CN109671658B - Substrate loading system and substrate loading method thereof - Google Patents
Substrate loading system and substrate loading method thereof Download PDFInfo
- Publication number
- CN109671658B CN109671658B CN201811439222.8A CN201811439222A CN109671658B CN 109671658 B CN109671658 B CN 109671658B CN 201811439222 A CN201811439222 A CN 201811439222A CN 109671658 B CN109671658 B CN 109671658B
- Authority
- CN
- China
- Prior art keywords
- substrate
- lifting
- storage box
- cassette
- cover plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67386—Closed carriers characterised by the construction of the closed carrier
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a substrate loading system and a loading method thereof, wherein the system comprises a loading device and at least one substrate storage cassette, and the substrate storage cassette is movably accommodated in the loading device; the loading device comprises at least one box body and a lifting mechanism matched with the box body, wherein the lifting mechanism comprises a driving assembly and a lifting assembly; the substrate storage cassette comprises a storage box and a substrate placing assembly, wherein the substrate placing assembly is matched with the lifting mechanism, and the lifting mechanism drives the substrate placing assembly to be placed into the storage box or be drawn out of the storage box through the lifting assembly. The invention has the beneficial effects that: the substrate cleaning and the evaporation production line are separated, and the clean substrate is stored in a dry nitrogen environment to prevent the surface of the substrate from being polluted; when the scheme is on a production line, only two independent box bodies and a plurality of small substrate storage cavities are needed; the two independent substrate loading boxes are used for exchange work, and the requirements of the OLED equipment on the flow sheet are met.
Description
Technical Field
The invention belongs to the technical field of substrate evaporation, and particularly relates to a substrate loading system and a substrate loading method thereof.
Background
Organic thin film electroluminescent display devices (OLEDs) are used in the field with wide application prospects, are rapidly developed in recent years, and have very large market demands every year;
the technological process of the OLED panel is to plate a plurality of layers of organic materials on a clean ITO substrate by evaporation, and finally plate a layer of metal electrode. Before the organic material is evaporated, the ITO substrate must be cleaned, and the cleaned ITO substrate is generally put into vacuumOr in a dry nitrogen environment, the ITO surface is protected from being polluted; the existing large evaporation equipment integrates substrate cleaning and drying into the whole OLED production line, so that the size of the whole production line is too large, the cleaned ITO substrate is placed into a vacuum cavity with a transmission device inside, and a plurality of vacuum cavities are arranged side by side to form a vacuum gradient environment with the vacuum degree from low to high; after the substrate enters a certain cavity, the front-stage valve is closed, the high-pumping-speed pump is started, the vacuum degree is increased, and the next-stage valve is opened to enter the next cavity. However, this solution requires a plurality of chambers, each of which has a large size and a high pumping speed, and requires a vacuum degree of 1bar to 1.0 x 10-5Pa, which results in a cost-prohibitive OLED device with this solution.
For small experimental evaporation equipment, an ITO substrate loading cavity is generally arranged, the ITO substrate is placed after being opened every time, and then vacuum pumping is carried out, so that the surface of the ITO substrate is easily exposed in the air to cause serious pollution, and the performance of an OLED panel is greatly influenced.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a substrate loading system and a substrate loading method thereof.
The purpose of the invention is realized by the following technical scheme:
the substrate loading system comprises a loading device and at least one substrate storage cassette, wherein the substrate storage cassette is movably accommodated in the loading device;
the loading device comprises at least one box body and a lifting mechanism matched with the box body, and the lifting mechanism comprises a driving assembly and a lifting assembly;
the substrate storage cassette comprises a storage box and a substrate placing assembly, wherein the substrate placing assembly is matched with the lifting mechanism, and the lifting mechanism drives the substrate placing assembly to be placed into the storage box or be drawn out of the storage box through the lifting assembly.
Preferably, the magazine is provided with an opening through which the substrate placement module is put into or taken out of the magazine;
the substrate placing assembly comprises a cassette cover plate and a substrate frame arranged below the cassette cover plate, a substrate holder used for horizontally placing a substrate is arranged on the substrate frame, the cassette cover plate is connected with the storage box in a sealing and clamping manner, and the edges of the two sides of the cassette cover plate extend outwards to protrude out of the width of a box opening of the storage box to form wing-shaped parts matched with the lifting mechanism.
Preferably, a sealing component matched with the opening of the storage box is arranged on the cassette cover plate, and a positioning component convenient for being connected with the storage box is arranged on the cassette cover plate.
Preferably, the storage box or the cassette cover plate is provided with a valve for charging and discharging gas and a one-way valve communicated with the inside of the storage box in a one-way mode, and the communication direction of the one-way valve is that gas can flow from the inside of the storage box to the outside of the storage box.
Preferably, the lifting mechanism comprises a lifting cover plate and a lifting part arranged on the lifting cover plate, the lifting part comprises a lifting rod, a lifting cross rod is vertically arranged at the bottom of the lifting rod, the upper end of the lifting rod extends out of the lifting cover plate and is connected with the driving mechanism, and a lifting hook connected with the clamping structure is arranged at the bottom of the lifting cross rod.
Preferably, the lifting mechanism further comprises limiting frames arranged on two sides of the lifting cover plate, guide rods are arranged in the limiting frames, two ends of each guide rod are respectively and vertically arranged at the bottom of the lifting cover plate and on the limiting frames, two ends of each lifting cross rod are respectively sleeved on the guide rods, and the lifting cross rods are driven to move on the guide rods through the movement of the lifting rods.
Preferably, a limiting mechanism for limiting the movement direction and the movement position of the substrate storage cassette is arranged in the box body.
Preferably, the bottom of the box body is provided with a guide rail, and the bottom of the storage box is provided with a roller matched with the guide rail.
Preferably, the box body is provided with a taking port.
Preferably, the substrate loading method of the substrate loading system as described in any of the above, characterized by: the method comprises the following steps:
s1, placing the substrate in a substrate placing component of the cassette;
s2, combining the substrate placing assembly with the storage box and sealing the substrate placing assembly under negative pressure;
s3, placing the substrate storage cassette into the box body and placing the substrate storage cassette at a preset position;
s4, vacuumizing the box body to the vacuum degree required by the operation;
s5, the lifting mechanism drives the substrate placing component to an operating position, and the lifting mechanism controls the height of the substrate placing component to be lifted according to the substrate taking requirement, so that the substrate is conveniently obtained.
The invention has the beneficial effects that: the invention separates the substrate cleaning and the evaporation production line, stores the clean substrate in the protective gas and prevents the surface of the substrate from being polluted; the substrate storage cassette can be pre-vacuumized, so that the phenomenon that the vacuum degree cannot be ensured due to the conversion among a plurality of devices in the prior art is avoided. Meanwhile, when the scheme is on a production line, only two independent box bodies and a plurality of small substrate storage cassettes are needed; the independent substrate loading box body is used for exchanging work, and the requirement of the OLED equipment on the flow sheet is met.
Drawings
FIG. 1: the external structure of the invention is schematically shown in a disassembled state, and at the moment, the lifting mechanism is positioned outside the shell.
FIG. 2: the invention is a schematic three-dimensional structure.
FIG. 3: the invention discloses a substrate storage cassette structure schematic diagram.
FIG. 4: the lifting mechanism of the invention has a schematic structure when lifting the substrate.
FIG. 5: the substrate storage cassette of the present invention is shown in schematic structural view as it is advanced into the loading device.
FIG. 6: the structure of the substrate storage cassette of the invention is schematically shown after being pushed into the loading device.
Detailed Description
The present invention will be described in detail with reference to the following embodiments, and a substrate loading system is disclosed, which is shown in fig. 1-4, and comprises a loading device and at least one substrate storage cassette movably disposed in the loading device. The following embodiments are described in terms of a substrate storage cassette.
The loading device comprises a box body 2 and a lifting mechanism arranged on the upper part of the box body 2. An operation opening convenient for opening the box is formed in one surface of the box body 2. The other side of the box 2 is provided with a take-out port 22 for taking out the substrate into the next vacuum chamber. The taking port 22 and the operation port are arranged on opposite surfaces of the box body 2. The access opening may also take other forms, such as an access handle or the like, which serves to facilitate opening of the box. The lifting mechanism moves up and down in the box body 2 through a driving assembly; the substrate storage cassette includes a magazine 4, and a substrate placing assembly disposed in the magazine 4. The lifting mechanism drives the substrate placing assembly to move up and down in the box body 2 through the lifting assembly. In order to ensure the stability of the substrate storage cassette in the horizontal direction of the box body 2, a limiting mechanism 44 used for limiting the horizontal movement of the substrate storage cassette is arranged at the bottom of the box body 2, the limiting mechanism 44 is arranged at two sides of the box body, and a limiting column used for limiting the longitudinal position of the storage cavity is further arranged on the side wall of the box body 2. According to the invention, the limiting mechanism is a limiting block, the limiting block is provided with a strip-shaped groove, and the distance between the limiting blocks at two ends can be adjusted through the strip-shaped groove, so that the storage box 4 with different sizes can be adapted.
Specifically, the lifting mechanism comprises a lifting cover plate 1 and a lifting part arranged on the lifting cover plate 1, the lifting part comprises a lifting rod 14, a lifting cross rod 13 is vertically arranged at the bottom of the lifting rod 14, the upper end of the lifting rod 14 extends out of the lifting cover plate 1 and is connected with a driving assembly, and a lifting hook 15 connected with the clamping structure is arranged at the bottom of the lifting cross rod 13. For better lifting and positioning, the lifting hook 15 is provided with a positioning mechanism, in this embodiment, the positioning mechanism is a positioning pin 16, and is used for matching with a positioning hole on the wing 38.
For the stability of the lifting, the lifting rod 14 is provided with two, and correspondingly, the guide rod is provided with two, however, the number thereof is not an absolute limitation of the present invention, and can be specifically set according to the requirement.
The lifting mechanism further comprises limiting frames 11 arranged on two sides of the lifting cover plate 1, guide rods 12 are arranged in the limiting frames in order to guarantee lifting stability and perpendicularity, two ends of each guide rod 12 are perpendicularly arranged on the bottom of the lifting cover plate and the corresponding limiting frame 11 respectively, two ends of each lifting cross rod 13 are sleeved on the corresponding guide rod 12 respectively, and the lifting cross rods 12 are driven to move on the corresponding guide rods 12 through movement of the lifting rods.
The substrate storage cassette is detachably arranged in the box body 2, specifically, the bottom of the box body 2 is provided with a guide rail 21, the bottom of the substrate storage cassette is provided with a roller 43, and the substrate storage cassette can be easily moved through the roller, so that the substrate storage cassette is convenient to transfer; the roller wheels are matched with the guide rails, and the substrate storage cassette can be easily pushed into the box body 2 through the roller wheels 43.
The storage box 4 is a cavity with an opening formed in the upper part, and the substrate placing assembly is placed in the storage box 4 through the opening, namely the substrate placing assembly can be pulled and pulled in the storage box 4 through the opening. The substrate placing component comprises a substrate frame 34 and a cassette cover plate 3 connected above the substrate frame 34, wherein substrate holders 41 used for horizontally placing substrates are sequentially and uniformly distributed on the substrate frame 34 from top to bottom. The two side edges of the cassette cover plate 3 extend outwards to protrude the width of the storage box opening to form wing parts 38 connected with the lifting mechanism. The wing 38 can be provided with a positioning hole to cooperate with the positioning pin 16 on the lifting hook, so as to achieve faster positioning and better lifting. The locating hole that sets up on this wing 38 also can adopt the stopper form, set up in the bottom of wing 38, with the positioning mechanism cooperation on the lifting hook to quicker location is favorable to better promoting, avoids the substrate of substrate storage cassette to place the subassembly and takes place the slip of horizontal direction when being mentioned, causes the substrate to place breaking away from hoist mechanism and drop of subassembly.
The cassette cover plate 3 is provided with a sealing component for sealing with the storage box 4, and the sealing component is arranged at the bottom of the cassette cover plate 3. In order to better connect the cassette cover plate 3 with the storage box, a positioning component which is convenient to connect with the storage box is arranged on the cassette cover plate 3, and the positioning component is a second positioning pin 33 and a second positioning hole 32 which are matched with each other.
Specifically, the side wall of the storage box at the opening extends transversely to form a combining part 37, the second positioning pin 33 is arranged on the combining part 37, and the second positioning hole 32 is arranged on the wing part 38; furthermore, the combining portion 37 is provided with an engaging groove 35 that is concave inward, the wing portion 38 is provided with an engaging block 36 that corresponds to the engaging groove 35, the engaging block 36 is matched with the engaging groove 35, and the engaging block 36 is matched with the engaging groove 35 to enable the cassette cover plate 3 to be positioned and connected with the opening more quickly and stably. All the components in the invention can be disassembled, so that the replacement is convenient and fast, the mechanical realization principle is reliable, and the practicability is high.
The side wall of the storage box 4 is provided with a valve 45 for charging and discharging gas, and the center of the cassette cover plate 3 is provided with a one-way valve 31 for better adjusting the vacuum degree in the storage box. Of course, the valve 45 and the check valve 31 may be interchanged, that is, the side wall of the storage box 4 is provided with a check valve, and the cassette cover plate 3 is provided with a valve for charging and discharging air. Optionally, the valve 45 and the check valve 31 are disposed on a sidewall of the storage tank 4, and during the process of charging and discharging the gas, the gas flow directions at the valve 45 and the check valve 31 are parallel to the substrate, so as to prevent the gas flow from vertically impacting the substrate to cause deviation.
The invention also discloses a device and a method of the evaporation front end substrate loading equipment for the evaporation production line, which comprises the following steps:
s1, placing the substrate in a substrate placing component of the cassette;
s2, combining the substrate placing assembly with the storage box and sealing the substrate placing assembly under negative pressure;
s3, placing the substrate storage cassette into the box body and placing the substrate storage cassette at a preset position;
s4, vacuumizing the box body to the vacuum degree required by the operation;
s5, the lifting mechanism drives the substrate placing component to an operating position, and the lifting mechanism controls the height of the substrate placing component to be lifted according to the substrate taking requirement, so that the substrate is conveniently obtained.
In another embodiment, the method for assembling the evaporation front end sheet loading device for the evaporation production line, which is combined with fig. 5-6, comprises the following steps:
s1, placing the cleaned substrate 42 in the substrate holder 41 of the substrate placement assembly; the distance between the upper and lower adjacent substrate holders 41 can be set as desired.
S2, placing the substrate placing assembly in the storage box 4 through the positioning assembly, and keeping the sealing of the storage box through the sealing assembly of the substrate placing assembly; the seal assembly of the present invention takes the form of a seal ring.
S3, vacuumizing the storage box through a valve 45 on the side wall of the storage box 4, and filling protective gas into the storage box to protect the substrate; the protective gas may be nitrogen, argon, helium, but is not limited in the present invention. The control of the vacuum degree can be controlled individually by a control system to more accurately meet the required requirements.
S4, opening the loading device, pushing the storage box 4 into the box body 2 along the guide rail 21 at the bottom of the box body through the roller 43, arranging the storage box in place through the limiting mechanism in the box body 2, and closing the loading device.
S5, vacuumizing the box body 2 again, and adjusting the vacuum degree in the storage box through the one-way valve 31 on the cassette cover body 3; specifically, when the degree of vacuum in the chamber 2 is excessively high, the check valve 31 is automatically opened due to the pressure, so that the degree of vacuum in the chamber 2 and the substrate storage cassette can be adjusted.
S6, when the vacuum degrees in the box body 2 and the storage box 4 reach the preset vacuum threshold value, the driving assembly is started through an instruction sent by the control module and drives the lifting mechanism to move; the specific control procedures in the present invention are not important in the protection of the present application and therefore will not be described herein again.
S7, the lifting mechanism drives the cassette cover plate 3 to move upward away from the storage box 4, thereby obtaining a substrate with high cleanliness. Because the loading device is connected with the substrate taking cavity of the evaporation production line, when the substrate frame is lifted, the manipulator in the substrate taking cavity takes the substrate out of the substrate frame through the taking opening 22.
In practical use, in order to meet the requirements of the OLED equipment for flow sheets, a plurality of substrate storage cassettes can be adopted for alternative replacement, of course, a plurality of groups of substrate storage cassettes can be arranged in the loading device, substrates can be taken from the substrate storage cassettes in turn, or the independent loading device and the substrate storage cassettes are adopted for continuous circulation, so that the taking efficiency is improved.
There are, of course, many other specific embodiments of the invention and these are not to be considered as limiting. All technical solutions formed by using equivalent substitutions or equivalent transformations fall within the scope of the claimed invention.
Claims (10)
1. A substrate loading system, characterized by: the substrate storage device comprises a loading device and at least one substrate storage cassette, wherein the substrate storage cassette is movably accommodated in the loading device;
the loading device comprises at least one box body and a lifting mechanism matched with the box body, and the lifting mechanism comprises a driving assembly and a lifting assembly;
the substrate storage cassette comprises a storage box and a substrate placing assembly, wherein the substrate placing assembly is matched with the lifting mechanism, and the lifting mechanism drives the substrate placing assembly to be placed into the storage box or be drawn out of the storage box through the lifting assembly.
2. The substrate loading system of claim 1, wherein: the storage box is provided with an opening, and the substrate placing assembly is placed in or pulled out of the storage box through the opening;
the substrate placing assembly comprises a cassette cover plate and a substrate frame arranged below the cassette cover plate, a substrate holder used for horizontally placing a substrate is arranged on the substrate frame, the cassette cover plate is connected with the storage box in a sealing and clamping manner, and the edges of the two sides of the cassette cover plate extend outwards to protrude out of the width of a box opening of the storage box to form wing-shaped parts matched with the lifting mechanism.
3. The substrate loading system of claim 2, wherein: the cassette cover plate is provided with a sealing component matched with the opening of the storage box, and the cassette cover plate is provided with a positioning component convenient for being connected with the storage box.
4. The substrate loading system of claim 2, wherein: the storage box or the cassette cover plate is provided with a valve for charging and discharging gas and a one-way valve communicated with the inside of the storage box in a one-way mode, and the communication direction of the one-way valve is that gas can flow to the outside of the storage box from the inside of the storage box.
5. The substrate loading system of claim 2, wherein: the lifting mechanism comprises a lifting cover plate and a lifting part arranged on the lifting cover plate, the lifting part comprises a lifting rod, a lifting cross rod is vertically arranged at the bottom of the lifting rod, the upper end of the lifting rod extends out of the lifting cover plate and is connected with a driving mechanism, and a lifting hook connected with the clamping structure is arranged at the bottom of the lifting cross rod.
6. The substrate loading system of claim 5, wherein: the lifting mechanism further comprises limiting frames arranged on two sides of the lifting cover plate, guide rods are arranged in the limiting frames, two ends of each guide rod are respectively and vertically arranged at the bottom of the lifting cover plate and the limiting frames, two ends of each lifting cross rod are respectively sleeved on the guide rods, and the lifting cross rods are driven to move on the guide rods through movement of the lifting cross rods.
7. The substrate loading system of claim 1, wherein: and a limiting mechanism used for limiting the movement direction and the movement position of the substrate storage cassette is arranged in the box body.
8. The substrate loading system of claim 1, wherein: the bottom of the box body is provided with a guide rail, and the bottom of the storage box is provided with a roller matched with the guide rail.
9. The substrate loading system of claim 1, wherein: the box body is provided with a taking port.
10. The substrate loading method of the substrate loading system according to any one of claims 1 to 9, wherein: the method comprises the following steps:
s1, placing the substrate in a substrate placing component of the cassette;
s2, combining the substrate placing assembly with the storage box and sealing the substrate placing assembly under negative pressure;
s3, placing the substrate storage cassette into the box body and placing the substrate storage cassette at a preset position;
s4, vacuumizing the box body to the vacuum degree required by the operation;
s5, the lifting mechanism drives the substrate placing component to an operating position, and the lifting mechanism controls the height of the substrate placing component to be lifted according to the substrate taking requirement, so that the substrate is conveniently obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439222.8A CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811439222.8A CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109671658A CN109671658A (en) | 2019-04-23 |
| CN109671658B true CN109671658B (en) | 2021-02-09 |
Family
ID=66143354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811439222.8A Active CN109671658B (en) | 2018-11-29 | 2018-11-29 | Substrate loading system and substrate loading method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109671658B (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3277550B2 (en) * | 1992-05-21 | 2002-04-22 | 神鋼電機株式会社 | Gas purge unit for portable closed containers |
| US5697749A (en) * | 1992-07-17 | 1997-12-16 | Tokyo Electron Kabushiki Kaisha | Wafer processing apparatus |
| JP3796782B2 (en) * | 1995-11-13 | 2006-07-12 | アシスト シンコー株式会社 | Mechanical interface device |
| KR100702844B1 (en) * | 2005-11-14 | 2007-04-03 | 삼성전자주식회사 | Load-lock chamber and equipment for manufacturing semiconductor device used the same |
| JP4816545B2 (en) * | 2007-03-30 | 2011-11-16 | 東京エレクトロン株式会社 | Substrate processing apparatus, substrate processing method, and storage medium |
| KR101215962B1 (en) * | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Buffer storage box for equipment front end module |
-
2018
- 2018-11-29 CN CN201811439222.8A patent/CN109671658B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN109671658A (en) | 2019-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2021208550A1 (en) | Vertical feeding and wafer inserting integrated machine | |
| JPH09223727A (en) | Semiconductor treating apparatus, substrate changing mechanism and changing method thereof | |
| KR101511963B1 (en) | Cassette supplying system | |
| CN110641888A (en) | Biological sample storehouse | |
| TWI588073B (en) | Apparatus for storing and handling article at ceiling | |
| JP5943214B2 (en) | Horizontal atomic layer deposition system for large area substrates | |
| CN109671658B (en) | Substrate loading system and substrate loading method thereof | |
| TWI512878B (en) | Substrate processing device | |
| WO2020224209A1 (en) | Automatic picking and placing device for battery cell component container | |
| CN114583010A (en) | Solar crystalline silicon cell module laminating machine and laminating method | |
| KR102260560B1 (en) | Cassette stoker and casette loading/unloading method using thereof | |
| CN209199895U (en) | The substrate Load System of substrate storage card box and the application cassette | |
| CN103222107A (en) | Dye adsorption apparatus and dye adsorption method | |
| CN214701471U (en) | Vacuum tunnel furnace for removing water from battery cell by heating or cooling based on liquid bath method | |
| CN114802851B (en) | Film sealing station with cold compress function and automatic filling film sealing production line | |
| KR101341425B1 (en) | Stocker system | |
| KR101297380B1 (en) | Stocker | |
| CN107893212B (en) | Continuous evaporation equipment | |
| KR100965515B1 (en) | Flat panel display manufacturing machine | |
| CN220032763U (en) | Finished product storage rack for ecological plate material production | |
| KR100752934B1 (en) | Apparatus for vacuum processing | |
| CN217134329U (en) | Wafer box assembly and wafer cleaning unit comprising same | |
| CN220807343U (en) | Flashboard assembly storage bracket | |
| CN210972544U (en) | Biological sample storehouse | |
| KR20140029661A (en) | Slit valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |