 74 to spatial light modulator 77 by providing
Polarised light and by according to the type of WGP 74 and rotation and whether each pixel receives signal and transmits, reflects
Or it absorbs the light from each pixel of spatial light modulator 77 and contributes to form image.
Projection lens system 75 can be positioned so that at least part for receiving light beam 73 or 83 and can project image.
Projection lens system 75 is described in U.S. Patent number 6,585,378 and 6,447,120, these patents are logical with entire contents
It crosses to quote and be incorporated herein.Alternatively, light beam 73 or 83 can be transmitted directly in the eyes of user or be emitted to and is another
In a device, rather than it is emitted to projection lens system 75.
As shown in fig. 7, image projector 70 may further include color-separation optics 72 and color scheme optical device
78.Light source 71 can emit light beam 73, this beam light initially can be non-polarizable.Color-separation optics 72, which can be positioned so that, to be connect
Light beam 73, between light source 71 and spatial light modulator 77 and can be divided into more by at least part for receiving light beam 73
The different light beam of a color, to define column of colour 73c.Column of colour 73cIt can be three primary colors.
Color scheme optical device 78 can be located at spatial light modulator 77 and projection lens system 75 (or user
Eyes or other devices) between and can be positioned so that receive column of colour 73cAt least part.Color scheme optics device
Part 78 can be by column of colour 73cAt least part be reassembled into final light beam or beam combination 73f.Color scheme optics
Device 78 is used for computer projection instrument, for the light of different colours to be combined into the single image for needing to be projected.Color scheme
Optical device 78 is sometimes referred to as X-Cube, X-Cube prism, X- prism, photoreactivation prism or crossed dichroic prism.X-
Cube is usually made of four with the dichroic coating right-angle prism for being adhesively-bonded together to form cube.
Projection lens system 75, which can be positioned so that, receives beam combination 73fAnd it can be with projection of color images 73i.It is colored
Image 73iIt can project on screen 76 or project in personal eyes.
Spatial light modulator 77 can be positioned so that between color-separation optics 72 and color scheme optical device 78
At least one column of colour 73 is received in optical pathc.Image projector 70 may include for each column of colour 73cSpatial light
Modulator 77.(multiple) WGP 74 can enter spatial light modulator 77 before, after leaving spatial light modulator 77 or
It is all located at least one column of colour 73 in both casescIn.
As shown on the image projector 80 of Fig. 8, the light beam that light source 81 can be different with the multiple colors of sequential transmissions, to limit
Column of colour 83 is determined.Column of colour 83 can be three primary colors.Projection lens system 75 (or the eyes or other dresses of user
Set) it can be positioned so that and receive column of colour 83 and can be with projection of color images 73i.Color image 73iScreen can be projected
On 76 or project in personal eyes.Spatial light modulator 77 can be positioned so that light source 81 and projection lens system 75 it
Between optical path in receive column of colour 83.WGP 74 can enter spatial light modulator 77 before, leave spatial light modulator
77 are all located in column of colour 83 later or in both cases.
Method
Manufacture WGP method may comprise steps of in some or all of steps, can carry out in the following order.It can
There can be the additional step not described hereafter.These additional steps can before these described steps, between or it is laggard
Row.
1. providing the face 11 for being located at transparent substrate 11f13 array of wire rod of top.13 array of wire rod can be substantially parallel
And it is elongated, there is channel 15 between adjacent wire rod 13.Channel 15 can be full of air.Every wire rod 13 can have
Base portion 13bIt is located most closely to the position of substrate 11 and distal end 13dIt is located furthest from the cross section profile of the position of substrate 11.Every
Wire rod 13 can have opposite side 13s, relative side 13 of these sides respectively for wire rodsOn channel 15 and from
Base portion 13bExtend to distal end 13d.Referring to Fig. 1-2.
2. conformal coating 61 is applied to side 13sAnd it is applied to the distal end 13 of wire rod 13d, while keeping channel 15
Full of air.The method for applying conformal coating 61 includes sputtering sedimentation and evaporation.It may include following for applying conformal coating 61
One of step: (i) applies oxidation barrier layer, then applies moisture blocking layer；(ii) apply moisture blocking layer, then apply oxidation
Barrier layer；Or (iii) applies moisture blocking layer or oxidation barrier layer.Referring to Fig. 6 and more than to oxidation barrier layer, moisture stop
The description of layer and conformal coating 61.
3. in the distal end 13 of 13 array of wire roddExternal coating 32 is applied to 61 top of conformal coating and crossing channel 15 by place,
And channel 15 is kept to be filled with air.External coating 32 may include material as described above, these materials have institute as above
The mass percent stated.External coating 32 can along wire rod 13 from distal end 13dExtend downward into base portion 13bSide 13s.External coating
32 may include the side 13 along wire rod 13sMultiple and different thickness T for example between 10 nanometers and 100 nanometers32.It can
To apply external coating 32 by sputtering sedimentation.Referring to Fig. 3-5 and the description to external coating 32 above.
4. antireflection layer 33 is applied to 32 top of external coating.Referring to Fig. 3-4 and the description to antireflection layer 33 above.
In above method, certain or all properties by applying the loss of external coating 32 can be by applying antireflective
Layer 33 and regain.Therefore, one or more of following equation may be establishment: Tp1-Tp2< 2%, Tp1-Tp2<
1.5%, Tp1-Tp2< 1% or Tp1-Tp2< 0.5%, wherein subscript 1 refers to the performance before applying external coating 32, and under
Mark 2 refers to the performance after applying antireflection layer 33.
Claims (10)
1. a kind of wire-grid polarizer (WGP), the wire-grid polarizer include:
Wire array positioned at the top in the face of transparent substrate, the wire array be it is substantially parallel and elongated, in adjacent wire rod
Between have channel；
There is every wire rod in the wire array base portion to be located most closely to the position of the substrate, distally be located furthest from the substrate
Position cross section profile and opposite side, these sides are respectively for these channels on the relative side of the wire rod
And the distal end is extended to from the base portion；
External coating, the external coating are located at the distal end of the wire array and cross over these channels；And
Conformal coating, the conformal coating include moisture blocking layer, which applies between these wire rods and the external coating
Cover the side of these wire rods and the distal end of these wire rods.
2. WGP as described in claim 1, wherein the conformal coating further comprises being located at the moisture blocking layer and these wire rods
Between the alumina layer different from these wire rods.
3. WGP as described in claim 1, further comprises: the antireflection layer above the external coating.
4. WGP as described in claim 1, wherein the external coating includes aluminium oxide.
5. WGP as described in claim 1, further comprises: the antireflection layer above the external coating, and wherein, it should
External coating includes aluminium oxide.
6. WGP as described in claim 1, wherein can be subjected at once after the fabrication at 300 DEG C 168 hours the WGP are resistance to
Long property test, wherein Ts increases less than 0.005 percent.
7. WGP as described in claim 1, wherein can be subjected at once after the fabrication at 300 DEG C 168 hours the WGP are resistance to
Long property test, wherein Rs degenerates less than 0.5%.
8. WGP as described in claim 1, wherein the WGP can be subjected at once after the fabrication 168 hours of 300 DEG C it is durable
Property test, wherein Ts on 100 WGP increase it is average less than 0.005 percent.
9. WGP as described in claim 1, wherein the WGP forms a part of image projector, which includes:
The light source of light beam can be emitted；
Spatial light modulator, the spatial light modulator are positioned to receive at least part of the light beam；And there are multiple pictures
Element, each pixel can receive signal and be transmitted based on at least part of the signal to the light beam without causing partially
Vibration changes or rotates at least part of polarization of the light beam；
The WGP before entering the spatial light modulator, after leaving the spatial light modulator or in both cases all
In at least part of the light beam.
10. WGP as described in claim 1, in which:
The external coating distally extends downward into the base portion from this along the side of these wire rods, the external coating be included in 10 nanometers with
Thickness between 100 nanometers；And
These channels are filled with air.
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662425339P | 2016-11-22 | 2016-11-22 | |
| US62/425,339 | 2016-11-22 | ||
| US15/631,256 US10534120B2 (en) | 2015-04-03 | 2017-06-23 | Wire grid polarizer with protected wires |
| US15/631,256 | 2017-06-23 | ||
| US15/691,315 US10444410B2 (en) | 2016-08-16 | 2017-08-30 | Overcoat wire grid polarizer having conformal coat layer with oxidation barrier and moisture barrier |
| US15/691,315 | 2017-08-30 | ||
| PCT/US2017/049660 WO2018097873A1 (en) | 2016-11-22 | 2017-08-31 | Overcoat wire grid polarizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109804281A true CN109804281A (en) | 2019-05-24 |
Family
ID=62195275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780061140.1A Pending CN109804281A (en) | 2016-11-22 | 2017-08-31 | Outer painting wire-grid polarizer |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP3545344A4 (en) |
| JP (1) | JP2019536074A (en) |
| CN (1) | CN109804281A (en) |
| WO (1) | WO2018097873A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7296245B2 (en) * | 2019-05-08 | 2023-06-22 | デクセリアルズ株式会社 | Polarizing plate, optical device, and method for producing polarizing plate |
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| US20160291208A1 (en) * | 2015-04-03 | 2016-10-06 | Moxtek, Inc. | Oxidation and Moisture Barrier Layers for Wire Grid Polarizer |
| US20160299273A1 (en) * | 2015-04-08 | 2016-10-13 | Samsung Display Co., Ltd. | Wire grid polarizer and method of fabricating the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE419550T1 (en) * | 2002-02-12 | 2009-01-15 | Oc Oerlikon Balzers Ag | OPTICAL COMPONENT WITH SUBMICROMETER CAVITIES |
| US6785050B2 (en) * | 2002-05-09 | 2004-08-31 | Moxtek, Inc. | Corrosion resistant wire-grid polarizer and method of fabrication |
| US20030224116A1 (en) * | 2002-05-30 | 2003-12-04 | Erli Chen | Non-conformal overcoat for nonometer-sized surface structure |
| US7268946B2 (en) * | 2003-02-10 | 2007-09-11 | Jian Wang | Universal broadband polarizer, devices incorporating same, and method of making same |
| JP4412372B2 (en) * | 2007-09-12 | 2010-02-10 | セイコーエプソン株式会社 | Manufacturing method of polarizing element |
| JP5365626B2 (en) * | 2008-04-08 | 2013-12-11 | 旭硝子株式会社 | Manufacturing method of wire grid type polarizer |
| US20100103517A1 (en) * | 2008-10-29 | 2010-04-29 | Mark Alan Davis | Segmented film deposition |
| JP2015106149A (en) * | 2013-12-03 | 2015-06-08 | 株式会社リコー | Optical filter, imaging device including the optical filter, and method for manufacturing optical filter |
| JP5929886B2 (en) * | 2013-12-24 | 2016-06-08 | ウシオ電機株式会社 | Grid polarizer |
| KR102226116B1 (en) * | 2014-09-12 | 2021-03-11 | 삼성디스플레이 주식회사 | Wire grid polarizer and method for fabricating the same |
-
2017
- 2017-08-31 EP EP17873395.2A patent/EP3545344A4/en not_active Ceased
- 2017-08-31 WO PCT/US2017/049660 patent/WO2018097873A1/en unknown
- 2017-08-31 JP JP2019518234A patent/JP2019536074A/en active Pending
- 2017-08-31 CN CN201780061140.1A patent/CN109804281A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1766679A (en) * | 2004-10-27 | 2006-05-03 | 日本板硝子株式会社 | Polarizer and method for producing it |
| US20090109377A1 (en) * | 2007-10-31 | 2009-04-30 | Seiko Epson Corporation | Optical element, liquid crystal device, and electronic apparatus |
| US20120075699A1 (en) * | 2008-10-29 | 2012-03-29 | Mark Alan Davis | Segmented film deposition |
| WO2011132992A2 (en) * | 2010-04-22 | 2011-10-27 | 주식회사 엘지화학 | Privacy protection filter and fabrication method thereof |
| US20160291208A1 (en) * | 2015-04-03 | 2016-10-06 | Moxtek, Inc. | Oxidation and Moisture Barrier Layers for Wire Grid Polarizer |
| US20160299273A1 (en) * | 2015-04-08 | 2016-10-13 | Samsung Display Co., Ltd. | Wire grid polarizer and method of fabricating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3545344A4 (en) | 2019-11-27 |
| WO2018097873A1 (en) | 2018-05-31 |
| JP2019536074A (en) | 2019-12-12 |
| EP3545344A1 (en) | 2019-10-02 |
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