CN109742009A - Ion gauge protective device - Google Patents
Ion gauge protective device Download PDFInfo
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- CN109742009A CN109742009A CN201811369418.4A CN201811369418A CN109742009A CN 109742009 A CN109742009 A CN 109742009A CN 201811369418 A CN201811369418 A CN 201811369418A CN 109742009 A CN109742009 A CN 109742009A
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- separator tube
- tube
- metal grid
- protective device
- ion gauge
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Abstract
The invention belongs to vacuum degree measurement fields, are related to a kind of ion gauge protective device, including separator tube, helix tube, metal grid mesh and metal grid mesh negative potential power supply；Separator tube includes the first separator tube and the second separator tube；First separator tube is connected by helix tube with the second separator tube；Metal grid mesh is placed in the second separator tube and is connected with the metal grid mesh negative potential power supply being placed in outside the second separator tube；Second separator tube ground connection.The present invention provides one kind can effectively reduce into the impurity such as the metallic of vacuum flowmeter sensor and dust, substantially reduces cold cathode and the pollution of hot cathode vacuum meter sensor cathode metallic and the ion gauge protective device that can extend ion gauge service life under hot environment.
Description
Technical field
The invention belongs to vacuum degree measurement field, it is related to a kind of ion gauge more particularly to a kind of ion gauge is protected
Protection unit.
Background technique
Vacuum meter is mainly used for the measurement of vacuum of quantization, and principle is to utilize the linear relationship with air pressure and other physical quantitys
Complete the measurement of pressure.It is divided into mechanics formula, thermal conductivity and ionization type from principle.Wherein ionization type barometer is due to its measurement
Good linearity has excellent performance under low-pressure, is widely used in the vacuum measurement of the high-temperature heating devices such as vacuum drying oven workspace, electricity
It is as shown in Figure 1 from the barometrical structure chart of formula.
Ionization type barometer is using electronics when moving on fixed route, with the collision probability and its ion to measured ion
The directly proportional principle of concentration is made, and primary structure is by being placed on filament F among sensor outer housing e, grid G and cathode plate C
Composition.When work, ion entrance d is connect with ion chamber to be measured, keeps ion concentration and cavity to be measured in sensor outer housing e
Unanimously.Filament F is heated under the action of power supply Vc, launches free electron.Work of the netted cartridge type grid G in grid voltage Va
It is mobile to cathode plate C with lower high speed, it is collided in moving process under test gas ion (nitrogen, oxygen etc.), inspires cation,
Cation collides, thus on cathode return circuit under the action of cathode voltage Vb to movable cathode and with plate cylinder cathode plate C
Generate electric current.The amount of positive ions that the size of current direct ratio and collision generate, and amount of positive ions is proportional to ion concentration.Pass through
Amplification and measurement to the electric current, measurement needed for can obtaining obtain the vacuum values of cavity.
The vacuometer installed in a vacuum furnace is mainly used for measuring the vacuum degree in furnace chamber, but in use, due to furnace
Chamber typically operates in 1000 DEG C or more of high temperature, causes the metallics such as furnace chamber wall, workpiece, heating tape and is diffused into furnace chamber
In.These metallics do Brownian movement and enter vacuum meter, and are deposited on cathode to movable cathode under the action of accelerating field
On pole plate, to form the metallization pollution of cathode.It is found by test, the vacuum meter service life obviously contracts after cathodic metal deposition
Short, measuring accuracy stability declines rapidly.Analyze its reason, it may be possible to since foreign metal is different from cathode plate metal, two
Galvanic effect occurs under high temperature environment for kind metal, influences measurement accuracy.Simultaneously because the different metal coefficient of expansion is different, Yi Fa
Raw removing, to destroy sensor.
The main protected mode of existing vacuum ionization ga(u)ge has the modes such as metal grate and filter, wherein metal gate format
Main function is to protect sensor head from mechanical failure.Although and using the materials such as asbestos that filter is made can compare effectively
The impurity such as filtering dust, being but difficult to prevent the cathode metallization under vacuum meter hot environment from polluting, (being detailed in publication number is
CN203247339U, utility model title are the utility model patents of " a kind of cold rule protective device of vacuum meter ").Another way
To install the application valve bodies such as solenoid valve before vacuum meter, after vacuum degree drops to a certain degree connect ion cavity to be measured with
(be detailed in publication number is the utility models that CN203929317U, utility model title are " a kind of vacuum meter protective device " to sensor
Patent and publication number be CN107841730A, title be " a method of extend ALD vacuum meter service life " invention it is special
Benefit application), which can be effectively reduced the pollution of the sensor in rough vacuum, but is difficult to meet and needs reality under condition of high vacuum degree
When monitoring vacuum occasion sensor protection.
Summary of the invention
In order to solve the above technical problems in background technology, the present invention provides one kind can effectively reduce into true
The impurity such as the metallic and dust of empty flowmeter sensor substantially reduce cold cathode and hot cathode vacuum flowmeter sensor under hot environment
Cathodic metal particle pollution and the ion gauge protective device that ion gauge service life can be extended.
To achieve the goals above, the present invention adopts the following technical scheme:
A kind of ion gauge protective device, it is characterised in that: the ion gauge protective device includes separator tube, spiral shell
Coil, metal grid mesh and metal grid mesh negative potential power supply；The separator tube includes the first separator tube and the second separator tube；Institute
It states the first separator tube and is connected by helix tube with the second separator tube；The metal grid mesh be placed in the second separator tube and be placed in
Metal grid mesh negative potential power supply outside second separator tube is connected；The second separator tube ground connection.
The spiral outer diameter of above-mentioned helix tube is 12mm-200mm.
The spiral outer diameter of above-mentioned helix tube is 100mm-150mm.
The length of above-mentioned first separator tube, the length of the length of the length and helix tube of the second separator tube before the forming it
Be not more than 500mm.
The mesh number of above-mentioned metal grid mesh is not more than 200 mesh.
The mesh number of above-mentioned metal grid mesh is 100-150 mesh.
Above-mentioned metal grid mesh is arranged in the second separator tube by insulation pipe holder.
Above-mentioned metal grid mesh is connected by contact conductor with the metal grid mesh negative potential power supply being placed in outside the second separator tube；
The voltage of the metal grid mesh negative potential power supply is 1KV.
Above-mentioned ion gauge protective device further includes being separately positioned on the first buffering tube end and the second buffering pipe end
The cavity end flanges to be measured and sensor side flange in portion.
Above-mentioned first separator tube and the second separator tube are stainless steel straight tubes；The caliber of first separator tube and
The caliber of two separator tubes is not more than 8mm.
The invention has the advantages that
The present invention provides a kind of ion gauge protective devices, including separator tube, helix tube, metal grid mesh and metal
Aperture plate negative potential power supply；Separator tube includes the first separator tube and the second separator tube；First separator tube passes through helix tube and second
Separator tube is connected；Metal grid mesh be placed in the second separator tube and with the metal grid mesh negative potential electricity that is placed in outside the second separator tube
Source is connected；Second separator tube ground connection.Ion gauge protective device provided by the present invention passes through separator tube and cavity to be measured
Connection, so that the metallic in cavity, before being diffused into ionization type barometer, a part is deposited on spiral tube portion, remaining
A small amount of metallic and other impurities ion deposit on metal grid mesh under the electric field action that metal mesh and tube wall are formed, from
And avoid the pollution of sensor cathode.The present invention solves the dirt of the impurity to ion gauge cathode such as metallic under hot environment
Dye, can effectively reduce into the impurity such as the metallic of vacuum flowmeter sensor and dust, substantially reduce cold cathode under hot environment
Ion gauge service life is polluted and can extended with hot cathode vacuum meter sensor cathode metallic, is reduced due to vacuum
Vacuum measurement deviation caused by meter pollution.
Detailed description of the invention
Fig. 1 is the barometrical structural schematic diagram of ionization type in the prior art；
Fig. 2 is the structural schematic diagram of ion gauge protective device provided by the present invention；
Fig. 3 is the side structure schematic view of Fig. 2；
Fig. 4 is the structural schematic diagram of metal grid mesh of the present invention；
Fig. 5 is the scheme of installation of metal grid mesh of the present invention；
Wherein:
1- cavity end flanges to be measured；2- separator tube；3- helix tube；4- metal grid mesh；5- metal grid mesh negative potential power supply；6-
Sensor side flange；7- insulation pipe holder；8- contact conductor.
Specific embodiment
Referring to fig. 2 and Fig. 3, the present invention provides a kind of ion gauge protective device, ion gauge protection dresses
It sets including separator tube 2, helix tube 3, metal grid mesh 4 and metal grid mesh negative potential power supply 5；Separator tube 2 includes the first separator tube
And second separator tube；First separator tube is connected by helix tube 3 with the second separator tube；Metal grid mesh 4 is placed in the second buffering
It is connected in pipe and with the metal grid mesh negative potential power supply 5 being placed in outside the second separator tube；Second separator tube ground connection.
Ion gauge protective device provided by the present invention passes through the company of separator tube 2 (the first separator tube) and cavity to be measured
It connects, so that the metallic in cavity to be measured, before being diffused into ionization type barometer, a part is deposited on 3 part of helix tube, residual
Remaining a small amount of metallic and other impurities ion, under the electric field action that the tube wall of metal grid mesh 4 and the second separator tube is formed,
It deposits on metal grid mesh, to avoid the pollution of sensor cathode.
The spiral outer diameter of helix tube 3 of the present invention is 12mm-200mm, preferably 15mm-100mm.First separator tube
Length, the sum of the length of length of the length and helix tube 3 of the second separator tube before the forming be not more than 500mm.Metal gate
The mesh number of net 4 is not more than 200 mesh, preferably 100-150 mesh.
Referring to fig. 4 and Fig. 5, metal grid mesh 4 are arranged in the second separator tube by insulation pipe holder 7；Metal grid mesh 4 is logical
Contact conductor 8 is crossed to be connected with the metal grid mesh negative potential power supply 5 being placed in outside the second separator tube；Metal grid mesh negative potential power supply 5
Voltage be 1KV.
Meanwhile for the ease of connection, ion gauge protective device of the present invention further includes being separately positioned on the
The cavity end flanges 1 to be measured and sensor side flange 6 of one buffering tube end and the second buffering tube end.First separator tube with
And second separator tube be stainless steel straight tube；The caliber of the caliber of first separator tube and the second separator tube is not more than 8mm.
The present invention is connected on cavity to be measured, sensor side flange 6 when specifically used by cavity end flanges 1 to be measured
Be connected on the barometrical sensor outer housing of ionization type and with connect inside ionization type barometer.Separator tube 2 is diameter 8mm
Stainless steel tube, helix tube 3 are the helical form warp architecture of diameter 15mm-150mm, and the length before whole separator tube leisure bending is not
More than 500mm.Metal grid mesh 4 is the metal gate that 2 inside of separator tube is fixed on by insulation pipe holder 7 (such as ceramics bracket ring)
Net, the mesh number of metal grid mesh 4 is between 15-150.By the contact conductor 8 being connected with metal grid mesh 4, in metal grid mesh 4 and delay
Add the negative pressure of 1KV, 2 earthing of casing of separator tube between washing pipe 2.
By test, in the spiral linear diameter 100mm or so of helix tube 3, metal gate best to the filter effect of impurity
When mesh number is below 200 mesh, to the influence amount very little of vacuum measurement result.Testpieces has been made and has been applied to 1200 DEG C,
1400 DEG C, in the protection of the ion gauge of the more vacuum drying ovens such as 1600 DEG C.Before non-installation protector, the average life span of vacuum meter
At 60 days or so, after installing the device, using the vacuum meter of same model, service life extended to 1 year or so.It is obviously improved
The service life of ionic formula vacuum meter.
Claims (10)
1. a kind of ion gauge protective device, it is characterised in that: the ion gauge protective device include separator tube (2),
Helix tube (3), metal grid mesh (4) and metal grid mesh negative potential power supply (5)；The separator tube (2) include the first separator tube with
And second separator tube；First separator tube is connected by helix tube (3) with the second separator tube；The metal grid mesh (4) is set
It is connected in the second separator tube and with the metal grid mesh negative potential power supply (5) being placed in outside the second separator tube；Second buffering
Pipe ground connection.
2. ion gauge protective device according to claim 1, it is characterised in that: outside the spiral of the helix tube (3)
Diameter is 12mm-200mm.
3. ion gauge protective device according to claim 2, it is characterised in that: outside the spiral of the helix tube (3)
Diameter is 15mm-150mm.
4. ion gauge protective device according to claim 3, it is characterised in that: the length of first separator tube,
The sum of the length of length of the length and helix tube (3) of second separator tube before the forming is not more than 500mm.
5. ion gauge protective device according to claim 1 or 2 or 3 or 4, it is characterised in that: the metal grid mesh
(4) mesh number is not more than 200 mesh.
6. ion gauge protective device according to claim 5, it is characterised in that: the mesh number of the metal grid mesh (4)
It is 100-150 mesh.
7. ion gauge protective device according to claim 6, it is characterised in that: the metal grid mesh (4) passes through exhausted
Edge pipe holder (7) is arranged in the second separator tube.
8. ion gauge protective device according to claim 7, it is characterised in that: the metal grid mesh (4) passes through electricity
Pole lead (8) is connected with the metal grid mesh negative potential power supply (5) being placed in outside the second separator tube；The metal grid mesh negative potential electricity
The voltage in source (5) is 1KV.
9. ion gauge protective device according to claim 8, it is characterised in that: the ion gauge protective device
It further include cavity end flanges (1) to be measured and the sensor for being separately positioned on the first buffering tube end and the second buffering tube end
End flanges (6).
10. ion gauge protective device according to claim 9, it is characterised in that: first separator tube and
Two separator tubes are stainless steel straight tubes；The caliber of first separator tube and the caliber of the second separator tube are not more than 8mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811369418.4A CN109742009A (en) | 2018-11-16 | 2018-11-16 | Ion gauge protective device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811369418.4A CN109742009A (en) | 2018-11-16 | 2018-11-16 | Ion gauge protective device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109742009A true CN109742009A (en) | 2019-05-10 |
Family
ID=66355734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811369418.4A Withdrawn CN109742009A (en) | 2018-11-16 | 2018-11-16 | Ion gauge protective device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109742009A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118067303A (en) * | 2024-04-19 | 2024-05-24 | 陕西德信热能科技有限公司 | Vacuum degree detection device for aluminum matrix composite vacuum infiltration furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1965219A (en) * | 2004-03-12 | 2007-05-16 | 布鲁克斯自动化有限公司 | Ionization gauge |
| CN101126668A (en) * | 2007-09-20 | 2008-02-20 | 复旦大学 | Discharging gas environment ion vacuum gauge auxiliary instrument |
| CN107457400A (en) * | 2017-08-24 | 2017-12-12 | 中国航发北京航空材料研究院 | Vacuum thermal dynamic metal powder degassing device |
| CN107731651A (en) * | 2017-09-28 | 2018-02-23 | 中国航发动力股份有限公司 | A kind of protection device for being used to extend ionization gauge service life |
-
2018
- 2018-11-16 CN CN201811369418.4A patent/CN109742009A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1965219A (en) * | 2004-03-12 | 2007-05-16 | 布鲁克斯自动化有限公司 | Ionization gauge |
| CN101126668A (en) * | 2007-09-20 | 2008-02-20 | 复旦大学 | Discharging gas environment ion vacuum gauge auxiliary instrument |
| CN107457400A (en) * | 2017-08-24 | 2017-12-12 | 中国航发北京航空材料研究院 | Vacuum thermal dynamic metal powder degassing device |
| CN107731651A (en) * | 2017-09-28 | 2018-02-23 | 中国航发动力股份有限公司 | A kind of protection device for being used to extend ionization gauge service life |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118067303A (en) * | 2024-04-19 | 2024-05-24 | 陕西德信热能科技有限公司 | Vacuum degree detection device for aluminum matrix composite vacuum infiltration furnace |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20190510 |