CN109725752A - A kind of preparation method and flexible touch substrate of flexible touch substrate - Google Patents
A kind of preparation method and flexible touch substrate of flexible touch substrate Download PDFInfo
- Publication number
- CN109725752A CN109725752A CN201711037001.3A CN201711037001A CN109725752A CN 109725752 A CN109725752 A CN 109725752A CN 201711037001 A CN201711037001 A CN 201711037001A CN 109725752 A CN109725752 A CN 109725752A
- Authority
- CN
- China
- Prior art keywords
- film layer
- substrate
- hydrophobic film
- carrier substrate
- flexible touch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention discloses a kind of preparation method of flexible touch substrate and flexible touch substrate, method includes: that hydrophobic film layer is formed on carrier substrate, and hydrophobic material is super hydrophobic material in the hydrophobic film layer；Surface modification treatment is carried out to the hydrophobic film layer, makes the hydrophobic film layer that there is hydrophily far from the surface of the carrier substrate side；Flexible touch substrate is formed far from the surface of the carrier substrate side in the hydrophobic film layer；Restore the hydrophobicity of the hydrophobic film layer；Separate the flexible touch substrate.The hydrophobic film layer with super hydrophobic material is arranged in the present invention between carrier substrate and flexible touch substrate, by carrying out surface modification treatment to hydrophobic film layer to change the surface adhesion of hydrophobic film layer, it ensure that flexible touch substrate is firmly secured on carrier substrate in preparatory phase, flexible touch substrate can be easily peeled off out in stripping bench, the damage for touching substrate in stripping process is avoided, the release yield of flexible touch substrate and efficiency are improved.
Description
Technical field
The present embodiments relate to touch display technology more particularly to a kind of preparation method and flexibility of flexible touch substrate
Touch substrate.
Background technique
In mobile internet era, utilization of the flexible touch screen in mobile phone, Internet of Things and wearable device will be brought
The new revolution of one consumption experience.
Currently, the preparation method of flexible touch screen mostly has something in common, that is, needs flexible substrate and touch device
Part is sequentially prepared on carrier substrate, then by way of laser lift-off or mechanical stripping by the flexible touch screen of preparation from
It is removed on carrier substrate.
In general, the method higher cost of laser lift-off, production efficiency are lower.Although and the method for mechanical stripping has cost
The advantages that lower and high production efficiency, but the method for mechanical stripping can due to the adhesion strength of flexible touch screen and carrier substrate compared with
Height be easy to cause the damage of flexible touch screen in stripping process.
Summary of the invention
The present invention provides the preparation method and flexible touch substrate of a kind of flexible touch substrate, realizes soft on carrier substrate
Property touch substrate light removing, improve the release yield of flexible touch substrate and efficiency.
In a first aspect, the embodiment of the invention provides a kind of preparation methods of flexible touch substrate, comprising:
Hydrophobic film layer is formed on carrier substrate, the material in the hydrophobic film layer is super hydrophobic material；
Surface modification treatment is carried out to the hydrophobic film layer, so that the hydrophobic film layer is far from the carrier substrate side
Surface has hydrophily；
Flexible touch substrate is formed far from the surface of the carrier substrate side in the hydrophobic film layer；
Restore the hydrophobicity of the hydrophobic film layer；
Separate the flexible touch substrate.
Further, it is formed before hydrophobic film layer on carrier substrate, further includes:
Carrier substrate is surface-treated, so that the carrier substrate has close to the surface of the hydrophobic film layer side
Hydrophily.
Further, the flexible touch substrate includes flexible substrate and is located at the flexible substrate far from the carrier base
The touch control layer of plate side；The touch control layer includes touch control unit；The carrier substrate includes effective district and dead space, it is described effectively
Area corresponds to the region that the touch control unit is provided in the touch control layer, and the dead space corresponds to touch-control described in the touch control layer
Region between unit；
Hydrophobic film layer is formed on carrier substrate, comprising:
The effective district by coating process in the carrier substrate is coated with the super hydrophobic material.
Wherein, flexible touch substrate is formed far from the surface of the carrier substrate side in the hydrophobic film layer, comprising:
Polyimides is covered on the dead space of the carrier substrate and the hydrophobic film layer, forms the flexibility
Substrate；
The touch control layer is formed far from the side of the carrier substrate in the flexible substrate.
Wherein, the super hydrophobic material is coated in the effective district of the carrier substrate, comprising:
Super hydrophobic material described in a flood is coated on the carrier substrate；
The dead space of the carrier substrate is removed by photoetching process, nano-imprint process or dry and wet etch process
Super hydrophobic material.
Wherein, the coating process includes spin coating, spraying, slit type coating and bar coating.
Further, separating the flexible touch substrate includes:
The flexible touch substrate is removed from the carrier substrate of the dead space by the way of laser lift-off；
The flexible touch substrate is removed from the hydrophobic film layer by the way of mechanical stripping.
Wherein, the super hydrophobic material is super-hydrophobic polytetrafluoroethylene (PTFE) or super-hydrophobic polyimides.
Wherein, the thickness of the hydrophobic film layer is greater than 100nm and less than 5 μm.
Wherein, described to include: to hydrophobic film layer progress surface modification treatment
Utilize at least one of oxygen plasma, hydrogen plasma, ultraviolet light photodissociation ozone and dilute hydrofluoric acid solution pair
The hydrophobic film layer carries out surface modification treatment, so that the contact angle of the hydrophobic film layer is less than 50 degree.
Further, the hydrophobicity for restoring the hydrophobic film layer includes:
The hydrophobic film layer is made annealing treatment, so that the contact angle of the hydrophobic film layer is greater than 100 degree.
Further, the temperature of the annealing is greater than 150 DEG C, and the time of the annealing is greater than 30 points
Clock.
Second aspect, the embodiment of the invention also provides a kind of flexible touch substrate, the flexible touch substrate passes through the
Preparation method described in one side is prepared.
The preparation method and flexible touch substrate of flexible touch substrate provided in an embodiment of the present invention, by carrier substrate
Setting can change hydrophobic hydrophobic film layer between flexible touch substrate, ensure that flexible touch substrate can in preparatory phase
To be firmly secured on carrier substrate, flexible touch substrate can be easily peeled off out in stripping bench, avoids stripping process
The middle damage for touching substrate, improves the release yield of flexible touch substrate and efficiency.
Detailed description of the invention
In order to more clearly illustrate the technical scheme of the exemplary embodiment of the present invention, below to required in description embodiment
The attached drawing to be used does a simple introduction.Obviously, the attached drawing introduced is present invention a part of the embodiment to be described
Attached drawing, rather than whole attached drawings without creative efforts, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is the flow chart of the preparation method of flexible touch substrate provided in an embodiment of the present invention；
Fig. 2 is the diagrammatic cross-section of flexible touch substrate to be stripped provided in an embodiment of the present invention；
Fig. 3 is the flow chart of the preparation method of another flexible touch substrate provided in an embodiment of the present invention；
Fig. 4 is a kind of overlooking structure diagram of flexible touch substrate provided in an embodiment of the present invention；
Fig. 5 is in Fig. 4 along the schematic diagram of the section structure of hatching A-A '；
Fig. 6 is that carrier substrate provided in an embodiment of the present invention and hydrophobic film layer are illustrated along the cross-section structure of hatching A-A '
Figure；
Fig. 7 is the contact angle schematic diagram of 50 degree provided in an embodiment of the present invention and 100 degree；
Fig. 8 is the section of carrier substrate, hydrophobic film layer and flexible substrate provided in an embodiment of the present invention along hatching A-A '
Structural schematic diagram；
Fig. 9 is a kind of structural schematic diagram of flexible touch substrate provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Fig. 1 is a kind of flow chart of the preparation method of flexible touch substrate provided in an embodiment of the present invention, and Fig. 2 is to be stripped
The diagrammatic cross-section of flexible touch substrate.Wherein 21 1 side surface of carrier substrate is provided with hydrophobic film layer 22, and hydrophobic film layer 22 is remote
Surface from 21 side of carrier substrate is provided with flexible touch substrate 23.The preparation method of specific flexible touch substrate includes such as
Lower step:
Step 101 forms hydrophobic film layer on carrier substrate, and the material in the hydrophobic film layer is super hydrophobic material.
Wherein, carrier substrate 21 is flat, rigid substrate, and material can be glass or metal plate etc..In addition, dredging
Water film 22 is made of super hydrophobic material, and hydrophobic film layer surface can be made very hydrophobic, deposit to film layer on its surface due to
Hydrophobic film layer can not be soaked and adhesion strength is lower, adhesion strength can be lower than 100gf/25mm.It should be noted that about above-mentioned
Carrier substrate material, hydrophobic material, can be selected, be not specifically limited herein according to the actual situation.
Step 102 carries out surface modification treatment to the hydrophobic film layer, so that the hydrophobic film layer is far from carrier substrate one
The surface of side has hydrophily.
Wherein, hydrophobic film layer 22 has hydrophobicity when unprocessed itself, and surface modification treatment is by hydrophobic film layer 22
Exposed surface change into hydrophily, hydrophobicity and hydrophily are expression of the hydrophobic film layer to the affinity degree of water, also
The adhesiveness of hydrophobic film layer Yu other substances such as flexible touch screen can be represented.It follows that hydrophobic film layer 22 is changed by surface
Property processing, make surface exhibits hydrophily thereon, adhesion strength increase ensure that flexible touch substrate 23 can be in hydrophobic film layer 22
Upper preparation, while it is firmly secured at flexible touch substrate 23 on carrier substrate 21 in preparatory phase.
Step 103 forms flexible touch substrate far from the surface of the carrier substrate side in the hydrophobic film layer.
With reference to Fig. 2, flexible touch substrate 23 is formed in hydrophobic film layer 22, and hydrophilic 22 tight adhesion of hydrophobic film layer,
It ensure that flexible touch substrate 23 during the preparation process and will not occur that dislocation falls off.
Step 104, the hydrophobicity for restoring the hydrophobic film layer.
Wherein, after the completion of prepared by flexible touch substrate 23, hydrophobic film layer 22 is at this time hydrophily, and adhesion strength is stronger, is led to
The hydrophobicity of over recovery hydrophobic film layer 22, can restore hydrophobic film layer 22 is low adhesion strength, makes hydrophobic film layer 22 and flexible touch
It is more easily peelable between substrate 23.
Step 105 separates the flexible touch substrate.
Wherein, removing is directly removed flexible touch substrate 23 using mechanical stripping mode from hydrophobic film layer 22, specifically
Step is with mechanical stripping equipment or manually by flexible touch substrate 23 by edge lift, then by entire flexible touch substrate 23
Raise realization removing.
The preparation method of flexibility touch base plate provided by the embodiment of the present invention, carrier substrate and flexible touch substrate it
Between increase hydrophobic film layer, by changing and restoring hydrophobic film layer to water compatibility, to regulate and control the surface adhesion of hydrophobic film layer
Power ensure that flexible touch substrate can be firmly secured on carrier substrate in preparatory phase, stripping bench can be easily
Flexible touch substrate is separated, the damage for touching substrate in stripping process is avoided, improves release good of flexible touch substrate
Rate and efficiency.
Optionally, it is formed before hydrophobic film layer on carrier substrate, further includes: carrier substrate is surface-treated, with
Make the carrier substrate that there is hydrophily close to the surface of the hydrophobic film layer side.
Fig. 3 is the flow chart of the preparation method of another flexible touch substrate provided in an embodiment of the present invention, with reference to Fig. 3,
In order to increase the adhesion strength between carrier substrate 21 and hydrophobic film layer 22, guarantee that hydrophobic film layer 22 and flexible touch substrate 23 exist
Situations such as will not misplacing or fall off in preparation process, can increase S300, be surface-treated, change to carrier substrate 21
The hydrophily of kind 21 upper surface of carrier substrate, increases the adhesion strength of carrier substrate 21 and hydrophobic film layer 22.
Optionally, flexible touch substrate includes flexible substrate and the touch-control positioned at flexible substrate far from carrier substrate side
Layer；Touch control layer includes touch control unit；Carrier substrate includes effective district and dead space, and effective district corresponds to be provided in the touch control layer
The region of touch control unit, dead space correspond to the region in touch control layer between touch control unit；Hydrophobic film layer is formed on carrier substrate,
It include: the effective district coating super hydrophobic material by coating process in the carrier substrate.
Fig. 4 is a kind of overlooking structure diagram of flexible touch substrate, and Fig. 5 is cross-section structure of the Fig. 4 along hatching A-A '
Schematic diagram, with reference to Fig. 4 and Fig. 5, flexible touch substrate 23 includes flexible substrate 231 and touch control layer 232, the touching in touch control layer 232
Control unit is not paved with entire flexible substrate 231, and touch control unit needs to regulate and control pattern with mask plate during the preparation process,
In, touch control unit region is effective district 41, and the region between touch control unit is dead space 42, in the subsequent process, flexible
It touches substrate to be cut, to obtain the touch panel comprising touch control unit, which can be used for making mobile phone
The equipment such as plate.
Optionally, coating process includes spin coating, spraying, slit type coating and bar coating etc..
Super hydrophobic material is by applying the available continuous hydrophobic membrane of solid-state, spin coating, spraying, slit type coating and bar
The coating process such as coating are conventional hydrophobic film layer preparation process, and those skilled in the art can select according to the actual situation
It selects.
Optionally, super hydrophobic material includes super-hydrophobic polytetrafluoroethylene (PTFE) or super-hydrophobic polyimides.
The contact angle of for example super-hydrophobic polytetrafluoroethylene (PTFE) of super hydrophobic material and super-hydrophobic polyimides is greater than 150 degree, can make
22 surface of hydrophobic film layer is more hydrophobic, the film layer deposited on its surface since hydrophobic film layer can not be soaked and adhesion strength is lower,
Basically reach discrete state.
Optionally, the thickness of hydrophobic film layer 22 is in the range of being greater than 100nm and less than 5 μm.
It should be noted that hydrophobic film layer need to meet greater than 100nm, there is no optimum thickness, of course for cost
Consider, thickness should be as small as possible in 5 μm.
Optionally, the super hydrophobic material is coated in the effective district of the carrier substrate, comprising: on carrier substrate
It is coated with a flood super hydrophobic material；Nothing on carrier substrate is removed by photoetching process, nano-imprint process or dry and wet etch process
Imitate the super hydrophobic material in area.
Fig. 6 is the schematic diagram of the section structure of carrier substrate and hydrophobic film layer along hatching A-A ', with reference to Fig. 6, S301 in Fig. 4
Specifically: one flood super hydrophobic material of coating process coating is used on carrier substrate 21, then uses photoetching process, nanometer pressure
Print technique or dry and wet etch process get rid of the super hydrophobic material in dead space 42, retain the hydrophobic film layer in effective district 41
22。
Optionally, carrying out surface modification treatment to hydrophobic film layer includes: to utilize oxygen plasma, hydrogen plasma, ultraviolet
At least one of linear light solution ozone and dilute hydrofluoric acid solution carry out surface modification treatment to the hydrophobic film layer, so that the institute
The contact angle of hydrophobic film layer is stated less than 50 degree.
Wherein, the surface modification treatments such as oxygen plasma, hydrogen plasma, ultraviolet light photodissociation ozone and dilute hydrofluoric acid solution
Because its is easy to operate, low in cost and has excellent performance etc., advantages become conventional surface modifying treatment, tool to method
Body operating method does not repeat them here again.The hydrophily and hydrophobicity of hydrophobic film layer 22 can be judged by contact angle, contact angle
Refer to angle theta of the tangent line of the liquid-vapor interface made by gas, liquid, solid three-phase point of intersection across liquid and solid-liquid boundary line,
It is the measurement of wetness degree, the contact angle schematic diagram that Fig. 7 is 50 degree and 100 degree, with reference to Fig. 7, water droplet 71 is on water wetted material 72
When, it is 50 degree that contact angle is smaller, and water droplet 71 can soak water wetted material 72 at this time, it is larger with the contact surface of water wetted material 72,
So the adhesiveness of water wetted material 72 is stronger；And water droplet 71 is when on hydrophobic material 73, it is 100 degree that contact angle is larger, water droplet
71 can not soak hydrophobic material 73, smaller with the contact surface of hydrophobic material 73, so the adhesiveness of hydrophobic material 73 is weaker.Through
After above-mentioned steps, that is, S302 modification, the contact angle on 22 surface of hydrophobic film layer can be less than 50 degree, and adhesion strength greatly increases,
It ensure that flexible touch substrate 23 can be prepared in hydrophobic film layer 22, while also making flexible touch substrate 23 can in preparatory phase
To be firmly secured on carrier substrate 21.
Optionally, flexible touch substrate is formed far from the surface of the carrier substrate side in the hydrophobic film layer, comprising:
Polyimides is covered on the dead space of the carrier substrate and the hydrophobic film layer, forms the flexible substrate；?
The flexible substrate forms the touch control layer far from the side of the carrier substrate.
Fig. 8 is the schematic diagram of the section structure of carrier substrate, hydrophobic film layer and flexible substrate along hatching A-A ', with reference to Fig. 8
And Fig. 5, wherein 231 material of flexible substrate can be polyimide material, and in the specific steps of Fig. 3 S303, the polyamides of liquid is sub-
Amine material is formed by coating process, can be filled and led up the dead space 42 between hydrophobic film layer 22 in forming process, so that flexible substrate
231 contact with the upper surface of carrier substrate 21, then, touch control layer 232 are prepared in flexible substrate 231, touch control layer 232 can lead to
The upper surface that the modes such as hot evaporation, magnetron sputtering are formed in flexible substrate 231 is crossed, and regulates and controls required pattern by mask plate.
In this method step, flexible substrate 231 can be in contact by the dead space between hydrophobic film layer 22 with carrier substrate 21, not only
While avoiding the case where effective district touch control unit is damaged in removing by deformation, flexible touch substrate 23 is also increased
With the adhesion strength of carrier substrate 21, fixed flexible touch base plate is haved the function that a certain extent, it is therefore prevented that in preparation process
The disengaging of flexible touch base plate 23 and carrier substrate 21 misplaces.
Optionally, the hydrophobicity for restoring the hydrophobic film layer includes: to make annealing treatment to the hydrophobic film layer, so that institute
The contact angle for stating hydrophobic film layer is greater than 100 degree.
Wherein, the temperature of the annealing is greater than 150 DEG C, and the time of the annealing is greater than 30 minutes.
The condition of different hydrophobic materials, high annealing may be different, but regardless of hydrophobic material and annealing
Condition, the purpose of final S304 are that material is made to revert to hydrophobic state.
Optionally, separating the flexible touch substrate includes: by the way of laser lift-off by the flexible touch base
Plate is removed from the carrier substrate of the dead space；By the flexible touch substrate from described hydrophobic by the way of mechanical stripping
It is removed in film layer.
Prevent flexible touch base plate 23 in stripping process to more easily control remove flexible touch base plate 23 with reference to Fig. 5
Damage, S305 can carry out strip step in such a way that laser lift-off and mechanical stripping combine, due to flexible in dead space
The contact of substrate 231 and carrier substrate 21, adhesion strength is stronger, can using carrier substrate 21 in laser ablation dead space with it is soft
Property substrate 231 interface, realize flexible substrate 231 and carrier substrate 21 separation, then use mechanical stripping mode will be entire
Flexible touch base plate 23 is removed.
The embodiment of the invention also provides a kind of flexible touch substrates.Fig. 9 is a kind of flexibility provided in an embodiment of the present invention
Touch the structural schematic diagram of substrate.With reference to Fig. 9, flexible touch substrate 23 includes flexible substrate 231 and touch control layer 232, flexible liner
Include effective district 41 and dead space 42 in bottom 231, the area of the touch control unit is provided in the corresponding touch control layer 232 of effective district 41
Domain, dead space 42 correspond to the region in the touch control layer 232 between touch control unit.In addition to this it is possible to be used for including other
Film layer necessary to the flexible touch substrates such as encapsulation, barrier water oxygen.Wherein, the flexible touch substrate 23 is to pass through above-mentioned implementation
The flexible touch substrate of the preparation method preparation of example, above-mentioned flexible touch substrate can be applied in flexible display screen.
Flexibility touch base plate provided by the embodiment of the present invention, due to during the preparation process in carrier substrate and flexible touch
Hydrophobic film layer is increased between substrate, by changing and restoring hydrophobic film layer to water compatibility, to regulate and control the table of hydrophobic film layer
Face adhesion strength ensure that flexible touch substrate can be firmly secured on carrier substrate in preparatory phase, in stripping bench energy
Easily peel off out flexible touch substrate, avoid in stripping process touch substrate damage, improve flexible touch substrate from
The yield and efficiency of type.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (13)
1. a kind of preparation method of flexible touch substrate characterized by comprising
Hydrophobic film layer is formed on carrier substrate, the material in the hydrophobic film layer is super hydrophobic material；
Surface modification treatment is carried out to the hydrophobic film layer, so that surface of the hydrophobic film layer far from the carrier substrate side
With hydrophily；
Flexible touch substrate is formed far from the surface of the carrier substrate side in the hydrophobic film layer；
Restore the hydrophobicity of the hydrophobic film layer；
Separate the flexible touch substrate.
2. preparation method according to claim 1, which is characterized in that formed before hydrophobic film layer on carrier substrate, also
Include:
Carrier substrate is surface-treated so that the carrier substrate close to the hydrophobic film layer side surface have it is hydrophilic
Property.
3. preparation method according to claim 1, which is characterized in that the flexible touch substrate includes flexible substrate and position
In touch control layer of the flexible substrate far from the carrier substrate side；The touch control layer includes touch control unit；The carrier base
Plate includes effective district and dead space, and the effective district corresponds to the region that the touch control unit is provided in the touch control layer, described
Dead space corresponds to the region between touch control unit described in the touch control layer；
Hydrophobic film layer is formed on carrier substrate, comprising:
The effective district by coating process in the carrier substrate is coated with the super hydrophobic material.
4. preparation method according to claim 3, which is characterized in that in the hydrophobic film layer far from the carrier substrate one
The surface of side forms flexible touch substrate, comprising:
Polyimides is covered on the dead space of the carrier substrate and the hydrophobic film layer, forms the flexible liner
Bottom；
The touch control layer is formed far from the side of the carrier substrate in the flexible substrate.
5. preparation method according to claim 3, which is characterized in that be coated with institute in the effective district of the carrier substrate
State super hydrophobic material, comprising:
Super hydrophobic material described in a flood is coated on the carrier substrate；
The super thin of the dead space of the carrier substrate is removed by photoetching process, nano-imprint process or dry and wet etch process
Water material.
6. preparation method according to claim 3, which is characterized in that the coating process includes spin coating, spraying, slit type
Coating and bar coating.
7. preparation method according to claim 3, which is characterized in that separating the flexible touch substrate includes:
The flexible touch substrate is removed from the carrier substrate of the dead space by the way of laser lift-off；
The flexible touch substrate is removed from the hydrophobic film layer by the way of mechanical stripping.
8. preparation method according to claim 1, which is characterized in that the super hydrophobic material includes super-hydrophobic polytetrafluoroethyl-ne
Alkene or super-hydrophobic polyimides.
9. preparation method according to claim 1, which is characterized in that the thickness of the hydrophobic film layer is greater than 100nm and small
In 5 μm.
10. preparation method according to claim 1, which is characterized in that described to carry out surface modification treatment to hydrophobic film layer
Include:
Using at least one of oxygen plasma, hydrogen plasma, ultraviolet light photodissociation ozone and dilute hydrofluoric acid solution to described
Hydrophobic film layer carries out surface modification treatment, so that the contact angle of the hydrophobic film layer is less than 50 degree.
11. preparation method according to claim 1, which is characterized in that the hydrophobicity for restoring the hydrophobic film layer includes:
The hydrophobic film layer is made annealing treatment, so that the contact angle of the hydrophobic film layer is greater than 100 degree.
12. preparation method according to claim 11, which is characterized in that the temperature of the annealing be greater than 150 DEG C,
The time of the annealing is greater than 30 minutes.
13. a kind of flexible touch substrate, which is characterized in that the flexible touch substrate passes through described in any one of claim 1-12
Preparation method be prepared.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711037001.3A CN109725752B (en) | 2017-10-30 | 2017-10-30 | Preparation method of flexible touch substrate and flexible touch substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711037001.3A CN109725752B (en) | 2017-10-30 | 2017-10-30 | Preparation method of flexible touch substrate and flexible touch substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109725752A true CN109725752A (en) | 2019-05-07 |
| CN109725752B CN109725752B (en) | 2022-06-17 |
Family
ID=66291900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711037001.3A Active CN109725752B (en) | 2017-10-30 | 2017-10-30 | Preparation method of flexible touch substrate and flexible touch substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109725752B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110176555A (en) * | 2019-05-31 | 2019-08-27 | 京东方科技集团股份有限公司 | OLED display panel and preparation method thereof |
| CN110739337A (en) * | 2019-10-24 | 2020-01-31 | 云谷（固安）科技有限公司 | Flexible substrate, display panel and preparation method of display panel |
| CN112967979A (en) * | 2020-07-14 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | Transfer substrate, manufacturing method thereof and chip transfer method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103176631A (en) * | 2011-12-20 | 2013-06-26 | 上海天马微电子有限公司 | Touch base board, touch screen and touch display device |
| CN103707565A (en) * | 2013-12-31 | 2014-04-09 | 北京维信诺科技有限公司 | Basal plate structure and method for adhering and stripping flexible substrate |
| CN105093725A (en) * | 2015-09-15 | 2015-11-25 | 京东方科技集团股份有限公司 | Array substrate, display panel and display device |
| CN106293210A (en) * | 2016-08-01 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of touch base plate and preparation method thereof, contact panel, touch control display apparatus |
| CN106448473A (en) * | 2016-12-16 | 2017-02-22 | 京东方科技集团股份有限公司 | Display panel mother board and preparation method of display panel |
| CN106784353A (en) * | 2016-12-28 | 2017-05-31 | 京东方科技集团股份有限公司 | Board unit, display base plate motherboard, display base plate and preparation method, display |
-
2017
- 2017-10-30 CN CN201711037001.3A patent/CN109725752B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103176631A (en) * | 2011-12-20 | 2013-06-26 | 上海天马微电子有限公司 | Touch base board, touch screen and touch display device |
| CN103707565A (en) * | 2013-12-31 | 2014-04-09 | 北京维信诺科技有限公司 | Basal plate structure and method for adhering and stripping flexible substrate |
| CN105093725A (en) * | 2015-09-15 | 2015-11-25 | 京东方科技集团股份有限公司 | Array substrate, display panel and display device |
| CN106293210A (en) * | 2016-08-01 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of touch base plate and preparation method thereof, contact panel, touch control display apparatus |
| CN106448473A (en) * | 2016-12-16 | 2017-02-22 | 京东方科技集团股份有限公司 | Display panel mother board and preparation method of display panel |
| CN106784353A (en) * | 2016-12-28 | 2017-05-31 | 京东方科技集团股份有限公司 | Board unit, display base plate motherboard, display base plate and preparation method, display |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110176555A (en) * | 2019-05-31 | 2019-08-27 | 京东方科技集团股份有限公司 | OLED display panel and preparation method thereof |
| CN110176555B (en) * | 2019-05-31 | 2021-12-17 | 京东方科技集团股份有限公司 | OLED display panel and manufacturing method thereof |
| CN110739337A (en) * | 2019-10-24 | 2020-01-31 | 云谷（固安）科技有限公司 | Flexible substrate, display panel and preparation method of display panel |
| CN110739337B (en) * | 2019-10-24 | 2022-06-17 | 云谷（固安）科技有限公司 | Flexible substrate, display panel and preparation method of display panel |
| CN112967979A (en) * | 2020-07-14 | 2021-06-15 | 重庆康佳光电技术研究院有限公司 | Transfer substrate, manufacturing method thereof and chip transfer method |
| CN112967979B (en) * | 2020-07-14 | 2022-10-21 | 重庆康佳光电技术研究院有限公司 | Transfer substrate, manufacturing method thereof and chip transfer method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109725752B (en) | 2022-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10593898B2 (en) | Base carrier, flexible display panel and manufacturing method thereof, flexible display device | |
| CN102637584B (en) | Transfer preparation method of patterned graphene | |
| CN109725752A (en) | A kind of preparation method and flexible touch substrate of flexible touch substrate | |
| CN106057864B (en) | A kind of flexible display panels and preparation method thereof | |
| KR101113849B1 (en) | Method for isolating flexible substrate from support substrate | |
| CN105690974B (en) | Fexible film fitting and stripping means, flexible base board preparation method, underlay substrate | |
| CN103456900B (en) | The manufacture method of flexible display apparatus | |
| WO2019100433A1 (en) | Method for preparing led display, and led display | |
| CN103682176A (en) | Manufacturing method for rigid substrate and flexible display device and rigid substrate | |
| KR20100115297A (en) | Method for isolating flexible film from support substrate | |
| CN104192833A (en) | Transfer method of graphene film | |
| CN104201283A (en) | Substrate and base plate separation process, sacrificial layer and flexible display device and production process thereof | |
| CN108517555B (en) | Method for obtaining large-area high-quality flexible self-supporting monocrystalline oxide film based on Van der Waals epitaxy | |
| CN105493287A (en) | Preparation method of flexible display device | |
| WO2018152889A1 (en) | Preparation method for flexible substrate | |
| CN106935546A (en) | The preparation method of array base palte, array base palte, display panel and display device | |
| CN107195658B (en) | Flexible substrate and manufacturing method thereof | |
| JP2015108735A (en) | Manufacturing method of electronic device | |
| JPH04299873A (en) | Manufacture of photovoltaic device | |
| CN101561629A (en) | Method for manufacturing gradual slope of medium edge by photoresist with inverse trapezium section | |
| CN108319403A (en) | A kind of manufacturing method of ultra-thin capacitance touch screen | |
| CN203850300U (en) | Flexible display panel and display apparatus | |
| CN107180754A (en) | Method of plasma processing | |
| CN108242393A (en) | A kind of manufacturing method of semiconductor devices | |
| CN106166864B (en) | A kind of method that corona method prepares low square resistance graphene film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 1568 Jiugong Road, Jinshan District, Shanghai, 201506 Applicant after: Shanghai Hehui optoelectronic Co.,Ltd. Address before: 1568 Jiugong Road, Jinshan District, Shanghai, 201506 Applicant before: EVERDISPLAY OPTRONICS (SHANGHAI) Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |