CN109755855A - Frequency stabilized carbon dioxide laser optical path is composed in saturated absorption and frequency stabilized carbon dioxide laser is composed in saturated absorption - Google Patents

Frequency stabilized carbon dioxide laser optical path is composed in saturated absorption and frequency stabilized carbon dioxide laser is composed in saturated absorption Download PDF

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Publication number
CN109755855A
CN109755855A CN201910178551.XA CN201910178551A CN109755855A CN 109755855 A CN109755855 A CN 109755855A CN 201910178551 A CN201910178551 A CN 201910178551A CN 109755855 A CN109755855 A CN 109755855A
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beam splitter
polarizing beam
mirror
reflecting mirror
laser
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CN201910178551.XA
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CN109755855B (en
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张建伟
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Tsinghua University
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Tsinghua University
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Publication of CN109755855A publication Critical patent/CN109755855A/en
Priority to PCT/CN2019/096457 priority patent/WO2020181700A1/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0078Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for frequency filtering
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/06Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068Stabilisation of laser output parameters
    • H01S5/0683Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687Stabilising the frequency of the laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/005Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/022Mountings; Housings
    • H01S5/023Mount members, e.g. sub-mount members
    • H01S5/02325Mechanically integrated components on mount members or optical micro-benches
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)

Abstract

This application involves a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical paths and saturated absorption to compose frequency stabilized carbon dioxide laser.The pump light successively passes through first reflecting mirror, second reflecting mirror, second polarizing beam splitter mirror, the gas chamber, third reflecting mirror described in directive.The pump light is after third reflecting mirror reflection again successively by the gas chamber, the 4th reflecting mirror, first polarizing beam splitter mirror output.The detection light is after first polarizing beam splitter mirror injection, successively by third reflecting mirror described in the 4th reflecting mirror, the gas chamber directive.The detection light is after third reflecting mirror reflection by the gas chamber, the second polarizing beam splitter mirror directive detector, wherein the pump light and the detection light are overlapped in the indoor optical path of the gas, contrary.The length of the gas chamber can be reduced, and then volume and area that the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path occupies can be reduced, is easy to use.

Description

Frequency stabilized carbon dioxide laser optical path is composed in saturated absorption and frequency stabilized carbon dioxide laser is composed in saturated absorption
Technical field
This application involves field of precision instruments, compose frequency stabilized carbon dioxide laser optical path more particularly to saturated absorption and saturated absorption is composed Frequency stabilized carbon dioxide laser.
Background technique
High-performance, miniaturization frequency stabilized carbon dioxide laser have important answer in fields such as numerous basic scientific research, accurate measurement, meterings With.Saturated absorption spectrum Frequency Stabilization Technique may be implemented laser frequency and be locked on the specific transition spectral line of atom, molecule, not only may be used To guarantee the long-time stability of locked laser output laser relative frequency, and output laser may be implemented with very high exhausted To wavelength accuracy, therefore saturated absorption spectrum frequency stabilized carbon dioxide laser can be applied to the neck such as length standard, superhigh precision linear measure longimetry Domain.
Traditional high-performance frequency stabilized carbon dioxide laser in practical applications, in order to obtain the intensity of higher spectral line signal, is swashing In the light path design of light device, usually using the longer gas chamber of length, thus optical path area occupied is caused and volume is big, using not Convenient problem.
Summary of the invention
Based on this, it is necessary to which in practical applications for traditional high-performance frequency stabilized carbon dioxide laser, volume is big, inconvenient to use The problem of, a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical path and saturated absorption spectrum frequency stabilized carbon dioxide laser are provided.
A kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical path, comprising:
Base platform;
Gas chamber is set to the base platform;
First polarizing beam splitter mirror and the first reflecting mirror are arranged at intervals at the base platform along the direction that laser is injected, It is respectively positioned on the side of the gas chamber, first polarizing beam splitter mirror is used to be pump light and detection light, institute by the laser beam splitter The first reflecting mirror is stated for reflecting the pump light;
Second reflecting mirror and the second polarizing beam splitter mirror are arranged at intervals at the base platform, and swashing towards the gas chamber The direction of light entrance is set gradually;
Third reflecting mirror is set to the base platform, and is located at the laser exit of the gas chamber;
4th reflecting mirror is set to the base platform, and is located at first polarizing beam splitter mirror and second polarization Between beam splitter;
The pump light successively passes through first reflecting mirror, second reflecting mirror, second polarizing beam splitter mirror, institute Gas chamber is stated, third reflecting mirror described in directive, the pump light successively passes through the gas after third reflecting mirror reflection again Room, the 4th reflecting mirror, first polarizing beam splitter mirror output;
The detection light successively passes through the 4th reflecting mirror, the gas chamber after first polarizing beam splitter mirror injection Third reflecting mirror described in directive, the detection light is after third reflecting mirror reflection by the gas chamber, second polarization Beam splitter directive detector, wherein the pump light and the detection light are overlapped in the indoor optical path of the gas, contrary.
In one embodiment, further includes:
First half-wave plate is set to side of first polarizing beam splitter mirror far from first reflecting mirror, for adjusting The pump light of the first polarizing beam splitter mirror and the power proportions of the detection light are stated described in directive.
In one embodiment, further include optoisolator, it is anti-far from described first to be set to first polarizing beam splitter mirror The side for penetrating mirror, for the laser reflection light to be isolated.
In one embodiment, further includes:
First reflecting mirror adjusting bracket, first reflecting mirror are set to the first reflecting mirror adjusting bracket;
Second reflecting mirror adjusting bracket, second reflecting mirror are set to the second reflecting mirror adjusting bracket.
A kind of saturated absorption spectrum frequency stabilized carbon dioxide laser, composes frequency stabilized carbon dioxide laser optical path including the saturated absorption, further includes swashing Optical transmitting set is set to the base platform, and is located at side of first polarizing beam splitter mirror far from first reflecting mirror, For emitting the laser to first polarizing beam splitter mirror.
In one embodiment, further includes:
The detector is set to the base platform, and it is inclined far from described first to be located at second polarizing beam splitter mirror The side of vibration beam splitter.
In one embodiment, iodine vapor is filled in the gas chamber.
In one embodiment, the laser emitter is selected from distributing FeedBack Semiconductor laser diode.
A kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical path, comprising:
Base platform;
Gas chamber is set to the base platform;
Third polarizing beam splitter mirror, the first polarizing beam splitter mirror and the first reflecting mirror are arranged along the direction interval that laser is injected In the base platform, and it is respectively positioned on the same side of the gas chamber, the laser part of third polarizing beam splitter mirror described in directive passes through First polarizing beam splitter mirror described in the third polarizing beam splitter mirror directive, and in first polarizing beam splitter mirror by the laser beam splitter For pump light and detection light;Fraction of laser light is exported from the third polarizing beam splitter mirror.
Second reflecting mirror and the second polarizing beam splitter mirror are arranged at intervals at the base platform, and swashing towards the gas chamber The direction of light entrance is set gradually;
Third reflecting mirror is set to the base platform, and is located at the laser exit of the gas chamber;
4th reflecting mirror is set to the base platform, and is located at first polarizing beam splitter mirror and second polarization Between beam splitter;
The pump light successively passes through first reflecting mirror, second reflecting mirror, second polarizing beam splitter mirror, institute State third reflecting mirror described in gas chamber directive, the pump light is after third reflecting mirror reflection, by the gas chamber, described 4th reflecting mirror, first polarizing beam splitter mirror are exported from the third polarizing beam splitter mirror;
The detection light is successively penetrated by the 4th reflecting mirror, the gas chamber after first polarizing beam splitter mirror injection To the third reflecting mirror, the detection light passes through the gas chamber, second polarization point after third reflecting mirror reflection Beam mirror is to detector, wherein the pump light and the detection light are overlapped in the indoor optical path of the gas.
In one embodiment, further include the first half-wave plate, be set to first polarizing beam splitter mirror and the third is inclined Between vibration beam splitter.
In one embodiment, further include the second half-wave plate, be set to the third polarizing beam splitter mirror far from described first The side of polarizing beam splitter mirror, for adjusting the power proportions of the pump light and the detection light.
A kind of saturated absorption spectrum frequency stabilized carbon dioxide laser, composes frequency stabilized carbon dioxide laser optical path including the saturated absorption, further includes swashing Optical transmitting set is set to the base platform, and is located at side of the third polarizing beam splitter mirror far from first reflecting mirror, For emitting the laser to first polarizing beam splitter mirror.
In one embodiment, further include
The detector is set to the base platform, and it is inclined far from described first to be located at second polarizing beam splitter mirror The side of vibration beam splitter.
In one embodiment, further include connector, be electrically connected with the laser emitter, for connecting laser controlling Device.
Frequency stabilized carbon dioxide laser optical path is composed in saturated absorption provided by the embodiments of the present application, and the pump light successively passes through described first Reflecting mirror, second reflecting mirror, second polarizing beam splitter mirror, the gas chamber, third reflecting mirror described in directive, the pumping Light successively passes through the gas chamber, the 4th reflecting mirror, first polarization beam splitting after third reflecting mirror reflection again Mirror output.The detection light successively passes through third reflecting mirror described in the 4th reflecting mirror, the gas chamber directive, through the third By the gas chamber, the second polarizing beam splitter mirror directive detector after reflecting mirror reflection.The i.e. described pump light and the detection Light is in the gas chamber all by twice.And the pump light and the detection light are identical in the indoor optical circuit path of gas, advance It is contrary.Therefore, the path length that the pump light and the detection light pass through in the gas chamber is increased, and then is increased The time of the interaction of the pump light and the detection light and gas indoor gas and path length.Thus, the present embodiment In saturated absorption compose frequency stabilized carbon dioxide laser optical path, do not reducing the pump light and the detection light in the gas chamber expert route Under the premise of electrical path length, it is possible to reduce the length of the gas chamber, and then the saturated absorption spectrum frequency stabilized carbon dioxide laser light can be reduced The volume and area that road occupies, are easy to use.
Detailed description of the invention
Fig. 1 is that frequency stabilized carbon dioxide laser light path schematic diagram is composed in saturated absorption provided by the embodiments of the present application;
Fig. 2 is that frequency stabilized carbon dioxide laser schematic diagram is composed in saturated absorption provided by the embodiments of the present application;
Fig. 3 is that frequency stabilized carbon dioxide laser light path schematic diagram is composed in the saturated absorption that another embodiment of the application provides;
Fig. 4 is that frequency stabilized carbon dioxide laser schematic diagram is composed in the saturated absorption that another embodiment of the application provides.
Description of symbols:
Frequency stabilized carbon dioxide laser optical path 10 is composed in saturated absorption
Frequency stabilized carbon dioxide laser 20 is composed in saturated absorption
Frequency stabilized carbon dioxide laser optical path 30 is composed in saturated absorption
Frequency stabilized carbon dioxide laser 40 is composed in saturated absorption
Base platform 100
Gas chamber 110
Laser entrance 112
Laser exit 114
First polarizing beam splitter mirror 120
First reflecting mirror 130
Second reflecting mirror 140
Second polarizing beam splitter mirror 150
Third reflecting mirror 160
4th reflecting mirror 170
First half-wave plate 180
Optoisolator 190
First reflecting mirror adjusting bracket 210
Second reflecting mirror adjusting bracket 220
Laser emitter 230
Detector 240
Third polarizing beam splitter mirror 250
Second half-wave plate 260
Detector circuit plate 270
Connector 280
Specific embodiment
In order to which the objects, technical solutions and advantages of the application are more clearly understood, by the following examples, and combine attached Figure composes frequency stabilized carbon dioxide laser optical path to the saturated absorption of the application and saturated absorption spectrum frequency stabilized carbon dioxide laser carries out further specifically It is bright.It should be appreciated that specific embodiment described herein is not used to limit the application only to explain the application.
It is herein component institute serialization number itself, such as " first ", " second " etc., is only used for distinguishing described object, Without any sequence or art-recognized meanings.And " connection ", " connection " described in the application, unless otherwise instructed, include directly and It is indirectly connected with (connection).In the description of the present application, it is to be understood that term " on ", "lower", "front", "rear", " left side ", The orientation of the instructions such as " right side ", "vertical", "horizontal", "top", "bottom", "inner", "outside", " clockwise ", " counterclockwise " or position are closed System indicates to be based on the orientation or positional relationship shown in the drawings, being merely for convenience of description the application and simplifying description Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand For the limitation to the application.
In this application unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below " One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
Referring to Figure 1, the embodiment of the present application provides a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10.The optical path includes Base platform 100, gas chamber 110, the first polarizing beam splitter mirror 120, the first reflecting mirror 130, the second reflecting mirror 140, second polarization point Beam mirror 150, third reflecting mirror 160 and the 4th reflecting mirror 170.The gas chamber 110 is set to the base platform 100.Described One polarizing beam splitter mirror 120 and first reflecting mirror 130 are arranged at intervals at the base platform along the direction that laser is injected 100, it is respectively positioned on the side of the gas chamber 110.First polarizing beam splitter mirror 120 be used for by the laser beam splitter be pump light and Light is detected, first reflecting mirror 130 is for reflecting the pump light.Second reflecting mirror 140 and second polarization point Beam mirror 150 is arranged at intervals at the base platform 100, and the direction of the laser entrance 112 towards the gas chamber 110 is successively set It sets.The third reflecting mirror 160 is set to the base platform 100, and is located at the laser exit 114 of the gas chamber 110.It is described 4th reflecting mirror 170 is set to the base platform 100, and is located at first polarizing beam splitter mirror 120 and second polarization Between beam splitter 150.
The pump light is successively by first reflecting mirror 130, second reflecting mirror 140, second polarization point Beam mirror 150, the gas chamber 110, third reflecting mirror 160 described in directive.The pump light is reflected by the third reflecting mirror 160 Afterwards again successively by the gas chamber 110, the 4th reflecting mirror 170, first polarizing beam splitter mirror 120 output.The detection Light is after first polarizing beam splitter mirror 120 injection, successively by described in the 4th reflecting mirror 170,110 directive of the gas chamber Third reflecting mirror 160.The detection light is after the third reflecting mirror 160 reflection by the gas chamber 110, second polarization 150 directive detector 240 of beam splitter, wherein the optical path of the pump light and the detection light in the gas chamber 110 is overlapped, It is contrary.
In above-described embodiment, the base platform 100 can be used as the support platform of optical path part.First polarization point Laser can be divided into the pump light and the detection light by beam mirror 120.The detection light can be used for the locking of laser frequency. By the frequency for changing the laser, thus it is possible to vary the frequency of the detection light, thus can be by switching the detection light Frequency, by being converted to saturated absorption spectrum signal, at this time can be by the Frequency Locking of the laser.The pump light at this time Frequency is locking frequency, can be used to be extraneous.
In the present embodiment, the first linear optical path of first polarizing beam splitter mirror 120 and first reflecting mirror 130 composition Second constituted with gas chamber 110 described in second reflecting mirror 140, the second polarizing beam splitter mirror 150, the third reflecting mirror 160 Linear optical path can be substantially parallel.The pump light can be by the second linear optical path described in the first linear optical path directive. Then using after the third reflecting mirror 160 reflection again successively by the gas chamber 110, the 4th reflecting mirror 170, described The output of first polarizing beam splitter mirror 120.
The detection light successively passes through third reflecting mirror 160 described in the 4th reflecting mirror 170,110 directive of the gas chamber, By the gas chamber 110, second polarizing beam splitter mirror, 150 directive detector 240 after the third reflecting mirror 160 reflection. The i.e. described pump light and the detection light all pass through twice in the gas chamber 110.And the pump light and the detection light exist Optical circuit path in gas chamber 110 is identical, and direction of travel is opposite.Therefore, the pump light and the detection light are increased described The path length passed through in gas chamber 110, so increase the pump light and it is described detection light in gas chamber 110 gas it is mutual The time of effect and path length.Thus, frequency stabilized carbon dioxide laser optical path 10 is composed in the saturated absorption in the present embodiment, described not reducing Pump light and the detection light are in the gas chamber 110 under the premise of travel path length, it is possible to reduce the length of the gas chamber 110 Degree, and then volume and area that the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10 occupies can be reduced, it is easy to use.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10 further includes the first half-wave plate 180.It is described First half-wave plate 180 is set to side of first polarizing beam splitter mirror 120 far from first reflecting mirror 130.Described first Half-wave plate 180 is used to adjust the power ratio of the pump light that the first polarizing beam splitter mirror 120 is stated described in directive and the detection light Example.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10 further includes optoisolator 190.The light Isolator 190 is set to side of first polarizing beam splitter mirror 120 far from first reflecting mirror 130.The optoisolator 190 for being isolated the laser reflection light.It is isolated by the laser of optoisolator 190 by the optoisolator 190, can not returns It returns, therefore can protect laser.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10 further includes the first reflecting mirror adjusting bracket 210 and the second reflecting mirror adjusting bracket 220.First reflecting mirror 130 is set to the first reflecting mirror adjusting bracket 210.It is described Second reflecting mirror 140 is set to the second reflecting mirror adjusting bracket 220.By the first reflecting mirror adjusting bracket 210 and described Second reflecting mirror adjusting bracket 220 can adjust first reflecting mirror 130 and second reflecting mirror 140 to the anti-of laser respectively Penetrate direction, by adjust the first reflecting mirror adjusting bracket 210 and the second reflecting mirror adjusting bracket 220 can make pump light and Path of the detection light in the gas chamber 110 is overlapped.
Fig. 2 is referred to, the embodiment of the present application also provides a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser 20.The saturated absorption spectrum Frequency stabilized carbon dioxide laser 20 includes that frequency stabilized carbon dioxide laser optical path 10 is composed in the saturated absorption in above-described embodiment.The saturated absorption spectrum is steady Frequency laser 20 further includes laser emitter 230.The laser emitter 230 is set to the base platform 100, and is located at institute State side of first polarizing beam splitter mirror 120 far from first reflecting mirror 130.The laser emitter 230 is used for described the One polarizing beam splitter mirror 120 emits the laser.The laser emitter 230 emit by first polarizing beam splitter mirror 120 It is divided into the pump light and the detection light.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser 20 further includes the detector 240.The detection Device 240 is set to the base platform 100, and is located at second polarizing beam splitter mirror 150 far from first polarizing beam splitter mirror 120 side.The detection light, by current-voltage conversion, amplification, filtering, obtains saturated absorption spectrum in the detector 240 Signal, and then can be used for the locking of laser frequency.
In one embodiment, further include detector circuit plate 240, be electrically connected with the detector 240.
In one embodiment, iodine vapor is filled in the gas chamber 110.The i.e. described saturated absorption spectrum frequency stabilized carbon dioxide laser 20 can Think that iodine molecule composes frequency stabilized carbon dioxide laser.The signal-to-noise ratio that frequency stabilization performance depends on saturated absorption spectrum signal is composed in saturated absorption, signal Size is related to the transfer rate of molecule or atom, the molecule of participation interaction or atom number, laser intensity.In general, point The transfer rate of son or atom is faster, and signal is stronger, but signal spectrum is wider;The particle for participating in interaction is more, signal It is stronger, population density can be increased by way of heating gas chamber 110, but will lead to spectral line collision broadening and collision frequency displacement; After laser intensity increases, and signal also increases, but laser intensity reaches saturation light intensity, signal is no longer significantly increased, but spectral line can go out Now significant power broadening.The alkali metal relatively high to saturated vapour pressure at room temperature is easier to obtain stronger saturated absorption Spectrum signal.But iodine molecule is composed, since spectral line signal is weaker, usually using longer absorption bubble, higher laser function Rate could obtain satisfied signal strength.
The study found that 633nm iodine molecule composes frequency stabilized carbon dioxide laser at present, that there are volumes is big, output power is low etc. lacks inventor It falls into.Traditional 633nm iodine molecule spectrum frequency stabilized carbon dioxide laser is bigger using the volume of He-Ne laser, while such laser exports Power is relatively low, usually less than 1mW.110 length of iodine molecule gas chamber for frequency stabilization is longer, it usually needs tens centimetres.This reality It applies in example, the length of the gas chamber 110 as described in saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 10 is shorter, and does not influence optical path Length, therefore 110 length of gas chamber can be shortened under the premise of obtaining effective saturated absorption signal strength, to reduce the iodine The volume of molecular spectra frequency stabilized carbon dioxide laser.
In one embodiment, the laser emitter 230 is selected from distributing FeedBack Semiconductor laser diode.When described When the 633nm DFB semiconductor laser that frequency stabilized carbon dioxide laser is iodine molecule spectrum frequency stabilization is composed in saturated absorption, 633nm butterfly can be used The dfb semiconductor laser diode of encapsulation, output power < 10mW.
In the present embodiment, the gas chamber 110 length about 70mm of iodine molecule is filled, laser folding passes twice through the gas chamber 110, so that laser and iodine molecule interaction length is risen to about 140mm.The DFB semiconductor laser output power is lower, The detection of optical power can be transferred to 100 μ W or so, the laser of the DFB semiconductor laser overwhelming majority output is as pump Pu light, and then improve saturated absorption signal strength.Therefore the laser of the DFB semiconductor laser output can be made full use of, It can also guarantee that the DFB semiconductor laser final output power, output power are greater than 5mW simultaneously.In the present embodiment, laser Head outer dimension is about 150mm × 95mm × 45mm, and volume ratio conventional iodine frequency stabilized He-Ne laser is much smaller.Using smaller volume Reflecting mirror adjusting bracket, more small package semiconductor laser, shorter gas chamber 110, laser area of bed can further be subtracted It is small.
In one embodiment, alkali metal gas can also be filled in the gas chamber 110, is composed by alkali metal, Ke Yiban Conductor laser or other types laser.
Fig. 3 is referred to, the embodiment of the present application also provides a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 30, and the saturation is inhaled Receiving spectrum frequency stabilized carbon dioxide laser optical path 30 includes base platform 100, gas chamber 110, third polarizing beam splitter mirror 250, the first polarizing beam splitter mirror 120, the first reflecting mirror 130, the second reflecting mirror 140, the second polarizing beam splitter mirror 150, third reflecting mirror 160 and the 4th reflecting mirror 170.The gas chamber 110 is set to the base platform 100.The third polarizing beam splitter mirror 250, first polarizing beam splitter mirror 120 and first reflecting mirror 130 along the direction that laser is injected be arranged at intervals at the base platform 100, and be respectively positioned on institute State the same side of gas chamber 110.The laser part of third polarizing beam splitter mirror 120 described in directive passes through the third polarizing beam splitter mirror First polarizing beam splitter mirror 120 described in 250 directives, and be pump light by the laser beam splitter in first polarizing beam splitter mirror 120 With detection light.Fraction of laser light is exported from the third polarizing beam splitter mirror 250, second reflecting mirror 140 and the second polarization beam splitting Mirror 150 is arranged at intervals at the base platform 100, and the direction of the laser entrance 112 towards the gas chamber 110 is set gradually. The third reflecting mirror 160 is set to the base platform 100, and is located at the laser exit 114 of the gas chamber 110.Described Four reflecting mirrors 170 are set to the base platform 100, and are located at first polarizing beam splitter mirror 120 and second polarization point Between beam mirror 150.
The pump light is successively by first reflecting mirror 130, second reflecting mirror 140, second polarization point Third reflecting mirror 160 described in beam mirror 150,110 directive of the gas chamber, the pump light are reflected by the third reflecting mirror 160 Afterwards, by the gas chamber 110, the 4th reflecting mirror 170, first polarizing beam splitter mirror 120, from the third polarization beam splitting Mirror 250 exports.The detection light successively passes through the 4th reflecting mirror 170, institute after first polarizing beam splitter mirror 120 injection Third reflecting mirror 160 described in 110 directive of gas chamber is stated, the detection light passes through the gas after the third reflecting mirror 160 reflection Room 110, second polarizing beam splitter mirror, 150 directive detector 240, wherein the pump light and the detection light are in the gas Optical path in room 110 is overlapped.
In the present embodiment, output end of the third polarizing beam splitter mirror 250 as the laser be can according to need in institute Side linear movement of first polarizing beam splitter mirror 120 far from first reflecting mirror 130 is stated, and then can change the pump light Output position, while also facilitate adjust output laser angle.When the laser is stronger, enter described the in the laser Before one polarizing beam splitter mirror 120, first fraction of laser light can be exported by the third polarizing beam splitter mirror 250.
Frequency stabilized carbon dioxide laser optical path 30 is composed in saturated absorption described in the present embodiment has saturated absorption described in above-described embodiment The advantages of composing frequency stabilized carbon dioxide laser optical path, which is not described herein again.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 30 further includes the first half-wave plate 180.It is described First half-wave plate 180 is set between first polarizing beam splitter mirror 120 and the third polarizing beam splitter mirror 250.Described first Half-wave plate 180 can be used for adjusting first half-wave plate 180 for adjusting the described of the first polarizing beam splitter mirror 120 described in directive The power proportions of pump light and the detection light.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser optical path 30 further includes the second half-wave plate 260, described Second half-wave plate 260 is set to side of the third polarizing beam splitter mirror 250 far from first polarizing beam splitter mirror 120, is used for Adjust the power proportions of the pump light and the detection light.
Laser can be divided to two beams by second half-wave plate 260, it is a branch of by the third polarizing beam splitter mirror 250 to External world's output, uses for the external world.Another beam is to first polarizing beam splitter mirror 120.Second half-wave plate 260 can be used for Adjust the first polarizing beam splitter mirror 120 described in the laser power outwardly exported by the third polarizing beam splitter mirror 250 and directive Laser power proportions.
Fig. 4 is referred to, the embodiment of the present application also provides a kind of saturated absorption spectrum frequency stabilized carbon dioxide laser 40.The saturated absorption spectrum Frequency stabilized carbon dioxide laser 40 includes that frequency stabilized carbon dioxide laser optical path 30 is composed in the saturated absorption, further includes laser emitter 230, is set to institute Base platform 100 is stated, and is located at side of the third polarizing beam splitter mirror 250 far from first reflecting mirror 130, is used for institute It states the first polarizing beam splitter mirror 120 and emits the laser.The saturated absorption spectrum frequency stabilized carbon dioxide laser 40 has institute in above-described embodiment The advantages of stating saturated absorption spectrum frequency stabilized carbon dioxide laser.The volume of the saturated absorption spectrum frequency stabilized carbon dioxide laser 40 can be substantially reduced.It can To understand, the position of the laser output can change by the third polarizing beam splitter mirror 250.Frequency stabilization is composed in the saturated absorption Laser 40 can either improve the saturated absorption spectrum detection efficient of limited power output laser, and can guarantee that laser is finally defeated Power out.Saturated absorption spectrum frequency stabilized carbon dioxide laser can be used for iodine molecule spectrum, alkali metal spectrum frequency stabilization semiconductor laser, Nd-YAG laser or He-Ne laser etc..
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser 40 further includes the detector 240.The detection Device 240 is set to the base platform 100, and is located at second polarizing beam splitter mirror 150 far from first polarizing beam splitter mirror 120 side.
In one embodiment, the saturated absorption spectrum frequency stabilized carbon dioxide laser 40 further includes connector 280.The connector 280 are electrically connected with the laser emitter 230, for connecting laser controller.The laser controller passes through the connector 280 can control the laser emitter 230.When the laser emitter 230 is semiconductor laser diode, the laser control Device processed can control the temperature of the semiconductor laser diode, electric current by the connector 280, and utilize and pass through detector The 240 saturated absorption spectrum signals detected complete current-voltage conversion and filter and amplification on the detector circuit plate 270 The electric current and temperature of laser diode described in feedback control afterwards realizes the control to laser diode output laser frequency, That is frequency stabilization.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
The several embodiments of the application above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously The limitation of this patent range therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art, Under the premise of not departing from the application design, various modifications and improvements can be made, these belong to the protection scope of the application. Therefore, the scope of protection shall be subject to the appended claims for the application patent.

Claims (14)

1. frequency stabilized carbon dioxide laser optical path is composed in a kind of saturated absorption characterized by comprising
Base platform (100);
Gas chamber (110) is set to the base platform (100);
First polarizing beam splitter mirror (120) and the first reflecting mirror (130) are arranged at intervals at the pedestal along the direction that laser is injected Platform (100), is respectively positioned on the side of the gas chamber (110), and first polarizing beam splitter mirror (120) is used for the laser beam splitter For pump light and detection light, first reflecting mirror (130) is for reflecting the pump light;
Second reflecting mirror (140) and the second polarizing beam splitter mirror (150), are arranged at intervals at the base platform (100), and towards institute The direction for stating the laser entrance (112) of gas chamber (110) is set gradually;
Third reflecting mirror (160) is set to the base platform (100), and is located at the laser exit of the gas chamber (110) (114);
4th reflecting mirror (170) is set to the base platform (100), and is located at first polarizing beam splitter mirror (120) and institute It states between the second polarizing beam splitter mirror (150);
The pump light successively passes through first reflecting mirror (130), second reflecting mirror (140), second polarization point Shu Jing (150), the gas chamber (110), third reflecting mirror (160) described in directive, the pump light pass through the third reflecting mirror (160) successively pass through the gas chamber (110), the 4th reflecting mirror (170), first polarizing beam splitter mirror after reflecting again (120) it exports;
The detection light successively passes through the 4th reflecting mirror (170), institute after first polarizing beam splitter mirror (120) injection State third reflecting mirror (160) described in gas chamber (110) directive, the detection light after the third reflecting mirror (160) is reflected by The gas chamber (110), second polarizing beam splitter mirror (150) directive detector (240), wherein the pump light and the spy Optical path of the light in the gas chamber (110) is surveyed to be overlapped, it is contrary.
2. frequency stabilized carbon dioxide laser optical path is composed in saturated absorption as described in claim 1, which is characterized in that further include:
First half-wave plate (180) is set to one of first polarizing beam splitter mirror (120) far from first reflecting mirror (130) Side, for adjusting the power proportions of the pump light and the detection light of stating the first polarizing beam splitter mirror (120) described in directive.
3. frequency stabilized carbon dioxide laser optical path is composed in saturated absorption as described in claim 1, which is characterized in that further include optoisolator (190), it is set to side of first polarizing beam splitter mirror (120) far from first reflecting mirror (130), it is described for being isolated Laser reflection light.
4. frequency stabilized carbon dioxide laser optical path is composed in saturated absorption as described in claim 1, which is characterized in that further include:
First reflecting mirror adjusting bracket (210), first reflecting mirror (130) are set to the first reflecting mirror adjusting bracket (210);
Second reflecting mirror adjusting bracket (220), second reflecting mirror (140) are set to the second reflecting mirror adjusting bracket (220).
5. frequency stabilized carbon dioxide laser is composed in a kind of saturated absorption, which is characterized in that including the described in any item saturated absorptions of claim 1-4 It composes frequency stabilized carbon dioxide laser optical path (10), further includes laser emitter (230), be set to the base platform (100), and be located at described Side of first polarizing beam splitter mirror (120) far from first reflecting mirror (130), is used for first polarizing beam splitter mirror (120) emit the laser.
6. frequency stabilized carbon dioxide laser is composed in saturated absorption as claimed in claim 5, which is characterized in that further include
The detector (240), is set to the base platform (100), and it is separate to be located at second polarizing beam splitter mirror (150) The side of first polarizing beam splitter mirror (120).
7. frequency stabilized carbon dioxide laser is composed in saturated absorption as claimed in claim 5, which is characterized in that fill iodine in the gas chamber (110) Steam.
8. frequency stabilized carbon dioxide laser is composed in saturated absorption as claimed in claim 5, which is characterized in that laser emitter (230) choosing Self-dispersing formula FeedBack Semiconductor laser diode.
9. frequency stabilized carbon dioxide laser optical path is composed in a kind of saturated absorption characterized by comprising
Base platform (100);
Gas chamber (110) is set to the base platform (100);
Third polarizing beam splitter mirror (250), the first polarizing beam splitter mirror (120) and the first reflecting mirror (130), along the side that laser is injected To being arranged at intervals at the base platform (100), and it is respectively positioned on the same side of the gas chamber (110), the polarization of third described in directive The laser part of beam splitter (120) by the first polarizing beam splitter mirror (120) described in third polarizing beam splitter mirror (250) directive, And in first polarizing beam splitter mirror (120) be pump light and detection light by the laser beam splitter, fraction of laser light is from the third Polarizing beam splitter mirror (250) output;
Second reflecting mirror (140) and the second polarizing beam splitter mirror (150), are arranged at intervals at the base platform (100), and towards institute The direction for stating the laser entrance (112) of gas chamber (110) is set gradually;
Third reflecting mirror (160) is set to the base platform (100), and is located at the laser exit of the gas chamber (110);
4th reflecting mirror (170) is set to the base platform (100), and is located at first polarizing beam splitter mirror (120) and institute It states between the second polarizing beam splitter mirror (150);
The pump light successively passes through first reflecting mirror (130), second reflecting mirror (140), second polarization point Third reflecting mirror (160) described in Shu Jing (150), the gas chamber (110) directive, the pump light pass through the third reflecting mirror (160) reflect after, by the gas chamber (110), the 4th reflecting mirror (170), first polarizing beam splitter mirror (120), from Third polarizing beam splitter mirror (250) output;
The detection light from first polarizing beam splitter mirror (120) project after successively by the 4th reflecting mirror (170), described Third reflecting mirror (160) described in gas chamber (110) directive, the detection light pass through institute after the third reflecting mirror (160) is reflected State gas chamber (110), second polarizing beam splitter mirror (150) directive detector (240), wherein the pump light and the detection Optical path of the light in the gas chamber (110) is overlapped.
10. frequency stabilized carbon dioxide laser optical path is composed in saturated absorption as claimed in claim 9, which is characterized in that further include the first half-wave plate (180), it is set between first polarizing beam splitter mirror (120) and the third polarizing beam splitter mirror (250).
11. frequency stabilized carbon dioxide laser optical path is composed in saturated absorption as claimed in claim 10, which is characterized in that further include the second half-wave plate (260), it is set to side of the third polarizing beam splitter mirror (250) far from first polarizing beam splitter mirror (120), for adjusting The power proportions of the pump light and the detection light.
12. frequency stabilized carbon dioxide laser is composed in a kind of saturated absorption, which is characterized in that inhaled including the described in any item saturations of claim 9-11 Spectrum frequency stabilized carbon dioxide laser optical path (20) is received, further includes laser emitter (230), is set to the base platform (100), and is located at institute The side of third polarizing beam splitter mirror (250) far from first reflecting mirror (130) is stated, is used for first polarizing beam splitter mirror (120) emit the laser.
13. frequency stabilized carbon dioxide laser is composed in saturated absorption as claimed in claim 12, which is characterized in that further include
The detector (240), is set to the base platform (100), and it is separate to be located at second polarizing beam splitter mirror (150) The side of first polarizing beam splitter mirror (120).
14. frequency stabilized carbon dioxide laser is composed in saturated absorption as claimed in claim 12, which is characterized in that it further include connector (280), with Laser emitter (230) electrical connection, for connecting laser controller.
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