CN109603933A - A kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film - Google Patents
A kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film Download PDFInfo
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- CN109603933A CN109603933A CN201811588912.XA CN201811588912A CN109603933A CN 109603933 A CN109603933 A CN 109603933A CN 201811588912 A CN201811588912 A CN 201811588912A CN 109603933 A CN109603933 A CN 109603933A
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- polyurethane film
- micro
- pdms
- pneumatic
- control layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0809—Geometry, shape and general structure rectangular shaped
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/12—Specific details about materials
Abstract
The invention discloses a kind of preparation methods of the micro-fluidic pneumatic micro valve of integrated polyurethane film, comprising: takes the pneumatic control layer based on PDMS, cleaning, drying；It in the uniform spin coating dispersions of polyurethanes of silicon wafer surface, is heating and curing, forms elastic polyurethane film；Treated pneumatic control layer and elastic polyurethane film are subjected to corona treatment；By after corona treatment pneumatic control layer and elastic polyurethane film bonding face be aligned rapidly after press and heat, so that pneumatic control layer surface is integrated elastic polyurethane film, obtain product；Another microfluidic channel layer based on PDMS is taken, cleaning, drying carry out corona treatment with the product；It presses and heats after microfluidic channel layer after corona treatment is aligned rapidly with the product bonding face, surface is made to be bonded microfluidic channel layer.Air-tightness of the present invention is good, performance is good.
Description
Technical field
The present invention relates to micro-fluidic pneumatic micro valve preparation method, in particular to a kind of micro-fluidic gas of integrated polyurethane film
The preparation method of dynamic micro-valve.
Background technique
Miniflow microflow control technique is one and is related to fluid physics, chemistry, microelectronics, materialogy, biology and biology
The emerging cross discipline of engineering in medicine.It include that microfluidic channel is because the technology has many characteristics, such as micromation, integrated
System is commonly known as micro-fluidic chip, the also referred to as laboratory on chip or micro-total analysis system.Microflow control technique is in biology
There is huge development potentiality and broad application prospect in medical research.
Pith of the micro-valve as microflow control technique can be used to manipulate and control microfluid.Pneumatic micro valve is micro-valve
Common form, this kind of micro-valve can control the deformation of film by gas pressure, be flowed with this to reach in control microchannel
The purpose of body.Micro-fluidic pneumatic micro valve is usually prepared by soft lithography, is broadly divided into two kinds according to structure: open type with
Closed type.Open type has Quake Valve, Plunger Valve, Lateral Deflection Valve etc., and closed type has
Doormat Valve, Curtain Valve, Check Valve etc..Dimethyl silicone polymer (PDMS) has excellent optics
The features such as characteristic, bio-compatibility, easy processing molding, be one of the common used material of current micro-fluidic chip, while being also micro-valve
The common selection of middle elastic film.But the elastic film that PDMS material is obtained by spin coating is thicker, elongation is poor after film forming,
Biggish air pressure is needed when controlling the film deformation in pneumatic micro valve, is easily broken after multiple deformation, while PDMS
Bubble is formed due to the cavernous structure of own material, with gas permeability, the fluid that high pressure gas can be made to enter in microchannel, gas
The presence of bubble can change fluid environment locating for organism, influence the test to organism, and the bubble in microfluidic channel
The problems such as causing diffraction optically, reflection, refraction, it is unfavorable for the microscopic observation to organism.
Summary of the invention
Goal of the invention: it is an object of the present invention to provide a kind of preparation sides of the micro-fluidic pneumatic micro valve of integrated polyurethane film
Method, this method products air tightness is good, and test performance can be improved.
Technical solution: the present invention provides a kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film, including
Following steps:
(1) the pneumatic control layer based on PDMS is taken, cleaning, drying are spare；
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed；
(3) by the pneumatic control layer and elastic polyurethane film that treated step (1) and (2) based on PDMS carry out etc. from
Daughter processing；
(4) by after step (3) corona treatment based on PDMS pneumatic control layer and elastic polyurethane film be bonded
Face presses and heats after being aligned rapidly, and pneumatic control layer surface is made to integrate elastic polyurethane film；
(5) the microfluidic channel layer based on PDMS is taken, cleaning, drying carry out plasma with the product of the step (4)
Processing；
(6) the microfluidic channel layer based on PDMS after step (5) corona treatment is bonded with the product of step (4)
Face presses and heats after being aligned rapidly, so that the surface of step (4) is bonded the microfluidic channel layer based on PDMS, completes gas circuit
It is closed with fluid path.
Further, cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water in the step (1)
Body.Wherein, cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water.
Further, step (3) the plasma processing is by the pneumatic control layer and poly- ammonia based on PDMS
Ester elastomer film is put into oxygen plasma cleaning machine, is passed through the mixed gas of oxygen and air, and air pressure maintains in cabin
350mtorr~400mtorr starts plasma cleaner, radio-frequency power is adjusted to 30W, the processing time is 30s~60s.
Further, step (5) the plasma processing is by the microfluidic channel layer based on PDMS and step
Suddenly the product of (4) is put into plasma washing machine, is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr in cabin
~400mtorr starts plasma cleaner, radio-frequency power is adjusted to 30W, the processing time is 30s~60s.
Further, the time to press in the step (4) is 15min~20min.The temperature of heating is 70 DEG C~110
DEG C, heating time is 2 hours or more.
It is good based on PDMS polyurethane film air-tightness, it is not easy to penetrate high pressure gas when preparing Pneumatic diaphragm valve with it
PDMS film enters in fluid channel, to improve the performance of PDMS Pneumatic diaphragm valve, prolongs the service life；Elastic polyurethane
Forming thin film is uniform and thinner, and elongation is prominent, and resilience performance is excellent, and air-tightness is good
The utility model has the advantages that pneumatic micro valve sealing strength of the invention is high, it is not likely to produce leakage, and do not need to apply biggish control
Air pressure processed, bubble-free generate, and are greatly improved the test effect of organism, the service life is long, at low cost.
Detailed description of the invention
Fig. 1 is flow chart of the present invention；
Fig. 2 is top view of the present invention；
Fig. 3 is cross-sectional view of the present invention；
Appended drawing reference: the pneumatic control layer 202 based on PDMS, microfluidic channel layer 201, elastic polyurethane based on PDMS
Film 203, cavity 101, microfluidic channel 102.
Specific embodiment
Embodiment 1
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such as
Lower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is first
It is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed
203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, and solid content is greater than 35%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasma
Reason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygen
With the mixed gas of air, air pressure maintains 350mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locates
The reason time is 60s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidly
It presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 15min.
The temperature of heating is 80 DEG C, and heating time is 2 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step
(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 30s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)
After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuit
It is closed with fluid path.
Embodiment 2
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such as
Lower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is first
It is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed
203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, solid content 36%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasma
Reason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygen
With the mixed gas of air, air pressure maintains 360mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locates
The reason time is 30s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidly
It presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 15min.
The temperature of heating is 90 DEG C, and heating time is 2 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step
(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 360mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 30s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)
After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuit
It is closed with fluid path.
Embodiment 3
As shown in Figure 1-3, the preparation method of the micro-fluidic pneumatic micro valve of the integrated polyurethane film of the present embodiment, including such as
Lower step:
(1) take the pneumatic control layer 202 based on PDMS, inside have a cavity 101, cleaning, drying, spare, cleaning is first
It is cleaned with isopropanol, then washes away remained on surface liquid with deionized water.Drying is dried up using nitrogen gun.
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed
203, dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion, solid content 37%.
(3) treated step (1) and (2) pneumatic control layer and elastic polyurethane film 203 are carried out at plasma
Reason, corona treatment are that pneumatic control layer and elastic polyurethane film 203 are put into oxygen plasma cleaning machine, are passed through oxygen
With the mixed gas of air, air pressure maintains 400mtorr in cabin, starts plasma cleaner, radio-frequency power is adjusted to 30W, locates
The reason time is 60s.
(4) by after step (3) corona treatment pneumatic control layer and 203 bonding face of elastic polyurethane film it is right rapidly
It presses and heats after standard, pneumatic control layer surface is made to integrate elastic polyurethane film 203, wherein the time of pressure is 20min.
The temperature of heating is 110 DEG C, and heating time is 3 hours.
(5) take the microfluidic channel layer 201 based on PDMS, inside have a microfluidic channel 102, cleaning, drying, with step
(4) product carries out corona treatment, corona treatment be the product of microfluidic channel layer and step (4) is put into etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 400mtorr in cabin, starts plasma cleaner,
Radio-frequency power is adjusted to 30W, the processing time is 60s.
(6) the microfluidic channel layer after step (5) corona treatment is aligned rapidly with the product bonding face of step (4)
After press and heat, so that the surface of step (4) is bonded the internal microfluidic structures for having microfluidic channel 102, complete gas circuit
It is closed with fluid path.
Claims (7)
1. a kind of preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film, characterized by the following steps:
(1) the pneumatic control layer based on PDMS is taken, cleaning, drying are spare；
(2) Silicon Wafer is taken, in the uniform spin coating dispersions of polyurethanes in its surface, is heating and curing, elastic polyurethane film is formed；
(3) the pneumatic control layer and elastic polyurethane film that treated step (1) and (2) based on PDMS are subjected to plasma
Processing；
(4) by after step (3) corona treatment based on PDMS pneumatic control layer and elastic polyurethane film bonding face it is fast
It presses and heats after speed alignment, pneumatic control layer surface is made to integrate elastic polyurethane film；
(5) the microfluidic channel layer based on PDMS is taken, cleaning, drying carry out at plasma with the product of the step (4)
Reason；
(6) the product bonding face of microfluidic channel layer and step (4) after step (5) corona treatment based on PDMS is fast
It presses and heats after speed alignment, so that the surface of step (4) is bonded the microfluidic channel layer based on PDMS, complete gas circuit and liquid
Road closing.
2. the preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film according to claim 1, it is characterised in that:
Cleaning is first to be cleaned with isopropanol, then wash away remained on surface liquid with deionized water in the step (1).
3. the preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film according to claim 1, it is characterised in that:
Dispersions of polyurethanes is anion aqueous aliphatic polyurethane dispersion in the step (2), and solid content is greater than 35%.
4. integrating the preparation method of the micro-fluidic pneumatic micro valve of polyurethane film according to claim 1, it is characterised in that: institute
State step (3) plasma processing for by the pneumatic control layer based on PDMS and elastic polyurethane film be put into oxygen etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr~400mtorr in cabin, starting etc. from
Radio-frequency power is adjusted to 30W by sub- cleaning machine, and the processing time is 30s~60s.
5. integrating the preparation method of the micro-fluidic pneumatic micro valve of polyurethane film according to claim 1, it is characterised in that: institute
State the processing of step (5) plasma for the product of the microfluidic channel layer based on PDMS and step (4) is put into etc. from
Daughter cleaning machine is passed through the mixed gas of oxygen and air, and air pressure maintains 350mtorr~400mtorr in cabin, starting etc. from
Radio-frequency power is adjusted to 30W by sub- cleaning machine, and the processing time is 30s~60s.
6. the preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film according to claim 1, it is characterised in that:
The time to press in the step (4) is 15min~20min.
7. the preparation method of the micro-fluidic pneumatic micro valve of integrated polyurethane film according to claim 1, it is characterised in that:
The temperature heated in the step (4) is 70 DEG C~110 DEG C, and heating time is 2 hours or more.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111468197A (en) * | 2020-04-13 | 2020-07-31 | 长春理工大学 | Hydraulic-driven elastic diaphragm micro valve for centrifugal microfluidic system and preparation method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103157523A (en) * | 2011-12-15 | 2013-06-19 | 三星电子株式会社 | Microfluidic device and method of manufacturing the same |
| US20150087559A1 (en) * | 2009-11-23 | 2015-03-26 | Cyvek, Inc. | PDMS Membrane-Confined Nucleic Acid and Antibody/Antigen-Functionalized Microlength Tube Capture Elements, and Systems Employing Them |
| CN104627953A (en) * | 2015-01-23 | 2015-05-20 | 东南大学 | Microfluidic chip bonding method using SU-8 photoresist and PDMS as substrates |
| CN105233888A (en) * | 2015-10-12 | 2016-01-13 | 浪潮(北京)电子信息产业有限公司 | Glass-PDMS film-glass sandwich microfluidic chip manufacturing method |
| CN108162368A (en) * | 2017-12-27 | 2018-06-15 | 北京百奥芯科技有限公司 | A kind of thermal bonding method of control plastic chip and the chip obtained |
| CN108212231A (en) * | 2018-01-04 | 2018-06-29 | 张策 | A kind of miniflow macrofluid control chip and preparation method thereof |
-
2018
- 2018-12-24 CN CN201811588912.XA patent/CN109603933A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150087559A1 (en) * | 2009-11-23 | 2015-03-26 | Cyvek, Inc. | PDMS Membrane-Confined Nucleic Acid and Antibody/Antigen-Functionalized Microlength Tube Capture Elements, and Systems Employing Them |
| CN103157523A (en) * | 2011-12-15 | 2013-06-19 | 三星电子株式会社 | Microfluidic device and method of manufacturing the same |
| CN104627953A (en) * | 2015-01-23 | 2015-05-20 | 东南大学 | Microfluidic chip bonding method using SU-8 photoresist and PDMS as substrates |
| CN105233888A (en) * | 2015-10-12 | 2016-01-13 | 浪潮(北京)电子信息产业有限公司 | Glass-PDMS film-glass sandwich microfluidic chip manufacturing method |
| CN108162368A (en) * | 2017-12-27 | 2018-06-15 | 北京百奥芯科技有限公司 | A kind of thermal bonding method of control plastic chip and the chip obtained |
| CN108212231A (en) * | 2018-01-04 | 2018-06-29 | 张策 | A kind of miniflow macrofluid control chip and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| GU PAN: "The use of polyurethane as an elastomer in thermoplastic microfluidic devices and the study of its creep properties", 《ELECTROPHORESIS》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111468197A (en) * | 2020-04-13 | 2020-07-31 | 长春理工大学 | Hydraulic-driven elastic diaphragm micro valve for centrifugal microfluidic system and preparation method thereof |
| CN111468197B (en) * | 2020-04-13 | 2021-12-03 | 长春理工大学 | Hydraulic-driven elastic diaphragm micro valve for centrifugal microfluidic system and preparation method thereof |
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Application publication date: 20190412 |