CN109632831B - Detection method using sensor - Google Patents
Detection method using sensor Download PDFInfo
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- CN109632831B CN109632831B CN201910098406.0A CN201910098406A CN109632831B CN 109632831 B CN109632831 B CN 109632831B CN 201910098406 A CN201910098406 A CN 201910098406A CN 109632831 B CN109632831 B CN 109632831B
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N22/00—Investigating or analysing materials by the use of microwaves or radio waves, i.e. electromagnetic waves with a wavelength of one millimetre or more
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- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/36—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
- H01Q1/38—Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q1/00—Details of, or arrangements associated with, antennas
- H01Q1/50—Structural association of antennas with earthing switches, lead-in devices or lightning protectors
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Abstract
The invention provides a microstrip antenna sensor system with a square spiral structure and higher sensitivity when used as a chemical sensor for detection, which is used for microwave chemical detection and comprises: an insulating substrate; the two microstrip antennas are formed on the insulating substrate and are insulated from each other, the two microstrip antennas are of square spiral structures and are mutually nested to form a double square spiral structure, and the microstrip antennas are used for responding to a high-frequency field acting on the microstrip antennas; and one ends of the two microstrip antennas, which are positioned on the inner sides of the two square spiral structures, are arranged in a clearance mode, and one ends positioned on the outer sides are wiring ends. Correspondingly, a sensor, a detection method and a preparation method based on the sensor are also provided.
Description
Technical Field
The invention relates to the technical field of microwave chemical detection, in particular to a detection method adopting a sensor.
Background
The microwave chemical detection field is different from the electrochemical detection field, and the electrochemical field generally detects an electrical parameter reaction of an object to be detected, that is, parameters (such as concentration, purity and the like) of the object to be detected are determined by detecting the magnitude of voltage and current. For example, chinese patent application No. CN201110072945.0 discloses a microelectrode system with a double-helix structure, which is used for electrochemical detection, and after the microelectrode system is connected with electricity, the microelectrode system detects a response current to obtain an electrical parameter of a detected object (for example, when the microelectrode system is immersed in a chemical liquid, the chemical liquid is the detected object), thereby realizing detection of the detected object.
The microwave chemical detection field does not directly detect the electrical parameter reaction of the detected object, and the principle is completely different from the electrochemical detection. Microwave chemical detection generally adopts a high-frequency field, and a high-frequency signal is directly acted on a detected object or a carrier of the detected object based on a non-contact mode, so that the detected object is detected by detecting the polarization reaction of the detected object or the carrier carrying the detected object to the high-frequency field.
With the development of micro-processing technology, micro sensors based on Micro Electro Mechanical Systems (MEMS) technology have been widely developed, and have the characteristics of miniaturization, high sensitivity, easy integration, and the like. Meanwhile, in wireless communication technology, microstrip antennas have become one of the most promising antenna types, and have attracted much attention due to their advantages of small size, light weight, low profile, conformality, easy polarization, easy production, and low cost.
The applicant has paid attention to that the polarization performance of a microstrip antenna to a high-frequency field is changed due to different acting substances, so that the microstrip antenna has the potential as a chemical sensor for detecting the acting substances and realizing the detection of a detected object based on the polarization result of the response, and therefore, the microstrip antenna based sensor can be regarded as a specific classification in the field of microwave chemical detection.
In the research of the applicant, when the microstrip antenna is used as a chemical sensor and adopts an interdigital microstrip antenna as shown in fig. 6, the sensitivity of the detection is affected because the response discrimination generated by the interdigital microstrip antenna is small and is not completely suitable for the detection of chemical parameters.
Disclosure of Invention
In view of the above, the main objective of the present invention is to provide a microstrip antenna sensor system with a square spiral structure and a manufacturing method thereof, so as to have higher sensitivity when used as a chemical sensor for detection.
The invention provides a microstrip antenna sensor system with a square spiral structure, which is used for microwave chemical detection and comprises:
an insulating substrate; the two microstrip antennas are formed on the insulating substrate and are insulated from each other, the two microstrip antennas are of square spiral structures and are mutually nested to form a double square spiral structure, and the microstrip antennas are used for responding to a high-frequency field acting on the microstrip antennas; and one ends of the two microstrip antennas, which are positioned on the inner sides of the two square spiral structures, are arranged in a clearance mode, and one ends positioned on the outer sides are wiring ends.
Preferably, the two microstrip antennas are arranged on the insulating substrate in a centrosymmetric manner.
Compared with the interdigital microstrip antenna in the background technology, the square spiral microstrip antenna sensor system has larger response discrimination and improves the response stability in chemical parameter measurement. On the other hand, through test comparison, the sensor of the square spiral microstrip antenna has higher response amplitude which is more than 2 times compared with the sensor of the circular spiral microstrip antenna, and therefore, the rectangular spiral microstrip antenna type sensor can obtain better detection effect.
Preferably, the width, height and spacing between the two microstrip antennas are between 0.01 and 200 microns. And, preferably, there is an insulating layer on the insulating substrate, the insulating layer is silicon dioxide, glass, PET or PI.
Therefore, the whole sensor is small in size and can be prepared on the flexible substrate, so that the sensor can be flexibly attached to various surfaces to be detected.
Preferably, the thickness of the insulating layer is between 0.1 micron and 1 mm. In addition, preferably, the microstrip antenna is made of a conductive material, including gold, copper, platinum or carbon.
According to the micro-strip antenna principle, the line width and the distance between the two micro-strip lines are only in a micron order, so that the sensor has high response in a frequency range from hundred megahertz to GHz, and good sensitivity is obtained.
The invention provides a sensor, which comprises a microstrip antenna sensor system with a square spiral structure; further comprising: and the biological sensitive film is fixed on the surfaces of the two microstrip antennas.
From the above, microwave (i.e. high frequency field) based chemical detection can be achieved using the sensor.
The detection method adopting the sensor provided by the invention comprises the following steps:
applying a high-frequency field to a microstrip antenna with a biological sensitive film fixed on the surface; acquiring a response signal of the microstrip antenna to the high-frequency field through a signal acquisition device connected to a wiring end of the microstrip antenna; and analyzing the polarization result according to the response signal to obtain a detection result.
The first method for preparing the microstrip antenna sensor system with the square spiral structure provided by the invention comprises the following steps:
spin-coating a photoresist on the insulating substrate; photoetching the spin-coated photoresist to expose the square spiral structure, and sputtering metal to form a microstrip antenna with the square spiral structure; and removing the residual photoresist and the metal layer.
The second method for preparing the microstrip antenna sensor system with the square spiral structure provided by the invention comprises the following steps: and forming the microstrip antenna with the square spiral structure on the insulating substrate by a printing method.
Therefore, the microstrip antenna sensor system with the square spiral structure can be prepared by any method according to the requirements of process cost, precision and the like.
Drawings
FIG. 1 is a schematic plan view of a square spiral microstrip antenna sensor system according to the present invention;
FIG. 2 is a schematic perspective view of a square spiral microstrip antenna sensor system according to the present invention;
FIG. 3 is a diagram of high frequency signals obtained by placing both a circular spiral and a square spiral as microstrip antennas in a sample liquid having a dielectric constant of about 2;
FIG. 4a is a schematic flow chart of a method for manufacturing a square spiral microstrip antenna sensor system according to the present invention; FIG. 4b is a schematic diagram of a structure corresponding to the flow of FIG. 4 a;
FIG. 5a is a schematic diagram of a method for manufacturing a square spiral microstrip antenna sensor system according to the present invention; FIG. 5b is a schematic diagram of a structure corresponding to the flow of FIG. 5 a;
fig. 6 is a schematic diagram of a conventional interdigital microstrip antenna.
Detailed Description
The square spiral microstrip antenna sensor system is composed of an insulating substrate (3) and a pair of microstrip antennas which are in micron-sized sizes and are in a square double-spiral shape alternately. The microstrip antenna can provide continuous electric field distribution, and improves response stability and response sensitivity in electrochemical measurement, such as the detection process of high-frequency parameters of substance content, components, shape and the like.
The sensor system of the present invention will be described in detail below with reference to the accompanying drawings. The sensor system schematic shown in fig. 1 and 2 comprises:
the insulating layer of the insulating substrate 11 can be made of silicon dioxide, glass or flexible materials such as PET, PI and the like, and the thickness of the insulating substrate is between 0.1 micrometer and 1 millimeter.
Two microstrip antennas 12 and 13 formed on the insulating substrate 11, the microstrip antenna material is a conductive material, such as a metal material like gold, copper, platinum, or carbon. The two microstrip antennas are in a square spiral shape, the rotation directions of the two microstrip antennas are the same, and the two microstrip antennas are embedded with gaps to form a square double-spiral structure. The gap realizes the insulation of the two microstrip antennas, the inner ends of the two microstrip antennas are arranged in the gap mode, the outer ends extending out of the double-spiral structure are used as wiring ends to be connected with external lead wires (such as a signal receiving part), and the two wiring ends can be located at two opposite ends of the double-spiral structure, so that the antennas are symmetrically arranged in the whole layout mode. The square spiral structure microstrip antenna can provide continuous electric field distribution, is different from the discontinuous electric field distribution of the interdigital array antenna in the background art, and improves the response stability compared with the interdigital array antenna.
Among them, the polarization characteristics of the two microstrip antennas 12 and 13 are affected by the variation of the spacing and line width. In this embodiment, the line width, height and spacing between the two is between 0.01 microns and 200 microns. Because the line width is only in micron level, the high-frequency response signal of the sensor is greatly improved.
In addition, the applicant experimented with a helical microstrip antenna sensor which is circular as a whole, that is, two rectangular helical microstrip antennas shown in fig. 1 are changed into circular arcs to form a standard helical microstrip antenna, but as shown in fig. 3, both a circular helix and a square helix are taken as microstrip antennas and are placed in a high-frequency signal diagram of sample liquid with a dielectric constant of about 2; the sensor of the square spiral microstrip antenna has higher response amplitude which is more than 2 times of the response amplitude of the sensor of the circular spiral microstrip antenna, so that the rectangular spiral microstrip antenna type sensor can obtain better detection effect.
The invention also provides a chemical sensor, which comprises the square spiral microstrip antenna sensor structure, and in addition, the chemical sensor also comprises a biological sensitive film fixed on the surfaces of the two microstrip antennas, for example, the biological sensitive film is an antibody film with alpha fetoprotein, so that a square spiral microstrip antenna sensor system for detecting the alpha fetoprotein is formed.
Fig. 4 is a schematic diagram of a method for manufacturing a square spiral microstrip antenna sensor system using MEMS technology. In this example, a microstrip antenna sensor for detecting humidity is prepared, and the preparation method includes the following steps:
step S201: spin-coating photoresist AZ-4620, indicated as 42 in fig. 4b, with a thickness of 1 micron, on an insulating substrate 11, such as a PET substrate;
step S202: and photoetching the spin-coated photoresist to expose a square spiral structure: ultraviolet photoetching is carried out to form a square spiral pattern 42, the line width is 25 micrometers, and the space is 25 micrometers;
step S203: on the substrate on which the square spiral pattern has been photo-etched, a metal layer 44 is sputtered: sputtering 20nm of chromium and 300nm of gold to form a double-spiral structure pattern; wherein the gold layer is used as an electroplating seed layer, and the chromium layer is used as a bonding layer between the gold layer and the polished glass substrate;
step S204: removing the remaining photoresist and the plating seed layer: the photoresist is removed, and the microstrip antenna system 45 of a square spiral structure formed by gold is remained on the surface of the substrate.
When the square spiral microstrip antenna system prepared by the process is used for testing, one branch of each of the two microstrip antennas is used as an input end, and the other branch of each of the two microstrip antennas is used as an output end and is connected with a feeder line for testing the humidity of an object to be tested.
Fig. 5 is a schematic diagram of a system method for manufacturing a square spiral microstrip antenna sensor using a printed circuit process. Taking the preparation of a microstrip antenna sensor for detecting alpha fetoprotein as an example, the method comprises the following steps:
step S301: printing metallic nickel on a circuit board on the surface of a PI substrate (an insulating substrate 11) to form a pair of square spiral microstrip antennas which mutually form a square double-spiral structure 52;
step S302: gold is electrodeposited on a substrate with a square spiral metal structure; forming a square spiral microstrip antenna system 53;
step S303: the fixing of the bio-sensitive membrane is carried out, in this case: the antibody of alpha fetoprotein is fixed on the surface of the gold antenna by a self-assembly method, so that a square spiral microstrip antenna system for detecting the alpha fetoprotein is formed.
Therefore, the method can be applied to the detection of alpha fetoprotein.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (6)
1. A sensing method using a sensor, the sensor comprising: a microstrip antenna sensor system with a square spiral structure and a biological sensitive film;
the microstrip antenna sensor system with the square spiral structure is used for microwave chemical detection, and comprises: the antenna comprises an insulating substrate and two microstrip antennas which are formed on the insulating substrate and are insulated from each other, wherein the two microstrip antennas are of square spiral structures, have the same rotation direction and are mutually nested to form a double square spiral structure, and the microstrip antennas are used for responding to a high-frequency field acted on the microstrip antennas; one end of each microstrip antenna, which is positioned at the inner side of the double-square spiral structure, is arranged in a gap mode, and the other end of each microstrip antenna, which is positioned at the outer side of the double-spiral structure, is a wiring end; the two microstrip antennas are arranged on the insulating substrate in a centrosymmetric manner; the width and the height of the two microstrip antennas and the distance between the two microstrip antennas are between 0.01 and 200 microns;
the biological sensitive film is fixed on the surfaces of the two microstrip antennas;
the detection method comprises the following steps:
applying a high-frequency field to a microstrip antenna with the surface fixed with the biological sensitive film;
acquiring a response signal of the microstrip antenna to the high-frequency field through a signal acquisition device connected to a wiring end of the microstrip antenna;
and analyzing the polarization result according to the response signal to obtain a detection result.
2. The detection method according to claim 1, wherein the insulating substrate has an insulating layer thereon, and the insulating layer is silicon dioxide, glass, PET, or PI.
3. The method of claim 2, wherein the thickness of the insulating layer is between 0.1 μm and 1 mm.
4. The method as claimed in claim 1, wherein the microstrip antenna is made of a conductive material, such as gold, copper, platinum or carbon.
5. The method for detecting according to claim 1, wherein the method for preparing the microstrip antenna sensor system with square spiral structure comprises:
spin-coating a photoresist on the insulating substrate;
photoetching the spin-coated photoresist to expose the square spiral structure, and sputtering metal to form a microstrip antenna with the square spiral structure;
and removing the residual photoresist and the metal layer.
6. The method for detecting according to claim 1, wherein the method for preparing the microstrip antenna sensor system with square spiral structure comprises:
and forming the microstrip antenna with the square spiral structure on the insulating substrate by a printing method.
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| CN201910098406.0A CN109632831B (en) | 2019-01-31 | 2019-01-31 | Detection method using sensor |
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| CN201910098406.0A CN109632831B (en) | 2019-01-31 | 2019-01-31 | Detection method using sensor |
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| CN109632831B true CN109632831B (en) | 2022-04-19 |
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Citations (5)
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| CN102622641A (en) * | 2011-01-30 | 2012-08-01 | 上海祯显电子科技有限公司 | Passive radio frequency sensing device |
| CN102692439A (en) * | 2011-03-25 | 2012-09-26 | 中国科学院电子学研究所 | Microelectrode system having double-spiral structure, electrochemical sensor and preparation method of the microelectrode system having double-spiral structure |
| CN103762418A (en) * | 2014-01-09 | 2014-04-30 | 东莞晶汇半导体有限公司 | Technology for sputtering antenna on surface of radio frequency module |
| CN103972641A (en) * | 2014-04-24 | 2014-08-06 | 小米科技有限责任公司 | Planar spiral antenna |
| KR20140121177A (en) * | 2013-04-05 | 2014-10-15 | 연세대학교 산학협력단 | Sensor for detecting apoptosis process and method for manufacturing the same |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102622641A (en) * | 2011-01-30 | 2012-08-01 | 上海祯显电子科技有限公司 | Passive radio frequency sensing device |
| CN102692439A (en) * | 2011-03-25 | 2012-09-26 | 中国科学院电子学研究所 | Microelectrode system having double-spiral structure, electrochemical sensor and preparation method of the microelectrode system having double-spiral structure |
| KR20140121177A (en) * | 2013-04-05 | 2014-10-15 | 연세대학교 산학협력단 | Sensor for detecting apoptosis process and method for manufacturing the same |
| CN103762418A (en) * | 2014-01-09 | 2014-04-30 | 东莞晶汇半导体有限公司 | Technology for sputtering antenna on surface of radio frequency module |
| CN103972641A (en) * | 2014-04-24 | 2014-08-06 | 小米科技有限责任公司 | Planar spiral antenna |
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