CN109725325A - Laser tracking measurement system and method - Google Patents

Laser tracking measurement system and method Download PDF

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Publication number
CN109725325A
CN109725325A CN201910025848.2A CN201910025848A CN109725325A CN 109725325 A CN109725325 A CN 109725325A CN 201910025848 A CN201910025848 A CN 201910025848A CN 109725325 A CN109725325 A CN 109725325A
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China
Prior art keywords
galvanometer
laser
detection target
information
measurement system
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CN201910025848.2A
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Chinese (zh)
Inventor
纪荣祎
张滋黎
王国名
周维虎
董登峰
劳达宝
崔成君
潘映伶
袁江
石俊凯
程智
高书苑
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Priority to CN201910025848.2A priority Critical patent/CN109725325A/en
Publication of CN109725325A publication Critical patent/CN109725325A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a kind of laser tracking measurement system and methods, laser tracking measurement system, it include: laser, spectroscope, the first galvanometer, the second galvanometer, position sensor and tracing control module, wherein, the laser that laser generates passes through the first galvanometer of spectroscope directive, by the second galvanometer of directive after the first vibration mirror reflected, target is detected by directive after the second vibration mirror reflected, the laser beam that detection target is reflected back passes sequentially through the second galvanometer, the first galvanometer and spectroscope and reflexes to position sensor;The tracing control module, for obtaining the angle information of the first galvanometer and the second galvanometer, the location information in position sensor, and issue galvanometer deflection angle control signal and control the first galvanometer and the second galvanometer and deflected the detection target so that after laser directive shift in position, realize that the dynamic realtime to detection target tracks.The system have the advantages that detection in real time, accuracy is high, precision is high, miniaturization and at low cost.

Description

Laser tracking measurement system and method
Technical field
The disclosure belongs to accurate laser measurement technical field, is related to a kind of laser tracking measurement system and method.
Background technique
Laser tracking measurement system is a kind of large scale space measurement instrument, combined high precision laser ranging, precision angle With the technologies such as tracing control, spatial position tracking measurement can be carried out to extraterrestrial target and quick face type is carried out to plane/curved surface surveying Amount has many advantages, such as that no guide rail, dynamic rapid survey, measurement accuracy are high, measurement range is big, installation movement is convenient, is large scale The important means of commercial measurement and scientific measurement.Laser tracking measurement system mainly includes high-precision laser range-finding unit, two dimension Precise rotating platform, two-dimentional precision angle mechanism, tracing control data processing unit and cooperative target etc..
Existing laser tracking measurement system mainly uses laser interferometer as precise distance measurement unit, using U-shaped frame knot The dimensional turntable of structure is multiple with system structure using two disk light beam encoders as precision angle unit as follower Disadvantage miscellaneous, volume is big, cost of implementation is high limits the extensive use of laser tracking measurement system.
Summary of the invention
(1) technical problems to be solved
Present disclose provides a kind of laser tracking measurement system and methods, at least partly to solve technology set forth above Problem.
(2) technical solution
According to one aspect of the disclosure, a kind of laser tracking measurement system is provided, comprising: laser 11, spectroscope 12, the first galvanometer 13, the second galvanometer 15, position sensor 18 and tracing control module 19, wherein the laser that laser 11 generates It is reflected by the second galvanometer of directive 15 after the reflection of the first galvanometer 13 by the second galvanometer 15 by 12 the first galvanometer of directive 13 of spectroscope Directive detects target 17 afterwards, the laser beam that is reflected back of detection target 17 pass sequentially through the second galvanometer 15, the first galvanometer 13 and Spectroscope 12 reflexes to position sensor 18;The tracing control module 19, for obtaining the first galvanometer 13 and the second galvanometer 15 Angle information, the location information in position sensor 18, and issue galvanometer deflection angle control signal and control the first galvanometer 13 The detection target 17 so that after laser directive shift in position is deflected with the second galvanometer 15, realizes the dynamic to detection target 17 Real-time tracking.
In some embodiments of the present disclosure, laser tracking measurement system, further includes: the first driving motor 14, for driving Dynamic first galvanometer 13 is deflected;And second driving motor 16, for driving the second galvanometer 14 to be deflected.
In some embodiments of the present disclosure, the galvanometer deflection angle in galvanometer deflection angle control signal is according to acquisition Current time the first galvanometer 13 and the second galvanometer 15 angle information and position sensor in positional shift information, and combine The range information of current time detection target 17 is calculated, which is detection 17 last moment of target to working as The position offset for the laser beam that preceding moment shift in position back reflection returns, galvanometer deflection angle can offset detection target 17 The optical path change that offset causes is set, enabling the detection target 17 after shift in position by laser, incident and reflection laser is extremely again Position sensor 18.
In some embodiments of the present disclosure, spectroscope 12 is plane mirror or Amici prism.
In some embodiments of the present disclosure, tracing control module 19 be a hardware or computer program, or combinations thereof.
In some embodiments of the present disclosure, position sensor 18 includes one or more of following detector: light guide Type detector and photovoltaic detector;And/or laser 11 further include: laser ranging module, for obtaining detection target 17 Range information.
A kind of any laser tracking measurement system mentioned based on the disclosure another aspect of the present disclosure provides The method that system realizes laser tracking measurement, comprising: when detection target 17 is in first position, obtain swashing in position sensor 18 Light light-beam position information;When detecting the generation of target 17 one position movement in the second position, the laser beam being reflected back is corresponded to A position offset is generated on position sensor 18, tracing control module 19 obtains current time the first galvanometer 13 and the second galvanometer The position offset for the laser beam being reflected back in 15 angle information and position sensor 18, according to the current time obtained Position offset in the angle information and position sensor of first galvanometer 13 and the second galvanometer 15, and current time is combined to detect Galvanometer deflection angle is calculated in the range information of target 17;And tracing control module 19 sends galvanometer deflection angle control letter Number the first galvanometer 13 of control and the second galvanometer 15 are deflected the detection target 17 so that after laser directive shift in position, are realized pair Detect the dynamic realtime tracking of target 17.
In some embodiments of the present disclosure, tracing control module 19 controls signal control by sending galvanometer deflection angle First driving motor 14 and the second driving motor 16 are deflected to control the first galvanometer 13 and the second galvanometer 15.
In some embodiments of the present disclosure, galvanometer deflection angle controls signal and controls the first galvanometer 13 and the second galvanometer 15 In a galvanometer deflect, or control two galvanometers deflect simultaneously.
In some embodiments of the present disclosure, the range information that current time detects target 17 passes through swashing in laser 11 Ligh-ranging module obtains.
(3) beneficial effect
It can be seen from the above technical proposal that laser tracking measurement system and method that the disclosure provides, have with following Beneficial effect:
Using 2-D vibration mirror as tracking rotating mechanism, reflected light path is caused to correspond to when shift in position occurs for detection target After positional shift occurs on position sensor, the angle information of the current galvanometer obtained by tracing control module foundation is reflected back Laser beam positional shift information and detect target range information, the deflection angle of galvanometer is calculated to offset The optical path change that target position offset causes is detected, enables the detection target after shift in position incident and anti-again by laser Laser is penetrated to position sensor, the deflection angle control information that galvanometer is issued according to tracing control module carries out real-time tracking spy It surveys;The real-time measure and control of tracking angle is carried out using the position feedback information of 2-D vibration mirror, is realized to tracking object space angle The real-time measurement of degree, thus realize that the direction to tracking laser beam controls and the dynamic realtime of detection target tracks, it is substantially simple The system structure for having changed tracking rotating mechanism and angle measurement mechanism reduces the system complexity of tracking rotation and angle measurement structure, subtracts The small volume weight and cost of implementation of laser tracking measurement system, have detection in real time, accuracy is high, precision is high, miniaturization With advantage at low cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the laser tracking measurement system according to shown in one embodiment of the disclosure.
Fig. 2 is the flow chart of the laser tracking measurement method according to shown in one embodiment of the disclosure.
[symbol description]
11- laser;12- spectroscope;
The first galvanometer of 13-;The first driving motor of 14-;
The second galvanometer of 15-;The second driving motor of 16-;
17- detects target/reflection target ball;18- position sensor;
19- tracing control module.
Specific embodiment
Galvanometer is a kind of excellent vector scan device, it is a kind of special oscillating motor, and basic principle is switched on line Circle generates torque in magnetic field, but different from rotating electric machine, by the method for mechanical knob spring or electronics added with multiple on rotor Position torque, size and rotor the deviation angle of equilbrium position are directly proportional, when coil passes to certain electric current and rotor deflects When to certain angle, electromagnetic torque is equal in magnitude with restoring moment, therefore cannot rotate as ordinary motor, can only deflect, Deflection angle is directly proportional to electric current.
Existing laser galvanometer be mainly used in laser marking, body laser inner carving, light of stage control, laser boring neck Domain, in laser tracking measurement field there are no the method that document report uses galvanometer, the disclosure is based on existing in the prior art sharp It light tracing measurement system the problem of structure is complicated, proposes a kind of laser tracking measurement system and method based on galvanometer, will shake Mirror inventive application using 2-D vibration mirror as tracking rotating mechanism, and utilizes high-precision to accurate laser measurement technical field Position sensor obtain detection target Returning beam position offset, and laser beam position offset and galvanometer are worked as Preceding angle information passes to tracing control module, and tracing control module calculates the deflection angle of galvanometer to offset detection target position Set the optical path change that offset causes, enable the detection target after shift in position by laser again incident and reflection laser to position Detector is set, to realize that the direction to tracking laser beam is controlled and tracked to the dynamic realtime of detection target, there is detection In real time, accuracy height, precision height, miniaturization and advantage at low cost.
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference The disclosure is further described in attached drawing.
In first exemplary embodiment of the disclosure, a kind of laser tracking measurement system is provided.
Fig. 1 is the structural schematic diagram of the laser tracking measurement system according to shown in one embodiment of the disclosure.
Shown in referring to Fig.1, the laser tracking measurement system of the disclosure, comprising: laser 11, spectroscope 12, the first galvanometer 13, the second galvanometer 15, position sensor 18 and tracing control module 19, wherein the laser that laser 11 generates passes through spectroscope 12 the first galvanometers of directive 13 are detected by the second galvanometer of directive 15 after the reflection of the first galvanometer 13 by directive after the reflection of the second galvanometer 15 Target 17, it is anti-that the laser beam that detection target 17 is reflected back passes sequentially through the second galvanometer 15, the first galvanometer 13 and spectroscope 12 It is incident upon position sensor 18;Tracing control module 19, for obtaining angle information, the position of the first galvanometer 13 and the second galvanometer 15 Location information in detector 18, and issue galvanometer deflection angle control signal and control the first galvanometer 13 and the progress of the second galvanometer 15 The detection target 17 so that after laser directive shift in position is deflected, realizes that the dynamic realtime to detection target 17 tracks.
Wherein, the galvanometer deflection angle in galvanometer deflection angle control signal is according to the first galvanometer of current time obtained 13 and second galvanometer 15 angle information and position sensor in positional shift information, and combine current time detect target 17 Range information be calculated, which is anti-after detection target 17 last moment to current time shift in position The position offset for the laser beam being emitted back towards, galvanometer deflection angle can offset the optical path that detection 17 positional shift of target causes and become Change, enable the detection target 17 after shift in position by laser again incident and reflection laser to position sensor 18.
In the present embodiment, laser tracking measurement system, further includes: the first driving motor 14, for driving the first galvanometer 13 It is deflected;And second driving motor 16, for driving the second galvanometer 14 to be deflected.
In the present embodiment, detection target 17 is a reflection target ball 17, and the laser beam being reflected back corresponds to hot spot.
Laser 11 emits laser, while further including laser ranging module in laser 11, which obtains Detect the range information of target 17.In the present embodiment, laser ranging module carries out ranging using impulse method or time-sharing procedure;Other In embodiment, laser ranging module carries out ranging in the way of phase delay, or uses laser triangulation principle and/or echo Analysis principle carries out range measurement.
In some embodiments of the present disclosure, spectroscope 12 is plane mirror or Amici prism.
In some embodiments of the present disclosure, tracing control module 19 be a hardware or computer program, or combinations thereof.
In some embodiments of the present disclosure, position sensor 18 includes one or more of following detector: light guide Type detector, photovoltaic detector, Schottky barrier diode and quantum well photoelectric detector.
In some embodiments of the present disclosure, galvanometer deflection angle controls signal and controls the first galvanometer 13 and the second galvanometer 15 In a galvanometer deflect, or control two galvanometers deflect simultaneously.
In the present embodiment, dotted line schematic communication relationship in Fig. 1, the direction schematic communication direction of double-head arrow, tracing control Module 19 is being counted for obtaining the angle information of the first galvanometer 13 and the second galvanometer 15, the location information in position sensor 18 When calculating galvanometer deflection angle, the range information of detection target 17 is also obtained by the laser ranging module in laser 11, concurrently Galvanometer deflection angle control signal controls the first galvanometer 13 out and the second galvanometer 15 is deflected so that laser directive shift in position Detection target 17 afterwards.
In the laser tracking measurement system of the present embodiment, tracking light beam is emitted by laser 11, then anti-by reflection target ball 17 It is emitted back towards and, carry out facula position detection.By the reflected facula position of 18 direct detection of position sensor, F- θ is not used Lens, which carry out hot spot focusing, has the advantages that facula position speed of detection is fast not by the way of camera imaging.Tracing control mould Block 19 passes through the facula position offset detected, 2-D vibration mirror current yaw angle degree information and the range information for reflecting target ball The deflection angle control information of 2-D vibration mirror is calculated, control 2-D vibration mirror will emit light beam and be directed toward reflecting target ball center, real Now to the real-time tracking of reflection target ball.
In the disclosure, the effect of 2-D vibration mirror (including the first galvanometer and the second galvanometer) is included at least: control shoot laser The change direction of light beam makes it be directed toward the center of reflection target ball, the dynamic motion of tracking reflection target ball.By controlling the first galvanometer Realize the dynamically track to reflection target ball with the deflection angle of the second galvanometer, the acquisition that galvanometer deflection angle controls information need by It facula position offset, 2-D vibration mirror current yaw angle degree information and reflects range information these three data of target ball and calculates Out.
In second exemplary embodiment of the disclosure, a kind of laser tracking measurement system based on the disclosure is provided The method for realizing laser tracking measurement.
The flow chart of Fig. 2 laser tracking measurement method according to shown in one embodiment of the disclosure.
Referring to shown in Fig. 2, in the present embodiment, the method for laser tracking measurement, comprising:
Step S21: when detection target 17 is in first position, the laser beam position letter in position sensor 18 is obtained Breath;
Step S22: when detection target 17 generates position movement in the second position, the laser beam being reflected back is corresponded to A position offset is generated on position sensor 18, tracing control module 19 obtains current time the first galvanometer 13 and the second galvanometer The position offset for the laser beam being reflected back in 15 angle information and position sensor 18, according to the current time obtained Position offset in the angle information and position sensor of first galvanometer 13 and the second galvanometer 15, and current time is combined to detect Galvanometer deflection angle is calculated in the range information of target 17;
Step S23: tracing control module 19 sends galvanometer deflection angle control signal control the first galvanometer 13 and the second vibration Mirror 15 is deflected the detection target 17 so that after laser directive shift in position, realize to the dynamic realtime of detection target 17 with Track;
In some embodiments of the present disclosure, tracing control module 19 controls signal control by sending galvanometer deflection angle First driving motor 14 and the second driving motor 16 are deflected to control the first galvanometer 13 and the second galvanometer 15.
In some embodiments of the present disclosure, galvanometer deflection angle controls signal and controls the first galvanometer 13 and the second galvanometer 15 In a galvanometer deflect, or control two galvanometers deflect simultaneously.
In some embodiments of the present disclosure, the range information that current time detects target 17 passes through swashing in laser 11 Ligh-ranging module obtains.Certainly, in other embodiments, can be obtained by other modules or method detection target away from It since laser ranging is very mature in this field, and is not the main innovation point of the disclosure, which is not described herein again, ability from information Field technique personnel can carry out adaptability setting according to actual needs.
In conclusion present disclose provides a kind of laser tracking measurement system and method, using 2-D vibration mirror as tracking Rotating mechanism, after detecting target generation shift in position causes reflected light path is corresponding positional shift occurs on position sensor, By tracing control module according to the angle information of current galvanometer, the laser beam being reflected back that obtain positional shift information, with And the range information of detection target, the deflection angle of galvanometer is calculated to offset the optical path that the offset of detection target position causes and become Change, enable the detection target after shift in position by laser again incident and reflection laser to position sensor, galvanometer according to The deflection angle control information that tracing control module issues carries out real-time tracking detection;Utilize the position feedback information of 2-D vibration mirror The real-time measure and control of tracking angle is carried out, realizes the real-time measurement to tracking object space angle, tracking is swashed to realize The direction control of light light beam and the dynamic realtime tracking of detection target, have significantly simplified tracking rotating mechanism and angle measurement mechanism are System structure, reduces the system complexity of tracking rotation and angle measurement structure, reduces the volume weight of laser tracking measurement system And cost of implementation, have the advantages that detection in real time, accuracy is high, precision is high, miniaturization and at low cost.
It should be noted that word "comprising" or " comprising " do not exclude the presence of element or step not listed in the claims Suddenly.Word "a" or "an" located in front of the element does not exclude the presence of multiple such elements.
The word of ordinal number such as " first ", " second ", " third " etc. used in specification and claim, with modification Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used to enable an element and another tool with certain name Clear differentiation can be made by having the element of identical name.
In addition, unless specifically described or the step of must sequentially occur, there is no restriction in the above institute for the sequence of above-mentioned steps Column, and can change or rearrange according to required design.And above-described embodiment can be based on the considerations of design and reliability, that This mix and match is used using or with other embodiments mix and match, i.e., the technical characteristic in different embodiments can be freely combined Form more embodiments.
Tracing control module in the disclosure can be by means of including the hardware of several different elements and by means of suitable When the computer of programming is realized.The tracing control module of the disclosure can be implemented in hardware, or at one or more The software module run on processor is realized, or is implemented in a combination thereof.It will be understood by those of skill in the art that can be with It is realized in practice using microprocessor or digital signal processor DSP in the correlation module according to the embodiment of the present disclosure Some or all functions.The disclosure is also implemented as executing some or all of method as described herein Device or device program is for example, computer program and computer program product.Such program for realizing the disclosure can deposit Storage on a computer-readable medium, or may be in the form of one or more signals.Such signal can be from because of spy It downloads and obtains on net website, be perhaps provided on the carrier signal or be provided in any other form.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure Within the scope of shield.

Claims (10)

1. a kind of laser tracking measurement system characterized by comprising laser (11), spectroscope (12), the first galvanometer (13), the second galvanometer (15), position sensor (18) and tracing control module (19),
Wherein, the laser that laser (11) generates passes through spectroscope (12) first galvanometer of directive (13), anti-by the first galvanometer (13) Rear the second galvanometer of directive (15) is penetrated, by directive detection target (17) after the second galvanometer (15) reflection, detection target (17) is reflected back Laser beam pass sequentially through the second galvanometer (15), the first galvanometer (13) and spectroscope (12) and reflex to position sensor (18);
The tracing control module (19), for obtaining the angle information of the first galvanometer (13) and the second galvanometer (15), position is visited The location information in device (18) is surveyed, and issues galvanometer deflection angle control signal control the first galvanometer (13) and the second galvanometer (15) Deflected the detection target (17) so that after laser directive shift in position, realize to the dynamic realtime of detection target (17) with Track.
2. laser tracking measurement system according to claim 1, which is characterized in that further include:
First driving motor (14), for driving the first galvanometer (13) to be deflected;And
Second driving motor (16), for driving the second galvanometer (14) to be deflected.
3. laser tracking measurement system according to claim 1, which is characterized in that the galvanometer deflection angle controls signal In galvanometer deflection angle be according to obtain the first galvanometer of current time (13) and the second galvanometer (15) angle information and position The positional shift information in detector is set, and the range information of current time detection target (17) is combined to be calculated, the position Setting offset information is the position offset for detecting the laser beam that target last moment to current time shift in position back reflection returns, The galvanometer deflection angle can offset the optical path change that the offset of detection target position causes, so that the detection mesh after shift in position Mark (17) can and reflection laser incident again by laser to position sensor (18).
4. laser tracking measurement system according to claim 1, which is characterized in that the spectroscope (12) be plane mirror or Amici prism.
5. laser tracking measurement system according to claim 1, which is characterized in that the tracing control module (19) is one Hardware or computer program, or combinations thereof.
6. laser tracking measurement system according to claim 1, which is characterized in that
The position sensor (18) includes one or more of following detector: photoconductive detectors and photovoltaic type detection Device;And/or
The laser (11) further include: laser ranging module, for obtaining the range information of detection target (17).
7. a kind of side for realizing laser tracking measurement based on laser tracking measurement system described in any one of claims 1 to 6 Method characterized by comprising
When detection target (17) is in first position, the laser beam position information in position sensor (18) is obtained;
When detecting target (17) generation one position movement in the second position, the laser beam being reflected back is corresponding in position sensor (18) position offset is generated on, tracing control module (19) obtains the first galvanometer of current time (13) and the second galvanometer (15) Angle information and position sensor (18) in the position offset of laser beam that is reflected back, according to the current time obtained Position offset in the angle information and position sensor of first galvanometer (13) and the second galvanometer (15), and combine current time Galvanometer deflection angle is calculated in the range information of detection target (17);And
Tracing control module (19) send galvanometer deflection angle control signal control the first galvanometer (13) and the second galvanometer (15) into Horizontal deflection makes the detection target (17) after laser directive shift in position, realizes and tracks to the dynamic realtime of detection target (17).
8. the method according to the description of claim 7 is characterized in that the tracing control module (19) is by sending galvanometer deflection Angle control signal control the first driving motor (14) and the second driving motor (16) shake to control the first galvanometer (13) and second Mirror (15) is deflected.
9. the method according to the description of claim 7 is characterized in that galvanometer deflection angle control signal controls the first galvanometer (13) galvanometer and in the second galvanometer (15) deflects, or two galvanometers of control deflect simultaneously.
10. the method according to the description of claim 7 is characterized in that the range information of current time detection target (17) It is obtained by the laser ranging module in laser (11).
CN201910025848.2A 2019-01-10 2019-01-10 Laser tracking measurement system and method Pending CN109725325A (en)

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CN111211838A (en) * 2019-12-02 2020-05-29 中国科学院西安光学精密机械研究所 Target extraction and tracking camera and method of inter-satellite laser communication PAT system
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CN113634925A (en) * 2021-07-27 2021-11-12 江苏先河激光研究院有限公司 Laser rotary cutting processing system and method
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