CN109718875A - A method of based on polyurethane film integrated on PDMS microfluidic structures - Google Patents
A method of based on polyurethane film integrated on PDMS microfluidic structures Download PDFInfo
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- CN109718875A CN109718875A CN201811588911.5A CN201811588911A CN109718875A CN 109718875 A CN109718875 A CN 109718875A CN 201811588911 A CN201811588911 A CN 201811588911A CN 109718875 A CN109718875 A CN 109718875A
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- polyurethane film
- microfluidic structures
- pdms
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- elastic polyurethane
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Abstract
The invention discloses a kind of based on the method for integrating polyurethane film on PDMS microfluidic structures, includes the following steps: that (1) takes the microfluidic structures based on PDMS, cleaning, drying are spare；(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film；(3) treated step (1) and (2) microfluidic structures and elastic polyurethane film are subjected to oxygen plasma treatment；(4) by after step (3) corona treatment microfluidic structures and elastic polyurethane film bonding face be aligned rapidly after press and heat, so that microfluidic structure surfaces is integrated elastic polyurethane film.Air-tightness is good compared with the existing technology for product of the invention, for manufacturing Pneumatic diaphragm valve, performance can be improved, be worthy to be popularized.
Description
Technical field
The present invention relates to microfluidic structures preparation methods, in particular to a kind of to be based on integrating poly- ammonia on PDMS microfluidic structures
The method of ester film.
Background technique
Micro-fluidic chip is the hot fields of current micro-total analysis system development, by integrating a change on one chip
Or biology laboratory realize the functions such as chemical sample preparation, reaction, separation and cell culture in biological field, sorting.
Sample needed for the technology is few, and detection time is short, and high sensitivity is at low cost, is widely used in scientific research, environmental protection, medicine, biochemistry etc.
Field.
In microflow control technique development process, the soft lithography based on dimethyl silicone polymer (PDMS) is widely used in
Micro-fluidic chip is prepared, but since PDMS has gas permeability, is easy to penetrate high pressure gas when preparing Pneumatic diaphragm valve with it
PDMS film enters in fluid channel, to influence the performance of PDMS Pneumatic diaphragm valve；In addition, the resilience of PDMS film and
Service life is all not so good as polyurethane film.For polyurethane film since its elongation is prominent, resilience performance is excellent, can be integrated into miniflow
It controls on chip, but the method for integrated polyurethane film remains unsolved on the microfluidic structures based on PDMS.Bonding PDMS at present
With the PDMS of semi-solid preparation is mostly used when polyurethane material as the bridge of bonding, i.e., using semi-solid preparation PDMS as adhesive and poly- ammonia
Ester realizes bonding.Bonding method step is complicated, operating difficulties, and semi-solid preparation PDMS will affect the fineness of micro-structure and complete
Property, it is unfavorable for the preparation of micro-fluidic chip, it is therefore desirable to find the relatively reliable method of one kind and come based on PDMS microfluid knot
Polyurethane film is integrated on structure.
Summary of the invention
Goal of the invention: it is an object of the present invention to provide a kind of based on the side for integrating polyurethane film on PDMS microfluidic structures
Method, this method products air tightness is good, and for manufacturing Pneumatic diaphragm valve, performance can be improved.
Technical solution: the present invention provides a kind of method based on polyurethane film integrated on PDMS microfluidic structures, including
Following steps:
(1) microfluidic structures based on PDMS are taken, cleaning, drying are spare；
(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film；
(3) treated step (1) and (2) microfluidic structures and elastic polyurethane film are subjected to corona treatment；
(4) by after step (3) corona treatment microfluidic structures and elastic polyurethane film bonding face be aligned rapidly
After press and heat, so that microfluidic structure surfaces is integrated elastic polyurethane film.
Further, cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water in the step (1)
Body.Drying is dried up using nitrogen gun in the step (1).
Further, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, solid in the step (2)
Content is greater than 35%.
Further, step (3) the plasma processing method is by the microfluidic structures and elastic polyurethane
Film is put into oxygen plasma cleaning machine, is passed through the mixed gas of oxygen and air, in cabin air pressure maintain 350mtorr~
400mtorr starts plasma cleaner, radio-frequency power is adjusted to 30W, the processing time is 30s~60s.
Further, the time to press in the step (4) is 15min~20min.The temperature of heating is 70 DEG C~110
DEG C, heating time is 2 hours or more.
The utility model has the advantages that present invention air-tightness after based on polyurethane film integrated on PDMS microfluidic structures is good, made with it
It is not easy to enter high pressure gas in fluid channel through PDMS film when standby Pneumatic diaphragm valve, so that it is pneumatically thin to improve PDMS
The performance of film valve, prolongs the service life；Elastic polyurethane forming thin film is uniform and thinner, and elongation is prominent, and resilience performance is excellent,
Air-tightness is good；Plasma-treating technology is environmentally protective, at low cost；Present invention process process is simple, versatile, yield rate
Height, bond strength is high, is not likely to produce leakage.
Detailed description of the invention
Fig. 1 is flow chart of the present invention；
Fig. 2 is that the present invention is based on the structural schematic diagrams of PDMS microfluidic structures；
Fig. 3 is the structural schematic diagram of elastic polyurethane film of the present invention；
Fig. 4 is oxygen plasma treatment method schematic diagram in the present invention；
Fig. 5 is product of the present invention structural schematic diagram.
Specific embodiment
Embodiment 1
As shown in Figs. 1-5, method of the present embodiment based on polyurethane film integrated on PDMS microfluidic structures, including it is as follows
Step:
(1) microfluidic structures 101 based on PDMS are taken, cleaning, drying are spare, wherein cleaning is first to be cleaned with isopropanol,
Remained on surface liquid is washed away with deionized water again.Drying is dried up using nitrogen gun.
(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film 102,
In, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, and solid content is greater than 35%.
(3) treated step (1) and (2) microfluidic structures 101 and elastic polyurethane film 102 are subjected to plasma
Processing, wherein method of plasma processing be by the microfluidic structures 101 and elastic polyurethane film 102 be put into oxygen etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 360mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 30s.
(4) by after step (3) corona treatment microfluidic structures 101 and 102 bonding face of elastic polyurethane film it is fast
Press 15min after speed alignment, and heats, and the temperature of heating is 90 DEG C, and heating time is 2 hours, makes 101 surface of microfluidic structures
Integrated elastic polyurethane film 102.
Embodiment 2
As shown in Figs. 1-5, method of the present embodiment based on polyurethane film integrated on PDMS microfluidic structures, including it is as follows
Step:
(1) microfluidic structures 101 based on PDMS are taken, cleaning, drying are spare, wherein cleaning is first to be cleaned with isopropanol,
Remained on surface liquid is washed away with deionized water again.Drying is dried up using nitrogen gun.
(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film 102,
In, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, and solid content is greater than 35%.
(3) treated step (1) and (2) microfluidic structures 101 and elastic polyurethane film 102 are subjected to plasma
Processing, wherein method of plasma processing be by the microfluidic structures 101 and elastic polyurethane film 102 be put into oxygen etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 400mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 60s.
(4) by after step (3) corona treatment microfluidic structures 101 and 102 bonding face of elastic polyurethane film it is fast
Press 20min after speed alignment, and heats, and the temperature of heating is 110 DEG C, and heating time is 3 hours, makes 101 table of microfluidic structures
Face integrates elastic polyurethane film 102.
Embodiment 3
As shown in Figs. 1-5, method of the present embodiment based on polyurethane film integrated on PDMS microfluidic structures, including it is as follows
Step:
(1) microfluidic structures 101 based on PDMS are taken, cleaning, drying are spare, wherein cleaning is first to be cleaned with isopropanol,
Remained on surface liquid is washed away with deionized water again.Drying is dried up using nitrogen gun.
(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film 102,
In, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, and solid content is greater than 35%.
(3) treated step (1) and (2) microfluidic structures 101 and elastic polyurethane film 102 are subjected to plasma
Processing, wherein method of plasma processing be by the microfluidic structures 101 and elastic polyurethane film 102 be put into oxygen etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 400mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 50s.
(4) by after step (3) corona treatment microfluidic structures 101 and 102 bonding face of elastic polyurethane film it is fast
Press 20min after speed alignment, and heats, and the temperature of heating is 80 DEG C, and heating time is 2 hours, makes 101 surface of microfluidic structures
Integrated elastic polyurethane film 102.
Claims (7)
1. a kind of based on the method for integrating polyurethane film on PDMS microfluidic structures, characterized by the following steps:
(1) microfluidic structures based on PDMS are taken, cleaning, drying are spare；
(2) the uniform spin coating dispersions of polyurethanes on Silicon Wafer, is heating and curing, and forms elastic polyurethane film；
(3) treated step (1) and (2) microfluidic structures and elastic polyurethane film are subjected to corona treatment；
(4) by after step (3) corona treatment microfluidic structures and elastic polyurethane film bonding face be aligned rapidly after apply
It presses and heats, microfluidic structure surfaces is made to integrate elastic polyurethane film.
2. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that:
Cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water in the step (1).
3. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that:
Drying is dried up using nitrogen gun in the step (1).
4. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that:
Dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion in the step (2), and solid content is greater than 35%.
5. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that: institute
It is clear for the microfluidic structures and elastic polyurethane film are put into oxygen plasma to state step (3) plasma processing method
Washing machine is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr~400mtorr in cabin, starts plasma cleaning
Radio-frequency power is adjusted to 30W by machine, and the processing time is 30s~60s.
6. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that:
The time to press in the step (4) is 15min~20min.
7. according to claim 1 based on the method for integrating polyurethane film on PDMS microfluidic structures, it is characterised in that:
The temperature heated in the step (4) is 70 DEG C~110 DEG C, and heating time is 2 hours or more.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811588911.5A CN109718875B (en) | 2018-12-24 | 2018-12-24 | Method for structurally integrating polyurethane film based on PDMS (polydimethylsiloxane) micro-fluid |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811588911.5A CN109718875B (en) | 2018-12-24 | 2018-12-24 | Method for structurally integrating polyurethane film based on PDMS (polydimethylsiloxane) micro-fluid |
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| CN109718875B CN109718875B (en) | 2021-08-24 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112092378A (en) * | 2020-08-11 | 2020-12-18 | 上海交通大学 | Method for blocking microfluidic fluid channel through hot pressing |
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| EP1065378A2 (en) * | 1999-06-28 | 2001-01-03 | California Institute of Technology | Microfabricated elastomeric valve and pump systems |
| EP1574724A1 (en) * | 2004-03-10 | 2005-09-14 | Festo AG & Co | Pneumatic micro valve |
| CN102910578A (en) * | 2012-11-07 | 2013-02-06 | 中国科学院上海微系统与信息技术研究所 | Method for bonding silicon-based chip and PDMS (Polydimethylsiloxane) chip by adopting hybrid plasma |
| CN107305214A (en) * | 2016-04-22 | 2017-10-31 | 清华大学 | A kind of preparation method of hard micro-fluid chip |
| CN108662279A (en) * | 2018-05-23 | 2018-10-16 | 河海大学常州校区 | The micro-fluidic passive flux regulating valve of annular membrane and flow control method |
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2018
- 2018-12-24 CN CN201811588911.5A patent/CN109718875B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1065378A2 (en) * | 1999-06-28 | 2001-01-03 | California Institute of Technology | Microfabricated elastomeric valve and pump systems |
| EP1574724A1 (en) * | 2004-03-10 | 2005-09-14 | Festo AG & Co | Pneumatic micro valve |
| CN102910578A (en) * | 2012-11-07 | 2013-02-06 | 中国科学院上海微系统与信息技术研究所 | Method for bonding silicon-based chip and PDMS (Polydimethylsiloxane) chip by adopting hybrid plasma |
| CN107305214A (en) * | 2016-04-22 | 2017-10-31 | 清华大学 | A kind of preparation method of hard micro-fluid chip |
| CN108662279A (en) * | 2018-05-23 | 2018-10-16 | 河海大学常州校区 | The micro-fluidic passive flux regulating valve of annular membrane and flow control method |
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| 黄山石: "高聚物微流控芯片上集成气动微阀的研制", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
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|---|---|---|---|---|
| CN112092378A (en) * | 2020-08-11 | 2020-12-18 | 上海交通大学 | Method for blocking microfluidic fluid channel through hot pressing |
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