CN109713385B - Battery formation system and dial thereof - Google Patents

Battery formation system and dial thereof Download PDF

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Publication number
CN109713385B
CN109713385B CN201711004982.1A CN201711004982A CN109713385B CN 109713385 B CN109713385 B CN 109713385B CN 201711004982 A CN201711004982 A CN 201711004982A CN 109713385 B CN109713385 B CN 109713385B
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China
Prior art keywords
flow channel
dial
air outlet
battery
channel
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CN109713385A (en
Inventor
许旭昌
许国彦
陈冠臻
林川泽
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To Mao Electronics Suzhou Co ltd
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To Mao Electronics Suzhou Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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Abstract

The invention discloses a battery formation system which comprises a base, a bearing piece, a dial and a probe. The base is suitable for bearing the battery, and the bearing piece is located on one side of the base. The dial is arranged on the bearing piece and is provided with a ventilation flow passage and an air outlet flow passage which are communicated. The extending direction of the ventilation flow channel is intersected with the extending direction of the air outlet flow channel. The probe is arranged on the dial, and the testing end of the probe and the air outlet of the air outlet flow passage are positioned on the same side of the dial. The invention also discloses a dial for battery formation.

Description

Battery formation system and dial thereof
Technical Field
The present invention relates to a battery activation system, and more particularly to a battery formation system and a dial of the battery formation system.
Background
A battery is an energy conversion and storage device that converts chemical or physical energy into electrical energy by reaction according to the battery, i.e., a chemical power source. The battery consists of two electrochemical active electrodes with different components, which are respectively composed of positive and negative electrodes, and the two electrodes are soaked in an electrolyte capable of providing a medium conduction function. When the anode and the cathode are connected to an external carrier, the chemical energy in the carrier is converted to provide electric energy. However, after the battery is manufactured, the physical and chemical properties of the electrode are not in an optimal applicable state, so that the positive and negative electrode materials need to be activated through a charging and discharging process to improve the comprehensive performance of the battery, such as charging and discharging performance, self-discharging performance, storage performance and the like, and the process of activating the positive and negative electrode materials during the charging and discharging process is called formation.
The existing battery formation system is mostly formed by matching and combining a base for bearing the battery, positive and negative electrode probes, a dial for bearing the probes, a temperature detecting sensor and a negative pressure module. During the charging and discharging process of the battery, the battery body, the probe and the contact point of the battery electrode generate heat, so a fan device is usually disposed around the battery formation system for cooling. However, since the distance between the probes and the battery and the distance between the battery and the battery are too narrow, the external fan device is not easy to blow cold air and is difficult to dissipate heat, so that the temperature of the probes and the battery near the fan device is lower, the temperature of the probes and the battery far from the fan device is higher, and the phenomenon of uneven overall temperature is further generated.
Disclosure of Invention
In view of the above problems, the present invention discloses a battery formation system and a dial thereof, which are helpful for solving the problem of temperature non-uniformity in the battery formation system due to poor heat dissipation efficiency of a probe and a battery which are far away from a fan device.
The invention discloses a battery formation system, which comprises a base, a bearing piece, a needle disc and at least one probe. The base is suitable for bearing the battery, and the bearing piece is located one side of the base. The dial is arranged on the bearing piece and is provided with a ventilation flow channel and at least one air outlet flow channel which are communicated, and the extending direction of the ventilation flow channel is intersected with the extending direction of the air outlet flow channel. The probe is arranged on the dial, and the testing end of the probe and an air outlet of the air outlet flow passage are positioned on the same side of the dial.
The dial for battery formation disclosed by the invention is provided with a ventilation flow channel and at least one air outlet flow channel which are communicated. The extending direction of the ventilation flow channel is intersected with the extending direction of the air outlet flow channel. The ventilation flow channel is used for allowing airflow to flow to the air outlet flow channel, and an air outlet of the air outlet flow channel is used for allowing the airflow to flow out of the dial so as to dissipate heat of the battery to be formed.
According to the battery formation system and the dial, the dial is provided with the ventilation flow channel and the air outlet flow channel which are communicated. Can let in gas in the runner of ventilating from the outside to gas can blow out from the gas outlet of the runner of giving vent to anger to dispel the heat to probe and waiting to become the battery. Therefore, the probe and the battery to be formed can be uniformly cooled, and the heat dissipation efficiency can be effectively improved.
The above description of the present invention and the following description of the embodiments are provided to illustrate and explain the spirit and principles of the present invention and to provide further explanation of the invention as claimed in the appended claims.
Wherein, the reference numbers:
B. b' pending formation battery
1. 2 Battery formation system
11. 21 base
111 carrying surface
12. 22 bearing element
121 frame body
Medial surface of 121a
122. 222 guide rod
221 supporting plate
13. 23, 33 dial
131 channel module
132 spacer
231 connecting block
131a, 132a, 231a side surface
131b, 132b, 231b bottom surface
131c, 132c, 231c flow passage section
1311. 1321, 2311 air vent
131d, 132d and 231d outlet flow channel
1312. 1322, 2312 air outlet
132e, 231e annular groove
132f, 231f protrusions
133. 233 ventilating flow passage
331 aeration flow channel
3311 air intake
332 air outlet flow passage
14. 24 Probe
141. 241 test terminal
15. 25 sealing ring
A1 and A2 extending directions
Drawings
Fig. 1A is a perspective view of a battery formation system according to a first embodiment of the present invention.
Fig. 1B is an exploded view of the battery formation system of fig. 1A.
FIG. 1C is a partially exploded view of a dial in the battery formation system of FIG. 1B.
Fig. 1D is a cross-sectional view of the battery formation system of fig. 1A.
Fig. 2 is a partially exploded view of a dial according to a second embodiment of the present invention.
Fig. 3A is a perspective view of a battery formation system according to a third embodiment of the present invention.
Fig. 3B is an exploded view of the battery formation system of fig. 3A.
Fig. 3C is a partially exploded view of the dial in the battery formation system of fig. 3B.
Fig. 3D is a cross-sectional view of the battery formation system of fig. 3A.
Fig. 4 is a partially exploded view of a dial according to a fourth embodiment of the present invention.
Fig. 5 is a sectional view of a battery formation system according to a fifth embodiment of the present invention.
Detailed Description
The detailed features and advantages of the present invention are described in detail in the embodiments below, which are sufficient for anyone skilled in the art to understand the technical contents of the present invention and to implement the present invention, and the related objects and advantages of the present invention can be easily understood by anyone skilled in the art according to the disclosure of the present specification, the protection scope of the claims and the attached drawings. The following examples further illustrate aspects of the present invention in detail, but are not intended to limit the scope of the invention in any way.
Please refer to fig. 1A and fig. 1B simultaneously. Fig. 1A is a perspective view of a battery formation system according to a first embodiment of the present invention. Fig. 1B is an exploded view of the battery formation system of fig. 1A. In the present embodiment, the battery formation system 1 includes a base 11, a carrier 12, a needle plate 13 and a plurality of probes 14. The number of probes 14 is not intended to limit the present invention.
The base 11 is, for example but not limited to, a plastic tray, and has a carrying surface 111 at the bottom. The supporting surface 111 is formed with a plurality of positioning grooves (not shown), and the to-be-formed batteries B can be disposed in the positioning grooves and supported on the supporting surface 111. In the present embodiment, the battery B to be formed is a hard-shell square can lithium battery.
The carrier 12 is located on one side of the base 11. In the present embodiment, the supporting member 12 is a frame, which includes a frame 121 and a guiding rod 122. The frame 121 is provided on the base 11, and the frame 121 has two inner surfaces 121a facing each other. The guide rod 122 is disposed on the frame 121, and the guide rod 122 extends from one inner side surface 121a to the other inner side surface 121 a. Opposite ends of the guide rod 122 are fixed to the inner side surfaces 121a, respectively.
The dial 13 is arranged on the carrier 12 and comprises a plurality of connecting blocks. Please refer to fig. 1C and fig. 1D. FIG. 1C is a partially exploded view of a dial in the battery formation system of FIG. 1B. Fig. 1D is a cross-sectional view of the battery formation system of fig. 1A. In the present embodiment, the plurality of connection blocks of the dial 13 include a plurality of channel modules 131 and a plurality of spacer blocks 132 arranged in a staggered manner.
The number of the channel modules 131 may be identical to the number of the cells B to be formed, and the number of the channel modules 131 may be changed according to increase or decrease in the number of the cells B to be formed. The guiding rod 122 penetrates through the channel module 131 and the spacing block 132, so that both the channel module 131 and the spacing block 132 are disposed on the supporting member 12 through the guiding rod 122, but the invention is not limited thereto. In other embodiments, the carrier does not have a guide rod, but the frame of the carrier forms two sliding grooves on the inner side wall, and the two opposite ends of the channel module and the spacing block are respectively disposed in the two sliding grooves.
Each channel module 131 has two opposite side surfaces 131a, a bottom surface 131b, a plurality of flow channel segments 131c, and a plurality of outlet flow channels 131 d. The bottom surface 131b is interposed between the two side surfaces 131 a. The two air vents 1311 of each flow channel segment 131c are respectively located at the two side surfaces 131a, and the air outlet 1312 of each air outlet flow channel 131d is located at the bottom surface 131 b. The connection between flow channel segment 131c and outlet flow channel 131d is between two air vents 1311. The number of the flow channel segments 131c and the gas outlet flow channels 131d and the position of the gas outlet flow channels 131d are not used to limit the present invention.
Similarly, each spacer 132 also has two opposite side surfaces 132a, a bottom surface 132b, a plurality of flow channel segments 132c, and a plurality of outlet flow channels 132 d. The bottom surface 132b is interposed between the two side surfaces 132 a. The two air vents 1321 of each flow channel segment 132c are respectively located at the two side surfaces 132a, and the air outlet 1322 of each air outlet flow channel 132d is located at the bottom surface 132 b. The communication between the flow channel segment 132c and the outlet flow channel 132d is between the two vents 1321. The number of the flow channel segments 132c and the outlet flow channels 132d and the position of the outlet flow channels 132d are not intended to limit the present invention.
As shown in fig. 1C and fig. 1D, when the channel module 131 and the spacer 132 are disposed on the carrier 12, the flow path segments 131C and 132C are communicated with each other through the vents 1311 and 1321, and all the flow path segments 131C and 132C are communicated to form a ventilation flow path 133 of the dial 13. The extending direction a1 of the vent channel 133 (i.e. the extending direction of the channel segments 131c, 132 c) intersects the extending direction a2 of the outlet channels 131d, 132 d. In this embodiment, two of the spacers 132 are respectively closest to the two inner side surfaces 121a of the frame 121, and one of the vent holes 1321 of each of the two spacers 132 serves as an air inlet of the vent channel 133 of the dial 13. In other embodiments, the channel module 131 is closest to the inner side surface 121a of the frame 121, in this case, one of the air vents 1311 of the channel module 131 is used as an air inlet of the air vent channel 133 of the dial 13. In addition, in the embodiment, each channel module 131 has an outlet flow channel 131d, and each spacer 132 also has an outlet flow channel 132d, but the invention is not limited thereto. In other embodiments, part of the channel modules and part of the spacer blocks are respectively provided with an air outlet flow channel. Alternatively, in other embodiments, only the channel module has the outlet flow channel, or only the spacer block has the outlet flow channel.
The probes 14 are, for example but not limited to, electrode probes or temperature detecting probes, which are respectively disposed on the channel modules 131 of the dial 13. In detail, each of the probes 14 has a testing end 141, and the testing end 141 and the air outlets 1312 and 1322 of the air outlets 131d and 132d are located on the same side of the dial 13. The probe 14 penetrates the channel module 131 so that the testing terminal 141 contacts the positive and negative electrodes of the battery B to be formed or the temperature detecting metal gasket.
As shown in fig. 1D, in the present embodiment, cooling gas such as air or nitrogen can be introduced into the ventilation channel 133 from the outside through the air inlet of the ventilation channel 133 (i.e. one of the ventilation ports 1321 of the leftmost and rightmost spacers 132), and the cooling gas can be blown out from the air outlet 1312 of the air outlet channel 131D or the air outlet 1322 of the air outlet channel 132D. The gas blown out through the gas outlet channels 131d and 132d can dissipate heat of the probe 14 and the battery B to be formed. Further, by forming the ventilation channel 133 and the gas outlet channels 131d, 132d on the dial 13, and the positions of the gas outlets 1312, 1322 of the gas outlet channels 131d, 132d correspond to the testing end 141 of the probe 14, the positive electrode and the negative electrode of the battery B to be formed, or the gap between two adjacent batteries B to be formed, the external gas can be introduced into the ventilation channel 133 and flow out from the gas outlets 1312, 1322, so as to help uniformly cool the probe 14 and the batteries B to be formed, and effectively improve the heat dissipation efficiency.
In addition, as shown in fig. 1C, in order to prevent the gas from escaping due to the gap generated at the connection between the adjacent channel module 131 and the spacer 132, the battery formation system 1 of the present embodiment further includes a plurality of sealing rings 15. Each spacer 132 of the dial 13 further has two annular grooves 132e, and the two annular grooves 132e are respectively located around the two vent ports 1321. The sealing rings 15 are respectively disposed in the annular grooves 132e, and the channel modules 131 and the spacers 132 are assembled to the carrier 12 to compress the sealing rings 15.
In the first embodiment, the sealing ring 15 is disposed in the annular groove 132e of the spacer 132 to prevent the gas from escaping, but the invention is not limited thereto. Referring to fig. 2, a partial exploded view of a dial according to a second embodiment of the invention is shown. Since the second embodiment is similar to the first embodiment, only the differences will be described below.
In this embodiment, the battery formation system does not include a sealing ring and the spacer blocks 132 of the dial 13 do not have annular grooves, but each spacer block 132 has two protrusions 132f extending from two side surfaces 132a, respectively. For one of the spacers 132 and the two channel modules 131 adjacent to the spacer 132, the two protrusions 132f of the spacer 132 are respectively inserted into the flow channel sections 131c of the two channel modules 131. Thereby, the protrusion 132f of the spacer 132 helps prevent a gap from being generated at the connection between the adjacent channel module 131 and the spacer 132, so that the gas in the vent channel 133 does not escape.
The first embodiment discloses the battery formation system suitable for hard-shell batteries, but the battery formation system of the present invention can also be suitable for pouch batteries. Please refer to fig. 3A and fig. 3B simultaneously. Fig. 3A is a perspective view of a battery formation system according to a third embodiment of the present invention. Fig. 3B is an exploded view of the battery formation system of fig. 3A. In the present embodiment, the battery formation system 2 includes a base 21, a carrier 22, a needle plate 23 and a plurality of probes 24. The number of probes 24 is not intended to limit the present invention.
The base 21 is, for example, but not limited to, a plastic frame, and the battery B ″ to be formed may be disposed on the base 21. In the present embodiment, the battery B "to be formed is a lithium pouch battery.
The carrier 22 is located at one side of the base 21. In the present embodiment, the carrier 22 includes two support plates 221 and two guide rods 222 separated from each other. The guide rods 222 are disposed between the two support plates 221, and opposite ends of the guide rods 222 are fixed to the two support plates 221, respectively.
The dial 23 is provided to the carrier 22. Please refer to fig. 3C and fig. 3D. Fig. 3C is a partially exploded view of the dial in the battery formation system of fig. 3B. Fig. 3D is a cross-sectional view of the battery formation system of fig. 3A. In the present embodiment, the dial 23 includes a plurality of connection blocks 231, and the guide rod 222 penetrates through the connection blocks 231, so that the connection blocks 231 are disposed between the two support plates 221 of the carrier 22.
Each connecting block 231 has two opposite side surfaces 231a, a bottom surface 231b, a flow channel section 231c and an outlet flow channel 231 d. The bottom surface 231b is interposed between the two side surfaces 231 a. The two air vents 2311 of the flow channel segment 231c are respectively located on the two side surfaces 231a, and the air outlets 2312 of the air outlet flow channel 231d are located on the bottom surface 231 b. The communication part between the flow path segment 231c and the air outlet flow path 231d is located between the two air vents 2311. The number and the positions of the air outlet channels 231d are not intended to limit the present invention.
As shown in fig. 3C and 3D, when the connecting block 231 is disposed on the carrier 12, the flow path segments 231C are communicated with each other through the air holes 2311, and all the flow path segments 231C are communicated to form a ventilation flow path 233 of the dial 23. The extending direction of the ventilation flow channel 233 (i.e., the extending direction of the flow channel segment 231 c) intersects with the extending direction of the outlet flow channel 231 d. In the present embodiment, one of the air ports 2311 of each of the two connection blocks 231, which are respectively closest to the two support plates 221, serves as an air inlet of the air flow passage 233 of the dial 23. In addition, in the embodiment, each connection block 231 has an outlet flow channel 231d, but the invention is not limited thereto. In other embodiments, only a portion of the connector blocks have outlet flow channels.
The probe 24 is, for example, but not limited to, a jaw probe, which is pivotally mounted to the connecting block 231 of the dial 23. The probes 24 respectively have a testing end 241, and the testing end 241 and the air outlet 2312 of the air outlet channel 231d are located on the same side of the dial 23. The probe 24 can rotate relative to the connecting block 231 to make the testing end 241 clamp the positive and negative electrodes of the battery B ″ to be formed or the temperature detecting metal gasket.
As shown in fig. 3C and 3D, in the present embodiment, air or nitrogen gas may be introduced into the ventilation flow channel 233 from the outside through the air inlet of the ventilation flow channel 233 (i.e., one of the ventilation ports 2311 of the leftmost and rightmost connection blocks 231), and the gas may be blown out from the air outlet 2312 of the air outlet flow channel 231D. The gas blown out through the gas outlet flow channel 231d can dissipate heat of the probe 24 and the battery B ″ to be formed. Further, by forming the ventilation flow channel 233 and the air outlet flow channel 231d on the dial 23, and the position of the air outlet 2312 of the air outlet flow channel 231d corresponds to the testing end 241 of the probe 14, the positive electrode and the negative electrode of the battery B ″ to be formed, or the gap between two adjacent batteries B ″ to be formed, the external air can be introduced into the ventilation flow channel 233 and flow out from the air outlet 2312, so as to uniformly cool the probe 24 and the battery B ″ to be formed, and effectively improve the heat dissipation efficiency.
In addition, in order to prevent the gas from escaping due to the gap between the two adjacent connecting blocks 231, the battery formation system 2 of the present embodiment further includes a plurality of sealing rings 25. Each connecting block 231 of the dial 23 further has an annular groove 231e located around one of the air ports 2311. The sealing rings 25 are respectively disposed in the annular grooves 231e, and the connecting block 231 is assembled to the carrier 12 and then compresses the sealing rings 25.
Referring to fig. 4, a partial exploded view of a dial according to a fourth embodiment of the invention is shown. Since the fourth embodiment is similar to the third embodiment, only the differences will be described below.
In this embodiment, the battery formation system does not include a sealing ring and the connection blocks 231 of the dial 23 do not have annular grooves, but each connection block 231 has a protrusion 231f extending from one of the two side surfaces 231 a. For two adjacent connecting blocks 231, the protrusion 231f of one connecting block 231 is inserted into the flow channel section 231c of the other connecting block 231. Thereby, the protrusion 231f of the connection block 231 helps prevent the adjacent two connection blocks 231 from generating a gap therebetween to cause gas to escape.
The dial in the first to fourth embodiments includes a plurality of blocks that can be assembled together, but the invention is not limited thereto. Fig. 5 is a cross-sectional view of a battery formation system according to a fifth embodiment of the invention. Since the fifth embodiment is similar to the first and third embodiments, only the differences will be described below.
In the present embodiment, the dial 33 is a flat plate formed integrally and has a ventilation flow channel 331 and a plurality of exhaust flow channels 332 connected to each other. The two inlets 3311 of the ventilation flow path 331 are located on different sides of the dial 33.
In summary, in the battery formation system and the dial disclosed in the present invention, the dial has a ventilation channel and an air outlet channel communicated with each other. Can let in gas in the runner of ventilating from the outside to gas can blow out from the gas outlet of the runner of giving vent to anger to dispel the heat to probe and waiting to become the battery. Therefore, the probe and the battery to be formed can be uniformly cooled, and the heat dissipation efficiency can be effectively improved.

Claims (8)

1. A battery formation system, comprising:
a base adapted to carry a battery;
a bearing element located at one side of the base;
the dial is arranged on the bearing piece and is provided with a ventilation flow channel and a plurality of air outlet flow channels which are communicated, and the extending direction of the ventilation flow channel is intersected with the extending direction of the air outlet flow channels; and
the probe is arranged on the dial, and the testing end of the probe and one air outlet of each air outlet flow passage are positioned on the same side of the dial;
the dial comprises a plurality of connecting blocks which are assembled, the connecting blocks are respectively provided with a flow channel section, the flow channel sections are communicated to form the ventilation flow channel together, and at least part of the connecting blocks are respectively provided with the air outlet flow channels.
2. The battery formation system of claim 1, wherein each of the connection blocks further has two opposite side surfaces and a bottom surface between the two side surfaces, the two air vents of the flow channel section of each of the connection blocks are respectively located at the two side surfaces, the air outlet of the air outlet flow channel of each of the connection blocks is located at the bottom surface, the communication between the flow channel section and the air outlet flow channel of each of the connection blocks is between the two air vents, and the flow channel sections are communicated with each other through the air vents.
3. The battery formation system of claim 2, further comprising a plurality of sealing rings, wherein one of the sealing rings is disposed between two adjacent connection blocks, and the connection blocks compress the sealing rings.
4. The battery formation system of claim 2, wherein each of the connection blocks further has a protrusion extending from one of the two side surfaces, and wherein the protrusion of one of the connection blocks is inserted into the flow channel section of another adjacent connection block.
5. The battery formation system of claim 2, further comprising a plurality of sealing rings, wherein the connecting blocks of the dial comprise a plurality of channel modules and a plurality of spacers, the at least one probe is provided in a plurality of staggered arrangement, the probes are respectively disposed on the channel modules, one of the sealing rings is disposed between one of the channel modules and one of the spacers, and the channel modules and the spacers compress the sealing rings.
6. The battery formation system of claim 2, wherein the connection blocks comprise a plurality of channel modules and a plurality of spacers, the at least one probe is disposed in the channel modules, the spacers each further comprise two protrusions extending from the two sides, and the two protrusions of one spacer are respectively inserted into the flow channel segments of two adjacent channel modules.
7. The utility model provides a dial for battery ization becomes, its characterized in that contains a plurality of connecting blocks of equipment mutually, a ventilation runner and a plurality of flow channels of giving vent to anger that are linked together, these connecting blocks have a runner section respectively, these runner sections communicate and form this ventilation runner jointly, at least some these connecting blocks have these flow channels of giving vent to anger respectively, the extending direction of flow channel of should ventilating intersects with the extending direction of these flow channels of giving vent to anger, this ventilation runner is used for the gas circulation to these flow channels of giving vent to anger, and a gas outlet of these flow channels of giving vent to anger of each is used for supplying gas to flow this dial in order to treat the battery of formation and dispel the heat.
8. The dial of claim 7, wherein each of the connecting blocks further has two opposite side surfaces and a bottom surface between the two side surfaces, the two air vents of the flow channel section of each of the connecting blocks are respectively located at the two side surfaces, the air outlet of the air outlet flow channel of each of the connecting blocks is located at the bottom surface, the communication between the flow channel section of each of the connecting blocks and the air outlet flow channel is between the two air vents, and the flow channel sections are communicated with each other through the air vents.
CN201711004982.1A 2017-10-25 2017-10-25 Battery formation system and dial thereof Active CN109713385B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN109713385B true CN109713385B (en) 2021-08-06

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Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201174410Y (en) * 2008-03-25 2008-12-31 广州蓝奇电子实业有限公司 Battery cooling construction of battery checking apparatus
KR101493871B1 (en) * 2008-11-11 2015-02-17 삼성전자주식회사 Interface structure for wafer test equipments
TWI466359B (en) * 2010-08-23 2014-12-21 Sumitomo Heavy Industries Battery inspection device
CN202281785U (en) * 2011-10-11 2012-06-20 益明精密科技有限公司 Detection probe air cooling apparatus
CN103091522A (en) * 2013-02-27 2013-05-08 上海华力微电子有限公司 Compatible probe card capable of being used in high temperature test and low temperature test
KR101634452B1 (en) * 2014-10-24 2016-06-29 세메스 주식회사 Chuck structure for testing a wafer using probe card
CN205882076U (en) * 2016-08-10 2017-01-11 青海时代新能源科技有限公司 Batteryization becomes device

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