CN109579993A - High-performance optical spectrometer - Google Patents
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- CN109579993A CN109579993A CN201811650991.2A CN201811650991A CN109579993A CN 109579993 A CN109579993 A CN 109579993A CN 201811650991 A CN201811650991 A CN 201811650991A CN 109579993 A CN109579993 A CN 109579993A
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- 238000003384 imaging method Methods 0.000 claims description 14
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- 230000035945 sensitivity Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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Abstract
The present invention relates to spectrometer arts, especially disclose a kind of high-performance optical spectrometer, including light source, entrance slit, collimation focusing mirror, spectro-grating, viewing glass head, area array sensor and computer;Collimation focusing camera lens is in the arcwall face of fovea superior, and viewing glass head is located at the underface of arcwall face;Entrance slit and spectro-grating opposition inclination are set to the two sides of viewing glass head;Light is reached entrance slit by incident optical by light source;The optical signal that light source issues is imaged onto optical signal on collimation focusing mirror by fiber coupling to entrance slit, entrance slit, and collimation focusing mirror is transformed into optical signal the directional light of collimation, then is equably imaged onto spectro-grating surface;By spectro-grating signal chromatic dispersion at the spectral signal by horizontal direction arrangement, and it is reflected back on collimation focusing mirror;On area array sensor, picture signal is changed into electric signal and passed in computer the first spectral signal refraction of viewing glass by area array sensor, obtains the spectral characteristic of light source.
Description
Technical field
The present invention relates to spectrometer arts, more particularly, to a kind of high-performance optical spectrometer.
Background technique
For spectrometer as most important test equipment in spectrum analysis subject, it can be ultraviolet with test analysis, it is seen then that close red
The spectral distribution property of wave section is widely used in light source detection, analysis of components, color measuring, monitoring of environment, food safety
Equal fields;Full spectrum rapid spectrometer, have can sample simultaneously full spectral information and sample rate fast (MS grade), structure simply,
The advantages that compact, can be very good the sides such as the long-range monitoring unattended applied to production line real-time detection and all-weather
Face;With the continuous expansion of the application field of full spectrum rapid spectrometer in recent years, the occasion of application demand is different, to spectrum
The performance requirement of instrument also has different needs, and it is higher and higher to it requires that the stability of spectrometer requires, to external light source
Adaptability it is also higher and higher.
The spectrometer that current existing full spectrum is quickly tested, in structure to the response of spectrometer using line array sensor or
It is the material material that single pixel sensor is used as sensor devices, the response characteristic to spectrum of spectrometer with sensor, optical path knot
The spectral response characteristic of structure is related, and after the completion of spectrometer adjustment and installation, spectrometer determines that the response characteristic of spectrum, works as use
When the light source of different luminescent spectrums, the performance of spectrometer will change because of the characteristic of light source;The spectrum of light source is uneven,
The weak wave band of spectral energy, spectrometer response is just low, and evil is gone through in signal-to-noise ratio decline, and measuring accuracy declines, the strong wave band of spectral energy,
Spectrometer responds, and signal-to-noise ratio is high, estimates precision height;If the light source xenon flash lamps very rich using spectral signature peak, on
Problem is stated especially to highlight.
Summary of the invention
The present invention for overcome the deficiencies in the prior art, provides a kind of high-performance optical spectrometer, can improve light source luminescent intensity
Weak wave band has responding ability, improves the hot-tempered ratio of spectrometer, improves precision.
To achieve the goals above, the invention adopts the following technical scheme: a kind of high-performance optical spectrometer, including light source, enter
Slit, collimation focusing mirror, spectro-grating are penetrated, further includes viewing glass head, area array sensor and the computer for connecting area array sensor;
The collimation focusing camera lens is in the arcwall face of fovea superior, and the viewing glass head is located at the underface of arcwall face;The entrance slit and
Spectro-grating is obliquely installed the two sides for being erected on viewing glass head, entrance slit and spectro-grating, and with viewing glass capitiform at
Acute angle;Light is reached entrance slit by incident optical by the light source;The optical signal that light source issues is by fiber coupling to entering
Slit is penetrated, entrance slit is imaged onto optical signal on collimation focusing mirror, and optical signal is transformed into the parallel of collimation by collimation focusing mirror
Light, then equably it is imaged onto spectro-grating surface;By spectro-grating signal chromatic dispersion at the spectrum by horizontal direction arrangement
Signal, and be reflected back on collimation focusing mirror;Spectral signal is reflexed to viewing glass head, the first light of viewing glass again by collimation focusing camera lens
Spectrum signal reflects on area array sensor, and picture signal is changed into electric signal and passed in computer by area array sensor, passes through calculating
Machine handles picture signal analysis to obtain the spectral characteristic of light source.
Using reciprocity multiplexed light structure in this programme, after the collimated focus lamp of incident light is transformed into parallel rays, uniformly
It is imaged onto spectro-grating surface, the spectral signal that dispersion is horizontally distributed, then is reflected back collimation focusing mirror surface, is formed with
The spectral signal of effect;The characteristics of structure is incident and outgoing uses same group of large area focus lamp so that finally at dispersed light
The spatial distribution of spectrum is linear, can form the spectral resolution of equity, be very beneficial for the imaging of subsequent area array sensor.
Allow spectrometer according to the luminescent spectrum of light source, the response characteristic to each wave band of adjust automatically spectrometer makes every
The response characteristic of a wave band is done unanimously, and improving the weak wave band of light source luminescent intensity has responding ability, is improved the hot-tempered ratio of spectrometer, is mentioned
In high precision.
Further, the viewing glass head include the glued hyperbolic glasses set gradually along optical transmission direction, first thoroughly
Mirror, two-sided concave mirror and glued imaging lens, the gluing hyperbolic glasses are formed by two goggles gluings, and first lens are
The first convex lens that light is focused, the two-sided concave mirror are the first concavees lens that can be focused again to light, institute
Stating glued imaging lens includes the second concavees lens that can be dissipated light and the second convex lens that can be dissipated again light
Mirror, the second convex lens gluing are connected to the second concavees lens and go out light one side.After glued hyperbolic glasses are divided spectro-grating
Face battle array spectrum picture be imaged onto the first lens, the face of large area battle array spectrum picture is reduced 10 times or more of image, then through double
Face concave mirror, glued imaging lens effectively compensate for marginal error caused by the first two optical mirror, make the face battle array that big target surface is imaged
The image of sensor is lossless high-precision surface battle array spectrum picture;The face battle array spectrum picture of high quality can be obtained, horizontal direction is
Spectral wavelength distribution, vertical direction is spectral power distribution, by high speed acquisition circuit to the energy of pixel each on sensor
Acquisition, and upload data in computer, so that it may obtain the face battle array spectrogram of a vertical frame dimension quality.
Further, the cross section of the incident optical is in rectangle.Facilitate the sensitivity and resolution ratio of control spectrometer, protects
Demonstrate,proving spectrometer has good resolution ratio;It simultaneously also can the good high sensitivity of compatible spectroscopic instrument and high resolution ratio.
Further, the computer picture signal analysis is handled to obtain the spectral characteristic of light source method it is as follows:
M (λ)=∫ P (λ) d λ
N (λ)=∫ K (λ) d λ
Wherein, P (λ) and K (λ) is to be pre-stored in computer (8) according to the preset spectral distribution curve of light source characteristic,
Value is specific constant;K (λ) is the original spectrogram of light source;
Piex (i) d λ is the face battle array spectrum picture that the imaging on area array sensor is formed;
M, n are represented according to various light sources to the weighted value of Piex (i) d λ;
Q (λ) is to be calculated light source treated flat spectrum;
λ represents spectral wavelength, value range are as follows: 1-100;
D λ represents wavelength increment;
I represents the pixel of area array sensor, value range are as follows: 0-1024.
The present invention is directed to existing spectrometer disadvantage, redesigns spectrometer architecture, new working principle, feature complexity
Spectrum changes into flat spectrum, and flat spectrum Q (λ) can effectively improve the stability and essence of spectrometer in spectrometer test macro
Degree;Allow spectrometer can be according to the characteristic of the optical signal of acquisition, to the spectral signal of each wave band of different light sources, using corresponding
Weighting coefficient, the spectrum of effective matched light source, processing obtain flat spectral signal, and spectrometer can obtain stable
Signal-to-noise ratio and stable measuring accuracy.
Further, the computer connects the area array sensor by sample circuit.
Further, the entrance slit and spectro-grating and viewing glass capitiform degree at an acute angle are 60 °.
In conclusion the present invention compared with prior art originally can be according to the characteristic of the optical signal of acquisition, to different-waveband
Spectral signal, can automatically adjust gain amplifier, the spectrum of effective matched light source collects the spectrum of different-waveband
For flat signal, spectrometer can obtain stable signal-to-noise ratio and stable measuring accuracy.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is viewing glass head and area array sensor structural schematic diagram of the invention;
Fig. 3 is the variation diagram that original spectrogram of the invention is processed into flat spectrum;
Wherein, light source 1;Entrance slit 2;Collimation focusing mirror 3;Spectro-grating 4;Viewing glass head 5;Hyperbolic glasses 51;The
One lens 52;Two-sided concave mirror 53;Glued imaging lens 54, the second concavees lens 541, the second convex lens 542;Area array sensor 6;Sampling
Circuit 7;Computer 8;Incident optical 9.
Specific embodiment
In order to make those skilled in the art better understand the present invention program, below in conjunction in the embodiment of the present invention
Attached drawing, the technical scheme in the embodiment of the invention is clearly and completely described.
As shown in Figure 1-3, a kind of high-performance optical spectrometer, including light source 1, entrance slit 2, collimation focusing mirror 3, spectro-grating
4, viewing glass head 5, area array sensor 6, computer 8 and incident optical 9, wherein area array sensor 6 connects computer 8.
Specifically, the collimation focusing camera lens 3 is in the arcwall face of fovea superior, arcwall face is preferably spherical surface arc, i.e. arcwall face
Recess upwards.The viewing glass head 5 is located at the underface of arcwall face.The entrance slit 2 and spectro-grating 4 take light to being erected on
The two sides of camera lens 5, entrance slit 2 and spectro-grating 4 are obliquely installed, entrance slit 2 and spectro-grating 4 with viewing glass head 5
Form acute angle.Wherein, acute angle degree is formed between the entrance slit 2 and spectro-grating 4, viewing glass head 5 is preferably 60 °.
Working principle: light is reached entrance slit 2 by incident optical 9 by the light source 1;The optical signal that light source 1 issues
By fiber coupling to entrance slit 2, entrance slit 2 is imaged onto optical signal on collimation focusing mirror 3, and collimation focusing mirror 3 is light
Signal is transformed into the directional light of collimation, then is equably imaged onto 4 surface of spectro-grating;By spectro-grating 4 signal chromatic dispersion
At the spectral signal by horizontal direction arrangement, and it is reflected back on collimation focusing mirror 3.Collimation focusing camera lens 3 is anti-by spectral signal again
It is incident upon viewing glass head 5, viewing glass head 5 reflects spectral signal on area array sensor 6.Area array sensor 6 turns picture signal
It is passed in computer 8 at electric signal, picture signal analysis is handled by computer 8 to obtain the spectral characteristic of light source 1.
Optical signal is coupled into spectrometer, incident optical using incident optical 9 and entrance slit 2 by spectrometer in this programme
9 use the optical fiber of big light hole warp, and rectangular configuration is used in structure, i.e., the cross section of the described incident optical 9 is in rectangle.Rectangle
Height determines the sensitivity of spectrometer, and the more highly sensitive height the stronger, and the width of rectangle determines the optical resolution of spectrometer,
Narrower good resolution;This programme, which is used, uses 1x20mm hard iron shape light guide opening, guarantees that optical signal has the sampling of efficiency, uses
0.07x20mm entrance slit 2.
Preferably, the viewing glass head 5 includes the glued hyperbolic glasses 51, first set gradually along optical transmission direction
Lens 52, two-sided concave mirror 53 and glued imaging lens 54, the gluing hyperbolic glasses 51 are formed by two goggles gluings, described
First lens 52 are the first convex lens for being focused light, and the first plush copper mirror entering light is while with light out to evagination
Out.The two-sided concave mirror 53 is the first concavees lens that can be focused again to light, the first concavees lens entering light one side and
Light one side is all recessed inwardly out.The gluing imaging lens 54 include the second concavees lens 541 that can be dissipated light and can be right
The second convex lens 542 that light is dissipated again, 542 gluing of the second convex lens are connected to the second concavees lens 541 and go out light
On one side.Second convex lens, 541 entering light and when light out be all recessed inwardly, second convex lens 541 towards second
The surface bulge of concavees lens 541, and the second plush copper mirror 541 goes out the one side of light into planar structure.
The imaging arrangement of face battle array spectrum picture in this programme is passed using the viewing glass head 5 of high quality and the face battle array of big target surface
Sensor 6 (2048x1024) structure, can obtain the face battle array spectrum picture of high quality, and horizontal direction is spectral wavelength distribution, Vertical Square
To for spectral power distribution, the computer 8 connects the area array sensor 6 by sample circuit 7, i.e., electric by high-speed sampling
Road 7 uploads data in computer 8 energy acquisition of pixel each on sensor, so that it may obtain a vertical frame dimension quality
Face battle array spectrogram;The image of area array sensor 6 is changed into figure by high speed sampling circuit 7 by the face battle array spectrum picture in the present invention
Piece information uploads in computer 8, according to the feature of test macro light source, through core algorithm, analysis processing, feature complexity
Spectrum changes into flat spectrum.As shown in figure 3, left side is that the primary light spectrogram K (λ) of light source passes through entrance slit, incidence in Fig. 3
Imaging of the viewing glass head 5 on area array sensor 6 of slit 2, collimation focusing mirror 3, spectro-grating 4, high quality, forming face battle array light
Figure of the spectrogram as Piex (i) d λ, i.e. among Fig. 3.Horizontal direction is spectral wavelength distribution arrangement on area array sensor, vertical
Direction is spectral power distribution direction.The characteristics of luminescence weighting function P (λ) K (λ) of light source has been prestored in computer software, then
Light source is calculated treated flat spectrum Q according to formula in weighted value m, the n that each wavelength is calculated according to wavelength variable
(λ), the figure on the right is flat spectrum Q (λ) in Fig. 3.Flat spectrum Q (λ) can effectively improve light in spectrometer test macro
The stability and precision of spectrometer.The computer 8 handles picture signal analysis to obtain the method for the spectral characteristic of light source 1 such as
Under:
M (λ)=∫ P (λ) d λ
N (λ)=∫ K (λ) d λ
Wherein, P (λ) and K (λ) is to be pre-stored in computer 8, take according to the preset spectral distribution curve of light source characteristic
Value is specific constant.K (λ) is the original spectrogram of light source.Piex (i) d λ is the face battle array that the imaging on area array sensor is formed
Spectrum picture.M, n are represented according to various light sources to the weighted value of Piex (i) d λ.Q (λ) be calculated light source treated it is flat
Smooth spectrum.λ represents spectral wavelength, value range 1-100;D λ represents wavelength increment, for example, d λ can value be 1.I represents face battle array
The pixel of sensor, value range 0-1024.
The present invention overcomes spectrometer to make the middle important procatarxis of performance of the light source luminescent spectrum flatness to spectrometer, makes spectrum
Instrument has adjust automatically spectral response characteristic, has very big promotion to spectrometer measuring accuracy.And have following key technologies:
1, the optics daylighting lens construction of high quality is one of the key technology in the present invention, it ensure that area array sensor
The face battle array spectrum picture that distortionless can obtain spectro-grating dispersion.
2, the method that the face battle array spectrogram that area array sensor is got is changed into flat spectral distribution curve, is the present invention
One of key technology, its method can allow spectrometer to have stable signal-to-noise ratio, effectively improve the performance of spectrometer.
3, reciprocity multiplexed light structure is the important optical texture for obtaining high-precision surface battle array spectrogram, is pass of the invention
One of key technology.
Obviously, described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment should fall within the scope of the present invention.
Claims (6)
1. a kind of high-performance optical spectrometer, including light source (1), entrance slit (2), collimation focusing mirror (3), spectro-grating (4), special
Sign is: further including the computer (8) of viewing glass head (5), area array sensor (6) and connection area array sensor (6);The collimation
Amasthenic lens (3) is in the arcwall face of fovea superior, and the viewing glass head (5) is located at the underface of arcwall face;The entrance slit (2) and
Spectro-grating (4) is obliquely installed the two sides for being erected on viewing glass head (5), entrance slit (2) and spectro-grating (4), and with
Viewing glass head (5) forms acute angle;Light is reached entrance slit (2) by incident optical (9) by the light source (1);Light source (1) hair
Optical signal out is imaged onto optical signal on collimation focusing mirror (3) by fiber coupling to entrance slit (2), entrance slit (2),
Collimation focusing mirror (3) is transformed into optical signal the directional light of collimation, then is equably imaged onto spectro-grating (4) surface;By dividing
The spectral signal that light grating (4) arranges signal chromatic dispersion at horizontal direction is pressed, and be reflected back on collimation focusing mirror (3);Collimation
Amasthenic lens (3) again reflexes to spectral signal viewing glass head (5), and viewing glass head (5) reflects spectral signal in area array sensing
On device (6), picture signal is changed into electric signal and passed in computer (8) by area array sensor (6), by computer (8) to image
Signal analysis and processing obtains the spectral characteristic of light source (1).
2. high-performance optical spectrometer according to claim 1, it is characterised in that: the viewing glass head (5) includes along optical transport
Glued hyperbolic glasses (51), the first lens (52), two-sided concave mirror (53) and the glued imaging lens (54) that direction is set gradually, institute
It states glued hyperbolic glasses (51) to be formed by two goggles gluings, first lens (52) are be focused light the
One convex lens, the two-sided concave mirror (53) are the first concavees lens that can be focused again to light, the gluing imaging lens
It (54) include the second concavees lens (541) that light can be dissipated and the second convex lens that light can be dissipated again
(542), the second convex lens (542) gluing be connected to the second concavees lens (541) go out light one side.
3. high-performance optical spectrometer according to claim 1, it is characterised in that: the cross section of the incident optical (9) is in square
Shape.
4. high-performance optical spectrometer according to claim 1, it is characterised in that: the computer (8) analyzes picture signal
The method for handling the spectral characteristic for obtaining light source (1) is as follows:
M (λ)=∫ P (λ) d λ
N (λ)=∫ K (λ) d λ
Wherein, P (λ) and K (λ) is to be pre-stored in computer (8), value according to the preset spectral distribution curve of light source characteristic
It is specific constant;K (λ) is the original spectrogram of light source;
Piex (i) d λ is the face battle array spectrum picture that the imaging on area array sensor is formed;
M, n are represented according to various light sources to the weighted value of Piex (i) d λ;
Q (λ) is to be calculated light source treated flat spectrum;
λ represents spectral wavelength, value range are as follows: 1-100;
D λ represents wavelength increment;
I represents the pixel of area array sensor, value range are as follows: 0-1024.
5. high-performance optical spectrometer according to claim 1, it is characterised in that: the computer (8) passes through sample circuit (7)
Connect the area array sensor (6).
6. high-performance optical spectrometer according to claim 1, it is characterised in that: the entrance slit (2) and spectro-grating (4)
Forming acute angle degree with viewing glass head (5) is 60 °.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114427909A (en) * | 2021-12-28 | 2022-05-03 | 杭州晶飞科技有限公司 | Light path structure, image spectrometer and spectral characteristic processing method |
CN115031841A (en) * | 2022-08-10 | 2022-09-09 | 武汉精立电子技术有限公司 | Optical measurement equipment, installation method and application method |
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CN206469982U (en) * | 2017-01-24 | 2017-09-05 | 苏州大学 | A kind of convex grating Offner Wynne type light-dividing devices |
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