CN109764804A - A kind of displacement sensor based on Fabry-Perot principle - Google Patents
A kind of displacement sensor based on Fabry-Perot principle Download PDFInfo
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- CN109764804A CN109764804A CN201910139944.XA CN201910139944A CN109764804A CN 109764804 A CN109764804 A CN 109764804A CN 201910139944 A CN201910139944 A CN 201910139944A CN 109764804 A CN109764804 A CN 109764804A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 220
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- 238000012986 modification Methods 0.000 claims abstract description 81
- 230000009467 reduction Effects 0.000 claims abstract description 47
- 239000013307 optical fiber Substances 0.000 claims abstract description 30
- 230000008859 change Effects 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- 238000005096 rolling process Methods 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 4
- 238000001125 extrusion Methods 0.000 claims description 2
- 239000011257 shell material Substances 0.000 claims 1
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- 238000010586 diagram Methods 0.000 description 10
- 239000000835 fiber Substances 0.000 description 6
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Abstract
The application discloses a kind of displacement sensor based on Fabry-Perot principle, and institute's displacement sensors include: shell, optical fiber, reflective mirror and displacement reduction structure；Wherein, the end of the optical fiber is the first reflecting surface, and the reflective mirror is the second reflecting surface；When first displacement knots modification occurs for the feeler lever of institute's displacement sensors, the first displacement knots modification reduction at second displacement knots modification and is driven second reflecting surface that second displacement knots modification occurs by the displacement reduction structure, the second displacement knots modification is less than the first displacement knots modification and linear with the first displacement knots modification, by measuring the interference cavity length variable quantity between first reflecting surface and second reflecting surface, determine the second displacement knots modification, and the first displacement knots modification is determined based on the relationship between the first displacement knots modification and the second displacement knots modification.
Description
Technical field
This application involves measuring technique more particularly to a kind of displacement sensors based on Fabry-Perot principle.
Background technique
Displacement sensor can be realized the measurement adjusted the distance, and displacement sensor has different set according to different measuring principles
Meter.However, at least having the drawback that structure is complicated based on displacement sensor designed by current measuring principle, precision is low,
Cost of manufacture is higher.
Apply for content
In order to solve the above technical problems, the embodiment of the present application provides a kind of displacement biography based on Fabry-Perot principle
Sensor.
Displacement sensor provided by the embodiments of the present application based on Fabry-Perot principle, comprising: shell is arranged in institute
State substrate, optical fiber, reflective mirror and the displacement reduction structure of interior of shell；Wherein,
The end of the optical fiber is the first reflecting surface, and the reflective mirror is the second reflecting surface, first reflecting surface and institute
It is parallel to state the second reflecting surface；The optical fiber is fixed on the substrate, and second reflecting surface can be along second reflecting surface
Axis direction it is mobile, the axis direction of second reflecting surface is parallel with the axis direction of first reflecting surface；Institute's rheme
When first displacement knots modification occurs for the feeler lever of displacement sensor, the displacement reduction structure will described first be displaced knots modification be reduced at
Second displacement knots modification simultaneously drives second reflecting surface that second displacement knots modification occurs, and the second displacement knots modification is less than institute
The first displacement knots modification is stated, by measuring the interference cavity length variable quantity between first reflecting surface and second reflecting surface,
Determine the second displacement knots modification, and based on corresponding between the first displacement knots modification and the second displacement knots modification
Relationship determines the first displacement knots modification.
In a kind of embodiment of the application, the displacement reduction structure is folding lever structure, the folding lever
Structure includes multiple foldings, and the fixed point in the multiple folding is fixed on the substrate, wherein the fixed point is described in
It include that M first is folded between second reflecting surface, including N number of the between the feeler lever of the fixed point to the folding lever structure
Two-fold, M and N are positive integer, and N >=M；
The half of described first length folded is a, and the half of the described second length folded is L；If the folding
First displacement knots modification of the feeler lever of lever construction is w, the then interference between first reflecting surface and second reflecting surface
Change of cavity length amount Δ d are as follows:
In a kind of embodiment of the application, the range of institute's displacement sensors is bigger, then the ratio of Na and ML is smaller；
Wherein, the first displacement knots modification and the interference cavity length variable quantity are directly proportional.
In a kind of embodiment of the application, the displacement reduction structure is reduction gear arrangement, the reduction gearing
Structure includes gear and rack gear；Alternatively, the reduction gear arrangement includes gear, rack gear and worm screw；Wherein, the reduction gearing
The first displacement knots modification reduction that feeler lever can occur for structure at second reflecting surface second displacement knots modification, described the
Interference cavity length variable quantity between one reflecting surface and second reflecting surface is less than the first displacement knots modification, and with described the
One displacement knots modification is directly proportional.
In a kind of embodiment of the application, the feeler lever of the reduction gear arrangement has the first rack gear, and described first
Rack gear is docked with the first gear on Double-gear, and the second gear on the Double-gear is docked with the second rack gear, first tooth
The diameter of wheel is greater than the diameter of the second gear, and the end of second rack gear is fixed with the reflective mirror；Wherein,
When first displacement knots modification occurs for the feeler lever, drive first rack gear mobile, by the Double-gear to institute
It states the first displacement knots modification and carries out displacement reduction, so that second displacement knots modification occurs for second rack gear with reflective mirror,
The second displacement knots modification is less than the first displacement knots modification；Between first reflecting surface and second reflecting surface
Interference cavity length variable quantity is the second displacement knots modification.
In a kind of embodiment of the application, the reduction gear arrangement includes one or more Double-gears, wherein institute
It states in the case that reduction gear arrangement includes multiple Double-gears, passes through between two adjacent Double-gears in the multiple Double-gear
As under type is docked: the first gear of the second gear close to the Double-gear of the feeler lever and the Double-gear close to the reflective mirror
Docking, the diameter of the first gear are greater than the diameter of the second gear.
In a kind of embodiment of the application, the feeler lever of the reduction gear arrangement has the first rack gear, and described first
Rack gear dock with the first gear of worm screw, and the first gear and the worm screw share a shaft, the worm screw and the
The docking of two gears, the second gear are docked with the second rack gear, and the end of second rack gear is fixed with the reflective mirror；Its
In,
When first displacement knots modification occurs for the feeler lever, drive first rack gear mobile, the first rack drives institute
First gear rotation is stated, the rotation of the first gear drives the worm screw rotation, by the worm screw to first displacement
Knots modification carries out displacement reduction, and the second gear is driven to rotate, so that second rack gear with reflective mirror is sent out
Raw second displacement knots modification.
In a kind of embodiment of the application, the feeler lever of the reduction gear arrangement has the first rack gear, and described first
Rack gear is docked with the first gear with worm screw, and the first gear and the worm screw share a shaft, the end of the worm screw
Portion is fixed with the reflective mirror, and the normal parallel of the reflective mirror is in the axis of the worm screw, and the reflective mirror is with the snail
The end of bar moves together；Wherein,
The external screw thread of the worm screw is screwed in a screw hole, when the first displacement knots modification occurs for the feeler lever, described in drive
First rack gear is mobile, and the rotation of the rotation of first gear described in first rack drives, the first gear drives the worm screw
It is rotated in screw hole, and the reflective mirror of the end of the worm screw is driven to move, by the worm screw to first displacement
Knots modification carries out displacement reduction, so that second displacement knots modification occurs for the reflective mirror of the end of the worm screw.
In a kind of embodiment of the application, the displacement reduction structure includes any combination with lower component: gear,
Rack gear, worm screw；Wherein, the first displacement knots modification reduction that feeler lever can occur for the reduction gear arrangement is anti-at described second
The second displacement knots modification in face is penetrated, the interference cavity length variable quantity between first reflecting surface and second reflecting surface is less than institute
State the first displacement knots modification.
In a kind of embodiment of the application, institute's displacement sensors further include inclined-plane；
An inclined hole vertical with the inclined-plane is opened on the shell wall, passes through bar, the top of the bar in the inclined hole
End is the reflective mirror, and the bottom of the bar is fixed with sliding block, and the bar and the sliding block are integrated part；The inclined-plane, institute
It is parallel to state the bottom surface of sliding block, the reflective mirror on the top of the bar and the end plane of the optical fiber；Institute's displacement sensors
When first displacement knots modification occurs in the horizontal direction for feeler lever, the slope level is mobile, drives the sliding block in the normal on inclined-plane
Direction is moved, and the reflective mirror on the top of the bar is finally driven to move, and changes the optical fiber end plane to institute
State the interference cavity length Δ d between reflective mirror；Wherein, the inclination angle on the inclined-plane is θ, when the first displacement knots modification is w, is done
Relating to the long variable quantity of chamber is Δ d=wsin θ；It is linearly to close between the first displacement knots modification and the change of cavity length amount
System；
One end of the feeler lever of institute's displacement sensors is connected with anti-shake convex block, and the anti-shake convex block makes the inclined-plane edge
The direction of the first displacement knots modification moves axially.
In a kind of embodiment of the application, the way of contact of the slider bottom and the inclined-plane connects for sliding friction
Touching or rolling friction contact；Wherein,
The way of contact of the sliding friction contact includes: with a point contact；Or it is contacted with a line；Or it is flat with one
Face contact；Or two points being separated by a certain distance on inclined-plane or multiple point contacts, described two points or multiple points are at one
In plane；Or the two lines being separated by a certain distance on inclined-plane or a plurality of line contact, and the two lines or a plurality of line are at one
In plane；Or two faces being separated by a certain distance on inclined-plane or multiple face contacts, described two faces or multiple faces are at one
In plane；The contact member on the bottom of the sliding block and the inclined-plane is any combination in the point, line, surface not rotated
The way of contact of sliding friction；
The way of contact of the rolling friction contact includes: with a point contact；Or be separated by a certain distance on inclined-plane
Two points or multiple point contacts, described two points or multiple points are in one plane；The bottom of the sliding block and the inclined-plane
Contact member be rolling friction the way of contact, the sliding block top connection rigid rod axis perpendicular to it is described tiltedly
Face, and pass through axis perpendicular to the inclined hole on the inclined-plane, the normal of the reflective mirror at the top of the rigid rod perpendicular to the inclined-plane,
The optical fiber end plane is parallel to the reflecting mirror.
In a kind of embodiment of the application, the way of contact on the sliding block and the inclined-plane is that point contact or face connect
Touching；Wherein,
The way of contact of the point contact includes single-contact or Multi-contact, wherein when the Multi-contact, Suo Youjie
The line of contact has certain length in the projection of direction of displacement, will not be to dry in the case where the sliding block does not rotate
It relates to the long measurement of chamber and generates added influence, the displacement measured and interference cavity length variable quantity are linear.
In a kind of embodiment of the application, when the sliding block has two point contacts in left and right or two planes on inclined-plane
When contact:
The spacing of two positions is L, has a spring above the sliding block, the spring can be by the ram extrusion
And cling on the inclined-plane, there are certain frictional force, and the elastic force of frictional force and the spring in the sliding block and the inclined-plane
It is directly proportional；When first displacement knots modification occurs for the feeler lever of institute's displacement sensors, by the spacing L of two positions of increase, or
Reduce the coefficient of friction between the sliding block and the inclined-plane, or increase the elastic force of the spring, so that two positions are always
The inclined-plane is all contacted, the sliding block does not rotate, and the reflective mirror of the sliding block upper rigid rod end surface is parallel to institute always
State inclined-plane.
This application provides one kind to be based on extrinsic Fabry-Perot interference (Extrinsic Fabry-Perot
Interferometric, EFPI) principle displacement sensor, the displacement sensor of abbreviation Fabry-Perot principle utilizes folding
Biggish displacement is reduced as lesser interference cavity length variable quantity by the folded structures such as lever or rack-and-pinion worm screw, and displacement
It is directly proportional to interference cavity length variable quantity, interference cavity length variable quantity can be measured according to Fabry-Perot principle, and then calculate
The size of displacement.The displacement sensor of the embodiment of the present application has many advantages, such as that high precision, strong antijamming capability and durability are strong, tool
Have wide practical use.
Detailed description of the invention
Fig. 1 is the schematic diagram of extrinsic Fabry-Perot interference provided by the embodiments of the present application (EFPI) principle；
Fig. 2 (a) is the spectrogram of extrinsic Fabry-Perot interference provided by the embodiments of the present application (EFPI) principle；
Fig. 2 (b) is the displacement and interference cavity length provided by the embodiments of the present application calibrated based on rack gear and bidentate wheel construction
Between linear relationship chart；
Fig. 3 is the schematic diagram of the displacement sensor provided by the embodiments of the present application based on folding lever structure；
Fig. 4 is the schematic diagram of the displacement sensor provided by the embodiments of the present application based on rack gear and bidentate wheel construction；
Fig. 5 is showing for the first displacement sensor provided by the embodiments of the present application based on gear, rack gear and worm structure
It is intended to；
Fig. 6 is showing for second of displacement sensor provided by the embodiments of the present application based on gear, rack gear and worm structure
It is intended to；
Fig. 7 (a) is the schematic diagram one of the displacement sensor provided by the embodiments of the present application based on inclined-plane；
Fig. 7 (b) is the schematic diagram two of the displacement sensor provided by the embodiments of the present application based on inclined-plane；
Fig. 8 (a) is the contact relation schematic diagram one of sliding block provided by the embodiments of the present application and inclined-plane；
Fig. 8 (b) is the contact relation schematic diagram two of sliding block provided by the embodiments of the present application and inclined-plane；
Fig. 8 (c) is the contact relation schematic diagram three of sliding block provided by the embodiments of the present application and inclined-plane；
Fig. 8 (d) is the contact relation schematic diagram four of sliding block provided by the embodiments of the present application and inclined-plane；
Description of symbols:
1- optical fiber；2- fiber end face, i.e. the first reflecting surface；3- reflective mirror, i.e. the second reflecting surface；4- fiber boot；5-
The carrier of second reflecting surface；The substrate of 6- displacement sensor, for fixing component；7- spectrum demodulating equipment；8- is fixed to base
Linear motion bearing on plate；The drive rod of 9- displacement sensor；The fixed point of 10- folding lever, the fixed point agretope
It moves, does not limit rotation；11- first is folded, and refers to the folding lever between fixed point 10 and the drive rod 9 of displacement sensor；12-
Two-fold refers to the folding lever between fixed point 10 and the feeler lever 14 of displacement sensor；13- second folds 12 and displacement sensor
Feeler lever 14 between connection hinge；The feeler lever of 14- displacement sensor；The first rack gear of 15-；First gear on 16- Double-gear
(i.e. gear wheel in large diameter)；Second gear (i.e. small diameter gear) on 17- Double-gear；18- gear or Double-gear are fixed to substrate
On shaft；The second rack gear of 19-；20- makes 14 restraint devices being axially moved of feeler lever of displacement sensor, commonly uses straight
Line motion bearings etc.；The shared shaft of 21- gear and worm screw；22- first gear, the first gear and worm screw are coaxial；23- and
The coaxial worm screw of one gear 22；24- second gear；The bearing of 25- constraint shaft 21；The tapped screw hole of 26-；27- sealing
Circle；28- sealing-plug；29- sensor outer housing；Fixation device of the 30- with inclined hole；Certain length is arranged at 31- spring 32- sliding block, bottom,
It is Multi-contact or face contact with inclined-plane；33- rigid rod, bottom rigid connection sliding block, reflective mirror is arranged at top；The inclined-plane 34- zero
Part；35- anti-shake convex block；36- spacing block set.
Specific embodiment
The characteristics of in order to more fully hereinafter understand the embodiment of the present application and technology contents, with reference to the accompanying drawing to this Shen
Please the realization of embodiment be described in detail, appended attached drawing purposes of discussion only for reference is not used to limit the embodiment of the present application.
The application combination extrinsic Fabry-Perot interference (EFPI) principle, provides in conjunction with folding lever, Yi Jichi
The gear combination of wheel, Double-gear, worm screw or a variety of patterns, is reduced displacement, biggish displacement variable is passed through folding
The member transforms such as lever or gear, worm screw at smaller interference cavity length variable quantity, thus by measure interference cavity length variable quantity come
Determine the size of displacement.
Fig. 1 is the schematic diagram of extrinsic Fabry-Perot interference (EFPI) principle, as shown in Figure 1, comprising: optical fiber 1, anti-
Light microscopic 3；Wherein, the fiber end face 2 of optical fiber 1 constitutes the first reflecting surface, and reflective mirror 3 constitutes the second reflecting surface.Fig. 2 (a) is non-
Levy the spectrogram of Fabry-Perot interference (EFPI) principle；Fig. 2 (b) is the displacement calibrated based on rack gear and bidentate wheel construction
Linear relationship chart between interference cavity length.
Embodiment 1: folding lever structure
As shown in figure 3, the fiber end face 2 of 1 end of optical fiber is the first reflecting surface, reflective mirror according to Fabry-Perot principle
3 be the second reflecting surface, and two reflectings surface are parallel.On this basis, optical fiber 1 and fiber boot 4 are fixed to interior of shell together
Substrate 6 on, the carrier 5 that reflective mirror 3 is connected to reflective mirror can move axially, moving direction and 1 end position of optical fiber
Axis is identical.Using can translate reflective mirror 3 and the not changed structure of reflection point by it is biggish displacement be converted into it is smaller
Change of cavity length amount.
In the present embodiment, displacement is reduced by folding lever structure.As shown in figure 3, folding lever structure have it is more
A shaft 13, due to long (hereinafter referred to as interference cavity length) the variable quantity very little of the Fabry-Perot interference chamber of displacement sensor, so
The fixed point 10 of folding lever structure is proximate to reflective mirror 3, i.e. fixed point 10 is less to the corresponding number of folds of reflective mirror 3, there is M
The case where 11, Fig. 3 of a first folding illustrates M=1；Number of folds of the fixed point 10 to 14 this part of feeler lever of displacement sensor
It is more, there is N number of second to fold the case where 12, Fig. 3 is M=3.It is furthermore possible to vary the bar of each fold structure is long.Ordinary circumstance
Under, the second folding 12 of 14 this part of feeler lever of fixed point 10 to displacement sensor is longer, each the second length folded
Half is L；First folding 11 of fixed point 10 to 3 this part of reflective mirror is shorter, and the half of each the first length folded is
a.Assuming that the displacement that the feeler lever 14 of displacement sensor moves is w, then the variation delta d that Fabry-Perot interference chamber is grown are as follows:
Since the long variation range of Fabry-Perot interference chamber is limited, so the range of displacement sensor is bigger, Na and ML
Ratio it is smaller.Wherein, displacement variable and change of cavity length amount are directly proportional always.
Structure in Fig. 3, feeler lever 14 are moved to the left, and interference cavity length becomes larger.It can also be by the reflecting surface of the carrier 5 of reflective mirror
It is put into the right, optical fiber 1 is also on the right of the second reflecting surface 3 of reflective mirror, and when such feeler lever 14 is moved to the left, interference cavity length becomes
It is small.
Embodiment 2: gear structure
As shown in Figure 4, Figure 5 and Figure 6, according to Fabry-Perot principle, displacement is rolled over by reduction gear arrangement
Subtract, biggish displacement variable is converted into lesser interference cavity length variable quantity.Mechanical structure includes the combination of various gears, packet
Containing the components such as different types of gear or Double-gear, rack gear, worm screw.Biggish displacement is passed through into a series of gear, rack gear, snail
The components such as bar are reduced displacement, so that small change occurs for interference cavity length.Displacement variable and change of cavity length amount are always
It is directly proportional.
In Fig. 4, displacement reduction structure includes gear and rack gear, as shown in figure 4, the feeler lever 14 of displacement sensor has first
Rack gear 15 when displacement changes, drives the first rack gear 15 mobile, the first rack gear 15 docks the first gear 16 on Double-gear
(i.e. gear wheel in large diameter), the second gear 17 (i.e. small diameter gear) on Double-gear dock the second rack gear 19, second rack gear
End is fixed with the carrier 5 of reflective mirror, and the end of carrier 5 is the second reflecting surface 3, the axis and 1 axis of optical fiber of the second reflecting surface 3
In parallel, and 1 end of optical fiber and fiber boot 4 are fixed on substrate 6.The shaft 17 of Double-gear is secured on substrate 6.Gu
The movement of the fixed drive rod 9 for being used to limiting displacement sensor to the linear motion bearing 8 on substrate 6, it is ensured that drive rod 9 is only in axis
To moving.It is used to the movement of the feeler lever 14 of limiting displacement sensor fixed to the linear motion bearing 20 on substrate 6, it is ensured that
Feeler lever 14 is only moved axially.When displacement varies widely, displacement is carried out by the diameter difference of Double-gear 16,17
Reduction, so that lesser change in displacement occurs for the second rack gear 19 with reflective mirror 3, i.e. small change occurs for interference cavity length.
Pass through calibration, the linear relationship of available displacement variable and change of cavity length amount.If the range of displacement sensor is larger, one
A Double-gear is inadequate to the reduction of displacement, can be reduced by the combination of multiple Double-gears to displacement.
In Fig. 5, displacement reduction structure includes gear, worm screw and rack gear, as shown in figure 5, displacement sensor feeler lever 14 has
First rack gear 15 when feeler lever 14 is subjected to displacement variation, drives the first rack gear 15 mobile, and the docking of the first rack gear 15 is with worm screw 23
First gear 22, i.e. first gear 22 and a worm screw 23 share a shaft 21, and the rotation of first gear 22 drives 23 turns of worm screw
It is dynamic.Worm screw 23 docks second gear 24, at this point, biggish displacement is reduced by worm screw 23, second gear 24 is driven to occur
Smaller rotation.Second gear 24 docks the second rack gear 19, and the end of the carrier drive rod 9 of the second rack gear 19 is the carrier of reflective mirror
5, the end of carrier 5 is the second reflecting surface 3, and the axis of the second reflecting surface 3 is parallel with 1 axis of optical fiber, and 1 end of optical fiber and optical fiber
Protective case 4 is fixed on substrate 6.The bearing 25 of constraint first gear 22 and the shaft 21 of worm screw 23 is secured on substrate 6.
It is used to the shaking of the drive rod 9 of limiting displacement sensor fixed to the linear motion bearing 8 on substrate 6, it is ensured that drive rod 9 only exists
It is axial to move.It is used to the movement of the feeler lever 14 of limiting displacement sensor fixed to the linear motion bearing 20 on substrate 6, really
Feeler lever 14 is protected only to move axially.When displacement varies widely, carried out by the 24 pairs of displacements of worm screw 23 and second gear
Reduction, so that lesser change in displacement occurs for the second rack gear 19 with reflective mirror 3, i.e. small change occurs for interference cavity length.
Pass through calibration, the linear relationship of available displacement variable and change of cavity length amount.
In Fig. 6, the displacement sensor based on Fabry-Perot principle is passed through straight-line displacement using the structure of micrometer
The movement of first rack gear 15 is converted into the rotation of first gear 22, there is a worm screw 23 coaxial with first gear 22, can incite somebody to action
Biggish gear amount of spin is converted into the lesser axis amount of movement of worm screw.Worm screw 23 uses external thread structure, is placed in screw hole 26,
Screw hole 26 be fixed to substrate 6 on, do not move, the end of worm screw 23 is fixed with reflective mirror 3, with worm screw 23 end together
Mobile, the axis of optical fiber 1 can determine the size of displacement by measuring the amount of movement of 23 end of worm screw perpendicular to reflective mirror 3.
Displacement variable and change of cavity length amount are directly proportional.
It should be noted that the application combination gear, Double-gear, worm screw, can be made the gear combination of a variety of patterns, only
Play the role of being displaced reduction, that is, combine Fabry-Perot principle, biggish displacement variable is passed through into gear, worm screw
Wait member transforms at the method for smaller interference cavity length variable quantity, in the protection scope of this patent.
Embodiment 3: bevel structure
As shown in Fig. 7 (a) and Fig. 7 (b), according to Fabry-Perot principle, displacement is reduced by inclined-plane.Fig. 7
It (a) is the increase with displacement shown in, the long shorter and shorter operating condition of chamber, i.e. θ is the operating condition of positive number；It can also be by inclined-plane inclined hole
It places in turn, i.e., with the increase of displacement, chamber is long increasingly longer, i.e. θ is the operating condition of negative, as shown in Fig. 7 (b).Inclined-plane
The range of inclination angle theta is between -90 ° to+90 °.In Fig. 7 (a) and Fig. 7 (b), on the right, the left side connects the feeler lever 14 of displacement sensor
Be connected to spacing block set 36,36 left side of spacing block set is connected with inclined-plane part 34, opened on shell wall 29 one it is vertical with inclined-plane
Inclined hole has linear motion bearing 3 in inclined hole, and 32 top of sliding block and rigid rod 33 are a part, and rigid rod 33 passes through straight line fortune
Dynamic bearing, the top of rigid rod 33 are reflective mirrors 3, and rigid rod 33 and sliding block are integrated part.Inclined-plane, sliding block bottom surface, bar top
The reflective mirror 3 in face and 2 plane of optical fiber end are parallel.As shown in figure 8, Fig. 8 (a) and Fig. 8 (d) are sliding blocks 32 and inclined-plane 34 is a little
The operating condition of contact, Fig. 8 (b) and Fig. 8 (c) are sliding blocks 32 and inclined-plane 34 is the operating condition of face contact.Point contact is divided into shown in Fig. 8 (a)
Single-contact and Fig. 7, Fig. 8 (d) shown in Multi-contact, when Multi-contact, the line being had point of contact is in direction of displacement
Projection has certain length.As long as sliding block 32 does not rotate at this time, even if frictional force causes sliding block 32 small with inclined-plane generation
Mobile, interference cavity length variable quantity is still the linear function of displacement, is changed without additional interference cavity length.Displacement is in the horizontal direction
When changing, inclined-plane 34 translates in the horizontal direction, and the normal direction with movable slider 32 on inclined-plane moves, final to drive just
The reflective mirror 3 of property 33 end of bar moves, and changes optical fiber end plane 2 between reflective mirror 3 interference cavity length Δ d.Tiltedly
The inclination angle in face is θ, and when displacement variable is w, the variable quantity of interference cavity length is Δ d=wsin θ.The technical solution of the application
It can make between displacement and change of cavity length amount for linear relationship.
Inclined-plane shakes in order to prevent, using anti-shake convex block 35, so that direction of 34, the inclined-plane along displacement moves axially,
There is no normal direction mobile.In addition, the spring 31 at rigid rod 33 generates the elastic force under one to sliding block 43 and inclined-plane part 34, not only
Sliding block can be placed to be rotated by frictional force, inclined-plane shaking is also possible to prevent.Between anti-shake convex block 35 and sealing-plug 28
Spring 31 is compressed when displacement becomes smaller, so that inclined-plane part 34 pops up to the right.In Fig. 7 (a) and Fig. 7 (b), part 14,34,
35, it 36 can be a part, be also possible to multiple parts and link together.Spacing block set 36 is in order to enable inclined-plane 34 is by bullet
When certain position is arrived on the top of spring 31, it is stuck in the right inside shell 29.
32 bottom of sliding block can divide sliding friction and rolling friction to contact with contact of incline plane mode:
(1) sliding friction can use a point contact；Or it is contacted with a line；Or with a plane contact；Or inclined-plane
On two points being separated by a certain distance or multiple point contacts, these points are in one plane；Or at a distance of a spacing on inclined-plane
From two lines or a plurality of line contact, these lines are in one plane；Or two faces being separated by a certain distance on inclined-plane or
Multiple face contacts, these faces are in one plane；The contact member on slider bottom and inclined-plane be the point not rotated, line,
The way of contact of the sliding frictions such as face.As shown in Figure 7 and Figure 8.
(2) rolling friction can be connect with two points or multiple points being separated by a certain distance on a point contact or inclined-plane
Touching, these points are in one plane；In Fig. 7, Fig. 8 (a) and Fig. 8 (b), the contact member on 32 bottom of sliding block and inclined-plane 34 can be with
Regard ball, needle roller or the way of contact of other rolling friction as.The axis of the rigid rod 33 connected at the top of sliding block 32 perpendicular to
Inclined-plane 34, and axis is passed through perpendicular to the inclined hole on inclined-plane 34, the normal of the reflective mirror 3 at 33 top of rigid rod is also perpendicularly to inclined-plane
34, optical fiber end plane 2 is parallel to reflective mirror 3.
As shown in figure 8, sliding block 32 and inclined-plane 34 are point contact or face contact, point contact is divided into single-contact and multiple spot connects
Touching, when Multi-contact, the line being had point of contact has certain length in the projection of direction of displacement, as long as sliding block does not occur to turn at this time
It is dynamic, even if frictional force causes sliding block that minute movement occurs with inclined-plane, added influence will not be generated to the measurement of interference cavity length,
The displacement and interference cavity length variable quantity measured are linear.
Preferably, as shown in Fig. 8 (b) and (c), when sliding block 32 has two point contacts in left and right or two planes on inclined-plane 34
When contact: the spacing of two positions is L, has a spring 31 above sliding block, sliding block 32 can be squeezed and cling to inclined-plane
On 34, there is certain frictional force on sliding block 32 and inclined-plane 34, and frictional force is directly proportional to elastic force.When displacement changes, in order to make two
A position all contacts inclined-plane 34 always, and sliding block 32 does not rotate, and the reflective mirror 3 of 32 upper rigid bar of sliding block, 33 end face is always
It is parallel to inclined-plane 34, can be by the spacing L of two positions of increase, or reduce the coefficient of friction between sliding block and inclined-plane, or
Increase the methods of spring force to realize.
It, in the absence of conflict, can be in any combination between technical solution documented by the embodiment of the present application.
The above, the only specific embodiment of the application, but the protection scope of the application is not limited thereto, it is any
Those familiar with the art within the technical scope of the present application, can easily think of the change or the replacement, and should all contain
Lid is within the scope of protection of this application.
Claims (13)
1. a kind of displacement sensor based on Fabry-Perot principle, which is characterized in that institute's displacement sensors include: shell,
Substrate, optical fiber, reflective mirror and the displacement reduction structure of the interior of shell are set；Wherein,
The end of the optical fiber is the first reflecting surface, and the reflective mirror is the second reflecting surface, first reflecting surface and described the
Two reflectings surface are parallel；The optical fiber is fixed on the substrate, and second reflecting surface can be along the axis of second reflecting surface
Line direction is mobile, and the axis direction of second reflecting surface is parallel with the axis direction of first reflecting surface；The displacement passes
When first displacement knots modification occurs for the feeler lever of sensor, the displacement reduction structure is by the first displacement knots modification reduction at second
Displacement knots modification simultaneously drives second reflecting surface to occur second displacement knots modification, and the second displacement knots modification is less than described the
One displacement knots modification is determined by measuring the interference cavity length variable quantity between first reflecting surface and second reflecting surface
The second displacement knots modification, and based on the corresponding relationship between the first displacement knots modification and the second displacement knots modification
Determine the first displacement knots modification.
2. the displacement sensor according to claim 1 based on Fabry-Perot principle, which is characterized in that the displacement
Reduction structure is folding lever structure, and the folding lever structure includes multiple foldings, the fixation solid point in the multiple folding
Determine on the substrate, wherein the fixed point is folded between second reflecting surface including M first, the fixed point
To including N number of second folding between the feeler lever of the folding lever structure, M and N are positive integer, and N >=M；
The half of described first length folded is a, and the half of the described second length folded is L；If the folding lever
First displacement knots modification of the feeler lever of structure is w, then the interference cavity length between first reflecting surface and second reflecting surface
Variation delta d are as follows:
3. the displacement sensor according to claim 2 based on Fabry-Perot principle, which is characterized in that the displacement
The range of sensor is bigger, then the ratio of Na and ML is smaller；Wherein, the first displacement knots modification and interference cavity length variation
It measures directly proportional.
4. the displacement sensor according to claim 1 based on Fabry-Perot principle, which is characterized in that the displacement
Reduction structure is reduction gear arrangement, and the reduction gear arrangement includes gear and rack gear；Alternatively, the reduction gear arrangement packet
Include gear, rack gear and worm screw；Wherein, the first displacement knots modification that feeler lever can occur for the reduction gear arrangement is reduced into institute
The second displacement knots modification of the second reflecting surface is stated, the interference cavity length variation between first reflecting surface and second reflecting surface
Amount is less than the first displacement knots modification, and directly proportional to the first displacement knots modification.
5. the displacement sensor according to claim 4 based on Fabry-Perot principle, which is characterized in that the deceleration
The feeler lever of gear structure has the first rack gear, and first rack gear is docked with the first gear on Double-gear, on the Double-gear
Second gear docked with the second rack gear, the diameter of the first gear is greater than the diameter of the second gear, second tooth
The end of item is fixed with the reflective mirror；Wherein,
When first displacement knots modification occurs for the feeler lever, drive first rack gear mobile, by the Double-gear to described the
One displacement knots modification carries out displacement reduction, so that second displacement knots modification occurs for second rack gear with reflective mirror, it is described
Second displacement knots modification is less than the first displacement knots modification；Interference between first reflecting surface and second reflecting surface
Change of cavity length amount is the second displacement knots modification.
6. the displacement sensor according to claim 5 based on Fabry-Perot principle, which is characterized in that the deceleration
Gear structure includes one or more Double-gears, wherein described in the case that the reduction gear arrangement includes multiple Double-gears
It is docked in the following way between two adjacent Double-gears in multiple Double-gears: close to the second tooth of the Double-gear of the feeler lever
It takes turns and is docked with the first gear of the Double-gear close to the reflective mirror, the diameter of the first gear is greater than the second gear
Diameter.
7. the displacement sensor according to claim 4 based on Fabry-Perot principle, which is characterized in that the deceleration
The feeler lever of gear structure has the first rack gear, and first rack gear is docked with the first gear with worm screw, the first gear
A shaft is shared with the worm screw, the worm screw is docked with second gear, and the second gear is docked with the second rack gear, described
The end of second rack gear is fixed with the reflective mirror；Wherein,
When first displacement knots modification occurs for the feeler lever, drive first rack gear mobile, the described in first rack drives
The rotation of one gear, the rotation of the first gear drive the worm screw rotation, are changed by the worm screw to first displacement
Amount carries out displacement reduction, and the second gear is driven to rotate, so that second rack gear with reflective mirror occurs the
Two displacement knots modifications.
8. the displacement sensor according to claim 4 based on Fabry-Perot principle, which is characterized in that the deceleration
The feeler lever of gear structure has the first rack gear, and first rack gear is docked with the first gear with worm screw, the first gear
Share a shaft with the worm screw, the end of the worm screw is fixed with the reflective mirror, the normal parallel of the reflective mirror in
The axis of the worm screw, the reflective mirror are moved together with the end of the worm screw；Wherein,
The external screw thread of the worm screw is screwed in a screw hole, when the first displacement knots modification occurs for the feeler lever, drives described first
Rack gear is mobile, and the rotation of the rotation of first gear described in first rack drives, the first gear drives the worm screw in spiral shell
It is rotated in hole, and the reflective mirror of the end of the worm screw is driven to move, first displacement is changed by the worm screw
Amount carries out displacement reduction, so that second displacement knots modification occurs for the reflective mirror of the end of the worm screw.
9. according to the described in any item displacement sensors based on Fabry-Perot principle of claim 4 to 8, which is characterized in that
The displacement reduction structure includes any combination with lower component: gear, rack gear, worm screw；Wherein, the reduction gear arrangement energy
Second displacement knots modification of enough the first displacement knots modification reductions that feeler lever occurs at second reflecting surface, first reflection
Interference cavity length variable quantity between face and second reflecting surface is less than the first displacement knots modification.
10. the displacement sensor according to claim 1 based on Fabry-Perot principle, which is characterized in that the displacement
Sensor further includes inclined-plane；
An inclined hole vertical with the inclined-plane is opened on the shell wall, passes through bar in the inclined hole, the top of the bar is
The reflective mirror, the bottom of the bar are fixed with sliding block, and the bar and the sliding block are integrated part；The inclined-plane, the cunning
The bottom surface of block, the bar top reflective mirror and the end plane of the optical fiber it is parallel；The feeler lever of institute's displacement sensors
When the first displacement knots modification occurring in the horizontal direction, the slope level is mobile, drives the sliding block in the normal direction on inclined-plane
It moves, the reflective mirror on the top of the bar is finally driven to move, change the optical fiber end plane to described anti-
Interference cavity length Δ d between light microscopic；Wherein, the inclination angle on the inclined-plane is θ, when the first displacement knots modification is w, interference cavity
Long variable quantity is Δ d=wsin θ；It is linear relationship between the first displacement knots modification and the change of cavity length amount；
One end of the feeler lever of institute's displacement sensors is connected with anti-shake convex block, and the anti-shake convex block makes the inclined-plane only along described
The direction of first displacement knots modification moves axially.
11. the displacement sensor according to claim 10 based on Fabry-Perot principle, which is characterized in that
The slider bottom is that sliding friction contact or rolling friction contact with the way of contact on the inclined-plane；Wherein,
The way of contact of the sliding friction contact includes: with a point contact；Or it is contacted with a line；Or it is connect with a plane
Touching；Or two points being separated by a certain distance on inclined-plane or multiple point contacts, described two points or multiple points are in a plane
On；Or the two lines being separated by a certain distance on inclined-plane or a plurality of line contact, and the two lines or a plurality of line are in a plane
On；Or two faces being separated by a certain distance on inclined-plane or multiple face contacts, described two faces or multiple faces are in a plane
On；The contact member on the bottom of the sliding block and the inclined-plane is the sliding of any combination in the point, line, surface not rotated
The way of contact of friction；
The way of contact of the rolling friction contact includes: with a point contact；Or two be separated by a certain distance on inclined-plane
Point or multiple point contacts, described two points or multiple points are in one plane；The bottom of the sliding block and the inclined-plane connect
Touching component be rolling friction the way of contact, the sliding block top connection rigid rod axis perpendicular to the inclined-plane, and
Across axis perpendicular to the inclined hole on the inclined-plane, the normal of the reflective mirror at the top of the rigid rod is described perpendicular to the inclined-plane
Optical fiber end plane is parallel to the reflecting mirror.
12. the displacement sensor according to claim 11 based on Fabry-Perot principle, which is characterized in that the cunning
The way of contact on block and the inclined-plane is point contact or face contact；Wherein,
The way of contact of the point contact includes single-contact or Multi-contact, wherein when the Multi-contact, is had point of contact
Line direction of displacement projection have certain length will not be to interference cavity in the case where the sliding block does not rotate
Long measurement generates added influence, and the displacement measured and interference cavity length variable quantity are linear.
13. the displacement sensor according to claim 11 based on Fabry-Perot principle, which is characterized in that when described
Sliding block is when having two point contacts in left and right or two plane contacts on inclined-plane:
The spacing of two positions is L, there is a spring above the sliding block, and the spring can be by the ram extrusion and tight
It is attached on the inclined-plane, there is certain frictional force on the sliding block and the inclined-plane, and the elastic force of frictional force and the spring is at just
Than；When first displacement knots modification occurs for the feeler lever of institute's displacement sensors, by increasing the spacing L of two positions, or reduction
Coefficient of friction between the sliding block and the inclined-plane, or increase the elastic force of the spring, so that two positions all connect always
The inclined-plane is touched, the sliding block does not rotate, and the reflective mirror of the sliding block upper rigid rod end surface is parallel to described oblique always
Face.
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