CN109741027A - Semiconductor devices produces flow card system and implementation method - Google Patents
Semiconductor devices produces flow card system and implementation method Download PDFInfo
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- CN109741027A CN109741027A CN201811607582.4A CN201811607582A CN109741027A CN 109741027 A CN109741027 A CN 109741027A CN 201811607582 A CN201811607582 A CN 201811607582A CN 109741027 A CN109741027 A CN 109741027A
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- 238000000034 method Methods 0.000 title claims abstract description 55
- 239000004065 semiconductor Substances 0.000 title claims abstract description 46
- 238000002474 experimental method Methods 0.000 claims abstract description 194
- 238000004519 manufacturing process Methods 0.000 claims abstract description 38
- 230000008569 process Effects 0.000 claims abstract description 37
- 238000012545 processing Methods 0.000 claims abstract description 31
- 238000001259 photo etching Methods 0.000 claims description 15
- 239000011159 matrix material Substances 0.000 claims description 12
- 230000003247 decreasing effect Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 abstract description 11
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
- General Factory Administration (AREA)
Abstract
The invention discloses a kind of semiconductor devices production flow card system and implementation methods, and the process instruction of creation particular experiment module is received by an interface unit；One processing unit obtains corresponding website from a website data bank according to the received process instruction of interface unit；The website that the processing unit will acquire according to particular experiment module experimental procedure sequential and generate particular experiment module；The processing unit stores particular experiment module into a particular experiment module library.The present invention integrates particular experiment module in existing semiconductor devices production flow card system, each website when carrying out specific batch experiment is dramatically saved to require to add and read the time of information manually, it avoids simultaneously and the process flow for sending ETCD estimated time of commencing discharging to limit leakage is waited to open the case where the waiting limitation time website, leakage to set the waiting limitation time that be staggered, to reduce the case where product is scrapped because limiting the time beyond maximum waiting, economic loss caused by reducing because of artificial problem.
Description
Technical field
The invention belongs to microelectronics and semiconductor integrated circuit manufacturing fields, and in particular to a kind of semiconductor devices production stream
Piece card system and implementation method.
Background technique
In semiconductor fabrication, the process conditions of research and development experiment, process parameter adjustment or customer requirement are repaired
Just, it will usually generate a flow card (Runcard) corresponding information is described in detail, the device numbering, wafer such as semiconductor production
(Wafer) information such as quantity, wafer number, fabrication procedures or graticle for experiment.In early days, semiconductor factory is generally with paper
Matter mode generates flow card, and the flow card of papery is stored in antistatic bag.With the development of semiconductor processing technology, nowadays partly
Then using the flow card system for generating and managing in Manufacturing Executive System MES in conductor device production.
Flow card (Runcard) system of present semiconductor devices production needs to carry out some specific in batches real in product
(such as lithographic focus energy matrix (Focus Energy Matrix, abbreviation FEM) experiment) is tested, is related to waiting and sends ETCD estimated time of commencing discharging
Whens limiting the experiment etc. of (Q-time), the process complexity for opening flow card is cumbersome, as shown in figure, greatly wastes time and easily
Error.For there is the experiment for waiting the website for sending ETCD estimated time of commencing discharging to limit, exists and leak the website for being provided with waiting and ETCD estimated time of commencing discharging being sent to limit, open mistake
The risk of website, will cause large-tonnage product when serious is more than to wait the limitation time and need to scrap processing, is brought to production and operation
Greatly loss.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of semiconductor devices production flow card system and implementation methods, can
When solving process complexity when existing flow card system carries out batch experiment and carry out involving waiting for sending ETCD estimated time of commencing discharging limitation experiment
There are problems that the website risk that is staggered is opened in leakage.
In order to solve the above technical problems, semiconductor devices provided by the invention produces flow card system, including particular experiment
Module library, the particular experiment module library include at least one particular experiment module, and each particular experiment module is integrated with experiment
The required website and website is arranged successively according to the sequence of experimental procedure.
Wherein, the flow card system further includes interface unit, processing unit, website data bank, and the interface unit is used
In the process instruction that reception operates the particular experiment module in particular experiment module library, the processing unit is according to processing
It obtains corresponding website in instruction slave site data bank and generates particular experiment module and store into particular experiment module library.
Preferably, the website in the particular experiment module is integrated with preset experiment condition.
Further, the system can by interface unit to the preset experiment condition of website each in particular experiment module into
Row is reseted.
Wherein, all site information of semiconductor devices production are stored in the website data bank.
Wherein, the process instruction includes creation particular experiment module and repairs to the website in particular experiment module
Change.
Wherein, it includes mother batch product piece number corresponding with experiment unit of cargo, experiment production that the interface unit, which is also used to receive,
Product piece needs the experimental instructions of the website of sets itself condition, machine station information.
Wherein, the particular experiment module includes lithographic focus energy matrix experiment module, via etch module, ion note
Enter experiment module, photoetching window experiment module, copper-connection capacitive window cause for gossip are tested and the critical size of total evidence collects experiment.
Wherein, the processing unit according to experimental instructions in order slave site data bank choose corresponding website and from
Required particular experiment module is selected to handle mother batch and experiment unit of cargo in particular experiment module library.
Wherein, the interface unit builds on a work group system.
The present invention also provides the implementation methods of semiconductor devices production flow card system, include the following steps:
The process instruction of creation particular experiment module is received by an interface unit；
One processing unit obtains corresponding website from a website data bank according to the received process instruction of interface unit；
The website that the processing unit will acquire according to particular experiment module experimental procedure sequential and generate specific
Experiment module；
The processing unit stores particular experiment module into a particular experiment module library.
Further, the interface unit also receives the process instruction modified to the website in particular experiment module,
The processing unit is chosen corresponding particular experiment module according to process instruction and is carried out to the website in the particular experiment module
Increase and decrease or modification.Wherein, the website in the particular experiment module is integrated with preset experiment condition.Further, the system
System can reset the preset experiment condition of website each in particular experiment module by interface unit.
Further, all site information of semiconductor devices production are stored in the website data bank.
Further, it includes mother batch product piece number corresponding with experiment unit of cargo, experiment production that the interface unit, which also receives,
Product piece needs the experimental instructions of the website of sets itself condition, machine station information.The processing unit according to experimental instructions in order
Slave site data bank chooses corresponding website and selects required particular experiment module to mother from particular experiment module library
Unit of cargo and experiment unit of cargo are handled.
Further, the particular experiment module include lithographic focus energy matrix experiment module, via etch module, from
Sub- injection experiments module, photoetching window experiment module, copper-connection capacitive window cause for gossip is tested and the critical size of total evidence collects experiment.
Further, the interface unit builds on a work group system.
The present invention integrates particular experiment module in existing semiconductor devices production flow card system, dramatically saves
Each website requires to add and read the time of information manually when existing semiconductor devices carries out specific batch experiment, together
When for have wait send ETCD estimated time of commencing discharging limit process flow, avoid leakage open be staggered waiting limitation time website, leak set waiting
The case where limiting the time reduces production warp so that reducing product leads to the case where scrapping due to beyond the maximum waiting limitation time
Because of loss caused by artificial problem in battalion.
Detailed description of the invention
Fig. 1 is the flow diagram that existing flow card system carries out specific batch experiment；
Fig. 2 is the flow diagram that flow card system of the invention carries out specific batch experiment；
Fig. 3 is the structural block diagram of flow card system of the invention；
Fig. 4 is the flow chart that flow card system of the invention is realized.
Specific embodiment
Below by way of particular specific embodiment and embodiments of the present invention are described with reference to the drawings, those skilled in the art
Further advantage and effect of the invention can be understood easily by content disclosed in the present specification.The present invention also can be by other
Different specific embodiments is implemented or is applied, and details in this specification can also be based on different perspectives and applications,
Without departing substantially from carrying out various modifier changes under spirit of the invention.
Semiconductor devices production flow card system of the invention includes particular experiment module library, as shown in Fig. 2, described specific
Experiment module library includes at least one particular experiment module, website needed for each particular experiment module is integrated with experiment and described
Website is arranged successively according to the sequence of experimental procedure.Website in the particular experiment module is integrated with preset experiment condition.
Further, the system can reset the preset experiment condition of website each in particular experiment module by interface unit.
Meanwhile the flow card system further includes interface unit, processing unit, website data bank, as shown in figure 3, described
For interface unit for receiving the process instruction operated to the particular experiment module in particular experiment module library, the processing is single
Member is stored to particular experiment according to obtaining corresponding website in process instruction slave site data bank and generate particular experiment module
In module library.
All site information of semiconductor devices production are stored in the website data bank, each website accordingly includes
Process flow, and experiment condition related with the process flow can be set by interface unit.
In above system, the received process instruction of interface unit can be to create new particular experiment module, can also be with
To modify to the website in particular experiment module.
In addition, it includes mother batch product piece number corresponding with experiment unit of cargo, experiment production that the interface unit, which is also used to receive,
Product piece need sets itself condition website (test products piece is tested using the particular experiment module selected, it is certain
The experiment condition of website is identical as the default experiment condition that particular experiment module integrates, and does not need to reset at this time, and for experiment
The condition website different from the preset condition integrated in module then can pass through interface unit sets itself according to actual needs),
The experimental instructions of machine station information.According to experimental instructions, slave site data bank chooses corresponding website to the processing unit in order
And required particular experiment module is selected to handle mother batch and experiment unit of cargo from particular experiment module library.
Preferably, the particular experiment module includes lithographic focus energy matrix experiment module, via etch module, ion
Injection experiments module, photoetching window experiment module, copper-connection capacitive window cause for gossip is tested and the critical size of total evidence collects experiment, this
A little experiment modules frequency of use in semiconductor devices production is higher, carries out specific batch experiment using the modular structure of integrated form
When, required experiment module is directly selected according to product difference, and then be automatically imported all websites of required particular experiment, modify
Machine needed for the product piece information of required experiment needs the website of sets itself experiment condition, experiment website such as piece number, experiment website
Station information etc. avoids wrong choosing, leaks the problems such as selecting, wasting time without selecting website step by step according to existing way.
Preferably, the interface unit builds on a work group system, which can be one can be into
The system of row sign-off, such as Notes system.
First embodiment
In the present embodiment, lithographic focus energy matrix experiment module is integrated in flow card system.The lithographic focus
The integrated website of energy matrix experiment module specifically includes that defects detection before 1) photoetching；2) photoetching gluing and exposure, development；3)
Detection is overlapped after photoetching；4) lithography alignment detects；5) critical size detects after photoetching；6) critical size surge detection after photoetching；
7) defects detection after photoetching；8) photoetching is managed to etching maximum latency；9) abnormal job step (the dry etching light again of photoetching
Resistance, wet-cleaning, rear detection etc.).Wherein, critical size detection includes the detection of 9 point datas and full Data Detection, needs to set
Condition specifically includes that the main job step formula of photoetching, critical size detection formula etc..
For needing to carry out the product unit of cargo of lithographic focus energy matrix experiment (FEM), the light of corresponding product is directly selected
It carves and focuses energy matrix experiment module, flow card system will be automatically imported each step process process needed for the experiment module
(aforementioned nine websites i.e. in the present embodiment) selects mother batch product piece number corresponding with experiment unit of cargo by interface unit,
Choice experiment product piece needs the website of sets itself experiment condition, machine station information that can be tested.
Second embodiment
For needing the website for carrying out batch experiment to belong to the case where sending ETCD estimated time of commencing discharging to limit process, corresponding product is selected to need
The process section of batch experiment is done, such as carries out the batch experiment of via etch, the via etch module of corresponding product is selected, is
System can be automatically imported each step process process of via etch module, wherein comprising entirely there is the process website for sending ETCD estimated time of commencing discharging to limit
(via etch module has the limitation for sending ETCD estimated time of commencing discharging generally for front and back website, it is therefore desirable to send ETCD estimated time of commencing discharging to limit front and back
Website all cover), need to only select product piece number corresponding to mother batch and experiment unit of cargo, experiment website, machines etc.
Information.
The present invention also provides the implementation methods of semiconductor devices production flow card system, as shown in figure 4, including following step
It is rapid:
The process instruction of creation particular experiment module is received by an interface unit；
One processing unit obtains corresponding website from a website data bank according to the received process instruction of interface unit,
Wherein, all site information of semiconductor devices production are stored in the website data bank；
The website that the processing unit will acquire according to particular experiment module experimental procedure sequential and generate specific
Experiment module；
The processing unit stores particular experiment module into a particular experiment module library, it is preferred that particular experiment mould
Particular experiment module in block library includes lithographic focus energy matrix experiment module, via etch module, ion implanting experiment mould
Block, photoetching window experiment module, copper-connection capacitive window cause for gossip is tested and the critical size of total evidence collects experiment etc..
Further, the interface unit also receives the process instruction modified to the website in particular experiment module,
The processing unit is chosen corresponding particular experiment module according to process instruction and is carried out to the website in the particular experiment module
Increase and decrease or modification.
When carrying out specific experiment using particular experiment module, experimental procedure included in selected particular experiment module
(i.e. integrated website in the module) can all be shown, wherein the website for needing to modify or set experiment condition can be by interface list
Member is modified or is arranged, and the received experimental instructions of interface unit include mother batch product piece number corresponding with experiment unit of cargo, reality
It tests product piece and needs the website of sets itself experiment condition, machine station information.The processing unit according to experimental instructions in order from
Website data bank chooses corresponding website and selects required particular experiment module to mother crowd from particular experiment module library
Goods and experiment unit of cargo are handled.
The present invention integrates particular experiment module in existing semiconductor devices production flow card system, dramatically saves
Each website requires to add and read the time of information manually when existing semiconductor devices carries out specific batch experiment, together
When for have wait send ETCD estimated time of commencing discharging limit process flow, avoid leakage open be staggered waiting limitation time website, leak set waiting
The case where limiting the time reduces production warp so that reducing product leads to the case where scrapping due to beyond the maximum waiting limitation time
Because of loss caused by artificial problem in battalion.
The present invention has been described in detail through specific embodiments, which is only of the invention preferable
Embodiment, the invention is not limited to above embodiment.Without departing from the principles of the present invention, those skilled in the art
The equivalent replacement and improvement that member makes, are regarded as in the technology scope that the present invention is protected.
Claims (19)
1. a kind of semiconductor devices produces flow card system, which is characterized in that including particular experiment module library, the particular experiment
Module library includes at least one particular experiment module, website and the website needed for each particular experiment module is integrated with experiment
It is arranged successively according to the sequence of experimental procedure.
2. semiconductor devices according to claim 1 produces flow card system, which is characterized in that the flow card system is also
Including interface unit, processing unit, website data bank, the interface unit is for receiving to specific in particular experiment module library
The process instruction that experiment module is operated, the processing unit are corresponding according to obtaining in process instruction slave site data bank
Website simultaneously generates particular experiment module and stores into particular experiment module library.
3. semiconductor devices according to claim 2 produces flow card system, which is characterized in that the particular experiment module
In website be integrated with preset experiment condition.
4. semiconductor devices according to claim 3 produces flow card system, which is characterized in that the system can be by connecing
Mouth unit resets the preset experiment condition of website each in particular experiment module.
5. semiconductor devices according to claim 2 produces flow card system, which is characterized in that in the website data bank
It is stored with all site information of semiconductor devices production.
6. semiconductor devices according to claim 2 produces flow card system, which is characterized in that the process instruction includes
It creates particular experiment module and modifies to the website in particular experiment module.
7. semiconductor devices according to claim 2 produces flow card system, which is characterized in that the interface unit is also used
The website of sets itself condition, machine are needed including mother batch product piece number corresponding with experiment unit of cargo, experimental products piece in receiving
The experimental instructions of station information.
8. semiconductor devices according to claim 1 produces flow card system, which is characterized in that the particular experiment module
Including lithographic focus energy matrix experiment module, via etch module, ion implanting experiment module, photoetching window experiment module,
Copper-connection capacitive window cause for gossip is tested to collect with the critical size of total evidence and be tested.
9. semiconductor devices according to claim 7 produces flow card system, which is characterized in that the processing unit according to
Experimental instructions in order choose corresponding website and select required spy from particular experiment module library by slave site data bank
Determine experiment module to handle mother batch and experiment unit of cargo.
10. semiconductor devices according to claim 2 produces flow card system, which is characterized in that the interface unit is built
Stand on a work group system.
11. the implementation method of semiconductor devices production flow card system, which comprises the steps of:
The process instruction of creation particular experiment module is received by an interface unit；
One processing unit obtains corresponding website from a website data bank according to the received process instruction of interface unit；
The website that the processing unit will acquire according to particular experiment module experimental procedure sequential and generate particular experiment
Module；
The processing unit stores particular experiment module into a particular experiment module library.
12. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
Interface unit also receives the process instruction modified to the website in particular experiment module, and the processing unit refers to according to processing
It enables and chooses corresponding particular experiment module and the website in the particular experiment module is increased and decreased or is modified.
13. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
Website in particular experiment module is integrated with preset experiment condition.
14. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
System can reset the preset experiment condition of website each in particular experiment module by interface unit.
15. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
All site information of semiconductor devices production are stored in website data bank.
16. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
Interface unit, which is also received, needs sets itself condition including mother batch product piece number corresponding with experiment unit of cargo, experimental products piece
The experimental instructions of website, machine station information.
17. the implementation method of semiconductor devices production flow card system according to claim 16, which is characterized in that described
Processing unit according to experimental instructions, choose corresponding website and from particular experiment module library in order by slave site data bank
Particular experiment module needed for selection handles mother batch and experiment unit of cargo.
18. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
Particular experiment module includes lithographic focus energy matrix experiment module, via etch module, ion implanting experiment module, photoetching window
Mouth experiment module, copper-connection capacitive window cause for gossip are tested and the critical size of total evidence collects experiment.
19. the implementation method of semiconductor devices production flow card system according to claim 11, which is characterized in that described
Interface unit builds on a work group system.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811607582.4A CN109741027A (en) | 2018-12-27 | 2018-12-27 | Semiconductor devices produces flow card system and implementation method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811607582.4A CN109741027A (en) | 2018-12-27 | 2018-12-27 | Semiconductor devices produces flow card system and implementation method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20230213573A1 (en) * | 2021-12-29 | 2023-07-06 | Saimeite Technology Co., Ltd. | Method and device for testing wafer, electronic device and storage medium |
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| CN103870587A (en) * | 2014-03-27 | 2014-06-18 | 上海华力微电子有限公司 | Method for establishing semiconductor manufacturing test technological processes |
| CN105097424A (en) * | 2015-07-22 | 2015-11-25 | 上海华力微电子有限公司 | Dispatching method and system for semiconductor process production line |
| CN105447209A (en) * | 2014-06-04 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Wafer batch flow card generation method and system |
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2018
- 2018-12-27 CN CN201811607582.4A patent/CN109741027A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040115842A1 (en) * | 2002-12-11 | 2004-06-17 | Liu Chih Pang | Method of providing for an automated split runcard processing |
| CN103870587A (en) * | 2014-03-27 | 2014-06-18 | 上海华力微电子有限公司 | Method for establishing semiconductor manufacturing test technological processes |
| CN105447209A (en) * | 2014-06-04 | 2016-03-30 | 中芯国际集成电路制造(上海)有限公司 | Wafer batch flow card generation method and system |
| CN105097424A (en) * | 2015-07-22 | 2015-11-25 | 上海华力微电子有限公司 | Dispatching method and system for semiconductor process production line |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20230213573A1 (en) * | 2021-12-29 | 2023-07-06 | Saimeite Technology Co., Ltd. | Method and device for testing wafer, electronic device and storage medium |
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