CN109631559A - Gas heater is used in chip drying - Google Patents
Gas heater is used in chip drying Download PDFInfo
- Publication number
- CN109631559A CN109631559A CN201811325847.1A CN201811325847A CN109631559A CN 109631559 A CN109631559 A CN 109631559A CN 201811325847 A CN201811325847 A CN 201811325847A CN 109631559 A CN109631559 A CN 109631559A
- Authority
- CN
- China
- Prior art keywords
- quartzy
- carbon fiber
- gas
- chamber resettling
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 title claims abstract description 26
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 38
- 239000004917 carbon fiber Substances 0.000 claims abstract description 38
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims abstract description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000007789 gas Substances 0.000 claims description 75
- 238000009434 installation Methods 0.000 claims description 15
- 239000010453 quartz Substances 0.000 claims description 7
- 238000003466 welding Methods 0.000 claims description 4
- 239000004575 stone Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 238000009841 combustion method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 241000486406 Trachea Species 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000703 high-speed centrifugation Methods 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
Abstract
The invention discloses a kind of chip drying gas heaters, including shell, the gentle flow channel component of heating component, shell has quartz glass tube and the quartzy upper cover plate being sealedly attached on quartz glass tube axial ends mouth respectively and quartzy bottom plate, and quartz glass tube, quartzy upper cover plate and quartzy bottom plate are also encircled into chamber resettling together；Heating component has the carbon fiber heaters being built in chamber resettling and two conducting wires being electrically connected respectively with carbon fiber heaters；Flow channel component has quartzy tracheae and two gas interfaces being mounted in quartz glass pipe outer wall, quartzy tracheae is built in chamber resettling and is also sheathed on outside carbon fiber heaters, the air inlet port that quartzy tracheae also uses thereon is connected with chamber resettling, wherein a gas interface is connected with chamber resettling, and another gas interface is connected with the air outlet of quartzy tracheae.The gas heater is while drying chip, it is thus also avoided that chip is contaminated, it is ensured that chip quality.
Description
Technical field
The present invention relates to chip manufacture technical fields, specifically provide a kind of chip drying gas heater.
Background technique
At present in chip production industry, there are mainly two types of common chip drying means: 1. using high speed centrifugation method
Chip is dried.2. chip is dried using gas heating method, specific furnace drying method are as follows: the heat generated using nickel chromium triangle heater strip
Amount blows out high-temperature gas after heating gas, and high-temperature gas dries chip.
However, with the development of chip industry, it is more and more thinner that the diameter of chip becomes big, thickness.Traditional drying side
Method will cause chip breakage, although high-temperature gas furnace drying method can be to avoid the problem of chip breakage, due to nickel chromium triangle heater strip
It is to use intermetallic composite coating, so it understands precipitating metal ion, to pollute chip.
In view of this, the present invention is specifically proposed.
Summary of the invention
In order to overcome drawbacks described above, the present invention provides a kind of chip drying gas heaters, are realizing to chip
While drying, it is contaminated also to efficiently avoid chip, it is ensured that chip quality.
The present invention is to solve technical solution used by its technical problem: a kind of chip drying gas heater,
Including shell, heating component and for the flow channel component of circulated gases, wherein the shell have quartz glass tube and
The quartzy upper cover plate and quartzy bottom plate being sealedly attached on the quartz glass tube axial ends mouth respectively, the quartz glass
Pipe, quartzy upper cover plate and quartzy bottom plate are also encircled into a chamber resettling together；
The heating component have the carbon fiber heaters that are built in the chamber resettling of positioning and two respectively with
The conducting wire that the carbon fiber heaters are electrically connected, and two conducting wires are further averaged and are not placed in outside the chamber resettling；
It is the quartzy tracheae and two gas interfaces of helix that the flow channel component, which has one, and the quartz tracheae is fixed
Position is built in the chamber resettling and goes back while being sheathed on outside the carbon fiber heaters, and the quartzy tracheae is also used
Air inlet port thereon is connected with the chamber resettling, and two gas interfaces distinguish location and installation in the quartz
On the outer wall of glass tube, and wherein a gas interface is also connected with the chamber resettling, that is, be used as room temperature or
The intake interface that cryogenic gas flows into, another gas interface also connect and are connected to the air outlet of the quartzy tracheae,
It is used as the outlet interface flowed out for high-temperature gas.
As a further improvement of the present invention, the carbon fiber heaters have one for U-shaped shape carbon fiber heating body and
Two electrodes being connected on the carbon fiber heating body both ends, the carbon fiber heating body positioning are built in the accommodating
In chamber, two electrodes stretch out in outside the chamber resettling respectively, and also respectively correspond and be electrically connected with two conducting wires
It connects.
As a further improvement of the present invention, the both ends of the carbon fiber heating body are welded with the quartzy upper cover plate respectively
It connects connected；
In addition also each positioning sleeve respectively on the position outside the chamber resettling is stretched out in each electrode be equipped with a guarantor
Sheath.
As a further improvement of the present invention, the quartz glass tube, the carbon fiber heating body and the quartzy tracheae
It is arranged in same center line.
As a further improvement of the present invention, two gas interfaces are fixedly welded on the quartz glass tube respectively
Outer wall on, and two gas interfaces are also located on same sagittal plane.
As a further improvement of the present invention, also location and installation has one to accommodate thermocouple in the chamber resettling
The installation of TC pipe.
As a further improvement of the present invention, the installation of TC pipe and the quartz glass tube coaxial line are arranged, and
One end of the installation of TC pipe and the quartzy upper cover plate welding are connected.
As a further improvement of the present invention, on the inner wall of the chamber resettling also positioning be provided with it is multiple to support
The supporting block of the carbon fiber heating body and the quartzy tracheae.
The beneficial effects of the present invention are: 1. when heated, no any metal ion is precipitated the gas heater, thus not
Heat gas can be polluted, it is ensured that chip quality.2. the helical form quartz tracheae in the gas heater is able to extend gas
Residence time in chamber resettling, realization effectively heats gas, and then dries very well to chip.3. the gas
It is also configured with thermocouple in body heater, can be used to the center heating temperature for detecting the carbon fiber heaters, and then improve
The use intuitive of gas heater and safety.4. the gas heater both can dry combustion method, safety in utilization is good；Again to gas
Uninterrupted is required without limitation, and applicability is good and wide.
Detailed description of the invention
Fig. 1 is the schematic diagram of the section structure that gas heater is used in chip of the present invention drying；
Fig. 2 is the schematic diagram of the section structure of heating component of the present invention.
In conjunction with attached drawing, make the following instructions:
10 --- quartz glass tube 11 --- quartzy upper cover plates
12 --- quartzy bottom plate 20 --- carbon fiber heaters
200 --- carbon fiber heating body 201 --- electrodes
21 --- conducting wire 30 --- quartzy tracheaes
31 --- gas interface 4 --- protective cases
5 --- the installation of TC pipe 6 --- supporting blocks
Specific embodiment
Referring to figure to a preferred embodiment of the present invention will be described in detail.
Embodiment 1:
It please refers to shown in attached drawing 1 and attached drawing 2, the chip drying respectively of the present invention cross-section structure of gas heater
The schematic diagram of the section structure of schematic diagram and the heating component.
The chip drying gas heater includes shell, heating component and the flow channel component for circulated gases,
Wherein, the shell has quartz glass tube 10 and is sealedly attached on the 1 axial ends mouth of quartz glass tube respectively
Quartzy upper cover plate 11 and quartzy bottom plate 12, the quartz glass tube 1, quartzy upper cover plate 11 and quartzy bottom plate 12 are also encircled into together
One chamber resettling；
The carbon fiber heaters 20 and two difference that there is the heating component positioning to be built in the chamber resettling
The conducting wire 21 being electrically connected with the carbon fiber heaters 20, and two conducting wires 21 further average and are not placed in the chamber resettling
Outside；
It is the quartzy tracheae 30 and two gas interfaces 31 of helix that the flow channel component, which has one, the quartz gas
The positioning of pipe 30 is built in the chamber resettling and goes back while being sheathed on outside the carbon fiber heaters 20, and the quartzy gas
Pipe 30 uses air inlet port thereon also to be connected with the chamber resettling, and two gas interfaces 31 pacify respectively by positioning
On outer wall loaded on the quartz glass tube 1, and wherein a gas interface 31 is also connected with the chamber resettling, i.e. quilt
It is used as the intake interface flowed into for room temperature or cryogenic gas, another gas interface 31 also goes out with the quartzy tracheae 30
The connection of gas port and connection, that is, be used as the outlet interface flowed out for high-temperature gas.
In the present embodiment, it is preferred that it is the carbon fiber heating body 200 of U-shaped shape that the carbon fiber heaters 20, which have one,
The electrode 201 being connected on 200 both ends of carbon fiber heating body with two, the carbon fiber heating body 200 position interior
It is placed in the chamber resettling, two electrodes 201 stretch out in outside the chamber resettling respectively, and also respectively correspond and two
The electrical connection of conducting wire 21 described in item.
It is further preferred that the both ends of the carbon fiber heating body 200 are solid with the quartzy welding of upper cover plate 11 respectively
Even；
In addition also each positioning sleeve respectively on the position outside the chamber resettling is stretched out in each electrode 201 be equipped with one
Protective case 4.
It is further preferred that the quartz glass tube 1, the carbon fiber heating body 200 and the quartzy tracheae 30 are in same
Center line arrangement.
In the present embodiment, it is preferred that two gas interfaces 31 are fixedly welded on the quartz glass tube 1 respectively
Outer wall on, and two gas interfaces 31 are also located on same sagittal plane.
Preferably, also location and installation has a installation of TC pipe 5 to accommodate thermocouple in the chamber resettling.Into
One step is preferred, and the installation of TC pipe 5 is arranged with 1 coaxial line of quartz glass tube, and the installation of TC pipe 5
One end and the quartzy welding of upper cover plate 11 are connected.
In the present embodiment, it is preferred that on the inner wall of the chamber resettling also positioning be provided with it is multiple to support
State the supporting block 6 of carbon fiber heating body 200 and the quartzy tracheae 30.
In addition, the present invention also provides the assembling mode of the chip drying gas heater, specifically: it 1. will be described
Carbon fiber heaters 20, the installation of TC pipe 5, which are respectively welded, to be fixed on the quartzy upper cover plate 11；2. by the quartz
Glass tube 1, the quartzy bottom plate 12, described quartzy 30, two gas interfaces 31 of tracheae and multiple supporting blocks 6
It is welded and fixed together；3. 1. and 2. resulting two parts weld together by above-mentioned steps；4. by two protective cases 4
It is weldingly fixed on the quartzy upper cover plate 11, then vacuumizes, place into annealing furnace and annealed, go de-stress
The chip drying gas heater is made.In addition, according to the market demand, it can also be by two cutting of protective case 4 removals.
In conclusion chip drying of the present invention has the advantage that the 1. gas heater with gas heater
When heated, no any metal ion is precipitated, so that heat gas will not be polluted, it is ensured that chip quality.2. the gas adds
Helical form quartz tracheae in hot device is able to extend residence time of the gas in chamber resettling, and realization effectively adds gas
Heat, and then chip is dried very well.3. being also configured with thermocouple in the gas heater, can be used to detect the carbon fiber
The center heating temperature of heater is tieed up, and then improves the use intuitive and safety of gas heater.4. the gas adds
Hot device both can dry combustion method, safety in utilization is good；Again to the requirement of gas flow unbounded size system, applicability is good and wide.
The above is only a preferred embodiment of the present invention, it but is not intended to restrict the invention, it is noted that for this
For the those of ordinary skill of technical field, without departing from the technical principles of the invention, several improvement can also be made
And modification, these improvements and modifications also should be regarded as within the scope of the present invention.
Claims (8)
1. a kind of chip drying gas heater, it is characterised in that: including shell, heating component and for the gas of circulated gases
Flow channel component, wherein the shell has quartz glass tube (10) and is sealedly attached to respectively the quartz glass tube (1)
Quartzy upper cover plate (11) on axial ends mouth and quartzy bottom plate (12), the quartz glass tube (1), quartzy upper cover plate (11) and
Quartzy bottom plate (12) is also encircled into a chamber resettling together；
The heating component have the carbon fiber heaters (20) that are built in the chamber resettling of positioning and two respectively with
The conducting wire (21) that the carbon fiber heaters (20) are electrically connected, and two conducting wires (21) further average and are not placed in the accommodating
Outside chamber；
The flow channel component has the quartzy tracheae (30) and two gas interfaces (31) for helix, the quartz gas
Pipe (30) positioning is built in the chamber resettling and goes back while being sheathed on the carbon fiber heaters (20) outside, and the stone
Heroic spirit pipe (30) uses air inlet port thereon also to be connected with the chamber resettling, and two gas interfaces (31) are divided equally
Other location and installation on the outer wall of the quartz glass tube (1), and wherein a gas interface (31) also with the accommodating cavity
Room is connected, that is, is used as the intake interface flowed into for room temperature or cryogenic gas, another gas interface (31) also with institute
It states the air outlet connection of quartzy tracheae (30) and is connected to, that is, be used as the outlet interface flowed out for high-temperature gas.
2. chip drying gas heater according to claim 1, it is characterised in that: the carbon fiber heaters (20)
It is connected on the carbon fiber heating body (200) both ends with one for the carbon fiber heating body (200) of U-shaped shape and two
Electrode (201), carbon fiber heating body (200) positioning are built in the chamber resettling, and two electrodes (201) are divided equally
It does not stretch out in outside the chamber resettling, and also respectively corresponds and be electrically connected with two conducting wires (21).
3. chip drying gas heater according to claim 2, it is characterised in that: the carbon fiber heating body
(200) it welds and is connected with the quartzy upper cover plate (11) respectively in both ends；
In addition also each positioning sleeve respectively on the position outside the chamber resettling is stretched out in each electrode (201) be equipped with a guarantor
Sheath (4).
4. chip drying gas heater according to claim 2, it is characterised in that: the quartz glass tube (1), institute
Stating carbon fiber heating body (200) and the quartzy tracheae (30) is in arrange with center line.
5. chip drying gas heater according to claim 1, it is characterised in that: two gas interfaces (31)
It is fixedly welded on respectively on the outer wall of the quartz glass tube (1), and two gas interfaces (31) are also located at same diameter
To in plane.
6. chip drying gas heater according to claim 1, it is characterised in that: also fixed in the chamber resettling
Position is equipped with a installation of TC pipe (5) to accommodate thermocouple.
7. chip drying gas heater according to claim 6, it is characterised in that: the installation of TC pipe (5)
It is arranged with the quartz glass tube (1) coaxial line, and one end of the installation of TC pipe (5) and the quartzy upper cover plate (11)
Welding is connected.
8. chip drying gas heater according to claim 2, it is characterised in that: in the inner wall of the chamber resettling
On also positioning be provided with it is multiple to support the carbon fiber heating body (200) and it is described quartz tracheae (30) supporting blocks (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811325847.1A CN109631559A (en) | 2018-11-08 | 2018-11-08 | Gas heater is used in chip drying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811325847.1A CN109631559A (en) | 2018-11-08 | 2018-11-08 | Gas heater is used in chip drying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109631559A true CN109631559A (en) | 2019-04-16 |
Family
ID=66067483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811325847.1A Pending CN109631559A (en) | 2018-11-08 | 2018-11-08 | Gas heater is used in chip drying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109631559A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2871502Y (en) * | 2006-01-23 | 2007-02-21 | 陈刚 | Water-cooled quartz-pipe reactor |
| CN201219308Y (en) * | 2008-05-30 | 2009-04-08 | 程显军 | Novel electric heating tube manufactured by carbon fiber and quartz pipe material |
| CN202709440U (en) * | 2012-08-16 | 2013-01-30 | 广东澳特利灯光有限公司 | Hot air generating device for heating carbon fiber |
| KR20130068337A (en) * | 2011-12-15 | 2013-06-26 | 박재량 | Hot wind heater using carbon heating unit |
| CN203120192U (en) * | 2013-03-05 | 2013-08-07 | 东海县宝强电热器材有限公司 | Carbon fiber heating pipe |
| CN203980608U (en) * | 2014-06-26 | 2014-12-03 | 陈顺龙 | A kind of water heating unit and the water heater that comprises it, floor heating heater and domestic heat system |
| CN108072172A (en) * | 2016-11-16 | 2018-05-25 | 上海韵申新能源科技有限公司 | A kind of direct-type efficient electric heater |
| CN209655763U (en) * | 2018-11-08 | 2019-11-19 | 太仓考斯茂石英有限公司 | Gas heater is used in chip drying |
-
2018
- 2018-11-08 CN CN201811325847.1A patent/CN109631559A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2871502Y (en) * | 2006-01-23 | 2007-02-21 | 陈刚 | Water-cooled quartz-pipe reactor |
| CN201219308Y (en) * | 2008-05-30 | 2009-04-08 | 程显军 | Novel electric heating tube manufactured by carbon fiber and quartz pipe material |
| KR20130068337A (en) * | 2011-12-15 | 2013-06-26 | 박재량 | Hot wind heater using carbon heating unit |
| CN202709440U (en) * | 2012-08-16 | 2013-01-30 | 广东澳特利灯光有限公司 | Hot air generating device for heating carbon fiber |
| CN203120192U (en) * | 2013-03-05 | 2013-08-07 | 东海县宝强电热器材有限公司 | Carbon fiber heating pipe |
| CN203980608U (en) * | 2014-06-26 | 2014-12-03 | 陈顺龙 | A kind of water heating unit and the water heater that comprises it, floor heating heater and domestic heat system |
| CN108072172A (en) * | 2016-11-16 | 2018-05-25 | 上海韵申新能源科技有限公司 | A kind of direct-type efficient electric heater |
| CN209655763U (en) * | 2018-11-08 | 2019-11-19 | 太仓考斯茂石英有限公司 | Gas heater is used in chip drying |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209655763U (en) | Gas heater is used in chip drying | |
| CN106369819A (en) | Casing pipe type gas electric heating device | |
| KR101646228B1 (en) | Carbon boiler mounting tubular type heat unit using carbon heating element | |
| CN109631559A (en) | Gas heater is used in chip drying | |
| CN104197511A (en) | Spiral nitrogen heating tank | |
| CN102530887A (en) | Method for sulfuric acid conversion heating | |
| KR101565330B1 (en) | Electricity water heater mounting tubular type heat unit using carbon heating element | |
| CN105112611A (en) | Metal heat treatment furnace | |
| CN202598859U (en) | Internal radiation isothermal electric heater of thermal field | |
| CN204465904U (en) | A kind of ptc heater | |
| CN207011014U (en) | High-effective electric heating tube | |
| CN202630387U (en) | Pressurizing packed bed type electrical gas heating device | |
| CN206905258U (en) | Boundling short-circuit type electric heater | |
| CN206073701U (en) | A kind of special sensing smelting furnace of resistance wire | |
| CN211792090U (en) | Heating radiant tube with waste heat utilization device | |
| WO2012105414A1 (en) | Gas superheater and superheater connecting body | |
| CN102620423A (en) | Pressurized packed bed gas electric heater and usage thereof | |
| CN205425402U (en) | Circulation heating pipe | |
| KR101809169B1 (en) | Apparatus for Heating Fluid | |
| CN204594238U (en) | Novel sintered furnace body interior wall construction | |
| CN210179914U (en) | Electromagnetic heating assembly for water heater | |
| CN219014624U (en) | Cast aluminum heater | |
| KR102612638B1 (en) | air heater | |
| CN218910382U (en) | Heating system and sequencing device with same | |
| CN211926292U (en) | Refrigeration and heating integrated machine with novel heating component for low-temperature liquid |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |