CN109603518A - VOCs automated processing system and its optimal regulation method for spray painting operation - Google Patents
VOCs automated processing system and its optimal regulation method for spray painting operation Download PDFInfo
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- CN109603518A CN109603518A CN201811440734.6A CN201811440734A CN109603518A CN 109603518 A CN109603518 A CN 109603518A CN 201811440734 A CN201811440734 A CN 201811440734A CN 109603518 A CN109603518 A CN 109603518A
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- Prior art keywords
- vocs
- processing system
- exhaust
- control
- valve
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8696—Controlling the catalytic process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8678—Removing components of undefined structure
- B01D53/8687—Organic components
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
- B01D2257/708—Volatile organic compounds V.O.C.'s
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0258—Other waste gases from painting equipments or paint drying installations
Abstract
A kind of VOCs automated processing system and its optimal regulation method for spray painting operation, including entrance, preceding concentration sensor, regulating valve, first switch valve, adsorbent bed agent catalytic bed, second switch valve, rear concentration sensor, outlet and control module;The VOCs automated processing system real-time automatic measuring simultaneously records VOCs concentration value in the front-end and back-end exhaust gas of spray painting operation region and system pipeline, processing and calculating measure resulting VOCs concentration Value Data, and by the on-off of valve in control system, realize the control to the exhaust-gas treatment period;When VOCs concentration changes in exhaust gas in spray painting operation region or the VOCs automated processing system, system is adjusted control to valve automatically, to guarantee the VOCs automated processing system reliability of operation.Exhaust gas VOCs concentration can be accurately monitored and controlled in the present invention in real time, improve the stability of VOCs processing system operation, realize quick, the accurate and stability of the real-time of monitoring, accuracy and control.
Description
Technical field
The present invention relates to a kind of exhaust treatment systems, and in particular to a kind of VOCs automated processing system for spray painting operation
And its optimal regulation method, belong to environmental technology field.
Background technique
Recently as the development of society, chemical company largely rises, but not enough resulting in for environmental protection investments dynamics is big
The discharge of industrial organic exhaust gas is measured, so that atmosphere quality declines, brings serious harm to human health, it is therefore necessary to reinforce
Processing to organic exhaust gas.Currently, government bodies, local governments and every profession and trade put into effect multinomial policy and standard power-assisted successively
The improvement of VOCs requires the control of pipeline fluid also higher and higher.Wherein, spray painting operation generate exhaust gas in VOCs concentration compared with
Height is directly discharged into atmosphere and will cause serious pollution.It is thereby possible to select installing VOCs processing system in spray painting operation region
System, in actual moving process, the system is that VOCs processing reaction is judged according to the pressure and temperature before and after reaction unit
Efficiency, system is according to the pressure and temperature and pre-set simple control program of monitoring come the opening and closing degree of control valve.
The method of this monitoring temperature and pressure cannot directly according to the real-time concentration of VOCs in exhaust gas come control valve, because
There is certain hysteresis qualitys in monitoring control for this, and when operating condition changes, hysteresis quality is embodied in following two situation:
1. the feedback for controlling valve events and the exhaust gas temperature sensor after confluence is poor there are the regular hour, if the time difference
Be arranged it is improper cause temperature stability to decline it will cause the fluctuation of exhaust gas temperature curve, influence VOCs processing reaction efficiency.
2. commonly monitoring control mode is control foundation with the exhaust gas temperature after converging, but exhaust gas temperature is at this time
Deviate target temperature, needs after controlling opening of valve through restoring again after a period of time.
Both of these case is likely to result in the more serious consequence of two o'clock: the setting of 1. time differences is improper to will cause exhaust gas temperature
It generates concussion even to dissipate, so that control valve loses temperature control capability;2. system treatment effeciency is made in the deviation of exhaust gas temperature
At influence.
Summary of the invention
To solve the above problems existing in the prior art, the present invention provides a kind of VOCs for spray painting operation and automatically processes
System and its optimal regulation method improve the steady of VOCs processing system operation with accurate monitoring control exhaust gas VOCs concentration in real time
It is qualitative.
To achieve the above object, technical scheme is as follows:
A kind of VOCs automated processing system for spray painting operation, is mounted on spray painting operation region;It is characterized in that, described
VOCs automated processing system include entrance, preceding concentration sensor, regulating valve, first switch valve, adsorbent bed agent catalytic bed, second
Switch valve, rear concentration sensor, outlet and control module;The regulating valve, first switch valve, adsorbent bed agent catalytic bed and second
Switch valve is sequentially connected between the entrance and outlet, and the preceding concentration sensor is connected between the entrance and regulating valve
Pipeline on, it is described after concentration sensor be connected to the second switch valve and outlet between pipeline on;The control module
It is implanted with control detection program in advance;The VOCs that the preceding concentration sensor is used to monitor measurement VOCs processing system inlet is dense
Degree, connects the control module and the VOCs concentration value measured is transferred to the control module;Concentration sensor after described
For monitoring the VOCs concentration in measurement VOCs processing system exit, the control module and VOCs measured is dense is connected
Angle value is transferred to the control module;The regulating valve, first switch valve and second switch valve connect the control module and by these
Control module control opening and closing.
As a further improvement, the VOCs automated processing system further includes communication transmission module, host computer and movement
Terminal device;The communication transmission module is connect with the control module, to be transmitted to monitoring data by network communication
The host computer and mobile terminal device.
Another technical solution of the invention are as follows:
A kind of optimal regulation method for the exhaust-gas treatment realized using above-mentioned VOCs automated processing system, which is characterized in that
The VOCs automated processing system real-time automatic measuring simultaneously records spray painting operation region and the VOCs automated processing system
VOCs concentration value in the exhaust gas of pipeline front-end and back-end, processing and calculating measure resulting VOCs concentration Value Data, and pass through control
The on-off of valve in the VOCs automated processing system is made, realizes the control to the exhaust-gas treatment period;
It is described when VOCs concentration changes in exhaust gas in spray painting operation region or the VOCs automated processing system
VOCs automated processing system is adjusted control to the valve automatically, can with guarantee VOCs automated processing system operation
By property.
As a further improvement, the optimal regulation method of the exhaust-gas treatment includes the following steps:
The preceding concentration sensor measures and records VOCs concentration value before the exhaust-gas treatment of the inlet, and will
VOCs concentration value is transferred to the control module before the exhaust-gas treatment, which opens according to the VOCs concentration of setting with valve
The linear relationship curve of degree, controls to adjust the aperture of the regulating valve, to control the charge flow rate of exhaust gas, while the control mould
Block controls the first switch valve and second switch valve is opened, and exhaust gas is after the first switch valve, into the adsorbent bed
Agent catalytic bed carries out absorption and desorption reaction, after the completion of reaction treatment, exhaust gas through the second switch valve and after concentration sensor
Discharge, it is described at this time after concentration sensor measure and record VOCs concentration value after the exhaust-gas treatment in the exit, and
VOCs concentration value after the exhaust-gas treatment is transferred to the control module, the control module is according to VOCs concentration after the exhaust-gas treatment
Whether value reaches VOCs concentration value requirement in exhaust gas after the reaction treatment of setting, judges whether reaction treatment is completed, is controlled with this
The on-off of the first switch valve and second switch valve, and controlled according to VOCs concentration value after the exhaust-gas treatment in the exit
The first switch valve and second switch valve shift to an earlier date or delay opening and closing.
As a further improvement, the optimal regulation method of the exhaust-gas treatment further include: by the inlet and outlet
VOCs concentration Value Data passes through the communication transmission module network transmission to the host computer or movement in the exhaust gas that place measures
Terminal, and VOCs after VOCs concentration value and exhaust-gas treatment is recorded before the exhaust-gas treatment in the VOCs automated processing system in real time
The valve switch time and aperture regulation change curve data of concentration value and its corresponding control.
As a further improvement, the control module control the first switch valve and second switch valve opening and closing in advance
Time or delay time are decided by the reaction processing capacity of the VOCs automated processing system, by the survey of the rear concentration sensor
Magnitude directly determines.
Compared with prior art, the beneficial effects of the present invention are:
The VOCs automated processing system is capable of the concentration of real-time automatic monitoring and accurate control exhaust gas VOCs, has following
Advantage: when operating condition changes, the system can real-time monitoring and at once adjust control valve aperture and opening and closing in advance
Amount or amount of delay, to guarantee that the stability of VOCs automated processing system, the present invention realize the real-time of monitoring, accuracy and control
Quick, accurate and stability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Specific embodiment
The present invention is further elaborated with specific embodiment with reference to the accompanying drawing, but cannot be used as a limitation the present invention
Protection scope.
VOCs automated processing system real-time automatic measuring of the present invention for spray painting operation simultaneously records spray painting operation area
VOCs concentration value in the pipeline front-end and back-end exhaust gas of domain and the VOCs automated processing system, processing and calculating measurement are resulting
VOCs concentration Value Data, and the on-off by controlling valve in the VOCs automated processing system were realized to exhaust-gas treatment week
The control of phase.
It is described when VOCs concentration changes in exhaust gas in spray painting operation region or the VOCs automated processing system
VOCs automated processing system is adjusted control to the valve automatically, can with guarantee VOCs automated processing system operation
By property.
Fig. 1 system schematic of the invention is please referred to, the VOCs automated processing system includes entrance a, preceding concentration sensing
Device 1, regulating valve 2, first switch valve 3, adsorbent bed agent catalytic bed b, second switch valve 4, rear concentration sensor 5, outlet c, control
Module, communication transmission module, host computer and mobile terminal device.
The regulating valve 2, first switch valve 3, adsorbent bed agent catalytic bed b and second switch valve 4 enter described in being sequentially connected to
Between mouth a and outlet c, the preceding concentration sensor 1 is connected on the pipeline between the entrance a and regulating valve 2, dense after described
Degree sensor 5 is connected to the second switch valve 4 and exports on the pipeline between c.
The control module is implanted with control detection program in advance.
The preceding concentration sensor 1 is used to monitor the VOCs concentration at measurement VOCs processing system entrance a, connects the control
Molding block and the VOCs concentration value measured is transferred to the control module.
Concentration sensor 5 is used to monitor the VOCs concentration at measurement VOCs processing system outlet c after described, connects the control
Molding block and the VOCs concentration value measured is transferred to the control module.
The regulating valve 2, first switch valve 3 and second switch valve 4 connect the control module and by the control module controls
System opening and closing.
The communication transmission module is connect with the control module, monitoring data are transmitted to institute by network communication
State host computer and mobile terminal device.
Flow path of the exhaust gas in the VOCs automated processing system is: the exhaust gas containing VOCs enters pipeline from entrance a,
Successively by preceding concentration sensor 1, regulating valve 2, first switch valve 3, adsorbent bed agent catalytic bed b, second switch valve 4, after concentration
After sensor 5, by outlet c outflow.
The optimal regulation method that the VOCs automated processing system carries out exhaust-gas treatment is as follows:
The preceding concentration sensor 1 measures and records VOCs concentration value before the exhaust-gas treatment at the entrance a, and
VOCs concentration value before the exhaust-gas treatment is transferred to the control module, the control module is according to the VOCs concentration and valve of setting
The linear relationship curve of aperture controls to adjust the aperture of the regulating valve 2, to control the charge flow rate of exhaust gas, while the control
Molding block controls the first switch valve 3 and second switch valve 4 is opened, and exhaust gas is after the first switch valve 3, into described
Adsorbent bed agent catalytic bed b carries out absorption and desorption reaction, after the completion of reaction treatment, exhaust gas through the second switch valve 4 and after it is dense
It spends sensor 5 to be discharged, the rear concentration sensor 5 described at this time measures and records VOCs after the exhaust-gas treatment at the outlet c
Concentration value, and VOCs concentration value after the exhaust-gas treatment is transferred to the control module, the control module according to the exhaust gas at
Whether VOCs concentration value reaches VOCs concentration value requirement in exhaust gas after the reaction treatment of setting after reason, judges whether reaction treatment is complete
At, control the on-off of the first switch valve 3 and second switch valve 4 with this, and according to the exhaust-gas treatment at the outlet c after
VOCs concentration value controls the first switch valve 3 and second switch valve 4 in advance or delay is opened and closed.
Finally VOCs concentration Value Data in the exhaust gas measured at the entrance a and outlet c is passed by the communication
Defeated module network is transmitted to the host computer or mobile terminal, and records the exhaust gas in the VOCs automated processing system in real time
The valve switch time and aperture regulation of VOCs concentration value and its corresponding control after the preceding VOCs concentration value of processing and exhaust-gas treatment
Change curve data.
The control module controls the pre-set time or delay time that the first switch valve 3 and second switch valve 4 are opened and closed
It is to be directly determined by the measured value of the rear concentration sensor 5, is by the reaction treatment of the VOCs automated processing system
What ability determined.
The monitoring control mode that the VOCs automated processing system is realized, which can effectively improve the VOCs and automatically process, is
The stability of system operation.
Although describing the present invention herein with specific embodiment, unquestionably, present invention is obviously not limited to above-mentioned demonstration
The details of property embodiment, various obvious modifications that those skilled in the art is carried out, variations and modifications also should include
The present invention claims protection scope within.
Claims (6)
1. a kind of VOCs automated processing system for spray painting operation, is mounted on spray painting operation region;It is characterized in that, described
VOCs automated processing system includes entrance, preceding concentration sensor, regulating valve, first switch valve, adsorbent bed agent catalytic bed, second opens
Close valve, rear concentration sensor, outlet and control module;The regulating valve, first switch valve, adsorbent bed agent catalytic bed and second open
It closes valve to be sequentially connected between the entrance and outlet, the preceding concentration sensor is connected between the entrance and regulating valve
On pipeline, the rear concentration sensor is connected on the pipeline between the second switch valve and outlet;The control module is pre-
It is implanted with control detection program;The preceding concentration sensor is used to monitor the VOCs concentration of measurement VOCs processing system inlet,
It connects the control module and the VOCs concentration value measured is transferred to the control module;Concentration sensor is used for after described
The VOCs concentration in monitoring measurement VOCs processing system exit, the VOCs concentration value that connects the control module and will measure
It is transferred to the control module;The regulating valve, first switch valve and second switch valve connect the control module and by the controls
Module control opening and closing.
2. the VOCs automated processing system according to claim 1 for spray painting operation, which is characterized in that the VOCs
Automated processing system further includes communication transmission module, host computer and mobile terminal device;The communication transmission module and the control
Molding block connection, monitoring data are transmitted to the host computer and mobile terminal device by network communication.
3. a kind of optimal regulation method for the exhaust-gas treatment realized using VOCs automated processing system described in claim 2, special
Sign is, the VOCs automated processing system real-time automatic measuring simultaneously records spray painting operation region and the VOCs is automatically processed
VOCs concentration value in the pipeline front-end and back-end exhaust gas of system, processing and calculating measure resulting VOCs concentration Value Data, and
By controlling the on-off of valve in the VOCs automated processing system, the control to the exhaust-gas treatment period is realized;
When VOCs concentration changes in exhaust gas in spray painting operation region or the VOCs automated processing system, the VOCs
Automated processing system is adjusted control to the valve automatically, to guarantee the reliable of the VOCs automated processing system operation
Property.
4. the optimal regulation method of exhaust-gas treatment according to claim 3, which is characterized in that the exhaust-gas treatment it is excellent
Change adjusting method to include the following steps:
The preceding concentration sensor measures and records VOCs concentration value before the exhaust-gas treatment of the inlet, and this is given up
VOCs concentration value is transferred to the control module before gas disposal, and the control module is according to the VOCs concentration of setting and valve opening
Linear relationship curve controls to adjust the aperture of the regulating valve, to control the charge flow rate of exhaust gas, while the control module control
It makes the first switch valve and second switch valve is opened, exhaust gas is urged after the first switch valve into the adsorbent bed agent
Change bed and carry out absorption and desorption reaction, after the completion of reaction treatment, exhaust gas through the second switch valve and after concentration sensor be discharged,
Concentration sensor measures and records VOCs concentration value after the exhaust-gas treatment in the exit after described at this time, and this is given up
VOCs concentration value is transferred to the control module after gas disposal, the control module according to VOCs concentration value after the exhaust-gas treatment whether
Reach VOCs concentration value requirement in exhaust gas after the reaction treatment of setting, judges whether reaction treatment is completed, control described with this
The on-off of one switch valve and second switch valve, and according to VOCs concentration value after the exhaust-gas treatment in the exit control this first
Switch valve and second switch valve shift to an earlier date or delay opening and closing.
5. the optimal regulation method of exhaust-gas treatment according to claim 4, which is characterized in that the exhaust-gas treatment it is excellent
Change adjusting method further include: VOCs concentration Value Data passes through the communication in the exhaust gas for measuring the inlet and exit
Transmission module network transmission is recorded useless in the VOCs automated processing system in real time to the host computer or mobile terminal
Before gas disposal after VOCs concentration value and exhaust-gas treatment VOCs concentration value and its corresponding control valve switch time and aperture tune
Save change curve data.
6. the optimal regulation method of exhaust-gas treatment according to claim 4, which is characterized in that the control module control
The pre-set time or delay time of the first switch valve and the opening and closing of second switch valve are decided by the VOCs automated processing system
Reaction processing capacity, directly determined by the measured value of concentration sensor after described.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110045057A (en) * | 2019-05-24 | 2019-07-23 | 北京北大明德科技发展有限公司 | Catalyst performance evaluation device and method |
CN112249259A (en) * | 2020-10-26 | 2021-01-22 | 江南造船(集团)有限责任公司 | Ship production building VOCs system control method, system, medium and device |
CN113932060A (en) * | 2021-10-09 | 2022-01-14 | 宜昌南玻光电玻璃有限公司 | Accurate regulation and control SO in ultra-thin electronic glass flue gas2Method of concentration |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202876596U (en) * | 2012-09-29 | 2013-04-17 | 珠海市思卡净化技术有限公司 | Modular integrated compressed air purifying device |
KR20140044819A (en) * | 2011-07-27 | 2014-04-15 | 듀르 시스템스 게엠베하 | Filter facility and method for operating a filter facility |
CN108273358A (en) * | 2018-04-11 | 2018-07-13 | 山东亚泰新材料科技有限公司 | Organic waste gas treatment system and its processing method |
CN207980869U (en) * | 2018-02-08 | 2018-10-19 | 李晓 | A kind of spray painting tail gas VOC waste gas purification apparatuses |
-
2018
- 2018-11-29 CN CN201811440734.6A patent/CN109603518A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140044819A (en) * | 2011-07-27 | 2014-04-15 | 듀르 시스템스 게엠베하 | Filter facility and method for operating a filter facility |
CN202876596U (en) * | 2012-09-29 | 2013-04-17 | 珠海市思卡净化技术有限公司 | Modular integrated compressed air purifying device |
CN207980869U (en) * | 2018-02-08 | 2018-10-19 | 李晓 | A kind of spray painting tail gas VOC waste gas purification apparatuses |
CN108273358A (en) * | 2018-04-11 | 2018-07-13 | 山东亚泰新材料科技有限公司 | Organic waste gas treatment system and its processing method |
Non-Patent Citations (1)
Title |
---|
袁毅胥等: "《电气控制及PLC技术》", 31 July 2017, 电子科技大学出版社 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110045057A (en) * | 2019-05-24 | 2019-07-23 | 北京北大明德科技发展有限公司 | Catalyst performance evaluation device and method |
CN112249259A (en) * | 2020-10-26 | 2021-01-22 | 江南造船(集团)有限责任公司 | Ship production building VOCs system control method, system, medium and device |
CN113932060A (en) * | 2021-10-09 | 2022-01-14 | 宜昌南玻光电玻璃有限公司 | Accurate regulation and control SO in ultra-thin electronic glass flue gas2Method of concentration |
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