CN109587831A - Heating system and go to gas chamber - Google Patents
Heating system and go to gas chamber Download PDFInfo
- Publication number
- CN109587831A CN109587831A CN201710908793.0A CN201710908793A CN109587831A CN 109587831 A CN109587831 A CN 109587831A CN 201710908793 A CN201710908793 A CN 201710908793A CN 109587831 A CN109587831 A CN 109587831A
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- China
- Prior art keywords
- heating
- current
- terminal
- current detector
- heating system
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/22—Arrangements for measuring currents or voltages or for indicating presence or sign thereof using conversion of ac into dc
Abstract
The present invention relates to a kind of heating systems, comprising: multiple heating components, each heating component include a heating member or concatenated at least two heating member；Two connecting pins of multiple heating components are connected with first terminal and Second terminal respectively；First terminal and Second terminal are for connecting power supply；It is correspondingly arranged on the heating component: current transformer and current detector；The current transformer is used for the connecting wire mutual inductance with corresponding heating component and first terminal or Second terminal；The current detector is used to detect the electric current on the current transformer, in order to judge that it is abnormal that the heating member in the heating component exists by the way that the electric current is not detected.The present invention also provides go to gas chamber.It is not only convenient for rapidly checking the exception of heating member, and operates and be easy, is of simple structure and low cost.
Description
Technical field
The invention belongs to semiconductor equipment manufacturing technology fields, and in particular to a kind of heating chamber and go to gas chamber.
Background technique
Physical vapour deposition (PVD) (Physical Vapor Deposition, abbreviation PVD) technique accounts in semiconductor manufacturing industry
According to important position, usual complete set PVD equipment includes at least degassing (Degas), prerinse (Preclean), physical vapor
Deposit (PVD) three parts.The main function of degassing is: heating before depositing operation to workpiece, to reach removal workpiece
The water on surface and the purpose of organic matter.Gas chamber is gone to generally to use fluorescent tube heating or lamp heated, fluorescent tube or light bulb are usually with simultaneously
Connection mode forms heater circuit, need to understand at any time during heating fluorescent tube or light bulb working condition (for example, filament whether
Fusing).
It heats in the following way in the prior art and whether exception occurs: by software collection heater circuit in each input
The numerical value of corresponding current under voltage is to form standard list, if there is the fusing of the filament of fluorescent tube or light bulb in heater circuit,
The numerical value of electric current can significantly reduce, therefore, by the way that actual current numerical value is compared with the corresponding numerical value in standard list, if,
The two gap is to a certain extent, then it is assumed that has the filament of fluorescent tube or light bulb to fuse and alarm of dishing out.
But it is had the following problems in practical applications using existing mode:
First, therefore, it is necessary to acquire a series of current informations as standard since the heated rear resistance of filament can change
Numerical value in list, using as the foundation compared；Also, it is primary to require study for debugging every time, and different platform situation is different,
To cause to judge it is complex whether heating abnormal process occurs.
Second, can not clearly be specifically the filament fusing of which fluorescent tube or light bulb, it is also necessary to investigation determination artificially is carried out,
And the quantity of the filament of fluorescent tube or light bulb is more, therefore, checks relatively time consuming laborious.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, proposes a kind of heating system and go
Gas chamber, not only the process operation of the judgement heating process exception of the heating system is easy, is of simple structure and low cost；And
It is abnormal convenient for rapidly checking out which heating member.
To solve the above problems, the present invention provides a kind of heating systems, comprising: multiple heating components, it is multiple described plus
After hot modules in parallel, connect with power supply；Wherein, it is correspondingly arranged on heating component described at least one: current transformer and electricity
Current sensor；Electric current of the current transformer in the parallel branch where incuding the corresponding heating component；
The current detector is used to detect the electric current on the current transformer, in order to be not detected by the current detector
The electric current is abnormal to determine the heating component presence corresponding with the current detector.
Preferably, each heating component includes a heating member or concatenated at least two heating member；All heating
Component is correspondingly arranged on the current transformer and the current detector.
Preferably, the electric current that the current detector is also used to will test is converted to ac voltage signal, and to described
Ac voltage signal rectification obtains d. c. voltage signal, in order to detect that the DC voltage is believed by the current detector
Number it is determined to detect the electric current.
Preferably, the current detector is also used to selectively control fixed electricity according to the d. c. voltage signal of acquisition
The output of pressure is determined to detect the electric current to detect the fixed voltage by the current detector.
Preferably, the current detector includes: conversion module, is connect with the current transformer, is used for electric current
The electric current that mutual inductor obtains is converted to voltage signal；Amplification module, the voltage signal amplification for obtaining conversion module；Rectification
Module, the AC signal for obtaining amplification module carry out rectification processing and obtain d. c. voltage signal；Filter module, for pair
The d. c. voltage signal that rectification module obtains is filtered；Output module, signal for obtaining filter module and default inclined
It sets voltage to be compared, and selectively controls the output of fixed voltage based on comparative result.
Preferably, further includes: controller；The controller is connected with the current detector, for passing through the electric current
The fixed voltage is not detected to judge that it is abnormal that the heating component corresponding with the current detector exists in detector.
Preferably, further includes: alarm；The alarm is connected with the controller, to judge in the controller
Heating component deposits the controller when abnormal and controls the alarm sending alarm out.
Preferably, two connecting pins of each heating component are separately connected first terminal and Second terminal, the first end
The sub and described Second terminal is for connecting power supply；The current transformer is used for and corresponding heating component and first terminal or the
Connecting wire mutual inductance between two-terminal；Between the first terminal and the power supply or the Second terminal and the electricity
Power regulating eqiupment is additionally provided between source.
Preferably, the rectification module uses halfwave rectifier mode.
The present invention also provides one kind to go gas chamber, including heating system, and the heating system is using the above-mentioned offer of the present invention
Heating system.
In the present invention, heating system is provided with current transformer corresponding with heating component and current detector, by
Current transformer and current detector incude and detect the electric current in the parallel branch where corresponding heating component, can
It determines whether corresponding heating component exception occurs, that is, can determine whether out whether heating process exception occurs, does not need to acquire
The mass data of voltage and current, avoids more complicated deterministic process in the prior art, operation is easy, structure is simple, at
This is cheap.
In addition, heating component include a heating member when, which heating component be abnormal can clearly go out it include
A heating member be abnormal；When heating component includes two and more than two heating members, occur in the heating component
When abnormal, can check which heating member is abnormal by artificially checking, this with send out during heating in the prior art
Raw abnormal needs carry out artificial investigation to all heating members and compare, and the total quantity of investigation is reduced, therefore can rapidly be checked out
Come, so that the investigation used time is less.
Therefore heating system provided by the invention, it is not only convenient for rapidly checking that exception occurs in heating process, and operate and hold
Easily, of simple structure and low cost；And convenient for rapidly checking out which heating member is abnormal.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of heating system provided in an embodiment of the present invention；
Fig. 2 is the local equivalents schematic diagram of heating system shown in Fig. 1；
Fig. 3 is the structural schematic diagram of current detector in Fig. 2.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, come with reference to the accompanying drawing to the present invention
The heating system of offer and gas chamber is gone to be described in detail.
Embodiment 1
Fig. 1 is the structural schematic diagram of heating system provided in an embodiment of the present invention；Fig. 2 is the office of heating system shown in Fig. 1
Portion's equivalent schematic.Also referring to Fig. 1 and Fig. 2, heating system provided in an embodiment of the present invention, comprising: multiple heating components,
After multiple heating components are in parallel, connect with power supply.Specifically, two connecting pins of all heating components respectively with first terminal
1 is connected with Second terminal 2, and first terminal and Second terminal are for connecting power supply.
Wherein, all heating components are correspondingly arranged on: current transformer 10 and current detector 20；Current transformer 10
For incuding the electric current in the parallel branch where the corresponding heating component, specifically, current transformer 10 with it is right
The connecting wire mutual inductance of the heating component and first terminal or Second terminal answered, as shown in Figure 1, three current transformers 10 are one by one
Corresponding connecting wire L1~L3 mutual inductance with heating component and first terminal 1.
Current detector 20 is used to detect the electric current on current transformer 10, in order to by judging current detector 20 not
Detect electric current to determine that it is abnormal that heating component corresponding with the current detector 20 exists, certainly, then when detecting electric current
Think that the heating component is normal.
The working principle of heating system provided in this embodiment is described below in detail.Specifically, in the positive reason of heating component
Under condition, there are electric currents in the parallel branch where heating component, therefore current transformer can then induce electric current, current detector
It is capable of detecting when electric current；Certainly, if current detector does not detect electric current, illustrate that current transformer does not induce electric current, into one
Just there is no electric currents in parallel branch where step illustrates heating component, therefore, going out in abnormal namely heating process occurs in heating component
It is now abnormal.
Therefore heating system provided in an embodiment of the present invention passes through the current transformer 10 and electricity that are correspondingly arranged with heating component
Current sensor 20 incudes and detects the electric current in the parallel branch where corresponding heating component, is capable of determining that corresponding
Whether heating component there is exception, that is, judging whether heating process exception occurs, due to not needing collection voltages and electric current
Mass data, avoid more complicated deterministic process in the prior art, operation is easy, is of simple structure and low cost.
In addition, which heating component is abnormal which heating clearly gone out when heating component includes a heating member
Part is abnormal；When heating component includes two and more than two heating members, when the heating component is abnormal, pass through
Artificial investigation can check which heating member is abnormal, this is needed to institute with being abnormal during heating in the prior art
There is heating member to carry out investigation to compare, the total quantity of investigation is reduced, therefore rapidly can check out so that the investigation used time compared with
It is few.
In addition, in the present embodiment, since all heating components are correspondingly arranged current transformer 10 and current detector
20, therefore, it is possible to judge that whether all heating components are abnormal, judge whether degassing heating process exception occurs to can be improved
Reliability.Certainly, in practical applications, it can actually judge demand, current transformer is set only for part heating component
10 and current detector 20, for example, can rule of thumb only corresponding one or more heating component setting easily broken down
Current transformer 10 and current detector 20.
In this embodiment, it is preferred that each heating component includes concatenated at least two heating member；As shown in Figure 1, the
One heating component includes concatenated heating member R1 and R2, and the second heating component includes concatenated heating member R3 and R4, and third adds
Hot component includes concatenated heating member R5 and R6.
In this case, can determine in time when the filament of any heating member of heating component is blown
The heating component is abnormal out, to timely and accurately be capable of detecting when that heating process is abnormal, improve technique can
By property, concrete principle is as follows:
When heating member R1 and R2 normal in heating component, there can be electric current on the connecting wire L1 at the place of the two,
Therefore in the electric current being able to detect that on current transformer, then determine that the heating member R1 and R2 in the heating component are normal；Adding
When the filament of heating member R1 or R2 in hot component are blown, at this point, connecting wire L1 will disconnect, there can't be electric current,
In this way, current transformer can not then induce electric current, therefore, in the electric current being not detected on current transformer, then judgement should
It is abnormal in heating component.
In the present embodiment, for the ease of detecting above-mentioned electric current, the electric current that current detector 20 is also used to will test turns
It is changed to ac voltage signal, and ac voltage signal is rectified and obtains d. c. voltage signal, in order to by detecting direct current
Signal is pressed to be determined to detect the electric current, certainly, determination has not been able to detect this if d. c. voltage signal is not detected
Electric current.That is, current detecting is converted to voltage detecting to judge the presence or absence of electric current.
Further, current detector is also used to selectively control fixed voltage according to the d. c. voltage signal of acquisition
Output, be determined to detect electric current to detect fixed voltage by current detector 20, this way it is possible to avoid some
Bring is interfered to influence.
Specifically, as shown in figure 3, current detector 20 includes: conversion module 201, amplification module 202, rectification module
203, filter module 204 and output module 205.Wherein, conversion module 201 is connect with current transformer 10, for electric current is mutual
The electric current that sensor 10 obtains is converted to ac voltage signal, specifically includes the end resistance Ri, 1 and 2 and is connected with current transformer 10, electricity
It hinders Ri and the current value of the current transformer 10 of acquisition is transformed to ac voltage signal.
The voltage signal that amplification module 202 is used to obtain conversion module amplifies；Operational amplifier U1 is specifically included, due to
The drive load capacity of the ac voltage signal of conversion module output is limited, the follower taken using operational amplifier U1 group, operation
Amplifier U1 exports the strong ac voltage signal of a driving capability.
The ac voltage signal that rectification module 203 is used to obtain amplification module carries out rectification processing and obtains DC voltage letter
Number；It specifically includes diode D1 and carries out halfwave rectifier, it is relatively easy using halfwave rectifier mode.Certainly, in practical applications, also
All-wave, full-bridge rectification mode can be used.
The d. c. voltage signal that filter module 204 is used to obtain rectification module is filtered；Specifically include capacitor C1 and
Resistance R3 can obtain the d. c. voltage signal with ripple by capacitor C1 and resistance R3.
Output module 205 is for the signal that filter module 204 obtains to be compared with default bias voltage VCC, and base
The output of fixed voltage is selectively controlled in comparison result.Specifically include: comparator U2 and relay KT, comparator U2's is anti-
Phase input terminal introduces a small bias voltage VCC, and to reduce interference bring erroneous judgement, driving relay KT's suits, relay one
It terminates fixed voltage (24V), if relay KT is closed, and output end out exports fixed voltage 24V.
Preferably, to realize whether automatic detection heating member is abnormal, heating system provided in this embodiment further include: control
Device processed；Controller is connected with current detector 20, judges that this adds for fixed voltage to be not detected by current detector 20
Hot component exists abnormal.Specifically, controller includes PLC and slave computer, and PLC receives the signal that current detector 20 is sent, and
By the signal Real-time Feedback to slave computer, slave computer is after heating member work and delay judges the letter received after a certain period of time
Number whether effectively (that is, it is judged that whether receiving above-mentioned fixed voltage), there is an invalidating signal if not, then exist abnormal, stop
Only work.
It is further preferred that the heating system further include: alarm；Alarm is connected with controller, to judge in controller
Controller control alarm issues alarm when heating component has abnormal out, in order to which which heating component hair of operator informed
It is raw abnormal, so that operator checks the heating member in the heating component.Specifically, alarm signal may include: sound, image
At least one of.
Furthermore it is preferred that being additionally provided with power regulating eqiupment between first terminal 1 and power supply, power regulating eqiupment is for adjusting to heating
The watt level that component applies.Certainly, in practical applications, power regulating eqiupment can also be arranged between Second terminal and power supply.
Embodiment 2
The embodiment of the present invention also provides one kind and goes gas chamber, including heating system, and the heating system uses above-mentioned implementation
The heating system that example provides.
It is provided in an embodiment of the present invention to go to gas chamber, due to using heating system provided by the above embodiment, can be with
Improve reliability, the practicability for going to gas chamber.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a kind of heating system characterized by comprising multiple heating components, after multiple heating components are in parallel, with power supply
Series connection；Wherein, it is correspondingly arranged on heating component described at least one: current transformer and current detector；
Electric current of the current transformer in the parallel branch where incuding the corresponding heating component；
The current detector is used to detect the electric current on the current transformer, in order to not examined by the current detector
The electric current is measured to determine that it is abnormal that the heating component corresponding with the current detector exists.
2. heating system according to claim 1, which is characterized in that each heating component includes a heating member or string
At least two heating members of connection；All heating components are correspondingly arranged on the current transformer and the current detector.
3. heating system according to claim 1, which is characterized in that the electricity that the current detector is also used to will test
Circulation is changed to ac voltage signal, and rectifies to the ac voltage signal and obtain d. c. voltage signal, in order to by described
Current detector detects the d. c. voltage signal to be determined to detect the electric current.
4. heating system according to claim 3, which is characterized in that the current detector is also used to according to the straight of acquisition
Voltage signal is flowed selectively to control the output of fixed voltage, to detect the fixed voltage by the current detector
To be determined to detect the electric current.
5. heating system according to claim 4, which is characterized in that the current detector includes:
Conversion module is connect with the current transformer, and the electric current for obtaining current transformer is converted to voltage signal；
Amplification module, the voltage signal amplification for obtaining conversion module；
Rectification module, the AC signal for obtaining amplification module carry out rectification processing and obtain d. c. voltage signal；
Filter module, for being filtered to the d. c. voltage signal that rectification module obtains；
Output module, the signal for obtaining filter module is compared with default bias voltage, and is selected based on comparative result
Control to selecting property the output of fixed voltage.
6. heating system according to claim 4 or 5, which is characterized in that further include: controller；
The controller is connected with the current detector, for the fixed electricity to be not detected by the current detector
It presses to judge that it is abnormal that the heating component corresponding with the current detector exists.
7. heating system according to claim 6, which is characterized in that further include: alarm；
The alarm is connected with the controller, to judge that heating component deposits the control when abnormal in the controller
Device processed controls the alarm and issues alarm.
8. heating system according to claim 1, which is characterized in that two connecting pins of each heating component are separately connected
First terminal and Second terminal, the first terminal and the Second terminal are for connecting power supply；The current transformer is used for
Connecting wire mutual inductance between corresponding heating component and first terminal or Second terminal；In the first terminal and the electricity
Power regulating eqiupment is additionally provided between source or between the Second terminal and the power supply.
9. heating system according to claim 5, which is characterized in that the rectification module uses halfwave rectifier mode.
10. one kind goes gas chamber, including heating system, which is characterized in that the heating system is any one using claim 1-9
Heating system described in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710908793.0A CN109587831A (en) | 2017-09-29 | 2017-09-29 | Heating system and go to gas chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710908793.0A CN109587831A (en) | 2017-09-29 | 2017-09-29 | Heating system and go to gas chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109587831A true CN109587831A (en) | 2019-04-05 |
Family
ID=65914311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710908793.0A Pending CN109587831A (en) | 2017-09-29 | 2017-09-29 | Heating system and go to gas chamber |
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| Country | Link |
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| CN (1) | CN109587831A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113945778A (en) * | 2020-07-17 | 2022-01-18 | 中国石油化工股份有限公司 | Multi-section heating state monitoring device for electric roasting furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH031478A (en) * | 1989-05-29 | 1991-01-08 | Mitsubishi Heavy Ind Ltd | Power supply for heating with inverter |
| CN202712822U (en) * | 2012-07-20 | 2013-01-30 | 刘思颖 | Protective warning device for output capacitor filtering branch of voltage source converter |
| CN206002703U (en) * | 2016-09-12 | 2017-03-08 | 广东美的生活电器制造有限公司 | Detection circuit and heating vessel |
| CN206461797U (en) * | 2017-01-24 | 2017-09-01 | 上海联净电子科技有限公司 | Terminal box and the Electromechanic heating roller including it |
-
2017
- 2017-09-29 CN CN201710908793.0A patent/CN109587831A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH031478A (en) * | 1989-05-29 | 1991-01-08 | Mitsubishi Heavy Ind Ltd | Power supply for heating with inverter |
| CN202712822U (en) * | 2012-07-20 | 2013-01-30 | 刘思颖 | Protective warning device for output capacitor filtering branch of voltage source converter |
| CN206002703U (en) * | 2016-09-12 | 2017-03-08 | 广东美的生活电器制造有限公司 | Detection circuit and heating vessel |
| CN206461797U (en) * | 2017-01-24 | 2017-09-01 | 上海联净电子科技有限公司 | Terminal box and the Electromechanic heating roller including it |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113945778A (en) * | 2020-07-17 | 2022-01-18 | 中国石油化工股份有限公司 | Multi-section heating state monitoring device for electric roasting furnace |
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Application publication date: 20190405 |
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