CN106595916A - Carbon-based resistive flexible pressure sensor - Google Patents
Carbon-based resistive flexible pressure sensor Download PDFInfo
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- CN106595916A CN106595916A CN201611094368.4A CN201611094368A CN106595916A CN 106595916 A CN106595916 A CN 106595916A CN 201611094368 A CN201611094368 A CN 201611094368A CN 106595916 A CN106595916 A CN 106595916A
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- pressure
- graphene
- graphene oxide
- pressure sensor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
Abstract
The invention discloses a carbon-based resistive flexible pressure sensor. The sensor of a four-layer film structure comprises a flexible polyimide thin film layer, a silver electrode layer, a flexible graphene and oxidized graphene composite thin film layer and an oxidized graphene film insulated protective layer. When the pressure sensor bears a pressure or bending strain occurs, the bearing condition of the pressure sensor can be obtained by measuring the resistance change of the two ends of a silver electrode. The whole carbon-based resistive flexible pressure sensor is of a film-shaped structure, the flexibility is high, and the pressure sensor can work normal in any bending angle; the sensitivity is high, and the strain coefficient ranges from 2.1 to 3; pressure measurement ranges widely from 10Pa to 900kPa; the resolution is very high, dynamic response is super-rapid, and dynamic high-frequency pressure signals reaching 10kHz can be measured; and the stability is high, and the pressure sensor passes more than 8000 repeated stability test. The pressure sensor is simple in preparation technology, low in equipment cost, suitable for wearable equipment, and can be used for measurement of physical quantities as pressure and strain.
Description
Technical field
The invention belongs to novel sensor technical field, is related to a kind of carbon-based resistance-type pliable pressure sensor.
Background technology
Pressure transducer is a kind of electronic component device that the physical quantitys such as pressure, strain are converted into the signal of telecommunication.Pressure exists
A kind of highly important physical quantity in nature, just have on the body of the mankind countless pressure transducers perceive environment in
Pressure class signal so that we are adapted to environment, evade danger.Instantly with wearable device, robot, electronics
The fields such as skin develop rapidly, possess the intelligence of similar people to allow these man-made machines, to pressure class signal in environment this
The comprehensive perception of physical quantity and accurate measurement tool are of great significance.
But traditional pressure transducer is usually non-flexible rigid, is easily ruined when by larger mechanical deformation
Damage, it is impossible to work.Therefore, it is difficult to larger for mechanical deformations such as wearable device, electronic skin, each joints of robot
Workplace.If can have can be with normal work in the pliable pressure sensor of mechanical deformation on a large scale, to gather these
The signals such as the pressure of conjunction, strain, will greatly promote the sensed pressure ability of machine.
Driven by this kind of demand, pliable pressure sensor achieved many progress in the last few years.But at present may be used
The material adopted with the pliable pressure sensor for working in mechanical deformation on a large scale is often the low high molecular polymerization of Young's moduluss
The materials such as thing, conductive materials are filled in these high molecular polymers, and the method for producing deformation using pressure changes polymer
Spacing between middle conductive filler, so as to change material resistance, reaches the purpose of detection pressure.This pliable pressure sensor
It is slow to the response time and recovery time of pressure change, it is difficult to for measuring the dynamic pressure signal of high frequency change.It is flexible at present
Highest dynamic high-frequency pressure signal can be measured in pressure transducer is the achievement in research of Dan Li seminars, distinguishable to measure
The dynamic pressure signal of 2kHz.But this still can not meet the demand of high-frequency pressure signal measurement.
The content of the invention
It is an object of the invention to provide a kind of carbon-based resistance-type pliable pressure sensor.The pressure transducer has excellent
Flexible nature, can bend it is arbitrarily angled in the state of normal work, when the pressure transducer be under pressure effect or send out
During raw bending strain, there is respective change in the resistance value that two ends silver electrode is measured from polyimides, so as to sensed pressure signal.
The pressure transducer does not cause the principle of resistive merely with the pressurized deformation of material itself, while utilizing material special construction and electrode
Between formed be stressed regulation and control contact resistance principle.Its sensitivity is high, and the coefficient of strain is between 2.1-3；Pressure measxurement model
Enclose wide, be 10Pa to 900kPa；With very high resolution and dynamic response, the dynamic high-frequency pressure of up to 10kHz can be measured
Signal；Stability property is good, has passed through the stability retest of more than 8000 times.This carbon-based resistance-type pliable pressure sensor
Preparation process is simple, equipment cost are low, and the resistance-type pliable pressure sensor is applied to wearable device, can be used for pressure, answer
The physical quantities such as change.
The concrete technical scheme for realizing the object of the invention is：
A kind of carbon-based resistance-type pliable pressure sensor, feature is：The sensor is in four-level membrane structure, including flexible poly-
The composite film layer and graphene oxide film of imide membrane layer, silver electrode layer, Flexible graphene and graphene oxide is exhausted
Edge protective layer, wherein, polyimide film layer thickness is 20 μm -200 μm；500nm-5 μm of silver electrode thickness degree, is grown in polyamides
Imines thin layer two ends；The composite film layer thickness of Flexible graphene and graphene oxide is 50 μm -600 μm, and the layer is in honeycomb
The porous laminated structure of formula；The material for using is the mixture of Graphene and graphene oxide, Graphene and graphene oxide mixing
Ratio is in 10-3:1-2, Graphene content when more at most pressure transducer is not initially stressed resistance it is less；Graphene oxide is thin
Film insulating protective layer, 20 μm -300 μm of thickness；The composite film layer of Flexible graphene and graphene oxide is exhausted with graphene oxide
Edge protective layer grows together, is bonded together with silver electrode layer.
A kind of preparation method of above-mentioned pressure transducer, the method are comprised the following steps：
Step 1：Prepare substrate
The method combined with inkjet printing is exchanged using chemical ion, in the Kapton two of 20 μm of -200 μ m-thick
The silver electrode layer of one layer of 500nm-5 μ m-thick of end growth；
Step 2：Prepare functional layer
By Graphene and graphene oxide with mass ratio as 10-3:The ratio mixing of 1-2, and suspension is configured to, concentration
For 0.2-1.8mg/ml, while preparing a graphene oxide suspension again, concentration is 0.2-1.8mg/ml, then by order
The method of vacuum filtration continuously to both suspension sucking filtration, obtains the graphene oxide insulation that thickness is 20 μm -300 μm respectively
Protective layer and thickness are the composite bed of 50 μm -600 μm of Graphene and graphene oxide, and the firm growth of two-layer is together；
Step 3：Make pressure transducer
Composite bed of the silver electrode layer of substrate with the Graphene and graphene oxide of functional layer is bondd by conductive silver paste
Together, and in silver electrode layer two ends extraction wire, obtain the pliable pressure sensor.
The polyimide film layer thickness of the present invention is 20 μm -200 μm, and Kapton has excellent flexibility
Matter, arbitrarily can bend without damaging.About 500nm to 5 μm of silver electrode thickness degree.Silver electrode layer is exchanged using chemical ion and is sprayed
Ink prints the method for combining, and is grown in polyimide film layer two ends.This two-layer is firmly grown in together as whole sensing
The substrate of device, measuring electrode are drawn from two ends silver electrode.
, for 50 μm to 600 μm, the layer is more in honeycomb fashion for the composite film layer thickness of flexible Graphene and graphene oxide
Hole layer structure, the material for using is the mixture of Graphene and graphene oxide, and both mixed proportions are 10:1 to 3:Between 2
It is adjustable, Graphene content when more at most pressure transducer is not initially stressed resistance it is less.The graphene oxide layer of top is made
For insulating protective layer, 20 μm to 300 μm of thickness.This materials at two layers is firmly grown in one by the processing method of order vacuum filtration
Rise, as sensor function layer.
Pass through conducting resinl between the silver electrode layer of the Graphene and graphene oxide composite bed and substrate of sensor function layer
Or conductive silver paste is bonded together face-to-face, this causes Graphene and oxygen in silver electrode layer and the porous laminated structure of honeycomb fashion
Larger contact resistance is formed between graphite alkene composite bed.When sensor is stressed acts on or bend strain, should
Contact resistance can reduce with the increase of pressure, while the porous laminated structure of the honeycomb fashion of composite bed becomes fine and close by loose,
Its resistance also can reduce with the increase of pressure, and under the collective effect of both mechanism, pressure transducer accurately can be felt
Know pressure change.
The contact formed between silver electrode layer and the Graphene and graphene oxide composite bed of the porous laminated structure of honeycomb fashion
Resistance can be calculated by below equation：
Rc={ ρ2ηπH/4F}1/2 (1)
Wherein, RcFor contact resistance, ρ is resistivity, and η is empirical parameter, and H is material hardness, and F is pressure.From formula (1)
Understand, in the case where contact material determines, contact resistance is only relevant with the pressure suffered by sensor, and carrying is bigger, contact
Resistance is less.
The resistance of the Graphene and graphene oxide composite bed of the porous laminated structure of honeycomb fashion can be calculated by below equation：
Ra=pl/S (2)
Wherein, RaFor composite bed resistance, ρ is resistivity, and l is composite bed length, and S is composite bed cross-sectional area.Because stone
, in the porous laminated structure of honeycomb fashion, the pressure received on sensor can cause this cavernous structure for black alkene and graphene oxide composite bed
Become fine and close by loose, so as to reduce its cross-sectional area S.Knowable to formula (2), sensor pressure can cause composite bed electricity
Resistance RaReduce.
Therefore, the total resistance value that silver electrode two ends measure can be calculated by below equation：
R=Rc+Ra (3)
Wherein R is all-in resistance, knows R by formula (1) and (2)cAnd RaAll subtract with the increase of pressure transducer pressure
It is little, therefore R and pressure F are inversely.
Under the collective effect of both the above mechanism, this pliable pressure sensor can accurate perception effect pressure thereon
Power changes.Beneficial effects of the present invention
1) overall is in film like structures, and flexible nature is good, can bend it is arbitrarily angled in the state of normal work；
2) sensitivity is high, and the coefficient of strain is between 2.1-3；
3) pressure measurement range is wide, is 10Pa to 900kPa；
4) the dynamic high-frequency pressure signal of up to 10kHz can with very high resolution and dynamic response, be measured；
5) stability property is good, has passed through the stability retest of more than 8000 times.
Description of the drawings
Fig. 1 is schematic structural view of the invention；
Fig. 2 is resistance change rate of the present invention and pressure relationship plot figure；
Fig. 3 is that the electric current for flowing through the present invention follows graph of relation with pressure change；
Fig. 4 is voltage change curve figure of the present invention under the effect of 100Hz, 2kHz, 8kHz, 10kHz periodic pressure；
Test circuit figures of the Fig. 5 for Fig. 4；
Fig. 6 is repetition stability test curve figure of the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment, the present invention is further elaborated.
Embodiment
Refering to Fig. 1, it is of the invention overall in membrane structure, comprising four-layer structure thin film, flexible polyimide thin layer 1,
The composite film layer 3 and graphene oxide film insulating protective layer 4 of silver electrode layer 2, Flexible graphene and graphene oxide.This
The making assembling process of invention is as follows：
The substrate of pressure transducer is made first：By ripe ion exchange and inkjet technology, in 50 μ m-thicks
Clean Kapton two ends grow the silver electrode layer of one layer of 2 μ m-thick.
Then make the topmost functional layer of pressure transducer：By Graphene and graphene oxide with 5:1 ratio mixing, and
Suspension is configured to, concentration is 1.5mg/ml, while preparing a simple graphene oxide suspension again, concentration is 1.5mg/
ml.Then it is continuous respectively to both suspension sucking filtration by the method for order vacuum filtration, obtain graphene oxide insulation and protect
Sheath (about 100 μm of thickness) and Graphene and graphene oxide composite bed (about 200 μm of thickness), and this two-layer is because continuous
The reason for sucking filtration, firmly grows together.
Finally, lead between the silver electrode layer of the Graphene of sensor topmost functional layer and graphene oxide composite bed and substrate
Crossing conductive silver paste to be bonded together face-to-face, and draw test lead at silver electrode two ends carries out performance test.
The sensor resistance that silver electrode two ends measure includes the contact resistance R between silver electrode layer and composite bedcAnd
The resistance R of composite bed itselfa, this resistance value is all affected by acting on sensor upward pressure, and is inversely proportional to pressure
Relation.
Refering to Fig. 2, it is the relation curve of the resistance change rate that measures of the present embodiment silver electrode two ends of the present invention and pressure.From
Resistance change rate is can be seen that in the pressure limit of 0 to 900kPa with the relation curve of pressure, pressure transducer silver electrode two
The resistance value that end measures is gradually reduced with the increase of pressure, and both are inversely.
Refering to Fig. 3, it is that the electric current for flowing through the present embodiment flexible resistive pressure transducer follows relation bent with pressure change
Line.When testing the curve, 0.01V voltages are applied with pressure transducer, which is acted on the pressure pulse for gradually increasing then
On, test flows through the situation of change of sensor current.Pressure transducer is quick on the draw, and can delicately reflect the change feelings of pressure
Condition.
Refering to Fig. 4 and Fig. 5, it is voltage of the present embodiment under the effect of 100Hz, 2kHz, 8kHz, 10kHz periodic pressure
Change curve and test circuit.When testing this group of high frequency response curve, by the pressure transducer of the present embodiment and certain value electricity
Resistance series connection, the total voltage acted on pressure transducer and fixed value resistance are invariable, and test circuit refers to Fig. 5.Then pass through
High-frequency electromagnetic plays shake platform and produces vibration signal, so as to apply high-frequency pressure signal on pressure transducer, and passes through oscillograph
The voltage signal change at observation fixed value resistance two ends.The class frequency response curve illustrates that this resistance-type pliable pressure senses utensil
There are very high resolution and dynamic response, the high-frequency pressure signal of up to 10kHz can be told.
Refering to Fig. 6, it is the present embodiment flexible resistive pressure transducer repetition stability test curve, retest
More than 8000 times, repeat more than 8000 times afterwards than it is initial when performance it is almost unchanged, with good job stability and durable
Property.
Claims (3)
1. a kind of carbon-based resistance-type pliable pressure sensor, it is characterised in that：The sensor is in four-level membrane structure, including flexibility
The composite film layer and graphene oxide film of polyimide film layer, silver electrode layer, Flexible graphene and graphene oxide
Insulating protective layer, wherein, polyimide film layer thickness is 20 μm -200 μm；500nm-5 μm of silver electrode thickness degree, is grown in
Polyimide film layer two ends；The composite film layer thickness of Flexible graphene and graphene oxide is 50 μm -600 μm, and the layer is in
The porous laminated structure of honeycomb fashion；Graphene oxide film insulating protective layer, 20 μm -300 μm of thickness；Flexible graphene and oxidation stone
The composite film layer of black alkene is bonded together with silver electrode layer together with being grown with graphene oxide insulating protective layer.
2. pressure transducer according to claim 1, it is characterised in that：The pressure transducer coefficient of strain is in 2.1-3；Pressure
Power measurement range is 10Pa-900kPa；The high-frequency pressure signal measured is 0-10kHz.
3. the preparation method of pressure transducer described in a kind of claim 1, it is characterised in that：The method is comprised the following steps：
Step 1：Prepare substrate
The method combined with inkjet printing is exchanged using chemical ion, at the Kapton two ends of 20 μm of -200 μ m-thick
The silver electrode layer of one layer 500nm-5 μm thick of growth；
Step 2：Prepare functional layer
By Graphene and graphene oxide with mass ratio as 10-3:The ratio mixing of 1-2, and suspension is configured to, concentration is
0.2-1.8mg/ml, while preparing a graphene oxide suspension again, concentration is 0.2-1.8mg/ml, then true by order
The method of empty sucking filtration continuously to both suspension sucking filtration, obtains the graphene oxide insulation that thickness is 20 μm -300 μm and protects respectively
Sheath and thickness are the composite bed of 50 μm -600 μm of Graphene and graphene oxide, and the firm growth of two-layer is together；
Step 3：Make pressure transducer
Composite bed of the silver electrode layer of substrate with the Graphene and graphene oxide of functional layer is bonded in into one by conductive silver paste
Rise, and in silver electrode layer two ends extraction wire, obtain the pliable pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201611094368.4A CN106595916A (en) | 2016-12-02 | 2016-12-02 | Carbon-based resistive flexible pressure sensor |
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| CN201611094368.4A CN106595916A (en) | 2016-12-02 | 2016-12-02 | Carbon-based resistive flexible pressure sensor |
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| CN201611094368.4A Pending CN106595916A (en) | 2016-12-02 | 2016-12-02 | Carbon-based resistive flexible pressure sensor |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107219028A (en) * | 2017-05-05 | 2017-09-29 | 华东师范大学 | A kind of preparation method of the flexible wireless pressure detecting system based on inkjet technology |
| CN107389232A (en) * | 2017-06-15 | 2017-11-24 | 华南理工大学 | A kind of asymmetric flexible force sensitive sensing material of bio-based and preparation method thereof |
| CN108253878A (en) * | 2017-11-30 | 2018-07-06 | 维沃移动通信有限公司 | The bend detection method and mobile terminal of a kind of flexible screen |
| CN108519190A (en) * | 2018-04-11 | 2018-09-11 | 电子科技大学 | A kind of graphene pressure sensor |
| CN108759659A (en) * | 2018-06-06 | 2018-11-06 | 常州信息职业技术学院 | Paint sheet metal component scraper plate test platform control system |
| CN108760103A (en) * | 2018-06-06 | 2018-11-06 | 常州信息职业技术学院 | Paint sheet metal component scraper plate test platform pressure sensor |
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| CN108955961A (en) * | 2018-06-06 | 2018-12-07 | 常州信息职业技术学院 | Paint the manufacturing method of sheet metal component scraper plate test platform |
| CN109799014A (en) * | 2019-03-01 | 2019-05-24 | 西安交通大学 | A kind of flexible pressure-sensitive sensor and preparation method thereof |
| CN110207863A (en) * | 2019-06-04 | 2019-09-06 | 北京化工大学 | Improve the method and system of nanometer resistance-type mechanics sensor stability |
| CN110261012A (en) * | 2019-06-06 | 2019-09-20 | 东南大学 | A kind of Flexiable angular transducer and preparation method thereof |
| CN110926660A (en) * | 2018-09-19 | 2020-03-27 | 北京纳米能源与系统研究所 | Sensor for simultaneous measurement of bending strain and pressure |
| CN111625109A (en) * | 2019-02-27 | 2020-09-04 | 昆山工研院新型平板显示技术中心有限公司 | Resistance type sensor and manufacturing method thereof, display screen and touch screen |
| CN111780898A (en) * | 2020-07-02 | 2020-10-16 | 苏州大学 | Flexible pressure sensor suitable for curved surface stress measurement and preparation method thereof |
| CN113029404A (en) * | 2021-03-10 | 2021-06-25 | 电子科技大学 | Preparation method of dual-channel flexible polymorphic stress sensor based on graphene |
| CN115045939A (en) * | 2022-06-13 | 2022-09-13 | 大连海事大学 | Flexible thin layer of making an uproar falls in compound rubber vibration isolation |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101406085B1 (en) * | 2013-07-11 | 2014-06-11 | 전남대학교산학협력단 | A method for preparing graphene/pdms composite and graphene/pdms composite prepared by the same |
| CN104949779A (en) * | 2015-07-21 | 2015-09-30 | 中国科学技术大学 | Pressure sensor and preparation method thereof |
| CN105067682A (en) * | 2015-08-19 | 2015-11-18 | 东南大学 | Flexible capacitive humidity sensor and preparation method thereof |
| CN105092117A (en) * | 2015-08-19 | 2015-11-25 | 东南大学 | Piezoresistive pressure sensor and preparation method thereof |
| CN105092118A (en) * | 2015-09-25 | 2015-11-25 | 东南大学 | Flexible piezoresistive pressure sensor with high sensitivity, and preparing method thereof |
| CN105136351A (en) * | 2015-08-19 | 2015-12-09 | 东南大学 | Capacitive pressure sensor and preparation method thereof |
| CN105387927A (en) * | 2015-11-23 | 2016-03-09 | 南京邮电大学 | Novel flexible vibration sensor |
| CN105708425A (en) * | 2016-04-06 | 2016-06-29 | 姜凯 | Development of flexible resistance type pressure transducer capable of being applied to human body pulse detection |
| CN105800605A (en) * | 2016-04-26 | 2016-07-27 | 华东师范大学 | Graphene oxide/graphene double-layer piezoresistance thin film and preparation method thereof |
| CN106168515A (en) * | 2015-05-18 | 2016-11-30 | 宝峰时尚国际控股有限公司 | A kind of pressure transducer and preparation method thereof |
-
2016
- 2016-12-02 CN CN201611094368.4A patent/CN106595916A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101406085B1 (en) * | 2013-07-11 | 2014-06-11 | 전남대학교산학협력단 | A method for preparing graphene/pdms composite and graphene/pdms composite prepared by the same |
| CN106168515A (en) * | 2015-05-18 | 2016-11-30 | 宝峰时尚国际控股有限公司 | A kind of pressure transducer and preparation method thereof |
| CN104949779A (en) * | 2015-07-21 | 2015-09-30 | 中国科学技术大学 | Pressure sensor and preparation method thereof |
| CN105067682A (en) * | 2015-08-19 | 2015-11-18 | 东南大学 | Flexible capacitive humidity sensor and preparation method thereof |
| CN105092117A (en) * | 2015-08-19 | 2015-11-25 | 东南大学 | Piezoresistive pressure sensor and preparation method thereof |
| CN105136351A (en) * | 2015-08-19 | 2015-12-09 | 东南大学 | Capacitive pressure sensor and preparation method thereof |
| CN105092118A (en) * | 2015-09-25 | 2015-11-25 | 东南大学 | Flexible piezoresistive pressure sensor with high sensitivity, and preparing method thereof |
| CN105387927A (en) * | 2015-11-23 | 2016-03-09 | 南京邮电大学 | Novel flexible vibration sensor |
| CN105708425A (en) * | 2016-04-06 | 2016-06-29 | 姜凯 | Development of flexible resistance type pressure transducer capable of being applied to human body pulse detection |
| CN105800605A (en) * | 2016-04-26 | 2016-07-27 | 华东师范大学 | Graphene oxide/graphene double-layer piezoresistance thin film and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 吕少一等: "纳米纤维素基导电复合材料研究进展", 《林业科学》 * |
Cited By (20)
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| CN107389232A (en) * | 2017-06-15 | 2017-11-24 | 华南理工大学 | A kind of asymmetric flexible force sensitive sensing material of bio-based and preparation method thereof |
| CN108253878A (en) * | 2017-11-30 | 2018-07-06 | 维沃移动通信有限公司 | The bend detection method and mobile terminal of a kind of flexible screen |
| CN108519190A (en) * | 2018-04-11 | 2018-09-11 | 电子科技大学 | A kind of graphene pressure sensor |
| CN108519190B (en) * | 2018-04-11 | 2020-04-28 | 电子科技大学 | Graphene pressure sensor |
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| CN110207863A (en) * | 2019-06-04 | 2019-09-06 | 北京化工大学 | Improve the method and system of nanometer resistance-type mechanics sensor stability |
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| CN111780898A (en) * | 2020-07-02 | 2020-10-16 | 苏州大学 | Flexible pressure sensor suitable for curved surface stress measurement and preparation method thereof |
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| CN115045939A (en) * | 2022-06-13 | 2022-09-13 | 大连海事大学 | Flexible thin layer of making an uproar falls in compound rubber vibration isolation |
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Application publication date: 20170426 |