CN109706427A - The preparation method of plane niobium target - Google Patents
The preparation method of plane niobium target Download PDFInfo
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- CN109706427A CN109706427A CN201811618660.0A CN201811618660A CN109706427A CN 109706427 A CN109706427 A CN 109706427A CN 201811618660 A CN201811618660 A CN 201811618660A CN 109706427 A CN109706427 A CN 109706427A
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Abstract
The present invention relates to a kind of preparation methods of plane niobium target.Its main feature is that including the following steps: that (1) takes niobium ingot to be forged, the concrete mode of forging is that radial swage block beats circular shaft to pulling, and the niobium ingot after forging is carried out pickling, the niobium ingot after pickling is heat-treated；(2) niobium ingot that step (1) obtains is forged again, the concrete mode of forging is that forging is flattened in 90 degree of commutations, and the niobium ingot after forging is carried out pickling, the niobium ingot after pickling is heat-treated；(3) niobium ingot for obtaining step (2) carries out rolling niobium plate, is heat-treated to niobium plate, obtains plane niobium target.The present invention makes niobium ingot deformation more evenly in rolling sequence, and cooperates intermediate heat treatment process after processing, homogenizes the tissue of niobium target increasingly, refines, finally obtains the equiaxed grain structure plane niobium target of even tissue, grain size less than 50 μm.
Description
Technical field
The present invention relates to a kind of preparation methods of plane niobium target.
Background technique
Plane niobium target is mainly used for plated film industry, has the target material solid of high-purity flat by energetic particle hits
Plate knocks out atom by physical process, while being passed through gas to sputtering chamber, and the target atom knocked out with sputtering is reacted, shape
It at Coating Materials, and is eventually deposited on substrate material, forms film with certain characteristics.
Sputtering target material requires uniform component, suitable particle size and specific crystallographic orientation, above-mentioned sputtering target material
High request be for obtaining uniform film deposition rate over the entire substrate.Niobium target is mainly used in Surface Engineering material
Material, such as ship, chemical industry, liquid crystal display and heat-resisting, corrosion-resistant highly conductive plated film industry.Plane niobium target is commonly referred to as naked
The back target of itself and copper or aluminium is welded first when in use, then sputters, niobium atom is deposited on substrate material by target, user
On, realize sputter coating.In order to realize the uniformity of plated film, plane niobium target needs broken niobium ingot casting brilliant, guarantees plane niobium target
Material interior tissue perfect recrystallization, crystallite dimension is less than 50 μm, and uniformity.And the side of niobium target is prepared in the prior art
Method is not able to satisfy above-mentioned requirements still, and thus the present invention provides a kind of preparation methods of plane niobium target.
Summary of the invention
The object of the present invention is to provide a kind of preparation method of plane niobium target, the plane niobium target that this method obtains has
Less than 50 μm even tissue, grain size equiaxed grain structures.
A kind of preparation method of plane niobium target, its special feature is that, include the following steps:
(1) niobium ingot is taken to be forged, the concrete mode of forging is that radial swage block beats circular shaft to pulling, by the niobium ingot after forging
Pickling is carried out, the niobium ingot after pickling is heat-treated；
(2) niobium ingot that step (1) obtains to be forged again, the concrete mode of forging is that forging is flattened in 90 degree of commutations,
Niobium ingot after forging is subjected to pickling, the niobium ingot after pickling is heat-treated；
(3) niobium ingot for obtaining step (2) carries out rolling niobium plate, is heat-treated to niobium plate, obtains plane niobium target
Material.
The middle working modulus forged of step (1) is greater than 50%, and the working modulus forged in step (2) is greater than 30%, in step (3)
The working modulus of rolling is greater than 50%.
The working modulus 55%~75% forged in step (1), the working modulus 35%~55% of forging described in step (2),
The working modulus 55%~75% rolled in step (3).
The feed forged in step (1) is 100~150mm, and drafts is 30~60mm, and that forges in step (2) send
Input is 80~120mm, and drafts is 30~100mm.
Hydrofluoric acid, hydrochloric acid and the nitric acid that the pickling solution used in step (1) and step (2) is 1:2:3 for volume ratio
Mixed solution, wherein the concentration of hydrofluoric acid is 40wt%, and the concentration of hydrochloric acid is 37wt%, and the concentration of nitric acid is 65wt%.
The temperature being heat-treated in step (1) is 1000~1300 DEG C, and the soaking time of heat treatment is 60~120min；Step
(2) temperature being heat-treated in is 1000~1300 DEG C, and the soaking time of heat treatment is 60~120min；Heat treatment in step (3)
Temperature be 1100~1300 DEG C, the soaking time of heat treatment is 90~120min.
The billet for being 150~350mm of diameter as the niobium ingot of raw material in step (1).
The present invention provides a kind of preparation methods of plane niobium target, comprising the following steps: niobium ingot is carried out radial swage block
Forging of the circular shaft to pulling is played, the niobium ingot after forging is subjected to pickling, the niobium ingot after pickling is heat-treated；Again by niobium ingot into
Forging is flattened in 90 degree of commutations of row, and the niobium ingot after forging is carried out pickling, the niobium ingot after pickling is heat-treated；Finally by niobium ingot
It is rolled, obtains plane niobium target.For the present invention during preparing plane niobium target, forging process is that radial swage block is beaten
Circle, axial pulling are combined with the mode that forging is flattened in 90 degree of commutations, make columnar zone, Center Equiaxial Crystal area and the niobium in niobium ingot
It implements near ingot edge and is effectively crushed, the metal flow of blank central part increases, and the degree of irregularity of central tissue obtains
To significantly improving, in the case where multi-direction stress, obtain its original as cast condition open grain structure multi-faceted abundant broken,
To promote niobium ingot to obtain the relatively uniform tissue of crystal grain, avoids central part and be not carried out effectively broken and left down to subsequent
The presence of the adverse tissues such as " crystal zone " tissue and open grain structure；Make niobium ingot deformation more evenly in rolling sequence, and after processing
Cooperate intermediate heat treatment process, homogenize the tissue of niobium target increasingly, refines, finally obtain even tissue, grain size
Equiaxed grain structure plane niobium target less than 50 μm.
Detailed description of the invention
Fig. 1 is the metallograph of niobium target prepared by embodiment 1；
Fig. 2 is the metallograph of niobium target prepared by embodiment 2；
Fig. 3 is the metallograph of niobium target prepared by embodiment 3；
Fig. 4 is that forging schematic diagram is flattened in 90 degree of commutations.
Specific embodiment
For a further understanding of the present invention, the preferred embodiment of the invention is described below with reference to embodiment, still
It should be appreciated that these descriptions are only further explanation the features and advantages of the present invention, rather than to the claims in the present invention
Limitation.
In the present invention:
Radial swage block is played circle pulling and is referred to, material carries out radial circle of beating using round swage block and forge along axial pulling when forging
It makes.
90 degree of commutations are flattened forging and are referred to, when forging material along axial pulling, first along one it is radial flatten to be swaged to want
Height is sought, then surrounds 90 degree of axial-rotation, the method for forging is radially flattened along another.(see Fig. 4)
The embodiment of the invention discloses a kind of preparation methods of plane niobium target, comprising the following steps:
A), niobium ingot is forged, the mode of the forging is that radial swage block beats circular shaft to pulling；By the niobium ingot after forging
Pickling is carried out, the niobium ingot after pickling is heat-treated；
B), the obtained niobium ingot of step A) is forged, the mode of the forging is that forging is flattened in 90 ° of degree commutations；It will forging
Niobium ingot after making carries out pickling, and the niobium ingot after pickling is heat-treated；
C), the obtained niobium ingot of step B) is rolled, the niobium plate after rolling is heat-treated, obtain plane niobium target
Material.
The present invention provides a kind of preparation methods of plane niobium target.During preparing niobium target, the present invention is used
It forges with rolling the mode combined, keeps niobium ingot casting brilliant sufficiently broken, obtained the microstructure of uniform refinement, finally obtained
The equiaxed grain structure plane niobium target of even tissue, grain size less than 50 μm.
Plane niobium target prepared by the present invention ingot casting has biggish diameter, and diameter is more than or equal to 150mm, preferably
150mm~350mm, therefore preparation method through the invention obtains the equiax crystal group of even tissue, grain size less than 50 μm
It knits.
The present invention first forges niobium ingot.The above-mentioned niobium ingot present invention requires forging feed, drafts, meeting
The degree and uniformity for influencing niobium ingot die break, need to obtain relevant parameter by many experiments.
In forging process, the niobium ingot is carried out the forging method that radial swage block is beaten circle with axially pulled out by the present invention, with
It is crushed columnar zone, Center Equiaxial Crystal area and the fine grained region of niobium ingot adjacent edges of niobium ingot effectively.This time mistake of forging
The working modulus of journey forging is greater than 50%, it is sufficient to it is sufficiently broken to guarantee that niobium ingot casting crystalline substance is able to, the metal fluidity of central part increases,
Degree of irregularity significantly improves.The working modulus of the forging is preferably 55%~75%.It is more equal in order to obtain niobium ingot
Even deformation should be such that feed entrance point when each time compression in front and back mutually staggers when pulling out operation.
It is preferably 1~2 time that radial direction swage block of the present invention, which beats number that is round, axially pulling out,.The feed of the forging is excellent
It is selected as 100~150mm, drafts is preferably 30~60mm.In order to eliminate the impurity that surface generates in forging process, the present invention will
Niobium ingot after forging carries out pickling, and the solution of the pickling is preferably the mixed of the hydrofluoric acid that volume ratio is 1:2:3, hydrochloric acid and nitric acid
Solution is closed, wherein the concentration of hydrofluoric acid is 40wt%, and the concentration of hydrochloric acid is 37wt%, and the concentration of nitric acid is 65wt%.In order to disappear
Except the residual stress in forging process, the niobium ingot after pickling is heat-treated by the present invention, and the temperature of the heat treatment is preferably
1000 DEG C~1300 DEG C, more preferably 1100 DEG C~1200 DEG C, the soaking time of the heat treatment is preferably 60~120min, more
Preferably 75min~90min.
The present invention then forges niobium ingot, described to be forged to 90 degree of commutations flattening forgings.Niobium ingot warp of the present invention
It crosses radial swage block to beat circle, axially pull out to flatten with 90 degree of commutations and forge, makes niobium ingot in the case where multi-direction stress, niobium ingot is original
As cast condition open grain structure obtained it is multi-faceted broken, so that being conducive to niobium ingot obtains uniform grain structure.90 degree of commutations
The working modulus for flattening forging is preferably greater than 30%, more preferably 35%~55%.The number for clapping flat forging is preferably 1~2
It is secondary.The feed of the forging is preferably 80~120mm, and drafts is preferably 30~100mm.
In order to eliminate the impurity that surface generates in forging process, the niobium ingot after forging is carried out pickling, the acid by the present invention
The solution washed is preferably the mixed solution that volume ratio is the hydrofluoric acid of 1:2:3, hydrochloric acid and nitric acid, and wherein the concentration of hydrofluoric acid is
40wt%, the concentration of hydrochloric acid are 37wt%, and the concentration of nitric acid is 65wt%.In order to eliminate the residual stress in forging process, this
Niobium ingot after pickling is heat-treated by invention, and the temperature of the heat treatment is preferably 1000 DEG C~1300 DEG C, more preferably
1100 DEG C~1200 DEG C, the soaking time of the heat treatment is preferably 60~120min, more preferably 75min~90min.It is forging
During making, the heat treatment being related to therebetween can also make the tissue of niobium ingot increasingly homogenize, refine.
In order to keep niobium ingot deformation more uniform, the present invention rolls the niobium ingot after forging.The working modulus of the rolling
Greater than 50%, preferably 55%~75%.The present invention is not particularly limited the mode of the rolling, is those skilled in the art
Rolling mode known to member.
The niobium plate obtained after rolling is finally heat-treated by the present invention, to eliminate the residual stress in the operation of rolling, institute
The temperature for stating heat treatment is preferably 1100 DEG C~1300 DEG C, and more preferably 1150 DEG C~1250 DEG C, when the heat preservation of the heat treatment
Between preferably 90min~120min, more preferably 100min~110min.The heat treatment carried out after rolling is conducive to make
Niobium ingot obtains the small equiaxed grain structure of even tissue, grain size after a series of forging and rolling.
Niobium target is usually to weld together muti-piece target when in use, in order to reduce weld seam, to single flat niobium target
The requirement of material is higher and higher.Preferably, niobium target is finally machined by the present invention again, so that the plane of target
Degree is less than 0.2mm, and surface roughness is less than 0.8 μm.The present invention smooths target using levelling machine, is less than its flatness
0.2mm guarantees the surface roughness of target less than 0.8 μm using polishing and burnishing machine rubbing down.
For the present invention during preparing plane niobium target, forging process is that radial swage block beats circle, axial pulling and 90 ° of degree
The mode that forging is flattened in commutation combines, and using reasonable deformed area geometrical factor, keeps columnar zone in niobium ingot, center isometric
Effectively broken, the metal flow increase of blank central part, the unevenness of central tissue are implemented near crystalline region and niobium ingot edge
Even degree is significantly improved, and in the case where multi-direction stress, has obtained its original as cast condition open grain structure multi-faceted
It is sufficiently broken, so that niobium ingot be promoted to obtain the relatively uniform tissue of crystal grain, avoid central part be not carried out it is effectively broken and right
The subsequent presence for leaving down the adverse tissues such as " crystal zone " tissue and open grain structure.
In rolling sequence, using reasonable reduction in pass, controlled rolling deformed area geometrical factor keeps niobium ingot deformation more equal
It is even, and cooperate intermediate heat treatment process after processing, it homogenizes the tissue of niobium target increasingly, refines, finally obtain
The equiaxed grain structure plane niobium target of even tissue, grain size less than 50 μm.In addition, the present invention is on the basis that above-mentioned niobium ingot is processed
On, by the smoothing, machining and surface treatment in later period, the plane niobium target for meeting sputter coating requirement has been prepared.
For a further understanding of the present invention, below with reference to embodiment to the preparation method of plane niobium target provided by the invention
It is described in detail, protection scope of the present invention is not limited by the following examples.
Embodiment 1:
The niobium ingot of Φ 190mm × L is successively carried out to radial swage block and beats circle, axial pulling forging, obtains Φ 100mm × Lmm
Niobium ingot, the feed L=100mm of forging, drafts Δ h=30mm operate to obtain more uniform deformation in pulling
When, it should make feed entrance point when each time compression in front and back is interlaced to open；By niobium ingot obtained above saw material to L=200mm；Acid
It washes: HF:HCL:HNO3(volume ratio, wherein the concentration of hydrofluoric acid is 40wt% to=1:2:3, and the concentration of hydrochloric acid is 37wt%, nitric acid
Concentration be 65wt%, similarly hereinafter), remove surface impurity, visually observe visible niobium metal gloss without miscellaneous spot；After pickling
Niobium ingot is heat-treated, and temperature is 1200 DEG C, keeps the temperature 60min.
Flat forging is clapped into the 90 ° of degree commutations of the above-mentioned niobium ingot for obtaining Φ 100mm, Φ 100mm → radial direction claps flat H70mm → 90 °
It spends commutation → radial direction and claps flat B150 × H50mm, forge feed L=80mm, drafts Δ h=40mm, it is more uniform to obtain
Deformation, when clapping flat forging operation, feed entrance point when front and back should be made to compress for each time interlaced is opened；Pickling: HF:HCl:
HNO3(volume ratio, wherein the concentration of hydrofluoric acid is 40wt% to=1:2:3, and the concentration of hydrochloric acid is 37wt%, and the concentration of nitric acid is
65wt%, similarly hereinafter), surface impurity is removed, visually observes visible niobium metal gloss without miscellaneous spot；Niobium ingot after pickling is carried out
Heat treatment, temperature are 1200 DEG C, keep the temperature 60min.
Finished product rolling: it is rolled down to δ=6.5mm；Finished product heat treatment: heat treatment temperature is 1200 DEG C, keeps the temperature 90min；Finally
Using levelling machine smoothing, sampling, blanking, surface rubbing down, finished product processing, plane niobium target is obtained.
It is as seen from the figure, manufactured in the present embodiment as shown in FIG. 1, FIG. 1 is the metallograph of niobium target manufactured in the present embodiment
The grain size of niobium target is 45 μm.(it can be seen from the figure that crystallite dimension is 45um, the requirement less than 50um is organized thinner
It is small, but degree of refinement is insufficient, tissue odds occurs, has the tendency that crystal grain is grown up.)
Embodiment 2:
The niobium ingot of Φ 285mm × L is successively carried out to radial swage block and beats round with axial pulling, obtain having a size of Φ 190mm ×
The niobium ingot of Lmm forges feed L=120mm, drafts Δ h=60mm, to obtain more uniform deformation, operates in pulling
When, it should make feed entrance point when each time compression in front and back is interlaced to open；By above-mentioned niobium ingot length saw material to L=400mm；Pickling:
HF:HCl:HNO3=1:2:3 (volume ratio) removes surface impurity, visually observes visible niobium metal gloss without miscellaneous spot；It will be sour
The niobium ingot washed is heat-treated, and temperature is 1200 DEG C, keeps the temperature 60min；
Above-mentioned niobium ingot is clapped into flat forging, claps flat forging for the first time, Φ 190mm → radial direction claps flat H120mm → 90 ° degree commutation
→ radial direction claps flat B250 × H50mm, forges feed L=100mm, drafts Δ h=80mm, to obtain more uniform change
Shape should make feed entrance point when each time compression in front and back is interlaced to open when clapping flat forging operation；Pickling: HF:HCl:HNO3=
1:2:3 (volume ratio) removes surface impurity, visually observes visible niobium metal gloss without miscellaneous spot；By the niobium ingot after pickling into
Row heat treatment, temperature are 1100 DEG C, keep the temperature 60min: being rolled down to δ=6mm；Finished product heat treatment: heat treatment temperature is 1100 DEG C, is protected
Warm 60min；Finally smoothing, sampling, blanking, surface rubbing down, finished product processing, obtain plane niobium target.Fig. 2 is the present embodiment preparation
Niobium target metallograph, as seen from the figure, the grain size of niobium target manufactured in the present embodiment is 20 μm.It (can from figure
Out, crystallite dimension 20um, the requirement less than 50um, tissue very fine uniform, degree of refinement are sufficient.)
Embodiment 3:
The niobium ingot of Φ 190mm × L is successively carried out to radial swage block and beats round with axial pulling, obtain having a size of Φ 120mm ×
The niobium ingot of Lmm, the feed L=100mm of forging, drafts Δ h=30mm grasp to obtain more uniform deformation in pulling
When making, it should make feed entrance point when each time compression in front and back is interlaced to open；By above-mentioned niobium ingot length saw material to L=400mm；Acid
It washes: HF:HCl:HNO3=1:2:3 (volume ratio) removes surface impurity, visually observes visible niobium metal gloss without miscellaneous spot；
The niobium ingot that pickling is obtained is heat-treated, and temperature is 1000 DEG C, keeps the temperature 90min；
Above-mentioned niobium ingot is clapped into flat forging, Φ 120mm → radial direction clap flat H80mm → 90 ° degree commutation → flat B150 of radial direction bat ×
H70mm forges feed L=80mm, drafts Δ h=40mm, to obtain more uniform deformation, when clapping flat operation, answers
Make feed entrance point when each time compression in front and back is interlaced to open, it is consistent controllable in order to guarantee to depress every time, it is done using standard gauge block
For cushion block；Pickling: HF:HCl:HNO3=1:2:3 (volume ratio), remove surface impurity, visually observe visible niobium metal gloss without
Miscellaneous spot；Heat treatment: heat treatment temperature is 1000 DEG C, keeps the temperature 90min；Niobium ingot finished product obtained above is rolled: being rolled down to δ
=15mm；Finished product heat treatment: heat treatment temperature is 1100 DEG C, keeps the temperature 90min；Finally smoothing, sampling, blanking, surface rubbing down, at
Product processing, obtains plane niobium target.Fig. 3 is the metallograph of niobium target manufactured in the present embodiment, as seen from the figure, the present embodiment system
The grain size of standby niobium target is 40 μm.(it can be seen from the figure that crystallite dimension is 40um, the requirement less than 50um, tissue is carefully
It is small, it is relatively uniform.)
The above description of the embodiment is only used to help understand the method for the present invention and its core ideas.It should be pointed out that pair
For those skilled in the art, without departing from the principle of the present invention, the present invention can also be carried out
Some improvements and modifications, these improvements and modifications also fall within the scope of protection of the claims of the present invention.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (7)
1. a kind of preparation method of plane niobium target, which comprises the steps of:
(1) niobium ingot is taken to be forged, the concrete mode of forging is that radial swage block beats circular shaft to pulling, and the niobium ingot after forging is carried out
Niobium ingot after pickling is heat-treated by pickling；
(2) niobium ingot that step (1) obtains is forged again, the concrete mode of forging is that forging is flattened in 90 degree of commutations, will be forged
Niobium ingot after making carries out pickling, and the niobium ingot after pickling is heat-treated；
(3) niobium ingot for obtaining step (2) carries out rolling niobium plate, is heat-treated to niobium plate, obtains plane niobium target.
2. the preparation method of plane niobium target as described in claim 1, it is characterised in that: the working modulus forged in step (1)
Greater than 50%, the working modulus forged in step (2) is greater than 30%, and the working modulus rolled in step (3) is greater than 50%.
3. the preparation method of plane niobium target as claimed in claim 2, it is characterised in that: the working modulus forged in step (1)
55%~75%, the working modulus 35%~55% of forging described in step (2), the middle working modulus 55% rolled of step (3)~
75%.
4. the preparation method of plane niobium target as described in claim 1, it is characterised in that: the feed forged in step (1)
For 100~150mm, drafts is 30~60mm, and the feed forged in step (2) is 80~120mm, drafts is 30~
100mm。
5. the preparation method of plane niobium target as described in claim 1, it is characterised in that: used in step (1) and step (2)
Pickling solution be hydrofluoric acid, hydrochloric acid and nitric acid that volume ratio is 1:2:3 mixed solution, wherein the concentration of hydrofluoric acid be
40wt%, the concentration of hydrochloric acid are 37wt%, and the concentration of nitric acid is 65wt%.
6. the preparation method of plane niobium target as described in claim 1, it is characterised in that: the temperature being heat-treated in step (1)
It is 1000~1300 DEG C, the soaking time of heat treatment is 60~120min；The temperature being heat-treated in step (2) is 1000~1300
DEG C, the soaking time of heat treatment is 60~120min；The temperature being heat-treated in step (3) is 1100~1300 DEG C, heat treatment
Soaking time is 90~120min.
7. the preparation method of plane niobium target as described in claim 1, it is characterised in that: the niobium in step (1) as raw material
Ingot is the billet of 150~350mm of diameter.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110722014A (en) * | 2019-10-21 | 2020-01-24 | 青岛理工大学 | Preparation method and application of Nb ingot blank and Nb rod |
| CN113718110A (en) * | 2021-08-11 | 2021-11-30 | 九江有色金属冶炼有限公司 | Preparation method of high-quality niobium plate for controlling plate structure by accumulated energy |
| CN113909414A (en) * | 2021-09-30 | 2022-01-11 | 宁波江丰电子材料股份有限公司 | Preparation method of tantalum target blank |
| CN115125461A (en) * | 2022-02-22 | 2022-09-30 | 宁波江丰电子材料股份有限公司 | Niobium target material and preparation method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593708A (en) * | 2015-01-16 | 2015-05-06 | 宁夏东方钽业股份有限公司 | Preparation method of planar niobium target |
-
2018
- 2018-12-28 CN CN201811618660.0A patent/CN109706427A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104593708A (en) * | 2015-01-16 | 2015-05-06 | 宁夏东方钽业股份有限公司 | Preparation method of planar niobium target |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110722014A (en) * | 2019-10-21 | 2020-01-24 | 青岛理工大学 | Preparation method and application of Nb ingot blank and Nb rod |
| CN113718110A (en) * | 2021-08-11 | 2021-11-30 | 九江有色金属冶炼有限公司 | Preparation method of high-quality niobium plate for controlling plate structure by accumulated energy |
| CN113909414A (en) * | 2021-09-30 | 2022-01-11 | 宁波江丰电子材料股份有限公司 | Preparation method of tantalum target blank |
| CN113909414B (en) * | 2021-09-30 | 2023-12-29 | 宁波江丰电子材料股份有限公司 | Preparation method of tantalum target blank |
| CN115125461A (en) * | 2022-02-22 | 2022-09-30 | 宁波江丰电子材料股份有限公司 | Niobium target material and preparation method thereof |
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