CN109613414A - The method and system of controllable hot environment aging life-span chamber temperature changing process - Google Patents
The method and system of controllable hot environment aging life-span chamber temperature changing process Download PDFInfo
- Publication number
- CN109613414A CN109613414A CN201811604900.1A CN201811604900A CN109613414A CN 109613414 A CN109613414 A CN 109613414A CN 201811604900 A CN201811604900 A CN 201811604900A CN 109613414 A CN109613414 A CN 109613414A
- Authority
- CN
- China
- Prior art keywords
- damper
- temperature
- test chamber
- environmental test
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
Abstract
The present invention relates to a kind of control method and systems, and the method and system of especially controllable hot environment aging life-span chamber temperature changing process belong to the technical field of hot environment degradation.The present invention presets the curve T that temperature changes over timeaim(t), during the test, according to the Current Temperatures T in damper current opening angle α and environmental test chamberreal, adjust the opening angle α of damper 9 in real time by damper control mechanism, the curve T for changing over time the temperature in environmental test chamber according to predetermined temperatureaim(t) change.Temperature-rise period that the technology can be such that environmental aging life test starts and at the end of temperature-fall period become more controllable, be conducive to the consistency for improving test process.
Description
Technical field
The present invention relates to a kind of control method and system, especially a kind of temperature control of hot environment aging life-span chamber
Method and system processed belong to the technical field of hot environment degradation.
Background technique
The test of hot environment aging life-span is evaluation semiconductor devices quality commonly a kind of method, such as HTRB (High
Temperature Reverse Bias, high temperature reverse bias test), HTGB (High TemperatureGate Bias, high temperature grate
Test partially), HTFB (High Temperature Forward Bias, high temperature positively biased test), HTOL (High
Temperature Operating Life, high temperature operating life) etc..The principle of hot environment aging life-span test is partly to lead
Body device is placed under high ambient conditions and applies specific electric stress, by accelerating the ageing process of device come rapid evaluation
Its service life and reliability.
Hot environment aging life-span is tested in the temperature-rise period of incipient stage, and environmental test chamber usually uses most greatly
Thermal power quickly heats the temperature inside the box, and heating rate is very fast and is difficult accurately to control.And in the temperature-fall period in off-test stage
In, cool down mainly by the mode of natural heat dissipation, cooling rate is relatively slow and is difficult accurately to control.Heating and cooling rate can be right
Test result has large effect, and the rate of change that temperature is unable to control in current test process leads to the consistency of test
It is poor.
Although the environmental test chamber also having has the function of that control heating and cooling rate, this kind of chamber usually have system
Device for cooling, it is expensive.The working principle of hot environment chamber is as shown in Figure 1.Chamber is by insulating layer 1, fan 4, heating
Device 7, air door 8 and damper 9 are constituted.The effect of insulating layer 1 is to reduce environmental test chamber internal heat outwardly to spread.Heating
The effect of device 7 is to heat the temperature of hot environment chamber internal gas.The effect of fan 4 is gas inside drive environment chamber
Body flowing.Insulating layer 1 has an opening, and opening has one piece of rotatable damper 9.The effect of damper 9 is to adjust
Save the exchange rate of environmental test chamber internal gas and external environment.It can be controlled by controlling the opening angle α of damper 9
The opening degree of air door 8, opening angle α can be adjusted within the scope of 0 °~90 ° by manually mode.
When the damper 9 of hot environment chamber is opened when (0 ° < α≤90 ° of opening angle), hot environment chamber
Internal a part of high-temperature gas will be discharged environmental test chamber, while there are also the cryogenic gas from external environment to be inhaled
Enter hot environment chamber.Therefore, hot environment chamber can realize the internal gas exchanges with outside by air door 8.And
The opening angle of damper 9 is bigger, and the inside of hot environment chamber and extraneous gas exchange rate are faster.
Under normal conditions, mainly there are two use for the air door 8 of hot environment chamber；Specifically: first is that ventilation, by environment
The internal unwanted gas of test excludes.For example, the measured device 3 inside hot environment chamber has volatilized pernicious gas,
It can be taken a breath by air door 8.The function is hardly used in semiconductor devices high temperature ageing life test, be on the one hand because
Usually to volatilize without special gas without ventilation when test, if 9 opening degree of air door controls when being on the other hand due to ventilation
It is improper to will lead to temperature departure target value and influence to test.(note: hot environment chamber is universal test instrument, and product is set
Timing is not only for semiconducter device testing).
Second is that quickly reducing hot environment chamber internal air temperature.Since when air door 8 completely closes, high temperature ring
Chamber internal air temperature in border can only pass through 1 radiating and cooling of hot environment chamber insulating layer.And hot environment chamber is protected
Warm 1 heat insulation of layer is preferable, this causes hot environment chamber cooling very slow.After air door 8 is opened, hot environment chamber
Internal high temperature gas can be quickly discharged, while the cryogenic gas of external environment is inhaled into inside hot environment chamber, from
And fast cooling effect is reached.For example, environmental test chamber internal gas is from when cooling to 40 DEG C for 150 DEG C, if being not turned on air door 8
The time of or so two hours is needed, and if opening air door 8 and needing 5 minutes or so that cooling can be completed.The function is partly being led
Using more when body higher device temperature aging life-span is tested, main purpose is to reduce the testing time.
Currently, when doing semiconductor devices environmental aging life test, can by manually control the opening angle α of air door 8 come
The heating of rough Control experiment process and rate of temperature fall.But this method has apparent limitation.1) control precision is very poor, tries twice
It tests it is difficult to ensure that have identical heating and rate of temperature fall, causes the temperature changing process tested every time not quite identical, test
It is less reproducible.2) can not preset temperature change procedure, such as allow temperature according to be pre-designed change curve heating cooling.3)
Manual control is needed, it is complicated for operation.
Summary of the invention
The purpose of the present invention is overcoming the deficiencies in the prior art, a kind of controllable hot environment aging life-span is provided
The method and system of the temperature changing process of chamber, accurate quickly damper opening degree, can make the environmental aging longevity
Order on-test temperature-rise period and at the end of temperature-fall period become more controllable, be conducive to the consistency for improving test process.
According to technical solution provided by the invention, the temperature change mistake of the controllable hot environment aging life-span chamber
The method of journey provides the environmental test chamber of required environment including that can carry out environmental aging test for measured device；It further include that can control
The damper control mechanism of the damper open state of environmental test chamber processed；The damper control mechanism and system control
Device electrical connection processed, configures temperature allowance σ, the change step Δ β of damper opening angle α, temperature in the system controller
Control feedback cycle Twait；Described method includes following steps:
Step W1, curve T that the target temperature in environmental test chamber changes over time is determined according to test requirements documentaim(t)；
Required amount of measured device is placed in environmental test chamber, so as to hot environment needed for measured device load；
Step W2, the Current Temperatures T in environmental test chamber is measuredreal, and obtain Current Temperatures TrealWith target temperature Taim
Between difference DELTA T, if when Δ T≤- σ, jump procedure W3, if go to step W4 when-σ≤Δ T≤σ, if Δ T > σ
When, go to step W6；
Step W3, it checks the current opening angle α of damper, if current opening angle α is greater than 0 °, passes through damper
The current opening angle α of damper is reduced Δ β by control mechanism, and otherwise, go to step W7；
Step W4, temperature is kept to control feedback cycle T the current state of environmental test chamberwait；
Step W5, judge the temperature control status to environmental test chamber, at the end of needs, go to step W8, otherwise,
Go to step W2；
Step W6, it checks the current opening angle α of damper, if current opening angle α is less than 90 °, passes through damper
The current opening angle α of damper is increased Δ β, and the W4 that gos to step by plate control mechanism；Otherwise, go to step W7；
Step W7, output target temperature rate of change is too fast, can not according to target temperature curve Taim(t) to environmental test chamber
Carry out temperature control, and the W8 that gos to step；
Step W8, environmental test chamber is closed, the temperature control in environmental test chamber is stopped.
A kind of system of the temperature changing process of controllable hot environment aging life-span chamber, including can be measured device
Carry out the environmental test chamber of environment needed for environmental aging test provides；It further include the damper unlatching that can control environmental test chamber
The damper control mechanism of state, the system controller being electrically connected with the control damper control mechanism, the system
Controller can obtain the Current Temperatures T in environmental test chamberreal；Temperature allowance σ is configured in system controller, damper is opened
Open change step Δ β, the temperature control feedback cycle T of angle αwait；When test, it is bent to need to be arranged target temperature variation according to test
Line Taim(t)；
System controller is according to the Current Temperatures T of environmental test chamberrealWith target temperature change curve current target temperature
TaimBetween difference DELTA T and damper current opening angle α, pass through damper control mechanism and control damper
Open state, so that the Current Temperatures T in environmental test chamberrealPositioned at TaimWithin the scope of ± σ, the change of environmental test chamber is realized
Temperature control system.
The damper control mechanism includes the driving motor for driving damper to move, in the environmental test
Insulating layer is set on the outer wall of case, air channel barrier, fan and heater are set in the environmental test chamber.
Advantages of the present invention: the curve T that temperature changes over time can be presetaim(t), during the test, according to
Current Temperatures T in damper current opening angle α and environmental test chamberreal, real-time by damper control mechanism
The opening angle α for adjusting damper, changes over time the temperature in environmental test chamber according to predetermined temperature
Curve Taim(t) change, it can the temperature-rise period that starts environmental aging life test and at the end of temperature-fall period become more
Controllably, be conducive to improve the consistency of test process.
Detailed description of the invention
Fig. 1 is the schematic diagram of existing environmental test chamber.
Fig. 2 is the schematic diagram of environmental test chamber of the present invention.
Fig. 3 is that the present invention carries out temperature controlled flow chart to environmental test chamber.
Description of symbols: the effective flat-temperature zone 1- insulating layer, 2-, 3- measured device, 4- fan, 5- gas flow direction,
6- air channel barrier, 7- heater, 8- air door, 9- damper, 10- driving motor.
Specific embodiment
Below with reference to specific drawings and examples, the invention will be further described.
It is as shown in Figures 2 and 3: for accurate quickly damper opening degree, to realize the process of controllable alternating temperature, the present invention
The environmental test chamber of required environment is provided including environmental aging test can be carried out for measured device；It further include that can control environmental test
The damper control mechanism of 9 open state of damper of case；The damper control mechanism is electrically connected with system controller
It connects, temperature allowance σ, the change step Δ β of 9 opening angle α of damper, temperature control feedback is configured in the system controller
Cycle Twait；Described method includes following steps:
Step W1, curve T that the target temperature in environmental test chamber changes over time is determined according to test requirements documentaim(t)；
Required amount of measured device 3 is placed in environmental test chamber, to load required hot environment to measured device 3；
Specifically, target temperature TaimTemperature allowance σ need the temperature control tolerance slightly larger than environmental test chamber, generally
Ground, temperature allowance σ can take 1 DEG C.The range of the opening angle α of damper 9 is 0 °~90 °, and the unit of step delta β is degree, tool
Body numerical value, which can according to need, to be selected, and details are not described herein again.In the embodiment of the present invention, for temperature curve Taim(t), exist
Heating is had in international or professional standard and temperature-fall period requires, as long as not violating the change procedure of testing standard i.e. in principle
Can, which type of specific process is arranged according to demand by the user of equipment, specially known to those skilled in the art,
Details are not described herein again.
Step W2, the Current Temperatures T in environmental test chamber is measuredreal, and obtain Current Temperatures TrealWith target temperature Taim
Between difference DELTA T, if when Δ T≤- σ, jump procedure W3, if go to step W4 when-σ≤Δ T≤σ, if Δ T > σ
When, go to step W6；
Specifically, there is air channel barrier 6 in environmental test chamber, form effective flat-temperature zone 2 above air channel barrier 6, be tested
Device 3 is placed in effective flat-temperature zone 2, and gas flow direction 5 is as shown in the figure.It, can be in environmental test chamber after heater 7
Portion is heated, required hot environment when providing 3 hot environment aging degradation of measured device.
It can realize the acquisition to environmental test the temperature inside the box, by forms such as temperature sensors so as to obtain current temperature
Spend Treal, Δ T=Treal-Taim.The case where following T according to difference DELTA, specifically adjusts the opening angle α of damper 9
With control.
Step W3, it checks the current opening angle α of damper 9, if current opening angle α is greater than 0 °, passes through damper
The current opening angle α of damper 9 is reduced Δ β by plate control mechanism, and otherwise, go to step W7；
Specifically, it when current opening angle is greater than 0 °, needs to reduce opening angle α by damper control mechanism, to subtract
Few heat exchange.
Step W4, temperature is kept to control feedback cycle T the current state of environmental test chamberwait；
Specifically, the temperature controls feedback cycle TwaitConcrete condition can according to need and set, herein not
It repeats again.
Step W5, judge the temperature control status to environmental test chamber, at the end of needs, go to step W8, otherwise,
Go to step W2；
Step W6, it checks the current opening angle α of damper 9, if current opening angle α is less than 90 °, passes through damper
The current opening angle α of damper 9 is increased Δ β, and the W4 that gos to step by plate control mechanism；Otherwise, go to step W7；
Step W7, output target temperature rate of change is too fast, can not according to target temperature curve Taim(t) to environmental test chamber
Carry out temperature control, and the W8 that gos to step；
Step W8, environmental test chamber is closed, the temperature control in environmental test chamber is stopped.
To achieve the above object, the present invention proposes a kind of temperature change mistake of controllable hot environment aging life-span chamber
The system of journey provides the environmental test chamber of required environment including that can carry out environmental aging test for measured device 3；It further include that can control
The damper control mechanism of 9 open state of damper of environmental test chamber processed and the control damper control mechanism
The system controller of electrical connection, the system controller can obtain the Current Temperatures T in environmental test chamberreal；Concrete mode can
It is directly acquired, can also be obtained by way of being communicated with environmental test chamber by the temperature sensor additionally installed.In system control
Configuration temperature allowance σ, the change step Δ β of 9 opening angle α of damper, temperature control feedback cycle T in device processedwait；Test
When, need to be arranged target temperature change curve T according to testaim(t)；
System controller is according to the Current Temperatures T of environmental test chamberrealWith target temperature change curve current target temperature
TaimBetween difference DELTA T and damper 9 current opening angle α, pass through damper control mechanism control damper 9
Open state so that the Current Temperatures T in environmental test chamberrealPositioned at TaimWithin the scope of ± σ, environmental test chamber is realized
Alternating temperature control.
In the embodiment of the present invention, the damper control mechanism includes the driving electricity for driving damper 9 to move
Insulating layer 1 is arranged in machine 10 on the outer wall of the environmental test chamber, and air channel barrier 6, fan are arranged in the environmental test chamber
4 and heater 7.Certainly, connector is also needed between driving motor 10 and damper 9, the connector can use
The forms such as screw rod, as long as being able to achieve the size that driving motor 10 drives damper 9 to move and reaches adjustment opening angle α,
It specifically can according to need and selected.
System controller can select existing common microprocessor, such as single-chip microcontroller, specifically can according to need progress
Selection, details are not described herein again.The temperature inside the box sensor can use existing common type, as long as being able to achieve in environmental test chamber warm
The detection of degree.
The present invention presets the curve T that temperature changes over timeaim(t), during the test, worked as according to damper
Current Temperatures T in preceding opening angle α and environmental test chamberreal, damper is adjusted by damper control mechanism in real time
The opening angle α of plate 9, the curve T for changing over time the temperature in environmental test chamber according to predetermined temperatureaim(t)
Variation；Temperature-rise period that environmental aging life test can be made to start and at the end of temperature-fall period become more controllable, favorably
In the consistency for improving test process.
Claims (3)
1. a kind of method of the temperature changing process of controllable hot environment aging life-span chamber, including can for measured device into
The environmental test chamber of environment needed for row environmental aging test provides；It is characterized in that further including the air door that can control environmental test chamber
The damper control mechanism of baffle (9) open state；The damper control mechanism is electrically connected with system controller, in institute
State configuration temperature allowance σ in system controller, the change step Δ β of damper (9) opening angle α, temperature control feedback cycle
Twait；Described method includes following steps:
Step W1, curve T that the target temperature in environmental test chamber changes over time is determined according to test requirements documentaim(t)；By institute
The measured device (3) of quantity is needed to be placed in environmental test chamber, so as to hot environment needed for measured device (3) load；
Step W2, the Current Temperatures T in environmental test chamber is measuredreal, and obtain Current Temperatures TrealWith target temperature TaimBetween
Difference DELTA T, if when Δ T≤- σ, jump procedure W3, if go to step W4 when-σ≤Δ T≤σ, if when Δ T > σ,
Go to step W6；
Step W3, it checks damper (9) current opening angle α, if current opening angle α is greater than 0 °, passes through damper
The current opening angle α of damper (9) is reduced Δ β by control mechanism, and otherwise, go to step W7；
Step W4, temperature is kept to control feedback cycle T the current state of environmental test chamberwait；
Step W5, judge the temperature control status to environmental test chamber, at the end of needs, go to step W8, otherwise, jumps
To step W2；
Step W6, it checks damper (9) current opening angle α, if current opening angle α is less than 90 °, passes through damper
The current opening angle α of damper (9) is increased Δ β, and the W4 that gos to step by control mechanism；Otherwise, go to step W7；
Step W7, output target temperature rate of change is too fast, can not according to target temperature curve Taim(t) environmental test chamber is carried out
Temperature control, and the W8 that gos to step；
Step W8, environmental test chamber is closed, the temperature control in environmental test chamber is stopped.
2. a kind of system of the temperature changing process of controllable hot environment aging life-span chamber, including can be measured device
(3) environmental test chamber of environment needed for environmental aging test provides is carried out；It is characterized in that further including that can control environmental test chamber
The damper control mechanism of damper (9) open state, the system being electrically connected with the control damper control mechanism
Controller, the system controller can obtain the Current Temperatures T in environmental test chamberreal；Temperature is configured in system controller
Tolerance σ, the change step Δ β of damper (9) opening angle α, temperature control feedback cycle Twait；When test, according to test need
Target temperature change curve T is setaim(t)；
System controller is according to the Current Temperatures T of environmental test chamberrealWith target temperature change curve current target temperature TaimIt
Between difference DELTA T and damper (9) current opening angle α, pass through damper control mechanism control damper (9)
Open state, so that the Current Temperatures T in environmental test chamberrealPositioned at TaimWithin the scope of ± σ, the change of environmental test chamber is realized
Temperature control system.
3. the system of the temperature changing process of controllable hot environment aging life-span chamber according to claim 2,
Be characterized in: the damper control mechanism includes the driving motor (10) for driving damper (9) to move, in the ring
Insulating layer (1) is set on the outer wall of border chamber, air channel barrier (6), fan (4) are set in the environmental test chamber and is added
Hot device (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811604900.1A CN109613414B (en) | 2018-12-26 | 2018-12-26 | Method and system capable of controlling temperature change process of aging life test box in high-temperature environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811604900.1A CN109613414B (en) | 2018-12-26 | 2018-12-26 | Method and system capable of controlling temperature change process of aging life test box in high-temperature environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109613414A true CN109613414A (en) | 2019-04-12 |
| CN109613414B CN109613414B (en) | 2021-06-25 |
Family
ID=66012446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811604900.1A Active CN109613414B (en) | 2018-12-26 | 2018-12-26 | Method and system capable of controlling temperature change process of aging life test box in high-temperature environment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109613414B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113639694A (en) * | 2021-08-12 | 2021-11-12 | 中国人民解放军63837部队 | Cycle life test method of deep low-temperature blade tip clearance sensor |
| CN114878200A (en) * | 2022-07-08 | 2022-08-09 | 中国飞机强度研究所 | Aerospace plane component strength test heating system and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101949983A (en) * | 2010-08-09 | 2011-01-19 | 安徽鑫昊等离子显示器件有限公司 | High-temperature life test chamber |
| KR101034767B1 (en) * | 2009-02-17 | 2011-05-17 | 오성엘에스티(주) | Burn-in tester for testing semiconductor |
| CN102360047A (en) * | 2011-08-31 | 2012-02-22 | 深圳市江波龙电子有限公司 | High-temperature aging test instrument and constant-temperature control method thereof |
| CN103394378A (en) * | 2013-07-09 | 2013-11-20 | 广州国技试验仪器有限公司 | Test box with independent heating channel and refrigeration channel |
| CN103439993A (en) * | 2013-07-09 | 2013-12-11 | 广州国技试验仪器有限公司 | Test box with blower motor shared by heating channel and refrigerating channel |
| CN104062991A (en) * | 2014-06-13 | 2014-09-24 | 南京南瑞继保电气有限公司 | Temperature hysteresis control method used for high-temperature aging test |
| CN206587771U (en) * | 2017-04-01 | 2017-10-27 | 广州大冷王测控设备有限公司 | A kind of high-temperature test chamber for being easy to control air port |
| CN108885047A (en) * | 2016-03-24 | 2018-11-23 | Lg 电子株式会社 | The control method of refrigerator |
-
2018
- 2018-12-26 CN CN201811604900.1A patent/CN109613414B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101034767B1 (en) * | 2009-02-17 | 2011-05-17 | 오성엘에스티(주) | Burn-in tester for testing semiconductor |
| CN101949983A (en) * | 2010-08-09 | 2011-01-19 | 安徽鑫昊等离子显示器件有限公司 | High-temperature life test chamber |
| CN102360047A (en) * | 2011-08-31 | 2012-02-22 | 深圳市江波龙电子有限公司 | High-temperature aging test instrument and constant-temperature control method thereof |
| CN103394378A (en) * | 2013-07-09 | 2013-11-20 | 广州国技试验仪器有限公司 | Test box with independent heating channel and refrigeration channel |
| CN103439993A (en) * | 2013-07-09 | 2013-12-11 | 广州国技试验仪器有限公司 | Test box with blower motor shared by heating channel and refrigerating channel |
| CN104062991A (en) * | 2014-06-13 | 2014-09-24 | 南京南瑞继保电气有限公司 | Temperature hysteresis control method used for high-temperature aging test |
| CN108885047A (en) * | 2016-03-24 | 2018-11-23 | Lg 电子株式会社 | The control method of refrigerator |
| CN206587771U (en) * | 2017-04-01 | 2017-10-27 | 广州大冷王测控设备有限公司 | A kind of high-temperature test chamber for being easy to control air port |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113639694A (en) * | 2021-08-12 | 2021-11-12 | 中国人民解放军63837部队 | Cycle life test method of deep low-temperature blade tip clearance sensor |
| CN114878200A (en) * | 2022-07-08 | 2022-08-09 | 中国飞机强度研究所 | Aerospace plane component strength test heating system and method |
| CN114878200B (en) * | 2022-07-08 | 2022-09-30 | 中国飞机强度研究所 | Aerospace plane component strength test heating system and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109613414B (en) | 2021-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8880224B2 (en) | Airflow managing system, a method of monitoring the airflow in an HVAC system and a HVAC system | |
| CN203965478U (en) | The ageing oven of power module shell temperature constant temperature | |
| WO2018018834A1 (en) | Electric vehicle, and control method and system for ptc electric heater of electric vehicle | |
| CN109613414A (en) | The method and system of controllable hot environment aging life-span chamber temperature changing process | |
| CN108361933B (en) | Sectional type electric heating device for air conditioner and heating method thereof | |
| CN102563811A (en) | Control method of PTC (positive temperature coefficient) electric heater for heat pump air conditioner | |
| CN106211703A (en) | The heat abstractor of power device and the cooling control method of power device | |
| CN105974230A (en) | LM-80 aging test system based on semiconductor refrigeration device and control method of system | |
| JP4554535B2 (en) | Environmental test equipment | |
| CN115597101B (en) | Temperature control method and device for heating equipment, heating equipment and storage medium | |
| CN107062543A (en) | Heat exchange system and control method thereof | |
| CN108508805A (en) | A kind of application Chip Microprocessor Temperature control electronic system | |
| CN105423512A (en) | Heat dissipation control device of electronic control module, and air conditioner and control method thereof | |
| CN109682499A (en) | Temperature measurement calibrating installation constant temperature electric probe device and constant-temperature control method | |
| CN109613413A (en) | Increase the method and system of hot environment degradation test sample quantity | |
| CN105352262A (en) | Air-cooled refrigerator and freezing protection control method thereof | |
| CN208999333U (en) | A kind of Cabinet heat transfer coefficient test macro | |
| US9188521B2 (en) | Method for controlling the concentration of a component of a gaseous mixture recirculated in a cooking chamber, particularly in food cooking ovens | |
| CN212723128U (en) | Electrical apparatus aging test case | |
| CN203299662U (en) | High-temperature constant-temperature box | |
| CN107500519B (en) | Glass plate tempering process control method | |
| WO2018176949A1 (en) | Warm air system control method and apparatus, warm air system and automobile | |
| CN209432310U (en) | Temperature measurement calibrating installation constant temperature electric probe device | |
| CN206074781U (en) | Laser Power Devices high temperature ageing energy conserving system | |
| CN214150544U (en) | Full-automatic accurate temperature regulating device of electrophoresis apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |