CN109706432B - Circular magnetic force electrode device and winding type surface modification equipment comprising same - Google Patents
Circular magnetic force electrode device and winding type surface modification equipment comprising same Download PDFInfo
- Publication number
- CN109706432B CN109706432B CN201910042849.8A CN201910042849A CN109706432B CN 109706432 B CN109706432 B CN 109706432B CN 201910042849 A CN201910042849 A CN 201910042849A CN 109706432 B CN109706432 B CN 109706432B
- Authority
- CN
- China
- Prior art keywords
- magnetic pole
- electrode
- magnetic
- central shaft
- pole seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention discloses a circular magnetic electrode device and a winding type surface modification device comprising the same, wherein the circular magnetic electrode device comprises an electrode core, a main electrode shell arranged outside and sealing insulation systems respectively arranged at two ends; a rotary electrode for transmitting an electric signal to the magnetic electrode is arranged between the electrode core and the sealing insulation system; the electrode core comprises a central shaft, a magnetic pole and a magnetic pole seat, the magnetic pole seat is tightly attached by the magnetic pole, the magnetic pole seat is concentric with the central shaft, and the magnetic pole surrounds the magnetic pole seat fixing device; the central shaft is provided with a magnetic pole seat, a magnetic pole and two inner separation and outer separation flanges; the inner isolating flange is arranged at the section position of the central shaft and the magnetic pole seat. A uniform magnetic field is formed around the magnetic electrode device in the rotating process, and the magnetic electrode device has a good electric signal leading-in function; the rotary sealing effect can be guaranteed by the sealing and insulating system, the insulating property can guarantee that an electric signal can be only transmitted to the magnetic electrode rod and cannot be transmitted to the main body, and the applicability of the magnetic electrode device is guaranteed.
Description
The patent application of the invention is divisional application. The invention discloses a circular magnetic electrode device and a winding type surface modification device comprising the same, wherein the original patent number is 201711303886.7, the application date is 12 and 11 in 2017, and the name of the invention is.
Technical Field
The invention belongs to the technical field of vacuum coating and film surface treatment, and particularly relates to a circular magnetic electrode device and winding type surface modification equipment comprising the same.
Background
With the continuous development of industrial science and technology, human beings always have no dependence on materials in the exploration of advanced science and technology products, functional films are modern science and technology products, and the functional films play an important role in the strategic emerging industry, so that the functional films have wide application prospects and huge investment opportunities. The functional film has different properties and application fields and high technical barrier, and the difficulty is mainly summarized into raw materials, formulas, processes and equipment. The functional film comprises an optical film, a photovoltaic film, a lithium battery diaphragm, a high-barrier packaging film and the like, and a plurality of layers of functional films are usually required to be matched to realize specific functions in a certain field to be made into the functional film with special purposes.
Whether optical films, photovoltaic films, lithium battery films or high-barrier packaging films are researched in many ways for preparing high-efficiency and high-quality films, and the production efficiency is highest by adopting a whole-roll uninterrupted surface coating (modification) mode in terms of the current process technology. Therefore, it is highly desirable for material manufacturers to complete the coating (modification) during the whole coil winding and unwinding process.
Disclosure of Invention
The invention aims to provide a circular magnetic electrode device and a winding type surface modification device comprising the same.
To achieve the above object, according to one aspect of the present invention, there is provided a circular magnetic electrode device, comprising a main electrode housing, an electrode core disposed inside the main electrode housing, and sealing insulation systems respectively disposed at both ends of the electrode core; a rotating electrode for transmitting an electric signal to the magnetic electrode is arranged between the electrode core and the sealing and insulating systems at the two ends; the electrode core comprises a magnetic pole seat, a magnetic pole and a central shaft; the magnetic pole seat and the central shaft are concentric shafts, the magnetic pole seat is tightly attached by virtue of a magnetic pole, the magnetic pole takes the magnetic pole seat as a fixing device, and the magnetic pole is arranged around the magnetic pole seat. A magnetic pole seat, a magnetic pole, two inner separation flanges and two outer separation flanges are arranged on the central shaft; the inner isolating flange is arranged at the section position of the central shaft and the magnetic pole seat.
Preferably, the central shaft is a hollow shaft without through holes, and the wall of the hollow shaft is provided with holes for dredging the refrigerant and the heating medium.
Preferably, the inner isolating flange and the magnetic pole seat are welded or pressed into a whole and are coaxially arranged with the central shaft; the outer isolating flange and the main electrode shell are connected into a whole in a welding or crimping mode and are concentric with the central shaft.
Preferably, the central shaft is located at the central point of the magnetic pole seat, and the magnetic poles are installed at corresponding positions on the magnetic pole seat and are installed in a staggered mode according to the circumferential direction N-S-N-S.
Preferably, the magnetic pole seat is circumferentially provided with a groove, and the machined magnetic pole is placed in the groove.
Preferably, the sealing and insulating system comprises an insulating flange, an insulating plate and a rotary seal in sequence from one end close to the rotary electrode; the sealing devices between the insulating flange devices are rubber seals; the rotary seal is a unitized rotary seal system; the sealing insulation system is a magnetic fluid sealing device.
According to another aspect of the present invention, there is also provided a roll-to-roll surface modification apparatus, comprising the circular magnetic electrode device of any one of the above; the magnetic force electrode device is used as an intermediate driving roller of the winding type surface modification equipment.
The invention has the beneficial effects that:
the magnetic electrode device comprises a main electrode shell, an electrode core, a sealing insulation system, a rotating electrode and the like, wherein the main electrode shell has good conduction characteristics and is not easy to be magnetized. The electrode core is composed of a magnetic pole seat, a magnetic pole and a central shaft, the magnetic pole is arranged on the magnetic pole seat and is arranged by taking the central shaft as the center, and finally, a main electrode shell, the electrode core, a rotary electrode and a sealing insulation system are arranged by taking the central shaft as the center. Thus, a uniform magnetic field is formed around the magnetic electrode device in the rotating process, and the magnetic electrode device has a good electric signal introducing function. The sealing and insulating system can ensure that the magnetic electrode device has the rotary dynamic sealing effect, so that the magnetic electrode device can be applied to vacuum equipment, and the insulating property can ensure that an electric signal is only transmitted to the magnetic electrode rod and cannot be transmitted to the main body. Ensuring the applicability of the magnetic force electrode device.
The magnetic electrode device provided by the invention has the film conveying function of the driving roller, the functions of electrifying and conducting and the function of forming a magnetic field, and the angle of the magnetic field can be adjusted. The magnetic electrode device not only has the function of leading in electric signals, but also has the function of leading in a refrigerant or a heating medium, the fixed end of the driving roller has the function of rotary sealing, the driving roller has the function of insulating from the main body of the device, and the two ends have the function of preventing water leakage. The electrode device with the functions can be installed on a winding type film coating machine for use, and the magnetic electrode device has the characteristic that the position of a magnetic field does not need to be adjusted intentionally, so that the number of installation parts of the magnetic electrode device is reduced, and the structure is simple. The magnetic electrode device with the functions provided by the invention is used as an intermediate driving roller, meets the production requirement, reduces the research and development time of equipment manufacturers, and is beneficial to the development of the application technical field.
The magnetic electrode device can be used as a discharge electrode pair, the discharge electrode pair is designed by taking a group as a unit, and the discharge electrode pair can be divided into two groups or three groups. A plurality of groups of discharge electrode pairs are arranged on one winding type surface modification device according to the use requirement condition to meet the requirement of process production.
Drawings
FIG. 1 is a schematic diagram of a transverse cross-sectional structure of a magnetometric electrode assembly having a central axis as a through body axis according to an embodiment of the present invention;
FIG. 2 is a schematic longitudinal cut structure of a magnetic electrode device according to an embodiment of the present invention;
FIG. 3 is a schematic view of the installation of the magnetic poles of the magnetic electrode assembly in an embodiment of the present invention;
FIG. 4 is a schematic view of the direction of the cooling medium or heating medium in the magnetic electrode device according to the embodiment of the present invention;
fig. 5 is a schematic view of a split-axis structure of a magnetic electrode device with two-stage central axis according to an embodiment of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and the examples, but without limiting the invention.
Considering that in the whole coiling and uncoiling process of the coiled material, if the surface of the base material is to be modified, a middle driving roller is needed to form a discharge area, the periphery of the discharge area is provided with atmosphere required by the process, the trend of film molecules required in the discharge process is controllable, in order to meet the three conditions, the whole process is usually realized in a vacuum environment, a closed magnetic curve is arranged on the driving roller, and the driving roller is provided with a discharge electrode pair, so that the aim of continuous production of the whole coil can be realized.
In order to achieve the above object, the present invention provides a magnetic electrode device which is an energizable discharge electrode device with a magnetic system. As shown in fig. 1 to 5, the electrode assembly includes a main electrode housing 000, an electrode core 100 disposed inside the main electrode housing 000, and seal insulation systems 200 respectively disposed at both ends of the electrode core 100. A rotary electrode 300 for transmitting an electric signal to the magnetic electrode is disposed between the electrode core 100 and the sealing insulation system 200 at both ends. Wherein main electrode housing 000 has good electrical conduction characteristics and is not easily magnetized.
As shown in fig. 1 to 5, an electrode core 100 is installed inside a main electrode housing 000, and the electrode core 100 includes a magnetic pole seat 110, a magnetic pole 111 and a central shaft 112. The pole socket 110 is tightly attached by means of the poles 111. The magnetic pole base 110 and the central shaft 112 are concentric shafts, the central shaft 112 is located at the central point of the magnetic pole base 110 and fixedly connected, the magnetic poles 111 are arranged around the periphery of the magnetic pole base 110 by taking the magnetic pole base 110 as a fixing device, and the magnetic poles 111 are installed in a staggered mode according to the circumferential direction N-S-N-S. The magnetic pole 111 is preferably machined and disposed in a groove on the circumferential side of the magnetic pole holder 110.
According to the present invention, the central shaft 112 of the electrode core 100 is a hollow shaft for introducing a cooling medium and a heating medium. The center 112 may be a non-through bore hollow shaft. The wall of the hollow shaft is provided with openings for dredging the refrigerant and the heating medium. Flanges are connected to both ends of the central shaft 112, concentric with the central shaft 112, and have an outer diameter corresponding to the inner diameter of the main electrode housing 000, and are preferably mounted (welded) in a matched manner. Preferably, a rotary sealing flange is installed at the end of the central shaft 112, and the rotary sealing flange is usually a magnetic fluid sealing device, and the magnetic fluid sealing body is made of a conductor material.
According to the invention, the rotary sealing flange at the end of the central shaft 112 is made of a conductor material, and preferably, an insulating flange and an insulating gasket are arranged at the rotary sealing flange to serve as transition layers so as to meet the use requirement.
Preferably, a magnetic pole holder 110, a magnetic pole 111, and two inner and two outer barrier flanges 101 and 102 are mounted on a central shaft 112. The inner barrier flange 101 is arranged at the cross-sectional position of the central shaft 112 and the pole socket 110. The inner blocking flange 101 and the pole holder 110 are welded or pressed together and are coaxially arranged with the central shaft 112. The outer barrier flange 102 and the main electrode housing 000 are integrally connected by welding or crimping and are concentric with the central axis, so that the central body of the magnetic electrode is completed.
The central shaft 112 is located at the center of the magnetic electrode body, and the electrode body can rotate in a balanced manner around the central shaft 112. Electric signals are fed into two ends or one end of the central shaft 112, and the feeding amount (current, frequency, power) of the electric signals and the like select the rotating electrode according to the process requirements.
In the magnetic force electrode device of the present invention, the central body portion forms electric and magnetic forces, and an electric signal is introduced through the rotary electrode 300 in surface contact with the central shaft 112. The magnetic force is partly realized by small permanent magnet poles mounted on the pole holder 110. The magnetic poles are installed at intervals along the circumferential direction of the magnetic pole base 110, so that a closed-loop magnetic field is formed along the periphery of the electrodes, and a closed-loop magnetic field can be formed between the electrode pairs.
Preferably, the magnetic pole 111 can be a permanent magnet, the magnetic field strength of the magnet can be 300mT-1000mT, and the magnetic field strength of the magnet can be 500 mT-700 mT.
According to the present invention, main electrode housing 000 is made of a benign conductive material, and has good electrical conduction characteristics. Preferably, the main electrode shell is in a hollow cylindrical shape, and the outer wall surface of the main electrode shell is flat and smooth, so that the base material is scratched or cracked in the film coating process.
According to the present invention, the magnetic pole holder 110 is provided with a groove in the circumferential direction, and the machined magnetic pole 111 is placed in the groove.
According to the present invention, the sealing and insulating system 200 comprises an insulating flange 201, an insulating plate 202 and a rotary seal 203 in sequence from one end near the rotary electrode 300, and the three are closely attached to each other. The seal and insulation system 200 has a rotary seal and insulation function. The sealing means between the insulating flanges 201 is a rubber seal. Rotary seal 203 is a unitized rotary seal system. The seal insulation system 200 is preferably a magnetic fluid seal.
According to the present invention, the material of the pole holder 110 may be a magnetically conductive material. The material used for the sealing and insulating system 200 may be teflon or a machinable ceramic (zirconia) material.
The electrode device with magnetic force provided by the invention can be used in vacuum coating equipment such as PVD, CVD and the like, and can also be applied to equipment for surface treatment of a winding type base material. The electrode device has a conductive function and a magnetic field which is regularly distributed, and has a function of introducing a refrigerant; has the functions of sealing with the mounting body and insulating from the body.
The magnetic electrode device is used as a relatively independent system and has the characteristics of independent magnetic fields, independent rotating electrode access systems, rotating sealing systems, insulation and rotating sealing when being connected with the main body and the like. The magnetic electrode device is used, usually as an intermediate driving roller of a winding device and in a vacuum environment. The magnetic electrode has the function of introducing electrical signals during the rotation process, so the electrode device is provided with the rotating electrode 300 at the outer ends of the central shaft 112 and the outer barrier flange 102 to ensure that the magnetic electrode provides stable electrical signals during the rotation process.
The magnetic pole 111 is arranged on the magnetic pole seat 110, the electrode core 100 and the main electrode shell 000 form the main body of the electrode, and the central shaft 112 can be connected with a cooling medium or a heating medium for constant temperature, so that the main body of the electrode can form controllable temperature during operation. A rotary electrode 300 is mounted on the central shaft 112 for passing an electric signal through the magnetic electrode device. A seal insulation system 200 is installed at the outer end of the central shaft 112, the seal insulation system 200 has dual functions of insulation and rotary seal, the seal insulation system 200 has insulation between the electric signal received by the rotary electrode 300 and the apparatus main body 400, and the rotary seal 203 has seal function for the rotation of the central shaft 112. The magnetic electrode device provided by the invention can realize relatively independent mechanisms in the film coating process, and reduce the production time and research and development cost of customers.
Of course, the above is a preferred embodiment of the present invention. It should be noted that, for a person skilled in the art, several modifications and refinements can be made without departing from the basic principle of the invention, and these modifications and refinements are also considered to be within the protective scope of the invention.
Claims (3)
1. A circular magnetic force electrode device is characterized by comprising a main electrode shell (000), an electrode core (100) arranged inside the main electrode shell (000) and sealing insulation systems (200) respectively arranged at two ends of the electrode core (100); a rotating electrode (300) for transmitting an electric signal to the magnetic electrode is arranged between the electrode core (100) and the sealing and insulating systems (200) at two ends;
the electrode core (100) comprises a magnetic pole seat (110), a magnetic pole (111) and a central shaft (112); the magnetic pole seat (110) is tightly attached by virtue of the magnetic pole (111); the magnetic pole seat (110) and the central shaft (112) are concentric shafts, the magnetic pole (111) takes the magnetic pole seat (110) as a fixing device, and the magnetic pole (111) is arranged around the magnetic pole seat (110);
a magnetic pole seat (110), a magnetic pole (111), two inner separation flanges (101) and two outer separation flanges (102) are arranged on the central shaft (112); the inner isolating flange (101) is arranged at the section position of the central shaft (112) and the magnetic pole seat (110);
the central shaft (112) is a hollow shaft without a through hole; the wall of the hollow shaft is provided with openings for dredging the refrigerant and the heating medium; the inner isolating flange (101) and the magnetic pole seat (110) are welded or pressed into a whole and are coaxially arranged with the central shaft (112); the outer isolating flange (102) and the main electrode shell (000) are connected into a whole in a welding or crimping mode and are concentric with the central shaft (112);
the central shaft (112) is positioned at the central point position of the magnetic pole seat (110), and the magnetic poles (111) are arranged at corresponding positions on the magnetic pole seat and are arranged in a staggered manner according to the circumferential direction N-S-N-S; the circumference of the magnetic pole seat (110) is provided with a groove, and the processed magnetic pole (111) is placed in the groove.
2. The circular magnetic force electrode device according to claim 1, characterized in that the sealing insulation system (200) comprises an insulation flange (201), an insulation plate (202) and a rotary seal (203) in sequence from one end near the rotary electrode (300); the sealing devices between the insulating flange (201) devices are rubber seals; the rotary seal (203) is a unitized rotary seal system; the sealing and insulating system (200) is a magnetic fluid sealing device.
3. A roll-to-roll surface modification apparatus comprising the circular magnetic electrode device of any one of claims 1 to 2; the magnetic force electrode device is used as a middle driving roller of the winding type surface modification equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910042849.8A CN109706432B (en) | 2017-12-11 | 2017-12-11 | Circular magnetic force electrode device and winding type surface modification equipment comprising same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910042849.8A CN109706432B (en) | 2017-12-11 | 2017-12-11 | Circular magnetic force electrode device and winding type surface modification equipment comprising same |
| CN201711303886.7A CN107815661B (en) | 2017-12-11 | 2017-12-11 | Round Magnetic electrode device and takeup type surface modifying apparatus including it |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711303886.7A Division CN107815661B (en) | 2017-12-11 | 2017-12-11 | Round Magnetic electrode device and takeup type surface modifying apparatus including it |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109706432A CN109706432A (en) | 2019-05-03 |
| CN109706432B true CN109706432B (en) | 2021-04-06 |
Family
ID=61605952
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910042849.8A Active CN109706432B (en) | 2017-12-11 | 2017-12-11 | Circular magnetic force electrode device and winding type surface modification equipment comprising same |
| CN201711303886.7A Active CN107815661B (en) | 2017-12-11 | 2017-12-11 | Round Magnetic electrode device and takeup type surface modifying apparatus including it |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711303886.7A Active CN107815661B (en) | 2017-12-11 | 2017-12-11 | Round Magnetic electrode device and takeup type surface modifying apparatus including it |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN109706432B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110220048A (en) * | 2019-04-18 | 2019-09-10 | 厦门阿匹斯智能制造系统有限公司 | A kind of adjustable magnet steel of magnetic field angle |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4581118A (en) * | 1983-01-26 | 1986-04-08 | Materials Research Corporation | Shaped field magnetron electrode |
| JPS59197569A (en) * | 1983-04-25 | 1984-11-09 | Kawasaki Heavy Ind Ltd | Electrode part structure of sputtering apparatus |
| CN2067281U (en) * | 1990-02-26 | 1990-12-12 | 辽宁省环境保护科学研究所 | Multifunction magnetic control sputter ion coating equipment |
| JP3611324B2 (en) * | 2002-06-03 | 2005-01-19 | 信越化学工業株式会社 | Magnetron plasma magnetic field generator |
| US20130008777A1 (en) * | 2010-03-31 | 2013-01-10 | Mustang Vacuum Systems, Inc. | Cylindrical Rotating Magnetron Sputtering Cathode Device and Method of Depositing Material Using Radio Frequency Emissions |
| CN201746583U (en) * | 2010-06-25 | 2011-02-16 | 合肥科烨电物理设备制造有限公司 | Penning discharge ion source flexible material vacuum coating electrode |
| CN103643221B (en) * | 2013-09-14 | 2015-10-28 | 北京印刷学院 | There is the plasma device that magnetic field strengthens rotation array electrode |
| CN203881703U (en) * | 2014-03-17 | 2014-10-15 | 天津英科联合科技有限公司 | Magnetic electrode with adjustable magnetism level |
| CN104532200B (en) * | 2014-12-24 | 2017-05-17 | 四川亚力超膜科技有限公司 | Columnar rotation magnetic control sputtering target |
-
2017
- 2017-12-11 CN CN201910042849.8A patent/CN109706432B/en active Active
- 2017-12-11 CN CN201711303886.7A patent/CN107815661B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109706432A (en) | 2019-05-03 |
| CN107815661B (en) | 2019-08-20 |
| CN107815661A (en) | 2018-03-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102197159B (en) | Take-up vacuum processing device | |
| US10989308B1 (en) | Sealing device with convertible magnetic sealing medium | |
| JP4667337B2 (en) | Sputtering apparatus having a tubular cathode and method of operating the sputtering apparatus | |
| CA2943862A1 (en) | Electrical hollow conductor for an electromagnetic machine | |
| JP2013524015A (en) | Cylindrical rotating magnetoelectric sputtering cathode device and method for depositing material using radio frequency radiation | |
| JP2013135541A (en) | Axial gap rotary electric machine | |
| CN111371193B (en) | Wireless power transmission collector ring and electrical equipment | |
| CN107181150A (en) | The miniature rotary electric connector of magnetic fluid and its design method with switching function | |
| CN109706432B (en) | Circular magnetic force electrode device and winding type surface modification equipment comprising same | |
| CN104852519B (en) | Towards the wheel power-generating device of intelligent tire | |
| US5923106A (en) | Integrated fuel cell electric motor with static fuel cell and rotating magnets | |
| CN209200131U (en) | Antenna holder, radio-frequency antenna component and fusion device | |
| CN107887770A (en) | A kind of electric supply installation | |
| JP2001044054A (en) | Signal and power-source transmitting apparatus and rotary joint and signal transmitting substrate | |
| CN101391330B (en) | Gas-electricity one-piece slip-ring | |
| CN102945729B (en) | High-voltage pulse electric reactor with cooling structure | |
| CN106992416A (en) | A kind of magnetic fluid miniature multipath rotary electric connector and its design method | |
| CN217061745U (en) | Transformer, motor and vehicle | |
| JP2001044715A (en) | Signal transmission board and signal transmitter | |
| WO2019001343A1 (en) | Electromagnetic induction principle based nonlinear resonance type magnetic field energy collecting device | |
| US20190035548A1 (en) | Laminated core rotatable transformer | |
| JP2000150276A (en) | Power transmission apparatus and rotary joint | |
| CN101640332B (en) | Anti-rotating insulating support and anti-rotating method thereof | |
| CN212907291U (en) | Three-phase common mode inductor for power filter | |
| KR102592297B1 (en) | Rf connector including the shieding structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20210319 Address after: 312030 renliwang village, Yangxunqiao Town, Keqiao District, Shaoxing City, Zhejiang Province Applicant after: Shaoxing Zaifeng Intelligent Technology Co.,Ltd. Address before: 101100 Building 5062, No. 6, Caoyuan Yijia, Tongzhou District, Beijing Applicant before: Chen Liguo |
|
| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |