CN109669065A - The voltage measurement method realized based on bar shaped radial polarisation grating - Google Patents
The voltage measurement method realized based on bar shaped radial polarisation grating Download PDFInfo
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- CN109669065A CN109669065A CN201811509063.4A CN201811509063A CN109669065A CN 109669065 A CN109669065 A CN 109669065A CN 201811509063 A CN201811509063 A CN 201811509063A CN 109669065 A CN109669065 A CN 109669065A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/24—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
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Abstract
The present invention relates to a kind of voltage measurement methods realized based on bar shaped radial polarisation grating, belong to electric system high voltage measuring technical field.Linearly polarized light is generated using light source and the polarizer, by electro-optic crystal and quarter-wave plate, so that linearly polarized light plane of polarization rotates, the strip light spots with dark line are converted to through bar shaped radial polarisation grating and analyzer again, finally by PSD displacement sensor or the displacement of ccd image sensor measurement hot spot dark fringe, the linear measurement of electric light phase delay angle can be realized.Advantage is: the direct linear measurement to electro-optic crystal phase delay may be implemented, measurement range is not limited by crystal half-wave voltage;And measurement pattern is unrelated with optical power, eliminates the influence to transformer measurement stability such as light source power fluctuation and optical path loss.
Description
Technical field
The present invention relates to electric system high voltage measuring technical fields, in particular to a kind of to be based on bar shaped radial polarisation grating
The current measuring method of realization.
Background technique
Continuous development with electric system to voltage levels and large capacity, conventional voltage transformer is because of self-sensor machine
The defect of reason gradually exposes the problems such as volume is big, insulation difficulty is big, the range of linearity is small, nil interface, it is difficult to adapt to electric power
The requirement of system intelligent development.Optical voltage transformer refers to using the specific physical effect sense voltage of optical material, and leads to
Cross the voltage transformer of optical fiber transmission signal.Compared with conventional voltage transformer, optical transformer has the advantage that (1) nothing
The problems such as ferromagnetic resonance, magnetic saturation.(2) it insulate simple and reliable.(3) there is good anti-interference ability.(4) small in size, weight
Gently, good economy performance.
Although optical voltage transformer is with the obvious advantage, there are still the solutions of many problems demands, as measurement range is small, is answered
The line of force is birefringent and the influence of temperature drift is serious etc..It is above-mentioned for the optical voltage transformer based on electro-optic crystal Pockels effect
The crux of problem is the limitation of polarization interference measurement pattern.Due to cannot achieve the direct survey to the delay of crystal current light phase
Amount, generallys use polarization interference measurement pattern, phase delay is changed into intensity modulation, realizes voltage by the detection to light intensity
Measurement.The size of this measurement pattern reflection optical power, is only capable of approximately linearly measuring limited electric light phase delay, stablize
Property and reliability are limited by the problems such as temperature drift, crystal additional phase delay, half-wave voltage, are unable to satisfy the reality of electric system
With requiring.Summary of the invention
The purpose of the present invention is to provide a kind of optical activity measurement methods realized based on bar shaped radial polarisation grating, solve
The above problem of the existing technology.The present invention generates linearly polarized light using light source and the polarizer, by electro-optic crystal and four
/ mono- wave plate so that linearly polarized light plane of polarization rotates, then is converted to through bar shaped radial polarisation grating and analyzer and has
The strip light spots of dark line, finally by PSD displacement sensor or the displacement of ccd image sensor measurement hot spot dark fringe, i.e.,
The linear measurement of electric light phase delay angle can be achieved.
Above-mentioned purpose of the invention is achieved through the following technical solutions:
Based on the voltage measurement method that bar shaped radial polarisation grating is realized, the side of the polarizer 2 is arranged in laser source 1, rises
Electro-optic crystal 3 is arranged in the other side of inclined device 2, and quarter-wave plate 4 is placed between electro-optic crystal 3 and bar shaped radial polarisation grating 5,
The other side of bar shaped radial polarisation grating 5 is arranged in PSD displacement sensor or ccd image sensor 6;The laser source 1 is emitted
Laser linearly polarized light is obtained by the polarizer 2, electro-optic crystal 3 becomes biaxial crystal under Electric Field Modulated, and linearly polarized light enters
Two polarization directions orthogonal linearly polarized light o light and e light are decomposed into after electro-optic crystal 3 along the z-axis direction, due to two polarization directions
Refractive index it is different, o light and e light propagate generation electric light phase delay in electro-optic crystal 3, and size is directly proportional to voltage to be measured;o
Light and e light incidence quarter-wave plate 4 simultaneously synthesize linearly polarized light under its effect, convert linearly polarized light polarization for phase delay
The rotation in face;The linearly polarized light of outgoing enter bar shaped radial polarisation grating 5 formed strip light spots, when plane of polarization along the z-axis direction by
When gradually rotating, strip light spots synchronous shift, and keep original intensity distribution;It is sensed through PSD displacement sensor or ccd image
Device 6 positions intensity image to obtain the position of minimum intensity of light, hot spot displacement is detected, to obtain voltage value to be measured.
It shakes the consistent linear polarization light-transmissive grating in direction with bar shaped radial polarisation grating 5, and it is vertical with the saturating direction that shakes
Linearly polarized light transmitance be zero, therefore transmitted light intensity by maximum is decremented to minimum on bar shaped radial polarisation grating 5, forms one
The fixed strip light spots of a shape;With the variation of electric field to be measured, horizontal displacement, displacement and electric light phase occur for strip light spots
Postpone linear.
The screen periods 10 of the bar shaped radial polarisation grating 5 are 200nm, and groove width 11 is 100nm, aluminum metal grizzly bar line
Wide 12 be 100nm, and grating ridge thickness 13 is 200nm, duty ratio 0.5.
The PSD displacement sensor or 6 pairs of the ccd image sensor light spot images through bar shaped radial polarisation grating 5
Positioned, obtain electric light phase delay size and voltage value to be measured.
The beneficial effects of the present invention are:
Electric light phase delay is converted to the synchronous shift of hot spot by bar shaped radial polarisation grating principle, and passes through PSD
Displacement sensor or ccd image sensor detect spot signal, complete the measurement of voltage.It may be implemented to electro-optic crystal phase
The direct linear measurement of delay, measurement range are not limited by crystal half-wave voltage;And measurement pattern is unrelated with optical power, eliminates
The influence to transformer measurement stability such as light source power fluctuation and optical path loss.
Detailed description of the invention
The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair
Bright illustrative example and its explanation is used to explain the present invention, and is not constituted improper limitations of the present invention.
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is the structural schematic diagram of bar shaped radial polarisation grating of the invention;
Fig. 3 is the partial enlargement diagram of bar shaped radial polarisation grating of the invention;
Fig. 4 is the surface of intensity distribution of the invention through bar shaped radial polarisation grating.
In figure: 1, laser source;2, the polarizer;3, electro-optic crystal;4, quarter-wave plate;5, bar shaped radial polarisation grating;
6, PSD displacement sensor or ccd image sensor;7, incident light;8, the polarization direction TM;9, the polarization direction TE;10, grating week
Phase;11, groove width;12, aluminum metal grizzly bar line width;13, grating ridge thickness.
Specific embodiment
Detailed content and its specific embodiment of the invention are further illustrated with reference to the accompanying drawing.
Referring to FIG. 1 to FIG. 4, the voltage measurement method of the invention realized based on bar shaped radial polarisation grating, laser
The side of the polarizer 2 is arranged in source 1, and electro-optic crystal 3 is arranged in the other side of the polarizer 2, and quarter-wave plate 4 is placed in electro-optic crystal
Between 3 and bar shaped radial polarisation grating 5, PSD displacement sensor or ccd image sensor 6 are arranged in bar shaped radial polarisation grating 5
The other side;The laser that the laser source 1 is emitted obtains linearly polarized light by the polarizer 2, and electro-optic crystal 3 becomes under Electric Field Modulated
At biaxial crystal, linearly polarized light enters after electro-optic crystal 3 is decomposed into the orthogonal linearly polarized light o in two polarization directions along the z-axis direction
Light and e light, since the refractive index of two polarization directions is different, o light and e light are propagated generation electric light phase in electro-optic crystal 3 and are prolonged
Late, size is directly proportional to voltage to be measured;O light and e light incidence quarter-wave plate 4 simultaneously synthesize linearly polarized light under its effect, will
Phase delay is converted into the rotation of linearly polarized light plane of polarization;The linearly polarized light of outgoing enters bar shaped radial polarisation grating 5 and forms item
Shape hot spot, when plane of polarization gradually rotates along the z-axis direction, strip light spots synchronous shift, and keep original intensity distribution;Through
PSD displacement sensor or ccd image sensor 6 position intensity image to obtain the position of minimum intensity of light, detect hot spot displacement,
To obtain voltage value to be measured.
It shakes the consistent linear polarization light-transmissive grating in direction with bar shaped radial polarisation grating 5, and it is vertical with the saturating direction that shakes
Linearly polarized light transmitance be zero, therefore transmitted light intensity by maximum is decremented to minimum on bar shaped radial polarisation grating 5, forms one
The fixed strip light spots of a shape;With the variation of electric field to be measured, horizontal displacement, displacement and electric light phase occur for strip light spots
Postpone linear.
The structure of the bar shaped radial polarisation grating 5 is as shown in attached drawing 2 and Fig. 3, and in figure, 7 be incident light, the polarization side TM
To the polarization direction 8 and TE 9, screen periods 10 are 200nm, and groove width 11 is 100nm, and aluminum metal grizzly bar line width 12 is 100nm, grating
Ridge thickness 13 is 200nm, duty ratio 0.5.
The PSD displacement sensor or 6 pairs of the ccd image sensor light spot images through bar shaped radial polarisation grating 5
Positioned, obtain electric light phase delay size and voltage value to be measured.
The analyzing principle of bar shaped radial polarisation grating of the invention is:
Bar shaped radial polarisation grating proposed by the present invention is as shown in Figures 2 and 3, by electron-beam direct writing, nano impression and
A kind of novel sub-wavelength aluminum metal polarization grating made of the technologies such as plasma etching, its main feature is that grating cutting (i.e. vibration thoroughly
Direction) the radially even distribution in bar-shaped zone, interior outer radius be respectively screen periods be 200nm, groove width 100nm,
Aluminum metal grizzly bar line width is 100nm, and grating ridge is with a thickness of 200nm, duty ratio 0.5.Due to grating TM mould high transmittance and
The high reflectance of TE mould becomes tangential polarization light after incident light transmission, and it is vertical to can be described as light transmission shaft for grating under system coordinates
In azimuthal linear polarizer, it is equivalent to its reference axis and has rotatedTherefore, the radial polarisation grating is under system coordinates
Jones matrix G is
In formula, tTMIt is the diffraction efficiency (referred to as transmitance) of TM wave transmitted component, tTM=1;ξ is between two light waves
Phase difference.
Principle schematic diagram of the invention as shown in Figure 1, the laser that is emitted of laser source 1 by the polarizer 2 to obtain line inclined
Shake light, and electro-optic crystal 3 becomes biaxial crystal under Electric Field Modulated, and linearly polarized light is decomposed into along the z-axis direction after entering electro-optic crystal 3
Two polarization directions orthogonal linearly polarized light o light and e light, since the refractive index of two polarization directions is different, o light and e light are in electricity
It is propagated in luminescent crystal 3 and generates electric light phase delay, size is directly proportional to voltage to be measured;O light and e light incidence quarter-wave plate 4
And linearly polarized light is synthesized under its effect, convert phase delay to the rotation of linearly polarized light plane of polarization;The linearly polarized light of outgoing
Strip light spots, when plane of polarization gradually rotates along the z-axis direction, strip light spots sync bit are formed into bar shaped radial polarisation grating 5
It moves, and keeps original intensity distribution;Intensity image is positioned to obtain most through PSD displacement sensor or ccd image sensor 6
The position of small light intensity calculates spot displacement amount and voltage value to be measured.
If the light transmission shaft of the polarizer is located at y-axis direction, the light that light source issues is flat by its plane of polarization after the polarizer and y-axis
Row, then the Jones matrix of incident polarized light is
The angle of the speed direction of electro-optic crystal and system x, y-coordinate axis direction are 45 °, according to Pockels effect, speed
Electric light phase delay of δ is generated between axis, the Jones matrix J (δ) of electro-optic crystal is
The fast of standard quarter-wave plate, slow-axis direction are parallel with system y, x direction, and Jones matrix W is
Electric vector E (δ) after quarter-wave plate is emitted is the product of above-mentioned matrix
When above-mentioned linearly polarized light (its amplitude is A, azimuth α) is again by the grating analyzing of bar shaped radial polarisation, obtain
Then output intensity is
In formula: light vector subscript "+" indicates the Hermitian operation to light vector.
Light distribution through bar shaped radial polarisation grating is as shown in Fig. 4, forms that a light intensity is symmetrical and shape is solid
Fixed strip light spots.When changing the polarization azimuth of linearly polarized light, strip light spots are subjected to displacement, and keep original intensity
Distribution.If the length of grating is l, the polarization angular region of detection is (- pi/2 ,+pi/2), and the displacement at hot spot dark line center is △ x,
Then the phase delay angle δ and l of electro-optic crystal meet
According to Pockels effect, voltage U and δ to be measured is calculated by formula (9)
Wherein λ is the wavelength of incident light;γ41For electro-optic coefficient;noFor the refractive index of o light;D is crystal along direction of an electric field
Thickness;L is the light passing length of crystal;VπFor the half-wave voltage of crystal.
Therefore, the displacement △ x that hot spot dark line is detected by PSD displacement sensor or ccd image sensor, determines δ, from
And voltage U to be measured is calculated.
Linearly polarized light generates phase delay after propagating certain distance in electro-optic crystal, and retardation and extra electric field are at just
Than.It is consistent with the saturating direction of vibration a certain on grating when the linearly polarized light being emitted from electro-optic crystal passes through bar shaped radial polarisation grating
Linear polarization light-transmissive grating, and the linearly polarized light transmitance vertical with the saturating direction of the vibration is zero, therefore in bar shaped radial polarisation
Transmitted light intensity by maximum is decremented to minimum in a certain region on grating, forms the fixed strip light spots of a shape.Strip light spots
It is moved horizontally with the variation of electric field to be measured, displacement and electric light phase-delay quantity are linear.Utilize PSD displacement sensing
Device or ccd image sensor obtain electric light phase-delay quantity to spot location, realize the linear measurement to voltage, and measurement range
It is not limited by crystal half-wave voltage, there is optical power independence.
Embodiment:
Experimental system is by taking 110kV voltage class as an example;Using single transverse mode LD light source, operation wavelength 808nm;Using
LPVIS050 polarizing film, wave-length coverage 550-1500nm;Using BGO (Bi4Ge3O12) electro-optic crystal as sensing element, indulges
To modulation, half-wave voltage 42.47kV;Using WPQ05M-808 quarter-wave plate, operation wavelength 808nm;Using bar shaped
Screen periods are 200nm, and groove width 150nm, aluminum metal grizzly bar line width is 50nm, and grating ridge is with a thickness of 100nm, duty ratio
0.25;The ccd image sensor that the DALSA of use is produced, model S3-20-02K40.
Measurement is compared to the present invention by electronic transducer calibration instrument, the results are shown in Table 1, meets 0.5 grade of electricity
Minor voltage transformer accuracy requirement.
The basic accuracy experimental data of table 1
The foregoing is merely preferred embodiments of the invention, are not intended to restrict the invention, for the technology of this field
For personnel, the invention may be variously modified and varied.All any modification, equivalent substitution, improvement and etc. made for the present invention,
It should all be included in the protection scope of the present invention.
Claims (4)
1. a kind of current measuring method realized based on bar shaped radial polarisation grating, it is characterised in that: laser source (1) setting is rising
Electro-optic crystal (3) are arranged in the other side of the side of inclined device (2), the polarizer (2), and quarter-wave plate (4) is placed in electro-optic crystal (3)
Between bar shaped radial polarisation grating (5), PSD displacement sensor or ccd image sensor (6) are arranged in bar shaped radial polarisation light
The other side of grid (5);The laser of laser source (1) outgoing obtains linearly polarized light by the polarizer (2), and electro-optic crystal (3) exists
Become biaxial crystal under Electric Field Modulated, linearly polarized light enters electro-optic crystal (3) edge afterwardszAxis direction is being decomposed into two polarization directions just
The linearly polarized light o light and e light of friendship, since the refractive index of two polarization directions is different, o light and e light are propagated in electro-optic crystal (3)
Electric light phase delay is generated, size is directly proportional to voltage to be measured;O light and e light incidence quarter-wave plate (4) and under its effect
Linearly polarized light is synthesized, converts phase delay to the rotation of linearly polarized light plane of polarization;The linearly polarized light of outgoing enters bar shaped radial direction
Polarization grating (5) forms strip light spots, when plane of polarization gradually rotates along the z-axis direction, strip light spots synchronous shift, and keep
Original intensity distribution;Intensity image is positioned to obtain minimum intensity of light through PSD displacement sensor or ccd image sensor (6)
Position, to obtain spot displacement amount and voltage value to be measured.
2. the current measuring method according to claim 1 realized based on bar shaped radial polarisation grating, it is characterised in that: with
The saturating consistent linear polarization light-transmissive grating in direction of bar shaped radial polarisation grating (5) vibration, and the linear polarization vertical with the saturating direction that shakes
Light transmission rate is zero, therefore transmitted light intensity by maximum is decremented to minimum on bar shaped radial polarisation grating (5), forms a shape
Fixed strip light spots;With the variation of electric field to be measured, strip light spots occur horizontal displacement, displacement and electric light phase delay at
Linear relationship.
3. the current measuring method according to claim 1 realized based on bar shaped radial polarisation grating, it is characterised in that: institute
The screen periods (10) for the bar shaped radial polarisation grating (5) stated are 200nm, and groove width (11) is 100nm, aluminum metal grizzly bar line width
It (12) is 100nm, grating ridge thickness (13) is 200nm, duty ratio 0.5.
4. the current measuring method according to claim 1 realized based on bar shaped radial polarisation grating, it is characterised in that: institute
The PSD displacement sensor or ccd image sensor (6) stated determine the light spot image through bar shaped radial polarisation grating (5)
Position, obtain electric light phase delay size and voltage value to be measured.
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Cited By (1)
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CN116698759A (en) * | 2023-08-03 | 2023-09-05 | 江西师范大学 | Object chiral recognition method and device based on circular polarization related optical difference |
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