CN109781151B

CN109781151B - Sensor with integrated processing of sensing element and elastic sensing element and preparation thereof

Info

Publication number: CN109781151B
Application number: CN201910059582.3A
Authority: CN
Inventors: 刘涛; 段晓爽; 姚艳波
Original assignee: Suzhou University
Current assignee: Suzhou University
Priority date: 2019-01-22
Filing date: 2019-01-22
Publication date: 2021-10-26
Anticipated expiration: 2039-01-22
Also published as: CN109781151A

Abstract

The invention relates to a sensor with a sensing element and an elastic sensing element processed integrally, which comprises the elastic sensing element, the sensing element and a resistance acquisition system, wherein the sensing element is generated on the surface of the elastic sensing element in situ, and at least two parts of the sensing element are used as electrodes and are respectively and electrically connected with the resistance acquisition system. The elastic sensing element is of a three-dimensional structure and comprises a carbonizable polymer layer arranged on at least one surface of the elastic sensing element, and the sensing element is obtained by carbonizing a part of the carbonizable polymer layer. According to the invention, the sensing element is directly prepared on the elastic sensing element with the three-dimensional structure, and the elastic sensing element and the sensing element are not required to be compounded by a complex method, so that the design, preparation and processing of the elastic sensing element and the sensing element of the sensor are integrated.

Description

Sensor with integrated processing of sensing element and elastic sensing element and preparation thereof

Technical Field

The invention relates to the technical field of sensors, in particular to a sensor with a sensor element and an elastic sensor element integrated in processing and a preparation method thereof.

Background

A force sensitive sensor is a device or apparatus that converts a stress/strain signal into an outputable signal. Force sensitive sensors are typically composed of an elastic sensing element and a sensing element. The elastic sensitive element is a part capable of directly sensing stress/strain in the sensor, and has a structure/shape of column, cantilever beam, diaphragm capsule, thin-wall cylinder, etc., and different structural forms can be selected or designed according to different measured parameters. The sensing element refers to a part of the sensor which can convert the stress/strain output by the elastic sensing element into an electric signal suitable for transmission and measurement, and the sensing element is a core element of the sensor. Such as metal/semiconductor strain gages in resistive strain gauge sensors, conductive nanoparticle-ceramic composite films in thick film piezoresistive sensors, and microelectromechanical integrated (MEMS) sensor systems. In the existing force-sensitive sensor, the design and preparation of the elastic sensitive element and the sensing element are independent, and the sensing element is combined with the elastic sensitive element through sintering, bonding and the like, so that the difficulty of the design and preparation of the sensor is greatly increased. For example, patent CN201711193503 discloses a method for preparing a flexible sensor, in which a sensing element is written on the surface of a flexible substrate, and the prepared sensing element needs to be combined with an elastic sensing element (such as a cantilever beam) to form the sensor. The sensing element in the sensor converts the deformation signal into an electric signal to be output by utilizing the physicochemical property difference between the macromolecule subjected to in-situ carbonization and the flexible matrix, such as thermal expansion coefficient, hygroscopicity and the like.

Disclosure of Invention

In order to solve the technical problems, the invention aims to provide a sensor with a processing integration of a sensing element and an elastic sensing element and a preparation method thereof.

The invention provides a sensor with a sensor element and an elastic sensor element integrated, which comprises the elastic sensor element, the sensor element and a resistance acquisition system, wherein the sensor element is generated on the surface of the elastic sensor element in situ, at least two parts of the sensor element are used as electrodes and are respectively electrically connected with the resistance acquisition system, the elastic sensor element is of a three-dimensional structure, the elastic sensor element comprises a carbonizable polymer layer arranged on at least one surface of the elastic sensor element, and the sensor element is obtained by carbonizing one part of the carbonizable polymer layer.

Further, the sensor is a piezoresistive sensor.

Furthermore, the structure of the elastic sensing element is a hollow/solid cylinder, a column, a diaphragm and a diaphragm box, a cantilever beam, a spring tube, a corrugated tube or a torsion bar.

Further, the elastic sensitive element also comprises a substrate, and the carbonizable polymer layer is arranged on the surface of the substrate.

Furthermore, the base body is made of metal, ceramic, plastic or glass.

Furthermore, the carbonizable polymer layer and the substrate can be compounded by means of bonding or the like, or a solution of the carbonizable polymer layer can be coated on the surface of the substrate for compounding, and the coating manner can be drop coating, dip coating, spray coating or spin coating.

Further, the material of the carbonizable polymer layer is polyimide, silicon carbide or graphene oxide.

Preferably, the elastic sensing element is a polyimide tube, the polyimide on the surface (outer surface or inner surface) of the elastic sensing element is taken as a carbonizable polymer layer, a part of the carbonizable polymer layer is carbonized, and the carbonized polyimide is taken as a sensing element.

Further, the sensing element can be generated in situ on the outer surface or the inner surface of the elastic sensing element, and the pattern of the sensing element can be various patterns such as a line shape or a surface shape composed of points or lines.

Further, the adopted carbonization mode is laser carbonization, the wavelength of a laser light source used in the laser carbonization is 10nm-1mm, and the laser power is 200 mW-10W.

Preferably, the wavelength of the laser light source used in the laser irradiation is 193-1064 nm. The laser light source and the wavelength thereof can be selected differently according to the absorption capacity of the polymer matrix; further, the power at the time of laser irradiation is preferably 500mW to 1W. Other motion means may be implemented to assist the laser carbonization process to achieve laser carbonization at different locations of the elastomer.

Further, the sensor of the present invention responds to a force that is a composite of one or more of tension, compression, shear, bending, and torsion.

The second purpose of the invention is to provide a method for preparing the sensor with the processing integration of the sensing element and the elastic sensing element, which comprises the following steps:

(1) providing an elastic sensing element with a three-dimensional structure, wherein the elastic sensing element comprises a carbonizable high polymer layer arranged on at least one surface of the elastic sensing element;

(2) carbonizing a portion of the carbonizable polymer layer to generate a sensing element in situ at a surface of the elastic sensing element;

(3) and taking at least two parts of the sensing element as electrodes, respectively and electrically connecting the electrodes with a resistance acquisition system, and assembling and packaging to obtain the sensor with the processing integration of the sensing element and the elastic sensitive element.

Further, in the step (1), the elastic sensitive element further comprises a substrate, and the carbonizable polymer layer is disposed on a surface of the substrate. The base body is made of metal, ceramic, plastic and glass.

Further, in step (1), the structure of the elastic sensing element is a hollow/solid cylinder, a column, a diaphragm and a capsule, a cantilever beam, a spring tube, a bellows or a torsion bar.

Further, in the step (1), the material of the carbonizable polymer layer is polyimide, silicon carbide, or graphene oxide.

Preferably, in step (1), the elastic sensing element is a polyimide tube, a ceramic tube coated with polyimide, a glass tube coated with polyimide, or a plastic tube coated with polyimide.

In step (2), the carbonization method is laser carbonization, the wavelength of a laser light source used in the laser carbonization is 10nm-1mm, and the laser power is 200 mW-10W. The laser carbonization mode has better flexibility. The laser carbonization is a physical phenomenon of photo-thermal conversion between high-energy laser and a carbonizable polymer layer, and the carbonizable polymer layer is carbonized in situ to generate a carbon material.

Further, in the step (3), the electrode is prepared by a point conductive adhesive, a point silver adhesive, evaporation or welding method.

Further, in the step (3), the electrode may be prepared by a two-electrode method or a four-electrode method.

Further, in step (3), the assembly and packaging of the sensing system are based on different applications, and the sensor is directly packaged or a fitting is designed on the sensor.

The third purpose of the invention is to disclose the application of the sensor with the processing integration of the sensing element and the elastic sensing element in detecting one or more deformation of stretching, compression, shearing, bending and torsion.

Further, the sensor of the present invention can be used to detect vacuum, contact pressure, viscosity, wind direction or ultrasonic waves.

By the scheme, the invention at least has the following advantages:

the elastic sensitive element is directly manufactured by using the carbonizable polymer or is manufactured by compounding the carbonizable polymer and other matrixes, and the elastic sensitive element with the three-dimensional structure is carbonized in situ, so that the design, preparation and processing of the elastic sensitive element and the sensing element are integrated. By the integrated design and preparation technology of in-situ carbonization and the sensor sensitive element, the flexibility of material design and the design and preparation of the sensor are organically combined, the design flexibility of the sensor is improved, and the oriented design of the sensor facing the requirement is realized.

The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical solutions of the present invention more clearly understood and to implement them in accordance with the contents of the description, the following detailed description is given with reference to the preferred embodiments of the present invention and the accompanying drawings.

Drawings

FIG. 1 is a schematic view of a sensor part in embodiment 1 of the present invention;

FIG. 2 is a real-time pressure variation curve in a vacuum chamber when the sensor of embodiment 1 of the present invention performs vacuum degree detection;

FIG. 3 is a real-time resistance variation curve of the sensor in the embodiment 1 of the present invention when the sensor performs vacuum degree detection;

FIG. 4 is a schematic structural view of a sensor in embodiment 2 of the present invention;

FIG. 5 is a schematic view of the carbonization pattern of the sensor in example 2 of the present invention;

FIG. 6 is a graph showing the relationship between contact pressure and the change in sensor resistance in example 2 of the present invention;

FIG. 7 is a viscosity sensor of the viscosity sensor in example 3 of the present invention

FIG. 8 is a graph showing the relationship between the resistance of the sensor and the viscosity of the liquid to be measured in example 3 of the present invention;

FIG. 9 is a photograph of a wind direction sensor in accordance with embodiment 4 of the present invention;

FIG. 10 is a result of a relative resistance change test of carbon wires when wind of different wind speeds is applied from the front and rear surfaces of one carbon wire in example 4 of the present invention;

FIG. 11 shows the results of a test in which two carbon wires are distributed in a sensor for detecting a plurality of wind directions in example 4 of the present invention;

FIG. 12 is a physical photograph of a sensor for underwater ultrasonic signal detection in embodiment 5 of the present invention;

FIG. 13 shows the real-time resistance measurement result of the sensor in example 5 of the present invention under ultrasonic signals;

FIG. 14 is a signal result in the frequency domain after Fourier transformation of a real-time resistance signal of the sensor in embodiment 5 of the present invention;

FIG. 15 is a schematic illustration of the carbonised region of a sensor prepared by laser carbonisation of a stainless steel tube with a polyimide coating;

FIG. 16 is a schematic illustration of a carbonization zone for laser carbonization on a bourdon tube with a polyimide coating to produce a sensor;

description of reference numerals:

1-a polyimide tube; 2-carbon wire; 3-circular plate; 4-a first steel tube; 5-a second steel pipe; 6-fixed end, 7-first stainless steel plate; 8-a second stainless steel plate; 9-connecting pipe.

Detailed Description

The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

Example 1

The embodiment provides a sensor for detecting vacuum degree, including elasticity sensing element, sensing element and resistance collection system, wherein, elasticity sensing element is polyimide tube 1, sensing element is for encircleing round carbon wire 2 on polyimide tube 1, obtain after the relevant position laser carbonization of polyimide tube 1, sensing element is mutually perpendicular with polyimide tube 1's hollow shaft length direction, sensing element's two punishments are connected with the wire through silver colloid respectively, two wires are connected with resistance collection system respectively again, the both ends of polyimide tube 1 adopt the plectane end capping respectively, the material of plectane is polymethyl methacrylate (PMMA).

The preparation method of the sensor of the embodiment comprises the following steps:

a commercially available tubular polyimide (inner diameter × wall thickness 2.5mm × 0.06mm) was used as an elastic sensor, and both ends of the polyimide tube were sealed, and a vacuum degree test was performed. And simulating by using finite element analysis to optimize the laser writing position, wherein the strain borne by the sensing element is the largest when the included angle theta between the linear laser carbonization pattern and the tubular shaft is 90 degrees through simulation analysis, so that the pattern is selected for laser carbonization. Utilize the rotating electrical machines to come supplementary laser process, with polyimide pipe horizontal installation on the motor, the laser head just is to polyimide pipe, keeps the laser head position unchangeable, utilizes the motor to rotate and drives polyimide pipe and rotate, then can form annular (theta be 90) carbonization pattern (sensing element) outside polyimide pipe. The laser mode is a dotting mode, the laser power is 0.7W, the rotating linear velocity of the tubular substrate is 12.3mm/s, and the obtained carbonization pattern is shown in figure 1. And (3) respectively bonding the wires at two ends of one diameter of the annular carbon wire by using silver glue, heating at 150 ℃ for 5min to solidify the conductive silver paint, and preparing the two-wire electrode, wherein the other end of the electrode is electrically connected with the resistance acquisition system. For the vacuum degree test, the polyimide tube was sealed. Two ends of a polyimide tube are respectively inserted into polymethyl methacrylate (PMMA) round plates (the diameter is multiplied by the thickness is 5mm multiplied by 2.5mm) with round grooves, the depth of each round groove is 1mm, the width and the inner diameter of each round groove are matched with the section of a tubular matrix and are respectively 0.06mm and 2.5mm, seams are sealed by epoxy glue, and the sealed device is placed at 50 ℃ for more than 12 hours to completely cure the epoxy glue. When the device is used, the sensor is placed in a vacuum box, vacuum degree test is carried out by vacuumizing, and the change of the resistance is recorded by a digital multimeter (resistance acquisition system). The time-dependent change of the air pressure in the vacuum chamber and the time-dependent change of the resistance of the sensor prepared in this example are shown in fig. 2 and 3, respectively. As a result, the resistance of the sensor of the present embodiment changes with the change in the air pressure with time, and the sensor of the present embodiment can sense the change in the degree of vacuum.

Example 2

The embodiment provides a sensor for detecting touch pressure, including elasticity sensing element, sensing element and resistance collection system, wherein, elasticity sensing element is polyimide tube 1, sensing element is for following 1 hollow shaft length direction extension of polyimide tube a carbon line 2, obtain after the relevant position laser carbonization of polyimide tube 1, sensing element is parallel with polyimide tube 1's hollow shaft length direction, the both ends of carbon line 2 are connected with the wire through silver glue respectively, two wires are connected with resistance collection system respectively again, the both ends of polyimide tube 1 adopt 3 terminal closures of plectane respectively, the material of plectane 3 is polymethyl methacrylate (PMMA).

the sensing system was designed using commercially available tubular polyimide (inner diameter × wall thickness 2.5mm × 0.06mm) as the elastic sensor, and the schematic diagram of the device is shown in fig. 4. And (3) carrying out simulation by using finite element analysis to optimize the laser writing position, wherein the strain borne by the sensing element is the largest when the included angle theta between the linear laser carbonization pattern and the tubular shaft is 0 DEG through simulation analysis, so that the pattern is selected for carrying out laser carbonization, the laser mode is a cutting mode, the laser power is 0.7W, the laser speed is 12.3mm/s, and the obtained sensing element is shown in figure 5. And (3) respectively bonding wires at two ends of the carbon wire 2 by using silver glue, heating at 150 ℃ for 5min to solidify the conductive silver paint, and preparing the two-wire electrode which is electrically connected with an external resistance acquisition system. Two ends of a polyimide tube 1 are respectively inserted into polymethyl methacrylate (PMMA) round plates 3 (the diameter is multiplied by the thickness is 15mm multiplied by 2.5mm) with round grooves, the depth of the round grooves is 1mm, the width and the inner diameter are matched with the section of a tubular matrix and are respectively 0.06mm and 2.5mm, joints are fixed by epoxy glue, and the polyimide tube is placed at 50 ℃ for more than 12 hours to completely cure the epoxy glue, so that the contact type pressure sensor (shown in figure 4) is obtained. In use, the sensor is placed vertically and pressure is applied vertically to the circular plate 3, while the resistance change is recorded, the relationship between the resistance change and pressure is shown in fig. 6.

Example 3

The embodiment provides a sensor for detecting viscosity, which comprises an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the elastic sensitive element is a polyimide tube 1, the sensing element is a carbon wire 2 spirally arranged on the surface of the polyimide tube 1, the sensor is obtained by laser carbonization of the corresponding position of the polyimide tube 1, the included angle between the inclination direction of the spiral carbon wire and the length direction of the tube shaft of the polyimide tube 1 is 45 degrees, two ends of the carbon wire 2 are respectively connected with a lead through silver colloid, the two leads are respectively connected with the resistance acquisition system, two ends of the polyimide tube 1 are respectively connected with one ends of a first steel tube 4 and a second steel tube 5, the other end of the first steel tube 4 is fixedly connected with a fixed end 6, the other end of the second steel tube 5 is fixedly connected with one side of a first stainless steel plate 7, the other side of the first stainless steel plate 7 is relatively provided with a second stainless steel plate 8 in parallel, a cavity for bearing liquid to be measured is formed between the first stainless steel plate 7 and the second stainless steel plate 8, the other side of the second stainless steel plate 8 is connected with a rotating motor through a connecting pipe 9, and the rotating motor is used for driving the second stainless steel plate 8 to rotate.

a parallel plate type sensor was designed using commercially available tubular polyimide (inner diameter × wall thickness 2.5mm × 0.06mm) as an elastic sensor, and the structure is shown in fig. 7. And simulating by using finite element analysis to optimize the laser writing position, wherein the strain borne by the sensing element is the largest when the included angle theta between the linear laser carbonization pattern and the tubular shaft is 45 degrees through simulation analysis, so that the pattern is selected for laser carbonization. Utilize the auxiliary laser processing of rotating electrical machines, fix the polyimide pipe level on the motor, the laser head is just to the polyimide pipe, the motor rotates and combines laser beam horizontal motion, can prepare out spiral carbon line on tubulose base member surface, the laser mode is for cutting laser power is 0.7W, laser horizontal velocity is 3.5mm/s, polyimide pipe rotary line speed is 3.5mm/s, the tubular axle direction horizontal migration of polyimide pipe is followed to laser, horizontal migration's distance is 10 mm. And (3) respectively bonding wires at two ends of the carbon wire by using silver glue, heating at 150 ℃ for 5min to solidify the conductive silver paint, preparing the two-wire electrode, and electrically connecting the electrode with an external resistance acquisition system. According to the device design, the sensor is assembled, one end of the polyimide tube is fixedly connected with the fixed end, the other end of the polyimide tube is free and connected with a first round stainless steel plate (the diameter is multiplied by the thickness is 38mm multiplied by 0.2mm), the first stainless steel plate is just opposite to a second round stainless steel plate (the diameter is multiplied by the thickness is 58mm multiplied by 0.2mm), the second stainless steel plate is parallel to the first stainless steel plate, the second stainless steel plate is connected with a rotating motor, the second stainless steel plate is driven by the rotating motor to rotate, liquid to be measured is clamped between the second stainless steel plate and the first stainless steel plate, the liquid receives viscous resistance when the second stainless steel plate rotates, the liquid is transmitted to the polyimide tube to enable the sensor to receive a torsion effect, and when the rotating speed is fixed, the torsion magnitude is related to the viscosity of the liquid. The joints of all the parts are fixed by epoxy glue, and the epoxy glue is completely cured after being placed at 50 ℃ for more than 12 hours. In this example, different mass fractions of aqueous glycerol solutions were selected for viscosity testing. During testing, the first stainless steel plate is kept still, the second stainless steel plate is connected with the motor to rotate at an angular speed of 5.8rad/s, a gap between the first stainless steel plate and the second stainless steel plate is 3mm, liquid to be tested is filled between the first stainless steel plate and the second stainless steel plate, resistance change is recorded, and the relationship between the resistance change and the viscosity of the liquid to be tested is shown in fig. 8. The viscosity of the liquid to be measured is measured by a Ubbelohde viscometer. The result shows that the resistance of the viscosity sensor of the embodiment is in a linear relation with the viscosity of the liquid to be measured, and the viscosity value of the liquid to be measured can be converted according to the resistance value of the sensor.

Example 4

The embodiment provides a sensor for detecting wind direction, including elasticity sensing element, sensing element and resistance collection system, wherein, elasticity sensing element is polyimide tube 1, sensing element is two carbon lines 2 that extend along 1 hollow shaft length direction of polyimide tube, obtain after the relevant position laser carbonization by polyimide tube 1, carbon line 2 parallels with polyimide tube 1's hollow shaft length direction, on polyimide tube 1's cross section, the contained angle of two carbon lines 2 is 90, the both ends of every carbon line 2 are connected with the wire through the silver-colored adhesive respectively, two wires are connected with resistance collection system respectively again, polyimide tube 1's one end is connected with a plurality of flabellums, fixing device is connected to the other end.

a commercially available tubular polyimide (inner diameter × wall thickness 2.5mm × 0.06mm) was used as an elastic sensitive element to perform a carbonization pattern and sensor design. The tubular sensor is vertically arranged, one end of the tubular sensor is fixed, the other end of the tubular sensor is free, and when the tubular sensor is subjected to wind power, the base body is bent and deformed to cause the resistance change of the tubular sensor. In order to feel wind power to a greater extent, four fan blades arranged in the vertical direction are designed, the fan blades are mutually vertical in the horizontal direction, an included angle between every two fan blades in the horizontal direction is 90 degrees, and the four fan blades are respectively arranged in the three-point, six-point, nine-point and twelve-point directions of the tubular base body. The material of the fan blade is PET, and the length is multiplied by the width and multiplied by the thickness is 6 multiplied by 9 multiplied by 0.5 mm. Two carbon lines written along the axis of the polyimide tube are distributed in twelve and three points of the root of the polyimide tube. The length of the carbon wire is 10mm, the laser carbonization power is 0.7W, and the laser speed is 12.3 mm/s. And bonding the conducting wires at two ends of each carbon wire by using silver paint, heating at 150 ℃ for 5min to solidify the conductive silver paint, and preparing the two-wire electrode, wherein the other end of the electrode is electrically connected with the resistance acquisition system. And respectively inserting two steel pipes into two ends of the polyimide pipe to be respectively connected with the fan blades and the fixing device, and preparing the wind direction detection sensor. The joints in the sensor were fixed with epoxy glue and left at 50 ℃ for more than 12 hours to fully cure the epoxy glue, and a physical photograph of the final device is shown in fig. 9. Three air flows with different speeds are respectively blown to one carbon wire from the front side and the back side, the resistance change of the carbon wire is shown in figure 10, the upper column of the transverse line is the result of facing the wind, and the lower column is the result of facing away from the wind, and the results show that when the wind direction faces the carbon wire, the relative resistance is higher than 1, and the larger the wind force is, the larger the resistance change is; when the wind direction is back to the carbon line, the relative resistance is less than 1, and the larger the wind force, the larger the resistance change. Further, by changing different wind directions and testing and analyzing the resistance changes of the two carbon wires, the results show that the resistances of the two carbon wires are changed, and 8 wind directions can be distinguished, and the results are shown in fig. 11.

Example 5

The embodiment provides a sensor for detecting underwater ultrasound, which comprises an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the elastic sensitive element is a polyimide tube 1, an approximately rectangular opening is formed in the polyimide tube 1, the sensing element is arranged on the inner surface of the polyimide tube 1 opposite to the opening and is a rectangular pattern consisting of points, the sensing element is obtained after laser carbonization of the corresponding position of the polyimide tube 1, two opposite corners of the rectangular pattern are respectively connected with a lead through silver glue, two ends of the polyimide tube 1 and the opening are sealed through epoxy glue, one part of the two leads is sealed in the polyimide tube 1, and the other part of the two leads is respectively connected with the external resistance acquisition system.

the tube inner wall is carbonized by laser by using a tubular hollow structure, the carbon structure can be naturally protected after the tube body is sealed, and a sensing system can be immersed in water after the tube body is sealed to carry out underwater ultrasonic detection. The length of the polyimide tube is 20mm, an opening with the length of 4.4mm and the width of 1.2mm is ablated on the tubular substrate by laser, the laser is set to be in a scanning mode, the laser power is 1W, the laser speed is 1mm/s, and the scanning interval is 0.1 mm. When the opening is ablated, a wooden stick is inserted into the polyimide tube to prevent the inner wall of the polyimide tube, which is opposite to the opening, from being damaged by laser. In order to enable laser to be accurately positioned and penetrate through the opening to the inner wall of the polyimide tube for laser carbonization, after ablation is finished, the wooden stick is drawn out under the condition that the polyimide tube is kept still. The pattern of laser carbonization on the inner wall of the tube was a surface pattern (3X 3mm) consisting of dots, as shown in FIG. 12. The laser mode is a dotting mode, the laser power is 0.7W, the dotting time is 0.015s, and the dotting interval is 0.1 mm. And bonding the wires on two opposite corners of the surface-shaped pattern by using silver glue, heating at 150 ℃ for 5min to solidify the conductive silver paint, and preparing the two-wire electrode. And finally, sealing the opening and two ends of the polyimide tube by using epoxy glue, sealing one end of the lead in the tube, extending the other end out of the tube, and standing at 50 ℃ for more than 12 hours to completely cure the epoxy glue. And connecting a lead extending out of the tube with a digital multimeter, placing the packaged sensor into a water bath ultrasonic cleaner, opening the device, and simultaneously acquiring the real-time resistance of the sensor by using the digital multimeter, wherein the results are shown in fig. 13 and 14.

Example 6

As shown in fig. 15, a stainless steel tube is used as a substrate, a 20% PAA (polyacrylic acid) solution is dip-coated on the stainless steel tube, and a polyimide coating layer can be obtained on the stainless steel tube after a curing procedure of heating at 100 ℃ for 30min, heating at 150 ℃ for 90min and heating at 300 ℃ for 60min, so as to form the elastic sensitive element. After the polyimide coating layer on the elastic sensitive element is subjected to laser carbonization, the sensing element can be formed in situ, and the further prepared sensor can be used for sensing temperature, pressure and the like.

Example 7

A spring tube is taken as a substrate, 20% PAA (polyacrylic acid) solution is dipped and coated on a stainless steel tube, and a polyimide coating layer can be obtained on the spring tube after the curing procedures of heating for 30min at 100 ℃, 90min at 150 ℃ and 60min at 300 ℃, so as to form the elastic sensitive element. The carbide pattern (sensing element) can be laser written at different locations on the spring tube as shown in fig. 15. The further prepared sensor can be used for gas pressure sensing.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, it should be noted that, for those skilled in the art, many modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims

1. A sensor with a sensing element and an elastic sensing element processed integrally is characterized in that: the sensor comprises an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the sensing element is generated on the surface of the elastic sensitive element in situ, at least two parts of the sensing element are used as electrodes and are respectively and electrically connected with the resistance acquisition system, the elastic sensitive element is of a three-dimensional structure, the elastic sensitive element consists of a carbonizable high molecular layer, and the sensing element is obtained by carbonizing one part of the carbonizable high molecular layer; the elastic sensitive element is in a column shape, a diaphragm box, a cantilever beam, a spring tube, a corrugated tube or a torsion rod; the sensor is used for measuring one or more of tensile force, compressive force, shearing force, bending force and torsion force.

2. The sensor of claim 1, wherein the sensor element is integrated with the elastic sensor element, and the sensor comprises: the sensor is a piezoresistive sensor.

3. The sensor of claim 1, wherein the sensor element is integrated with the elastic sensor element, and the sensor comprises: the adopted carbonization mode is laser carbonization, the wavelength of a laser light source used in the laser carbonization is 10nm-1mm, and the laser power is 200 mW-10W.

4. A method for preparing a sensor with the sensor element integrated with the elastic sensor element according to any one of claims 1 to 3, wherein the method comprises the following steps: the method comprises the following steps:

(1) providing an elastic sensing element with a three-dimensional structure, wherein the elastic sensing element consists of a carbonizable high polymer layer;

5. Use of a sensor in which the sensor element according to any of claims 1 to 3 is integrated with an elastic sensor element for detecting a composite force of one or more of a tensile force, a compressive force, a shear force, a bending force and a torsion force.