CN109661094A - A kind of microwave interference diagnosis based on fluid model - Google Patents
A kind of microwave interference diagnosis based on fluid model Download PDFInfo
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- CN109661094A CN109661094A CN201811554439.3A CN201811554439A CN109661094A CN 109661094 A CN109661094 A CN 109661094A CN 201811554439 A CN201811554439 A CN 201811554439A CN 109661094 A CN109661094 A CN 109661094A
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- microwave
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0062—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using microwaves
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Abstract
It is disclosed by the invention to belong to low temperature plasma analogy method technical field, specially a kind of microwave interference diagnosis based on fluid model, its structure includes microwave vector network analyzer, coaxial cable, antenna, microwave dark room, power supply connects hole, external-connected port and plasma, it is characterized by: the left side wall of the microwave vector network analyzer is electrically connected with coaxial cable, this kind is suitable for the electron density method of wave transparent chamber low temperature plasma, numerical simulation and wave interference method are combined, for the cavity body structure in two kinds of wave transparent chamber plate inductive coupled plasma discharge sources, have studied the microwave mono-/bis-end reflection interference diagnosis based on fluid model, the phase-shift phase of thin layer plasma can be measured more accurately, it will appear significant ground uneven distribution phenomenon in electric discharge plasma, using microwave diagnostics The cental axial position that portable antenna is needed when method makes phase-shift phase reach maximum.
Description
Technical field
The present invention relates to microwave interference technical field, specially a kind of microwave interference diagnosis based on fluid model.
Background technique
Currently, method for numerical simulation development is more rapid, has had document to pass through particle simulation-Monte Carlo method PIC/MC
The methods of the modeling of (Particle In Cell/Monte Carlo), hydrodynamics and hybrid modeling are to inductive coupled plasma
Body source has carried out numerical simulation, a large amount of Numerical Simulation Results show give accurate electron energy distribution functions (EEDF),
Under the premise of reaction rate, diffusion coefficient, n can be precisely calculated in fluid modeleIt is distributed the variation with external discharge condition,
But due to usually ignoring secondary cause and power loss in numerical simulation, numerical simulation result is caused to be higher than experimental measurements,
Compared to spectrum and sonde method, although solving wave interference method to a certain extent to neThe diagnosis of spatial distribution, but solve different items
Diffusion equation under part is difficult, fixed neProfile function cannot reflect influence of the external discharge condition to the distribution, be
This, it is proposed that a kind of microwave interference diagnosis based on fluid model.
Summary of the invention
The purpose of the present invention is to provide a kind of microwave interference diagnosis based on fluid model, to solve above-mentioned background skill
Itd is proposed in art due to usually ignoring secondary cause and power loss in numerical simulation, cause numerical simulation result to be higher than experiment
Measured value compares spectrum and sonde method, although solving wave interference method to a certain extent to neThe diagnosis of spatial distribution, but solve
Diffusion equation under different condition is difficult, fixed neProfile function cannot reflect that external discharge condition influences the distribution
The problem of.
To achieve the above object, the invention provides the following technical scheme: a kind of microwave interference diagnosis based on fluid model
Method, structure include that microwave vector network analyzer, coaxial cable, antenna, microwave dark room, power supply connect hole, external-connected port and wait
Gas ions, the left side wall of the microwave vector network analyzer are electrically connected with coaxial cable, and the coaxial cable is through micro-
The inner cavity right side wall in wave darkroom, and the left side wall of coaxial cable is electrically connected with antenna, and the inner cavity of the microwave dark room includes etc.
Gas ions, and the left side wall of microwave dark room and bottom offer power supply respectively and connect hole and external-connected port.
Preferably, the plasma includes solid metal reflector, insulation board and coil antenna.
Preferably, the external-connected port includes atmosphere system pipe and vacuum system pipe.
Preferably, the antenna includes three groups of standard-gain horn antennas and two groups of lens horn antennas.
This be suitable for wave transparent chamber low temperature plasma electron density method specific steps are as follows:
A) corresponding fluid model is established: cooperation microwave vector network analyzer, according to the antenna in perceptual discharge system
Corresponding fluid model is established in COMSOL with the geometry of cavity；
B) contour curve discretization: to neTwo dimensional Distribution solved, and acquire the n on corresponding wave interference patheProfile
Curve carries out discretization to contour curve, and the number of discrete segment is N, and the width in section is Δ l=l/N；
C) coefficient of dispersion is compared: the electron density n by comparing discrete segment ie-iWith the n in numerical simulation resulte-max?
To coefficient of dispersion αi=ne-i/ne-max, can be with direct solution n according to formulae-max, and then obtain the n on wave interference pathePoint
Cloth
Preferably, antenna is lens antenna in the step a), and lens antenna is directly to S11Parameter measures to obtain
Phase-shift phase goes out the n in interference wave transmission path by equationseDistribution.
Preferably, microwave vector network analyzer in the step a), using MS4644B type microwave vector network analysis
Instrument, major parameter are as follows: frequency range 10MHz~40GHz, pulse minimum resolution 2.5ns, corresponding space minimum resolution
For 0.75m.
Compared with prior art, the beneficial effects of the present invention are: this programme is by carrying out numerical simulation and wave interference method
It combines, for the cavity body structure in two kinds of wave transparent chamber plate inductive coupled plasma discharge sources, has studied based on fluid model
Microwave mono-/bis-end reflection interference diagnosis, can measure the phase-shift phase of thin layer plasma more accurately, discharge it is medium from
Daughter will appear significant ground uneven distribution phenomenon, and the cental axial position of portable antenna is needed when using microwave diagnostics method, is made
Phase-shift phase reaches maximum, diffusion equation simple and flexible.
Detailed description of the invention
Fig. 1 is that the present invention is based on the single-ended reflection interference diagnosis Experimental equipments of the microwave of fluid model；
Fig. 2 is that the present invention is based on the microwave both-end reflection interference diagnosis Experimental equipments of fluid model；
Fig. 3 is that the present invention is based on the microwave mono-/bis-end reflection interference diagnosis flow charts of fluid model；
Fig. 4 is that the present invention is based on the microwave mono-/bis-end reflection interference diagnosis schematic diagrams of fluid model.
In figure: 1- microwave vector network analyzer, 2- coaxial cable, 3- antenna, 4- microwave dark room, 5- power supply connect hole, 6-
External-connected port, 7- plasma.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-Fig. 4 is please referred to, the present invention provides a kind of technical solution: a kind of microwave interference diagnosis based on fluid model
Method, structure include that microwave vector network analyzer 1, coaxial cable 2, antenna 3, microwave dark room 4, power supply connect hole 5, external-connected port
6 and plasma 7, the left side wall of the microwave vector network analyzer 1 be electrically connected with coaxial cable 2, the coaxial cable 2
Through the inner cavity right side wall of microwave dark room, and the left side wall of coaxial cable 2 is electrically connected with antenna 3, the microwave dark room 4
Inner cavity includes plasma 7, and the left side wall of microwave dark room 4 and bottom offer power supply respectively and connect hole 5 and external-connected port 6.
The plasma 7 includes solid metal reflector, insulation board and coil antenna.
The external-connected port 6 includes atmosphere system pipe and vacuum system pipe.
The antenna 3 includes three groups of standard-gain horn antennas and two groups of lens horn antennas.
This be suitable for wave transparent chamber low temperature plasma electron density method specific steps are as follows:
A) corresponding fluid model is established: cooperation microwave vector network analyzer 1, according to the antenna in perceptual discharge system
Corresponding fluid model is established in COMSOL with the geometry of cavity；
B) contour curve discretization: to neTwo dimensional Distribution solved, and acquire the n on corresponding wave interference patheProfile
Curve carries out discretization to contour curve, and the number of discrete segment is N, and the width in section is Δ l=l/N；
C) coefficient of dispersion is compared: the electron density n by comparing discrete segment ie-iWith the n in numerical simulation resulte-max?
To coefficient of dispersion αi=ne-i/ne-max, can be with direct solution n according to formulae-max, and then obtain the n on wave interference pathePoint
Cloth
Antenna is lens antenna in the step a), and lens antenna is directly to S11Parameter measures to obtain phase-shift phase,
Go out the n in interference wave transmission path by equationseDistribution.
Microwave vector network analyzer 1 in the step a), using MS4644B type microwave vector network analyzer, master
Want parameter are as follows: frequency range 10MHz~40GHz, pulse minimum resolution 2.5ns, corresponding space minimum resolution are
0.75m。
Working principle: interference wave frequency rate is in 12~26GHz, and wheelbase is much larger than interference wave wavelength in metal wall surface cavity,
Cavity wheelbase and radius are close, and when recycling both-end antenna measurement reflection phase shift amount, interference wave can generate multiple in metal wall surface
It reflects, also changes the influence to phase shift comprising the reflection of multiple wall surface and propagation distance in the phase shift variations amount Δ φ of measurement, next
The wheelbase of full quartz cavity is shorter, and cavity wheelbase and interference wave wavelength are closely sized to, the biography that interference wave generates in plasma 7
Defeated phase shift is smaller, using dual-port standard-gain horn antenna S12Measurement scheme can measure thin layer plasma more accurately
The phase-shift phase of body 7, it should be noted that will appear significant ground uneven distribution phenomenon in electric discharge plasma 7, recycle micro-
The cental axial position that portable antenna 3 is needed when wave diagnosis makes phase-shift phase reach maximum.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (7)
1. a kind of microwave interference diagnosis based on fluid model, structure includes microwave vector network analyzer (1), coaxial electrical
Cable (2), antenna (3), microwave dark room (4), power supply connect hole (5), external-connected port (6) and plasma (7), it is characterised in that: institute
The left side wall for stating microwave vector network analyzer (1) is electrically connected with coaxial cable (2), and the coaxial cable (2) is through micro-
The inner cavity right side wall in wave darkroom, and the left side wall of coaxial cable (2) is electrically connected with antenna (3), the microwave dark room (4) it is interior
Chamber includes plasma (7), and the left side wall of microwave dark room (4) and bottom offer power supply respectively and connect hole (5) and external-connected port
(6)。
2. a kind of microwave interference diagnosis based on fluid model according to claim 1, it is characterised in that: it is described it is equal from
Daughter (7) includes solid metal reflector, insulation board and coil antenna.
3. a kind of microwave interference diagnosis based on fluid model according to claim 1, it is characterised in that: described external
Port (6) includes atmosphere system pipe and vacuum system pipe.
4. a kind of microwave interference diagnosis based on fluid model according to claim 1, it is characterised in that: the antenna
It (3) include three groups of standard-gain horn antennas and two groups of lens horn antennas.
5. a kind of microwave interference diagnosis based on fluid model, it is characterised in that: wave transparent chamber low temperature plasma should be suitable for
Electron density method specific steps are as follows:
A) establish corresponding fluid model: cooperation microwave vector network analyzer (1), according in perceptual discharge system antenna and
The geometry of cavity establishes corresponding fluid model in COMSOL；
B) contour curve discretization: to neTwo dimensional Distribution solved, and acquire the n on corresponding wave interference patheProfile is bent
Line carries out discretization to contour curve, and the number of discrete segment is N, and the width in section is Δ l=l/N；
C) coefficient of dispersion is compared: the electron density n by comparing discrete segment ie-iWith the n in numerical simulation resulte-maxObtain from
Dissipate factor alphai=ne-i/ne-max, can be with direct solution n according to formulae-max, and then obtain the n on wave interference patheDistribution
6. a kind of microwave interference diagnosis based on fluid model according to claim 5, it is characterised in that: the step
A) antenna is lens antenna in, and lens antenna is directly to S11Parameter measures to obtain phase-shift phase, is gone out by equations
N in interference wave transmission patheDistribution.
7. a kind of microwave interference diagnosis based on fluid model according to claim 5, it is characterised in that: the step
A) microwave vector network analyzer (1) in, using MS4644B type microwave vector network analyzer, major parameter are as follows: frequency model
10MHz~40GHz, pulse minimum resolution 2.5ns are enclosed, corresponding space minimum resolution is 0.75m.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112135408A (en) * | 2020-09-24 | 2020-12-25 | 北京卫星环境工程研究所 | Plasma parameter measuring method for plasma wind tunnel |
| CN114173463A (en) * | 2021-11-24 | 2022-03-11 | 广州市微生物研究所有限公司 | Air purifier plasma density testing method and device |
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| CN102809577A (en) * | 2012-07-24 | 2012-12-05 | 西安电子科技大学 | Device and method for measuring radar reflection characteristic of plasma coating material |
| CN106602231A (en) * | 2016-11-16 | 2017-04-26 | 中国人民解放军空军工程大学 | Quasi-surface plasmon ultra-wide band low-scattering slot antenna |
| CN108037173A (en) * | 2017-12-06 | 2018-05-15 | 上海无线电设备研究所 | A kind of test system and method for hypersonic two dimension plasma sheath |
| CN108872267A (en) * | 2018-07-06 | 2018-11-23 | 电子科技大学 | A kind of plasma complex dielectric permittivity transient state Microwave reflection measurement method and device |
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2018
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102809577A (en) * | 2012-07-24 | 2012-12-05 | 西安电子科技大学 | Device and method for measuring radar reflection characteristic of plasma coating material |
| CN106602231A (en) * | 2016-11-16 | 2017-04-26 | 中国人民解放军空军工程大学 | Quasi-surface plasmon ultra-wide band low-scattering slot antenna |
| CN108037173A (en) * | 2017-12-06 | 2018-05-15 | 上海无线电设备研究所 | A kind of test system and method for hypersonic two dimension plasma sheath |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112135408A (en) * | 2020-09-24 | 2020-12-25 | 北京卫星环境工程研究所 | Plasma parameter measuring method for plasma wind tunnel |
| CN114173463A (en) * | 2021-11-24 | 2022-03-11 | 广州市微生物研究所有限公司 | Air purifier plasma density testing method and device |
| CN114173463B (en) * | 2021-11-24 | 2024-03-22 | 广州市微生物研究所集团股份有限公司 | Method and device for testing plasma density of air purifier |
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Inventor after: Zhang Wenyuan Inventor after: Wei Xiaolong Inventor after: Xu Haojun Inventor after: Song Zhijie Inventor after: Chang Yipeng Inventor after: Han Xinmin Inventor after: Wu Xin Inventor before: Wei Xiaolong Inventor before: Song Zhijie Inventor before: Xu Haojun Inventor before: Li Yiwen Inventor before: Liu Yu Inventor before: Zhang Wenyuan |
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