CN109668895A - Inspecting apparatus for photovoltaic devices and solar simulator with camera - Google Patents

Inspecting apparatus for photovoltaic devices and solar simulator with camera Download PDF

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Publication number
CN109668895A
CN109668895A CN201811189611.XA CN201811189611A CN109668895A CN 109668895 A CN109668895 A CN 109668895A CN 201811189611 A CN201811189611 A CN 201811189611A CN 109668895 A CN109668895 A CN 109668895A
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China
Prior art keywords
camera
solar battery
photovoltaic devices
inspecting apparatus
lens
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Pending
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CN201811189611.XA
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Chinese (zh)
Inventor
冈原孔明
甲斐慎太郎
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Dj Solar Ltd By Share Ltd
Denken Co Ltd
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Dj Solar Ltd By Share Ltd
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Publication of CN109668895A publication Critical patent/CN109668895A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/30Collimators
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02SGENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
    • H02S50/00Monitoring or testing of PV systems, e.g. load balancing or fault identification
    • H02S50/10Testing of PV devices, e.g. of PV modules or single PV cells
    • H02S50/15Testing of PV devices, e.g. of PV modules or single PV cells using optical means, e.g. using electroluminescence
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9511Optical elements other than lenses, e.g. mirrors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Photovoltaic Devices (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

The present invention provides inspecting apparatus for photovoltaic devices and the solar simulator with camera.The image being more clear can be shot.Inspecting apparatus for photovoltaic devices (10) includes light source (210);Lens (230), for passing through from the irradiation light that light source (210) are irradiated;Collimation lens (260) makes to irradiate by the irradiation light of lens (230) to solar battery (SB);And camera (270), it is configured at outside the optical path of irradiation light, solar battery (SB) is shot, camera (270) is configured at the position that solar battery (SB) can be taken via collimation lens (260).

Description

Inspecting apparatus for photovoltaic devices and solar simulator with camera
Technical field
The present invention relates to inspecting apparatus for photovoltaic devices and with the solar simulator of camera.
Background technique
IV (Current Voltage) characteristic that will be determined for solar battery is described in patent document 1, measures IV Characteristic and benchmark IV characteristic are compared to determine the check device that solar battery has solar power system without exception.It should The check device of solar power system includes current detecting unit, detects the output electric current of solar battery;Voltage detecting Unit detects the output voltage of solar battery;Check could determination unit, determine solar battery generated energy or right Answer generated energy and whether changed value i.e. changing value is in smaller than the maximum value of the changing value of solar battery and examines It looks into the range of value;And IV characteristic generation unit, changing value be in can check value in the range of in the case where, the IV characteristic Generation unit finds out measurement IV characteristic according to output electric current and output voltage.
The check device of following solar battery is described in patent document 2: can be by carrying out to solar battery It is powered and carries out EL and shine, zero defect is had according to luminance investigation, thus determines whether solar battery is qualified.The sun The check device of energy battery includes power supply unit, and the solar battery cell as check object is made to pass through electric current;Shooting is single Member shoots the light that the solar battery cell after being powered by power supply unit issues;And analytical unit, to shooting unit The shooting image of taken solar battery cell is analyzed, and analytical unit is for the sun taken by shooting unit The shooting image of energy battery unit finds out threshold value according to the average brightness in the part of the light and shade mixing in shooting image, utilizes The threshold value is divided into bright portion and dark portion for image is shot, and carries out in such a way that binaryzation is shown by force to bright portion and dark portion It adjusts, thus determines that each solar battery cell has zero defect.
Simulated solar irradiation is irradiated to solar battery and measures output characteristics in this way, existing in the inspection of solar battery Inspection and make current flow through solar battery and observe and carry out the solar-electricity of infraluminescence by electroluminescent (EL) Pond, the inspection for finding internal flaw therefrom, it is however generally that, the former is referred to as IV inspection, and the latter is referred to as EL inspection.
In addition, for example describing the evaluation method that electroluminescent solar battery is utilized in patent document 3.
Patent document 1: Japanese Unexamined Patent Publication 2016-39684 bulletin
Patent document 2: Japanese Unexamined Patent Publication 2010-16019 bulletin
Patent document 3: No. 5051854 bulletins of Japanese Patent
Here, as inspecting apparatus for photovoltaic devices, it is known to can be checked with a device carrying out above-mentioned IV and The composite checking device that EL is checked.In the composite checking device, the office of the image of the solar battery of shooting is checked by EL Portion is unintelligible.
Summary of the invention
The purpose of the present invention is to provide the inspecting apparatus for photovoltaic devices that one kind can shoot the image being more clear And the solar simulator with camera.
Invention documented by 1st aspect is a kind of inspecting apparatus for photovoltaic devices, which is used for The IV for carrying out solar battery is checked and EL is checked, wherein the inspecting apparatus for photovoltaic devices includes
Light source;
Lens, the irradiation light irradiated from the light source pass through the lens;
Collimation lens makes to irradiate by the irradiation light after the lens to the solar battery;And
Camera is configured at described in capable of taking via the collimation lens too towards the direction of the collimation lens The position of positive energy battery, shoots the solar battery.
Invention documented by 2nd aspect also includes optical gate in the inspecting apparatus for photovoltaic devices documented by the 1st aspect, The optical path of the irradiation light towards the lens is opened and closed in it;And
Curtain-shaped cover member covers leaning on around the light source side for the lens, when the optical gate is closed, described in inhibition Irradiation light is leaked from the optical gate.
In the inspecting apparatus for photovoltaic devices documented by the 2nd aspect, what is be closed is described for invention documented by 3rd aspect The distance between the front end of optical gate and the curtain-shaped cover member is set to 8mm or less.
Invention documented by 4th aspect is in the inspecting apparatus for photovoltaic devices documented by the 1st aspect, the solar battery Check device also has the optical gate that the ablation to the photographing element for being built in the camera is inhibited.
Invention documented by 5th aspect is a kind of solar simulator with camera, the sun optical mode with camera The IV that quasi- device is used to carry out solar battery is checked and EL is checked, wherein the solar simulator with camera includes
Light source;
Collimation lens irradiates the irradiation light irradiated from the light source to the solar battery;And
Camera shoots the solar battery via the collimation lens towards the direction of the collimation lens.
Invention documented by 6th aspect is a kind of inspecting apparatus for photovoltaic devices, which is used for The IV for carrying out solar battery is checked and EL is checked, wherein the inspecting apparatus for photovoltaic devices includes
Light source;
Collimation lens irradiates the irradiation light irradiated from the light source to the solar battery;And
Camera shoots the solar battery via the collimation lens towards the direction of the collimation lens.
Invention documented by 7th aspect is in the inspecting apparatus for photovoltaic devices documented by the 6th aspect, the solar battery Check device also have inhibition be built in the camera photographing element ablation optical gate.
According to the present invention, it is possible to provide one kind can shoot the image being more clear inspecting apparatus for photovoltaic devices and Solar simulator with camera.
Detailed description of the invention
Fig. 1 is the explanatory diagram of the inspecting apparatus for photovoltaic devices of the 1st embodiment of the invention.
Fig. 2 is the explanatory diagram of the optical gate that the inspecting apparatus for photovoltaic devices has and curtain-shaped cover member.
Fig. 3 is the side view of the optical gate that the inspecting apparatus for photovoltaic devices has and curtain-shaped cover member.
Fig. 4 is the explanatory diagram that the EL carried out by the inspecting apparatus for photovoltaic devices is checked.
Fig. 5 is the explanatory diagram that the IV carried out by the inspecting apparatus for photovoltaic devices is checked.
Fig. 6 is the explanatory diagram of the inspecting apparatus for photovoltaic devices of the 2nd embodiment of the invention.
Fig. 7 is the explanatory diagram that the EL carried out by the inspecting apparatus for photovoltaic devices is checked.
Fig. 8 is the explanatory diagram that the IV carried out by the inspecting apparatus for photovoltaic devices is checked.
Label declaration
10,30: inspecting apparatus for photovoltaic devices;20,40: solar simulator;202: shell;202a: the 1 space; 202b: the 2 space;210: light source;220: oval shape mirror;230: integration lens;240: optical gate;250: covering part;260: collimation is saturating Mirror;270: camera;272: photographing element;340: optical gate;AX1: rotary shaft;AX2: optical axis;AX3: axis;AX4: rotary shaft; BW1: next door;BW2: wall surface;OP: optical path;SB: solar battery.
Specific embodiment
Then, the embodiment after embodying the present invention is illustrated referring to attached drawing, to understand the present invention.Separately Outside, in the accompanying drawings, the diagram of the part unrelated with explanation is omitted sometimes.
[the 1st embodiment]
The inspecting apparatus for photovoltaic devices 10 of 1st embodiment of the invention be can using a device to as be examined The solar battery SB of object carries out the composite checking device that IV is checked and EL is checked.
As shown in Figure 1, inspecting apparatus for photovoltaic devices 10 has the solar simulator 20 with camera, the band camera Solar simulator 20 irradiate simulated solar irradiation.The solar simulator 20 has shell 202, in the inside of the shell 202 Configured with light source 210, oval shape mirror 220, integration lens 230, optical gate 240, covering part 250 (referring to Fig. 2 and Fig. 3), collimation lens 260 and camera 270.
In addition, the inside of shell 202 be formed with the 1st space 202a and be configured at the 1st space 202a downside 2 space 202b.
Light source 210 is the lamp continuously lighted, e.g. hernia lamp or metal halide lamp.But light source 210 is not limited to The lamp continuously lighted is also possible to generate the light source of flash of light.
Light source 210 is configured at the 1st space 202a.
Oval shape mirror 220 is the reflecting mirror configured with covering the mode around the upside of light source 210.Utilize oval shape mirror 220 Reflect a part of irradiation light irradiated from light source 210 towards integration lens 230.Oval shape mirror 220 is configured at the 1st space 202a。
Integration lens (an examples of lens) 230 are configured at the lower section of light source 210, and illuminated light passes through.Specifically, it integrates Lens 230 are arranged on the next door BW1 being separated to the 1st space 202a and the 2nd space 202b.Integration lens 230 can Improve the uniformity of the illumination towards the irradiation light of collimation lens 260.
In addition, integration lens 230 are also possible to rod lens.
As shown in Figures 2 and 3, optical gate 240, can be by right around rotary shaft AX1 rotation by motor driving (not shown) It is carried out from light source 210 or oval shape mirror 220 towards the optical path OP (dotted line shown in referring to Fig.1) of the irradiation light of integration lens 230 Opening and closing.Optical gate 240 is configured at the inside of the 1st space 202a, in the state of closing the optical path OP of irradiation light, is located at more saturating than integrating The position of the side against the top of mirror 230 (210 side of light source).
Covering part 250 is able to suppress irradiation light and leaks from the optical gate 240 being closed.
Covering part 250 is the tubular curtain-shaped cover member covered around the upper side (210 side of light source) of integration lens 230.It covers Cover 250 is set on the next door BW1 (referring to Fig.1) of the 1st space side 202a.
The distance between the front end of the optical gate 240 and curtain-shaped cover member that are closed g (referring to Fig. 3) is set as predetermined ruler It is very little.The predetermined size is for example preferably 8mm hereinafter, more preferably 4mm or less.
As shown in Figure 1, collimation lens 260 is configured at the lower section of optical gate 240 and integration lens 230, can make to pass through integral The irradiation light of lens 230 is irradiated to solar battery SB.Collimation lens 260 can make by light become directional light.Collimation is saturating Mirror 260 is set on the downside wall surface BW2 for constituting the 2nd space 202b.
The shooting of camera 270 carries out the solar battery SB of infraluminescence, can make to deposit in the inside of solar battery SB Crackle visualization.
Camera 270 is configured at the inside of the 2nd space 202b.In addition, camera 270 is configured at from 230 court of integration lens The position of solar battery SB can be taken except to the optical path OP of the irradiation light of collimation lens 260 and via collimation lens 260 It sets.Specifically, camera 270, which is located at, extends from the center on the surface of collimation lens 260, is at angle theta with optical axis AX2 On axis AX3, configured towards the direction that axis AX3 extends.Angle, θ is for example set as 5 degree or less.
Next, being illustrated to inspection method based on inspecting apparatus for photovoltaic devices 10, solar battery SB.
When loading solar battery SB on the supporting part of inspecting apparatus for photovoltaic devices 10 (not shown), firstly, into Row EL is checked.
During EL shown in Fig. 4 is checked, although light source 210 is shining, optical gate 240 is closed, in conjunction with covering part 250 The effect of (referring to Fig. 2 and Fig. 3), becomes the shape for inhibiting irradiation light to leak to the 2nd space 202b configured with camera 270 State.When making to flow through electric current in solar battery SB in this state, solar battery SB carries out infrared hair by electroluminescent Light.Camera 270 shoots the solar battery SB of the carry out infraluminescence.
At this point, as noted previously, as camera 270 is not configured at the outside of solar simulator 20 and is arranged in interior Therefore portion can shoot solar battery SB via collimation lens 260.
Therefore, compared with camera 270 is configured at the situation of the outside of solar simulator, camera 270 is configured at angle θ (referring to Fig.1) smaller position is spent, therefore, can inhibit as out of focus, the image for the crackle being more clear can be obtained.
After EL inspection terminates, IV inspection is then carried out.
During IV shown in Fig. 5 is checked, opens optical gate 240 and irradiate irradiation light from light source 210 to solar battery SB, according to The output of solar battery SB is measured such as the measuring method as defined in JIS-C8913 and IEC60904-1 as usual.
In addition, not using camera 270 in IV inspection.
In this way, according to inspecting apparatus for photovoltaic devices 10, even can be come with a device to solar battery SB into The composite checking device that row IV is checked and EL is checked can also obtain the solar battery than being more clear in the past in EL inspection The shooting image of SB.
[the 2nd embodiment]
Then, the solar battery of the solar simulator 40 with camera with second embodiment of the present invention is examined Device 30 is looked into be illustrated.To identical as the identical structural element mark of inspecting apparatus for photovoltaic devices 10 of the 1st embodiment Label and detailed description will be omitted.
In above-mentioned IV is checked, the photographing element 272 for being built in camera 270 is exposed to by the 2nd space 202b institute instead In the stronger irradiation light penetrated, therefore ablation sometimes.
Therefore, as shown in fig. 6, solar simulator 40 the inside of the 2nd space 202b have being capable of overlaid camera 270 Lens front surface optical gate 340.
Optical gate 340 is rotated, thus, it is possible to entering in camera 270 by motor driving (not shown) around rotary shaft AX4 The optical path of reflected light be opened and closed.
In addition, optical gate can be built in camera 270.
Next, being illustrated to inspection method based on inspecting apparatus for photovoltaic devices 30, solar battery SB.
When loading solar battery SB on the supporting part of inspecting apparatus for photovoltaic devices 30 (not shown), firstly, into Row EL is checked.
During EL shown in Fig. 7 is checked, although light source 210 is shining, optical gate 240 is closed, in conjunction with covering part 250 The effect of (referring to Fig. 2 and Fig. 3), becomes the shape for inhibiting irradiation light to leak to the 2nd space 202b configured with camera 270 State.When making to flow through electric current in solar battery SB in this state, solar battery SB carries out infrared hair by electroluminescent Light.
Optical gate 340 is rotated around rotary shaft AX4 and is opened, and the shooting of camera 270 carries out the solar battery of infraluminescence SB。
At this point, as it was noted above, being arranged in since camera 270 is not configured at the outside of solar simulator 20 Therefore inside takes solar battery SB via collimation lens 260.
Therefore, compared with camera 270 is configured at the situation of the outside of solar simulator, camera 270 is configured at angle It spends on the smaller position θ (referring to Fig. 6), therefore can inhibit as out of focus, the image for the crackle being more clear can be obtained.
After EL inspection terminates, IV inspection is then carried out.
During IV shown in Fig. 8 is checked, opens optical gate 240 and irradiate irradiation light from light source 210 to solar battery SB, according to The output of solar battery SB is measured such as the measuring method as defined in JIS-C8913 and IEC60904-1 as usual.
In IV inspection, without the shooting based on camera 270.Wherein, optical gate 340 is rotated around rotary shaft AX4 and is covered Therefore the front surface of the lens of lid camera 270 can inhibit and be built in the photographing element 272 of camera 270 and be exposed to by the 2nd Situation in the stronger irradiation light of space 202b reflection.
Therefore, according to inspecting apparatus for photovoltaic devices 30, the sun than being more clear in the past can be obtained in EL inspection The shooting image of energy battery SB can also inhibit the ablation of photographing element 272 in addition to this.
More than, embodiments of the present invention are illustrated, but the present invention is not limited to aforesaid ways, do not depart from purport The change etc. of condition all belongs to application range of the invention.

Claims (7)

1. a kind of inspecting apparatus for photovoltaic devices, the IV for being used to carry out solar battery is checked and EL is checked, wherein the sun Energy battery check device includes
Light source;
Lens, the irradiation light irradiated from the light source pass through the lens;
Collimation lens makes to irradiate by the irradiation light after the lens to the solar battery;And
Camera, towards the direction of the collimation lens, the solar-electricity can be shot via the collimation lens by being configured at The position in pond shoots the solar battery.
2. inspecting apparatus for photovoltaic devices according to claim 1, also includes
The optical path of the irradiation light towards the lens is opened and closed in optical gate;
Curtain-shaped cover member covers leaning on around the light source side for the lens, when the optical gate is closed, inhibits the irradiation Light is leaked from the optical gate.
3. inspecting apparatus for photovoltaic devices according to claim 2, wherein
The distance between the front end of the optical gate and the curtain-shaped cover member that are closed is set to 8mm or less.
4. inspecting apparatus for photovoltaic devices according to claim 1, wherein
The inspecting apparatus for photovoltaic devices also has the light that the ablation to the photographing element for being built in the camera is inhibited Lock.
5. a kind of solar simulator with camera, the solar simulator with camera is for carrying out solar battery IV is checked and EL is checked, wherein the solar simulator with camera includes
Light source;
Collimation lens irradiates the irradiation light irradiated from the light source to the solar battery;And
Camera shoots the solar battery via the collimation lens towards the direction of the collimation lens.
6. a kind of inspecting apparatus for photovoltaic devices, the IV for being used to carry out solar battery is checked and EL is checked, wherein the sun Energy battery check device includes
Light source;
Collimation lens irradiates the irradiation light irradiated from the light source to the solar battery;And
Camera shoots the solar battery via the collimation lens towards the direction of the collimation lens.
7. inspecting apparatus for photovoltaic devices according to claim 6, wherein
The inspecting apparatus for photovoltaic devices also has the light that the ablation to the photographing element for being built in the camera is inhibited Lock.
CN201811189611.XA 2017-10-16 2018-10-12 Inspecting apparatus for photovoltaic devices and solar simulator with camera Pending CN109668895A (en)

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JP2017200148 2017-10-16
JP2017-200148 2017-10-16
JP2018-009855 2018-01-24
JP2018009855A JP6411683B1 (en) 2017-10-16 2018-01-24 Solar cell inspection device and solar simulator with camera

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