CN109786777A - Liquid metal cell device based on micro-fluidic chip and preparation method thereof - Google Patents
Liquid metal cell device based on micro-fluidic chip and preparation method thereof Download PDFInfo
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- CN109786777A CN109786777A CN201910090048.9A CN201910090048A CN109786777A CN 109786777 A CN109786777 A CN 109786777A CN 201910090048 A CN201910090048 A CN 201910090048A CN 109786777 A CN109786777 A CN 109786777A
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Abstract
The embodiment of the present invention provides a kind of liquid metal cell device and preparation method thereof based on micro-fluidic chip, which includes: the positive electrode fluid channel, negative electrode fluid channel and electrolyte fluid channel being set in the substrate of micro-fluidic chip；Positive electrode fluid channel, negative electrode fluid channel are connected with electrolyte fluid channel respectively；Wherein, positive electrode fluid channel and negative electrode fluid channel are marked with first kind liquid metal and the second fluid-like state metal respectively, and the activity of first kind liquid metal is lower than the activity of the second fluid-like state metal；Filled with the electrolyte solution that electrochemical reaction can occur with the second fluid-like state metal component in electrolyte fluid channel.Liquid metal cell device and preparation method thereof provided in an embodiment of the present invention based on micro-fluidic chip, by selecting the liquid metal of low melting point as electrode material, injection method can be used directly liquid metal injection fluid channel molding, substantially reduce battery chip preparation difficulty, it is low in cost.
Description
Technical field
The present embodiments relate to battery technology fields, and in particular to a kind of liquid metal cell based on micro-fluidic chip
Device and preparation method thereof.
Background technique
Product miniaturization, micromation, it is integrated be the world today's technology development trend of the times, microfluidic chip technology is just
Be it is such a can chemistry, biology in medicine sample preparation, the fundamental operations such as separate, detect and integrate and lead in the micron-scale
Technology on road scale chips.There are many micro-fluidic chip type, comprising: platinum resistance chip, pressure sensing chip, condenser type pass
Sense chip, micro-nano reactor chip, micro-nano filtering flow chip, electric osmose Micropump chip etc..However, many miniature flexible electricity
The normal work of sub- chip needs extraneous power supply continued power, this just greatly limits micro-fluidic chip practical application effect.Example
Such as, some wearable flexible electronic devices that can be used to realize health and motion monitoring are under conditions of no mating battery, then
It is unable to operate normally.
By utilizing micro cell (micro cell chip, micron order battery chip) and microchip (microelectronic chip, micron order electricity
Sub- chip) it integrates on one substrate, independent miniature electronic systems are made --- System on Chip/SoC (SOC) can solve above-mentioned
Problem.Generator of the micro cell as this system can continue to be that other electronic chips provide electric energy, and it is small in size, surely
It is qualitative strong, it is easy of integration, it is easy-to-use.The preparation of micron order battery chip may be implemented with microflow control technique.It chooses appropriate
Electrode material and electrolyte, and it is injected into the runner of micron-scale, by electrochemical reaction, can continue for external connected electronic equipment
Electric energy is provided.Common electrode material has zinc, and copper, platinum is golden, aluminium etc., these solid state electrode materials are generally required to deposit or be sputtered
In the substrate of micro-fluidic chip, film-form electrode is formed.However, the process of this sputtering or deposition is to need and fluid channel system
Make what process separately carried out, so that micro cell chip fabrication technique is extremely complex, and cost of manufacture is expensive.
Summary of the invention
To solve the problems, such as that existing micro cell chip fabrication technique is extremely complex, cost of manufacture is expensive, the embodiment of the present invention
A kind of liquid metal cell device and preparation method thereof based on micro-fluidic chip is provided.
In a first aspect, the embodiment of the present invention provides a kind of liquid metal cell device based on micro-fluidic chip, comprising: set
Positive electrode fluid channel, negative electrode fluid channel and the electrolyte fluid channel being placed in the substrate of micro-fluidic chip；The positive electrode
Fluid channel, the negative electrode fluid channel are connected with the electrolyte fluid channel respectively；Wherein, the positive electrode fluid channel and institute
It states negative electrode fluid channel and is marked with first kind liquid metal and the second fluid-like state metal, and the work of the first kind liquid metal respectively
Property be lower than the second fluid-like state metal activity；Filled with can be with the second fluid-like state metal group in the electrolyte fluid channel
Distribute the electrolyte solution of raw electrochemical reaction.
Preferably, the first kind liquid metal or the second fluid-like state metal are gallium, bismuth, indium, tin, mercury, gallium indium conjunction
At least one of gold, gallium-indium-tin alloy, bismuth indium alloy and bismuth indium stannum alloy.
Preferably, the liquid metal cell device further includes fence micro-structure, is located at the electrolyte fluid channel and institute
It states between positive electrode fluid channel and between the electrolyte fluid channel and the negative electrode fluid channel；The fence micro-structure packet
Several miniature pillars are included, the electrolyte fluid channel is made to be connected with the positive electrode fluid channel and the negative electrode fluid channel
It is logical, while can obstruct described in the first kind liquid metal and the negative electrode fluid channel in the positive electrode fluid channel
Second fluid-like state metal enters the electrolyte fluid channel, and make the electrolyte solution and the first kind liquid metal and
Gap of the second fluid-like state metal between the miniature pillar is in contact.
Preferably, the shape of the cross section of the miniature pillar in the fence micro-structure includes round, oval, side
One of shape, triangle, trapezoidal and polygon are a variety of, and the minimum level spacing between two miniature pillars should be true
The electrolyte fluid channel will not be entered by protecting the first kind liquid metal and the second fluid-like state metal.
Preferably, the electrolyte fluid channel, the positive electrode fluid channel, the negative electrode fluid channel, be located at the electricity
It solves the fence micro-structure between liquid fluid channel and the positive electrode fluid channel and is located at the electrolyte fluid channel and institute
The fence micro-structure stated between negative electrode fluid channel constitutes a micro cell unit；The liquid metal cell device includes
Concatenated multiple micro cell units；Wherein, the negative electrode fluid channel of the previous micro cell unit and latter described
The positive electrode fluid channel of micro cell unit is connected.
Preferably, the liquid metal cell device further includes plural serial stage micro-structure, plural serial stage micro-structure position
Between two micro cell units being serially connected；For connecting the negative electrode miniflow of the previous micro cell unit
The positive electrode fluid channel in road and the latter micro cell unit.
Preferably, all micro cell units shared one electrolyte fluid channels or each micro cell unit
One electrolyte fluid channel of the electrolyte fluid channel or part the micro cell units shared, remaining institute is separately provided
It states micro cell unit and the electrolyte fluid channel is separately provided.
Preferably, in the multiple one electrolyte fluid channel of micro cell units shared, the micro cell
The positive electrode fluid channel and the negative electrode fluid channel of unit are distributed in two sides and the alternating of the electrolyte fluid channel
Arrangement.
Preferably, the shape of the positive electrode fluid channel and the negative electrode fluid channel includes in linear type and bent
It is one or two kinds of；The shape of the electrolyte fluid channel is linear；The shape of the plural serial stage micro-structure is round or ladder
Shape.
Second aspect, the embodiment of the present invention provide a kind of preparation method of liquid metal cell based on micro-fluidic chip,
It include:, using soft lithography, positive electrode miniflow to be made by film or chromium plate mask etching in the substrate of micro-fluidic chip
Road, negative electrode fluid channel and electrolyte fluid channel；The positive electrode fluid channel, the negative electrode fluid channel respectively with the electrolysis
Liquid fluid channel is connected；By first kind liquid metal, the second fluid-like state metal and electrolyte solution according to preset order according to
It is secondary to be circulated into the positive electrode fluid channel, the negative electrode fluid channel and the electrolyte fluid channel.
Liquid metal cell device and preparation method thereof provided in an embodiment of the present invention based on micro-fluidic chip, passes through choosing
The liquid metal of low melting point is selected as electrode material, injection method can be used, directly liquid metal injection fluid channel is allowed into
Type substantially reduces battery chip preparation difficulty, and low in cost.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is the frame structure signal of the liquid metal cell device provided in an embodiment of the present invention based on micro-fluidic chip
Figure；
Fig. 2 be another embodiment of the present invention provides the liquid metal cell device based on micro-fluidic chip top plan view
Structural schematic diagram；
Fig. 3 is the enlarged drawing of part A in Fig. 2；
Fig. 4 is the top plan view for the liquid metal cell device based on micro-fluidic chip that yet another embodiment of the invention provides
Structural schematic diagram；
Fig. 5 is the enlarged drawing of part B in Fig. 4；
Fig. 6 is the top plan view for the liquid metal cell device based on micro-fluidic chip that further embodiment of this invention provides
Structural schematic diagram；
Fig. 7 is the enlarged drawing of C portion in Fig. 6；
Fig. 8 is the preparation method process of the liquid metal cell device provided in an embodiment of the present invention based on micro-fluidic chip
Figure；
Fig. 9 be another embodiment of the present invention provides the liquid metal cell device based on micro-fluidic chip preparation method
Flow chart.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
Fig. 1 is the frame structure signal of the liquid metal cell device provided in an embodiment of the present invention based on micro-fluidic chip
Figure.As shown in Figure 1, the liquid metal cell device include the positive electrode fluid channel 1 being set in the substrate of micro-fluidic chip,
Negative electrode fluid channel 2 and electrolyte fluid channel 3；The positive electrode fluid channel 1, the negative electrode fluid channel 2 respectively with it is described
Electrolyte fluid channel 3 is connected；Wherein, the positive electrode fluid channel 1 and the negative electrode fluid channel 2 are marked with first kind liquid respectively
State metal and the second fluid-like state metal, and the activity of the first kind liquid metal is lower than the work of the second fluid-like state metal
Property；It is molten filled with the electrolyte that electrochemical reaction can occurs with the second fluid-like state metal component in the electrolyte fluid channel 3
Liquid.
The positive electrode fluid channel 1 is marked with first kind liquid metal, and the negative electrode fluid channel 2 is marked with the second fluid-like state gold
Belong to, and the activity of the first kind liquid metal is lower than the activity of the second fluid-like state metal；The positive electrode fluid channel 1,
The negative electrode fluid channel 2 is connected with the electrolyte fluid channel 3 respectively；Filled with can be with institute in the electrolyte fluid channel 3
State the electrolyte solution that electrochemical reaction occurs for the second fluid-like state metal component.
The positive electrode fluid channel 1 for being marked with first kind liquid metal is used as the anode of liquid metal cell, is marked with the second class liquid
The negative electrode fluid channel 2 of state metal is used as the cathode of liquid metal cell.According to the principle of battery, the activity of the metal of cathode is wanted
Potential difference is formed so that cathode is easier that electrochemical reaction occurs with electrolyte higher than the activity of anode.Therefore, the second class liquid
The activity of state metal needs the activity higher than first kind liquid metal.To be marked with the positive electrode miniflow of first kind liquid metal
Road 1 is equivalent to the anode of battery；The negative electrode fluid channel 2 for being marked with the second fluid-like state metal is equivalent to the cathode of battery.
Anode of the positive electrode fluid channel 1 as liquid metal cell device, the negative electrode fluid channel 2 are used as liquid
The cathode of metal battery device, the positive and negative anodes of liquid metal cell device can be provided out voltage after connecting plain conductor.
Filled with the electrolysis that electrochemical reaction can occur with the second fluid-like state metal component in the electrolyte fluid channel 3
Matter solution.Electrochemical reaction refers to that in the work of liquid metal cell device, oxidation occurs for cathode liquid metal and electrolyte also
The phenomenon that original reaction betatopic is load supplying.In the case where not connected load namely the case where liquid metal cell is opened a way
Under, first kind liquid metal and the second fluid-like state metal are possible to that chemical attack occurs with electrolyte；But after external load,
Only electrochemical reaction occurs for the second fluid-like state metal of active higher cathode and electrolyte, and cathode metal can be more stable,
It does not react with electrolyte, only plays electric action.
Electrolyte solution in electrolyte fluid channel 3 may not necessarily can occur with all components of the second fluid-like state metal
Electrochemical reaction.Because the second fluid-like state metal can be alloy, the i.e. composition of metal；Certain components therein may be used
In the fusing point for reducing the second fluid-like state metal, consequently facilitating completing fluid injection at normal temperature.
Injection method directly handle can be used by selecting the liquid metal of low melting point as electrode material in the embodiment of the present invention
Liquid metal injection fluid channel is allowed to form, and substantially reduces battery chip preparation difficulty, and low in cost.
Further, based on the above embodiment, the first kind liquid metal or the second fluid-like state metal be gallium,
At least one of bismuth, indium, tin, mercury, gallium-indium alloy, gallium-indium-tin alloy, bismuth indium alloy and bismuth indium stannum alloy.
The first kind liquid metal or the second fluid-like state metal can for gallium, bismuth, indium, tin, mercury, gallium-indium alloy,
At least one of gallium-indium-tin alloy, bismuth indium alloy and bismuth indium stannum alloy.In addition, the material of the substrate of the micro-fluidic chip
It can be glass, quartz, silicon wafer, paper, PDMS (polydimethylsiloxane, dimethyl silicone polymer), high molecular polymerization
One of object；The ingredient of the electrolyte solution can be copper sulphate, copper chloride, copper nitrate, iron chloride, frerrous chloride, sulphur
One of sour ferrous and tri-chlorination nickel.
It should be understood that the material of the substrate of the micro-fluidic chip, the first kind liquid metal, the second class liquid
The ingredient of state metal and the electrolyte solution also can choose other compositions composition.
On the basis of the above embodiments, the embodiment of the present invention by reasonably select micro-fluidic chip substrate material,
The ingredient of first kind liquid metal, the second fluid-like state metal and electrolyte solution, effectively increases liquid metal cell device
Reliability.
Further, based on the above embodiment, the liquid metal cell device further includes fence micro-structure, is located at described
Between electrolyte fluid channel 3 and the positive electrode fluid channel 1 and the electrolyte fluid channel 3 and the negative electrode fluid channel 2
Between；The fence micro-structure includes several miniature pillars, make the electrolyte fluid channel 3 and the positive electrode fluid channel 1 with
And the negative electrode fluid channel 2 is connected, while can obstruct the first kind liquid metal in the positive electrode fluid channel 1 and
The second fluid-like state metal in the negative electrode fluid channel 2 enters the electrolyte fluid channel 3, and makes the electrolyte
Solution is in contact with the gap of the first kind liquid metal and the second fluid-like state metal between the miniature pillar.
Between the electrolyte fluid channel 3 and the positive electrode fluid channel 1 and the electrolyte fluid channel 3 and described negative
Fence micro-structure is equipped between electrode fluid channel 2, the fence micro-structure includes several miniature pillars, is had between miniature pillar
Gap；The miniature pillar of the fence micro-structure is used to obstruct the first kind liquid metal in the positive electrode fluid channel 1
Enter the electrolyte fluid channel 3 with the second fluid-like state metal in the negative electrode fluid channel 2；Between miniature pillar
Gap makes the electrolyte solution be in contact with the first kind liquid metal and the second fluid-like state metal, so as to
Electrochemical reaction occurs.
On the basis of the above embodiments, the embodiment of the present invention passes through the design of fence micro-structure, it is possible to prevente effectively from the
A kind of liquid metal and the second fluid-like state metal enter electrolyte fluid channel, while first kind liquid metal, the second fluid-like state gold
Category can form good contact interface with electrolyte solution.
Further, based on the above embodiment, the shape of the cross section of the miniature pillar in the fence micro-structure
Including one of round, oval, rectangular, triangle, trapezoidal and polygon or a variety of, between two miniature pillars
Minimum level spacing is it is ensured that the first kind liquid metal and the second fluid-like state metal will not be micro- into the electrolyte
Runner.
The shape of the cross section of the miniature pillar in the fence micro-structure includes but is not limited to round, oval, side
One of shape, triangle, trapezoidal and polygon are a variety of, for convenient for making and save cost, a liquid metal cell
Fence micro-structure in device can use a kind of shape.Minimum level spacing between two miniature pillars is it is ensured that institute
The electrolyte fluid channel will not be entered by stating first kind liquid metal and the second fluid-like state metal.For example, two described micro-
Minimum level spacing between type pillar can be for less than 23 μm, specifically can be according to first kind liquid metal and the second fluid-like state gold
Depending on the parameters such as the surface tension of category.
Wherein, the fence micro-structure between the electrolyte fluid channel 3 and the positive electrode fluid channel 1 and
The fence micro-structure between the electrolyte fluid channel 3 and the negative electrode fluid channel 2 can be symmetrical arranged.
On the basis of the above embodiments, the embodiment of the present invention is by rationally designing the miniature pillar in fence micro-structure
Spacing between the shape of cross section and miniature pillar improves the reliability of liquid metal cell device.
Further, based on the above embodiment, the electrolyte fluid channel 3, the positive electrode fluid channel 1, the negative electricity
Atomic runner 2, the fence micro-structure between the electrolyte fluid channel 3 and the positive electrode fluid channel 1 and position
The fence micro-structure between the electrolyte fluid channel 3 and the negative electrode fluid channel 2 constitutes a micro cell unit；
The liquid metal cell device includes concatenated multiple micro cell units；Wherein, the institute of the previous micro cell unit
Negative electrode fluid channel 2 is stated to be connected with the positive electrode fluid channel 1 of the latter micro cell unit.
The electrolyte fluid channel 3, the negative electrode fluid channel 2, is located at the electrolyte at the positive electrode fluid channel 1
The fence micro-structure between fluid channel 3 and the positive electrode fluid channel 1 and it is located at the electrolyte fluid channel 3 and described
The fence micro-structure between negative electrode fluid channel 2 constitutes a micro cell unit.Wherein, it is marked with first kind liquid metal
The positive electrode fluid channel 1 is equivalent to the anode of micro cell unit, is marked with the negative electrode fluid channel 2 of the second fluid-like state metal
It is equivalent to the cathode of micro cell unit.
The liquid metal cell device includes concatenated multiple micro cell units；Wherein, the previous micro cell
The negative electrode fluid channel 2 of unit is connected with the positive electrode fluid channel 1 of the latter micro cell unit.For example, the 1st
Group micro cell unit is when n-th group micro cell unit is sequentially connected in series, the positive electrode miniflow of the 1st group of micro cell unit
The negative electrode fluid channel 2 of anode of the road 1 as liquid metal cell device, n-th group micro cell unit is used as liquid metal cell
The cathode of device, the positive and negative anodes of liquid metal cell device can be provided out voltage after connecting plain conductor.
On the basis of the above embodiments, the embodiment of the present invention constitutes liquid metal electricity by multiple micro cell units of connecting
Pool device effectively increases output voltage grade, to improve practicability.
Further, based on the above embodiment, the liquid metal cell device further includes plural serial stage micro-structure, described
Plural serial stage micro-structure is located between two micro cell units being serially connected；For connecting the previous micro cell unit
The negative electrode fluid channel and the latter micro cell unit the positive electrode fluid channel.
The plural serial stage micro-structure, is distributed between micro cell unit, realizes the series connection of micro cell unit, i.e. connection the
The negative electrode fluid channel 2 of one group of micro cell unit and the positive electrode fluid channel 1 of second group of micro cell unit, connect second group of micro- electricity
The negative electrode fluid channel 2 of pool unit and the positive electrode fluid channel 1 of third group micro cell unit, connection third group micro cell unit
The positive electrode fluid channel 1 of negative electrode fluid channel 2 and the 4th group of micro cell unit, and so on, until (n-1)th (n >=1) group of connection
The negative electrode fluid channel 2 of micro cell unit and the positive fluid channel 1 of n-th group micro cell unit, to constitute by multiple micro cells
Unit is connected the liquid metal cell device to be formed.
Anode of the positive electrode fluid channel 1 of first group of micro cell unit as liquid metal cell device, n-th group are micro-
The positive and negative anodes of cathode of the negative electrode fluid channel 2 of battery unit as liquid metal cell device, liquid metal cell device connect
Voltage can be provided out after connecing plain conductor.
It can compared with being directly connected to two micro cell units by two micro cell units of plural serial stage microstructure brazing
To make the liquid metal of first fluid injection may not flow into the miniflow of adjacent micro cell unit by rationally designing plural serial stage micro-structure
Road.
On the basis of the above embodiments, the embodiment of the present invention is by utilizing the multiple micro cells of plural serial stage micro-structure series connection
Unit constitutes liquid metal cell device, further improves the reliability of liquid metal cell device.
Further, based on the above embodiment, all micro cell units shared one electrolyte fluid channels 3 or
The electrolyte fluid channel 3 or part one electricity of the micro cell units shared is separately provided in each micro cell unit
The electrolyte fluid channel 3 is separately provided in solution liquid fluid channel 3, remaining described micro cell unit.
It include positive electrode fluid channel 1, negative electrode fluid channel 2 and electrolyte miniflow for each micro cell unit
Electrolyte fluid channel 3 can also be separately provided for that can share electrolyte fluid channel 3 between each micro cell unit in road 3.
For example, can be one electrolyte fluid channel 3 of all micro cell units shareds in liquid metal cell device, or it can be liquid
The electrolyte fluid channel 3 is separately provided in each micro cell unit in state metal battery device, is also possible to part micro cell
Units shared electrolyte fluid channel 3 and electrolyte fluid channel 3 is separately provided in remaining micro cell unit.
On the basis of the above embodiments, the embodiment of the present invention shares electrolyte miniflow by making between micro cell unit
Electrolyte fluid channel is separately provided in road, the spirit of structure when improving liquid metal cell device in series by micro cell unit
Activity.
Further, based on the above embodiment, micro- in the multiple one electrolyte of the micro cell units shared
When runner 3, it is micro- that the positive electrode fluid channel 3 and the negative electrode fluid channel of the micro cell unit are distributed in the electrolyte
It the two sides of runner 3 and is alternately arranged.
In the multiple one electrolyte fluid channel 3 of micro cell units shared, the micro cell unit
The positive electrode fluid channel 3 and the negative electrode fluid channel are distributed in the two sides of the electrolyte fluid channel 3 and are alternately arranged.
I.e. in 3 side of electrolyte fluid channel according to positive electrode fluid channel 1, the alternate sequence distribution electrode of negative electrode fluid channel 2, then relatively
Ying Di, in 3 other side of electrolyte fluid channel according to opposite negative electrode fluid channel 2, positive electrode fluid channel 1, alternate sequence point
Cloth electrode；It is each pair of be distributed in 3 two sides of electrolyte fluid channel positive electrode fluid channel 1 in correspondence with each other and negative electrode fluid channel 2 and
Electrolyte fluid channel 3, fence micro-structure therebetween forms one group of micro cell unit.
Due to when micro cell unit is connected, need to connect the negative electrode fluid channel 2 of previous micro cell unit with
The positive electrode fluid channel 1 of latter micro cell unit, it is atomic in the every side positive electrode fluid channel 1 and negative electricity of electrolyte fluid channel 3
Runner 2 be alternately distributed so that micro cell unit series connection it is more convenient, be more suitable for realizing in the substrate of micro-fluidic chip.
On the basis of the above embodiments, the embodiment of the present invention at multiple micro cell units shareds one by being electrolysed
When liquid fluid channel, the positive electrode fluid channel and negative electrode fluid channel of micro cell unit be distributed in the two sides of electrolyte fluid channel and
It is alternately arranged, facilitates the series connection between micro cell unit, reduce implementation cost.
Further, based on the above embodiment, the shape packet of the positive electrode fluid channel 1 and the negative electrode fluid channel 2
Include one or both of linear type and bent；The shape of the electrolyte fluid channel 3 is linear；The plural serial stage is micro-
The shape of structure is round or trapezoidal.
The shape of the positive electrode fluid channel 1 and the negative electrode fluid channel 2 includes one of linear type and bent
Or two kinds, such as at one by multiple micro cell units liquid metal cell device in series, each micro cell unit
Positive electrode fluid channel 1 can be linear, be bent or part be rectilinear segments is bent；It is each micro-
The negative electrode fluid channel 2 of battery unit can be linear, be bent or part be rectilinear segments is bending
Shape.Wherein, bent refers to non-linear.
The shape of the electrolyte fluid channel 3 is linear, can be configured as other shapes, as long as it is micro- to be able to achieve electrolyte
The function of runner.
The shape of the plural serial stage micro-structure can be such that first kind liquid metal and the second fluid-like state metal contacts to be any
And liquid metal will not enter the shape of adjacent positive electrode fluid channel or negative electrode fluid channel in filling process.Such as in multistage
When round exit being arranged at micro-structure of connecting, the negative electrode fluid channel 2 of previous micro cell unit and latter micro cell unit are just
The shared round exit of electrode fluid channel 1 makes first kind liquid metal in the two and the second fluid-like state metal in round exit
Place crosses, and realizes the series connection between micro cell.Certainly, the embodiment of the present invention is not limited to round exit, may be alternatively provided as it
His inner sealing interface channel of different shapes.
When the shape of plural serial stage micro-structure is trapezoidal, trapezoidal plural serial stage micro-structure is used to connect previous micro cell
The positive electrode fluid channel 1 of the negative electrode fluid channel 2 of unit and latter micro cell unit, the purpose for being set as trapezoidal are using trapezoidal
The lesser upper top surface of width prevents the liquid metal first injected from flowing to adjacent microchannel.Certainly, not office of the embodiment of the present invention
It is limited to trapezium structure, may be alternatively provided as other shapes, as long as is able to achieve corresponding function.
On the basis of the above embodiments, the embodiment of the present invention passes through setting positive electrode fluid channel, negative electrode fluid channel, electricity
The multiple structural forms for solving liquid fluid channel and plural serial stage micro-structure, further improve flexibility.
Fig. 2 be another embodiment of the present invention provides the liquid metal cell device based on micro-fluidic chip top plan view
Structural schematic diagram.Fig. 3 is the enlarged drawing of part A in Fig. 2.
As shown in Figure 2 and Figure 3, a kind of liquid metal cell device based on micro-fluidic chip is present embodiments provided, wherein
Include: the positive electrode fluid channel 1 for being marked with first kind liquid metal, is marked with the negative electrode fluid channel 2 of the second fluid-like state metal, is marked with
The electrolyte fluid channel 3 of electrolyte solution, plural serial stage micro-structure 5 and fence micro-structure 6.1 He of positive electrode fluid channel
Negative electrode fluid channel 2 is alternately distributed in pairs in 3 two sides of electrolyte fluid channel, i.e. 3 top of electrolyte fluid channel is atomic according to positive electricity
The sequence distribution electrode of runner 1, negative electrode fluid channel 2, positive electrode fluid channel 1, negative electrode fluid channel 2, positive electrode fluid channel 1,
It is then corresponding, according to negative electrode fluid channel 2, positive electrode fluid channel 1, negative electrode fluid channel 2, positive electricity below electrolyte fluid channel
The sequence distribution electrode of atomic runner 1, negative electrode fluid channel 2；Fence micro-structure 6 is located at electrolyte fluid channel 3 and positive electricity is atomic
Between runner 1 and between electrolyte fluid channel 3 and negative electrode fluid channel 2, comprising being in several trapezoidal duckpins；Each pair of distribution
Electrolyte miniflow in 3 two sides of electrolyte fluid channel positive electrode fluid channel 1 in correspondence with each other and negative electrode fluid channel 2 and therebetween
Road 3, fence micro-structure 6 form one group of micro cell unit 4, share 5 groups of micro cell units in the present embodiment；The plural serial stage knot
Structure 5 is distributed between adjacent micro cell unit 4, makes the negative electrode fluid channel 2 of a micro cell unit 4 and next micro cell
The positive electrode fluid channel 1 of unit 4 is connected, to realize the series connection of micro cell unit 4；The positive electricity of first group of micro cell unit 4
The negative electrode fluid channel 2 of anode of the atomic runner 1 as liquid metal cell device, the 5th group of micro cell unit 4 is used as liquid
The cathode of metal battery device, the positive and negative anodes of liquid metal cell device can be provided out voltage after connecting plain conductor.
In the present embodiment, the positive electrode fluid channel 1 and negative electrode fluid channel 2 are bending type, and positive electrode fluid channel is filled out
First kind liquid metal is filled, negative electrode fluid channel fills the second fluid-like state metal, and first kind liquid metal activity is lower than second
Fluid-like state metal active.
Specifically, first kind liquid metal is in bismuth, bismuth indium alloy, bismuth tin alloy, bismuth indium stannum alloy, indium stannum alloy or mercury
One kind, it is preferred to use bismuth indium alloy or bismuth indium stannum alloy；Second fluid-like state metal is gallium, gallium-indium alloy, gallium-indium-tin alloy, gallium
One of tin alloy, it is preferred to use gallium-indium alloy or gallium-indium-tin alloy.
In the present embodiment, 3 quantity of electrolyte fluid channel is 1, and shape is located at positive electrode fluid channel 1 in being linear type
Between negative electrode fluid channel 2, wherein being marked with electrolyte solution.
Specifically, electrolyte solution is copper sulphate, copper chloride, copper nitrate, iron chloride, frerrous chloride, ferrous sulfate, trichlorine
Change nickel or other electrolyte solutions that can be reacted with the generation displacement of the second fluid-like state metal component.It is preferred that using certain mass concentration
Copper sulphate, iron chloride or solution of ferrous chloride.
In the present embodiment, fence micro-structure 6 shares ten groups, be located at positive electrode fluid channel 1, negative electrode fluid channel 2 with
3 intersection of electrolyte fluid channel, as shown in figure 3, every group of fence micro-structure has 8 miniature pillars 7, miniature 7 cross section of pillar
Trapezoidal, the minimum range between adjacent micro-posts 7 is 18~23 μm.Fence micro-structure 6 makes electrolyte fluid channel 3 and positive electrode
Fluid channel 1, negative electrode fluid channel 2 are connected, while can obstruct first kind liquid metal and negative electrode in positive electrode fluid channel 1
The second fluid-like state metal in fluid channel 2 enters electrolyte fluid channel 3, and make electrolyte solution and first kind liquid metal and
Second fluid-like state metal is in contact in miniature pillar gap location and is electrochemically reacted to spontaneous.
In the present embodiment, the specific production method of the plural serial stage micro-structure 5 is: the positive negative electricity of adjacent micro cell unit
Atomic runner shares a round exit, connects first kind liquid metal and the second fluid-like state metal at conjoint outlet.
The present embodiment is using five pairs of electrode series connection, the effect with voltage of serially-connected cells superposition.Such as dense using quality
Degree for 4.5% copper-bath as electrolyte when, the voltage of the single pair electrode generation measured in certain time 150mV~
Between 200mV, five pairs of electrodes connect generated voltage between 700mV~1000mV.
Fig. 4 is the top plan view for the liquid metal cell device based on micro-fluidic chip that yet another embodiment of the invention provides
Structural schematic diagram.Fig. 5 is the enlarged drawing of part B in Fig. 4.As shown in Figure 4, Figure 5, the liquid based on micro-fluidic chip of the present embodiment
State metal battery device is similar to the principle of a upper embodiment, and structure is slightly different, and volume is more compact.Including: it is marked with
The positive electrode fluid channel 1 of first kind liquid metal is marked with the negative electrode fluid channel 2 of the second fluid-like state metal, it is molten to be marked with electrolyte
The electrolyte fluid channel 3 of liquid, plural serial stage micro-structure 5 and fence micro-structure 6.The positive electrode fluid channel 1 and negative electricity are atomic
Runner 2 is alternately distributed in pairs in electrolyte fluid channel two sides, i.e., according to positive electrode fluid channel 1, negative electricity above electrolyte fluid channel
The sequence distribution electrode of atomic runner 2, positive electrode fluid channel 1, negative electrode fluid channel 2, positive electrode fluid channel 1, then it is corresponding,
Below electrolyte fluid channel according to negative electrode fluid channel 2, positive electrode fluid channel 1, negative electrode fluid channel 2, positive electrode fluid channel 1,
The sequence distribution electrode of negative electrode fluid channel 2；Fence micro-structure 6 between electrolyte fluid channel 3 and positive electrode fluid channel 1 with
And between electrolyte fluid channel 3 and negative electrode fluid channel 2, comprising being in several trapezoidal duckpins；It is each pair of that be distributed in electrolyte micro-
3 two sides of runner positive electrode fluid channel 1 in correspondence with each other and negative electrode fluid channel 2 and electrolyte fluid channel 3 therebetween, fence are micro-
Structure 6 forms one group of micro cell unit 4, shares 5 groups of micro cell units in the present embodiment；The plural serial stage structure 5 is distributed in
The negative electrode fluid channel 2 for making a micro cell unit 4 between adjacent micro cell unit 4 and next micro cell unit 4 are just
Electrode fluid channel 1 is connected, to realize the series connection of micro cell unit 4；The positive electrode fluid channel 1 of first group of micro cell unit 4
As the anode of liquid metal cell device, the negative electrode fluid channel 2 of the 5th group of micro cell unit 4 is filled as liquid metal cell
The cathode set, the positive and negative anodes of liquid metal cell device can be provided out voltage after connecting plain conductor.
Specifically, positive electrode fluid channel 1 and negative electrode fluid channel 2 are of a straight line type and two type of bending type in the present embodiment
Type, positive electrode fluid channel fill first kind liquid metal, and negative electrode fluid channel fills the second fluid-like state metal, and the first fluid-like state
Metal active is lower than the second fluid-like state metal active.
Specifically, first kind liquid metal is in bismuth, bismuth indium alloy, bismuth tin alloy, bismuth indium stannum alloy, indium stannum alloy or mercury
One kind, it is preferred to use bismuth indium alloy or bismuth indium stannum alloy；Second fluid-like state metal is gallium, gallium-indium alloy, gallium-indium-tin alloy, gallium
One of tin alloy, it is preferred to use gallium-indium alloy or gallium-indium-tin alloy.
In the present embodiment, 3 quantity of electrolyte fluid channel is 1, and shape is located at positive electrode fluid channel 1 in being linear type
Between negative electrode fluid channel 2, wherein being marked with electrolyte solution.
Specifically, electrolyte solution is copper sulphate, copper chloride, copper nitrate, iron chloride, frerrous chloride, ferrous sulfate, trichlorine
Change nickel or other electrolyte solutions that redox reaction can occur with the second fluid-like state metal component.It is preferred that using certain mass
Copper sulphate, iron chloride or the solution of ferrous chloride of concentration.
In the present embodiment, fence micro-structure 6 shares ten groups, be located at positive electrode fluid channel 1, negative electrode fluid channel 2 with
3 intersection of electrolyte fluid channel, every group of fence micro-structure 6 have multiple miniature pillars 7, and miniature 7 cross section of pillar is trapezoidal, phase
Minimum range between adjacent miniature pillar 7 is 18~23 μm.Fence micro-structure 6 make electrolyte fluid channel 3 and positive electrode fluid channel 1,
Negative electrode fluid channel 2 is connected, while can obstruct the first kind liquid metal in positive electrode fluid channel 1 and negative electrode fluid channel 2
In the second fluid-like state metal enter electrolyte fluid channel 3, and make electrolyte solution and first kind liquid metal and the second class
Liquid metal is in contact in miniature pillar gap location and is electrochemically reacted to spontaneous.
In the present embodiment, the specific production method of the plural serial stage micro-structure 5 is: adjacent micro cell unit 4 just
Isosceles trapezoid fluid channel is manufactured between electrode fluid channel 1 and negative electrode fluid channel 2, makes the first kind liquid in positive electrode fluid channel 1
The second fluid-like state metal between state metal and negative electrode fluid channel 2 contacts in isosceles trapezoid fluid channel, and isosceles trapezoid is micro-
30 μm of bottom width on runner connect negative electrode fluid channel 2, and isosceles trapezoid fluid channel base square is 300 μm, connect positive electrode miniflow
Road 1.
Fig. 6 is the top plan view for the liquid metal cell device based on micro-fluidic chip that further embodiment of this invention provides
Structural schematic diagram.Fig. 7 is the enlarged drawing of C portion in Fig. 6.
As shown in Figure 6, Figure 7, the liquid metal cell device provided in this embodiment based on micro-fluidic chip includes being marked with
The positive electrode fluid channel 1 of first kind liquid metal is marked with the negative electrode fluid channel 2 of the second fluid-like state metal, it is molten to be marked with electrolyte
The electrolyte fluid channel 3 of liquid, plural serial stage micro-structure 5 and fence micro-structure 6.The positive electrode fluid channel 1 and negative electricity are atomic
Runner 2 is distributed in 3 two sides of electrolyte fluid channel in pairs.In the present embodiment, there are three electrolyte fluid channels 3 altogether, micro- in electrolyte
Positive electrode fluid channel 1 is distributed on the left of runner 3, right side is distributed negative electrode fluid channel 2；Fence micro-structure 6 is located at electrolyte fluid channel 3
Between positive electrode fluid channel 1 and between electrolyte fluid channel 3 and negative electrode fluid channel 2, include several trapezoidal pillars
Son；Each pair of 3 two sides of electrolyte fluid channel positive electrode fluid channel 1 in correspondence with each other and negative electrode fluid channel 2 and therebetween of being distributed in
Electrolyte fluid channel 3, fence micro-structure 6 form one group of micro cell unit 4, share 3 groups of micro cell units in the present embodiment；Institute
Plural serial stage structure 5 is stated to be distributed between adjacent micro cell unit 4, make the negative electrode fluid channel 2 of a micro cell unit 4 with
The positive electrode fluid channel 1 of next micro cell unit 4 is connected, to realize the series connection of micro cell unit 4；First group of micro cell
Anode of the positive electrode fluid channel 1 of unit 4 as liquid metal cell device, the negative electrode miniflow of third group micro cell unit 4
Cathode of the road 2 as liquid metal cell device, the positive and negative anodes of liquid metal cell device can mention outward after connecting plain conductor
Voltage supplied.
Specifically, positive electrode fluid channel 1 and negative electrode fluid channel 2 are in bending type, positive electrode fluid channel 1 in the present embodiment
First kind liquid metal is filled, negative electrode fluid channel 2 fills the second fluid-like state metal, and first kind liquid metal activity is lower than the
Two fluid-like state metal actives.
Specifically, first kind liquid metal is in bismuth, bismuth indium alloy, bismuth tin alloy, bismuth indium stannum alloy, indium stannum alloy or mercury
One kind, it is preferred to use bismuth indium alloy or bismuth indium stannum alloy；Second fluid-like state metal is gallium, gallium-indium alloy, gallium-indium-tin alloy, gallium
One of tin alloy, it is preferred to use gallium-indium alloy or gallium-indium-tin alloy.
In the present embodiment, 3 shape of electrolyte fluid channel is located at positive electrode fluid channel 1 and negative electrode in being linear type
Between fluid channel 2, wherein being marked with electrolyte solution.
Specifically, electrolyte solution is copper sulphate, copper chloride, copper nitrate, iron chloride, frerrous chloride, ferrous sulfate, trichlorine
Change nickel or other electrolyte solutions that can be reacted with the generation displacement of the second fluid-like state metal component.It is preferred that using certain mass concentration
Copper sulphate, iron chloride or solution of ferrous chloride.
In the present embodiment, fence micro-structure 6 shares six groups, be located at positive electrode fluid channel 1, negative electrode fluid channel 2 with
3 intersection of electrolyte fluid channel, every group of fence micro-structure have 5 miniature pillars 7, and miniature 7 cross section of pillar is trapezoidal, adjacent
Minimum range between miniature pillar 7 is 18~23 μm.Fence micro-structure 6 makes electrolyte fluid channel 3 and positive electrode fluid channel 1, bears
Electrode fluid channel 2 is connected, while can obstruct in first kind liquid metal and negative electrode fluid channel 2 in positive electrode fluid channel 1
The second fluid-like state metal enter electrolyte fluid channel 3, and make electrolyte solution and first kind liquid metal and the second class liquid
State metal is in contact in miniature pillar gap location and is electrochemically reacted to spontaneous.
In the present embodiment, the specific production method of the plural serial stage micro-structure 5 is: the positive negative electricity of adjacent micro cell unit
Atomic runner shares a round exit, connects first kind liquid metal and the second fluid-like state metal at conjoint outlet.
Compared to upper two embodiments, this embodiment reduces the internal interference factors between micro cell unit.For example, in Fig. 2
The small triangular portions of closing can form small battery unit, therefore have a degree of internal interference, and the present embodiment
Then eliminate this interference.
Note: in Fig. 2, Fig. 4 and Fig. 6,3 both ends of positive electrode fluid channel 1, negative electrode fluid channel 2 and electrolyte fluid channel
Stain indicates injection port.
The micromation of micro-fluidic chip is utilized in the embodiment of the present invention, automation, integrated, the characteristics such as low in cost, with
And liquid metal material superior electrical conductivity, many advantages, such as electrochemistry, fusing point is low, good fluidity, easily it is injected in micro-fluidic core
In the fluid channel of piece, good electrochemical reaction is formd, stable integrated voltage is produced, can be provided for flexible electronic device
Electric energy has broad prospects.
Fig. 8 is the preparation method process of the liquid metal cell device provided in an embodiment of the present invention based on micro-fluidic chip
Figure.As shown in Figure 8, which comprises
Step 101, in the substrate of micro-fluidic chip, using soft lithography, pass through film or chromium plate mask etching system
Make positive electrode fluid channel, negative electrode fluid channel and electrolyte fluid channel；The positive electrode fluid channel, the negative electrode fluid channel point
It is not connected with the electrolyte fluid channel；
The micro-fluidic chip host material can use PDMS, using the soft lithographic skill in produced by micro processing technique
Art makes positive electrode fluid channel, negative electrode fluid channel, electrolyte fluid channel by film or chromium plate mask etching.The electrolysis
Liquid fluid channel, positive electrode fluid channel and negative electrode fluid channel are all set in the substrate of micro-fluidic chip and are packaged.
Step 102, by first kind liquid metal, the second fluid-like state metal and electrolyte solution according to preset order according to
It is secondary to be circulated into the positive electrode fluid channel, the negative electrode fluid channel and the electrolyte fluid channel.
First kind liquid metal and the second fluid-like state metal successively first can be circulated into the positive electrode fluid channel and institute
Conducting wire is stated in negative electrode fluid channel and be connected into, then electrolyte solution is injected into electrolyte fluid channel.
Wherein, which first injects or injects simultaneously for first kind liquid metal and the second fluid-like state metal, depending on not sympathizing with
Depending on condition.
The embodiment of the present invention is low using liquid metal fusing point, the characteristic of good fluidity, and it is convenient to operate, and easily infuses in fluid channel
Penetrate molding.Therefore, this liquid metal cell device is sustainable is electrochemically reacted, whithin a period of time, can be formed steady
Fixed potential difference.
Fig. 9 be another embodiment of the present invention provides the liquid metal cell device based on micro-fluidic chip preparation method
Flow chart.As shown in Figure 9, which comprises
Step 201, in the substrate of micro-fluidic chip, using soft lithography, pass through film or chromium plate mask etching system
Make positive electrode fluid channel, negative electrode fluid channel, electrolyte fluid channel, fence micro-structure and plural serial stage micro-structure；It is described just
Electrode fluid channel, the negative electrode fluid channel are connected by the fence micro-structure with the electrolyte fluid channel respectively, structure
At micro cell unit；The plural serial stage micro-structure is for the micro cell unit of connecting；
For example, the micro-fluidic chip host material can use PDMS, using the soft light in produced by micro processing technique
Lithography makes positive electrode fluid channel, negative electrode fluid channel, electrolyte fluid channel, fence by film or chromium plate mask etching
Micro-structure and plural serial stage micro-structure.Such produced by micro processing technical operation is simple, low in cost, can be mass.
The positive electrode fluid channel, the negative electrode fluid channel are micro- by the fence micro-structure and the electrolyte respectively
Runner is connected, and constitutes micro cell unit (non-fluid injection).The plural serial stage micro-structure is for the micro cell unit of connecting.
The electrolyte fluid channel, positive electrode fluid channel, negative electrode fluid channel, fence micro-structure and the micro- knot of plural serial stage
Structure is all set in the substrate of micro-fluidic chip and is packaged.
Step 202, first kind liquid metal and the second fluid-like state metal are successively circulated into the positive electrode fluid channel and
In the negative electrode fluid channel, and two kinds of liquid metals is made to be in contact at the plural serial stage micro-structure；Then, it will be electrolysed
Matter solution injects the electrolyte fluid channel in the pressure limit of setting.
First kind liquid metal and the second fluid-like state metal are successively circulated into positive electrode fluid channel and negative electrode fluid channel
In the middle, and two kinds of liquid metals is made to be in contact at plural serial stage micro-structure；Then, by electrolyte solution setting pressure
In range (such as 50mbar~300mbar) inject electrolyte fluid channel, preferably use sampling system, prevent electrolyte solution because
Pressure crosses the rock-steady structure of liquid metal in havoc positive electrode fluid channel and negative electrode fluid channel.When electrolyte solution and first
After fluid-like state metal and the contact of the second fluid-like state metal, electrochemical reaction can be spontaneously formed；It will be based on using conducting wire micro-fluidic
The liquid metal cell device of chip is connect with external equipment, can provide electric energy for external equipment.
The fence micro-structure, between the electrolyte fluid channel and the positive electrode fluid channel and the electrolysis
Between liquid fluid channel and the negative electrode fluid channel；The fence micro-structure may include several miniature pillars, make the electrolysis
Liquid fluid channel is connected with the positive electrode fluid channel and the negative electrode fluid channel, while obstructing the positive electrode fluid channel
In the first kind liquid metal and the negative electrode fluid channel in the second fluid-like state metal enter the electrolyte
Fluid channel, and make the electrolyte solution with the first kind liquid metal and the second fluid-like state metal described miniature
Gap between pillar is in contact.The embodiment of the present invention is low using liquid metal fusing point, the characteristic of good fluidity, and it is convenient to operate,
Easily it is injection moulded in fluid channel.Therefore, this liquid metal cell device is sustainable is electrochemically reacted, in a period of time
It is interior, stable potential difference can be formed.
On the basis of the above embodiments, first when the embodiment of the present invention ensure that fluid injection by the setting of fence micro-structure
Fluid-like state metal and the second fluid-like state metal will not enter electrolyte fluid channel, also, micro- by the realization of plural serial stage micro-structure
The series connection of battery unit, improves output voltage.
Method provided in an embodiment of the present invention be for above-mentioned apparatus, undisclosed liquid metal cell device it is specific
Manufacturing process can realize that details are not described herein again using existing process flow and technology.
The apparatus embodiments described above are merely exemplary, wherein described, unit can as illustrated by the separation member
It is physically separated with being or may not be, component shown as a unit may or may not be physics list
Member, it can it is in one place, or may be distributed over multiple network units.It can be selected according to the actual needs
In some or all of the modules achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not paying creativeness
Labour in the case where, it can understand and implement.
Through the above description of the embodiments, those skilled in the art can be understood that each embodiment can
It realizes by means of software and necessary general hardware platform, naturally it is also possible to pass through hardware.Based on this understanding, on
Stating technical solution, substantially the part that contributes to existing technology can be embodied in the form of software products in other words, should
Computer software product may be stored in a computer readable storage medium, such as ROM/RAM, magnetic disk, CD, including several fingers
It enables and using so that a computer equipment (can be personal computer, server or the network equipment etc.) executes each implementation
Method described in certain parts of example or embodiment.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used
To modify the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；
And these are modified or replaceed, technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (10)
1. a kind of liquid metal cell device based on micro-fluidic chip characterized by comprising be set to micro-fluidic chip
Positive electrode fluid channel, negative electrode fluid channel and electrolyte fluid channel in substrate；The positive electrode fluid channel, the negative electrode
Fluid channel is connected with the electrolyte fluid channel respectively；
Wherein, the positive electrode fluid channel and the negative electrode fluid channel are marked with first kind liquid metal and the second fluid-like state respectively
Metal, and the activity of the first kind liquid metal is lower than the activity of the second fluid-like state metal；The electrolyte fluid channel
In filled with can with the second fluid-like state metal component occur electrochemical reaction electrolyte solution.
2. liquid metal cell device according to claim 1, which is characterized in that the first kind liquid metal or described
Second fluid-like state metal is in gallium, bismuth, indium, tin, mercury, gallium-indium alloy, gallium-indium-tin alloy, bismuth indium alloy and bismuth indium stannum alloy
It is at least one.
3. liquid metal cell device according to claim 1, which is characterized in that the liquid metal cell device also wraps
Include fence micro-structure, between the electrolyte fluid channel and the positive electrode fluid channel and the electrolyte fluid channel and
Between the negative electrode fluid channel；The fence micro-structure includes several miniature pillars, make the electrolyte fluid channel with it is described
Positive electrode fluid channel and the negative electrode fluid channel are connected, while obstructing the first kind in the positive electrode fluid channel
The second fluid-like state metal in liquid metal and the negative electrode fluid channel enters the electrolyte fluid channel, and makes institute
State the gap of electrolyte solution and the first kind liquid metal and the second fluid-like state metal between the miniature pillar
It is in contact.
4. liquid metal cell device according to claim 3, which is characterized in that described micro- in the fence micro-structure
The shape of the cross section of type pillar include one of round, oval, rectangular, triangle, trapezoidal and polygon or a variety of, two
Minimum level spacing between a miniature pillar is it is ensured that the first kind liquid metal and the second fluid-like state metal
The electrolyte fluid channel will not be entered.
5. liquid metal cell device according to claim 3, which is characterized in that the electrolyte fluid channel, it is described just
Electrode fluid channel, the negative electrode fluid channel, between the electrolyte fluid channel and the positive electrode fluid channel described in
Fence micro-structure and the fence micro-structure between the electrolyte fluid channel and the negative electrode fluid channel are constituted
One micro cell unit；The liquid metal cell device includes concatenated multiple micro cell units；Wherein, previous described
The negative electrode fluid channel of micro cell unit is connected with the positive electrode fluid channel of the latter micro cell unit.
6. liquid metal cell device according to claim 5, which is characterized in that the liquid metal cell device also wraps
Plural serial stage micro-structure is included, the plural serial stage micro-structure is located between two micro cell units being serially connected；For
Connect the negative electrode fluid channel of the previous micro cell unit and the positive electrode miniflow of the latter micro cell unit
Road.
7. liquid metal cell device according to claim 6, which is characterized in that all micro cell units shareds one
The electrolyte fluid channel or part micro- electricity is separately provided in a electrolyte fluid channel or each micro cell unit
Pool unit shares an electrolyte fluid channel, the electrolyte fluid channel is separately provided in remaining described micro cell unit.
8. liquid metal cell device according to claim 7, which is characterized in that in the multiple micro cell unit
When sharing an electrolyte fluid channel, the positive electrode fluid channel and the negative electrode fluid channel of the micro cell unit
It is distributed in the two sides of the electrolyte fluid channel and is alternately arranged.
9. liquid metal cell device according to claim 6, which is characterized in that the positive electrode fluid channel and described negative
The shape of electrode fluid channel includes one or both of linear type and bent；
The shape of the electrolyte fluid channel is any shape that electrolyte can be made to pass through；
The shape of the plural serial stage micro-structure be it is any can make first kind liquid metal and the second fluid-like state metal contact and
Liquid metal will not enter the shape of adjacent positive electrode fluid channel or negative electrode fluid channel in filling process.
10. a kind of preparation method of the liquid metal cell device based on micro-fluidic chip characterized by comprising
In the substrate of micro-fluidic chip, using soft lithography, positive electrode miniflow is made by film or chromium plate mask etching
Road, negative electrode fluid channel and electrolyte fluid channel；The positive electrode fluid channel, the negative electrode fluid channel respectively with the electrolysis
Liquid fluid channel is connected；
First kind liquid metal, the second fluid-like state metal and electrolyte solution are successively circulated into according to preset order described
Positive electrode fluid channel, the negative electrode fluid channel and the electrolyte fluid channel.
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