CN109781288A - For detecting the temperature sensor and preparation method thereof of laser facula thermo parameters method - Google Patents
For detecting the temperature sensor and preparation method thereof of laser facula thermo parameters method Download PDFInfo
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- CN109781288A CN109781288A CN201910161572.0A CN201910161572A CN109781288A CN 109781288 A CN109781288 A CN 109781288A CN 201910161572 A CN201910161572 A CN 201910161572A CN 109781288 A CN109781288 A CN 109781288A
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Abstract
The invention discloses a kind of for detecting the temperature sensor and preparation method thereof of laser facula thermo parameters method, including dielectric high temperature layer substrate, the dielectric high temperature layer substrate surface is divided into sensitizing range and de-militarized zone, the positive thermocouple membrane array and cathode thermocouple membrane array being sequentially distributed from bottom to top are provided on the sensitizing range, wherein, one piece of positive thermocouple film in positive thermocouple membrane array corresponds to one piece of cathode thermocouple film in cathode thermocouple membrane array, and each cathode thermocouple film is covered on corresponding positive thermocouple film, the region that positive thermocouple membrane array is not covered on the upper surface and sensitizing range of positive thermocouple film is all covered with protective layer；Each cathode thermocouple film and each positive thermocouple film are respectively connected with cold end, wherein each cold end is respectively positioned in de-militarized zone, which has the characteristics that more temperature measuring points and small in size.
Description
Technical field
The invention belongs to laser facula field of temperature measurement, are related to a kind of for detecting the temperature of laser facula thermo parameters method
Spend sensor and preparation method thereof.
Background technique
Laser is high due to having the characteristics that good monochromaticjty, high directivity, brightness, be widely used in communication, military affairs,
The fields such as health care industry.In the industrial production, it is cut by laser, laser fast shaping, swashed using the high-energy density of laser
The temperature of laser facula must be controlled when light cutting, laser surgey.Therefore for the detection of the Temperature Distribution of laser facula to pass
It is important, and traditional temperature sensor is since volume is big, temperature measuring point is few, it is difficult to realize the mesh of laser facula Temperature Distribution detection
's.Therefore exploitation must for detecting that the temperature sensor of a kind of small size of laser facula Temperature Distribution, more temperature measuring points has very much
It wants.
Summary of the invention
It is an object of the invention to overcome the above-mentioned prior art, provide a kind of for detecting laser facula temperature
Temperature sensor of field distribution and preparation method thereof, the temperature sensor have the characteristics that more temperature measuring points and small in size.
In order to achieve the above objectives, the temperature sensor of the present invention for detecting laser facula thermo parameters method includes
Dielectric high temperature layer substrate, the dielectric high temperature layer substrate surface are divided into sensitizing range and de-militarized zone, on the sensitizing range
It is provided with the positive thermocouple membrane array and cathode thermocouple membrane array being sequentially distributed from bottom to top, wherein positive thermoelectricity
One piece of positive thermocouple film in even membrane array corresponds to one piece of cathode thermocouple film in cathode thermocouple membrane array,
And each cathode thermocouple film is covered on corresponding positive thermocouple film, the upper surface and sensitizing range of positive thermocouple film
The region that positive thermocouple membrane array is not covered on domain is all covered with protective layer；
Each cathode thermocouple film and each positive thermocouple film are respectively connected with cold end, wherein each cold end is respectively positioned on non-quick
In sensillary area domain.
The material of dielectric high temperature layer substrate is thyrite.
The material of positive thermocouple membrane array is N-shaped lanthanum strontium chromate, and the material of cathode thermocouple membrane array is p-type oxygen
Change indium.
One piece of positive thermocouple film forms a thermal center point with cathode thermocouple film thereon, and each thermal center point is in cross
Shape distribution.
Hot interstitial content is 25, wherein a thermal center point is located at center position, and remaining 24 thermal center points are equally divided into
Six groups, the spacing of two adjacent groups thermal center point is 100 μm.
The width of each piece of positive thermocouple film and cathode thermocouple film is 50 μm.
The sensitizing range is the circular configuration that diameter is 2mm.
The preparation method of temperature sensor of the present invention for detecting laser facula thermo parameters method includes following step
It is rapid:
1) the positive figure of film thermocouple is formed using photoetching process, and chooses sensitivity in dielectric high temperature layer substrate surface
Region and de-militarized zone；
2) positive thermocouple membrane array is made on sensitizing range using magnetically controlled sputter method；
3) the cathode figure of film thermocouple is formed using photoetching process；
4) cathode thermocouple membrane array is made using magnetically controlled sputter method；
5) figure of protective layer is formed using photoetching process；
6) protective layer is made using magnetically controlled sputter method, obtains temperature sensor sample；
7) the temperature sensor sample is demarcated, obtains the temperature sensing for detecting laser facula thermo parameters method
Device.
It further include that the product for obtaining step 4) is annealed 1h at 1000 DEG C between step 4) and step 5), so that just very hot
Each positive thermocouple film in galvanic couple membrane array and each cathode thermocouple film crystallization in cathode thermocouple membrane array.
The invention has the following advantages:
It is of the present invention to be used to detect temperature sensor of laser facula thermo parameters method and preparation method thereof specific
When operation, dielectric high temperature layer substrate surface is divided into sensitizing range and de-militarized zone, is provided with from bottom to top on sensitizing range
The positive thermocouple membrane array and cathode thermocouple membrane array being sequentially distributed, wherein in positive thermocouple membrane array
One piece of positive thermocouple film corresponds to one piece of cathode thermocouple film in cathode thermocouple membrane array, and each cathode thermocouple
Film is covered on corresponding positive thermocouple film, and each anode thermocouple film and cathode thermocouple film disposed thereon form
Multiple thermal center points, so that single temperature sensor has the characteristics that multiple temperature measuring points, and small volume, in addition, it is necessary to illustrate
, the present invention is based on thermocouple principles to be not necessarily to bridge-type processing circuit, therefore its measuring system is more simple without external energy supply
Folk prescription is just.
Further, the material of dielectric high temperature layer substrate is thyrite, meets the requirement of laser high-energy density.
Further, the material of positive thermocouple membrane array is N-shaped lanthanum strontium chromate, the material of cathode thermocouple membrane array
For p-type indium oxide, due to the seebeck coefficient symbols of N-shaped lanthanum strontium chromate and p-type indium oxide on the contrary, enhancing therefore can be exported
Signal.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of sensitizing range 5 in the present invention.
Wherein, 1 be dielectric high temperature layer substrate, 2 be positive very hot galvanic couple membrane array, 3 be negative very hot galvanic couple membrane array, 4
It is sensitizing range for thermal center point, 5,6 be protective layer, 7 is cold end.
Specific embodiment
The invention will be described in further detail with reference to the accompanying drawing:
Referring to Figure 1 and Figure 2, the temperature sensor of the present invention for detecting laser facula thermo parameters method includes exhausted
Edge heat zone substrate 1,1 surface of dielectric high temperature layer substrate are divided into sensitizing range 5 and de-militarized zone, the sensitizing range 5
On be provided with the positive thermocouple membrane array 2 and cathode thermocouple membrane array 3 being sequentially distributed from bottom to top, wherein anode
One piece of positive thermocouple film in thermocouple membrane array 2 corresponds to one block of cathode thermoelectricity in cathode thermocouple membrane array 3
Even film, and each cathode thermocouple film is covered on corresponding positive thermocouple film, the upper surface of positive thermocouple film with
And it is not covered with the region of positive thermocouple membrane array 2 on sensitizing range 5 and is all covered with protective layer 6；Each cathode thermocouple is thin
Film and each positive thermocouple film are respectively connected with cold end 7, wherein each cold end 7 is respectively positioned in de-militarized zone, and sensitizing range 5 is
Diameter is the circular configuration of 2mm.
The material of dielectric high temperature layer substrate 1 is thyrite；The material of positive thermocouple membrane array 2 is N-shaped
Lanthanum strontium chromate, the material of cathode thermocouple membrane array 3 are p-type indium oxide；The material of protective layer 6 is Al2O3。
One piece of positive thermocouple film forms a thermal center point 4 with cathode thermocouple film thereon, and thermal center point 4 is in cross
Shape distribution；The number of thermal center point 4 is 25, wherein a thermal center point 4 is located at center position, and remaining 24 thermal center points 4 are average
It is divided into six groups, the radial spacing of two adjacent groups thermal center point 4 is 100 μm.
The preparation method of temperature sensor of the present invention for detecting laser facula thermo parameters method includes following step
It is rapid:
1) the positive figure of film thermocouple is formed using photoetching process, and quick in the selection of 1 surface of dielectric high temperature layer substrate
Sensillary area domain 5 and de-militarized zone；
2) positive thermocouple membrane array 2 is made on sensitizing range 5 using magnetically controlled sputter method；
3) the cathode figure of film thermocouple is formed using photoetching process；
4) cathode thermocouple membrane array 3 is made using magnetically controlled sputter method；
5) figure of protective layer 6 is formed using photoetching process；
6) protective layer 6 is made using magnetically controlled sputter method, obtains temperature sensor sample；
7) the temperature sensor sample is demarcated, obtains the temperature sensing for detecting laser facula thermo parameters method
Device.
It further include that the product for obtaining step 4) is annealed 1h at 1000 DEG C between step 4) and step 5), so that just very hot
Each positive thermocouple film in galvanic couple membrane array 2 and each cathode thermocouple film in cathode thermocouple membrane array 3 are brilliant
Change.
Being set in center position is transversely center film heat with longitudinal respectively arranged anode thin film and negative film
Galvanic couple overlaps the equal negative and positive very thin films of spacing on the positive and negative anodes of the central film thermocouple, can form six temperature rings,
Wherein, four thermal center points 4 are set on each temperature ring, and include a positive thermocouple film and one on each thermal center point 4
A cathode thermocouple film measures laser facula with the thermal center point 4 for being located at center using six temperature rings
Seven temperature gradients.
In addition, it is necessary to illustrate, the parameter of magnetically controlled sputter method in the present invention are as follows: the power of sputtering is 150W, argon gas
Flow is 30sccm, and vacuum degree is 3 × 10-6Torr, time 4h.
The detailed process that the temperature sensor sample is demarcated in the present invention are as follows:
Temperature sensor is placed in temperature control box to keep cold junction temperature as room temperature, with small-sized heating plate to its sensitizing range
The whole heating in domain 5, so that the cold end 7 of thermocouple and hot end be made to generate temperature gradient, and then generates potential difference, and utilize logger
Utility data collecting instrument carries out voltage acquisition, and is demarcated according to collected voltage to temperature sensor.
The present invention is based on thermocouple principles, when laser facula is radiated on sensitizing range 5, the hot-side temperature of the sensor
It can increase, and then hot end and cold end 7 is caused to generate the temperature difference, due to the presence of Seebeck effect, in the positive and negative of the film thermocouple
Thermoelectromotive force is generated between extremely corresponding cold end 7, by obtaining temperature potential curve to sensor progress static demarcating,
And then obtain the relationship of hot-side temperature Yu 7 output potential of cold end, conversely, its hot end can be obtained by the potential for measuring cold end 7
Temperature, to realize monitoring to laser facula Temperature Distribution.
Embodiment one
Dielectric high temperature layer substrate 1 selects insulation high-temperature-resistant silicon carbide, with a thickness of 2mm, having a size of 30 × 30mm2, in order to protect
The quality of institute's sputtered film is demonstrate,proved, first successively cleans substrate with acetone, alcohol and deionized water, and use N2Drying, is then placed into
5min is heated on 90 DEG C of hot plate, to remove spot, greasy dirt and the dust etc. of dielectric high temperature layer substrate 1.
The equal width of the thermode of positive thermocouple film and cathode thermocouple film is 50 μm in the present embodiment, adjacent temperature
100 μm are divided between degree interannular.The sensor can detecte totally 7 temperature gradients, wherein the center of circle for laser facula,
Remaining 24 thermal center point 4 is evenly distributed on 6 temperature rings, and 4 thermal center points 4 on each temperature ring are with 90 ° of interval array minute
Cloth.
Film deposition uses magnetron sputtering technique in the present embodiment, and positive thermocouple material is N-shaped lanthanum strontium chromate
(La0.8Sr0.2CrO3), cathode thermocouple material is p-type indium oxide (In2O3), target is having a size of 101.6 × 3mm of Φ, purity
For 99.99% lanthanum strontium chromate (La0.8Sr0.2CrO3) and indium oxide (In2O3), sputtering power 150W, argon flow is
30sccm, vacuum degree are 3 × 10-6Torr, sputtering time 4h.Protective layer 6 is prepared by magnetron sputtering, sputtering parameter are as follows: function
Rate 200W, argon flow 50sccm, vacuum degree are 3 × 10-5Torr, sputtering time 2h, the temperature of dielectric high temperature layer substrate 1
For room temperature.
In order to study the performance of the thin-film thermocouple temperature sensor, static demarcating is carried out to it, firstly, using conductive silver paste
Cold end 7 is connect with compensating wire, to facilitate access test macro, which is placed in temperature control box, to guarantee
7 temperature of cold end is in constant room temperature environment, so that small-sized heating plate is heated up by adjusting the voltage of DC voltage source,
To be heated to sensitizing range 5, with the temperature of standard K-type thermocouple instruction heating plate, acquired with logger utility data
Instrument acquires output voltage, to obtain its temperature potential curve.
This example only describes a kind of temperature sensing that laser facula thermo parameters method is surveyed for examining temperature sensor in detail
Device and specific implementation method, but the present embodiment is not to limit the scope of protection of the patent of the present invention, is familiar with those skilled in the art
Member, if technology according to the present invention carries out the transformations such as simple structure change or technique change and should belong to the invention patent
In protection scope.
Claims (9)
1. a kind of for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that including dielectric high temperature layer base
Bottom (1), dielectric high temperature layer substrate (1) surface are divided into sensitizing range (5) and de-militarized zone, on the sensitizing range (5)
It is provided with the positive thermocouple membrane array (2) being sequentially distributed from bottom to top and cathode thermocouple membrane array (3), wherein just
Correspond in cathode thermocouple membrane array (3) one piece of one piece in very hot galvanic couple membrane array (2) positive thermocouple film is born
Very hot galvanic couple film, and each cathode thermocouple film is covered on corresponding positive thermocouple film, positive thermocouple film it is upper
The region that positive thermocouple membrane array (2) is not covered on surface and sensitizing range (5) is all covered with protective layer (6)；
Each cathode thermocouple film and each positive thermocouple film are respectively connected with cold end (7), wherein each cold end (7) is respectively positioned on non-
In sensitizing range.
2. according to claim 1 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that absolutely
The material of edge heat zone substrate (1) is thyrite.
3. according to claim 1 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that just
The material of very hot galvanic couple membrane array (2) is N-shaped lanthanum strontium chromate, and the material of cathode thermocouple membrane array (3) is p-type oxidation
Indium.
4. according to claim 1 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that one
Block anode thermocouple film forms a thermal center point (4) with cathode thermocouple film thereon, and each thermal center point (4) is in cross minute
Cloth.
5. according to claim 4 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that heat
The number of node (4) is 25, wherein a thermal center point is located at center position, and remaining 24 thermal center points are equally divided into six groups,
The spacing of two adjacent groups thermal center point is 100 μm.
6. according to claim 1 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that each
The width of block anode thermocouple film and cathode thermocouple film is 50 μm.
7. according to claim 1 for detecting the temperature sensor of laser facula thermo parameters method, which is characterized in that institute
Stating sensitizing range (5) is the circular configuration that diameter is 2mm.
8. special for detecting the preparation method of the temperature sensor of laser facula thermo parameters method described in a kind of claim 1
Sign is, comprising the following steps:
1) the positive figure of film thermocouple is formed using photoetching process, and chooses sensitivity on dielectric high temperature layer substrate (1) surface
Region (5) and de-militarized zone；
2) positive thermocouple membrane array (2) is made on sensitizing range (5) using magnetically controlled sputter method；
3) the cathode figure of film thermocouple is formed using photoetching process；
4) using magnetically controlled sputter method production cathode thermocouple membrane array (3)；
5) figure of protective layer (6) is formed using photoetching process；
6) using magnetically controlled sputter method production protective layer (6), temperature sensor sample is obtained；
7) the temperature sensor sample is demarcated, obtains the temperature sensor for detecting laser facula thermo parameters method.
9. it is according to claim 8 for detecting the preparation method of the temperature sensor of laser facula thermo parameters method,
It is characterized in that, further includes that the product for obtaining step 4) is annealed 1h at 1000 DEG C between step 4) and step 5), so that positive
Each positive thermocouple film in thermocouple membrane array (2) and each cathode thermocouple in cathode thermocouple membrane array (3)
Film crystallization.
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Cited By (2)
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| CN114264233A (en) * | 2021-12-24 | 2022-04-01 | 湖南华曙高科技股份有限公司 | Scanning position calibration method, device and system |
| CN115200729A (en) * | 2022-08-02 | 2022-10-18 | 清华大学 | Array type thin film temperature difference sensor and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115200729B (en) * | 2022-08-02 | 2024-05-17 | 清华大学 | Array type thin film temperature difference sensor and preparation method thereof |
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