CN109579812B - Method for manufacturing high-regularity atomic gas chamber - Google Patents
Method for manufacturing high-regularity atomic gas chamber Download PDFInfo
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- CN109579812B CN109579812B CN201811305896.9A CN201811305896A CN109579812B CN 109579812 B CN109579812 B CN 109579812B CN 201811305896 A CN201811305896 A CN 201811305896A CN 109579812 B CN109579812 B CN 109579812B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
- G01C19/60—Electronic or nuclear magnetic resonance gyrometers
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Abstract
The invention belongs to an optical precision machining technology, and relates to a manufacturing method of a high-regularity atomic gas chamber. The invention relates to a method for manufacturing a high-regularity atomic gas chamber, which comprises the steps of sequentially bonding a gas chamber bracket processed in advance and an optical window by utilizing a low-temperature bonding technology at room temperature, and processing an atomic gas chamber heating surface and a flushing exhaust nozzle to form the high-regularity gas chamber. Compared with the existing atomic gas chamber manufacturing method, the regularity of the gas chamber is greatly improved, various errors caused by irregular shape of the gas chamber are reduced, and laser wavefront distortion is reduced.
Description
Technical Field
The invention belongs to an optical precision machining technology, and relates to a manufacturing method of a high-regularity atomic gas chamber.
Background
The atomic gas chamber is used as an angular rate sensitive unit and is a core component of the nuclear magnetic resonance gyroscope. The gyroscope completes preparation and control of working atoms and detection of signals in the atomic gas chamber, and the performance of the gyroscope is determined by the performance of the atomic gas chamber from the source.
The conventional atomic gas chamber is manufactured by adopting glass blowing, laser welding or welding processes, the technologies all involve integral or local high temperature, the gas chamber is formed or sealed by glass high-temperature deformation, the inner and outer outlines of the gas chamber are irregular (the structural dimension error exceeds 0.3 mm), the local area high-temperature deformation (especially 4 angles of the inner cavity of the gas chamber) and the surface quality of a window of the gas chamber are poor (the surface shape is generally larger than lambda/2), so that the errors of low installation precision of the gas chamber, wave front distortion of light beams and the like are caused, especially, the inherent magnetic field generated by polarized atoms in the gas chamber can not be completely counteracted due to the irregular gas chamber, the magnetic resonance line is widened, meanwhile, the polarization of alkali metals and even the final polarization magnitude of inert gases can be limited, and the improvement must be realized by a new method.
Disclosure of Invention
The purpose of the invention is as follows: the method for manufacturing the atomic gas chamber with high regularity greatly improves the regularity of the gas chamber, reduces various errors caused by irregular shape of the gas chamber and reduces laser wavefront distortion.
The technical scheme of the invention is as follows: a method for manufacturing high-regularity atom air chamber includes such steps as sequentially linking the prefabricated air chamber supporter with optical window by low-temp bonding technique at ordinary temp, and processing the heating surface and flushing and exhausting nozzle of atom air chamber.
The method for manufacturing the high-regularity atomic gas chamber comprises the following specific steps of:
step 1: workpiece preparation
Checking that all working surfaces of the first optical window 1, the second optical window 2, the first bracket 3 and the second bracket 4 meet the low-temperature bonding requirement;
step 2: bonding the first support 3 and the second support 4
Bonding the bottom surfaces of the first support 3 and the second support 4 on the first optical window 1 at low temperature;
and 3, step 3: polishing the first bonding surface 5
Polishing the first bonding surfaces 5 of the first support 3 and the second support 4 until the bonding requirements are met;
and 4, step 4: bonding a first optical Window 1
Bonding the first optical window 1 on the first bonding surface 5 at low temperature;
and 5: grinding and polishing the second bonding surface 6
Grinding and polishing the first support 3, the second support 4 and a second bonding surface 6 on the side surface of the first optical window 1 until the bonding requirements are met;
and 6: bonding a second optical window 2
Bonding the second optical window 3 on the second bonding surface 6 at a low temperature;
and 7: grinding and polishing the third bonded surface 7
A third bonding surface 7 of the other side surfaces of the first support 3, the second support 4 and the first optical window 1 is ground and polished to meet the bonding requirement;
and 8: bonding a second optical window 2
Bonding the second optical window 2 on the third bonding face 7 at a low temperature;
and step 9: curing of
Curing the bonded workpiece;
step 10: external surface treatment
Grinding and polishing the outside of the workpiece to improve the dimensional accuracy, and coating the window to improve the transmittance;
step 11: thinning
Thinning one side of the workpiece, which comprises a first optical window 1, a second optical window 2 and a first support 3, to form a gas chamber heating surface 8;
step 12: milling type
And milling one side of the workpiece, including the first optical window 1, the second optical window 2 and the second support 4, to form an air chamber air charging and discharging surface 9.
The high-regularity atom air chamber is of a high-regularity cuboid structure and comprises a high-regularity cuboid cavity.
The first optical window 1 is rectangular, and the width of the first optical window is consistent with that of the rectangular cavity, and the number of the first optical window is 2.
The second optical window 2 is rectangular, and the width of the second optical window is consistent with the width of the outer contour of the air chamber.
The first support 3 is of a cuboid structure, the width of the first support is equal to that of the first optical window 1, and the height of the first support is consistent with that of a cuboid cavity.
The second support 4 is a cuboid structure, the outer contour of the second support is identical to that of the first support 3, and a through hole 10 is formed in the center of the second support.
The distance between the first support 3 and the second support 4 is the three-dimensional length of the cuboid cavity.
The first bonding surface 5 is formed by the top surfaces of the first support 3 and the second support 4.
The second bonding surface 6 and the third bonding surface 7 are respectively composed of the first support 3, the second support 4 and two side surfaces of the first optical window 1.
The invention has the advantages and beneficial effects that: the method for manufacturing the atomic gas chamber with high regularity greatly improves the regularity of the gas chamber, reduces the magnetic field error caused by irregular shape of the gas chamber and reduces the wave front distortion of laser. Experiments prove that the size error of the air chamber is better than 0.01mm, the window surface shape of the air chamber is better than lambda/20, and the surface size regularity of the air chamber is improved by at least one order of magnitude compared with the traditional method.
Drawings
FIG. 1 is a schematic diagram (exploded view) of the process for making a high-regularity atomic cell according to the present invention.
FIG. 2 is a schematic diagram of step 2 of the high regularity atomic cell manufacturing method of the present invention.
FIG. 3 is a schematic diagram of step 4 of the method for manufacturing a high regularity atomic cell according to the present invention.
FIG. 4 is a schematic diagram of step 6 of the method for producing a high regularity atomic cell according to the present invention.
FIG. 5 is a schematic diagram of step 8 of the method for producing a high regularity atomic cell according to the present invention.
FIG. 6 is a schematic diagram of step 11 of the method for manufacturing a high regularity atomic cell according to the present invention.
FIG. 7 is a schematic diagram of step 12 of the method for producing a high regularity atomic cell according to the present invention.
Detailed Description
The present invention is described in further detail below.
Referring to FIG. 1, FIG. 1 is a schematic diagram (exploded view) illustrating a method for manufacturing a high-regularity atomic gas cell according to the present invention. According to the invention, 6 pieces of precision optical elements are bonded by utilizing the characteristics of high precision, high strength, low stress, high sealing and the like of a low-temperature bonding technology, and then a high-regularity air chamber is formed by further processing. The air chamber is of a high-regularity cuboid structure, and a high-regularity cuboid cavity is contained in the air chamber and used for containing working gas.
The 6 pieces of precision optical elements include: the first optical window 1, the second optical window 2 are two pieces each, one first bracket 3 and one second bracket 4. The first optical window 1 is a cuboid, and the width of the first optical window is consistent with the three-dimensional width of the cuboid cavity of the atomic gas chamber. The second optical window 2 is a cuboid, the width of the second optical window is consistent with the width of the outer contour of the air chamber, and the sum of the thickness of the two first optical windows 1 and the height of the first support 3 is approximately equal. The first support 3 is a cuboid, the width of the first support is equal to that of the first optical window 1, and the height of the first support is consistent with the three-dimensional height of a cuboid cavity. The second support 3 is a cuboid, the outline of the second support is identical to that of the first support 3, and a through hole 10 is formed in the center of the second support and used for air charging and discharging of an air chamber.
The specific process steps are as follows:
step 1: workpiece preparation
Checking that the working surface shapes of the first optical window 1, the second optical window 2, the first bracket 3 and the second bracket 4 meet the low-temperature bonding requirement, namely the surface shape is at least better than lambda/4 and usually required to reach lambda/10; the inspection surface reached at least a class 2 defect and was not through scratched to prevent affecting the seal of the air chamber. All elements must be cleaned ultra-precisely to remove surface particles and pollutants, and surface treatment is carried out to improve the bonding success rate.
And 2, step: bonding the first bracket 3 and the second bracket 4
Please refer to fig. 2, wherein fig. 2 is a schematic diagram of step 2 of the method for manufacturing a high regularity atomic gas cell according to the present invention. The bottom surfaces of the first support 3 and the second support 4 are bonded on the first optical window 1 at low temperature, a limiting tool can be used for ensuring the installation precision, the first support 3 and the second support 4 are ensured to be aligned with the two sides of the first optical window 1 so as to reduce the workload of a subsequent polishing link, and the size precision is convenient to control. The space between the first support 3 and the second support 4 is the three-dimensional length of the cuboid cavity of the air chamber.
And step 3: polishing the first bonding surface 5
Observation under a laser interferometer shows that even if the contour sizes of the first support 3 and the second support 4 are completely the same, a slight height difference still exists on the first bonding surface 5 formed by the top surfaces of the first support 3 and the second support 4 after the step 2, so that the first bonding surface needs to be polished until the bonding requirement is met, and the regularity is improved.
And 4, step 4: bonding a first optical Window 1
Referring to FIG. 3, FIG. 3 is a schematic diagram of step 4 of the method for manufacturing a high-regularity atomic gas cell according to the present invention. The first optical window 1 is bonded on the first bonding surface 5 at a low temperature, and a limiting tool is used to ensure the installation precision and ensure that the two first optical windows 1 are completely aligned.
And 5: grinding and polishing the second bonding surface 6
The second bonding surface 6 is composed of the first support 3, the second support 4 and the same side surface of the first optical window 1. Polishing the surface to meet the bonding requirement to improve regularity.
And 6: bonding the second optical Window 2
Please refer to FIG. 4, in which FIG. 4 is a schematic diagram of step 6 of the method for manufacturing atomic gas cell with high regularity according to the present invention. And bonding the second optical window 3 on the second bonding surface 6 at a low temperature, and using a limiting tool to ensure the mounting precision.
And 7: grinding and polishing the third bonded surface 7
The third bonding surface 7 is composed of the first support 3, the second support 4 and the other side surface of the first optical window 1. The third bonding surface 7 is polished to meet the bonding requirement to improve the regularity.
And step 8: bonding a second optical window 2
Please refer to FIG. 5, in which FIG. 5 is a schematic diagram of step 8 of the method for manufacturing a high regularity atomic cell according to the present invention. And bonding the second optical windows 2 on the third bonding surface 7 at a low temperature, and using a limiting tool to ensure the installation precision and ensure that the two second optical windows 2 are completely aligned.
And step 9: curing
And curing the bonded workpiece, wherein the curing process can adopt a method of standing at normal temperature, and can also adopt a drying accelerating method such as drying, low-pressure treatment, heat treatment and the like.
Step 10: external surface treatment
Grinding and polishing the outer surface of the workpiece to improve the dimensional accuracy of the outer contour; the window portion is coated to increase the transmittance of the light beam.
Step 11: thinning
Please refer to FIG. 6, in which FIG. 6 is a schematic diagram of step 11 of the method for manufacturing atomic cell with high regularity according to the present invention. And thinning one side of the workpiece, which comprises the first optical window 1, the second optical window 2 and the first bracket 3, by using optical forming equipment, and cutting off redundant parts to form an air chamber heating surface 8, so that heat conduction is facilitated.
Step 12: milling model
Please refer to FIG. 7, in which FIG. 7 is a schematic diagram of step 12 of the method for manufacturing atomic cell with high regularity according to the present invention. And milling one side of the workpiece, including the first optical window 1, the second optical window 2 and the second bracket 4, by using an optical forming device to form an air charging and discharging surface 9 of the air chamber. The air charging and discharging surface 9 of the air chamber is provided with an air charging and discharging pipe for charging and discharging air in the air chamber.
Example of the implementation
The sample material was quartz glass with a first optical window size of 67X 11X 2mm 3 The size of the second optical window is 67 multiplied by 15 multiplied by 2mm 3 The first support has a size of 28 × 11 × 11mm 3 The size of the second bracket is 28 multiplied by 11mm 3 All the working surfaces were polished to lambda/10. The center of the second bracket 4 is provided with a hole with the diameter of 2mm. The samples were washed using various solutions. First, the sample was ultrasonically cleaned in isopropanol for 10min, and immersed in a cleaning solution (H) 2 SO 4 (96％):K 2 Cr 2 O 7 5) for 30min, and then for 5min in KOH solution. The sample was rinsed under deionized water for 5min and finally blown dry with nitrogen. Clean samples were placed in a clean dust-free container until bonding was performed.
And assembling according to the steps 2-8 in sequence. Wherein the bonding solution for low-temperature bonding is 0.5% KOH aqueous solution, applying the bonding solution to the bonding interface, and then bringing the two surfaces to be bonded into contact and lightly pressing. The bonded workpiece is cured at room temperature for at least 7 days or is subjected to heat treatment at a temperature in the range of 60-120 ℃.
The outer surface of the workpiece is ground and polished to ensure that the outer dimension is 67 multiplied by 15mm 3 . Plating an anti-reflection film on the window to improve the light beam transmittance.
And thinning one side of the workpiece, which comprises the first optical window, the second optical window and the first support, to 2mm by using an inner circle cutting machine.
And (3) milling one side of the workpiece, which comprises the first optical window 1, the second optical window 2 and the second support 4, by using a five-axis machining center, wherein the outer diameter of a central exhaust pipe is 4mm, the inner diameter of the central exhaust pipe is 2mm, and the thickness of the surface of the exhaust pipe is 2mm, and is the same as that of other surfaces.
Finally, a cube air chamber is formed, the side length of the outer contour is 15mm, and the side length of the inner cavity is 11mm.
Effects of the implementation
The method for manufacturing the high-regularity atomic gas chamber utilizes the characteristics of high precision, high strength and low stress of a low-temperature bonding technology, and processes and forms the high-regularity gas chamber by strictly designing and controlling the low-temperature bonding sequence and process of 6 precise optical elements, has the advantages of high processing precision, good symmetry and good surface quality, and the formed atomic gas chamber has the size error superior to 0.01mm, no distortion in structure and the surface shape of a window of the gas chamber superior to lambda/20. Compared with the existing atomic gas cell manufacturing methods, such as a laser welding method and a glass blowing method, the surface size regularity of the gas cell is improved by at least 1 order of magnitude compared with the traditional process.
Claims (9)
1. A method for manufacturing an atomic gas chamber with high regularity is characterized in that a gas chamber support which is processed in advance and an optical window are sequentially bonded by using a low-temperature bonding technology at room temperature, and a heating surface and an air flushing and exhausting nozzle of the atomic gas chamber are processed, and the method comprises the following specific steps:
step 1: workpiece preparation
Checking that all working surfaces of the first optical window (1), the second optical window (2), the first bracket (3) and the second bracket (4) meet the low-temperature bonding requirement;
step 2: a first bracket (3) and a second bracket (4) are bonded
Bonding the bottom surfaces of the first support (3) and the second support (4) on the first optical window (1) at low temperature;
and 3, step 3: grinding and polishing the first bonding surface (5)
Grinding and polishing the first bonding surfaces (5) of the first bracket (3) and the second bracket (4) until the bonding requirements are met;
and 4, step 4: bonding the first optical window (1)
Bonding the first optical window (1) on the first bonding surface (5) at low temperature;
and 5: grinding and polishing the second bonding surface (6)
Grinding and polishing the first support (3), the second support (4) and a second bonding surface (6) on the side surface of the first optical window (1) until the bonding requirements are met;
step 6: bonding a second optical window (2)
Bonding the second optical window (2) on the second bonding surface (6) at low temperature;
and 7: grinding and polishing the third bonded surface (7)
A third bonding surface (7) on the other side surface of the first support (3), the second support (4) and the first optical window (1) meets the bonding requirement;
and 8: bonding a second optical window (2)
Bonding the second optical window (2) on the third bonding surface (7) at a low temperature;
and step 9: curing
Curing the bonded workpiece;
step 10: external surface treatment
Grinding and polishing the outside of the workpiece to improve the dimensional accuracy, and coating the window to improve the transmittance;
step 11: thinning
Thinning one side of the workpiece, which comprises a first optical window (1), a second optical window (2) and a first support (3), to form a gas chamber heating surface (8);
step 12: milling type
And milling one side of the workpiece, which comprises the first optical window (1), the second optical window (2) and the second support (4), to form an air charging and discharging surface (9) of the air chamber.
2. The method as claimed in claim 1, wherein the atomic gas cell has a rectangular parallelepiped structure with a cavity.
3. The method as claimed in claim 2, wherein the first optical window (1) is rectangular and has 2 pieces, and the width of the first optical window is equal to the width of the cavity of the rectangular parallelepiped.
4. The method as claimed in claim 2, wherein the second optical window (2) is rectangular and has 2 pieces, and the width of the second optical window is consistent with the width of the outer contour of the gas cell.
5. The method as claimed in claim 2, wherein the first support (3) is a rectangular parallelepiped structure having a width equal to the width of the first optical window (1) and a height corresponding to the height of the cavity of the rectangular parallelepiped structure.
6. The method for manufacturing the atomic gas cell with high regularity according to the claim 2, characterized in that the second bracket (4) is a cuboid structure, the outline is the same as the first bracket (3), and the center is provided with a through hole (10).
7. The method for manufacturing the atomic cell with high regularity as defined in claim 2, wherein the distance between the first support (3) and the second support (4) is the three-dimensional length of the cavity of the cuboid.
8. The method as claimed in claim 2, wherein the first bonding surface (5) is formed by the top surfaces of the first support (3) and the second support (4).
9. The method for manufacturing a high regularity atomic gas cell as defined in claim 2, wherein said second bonding surface (6) and said third bonding surface (7) are respectively composed of the first support (3), the second support (4) and the two side surfaces of the first optical window (1).
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| CN110530353A (en) * | 2019-08-13 | 2019-12-03 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of alkali metal atom air chamber and its manufacturing method |
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| WO2017009582A1 (en) * | 2015-07-16 | 2017-01-19 | Centre National De La Recherche Scientifique - Cnrs - | Gas cell for an atomic sensor and method for filling a gas cell |
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| JP5892320B2 (en) * | 2012-01-11 | 2016-03-23 | セイコーエプソン株式会社 | Optical module and atomic oscillator for an atomic oscillator |
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| WO2017009582A1 (en) * | 2015-07-16 | 2017-01-19 | Centre National De La Recherche Scientifique - Cnrs - | Gas cell for an atomic sensor and method for filling a gas cell |
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