CN109623521B - Roller electrode polishing device and polishing method thereof - Google Patents

Roller electrode polishing device and polishing method thereof Download PDF

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Publication number
CN109623521B
CN109623521B CN201910012834.7A CN201910012834A CN109623521B CN 109623521 B CN109623521 B CN 109623521B CN 201910012834 A CN201910012834 A CN 201910012834A CN 109623521 B CN109623521 B CN 109623521B
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Prior art keywords
roller electrode
plate
polishing
guide strip
roller
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CN201910012834.7A
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CN109623521A (en
Inventor
周婷
杨瑞宁
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Xian Microelectronics Technology Institute
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Xian Microelectronics Technology Institute
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
    • B24B5/14—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding conical surfaces, e.g. of centres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/26—Accessories, e.g. stops

Abstract

The invention discloses a roller electrode polishing device and a polishing method thereof, wherein the roller electrode polishing device comprises a motor, a polishing mechanism and a guide strip; the motor is fixedly arranged, the output shaft is coaxially fixed with a roller electrode to be machined, a guide strip is arranged below the output shaft, one side of the guide strip is an inclined edge, and a perpendicular line of the inclined edge is parallel to the conical surface of the roller electrode to be machined; the plane of the polishing part of the polishing mechanism is vertical to the bottom surface; when polishing, the side face of the bottom of the polishing mechanism is attached to the bevel edge of the guide strip, and the plane of the polishing part is attached to the conical surface of the roller electrode to be machined. The roller electrode polishing device has the advantages that the taper of the roller electrode cannot be changed in the polishing process, the flatness of the conical surface is guaranteed, the polished roller electrode is smooth in surface and free of abnormal protrusions and pits, the occurrence rate of the ignition phenomenon in the parallel seam welding process is reduced, the polishing and repairing quality of the roller electrode to be processed is effectively improved, the packaging yield of an integrated circuit is improved, the polishing efficiency of the roller electrode is improved, and the packaging time of the integrated circuit is saved.

Description

Roller electrode polishing device and polishing method thereof
Technical Field
The invention belongs to the field of integrated circuit manufacturing, and relates to a roller electrode polishing device and a polishing method thereof.
Background
Roller electrodes are the most basic and consumable spare parts of parallel seam welding equipment. In the parallel seam welding process, the problems of ignition, abrasion, surface flatness reduction and the like of the roller easily occur, and the air leakage or the over-melting of a circuit seam welding ring is caused. In order to guarantee the reliability of circuit packaging, the roller electrodes with problems need to be polished in time by using sand paper in the process.
The taper of the roller electrode refers to the included angle between the oblique cutting plane of the electrode roller and the horizontal plane. The size of this angle determines the size of the contact surface between the electrode and the cover plate during parallel seam welding. The smaller the taper of the roller electrode is, the larger the contact surface between the roller electrode and the cover plate is, and the smaller the contact resistance is. According to P ═ I2R shows that when the contact resistance is reduced, the welding power is reduced, which causes heat reduction during parallel seam welding and unstable parallel seam welding reliability.
The surface flatness of the roller electrode directly influences the air tightness of the circuit and the appearance of the seam welding ring. When the roller electrode with the uneven surface is used for packaging, the concave part of the roller electrode is in contact with the cover plate instantaneously, and because the contact resistance is increased, the spot seam welding heat is increased, and the phenomenon of sparking is very easy to generate. The ignition point not only affects the appearance of the circuit, but also is easier to cause air leakage of a circuit seam welding ring.
In conclusion, the taper change and flatness reduction of the roller electrode directly affect the reliability of parallel seam welding. In the grinding process of the roller electrode, the optimization of the surface flatness and the control of the taper play a vital role in improving the reliability of parallel seam welding.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a roller electrode polishing device and a polishing method thereof, which improve the surface flatness of an electrode roller after polishing and realize the control of the taper in the electrode roller polishing process.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
a roller electrode polishing device comprises a motor, a polishing mechanism and a guide strip;
the motor is fixedly arranged, the output shaft is coaxially fixed with a roller electrode to be machined, a guide strip is arranged below the output shaft, one side of the guide strip is an inclined edge, and a perpendicular line of the inclined edge is parallel to the conical surface of the roller electrode to be machined; the plane of the polishing part of the polishing mechanism is vertical to the bottom surface; when polishing, the side face of the bottom of the polishing mechanism is attached to the bevel edge of the guide strip, and the plane of the polishing part is attached to the conical surface of the roller electrode to be machined.
Preferably, the device also comprises a fixing device, the fixing device comprises a horizontal plate and a moving plate, the moving plate is higher than the horizontal plate and is arranged in parallel with the horizontal plate, the motor is fixedly arranged on the horizontal plate, and an output shaft of the motor is positioned above the moving plate; when polishing, the guide strip and the polishing mechanism are both arranged on the movable plate.
Furthermore, two rows of guide strip fixing holes parallel to the output shaft of the motor are formed in the moving plate, and a connecting line between the two corresponding guide strip fixing holes is parallel to the inclined edge of each guide strip.
Further, be provided with the landing slab between horizontal plate and the movable plate, be provided with the movable plate fixed orifices of a plurality of groups along motor output shaft direction on the landing slab.
Preferably, the drive shaft of the motor is fixedly connected with a roller electrode clamping device through a transition shaft sleeve, the roller electrode clamping device comprises a connecting shaft, one end of the connecting shaft is connected with the transition shaft sleeve and is provided with a shaft shoulder, the other end of the connecting shaft is in threaded connection with a locking nut, a cushion cover is nested between the locking nut and the shaft shoulder, and the roller electrode to be processed is fixedly nested between the cushion cover and the shaft shoulder.
Preferably, grinding machanism is including grinding board, bottom plate and found muscle board, and the bottom plate level is placed, and grinding board and found muscle board vertical the placing on the bottom plate, three mutually perpendicular.
Furthermore, the middle part of the stud plate is hollowed.
Preferably, the plane of the polishing part of the polishing plate is fixed with sand paper.
A roller electrode polishing method based on the device comprises the following steps,
step 1, fixing a roller electrode to be processed on an output shaft of a motor, fixing a guide strip below the output shaft, and turning on the motor;
step 2, the polishing mechanism moves along the bevel edge direction of the guide strip to be polished when the polishing mechanism is attached to the conical surface of the roller electrode to be processed;
and 3, when the surface of the roller electrode is smooth and has no pits or abnormal bulges, removing the polishing mechanism, turning off the motor, and taking down the roller electrode to be processed.
Preferably, a locking nut, a cushion cover, a roller electrode to be processed and one end of the transition shaft sleeve are sequentially sleeved from one end of the connecting shaft to the other end of the connecting shaft, the locking nut is in threaded connection with the connecting shaft, and the other end of the transition shaft sleeve is fixedly connected with the free end of the output shaft of the motor.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, the roller electrode to be processed is fixed on the output shaft of the motor, the guide strip is arranged below the roller electrode to be processed, the polishing mechanism moves along the bevel edge of the guide strip, and the vertical line of the bevel edge is parallel to the conical surface of the roller electrode, so that the polishing mechanism is always parallel to the conical surface of the roller electrode, the taper of the roller electrode cannot be changed in the polishing process, the flatness of the conical surface is ensured, the polished roller electrode has a smooth surface without abnormal bulges and pits, the occurrence rate of sparking in the parallel seam welding process is reduced, the polishing and repairing quality of the roller electrode to be processed is effectively improved, the packaging yield of an integrated circuit is improved, the polishing efficiency of the roller electrode is improved, and the packaging time of the integrated circuit is saved.
Furthermore, the guide strips can be fixed on the movable plate through the through holes, and the relative axial positions of the roller electrodes to be machined can be adjusted through the through holes in different positions, so that the polishing process is more flexible.
Further, through installing the gyro wheel electrode on gyro wheel electrode clamping device, through the drive shaft fixed connection of waiting to process gyro wheel electrode clamping device and motor, the damage of external force to the drive shaft of motor when having reduced the gyro wheel and polishing makes the fixed and manual handling's of waiting to process gyro wheel electrode simple operation, high efficiency.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a roller electrode clamping device according to the present invention;
FIG. 3 is a schematic view of a grinding mechanism according to the present invention;
FIG. 4 is a schematic diagram of the structural relationship of the guide strip, the polishing plate and the roller electrode of the present invention.
Wherein: 1-a roller electrode to be processed; 2-a guide strip; 3, a motor; 4-horizontal plate; 5-a platform plate; 6, moving a board; 7-locking the nut; 8-cushion cover; 9-a transition shaft sleeve; 10-connecting shaft; 11-vertical rib plates; 12-a base plate; 13-grinding the plate.
Detailed Description
The invention is described in further detail below with reference to the accompanying drawings:
the invention relates to a roller electrode polishing device and a polishing method thereof, which are composed of a roller electrode clamping device, a roller electrode taper control system and a motor 3 as shown in figure 1.
As shown in fig. 2, the roller electrode clamping device comprises a transition shaft sleeve 9, a cushion cover 8, a connecting shaft 10 and a locking nut 7. One end of a connecting shaft 10 is connected with an output shaft of the motor 3 through a transition shaft sleeve 9 and is provided with a shaft shoulder, the other end of the connecting shaft is in threaded connection with a locking nut 7, a cushion cover 8 is nested between the locking nut 7 and the shaft shoulder, and the roller electrode 1 to be processed is fixedly nested between the cushion cover 8 and the shaft shoulder.
The connecting shaft 10 and the locking nut 7 are used for fixing the roller electrode 1 to be ground, and the transition shaft sleeve 9 is used for connecting the roller electrode clamping device with a driving shaft of the motor 3. The connecting shaft 10 is a main stressed structural part when the roller electrode 1 to be machined is polished, and damage of external force to a driving shaft of the motor 3 when the roller electrode 1 to be machined is polished is reduced. The two ends of the connecting shaft 10 are designed by threads, so that the connecting shaft can be replaced in time after being worn, and the maintenance cost of the whole roller clamping system is reduced. The design of the shaft shoulder in the connecting shaft 10 ensures the reliable fixation of the roller. The diameter of the shaft surface in the shaft shoulder is smaller than the diameter of the conical surface of the roller electrode 1 to be machined, so that the conical surface of the roller electrode 1 to be machined is exposed, and the abrasive paper can be conveniently in good contact with the conical surface of the roller electrode 1 to be machined. The side of the shaft shoulder is provided with threads, so that the connecting shaft 10 is more convenient to assemble and disassemble manually. The locking nut 7 enables the roller electrode 1 to be ground to be machined to be fixed and manually assembled and disassembled conveniently and efficiently. The transition bushing 9 reduces the risk of damage to the drive shaft of the motor 3 by external forces.
The roller electrode taper control system is composed of a fixing device, a polishing mechanism and a guide strip 2.
As shown in fig. 3, the fixing device of the roller electrode taper control system is composed of three parts, namely a horizontal plate 4, a platform plate 5 and a moving plate 6. The moving plate 6 is higher than the horizontal plate 4 and is arranged in parallel with the horizontal plate, the motor 3 is fixedly arranged on the horizontal plate 4, an output shaft of the motor is positioned above the moving plate 6, the guide strips 2 are fixedly arranged on the moving plate 6, and the polishing mechanism moves on the moving plate 6 along the inclined edges of the guide strips 2. Two rows of moving plate fixing holes parallel to the output shaft of the motor 3 are formed in the moving plate 6, the number of the two rows of moving plate fixing holes is the same, the two rows of moving plate fixing holes correspond to each other in pairs, and a connecting line between the two corresponding moving plate fixing holes is parallel to the inclined edge of the guide strip 2. A platform plate 5 is arranged between the horizontal plate 4 and the moving plate 6, and a plurality of groups of moving plate fixing holes in the direction of the output shaft of the motor 3 are formed in the platform plate 5.
The horizontal plate 4 is used for fixedly connecting the fixing device with the motor 3. The platform plate 5 is used for moving the connection of the plate 6 and the horizontal plate 4, and the relative position adjustment of the horizontal plate 4 and the driving shaft of the motor 3. The moving plate 6 provides a bearing platform for the sliding of the polishing mechanism, the fixing of the guide strip 2 and the position adjustment.
The grinding mechanism moves along the bevel edge of the guide strip 2, adopts sand paper to grind and consists of a bottom plate 12, a stud plate 11 and a grinding plate 13. The polishing plate 13 and the vertical rib plate 11 are vertically placed on the bottom plate 12, and the bottom plate 12 enables the polishing plate 13 to horizontally slide on the moving plate 6. The middle of the vertical rib plate 11 is arranged in a hollow mode and serves as a handle, and manual control over the polishing plate 13 is achieved. The polishing plate 13 is used for fixing abrasive paper, the surface of the polishing plate 13 for fixing the abrasive paper faces the conical surface of the roller electrode 1 to be processed, so that the conical surface of the roller electrode 1 to be processed is ensured to be in close contact with the abrasive paper, and the angle between the plane of the abrasive paper and the driving shaft can be controlled to be unchanged. Three planes of the bottom plate 12, the stud plate 11 and the polishing plate 13 are perpendicular to each other, and a guarantee is provided for reliable contact between the conical surface of the roller and the abrasive paper.
The guide strip 2 is used for fixing the position of the polishing plate 13 on the transverse sliding plate, one side of the guide strip 2 is an inclined edge, the inclined edge is arranged on the side face of the bottom of the polishing mechanism and is positioned below an output shaft of the motor 3, a perpendicular line of the inclined edge is parallel to the conical surface of the roller electrode 1 to be processed, two through holes are formed in the guide strip 2, a connecting line between the two through holes is parallel to the inclined edge of the guide strip 2 and is the same as the aperture of the through holes in the movable plate 6, and the hole pitch is also the same as the hole pitch of the paired through holes in the.
As shown in FIG. 4, the included angle theta between the bevel edge and the short edge is designed190 ° + α, where α is the roller taper. The design effectively ensures that the sand paper on the sand paper sticking plate is reliably contacted with the conical surface of the roller. When the side edge of the grinding device is abutted against the bevel edge of the guide strip 2, the angle between the plane of the grinding plate 13 and the central shaft of the roller is as follows: theta2＝90°-θ3＝90°-(180°-θ1)＝θ1The angle between the grinding plate 13 and the horizontal line is ensured to be always kept at the standard taper angle alpha.
As shown in fig. 1, the assembly method of the device of the present invention is as follows:
step 1, mounting a motor 3 on a fixing device of a roller electrode taper control system.
And 2, assembling the roller electrode 1 to be processed and the roller electrode clamping device.
And 3, fixedly connecting the roller electrode clamping device provided with the roller electrode 1 to be processed with a driving shaft of the motor 3.
And 4, mounting the guide strip 2 on the moving plate 6.
And 5, tightly attaching the polishing mechanism along the bevel edge of the guide strip 2, and enabling the surface of the abrasive paper on the polishing plate 13 to face the conical surface of the roller electrode 1 to be processed.
The polishing method of the roller electrode 1 to be processed by using the device comprises the following steps:
step 1, assembling a roller electrode 1 to be processed and a roller electrode clamping device.
Step 2, fixedly connecting a roller electrode clamping device provided with a roller electrode 1 to be processed with a driving shaft of a motor 3, fixing a guide strip 2 below an output shaft, and starting the motor 3;
step 3, the polishing mechanism moves along the direction of the bevel edge of the guide strip 2 to be attached to the conical surface of the roller electrode 1 to be processed for polishing;
and 4, when the surface of the roller electrode is smooth and has no pits or abnormal bulges, removing the polishing mechanism, turning off the motor 3, and taking down the roller electrode 1 to be processed.
The above-mentioned contents are only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited thereby, and any modification made on the basis of the technical idea of the present invention falls within the protection scope of the claims of the present invention.

Claims (6)

1. The roller electrode polishing device is characterized by comprising a motor (3), a polishing mechanism and a guide strip (2);
the polishing mechanism comprises a polishing plate (13), a bottom plate (12) and a stud plate (11), the bottom plate (12) is horizontally arranged, and the polishing plate (13) and the stud plate (11) are vertically arranged on the bottom plate (12) and are mutually vertical;
the grinding machine is characterized in that the motor (3) is fixedly arranged, the roller electrode (1) to be machined is coaxially fixed on the output shaft, a guide strip (2) is arranged below the output shaft, the guide strip (2) is used for fixing the position of the grinding plate (13) on the transverse sliding plate, one side of the guide strip (2) is an inclined edge, and a perpendicular line of the inclined edge is parallel to the conical surface of the roller electrode (1) to be machined; the plane of the polishing part of the polishing mechanism is vertical to the bottom surface; during polishing, the side surface of the bottom of the polishing mechanism is attached to the bevel edge of the guide strip (2), the plane of a polishing part is attached to the conical surface of the roller electrode (1) to be processed, and the taper of the roller electrode cannot be changed in the polishing process;
the device is characterized by further comprising a fixing device, wherein the fixing device comprises a horizontal plate (4) and a moving plate (6), the moving plate (6) is higher than the horizontal plate (4) and is arranged in parallel with the horizontal plate, the motor (3) is fixedly arranged on the horizontal plate (4), and an output shaft of the motor is positioned above the moving plate (6); during polishing, the guide strips (2) and the polishing mechanism are arranged on the movable plate (6);
two rows of guide strip fixing holes parallel to the output shaft of the motor (3) are formed in the movable plate (6), and a connecting line between two corresponding guide strip fixing holes is parallel to the inclined edge of the guide strip (2);
a platform plate (5) is arranged between the horizontal plate (4) and the moving plate (6), and a plurality of groups of moving plate fixing holes along the direction of the output shaft of the motor (3) are formed in the platform plate (5);
the included angle theta between the bevel edge and the short edge of the guide strip (2)190 ° + α, where α is the roller taper; the abrasive paper positioned on the abrasive paper sticking plate is ensured to be reliably contacted with the conical surface of the roller; when the side edge of the grinding device is abutted against the bevel edge of the guide strip (2), the angle between the plane of the grinding plate (13) and the central shaft of the roller is as follows: theta2＝90°-θ3＝90°-(180°-θ1)＝θ1-90 ° - α, ensuring that the angle of the sanding plate (13) to the horizontal remains at a standard taper at all times.
2. A roller electrode grinding device according to claim 1, characterized in that a roller electrode clamping device is fixedly connected with a driving shaft of the motor (3) through a transition shaft sleeve (9), the roller electrode clamping device comprises a connecting shaft (10), one end of the connecting shaft (10) is connected with the transition shaft sleeve (9) and is provided with a shaft shoulder, the other end of the connecting shaft is in threaded connection with a locking nut (7), a cushion cover (8) is nested between the locking nut (7) and the shaft shoulder, and the roller electrode (1) to be processed is fixedly nested between the cushion cover (8) and the shaft shoulder.
3. A roller electrode grinding device according to claim 1, characterized in that the middle of the vertical rib plate (11) is hollowed.
4. A roller electrode grinding device according to claim 1, characterized in that the grinding plate (13) has sand paper fixed to the grinding surface.
5. A roller electrode grinding method based on the device of any one of claims 1 to 4, characterized by comprising the following steps,
step 1, fixing a roller electrode (1) to be processed on an output shaft of a motor (3), fixing a guide strip (2) below the output shaft, and turning on the motor (3);
step 2, the polishing mechanism moves along the direction of the bevel edge of the guide strip (2) to be attached to the conical surface of the roller electrode (1) to be processed for polishing, and the taper of the roller electrode cannot be changed in the polishing process;
3, when the surface of the roller electrode is smooth and has no pits or abnormal bulges, removing the polishing mechanism, turning off the motor (3), and taking down the roller electrode (1) to be processed;
the included angle theta between the bevel edge and the short edge of the guide strip (2)190 ° + α, where α is the roller taper; the abrasive paper positioned on the abrasive paper sticking plate is ensured to be reliably contacted with the conical surface of the roller; when the side edge of the grinding device is abutted against the bevel edge of the guide strip (2), the angle between the plane of the grinding plate (13) and the central shaft of the roller is as follows: theta2＝90°-θ3＝90°-(180°-θ1)＝θ1-90 ° - α, ensuring that the angle of the sanding plate (13) to the horizontal remains at a standard taper at all times.
6. A roller electrode grinding method according to claim 5, characterized in that a locking nut (7), a cushion cover (8), the roller electrode (1) to be processed and one end of a transition shaft sleeve (9) are sequentially sleeved from one end to the other end of a connecting shaft (10), the locking nut (7) is in threaded connection with the connecting shaft (10), and the other end of the transition shaft sleeve (9) is fixedly connected with the free end of the output shaft of the motor (3).
CN201910012834.7A 2019-01-07 2019-01-07 Roller electrode polishing device and polishing method thereof Active CN109623521B (en)

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Application Number Priority Date Filing Date Title
CN201910012834.7A CN109623521B (en) 2019-01-07 2019-01-07 Roller electrode polishing device and polishing method thereof

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Application Number Priority Date Filing Date Title
CN201910012834.7A CN109623521B (en) 2019-01-07 2019-01-07 Roller electrode polishing device and polishing method thereof

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CN109623521B true CN109623521B (en) 2021-06-08

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660579A (en) * 1995-08-18 1997-08-26 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for forming a grinding wheel
JP2009172707A (en) * 2008-01-23 2009-08-06 Fujifilm Corp Grinding device, and grinding method
CN102794684A (en) * 2012-08-31 2012-11-28 浙江东晶电子股份有限公司 Polishing method for metal sealed electrode of minimized crystal resonator
CN202985295U (en) * 2012-11-15 2013-06-12 广东生益科技股份有限公司 Electrode repairing device
CN103522147A (en) * 2013-10-09 2014-01-22 鞍钢股份有限公司 Device and method for repairing spark spectrum exciting electrode
CN104416435A (en) * 2013-09-09 2015-03-18 珠海格力电器股份有限公司 Electrode grinding device
CN107598709A (en) * 2017-10-17 2018-01-19 重庆迪探节能科技有限公司 Live stone chamfering grinding clamp

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5660579A (en) * 1995-08-18 1997-08-26 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for forming a grinding wheel
JP2009172707A (en) * 2008-01-23 2009-08-06 Fujifilm Corp Grinding device, and grinding method
CN102794684A (en) * 2012-08-31 2012-11-28 浙江东晶电子股份有限公司 Polishing method for metal sealed electrode of minimized crystal resonator
CN202985295U (en) * 2012-11-15 2013-06-12 广东生益科技股份有限公司 Electrode repairing device
CN104416435A (en) * 2013-09-09 2015-03-18 珠海格力电器股份有限公司 Electrode grinding device
CN103522147A (en) * 2013-10-09 2014-01-22 鞍钢股份有限公司 Device and method for repairing spark spectrum exciting electrode
CN107598709A (en) * 2017-10-17 2018-01-19 重庆迪探节能科技有限公司 Live stone chamfering grinding clamp

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