CN109564344A - Interferometer and method for running interferometer - Google Patents
Interferometer and method for running interferometer Download PDFInfo
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- CN109564344A CN109564344A CN201780049013.XA CN201780049013A CN109564344A CN 109564344 A CN109564344 A CN 109564344A CN 201780049013 A CN201780049013 A CN 201780049013A CN 109564344 A CN109564344 A CN 109564344A
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- 238000004590 computer program Methods 0.000 claims description 6
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- 230000007246 mechanism Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 15
- 230000000284 resting effect Effects 0.000 description 11
- 238000005259 measurement Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
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- 230000005611 electricity Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
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- 230000033228 biological regulation Effects 0.000 description 1
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- 230000001419 dependent effect Effects 0.000 description 1
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- 239000012528 membrane Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
Abstract
The present invention relates to a kind of interferometer (200), it is with first mirror element (202) and the second mirror element (206) being spaced apart by adjustable resonance cavity gap (204) with the first mirror element (202), wherein, interferometer (200) has first driving device (100) and the second driving device (102), wherein, first driving device (100) is configured to adjust the clearance height (104) of resonance cavity gap (204), wherein, first driving device (100) has the first adjustable range (208), wherein, second driving device (102) is identically constructed for adjusting clearance height (104), wherein, second driving device (102) has the second adjustable range (210) of supplement the first adjustable range (208).
Description
Technical field
The present invention relates to the equipment or method of a kind of type according to independent claims.Subject of the present invention further relates to one
Kind computer program.
Background technique
Micro electronmechanical driver has lesser adjustable range.The adjustable range can be less than the resonance cavity gap of interferometer
It is expected that adjustable range.
A kind of FPI spectrometer is described in US2013279005A1, wherein resonance cavity gap can each other solely using two
The electrostatically actuated mechanism of vertical manipulation is adjusted.Here, the two actuating mechanisms are in identical direction and in identical spring
On work, that is, due to hitting risk, adjustable extent is still restricted.
Summary of the invention
In this context, a kind of interferometer, a kind of method for running interferometer are proposed by method presented here
And the last corresponding computer program according to main claim.It is realized by the measure listed in dependent claims
The advantageous extension scheme and evolutionary approach of the device provided in independent claims.
Big adjustable range may be implemented by the way that at least two drivers are applied in combination.In the method introduced herein, lead to
The phase Calais for crossing the adjusting path of at least two drivers adjusts clearance height.It is possible thereby to accurately adjust in a wide range
Clearance height.
The present invention introduces a kind of interferometer, with first mirror element and by adjustable resonance cavity gap and this first
Mirror element the second mirror element spaced apart, wherein the interferometer has the feature that
First driving device is configured to adjust the clearance height of resonance cavity gap, wherein first driving device has first to adjust
Adjusting range；And
Second driving device is configured to adjust clearance height, wherein the second driving device, which has, supplements and/or extend the first tune
Second adjustable range of adjusting range.
Interferometer can be understood as Fabry-Perot interferometer, be configured to, the structure between two opposed mirror elements
It makes in the gap for resonant cavity, the wave-length coverage of the clearance height depending on gap of electromagnetic wave is filtered out from wave spectrum and makes
It passes through.Herein can after interferometer Detection wavelength range radiation intensity.By changing clearance height, can filter not
With wave-length coverage, and therefore can be by multiple radiation intensity recording wavelength spectrum for detecting.Clearance height is understood that
For the distance between two mirror elements.Driving device can be configured to, with responding electric control signal in mobile mirror element
At least one mirror element, and/or at least one mirror element is maintained at by the previously given position of control signal.
First adjustable range can have at least one discrete final position.Discrete final position can for example pass through
The resting position of at least one mirror element in mirror element determines.Driving device can for example be closed in the resting position.It is quiet
Stop bit is set can be limited by least one spring system.
Final position can be determined by stop device.Stop device can be coupled with first driving device.By right
The mechanical stop on element is set, point-device positioning may be implemented.Stop device can for example including column and/or wall, column and/
Or wall extends substantially transversely to the main extension plane orientation of mirror element.
The first spring arrangement can be disposed between stop device and the pedestal of interferometer.Spring arrangement is properly termed as spring
System.By spring arrangement, stop device can overcome restoring force to deflect by driving device, until stop device backstop.
When driving device is closed, stop device is responded power and retracts resting position.
Second spring device can be disposed between stop device and first mirror element.Pass through second spring device, mirror member
Part can overcome the restoring force from the final position of stop device and deflect, and be moved again after deflection by restoring force
It moves to final position.
First driving device can be coupled with first mirror element.First mirror element can pass through the first spring arrangement and interference
The pedestal of instrument couples.Mirror element can directly be connect with pedestal by spring arrangement.First driving device can drive the first mirror
Element.
Second driving device can be coupled with the second mirror element.Second driving device can drive the second mirror element.
Second mirror element again may be by spring arrangement and couple with pedestal.
Second driving device can also be coupled with first mirror element.Second driving device can act on two mirror elements
And towards to each other or being moved away from each other.
Further it is proposed that a kind of method for running interferometer, wherein in regulating step, driven by using first
Dynamic device and/or the second driving device adjust between the first mirror element of interferometer and the second mirror element of interferometer, dry
The gap width of the resonance cavity gap of interferometer.
It is also advantageous in that a kind of computer program product or computer program with program code, which can be with
It is stored on machine readable carrier or storage medium, such as semiconductor memory, harddisk memory or optical memory, is used in combination
In the step of execution, conversion and/or manipulation are according to any one of above embodiment the method, especially when program product or
Program on computer or equipment when executing.
Detailed description of the invention
The embodiment of method presented here is shown in the accompanying drawings, and will be explained in greater detail below.In attached drawing
In:
Fig. 1 shows the diagram of the control program of the interferometer according to one embodiment；
Fig. 2 shows the block diagrams according to the interferometer of one embodiment；
Fig. 3 shows the schematic diagram of the interferometer according to one embodiment；
Fig. 4 shows the schematic diagram of the interferometer according to one embodiment；
Fig. 5 shows the schematic diagram of the interferometer according to one embodiment；
Fig. 6 shows the schematic diagram of the interferometer according to one embodiment；
Fig. 7 shows the schematic diagram of the driving device according to one embodiment；
Fig. 8 shows the schematic diagram of the interferometer according to one embodiment；
Fig. 9 shows the schematic diagram of the interferometer according to one embodiment；
Figure 10 shows the schematic diagram of the interferometer according to one embodiment；
Figure 11 shows the flow chart of the method for running the interferometer according to one embodiment.
Specific embodiment
In the description below to advantageous embodiment of the invention, indicated using the same or similar appended drawing reference in difference
It is shown in the accompanying drawings to act on similar element, wherein omitting the repeated description to these elements.
Fig. 1 shows the diagram of the control program of the interferometer according to one embodiment.The control program can be used for having
There are two the interferometers for the driving device 100,102 that can be manipulated independently of one another, for adjusting the clearance height of resonance cavity gap
104.In control program shown here, first driving device 100 is used in the first clearance height range 106 and the second gap
It is switched between altitude range 108.The gap that second driving device 102 is used to adjust in clearance height range 106,108 is high
Degree 104.Here, clearance height range 106,108 is overlapped in overlapping range 110.It is possible thereby to from two clearance height ranges
106,108 the clearance height 104 in overlapping region 110 is adjusted.
Here, there are two the final positions limited for the tool of first driving device 100, and it is not necessarily between the final position
Between position change clearance height 104.Second driving device 102 be embodied as herein it is stepless, and with control signal 112 at than
Example ground changes clearance height 104.
The overlapping portion 110 of measured zone 106,108 is shown in Fig. 1.Here, being carried out to two resting positions 106,108
Rough actuating, to be finely adjusted by the second actuating mechanism 102 to resting position 106,108.
Fig. 2 shows the block diagrams according to the interferometer 200 of one embodiment.Interferometer 200 have first mirror element 202,
Pass through adjustable resonance cavity gap 204 and the first mirror element 202 the second mirror element 206 separately, first driving device 100
With the second driving device 102.Control program shown in Fig. 1 can be used to manipulate interferometer 200.
First mirror element 202 is driven by two driving devices 100,102 herein, and the wherein series connection of driving device 100,102 connects
It connects.Here, the second mirror element 206 is fixed.First driving device 100 is configured in 106 He of the first clearance height range
The clearance height 104 of resonance cavity gap 204 is adjusted between second clearance height range 108.First driving device 100 has first
Adjustable range 208.Second driving device 102 is identically constructed for adjusting clearance height 104.Second driving device 102, which has, mends
Fill the second adjustable range 210 of the first adjustable range 208.
In other words, Fabry-Perot interferometer (FPI) device 200 of multistage actuating is described.Show drive system
Schematic diagram.In the sketch map, position 106 and 108 is two occupied the position of first mirror element 202, the two positions
It can be realized by the digital switch of coarse adjustment actuating mechanism 100.However, coarse adjustment actuating mechanism 100 and/or fine tuning actuating mechanism
102 can equally act on the second mirror element 206.Here, mirror element 200,206 can be on the same direction or opposite direction
Actuating.Similarly, actuating can be carried out with unilateral or bilateral.
Principle determines that traditional micromechanics Fabry-Perot interferometer (FPI) is due to the operation model at it close to low wavelength
It encloses the interior wavelength for higher order (h herer Ordnungen) occur and is restricted on its envelop of function.For problem analysis
For, it needs to run in wave-length coverage as big as possible.
Method presented here provides micromechanics Fabry-Perot interferometer 200, have extension, be not attracted
(Pull-in) spectral measurement ranges 104 limited, and there is fine-resolution under shorter wavelength.
In Fabry-Perot interferometer 200, meet when clearance distance 104 is equal to the integral multiple of half-wavelength maximum saturating
Penetrate the condition of resonance of rate.
When adjusting the Fabry-Perot interferometer 200 of condenser type manipulation, it may be desirable to alap control can be used
Voltage processed is electrically run because this aspect can save, and is on the other hand able to use the simpler and lower electricity of cost again
Sub- actuation member.Clearance distance 104 also should be linear in measurement range as far as possible.Especially since shorter, i.e. in wavelength
When clearance distance is smaller, the half breadth of resonance is smaller, therefore it is desirable that, in clearance gap for optimal spectrum scanning
From comparing in biggish situation, voltage increment causes the variation of clearance distance smaller.And mirror element 202,206 moves towards each other
Simple condenser type control device but in contrast.Gap 104 is smaller, and the increase of power is bigger, and therefore in identical control electricity
Press the gap variation under increment bigger.If it exceeds force threshold, may result in shock and electrode contacts with each other.
In order to obtain maximum resolution in entire adjustable range, the mirror of Fabry-Perot interferometer 200 should be as far as possible
It is parallel in plane each other, and should also remain unchanged at the time of activation.In general, mirror layer 202,206 thus can for example zero-bit just
There is mechanical tensile stress.When applying deflection voltage, the mechanical stress in mirror layer 202,206 is continued growing.Generally speaking,
Which has limited the full-size of traditional Fabry-Perot mirror, excessive mirror can rupture.
One advantageous control method is the coarse adjustment control of the first actuating mechanism 100, is controlled by coarse adjustment by one or two
A position in a mirror element 202,206 bands at least two or more defined positions 106,108 or measurement position.?
This, two or more coarse positions 106,108 can limit with or by Mechanical stops or by discrete control signal reality
Existing, control signal value can be selected according to measurement task.Then pass through the continuous or substantially continuous of the second actuating mechanism 102
Fine tuning control, adjusts the size of optical gap 104.
The stop dog position that coarse adjustment can be selected to control in this way makes it overlap with the measurement range generated by fine tuning control,
So as to form continuous spectrum.
By means of one/multiple narrow-band light source/spectrum lines, two actuating mechanisms 100,102 can be made to carry out each other automatically
Calibration.
Fig. 3 shows the cross-sectional view of the interferometer 200 according to one embodiment.Interferometer 200 corresponds essentially to Fig. 2
In interferometer.In contrast, first driving device 100 is acted on herein in first mirror element 202, and the second driving dress
102 are set to act on the second mirror element 206.In other words, here, two mirror elements 202,206 are all driven and are removable
Dynamic.
Interferometer 200 is embodied as the layered structure on pedestal 300.Two mirror elements 202,206 are parallel to pedestal herein
The subregion of the mirror layer 302 of 300 arrangements.Mirror element 202,206 is arranged in 304 top of vallecular cavity of pedestal 300.Mirror element 202,
206 side, mirror layer 302 is penetrated by spring perforation 306, to construct spring system 308,310.Spring system 308,310 is real
Show the mobility of mirror element 202,206 to adjust the clearance height 104 of resonance cavity gap 204.In mirror element 202,206 and spring
The outside of system 308,310, mirror layer 302 is separated from each other by wall 312, and is spaced apart with pedestal 300.
First driving device 100 is arranged in the region of the first spring system 308.First driving device 100 is configured to electricity
Hold actuator 100.Here, the first electrode of capacitive actuator 100 is arranged on pedestal 300, and the second of capacitive actuator 100
Electrode arrangement is on the spring element of the first spring system 308.When voltage is applied on electrode, attraction is generated between the electrodes
Power, and first mirror element 202 is pulled by the spring element of the first spring system 308 from resting position towards the direction of pedestal 300.?
This, first mirror element 202 moves, until the stop element 314 of first mirror element 202 backstop and limits on pedestal 300
The inflection point of first mirror element 202.In other words, first mirror element 202 by first driving device 100 in resting position and
It is moved back and forth between inflection point, to change the clearance height 104 between the first adjustable range and the second adjustable range.
Second driving device 102 is arranged in the region of second spring system 310.Here, the second driving device 102 constructs
For piezoelectric actuator 102.Here, at least one piezoelectric layer of piezoelectric actuator 102 is arranged in the spring of second spring system 310
On element.When applying voltage to piezoelectric layer, the length of this layer changes.Spring element is bent as a result, and according to stress value and
Stress direction, the second mirror element 206 move out resting position by spring element.Here, the second mirror element 206 can be towards first
The direction of mirror element 202 is mobile, until the convex block 316(or Antistiction-Bumps 316 of preventing adhesion) contact first mirror element
202.The convex block 316 that prevents adhesion prevents the adherency of the smooth reflecting surface of mirror element 202,206 herein.Second driving device 102 exists
This is configured to, and the second mirror element 206 is infinitely moved within the scope of the second clearance height.
Here the micromechanics interferometer component 200 proposed includes: at least one pedestal 300；At least two by gap 204 that
This is spaced apart, is stacked the mirror element 202,206 of arrangement；Suspension 308,310 flexible, at least one in mirror element 202,206
A mirror element is suspended on pedestal 300 by the suspension；At least two actuating mechanisms 100,102 that can be manipulated independently of one another are used
In adjusting gap size 104, wherein corresponding each actuating mechanism 100,102, a mirror element in mirror element 202,206
It is interior there are one can independent operation spring system 308,310.
Spring system 308,310 can with otherwise be formed as film, circular membrane or the spring element for being formed as discrete topology.
Actuating mechanism 100,102 can with otherwise all on a mirror element acting in mirror element 202,206, act on multiple mirrors members
It is respectively acting on part 202,206 or only on mirror element 202,206.Actuating mechanism 100,102 can with or relative to
Pedestal 300 moves one or more mirror elements 202,206 or is moved relative to each other mirror element.In mirror element 202,206
At least one mirror element and/or pedestal 300 have on the direction towards another mirror element 202,206 and/or pedestal 300
Stop part 314, wherein the stop part 314 can be structured as one-dimensional column or two-dimensional wall.
Actuating mechanism 100,102 may be embodied as condenser type or electrostatic and/or piezoelectric type and/or thermal type.
Method by introducing herein, the Fabry-Perot of (analog) adjusting can be simulated completely by adjusting required voltage ratio
Voltage needed for Luo Gan's interferometer is small.This realizes more linear control.In addition, the machinery generated when adjusting, in mirror layer 302
Ply stress is also smaller.The tool of interferometer 200 introduced herein can be used for if necessary there are two the optical resonance length limited
The calibration of Fabry-Perot interferometer 200, because the distance limits very much.Similarly, exist independent of each other by two
Control circuit carries out self-alignment possibility, wherein carrying out capacitor or piezoelectric detection by second control circuit.Self calibration is available
In temperature-compensating and/or drift compensation (Driftkompensation).The interferometer 200 introduced herein can be made at low cost
It makes, because the interferometer can only need a vallecular cavity 304 if necessary compared with having the system there are two electrostatic gap.
Fig. 4 shows the cross-sectional view of the interferometer 200 according to one embodiment.Interferometer 200 corresponds essentially to Fig. 2
With the interferometer in 3.In contrast, here, the second mirror layer 302 of the second mirror element 206 is directly arranged at pedestal 300
On, and the second mirror element 206 is immovable.First mirror layer 302 of first mirror element 202 interval high by thickness degree
Layer 312 is separated with the second mirror layer 302.The first mirror layer in order to construct spring system 308,310, outside first mirror element 202
302 is thinning in section 400.Here, the first spring system 308 and second spring system 310 are successively connected in series.Driving dress
100,102 are set to be arranged in the region of spring system 308,310.Two driving devices 100,102 are configured to capacitor actuating herein
Device.First electrode is arranged in herein in the thinning section of the first mirror layer 302.Second electrode is arranged in the second mirror layer 302.In bullet
Between spring system 308,310, the first mirror layer is configured to the stopper area of stop element 314.
First driving device 100 make stopper area, second spring system 310 and first mirror element 202 in resting position and
It is moved between the inflection point limited by stop element 314.Second driving device 102 makes independently of 100 ground of first driving device
First mirror element 202 removes resting position or inflection point.
In other words, Fig. 4 is shown across the cross section of Fabry-Perot interferometer 200, wherein thinning diaphragm area
400 are used as spring system 308,310.
Fig. 5 shows the cross-sectional view of the interferometer 200 according to one embodiment.The interferometer 200 corresponds essentially to
Interferometer shown in Fig. 4.In contrast, it is by 306 construction of spring perforation that spring system 308,310 is identical with Fig. 3
It forms.In addition, the interferometer 200 being shown here has third spring system 500.Third spring system 500 is by passing through the second mirror
The spring perforation 306 of layer 302 constructs.The second mirror element 206 is also moveable as a result,.Third spring system 500 and
Two spring systems 310 are positioned opposite, and the second electrode of the second driving device 102 is arranged in the spring of third spring system 500
On element.Third spring system 500 is connected in parallel with second spring system 310 as a result,.Second driving device 102 therefore can be with
Move towards each other first mirror element 202 and the second mirror element 206.It is identical as in Fig. 4, in order to realize clearance height 104
Identical change need the second driving device electrode between attraction it is lower because the attraction equably acts on second
On spring system 310 and third spring system 500.
Interferometer 200 is shown in resting position, is not driven the power effect of device 100,102.
In unshowned embodiment, interferometer 200 has the 4th spring system, and the 4th spring system is similar to third
500 ground of spring system and the first spring system 308 are arranged in parallel.
In other words, Fig. 5 shows the Fabry-Perot interferometer 200 in nought state, with Capacity control electrode
With stop part 314 and separated spring system 308,310, spring system is used for two electrostatically actuateds that can be manipulated independently of one another
Mechanism 100,102.
Fig. 6 shows the cross-sectional view of the interferometer 200 according to one embodiment.The interferometer 200 corresponds in Fig. 5
Interferometer 200.Here, the interferometer 200 is shown in approximate maximum deflection state.First spring system 108 drives by first
Dynamic device 100 deflects, until stop device 314 in inflection point in the second mirror layer 302.310 He of second spring system
Third spring system 500 is deflected by the second driving device 102, until electrode almost contacts with each other.Here, spring system
310, it 500 deflects in the opposite direction.The direct of first mirror element 202 and the second mirror element 206 is prevented by the convex block 316 that prevents adhesion
Contact.
Fig. 7 shows the top view of the driving device 100,102 according to one embodiment.Driving device 100,102 is herein
Correspond essentially to driving device of the Fig. 1 into Fig. 6.As in fig. 5 and fig., driving device 100,102 is successively connected
Arrangement.First driving device 100 is arranged on the spring element 700 of the first spring system 308.Second drive arrangement is
On the spring element 702 of two spring systems 310.First mirror element 202 is circular.Second spring system 310 surrounds the first mirror
Element 202.Stopper area surrounds second spring system in a ring.Spring element 702 bends to S-shaped and by mirror element 202 and only
Keep off region connection.Stop part 314 is disposed in stopper area.First spring system 308 surrounds stopper area in a ring.Spring
Element 700 bends to the S-shaped opposite with spring element 702, and the mirror layer 302 of stopper area and surrounding is connected.
Fig. 8 shows the cross-sectional view of the interferometer 200 according to one embodiment.The interferometer 200 corresponds essentially to
Previous diagram.In contrast, which has contact pin 800, which connects first mirror element 202 and pedestal 300
It connects.Contact pin 800 is flexible, and provides insignificant spring force for deformation.Contact pin 800 represents the first spring system 308.It connects
Piece 800 has the electric wire 802 for supplying driving device 100,102.Here, the second driving device 102 has annular electrode
804, which circularizes around first mirror element 202.Electrode 804 is circlewise surrounded by second spring system 310.Second
Gap 806 or vallecular cavity between the spring element bridge joint first driving device 100 of spring system 310 and the second driving device 102.
First driving device 100 equally has annular electrode 808, which surrounds second spring system 310 in a ring.Pass through
Contact pin 800, the unit formed by first mirror element 202, electrode 804, second spring system 310 and electrode 808 is in spade
(kellenf rmig).
In other words, Fig. 8 shows the details of the suspension 800 of the Fabry-Perot interferometer 200 according to one embodiment
Top view.Here, a mirror element in mirror element 202 can be formed as spade.The mirror element does not have a restoring force, and can be
It is toggled between two positions.This is especially advantageous in the case where electrostatically actuated, because lesser area is with regard to enough
?.In addition, the construction has the advantage that mechanical stretching stress caused by external action is not sent out in the layer of mirror element 202
Raw effect, this improves the drift stabilization of component 200.
Fig. 9 shows the cross-sectional view of the interferometer 200 according to one embodiment.As shown in Figure 3 as in, two mirror layer 302
It is separated from each other by wall 312, and is spaced apart with pedestal 300.Here, the first mirror layer 302 is arranged in the second mirror layer 302
Between pedestal 300.As in fig. 8, first mirror element 202 is suspended in contact pin 800 flexible in spade, and can be with
Referred to as the mirror of free floating shovels (Spiegelkelle).Here, there are three electrodes for the tool of first driving device 100.One electrode
It is arranged on pedestal 300.Another electrode arrangement is in the second mirror layer 302.Target 808 be arranged in other two electrode it
Between.Therefore, target 808 can be pulled to the second mirror layer 302 or be pulled to pedestal 300.Target 808 and stop device
314 are rigidly attached.Here, stop device 314 has stop part on the direction towards pedestal 300, and towards the second mirror layer
There is stop part on 302 direction.Due to contact pin 800 flexible, first mirror element 202 does not have the stabilization rest position limited
It sets.Due to stop device 314, there are two the inflection points limited for the tool of first mirror element 202.Here, first mirror element 202 is shown
To be deflected towards the direction of the second mirror layer 302.Here, 104 very little of clearance height.
There are two opposed electrodes for second driving device 102 tool.One of electrode herein directly with first mirror element 202
It couples, and is arranged in inside second spring system 310.Another electrode arrangement is in the plane of the second mirror layer 302.
In one embodiment, identical with Figures 5 and 6, interferometer 200 has the third being integrated into the second mirror layer 302
Spring system 500.Here, third spring system 500 separates the second mirror element 206 and the plane of the second mirror layer 302.
Figure 10 shows the diagram of the interferometer 200 according to one embodiment.The interferometer is corresponded to herein shown in Fig. 9
Interferometer.Here, first mirror element 202 is shown in the second deflection defined position.Here, clearance height 104 is the largest.
Fig. 3 to 10 basically illustrates the embodiment with double capacitor actuating mechanisms or double electrostatic actuators 100,102.But it is same
Sample it is also contemplated that any combination piezoelectric type, thermal type and/or capacitive actuator (such as combination of electrostatic and piezoelectricity)
Similar embodiment.The deflection of at least one mirror element in mirror element 202,206 can be by actuator 100,102 identical
Direction, opposite direction are both realized in the same direction or in the opposite direction.It can compensate in this way non-in manipulation
Linearly.
Especially in one embodiment, mirror element 202,206 can both move towards each other or away from each other
It is mobile.For example, in the case where condenser type actuator, by the way that the first electrostatic gap is increased 30% and by the second electrostatic gap
Also increase 30%, provide overall bigger adjustable measured zone.
In embodiment of the tool there are two electrostatically actuated mechanism 100,102 independent of each other significantly, for thick
Regulation system using than controlling small electrostatic gap for fine tuning, so as to by coarse adjustment control more simply, i.e. utilization it is lower
Control voltage a mirror in mirror 202,206 is snapped into measurement position.
For each actuating mechanism 100,102, there are corresponding at least one mirror element in mirror element 202,206
Spring system 308,310, to for example can adaptedly design spring dress with actuating mechanism 100,102 in terms of restoring force
It sets.
Figure 11 shows the flow chart for running the method 1100 according to the interferometer of one embodiment.Method 1100 is wrapped
Include regulating step 1102, wherein the first mirror element in interferometer is adjusted using first driving device and/or the second driving device
The gap width of the resonance cavity gap of interferometer between the second mirror element of interferometer.
In other words, Figure 11 shows the flow chart of the method for adjusting Fabry-Perot interferometer, and this method has
At least two regulating systems that can be activated independently of one another, which is characterized in that the first digital adjusting system is for passing through discrete actuation
First element or first mirror element are brought into a position into two or more defined positions, and the second analog feedback system
For substantially continuous changing the distance between mirror element.Use the discrete location that first mirror element is limited apart from holder.It causes
Motivation structure can be piezoelectric type, capacitive or thermal type.
If embodiment includes "and/or" relationship between fisrt feature and second feature, this be should be understood as, according to one
The embodiment of a embodiment had not only had fisrt feature but also had had second feature, and only according to the embodiment of another embodiment
With fisrt feature or only with second feature.
Claims (11)
1. a kind of interferometer (200) with first mirror element (202) and passes through the resonance cavity gap (204) being adjustable and institute
State first mirror element (202) second mirror element (206) spaced apart, wherein the interferometer (200) has the feature that
First driving device (100) is configured to adjust the clearance height (104) of the resonance cavity gap (204), wherein
The first driving device (100) has the first adjustable range (208)；With
Second driving device (102) is configured to adjust clearance height (104), wherein second driving device (102)
With the second adjustable range (210) for supplementing and/or extending first adjustable range (208).
2. interferometer (200) according to claim 1, wherein first adjustable range (208) have at least one from
Scattered final position.
3. interferometer (200) according to claim 2, wherein the final position is determining by stop device (314),
Wherein, the stop device (314) couples with the first driving device (100).
4. interferometer (200) according to claim 3, wherein in the stop device (314) and the interferometer
(200) the first spring arrangement (308) are disposed between pedestal (300).
5. interferometer (200) according to claim 4, wherein in the stop device (314) and the first mirror element
(202) second spring device (310) are disposed between.
6. interferometer (200) according to any one of the preceding claims, wherein the first driving device (100) with
The first mirror element (202) couples, wherein the first mirror element (202) passes through the first spring arrangement (308) and described dry
The pedestal (300) of interferometer (200) couples.
7. interferometer (200) according to any one of the preceding claims, wherein second driving device (102) with
Second mirror element (206) couples.
8. interferometer (200) according to claim 7, wherein second driving device (102) also with first mirror
Element (202) couples.
9. the method (1100) for running the interferometer according to any one of preceding claims 1 to 8 (200), wherein
In regulating step (1102), adjusted by using first driving device (100) and/or the second driving device (102) described
The interference between the first mirror element (202) of interferometer (200) and the second mirror element (206) of the interferometer (200)
The gap width (104) of the resonance cavity gap (204) of instrument (200).
10. a kind of computer program is arranged for carrying out method according to any of the preceding claims (1100).
11. a kind of machine readable storage medium, computer program according to claim 10 is stored in the storage and is situated between
In matter.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016214565.7 | 2016-08-05 | ||
| DE102016214565.7A DE102016214565A1 (en) | 2016-08-05 | 2016-08-05 | Interferometer and method of operating the same |
| PCT/EP2017/068769 WO2018024543A1 (en) | 2016-08-05 | 2017-07-25 | Interferometer and method for operating same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109564344A true CN109564344A (en) | 2019-04-02 |
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| CN201780049013.XA Pending CN109564344A (en) | 2016-08-05 | 2017-07-25 | Interferometer and method for running interferometer |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP3494432A1 (en) |
| CN (1) | CN109564344A (en) |
| DE (1) | DE102016214565A1 (en) |
| WO (1) | WO2018024543A1 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018205778A1 (en) | 2018-04-17 | 2019-10-17 | Robert Bosch Gmbh | Interferometer and method of making an interferometer |
| DE102018212755A1 (en) * | 2018-07-31 | 2020-02-06 | Robert Bosch Gmbh | Spectrometer device and method for producing a spectrometer device |
| DE102018213823A1 (en) * | 2018-08-16 | 2020-02-20 | Robert Bosch Gmbh | Fabry-Pérot interferometer and method for manufacturing a Fabry-Pérot interferometer |
| DE102018220272A1 (en) * | 2018-11-26 | 2020-05-28 | Robert Bosch Gmbh | Interferometer device and method for producing an interferometer device |
| DE102018220451A1 (en) * | 2018-11-28 | 2020-05-28 | Robert Bosch Gmbh | Optical filter device and method for producing an optical filter device |
| DE102019203932A1 (en) * | 2019-03-22 | 2020-09-24 | Robert Bosch Gmbh | Interferometer device and method for manufacturing an interferometer device |
| DE102019210707A1 (en) * | 2019-07-19 | 2021-01-21 | Robert Bosch Gmbh | Interferometer device and method for operating an interferometer device |
| DE102019212597A1 (en) * | 2019-08-22 | 2021-02-25 | Robert Bosch Gmbh | Micromechanical interferometer device and method for producing a micromechanical interferometer device |
| DE102019215893A1 (en) * | 2019-10-16 | 2021-04-22 | Robert Bosch Gmbh | Micromechanical component for an optical device |
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| WO2002086582A1 (en) * | 2001-04-20 | 2002-10-31 | Solus Micro Technologies, Inc. | Mems-based tunable fabry-perot filters and method of forming same |
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| DE102010031206B4 (en) * | 2010-07-09 | 2014-02-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Tunable Fabry-Pérot filter and method of making the same |
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| US6618199B2 (en) * | 2001-06-05 | 2003-09-09 | Axsun Technologies, Inc. | Dual-band fabry-perot mirror coating |
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| JP6015090B2 (en) | 2012-04-18 | 2016-10-26 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
| US20140198388A1 (en) * | 2013-01-11 | 2014-07-17 | Gooch And Housego Plc | Fabry-perot device with a movable mirror |
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2016
- 2016-08-05 DE DE102016214565.7A patent/DE102016214565A1/en active Pending
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2017
- 2017-07-25 EP EP17745315.6A patent/EP3494432A1/en not_active Withdrawn
- 2017-07-25 CN CN201780049013.XA patent/CN109564344A/en active Pending
- 2017-07-25 WO PCT/EP2017/068769 patent/WO2018024543A1/en unknown
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|---|---|---|---|---|
| US5142414A (en) * | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
| WO2002086582A1 (en) * | 2001-04-20 | 2002-10-31 | Solus Micro Technologies, Inc. | Mems-based tunable fabry-perot filters and method of forming same |
| US20050134962A1 (en) * | 2003-12-22 | 2005-06-23 | Axsun Technologies, Inc. | Dual membrane single cavity Fabry Perot MEMS filter |
| DE102010031206B4 (en) * | 2010-07-09 | 2014-02-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Tunable Fabry-Pérot filter and method of making the same |
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Also Published As
| Publication number | Publication date |
|---|---|
| EP3494432A1 (en) | 2019-06-12 |
| DE102016214565A1 (en) | 2018-02-08 |
| WO2018024543A1 (en) | 2018-02-08 |
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