CN109763980A - A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water - Google Patents

A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water Download PDF

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Publication number
CN109763980A
CN109763980A CN201811494595.5A CN201811494595A CN109763980A CN 109763980 A CN109763980 A CN 109763980A CN 201811494595 A CN201811494595 A CN 201811494595A CN 109763980 A CN109763980 A CN 109763980A
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CN
China
Prior art keywords
oil
water
tail gas
seal type
rotary pump
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Pending
Application number
CN201811494595.5A
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Chinese (zh)
Inventor
钱金山
范秋林
倪俊
郭腾
李灿伦
景加荣
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Shanghai Institute of Satellite Equipment
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Shanghai Institute of Satellite Equipment
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Priority to CN201811494595.5A priority Critical patent/CN109763980A/en
Publication of CN109763980A publication Critical patent/CN109763980A/en
Pending legal-status Critical Current

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Abstract

The device of a kind of exclusion oil seal type oil-sealed rotary pump tail gas condensing water of the invention, comprising: oil seal type oil-sealed rotary pump, damping hose, grease condensing collector, oil water separator, ball valve;The tail gas of the oil seal type oil-sealed rotary pump discharge, oil and water trap is reached by damping hose, tail gas is condensed into oil water mixture in oil and water trap, the oil water mixture reaches oil water separator by the discharge structure of oil and water trap, under the action of oil water separator, the water separated is exhausted by ball valve, the oil seal type mechanical vacuum pump housing for the oil reflux separated.

Description

A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water
Technical field
The present invention relates to a kind of device for excluding oil seal type oil-sealed rotary pump tail gas condensing water, it is mainly used for intercepting, collects The water droplet on oil seal type oil-sealed rotary pump exhaust pipe wall is condensed into discharge, prevents from polluting in condensate return to the pump housing Pump oil.
Background technique
Oil-sealed rotary pump refer to using machinery, physics, chemically or physically chemical method to being evacuated by pumping container and The device for obtaining, improving, maintaining vacuum.Wherein, common oil seal type oil-sealed rotary pump mainly has sliding vane rotary vacuum pump (abbreviation blade Pump) and sliding valve vacuum pump (abbreviation slide valve pump), operating pressure range is 1.01 × 105~1.33 × 10-2Pa belongs to low vacuum Pump.These pumps both can be used alone, and can also be used as the fore pump of other high-vacuum pumps or ultrahigh vacuum pump, be China its people Essential main force's pump kind, is widely used to aerospace, military project, low temperature during economic every profession and trade application vacuum technology The production such as equipment, vacuum equipment, electronics, chemical industry, light industry, petroleum and medicine and scientific research department.
When oil seal type oil-sealed rotary pump is evacuated vacuum chamber individually or as fore pump, from the higher pump oil of temperature In the row of exhausting-gas hole that is pumped by these of the tail gas that is discharged to atmosphere, tail gas be containing a certain amount of certain condensable gas (mainly Water vapour) and incoagulable gas (also referred to as permanent gas, mainly air) mixture.When the coercibility water vapour in tail gas is met To room temperature tail gas tube wall when condense into water droplet, along tail gas tube wall flow back into the pump housing in the pump housing oil formed oil mixing with water Object makes the ultimate vacuum of oil seal type oil-sealed rotary pump be deteriorated, destroys the pumping performance of pump.If in oil-sealed rotary pump gas vent and tail Tracheae junction increases installation one and intercepts, collects and be discharged the device for condensing into the water droplet on tail gas tube wall, prevents from cold Condensate flows back into pump housing pollution pump oil, to extend the service life of pump oil.
Summary of the invention
The present invention intends to solve three connected problems: (1) condensed water barrier structure, it is therefore an objective to intercept along exhaust pipe Wall flows back into the condensed water in the pump housing.When the higher coercibility water vapour of temperature encounters the exhaust pipe wall of room temperature in tail gas Water droplet will be condensed into, water droplet is along exhaust pipe wall constantly toward dirty.Therefore, it is devised in the approach that water droplet flows down One structure for stopping water droplet dirty.(2) condensation water collection structure, it is therefore an objective to collect condensed water.After water droplet is blocked, it can hinder It is constantly accumulated at gear, therefore the structure of a collection condensed water has also been devised in the present invention, prevent condensed water from overflowing at blocking, The pump housing is flowed back into again.(3) condensed water draining structure, it is therefore an objective to condensed water be discharged.Regardless of the capacity of condensation water collection structure Have it is much, always have receipts it is full when, therefore the structure of a discharge condensed water is devised in the present invention again.
(contain condensed water barrier structure, collection structure and discharge knot in inside by the grease condensing collector of bespoke design Structure, the present invention can solve the problem of oil seal type oil-sealed rotary pump emulsifies pump oil along the dirty condensed water in tail gas exhaust next door.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of device of exclusion oil seal type oil-sealed rotary pump tail gas condensing water of the invention.
Fig. 2 is the sectional view of grease condensing collector of the present invention.
Fig. 3 is the assembling schematic diagram of the present invention and oil water separator.
Fig. 4 is the embodiment of the present invention, and sliding vane rotary pump is that the 2X-70A type rotary vane type of Co., Ltd, Shanghai Vaccum Pump Factory manufacture is true Sky pump.
Fig. 5 is the embodiment of the present invention, and slide valve pump is the H-150 slide valve of Ma Debao vacuum equipment Group Co., Ltd manufacture Pump.
Specific embodiment
For the technical solution for more understanding the technical problems to be solved by the invention He being proposed, with reference to the accompanying drawing and Specific embodiment is described in detail.
As shown in Figure 1, in figure: 1, oil seal type oil-sealed rotary pump;2, damping hose;3, oil and water trap;4, water-oil separating Device;5, the principle of ball valve apparatus of the present invention is the tail gas (oil gas) that oil seal type oil-sealed rotary pump 1 is discharged, and is arrived by damping hose 2 Up to oil and water trap 3, tail gas (oil gas) is condensed into oil water mixture in oil and water trap, which is received by grease The discharge structure of storage reaches oil water separator 4, and under the action of oil water separator, the water separated is exhausted by ball valve 5, The oil seal type mechanical vacuum pump housing for the oil reflux separated, can save pumping fluid.
As shown in Fig. 2, in figure: 21, tail gas (oil gas);22, grease condensing collector outer tube (internal diameter D1);23, oil-water fluid Drop;24, grease condensing collector inner tube (outer diameter D2< D1);25, condensation water collection structure;Oil gas condenses in oil and water trap 3 Principle at oil water mixture is the high-temperature oil gas from oil and water trap inner tube 24, encounters the oil and water trap outer tube 22 of room temperature When water droplet (oil water mixture) is condensed on outer tube, due to outer tube diameter D1Greater than inner tube outside diameter D2(i.e. condensed water blocking junction Structure), so condensing drip will not flow back to again in oil and water trap inner tube 24, but along the inner wall stream of oil and water trap outer tube 22 The oil water mixture gathered is discharged to water-oil separating to condensation water collection structure, then by the ball valve of condensed water draining structure 26 Device.
Fig. 3 is the assembling schematic diagram that grease condensing collector and oil water separator of the invention are used cooperatively.In figure: 31, Sliding vane rotary pump;32, admission line;35, oil water mixture return pipe;38, oil return pipe.The tail gas (oil gas) that sliding vane rotary pump 31 is discharged passes through Damping hose 2 reaches grease condensing collector 3, and is condensed into oil water mixture, which is returned by oil water mixture Flow tube 35 reaches oil water separator 4, and is separated into water and oil, and water is discharged by ball valve 5, and oil flows back to vacuum pump by oil return pipe 38 Body.
Fig. 4 is the embodiment of the present invention, and sliding vane rotary pump is the 2X-70A type rotary vane type of Co., Ltd, Shanghai Vaccum Pump Factory manufacture Vacuum pump.Grease condensing collector of the invention in certain medium-sized magnetron sputtering coil film coating equipment more than 2 years by actually making It is shown with effect, has reached the problem for preventing sliding vane rotary pump oil gas condensation water reflux pump housing emulsification pump oil.
Fig. 5 is the embodiment of the present invention, and slide valve pump is the H-150 slide valve of Ma Debao vacuum equipment Group Co., Ltd manufacture Pump.Grease condensing collector of the invention passes through nearly effect of actual use in 1 year in certain large-scale magnetron sputtering coil film coating equipment Fruit shows, has also reached the problem for preventing slide valve pump oil gas condensation water reflux pump housing emulsification pump oil.

Claims (4)

1. a kind of device for excluding oil seal type oil-sealed rotary pump tail gas condensing water characterized by comprising oil seal type mechanical vacuum Pump, damping hose, grease condensing collector, oil water separator, ball valve;
The tail gas of the oil seal type oil-sealed rotary pump discharge reaches oil and water trap by damping hose, and tail gas is collected in grease Oil water mixture is condensed into device, the oil water mixture reaches oil water separator by the discharge structure of oil and water trap, Under the action of oil water separator, the water separated is exhausted by ball valve, the oil seal type mechanical vacuum for the oil reflux separated The pump housing.
2. a kind of device for excluding oil seal type oil-sealed rotary pump tail gas condensing water as described in claim 1, which is characterized in that institute Oil gas is stated in oil and water trap, the high-temperature oil gas come from oil and water trap inner tube, when encountering the oil and water trap outer tube of room temperature Water droplet is condensed on outer tube, since outer tube diameter D 1 is greater than inner tube outside diameter D 2, condensing drip is along oil and water trap outer tube Inner wall flow to condensation water collection structure, then pass through the oil water mixture of the ball valve discharge accumulation of condensed water draining structure to grease Separator.
3. a kind of device for excluding oil seal type oil-sealed rotary pump tail gas condensing water as described in claim 1, which is characterized in that institute The tail gas for stating sliding vane rotary pump discharge reaches grease condensing collector by damping hose, and is condensed into oil water mixture, and the grease is mixed It closes object and oil water separator is reached by oil water mixture return pipe, and be separated into water and oil, water is discharged by ball valve, and oil passes through back Oil pipe flows back to vacuum pump body.
4. a kind of device for excluding oil seal type oil-sealed rotary pump tail gas condensing water as claimed in claim 3, which is characterized in that institute Sliding vane rotary pump is stated using 2X-70A type rotary-vane vaccum pump.
CN201811494595.5A 2018-12-07 2018-12-07 A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water Pending CN109763980A (en)

Priority Applications (1)

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CN201811494595.5A CN109763980A (en) 2018-12-07 2018-12-07 A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water

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CN201811494595.5A CN109763980A (en) 2018-12-07 2018-12-07 A kind of device excluding oil seal type oil-sealed rotary pump tail gas condensing water

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111503619A (en) * 2020-05-13 2020-08-07 国网河北省电力有限公司电力科学研究院 Device for improving quality of steam and water in fixed-discharge flash tank of supercritical unit

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1481475A1 (en) * 1987-05-06 1989-05-23 А. И. Груба и В. С. Попов Pump unit
CN2739388Y (en) * 2004-10-06 2005-11-09 无锡市第五机械制造有限公司 Oil-sealed slide valve vacuum pump
JP2006336567A (en) * 2005-06-02 2006-12-14 Kanematsu Engineering Kk Suction vehicle loaded with water sealed-vacuum pump
CN202757139U (en) * 2012-09-10 2013-02-27 李金柱 Condensate water flow guide device
CN108049940A (en) * 2017-09-07 2018-05-18 同济大学 The separating and reclaiming device of water in a kind of exhaust gases of internal combustion engines

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1481475A1 (en) * 1987-05-06 1989-05-23 А. И. Груба и В. С. Попов Pump unit
CN2739388Y (en) * 2004-10-06 2005-11-09 无锡市第五机械制造有限公司 Oil-sealed slide valve vacuum pump
JP2006336567A (en) * 2005-06-02 2006-12-14 Kanematsu Engineering Kk Suction vehicle loaded with water sealed-vacuum pump
CN202757139U (en) * 2012-09-10 2013-02-27 李金柱 Condensate water flow guide device
CN108049940A (en) * 2017-09-07 2018-05-18 同济大学 The separating and reclaiming device of water in a kind of exhaust gases of internal combustion engines

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111503619A (en) * 2020-05-13 2020-08-07 国网河北省电力有限公司电力科学研究院 Device for improving quality of steam and water in fixed-discharge flash tank of supercritical unit

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Application publication date: 20190517

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