CN109557641A - A kind of doubly telecentric projection lithography camera lens - Google Patents
A kind of doubly telecentric projection lithography camera lens Download PDFInfo
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- 238000001459 lithography Methods 0.000 title claims abstract description 36
- 239000000571 coke Substances 0.000 claims abstract description 24
- 230000003287 optical effect Effects 0.000 claims description 30
- 239000011521 glass Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000013461 design Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/22—Telecentric objectives or lens systems
Abstract
The present invention provides a kind of doubly telecentric projection lithography camera lens, design rationally, has the characteristics that high telecentricity, low distortion, suitable for the scene of long reach, including set gradually from object space to image space front lens group, diaphragm, rear lens group；The front lens group includes setting gradually from object space to image space: the first lens, has positive light coke；Second lens have negative power；The third lens have positive light coke；4th lens have negative power；5th lens have negative power；The rear lens group includes setting gradually from object space to image space: the 6th lens, has negative power；7th lens have positive light coke；8th lens have positive light coke；9th lens；Tenth lens have positive light coke；11st lens have negative power.
Description
Technical field
The present invention relates to optical lens technology field more particularly to a kind of doubly telecentric projection lithography camera lenses.
Background technique
Industrial lens are highly important image-forming components in NI Vision Builder for Automated Inspection, if system is thought to play its function, work completely
Industry camera lens has to can satisfy requirement.At the beginning of 21 century, with NI Vision Builder for Automated Inspection answering extensively in Precision measurement field
With general industry camera lens is difficult to meet testing requirements, to make up the deficiency that common lens are applied, adapts to Precision measurement demand, far
Heart camera lens comes into being.
Telecentric lens have the advantageous characteristic for being different from common lens: low distortion, permanent enlargement ratio etc., therefore regard in machine
Feel in non-cpntact measurement field and be widely used, the perspective distortion of conventional lenses is avoided frequently with the telecentric lens of special designing.
Doubly telecentric camera lens then refers to the imaging system for not only having met object space telecentric beam path feature but also having met telecentric beam path in image space feature
System, it contains two kinds of common advantages of telecentric beam path, therefore design difficulty is bigger, and such camera lens is often fixed enlargement ratio
Camera lens, and object space, the telecentricity of image space can not meet high level simultaneously, current doubly telecentric camera lens can not guarantee long working distance
From under the premise of high magnification, possess preferable telecentricity and lower distortion.
Summary of the invention
In view of the above-mentioned problems, design rationally, has high telecentricity the present invention provides a kind of doubly telecentric projection lithography camera lens
The characteristics of degree, low distortion, the scene suitable for long reach.
Its technical solution is such that a kind of doubly telecentric projection lithography camera lens, which is characterized in that including from object space to image space
The front lens group that sets gradually, diaphragm, rear lens group；
The front lens group includes setting gradually from object space to image space:
First lens, have positive light coke, and the object plane side of first lens is convex surface, the image planes side of first lens
For convex surface；
Second lens, have negative power, and the object plane side of second lens is convex surface, the image planes side of second lens
For concave surface；
The third lens, have positive light coke, and the object plane side of the third lens is convex surface, the image planes side of the third lens
For convex surface；
4th lens, have negative power, and the object plane side of the 4th lens is concave surface, the image planes side of the 4th lens
For convex surface；
5th lens, have negative power, and the object plane side of the 5th lens is concave surface, the image planes side of the 5th lens
For convex surface；
The rear lens group includes setting gradually from object space to image space:
6th lens, have negative power, and the object plane side of the 6th lens is plane, the image planes side of the 6th lens
For concave surface；
7th lens, have positive light coke, and the object plane side of the 7th lens is convex surface, the image planes side of the 7th lens
For convex surface；
8th lens, have positive light coke, and the object plane side of the 8th lens is convex surface, the image planes side of the 8th lens
For convex surface；
9th lens, have positive light coke, and the object plane side of the 9th lens is convex surface, the image planes side of the 9th lens
For convex surface；
Tenth lens, have positive light coke, and the object plane side of the tenth lens is concave surface, the image planes side of the tenth lens
For convex surface；
11st lens, have negative power, and the object plane side of the 11st lens is plane, the picture of the tenth lens
Surface side is concave surface；
Wherein, the 6th lens are close to setting with the optical edge of the 7th lens；
Doubly telecentric projection lithography camera lens meets following relationship:
150mm < f1 < 400mm, 20mm < f2 < 200mm,
0.1 < f1/f < 3,0.05 < f2/f < 3,
F1 is the focal length value of front lens group, and f2 is the focal length value of rear lens group, and f is the focal length of doubly telecentric projection lithography camera lens
Value.
Further, first lens, the second lens, the third lens, the 4th lens, the 5th lens, the 6th lens,
Seven lens, the 8th lens, the 9th lens, the tenth lens, the 11st lens are respectively glass material.
Further, the diaphragm size is 9.5mm.
Further, the camera lens overall length of the doubly telecentric projection lithography mirror is less than 36mm.
Further, the F number of the doubly telecentric projection lithography mirror is between 4-10.
Further, first lens, the second lens, the third lens, the 4th lens, the 5th lens, the 6th lens,
Seven lens, the 8th lens, the 9th lens, the tenth lens, the 11st lens eyeglass bore be respectively less than 80mm.
Further, first lens also meet the following conditions: 1.4 < Nd <, 1.8,50 < Vd < 70；Wherein, described
Nd is optical index, and the Vd is Abbe constant；
Second lens also meet the following conditions: 1.3 < Nd <, 1.7,50 < Vd < 70；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
The third lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
4th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
5th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
6th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
7th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
8th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
9th lens also meet the following conditions: 1.4 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
Tenth lens also meet the following conditions: 1.4 < Nd <, 1.7,50 < Vd < 80；Wherein, the Nd is light folding
Rate is penetrated, the Vd is Abbe constant；
11st lens also meet the following conditions: 1.5 < Nd <, 1.7,20 < Vd < 40；Wherein, the Nd is light
Refractive index, the Vd are Abbe constant.
Further, the object plane side of first lens also meets the following conditions: 190mm < R < 220mm, and described first
The image planes side of lens also meets the following conditions: 80mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of second lens also meets the following conditions: 800mm < R < 850mm, the image planes of second lens
Side also meets the following conditions: 80mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of the third lens also meets the following conditions: 150mm < R < 250mm, the image planes of the third lens
Side also meets the following conditions: 150mm < R < 200mm, wherein the R is radius of curvature；
The object plane side of 4th lens also meets the following conditions: 20mm < R < 50mm, the image planes side of the 4th lens
Also meet the following conditions: 100mm < R < 150mm, wherein the R is radius of curvature；
The object plane side of 5th lens also meets the following conditions: 250mm < R < 350mm, the image planes of the 5th lens
Side also meets the following conditions: 200mm < R < 250mm, wherein the R is radius of curvature；
The image planes side of 6th lens also meets the following conditions: 70mm < R < 100mm, wherein the R is curvature half
Diameter；
The object plane side of 7th lens also meets the following conditions: 70mm < R < 100mm, the image planes of the 7th lens
Side also meets the following conditions: 70mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of 8th lens also meets the following conditions: 200mm < R < 300mm, the image planes of the 8th lens
Side also meets the following conditions: 500mm < R < 600mm, wherein the R is radius of curvature；
The object plane side of 9th lens also meets the following conditions: 80mm < R < 130mm, the image planes of the 9th lens
Side also meets the following conditions: 100mm < R < 150mm, wherein the R is radius of curvature；
The object plane side of tenth lens also meets the following conditions: 180mm < R < 220mm, the image planes of the tenth lens
Side also meets the following conditions: 20mm < R < 50mm, wherein the R is radius of curvature；
The image planes side of 11st lens also meets the following conditions: 30mm < R < 50mm, wherein the R is curvature half
Diameter.
Doubly telecentric projection lithography camera lens of the invention is composed of front lens group and rear lens group, and front lens group
Rear focus and the object focus of rear lens group are completely coincident, and aperture diaphragm is placed exactly in bifocal overlapping positions, are formed without coke
System, structure is simple, small volume, has good processing performance, has excellent imaging performance；Telecentric lens are full simultaneously
Sufficient object space, image space doubly telecentric, and object space telecentricity and image space telecentricity can satisfy the standard of general telecentric lens and have
High telecentricity is horizontal, and the depth of field is big, the enlargement ratio of image can be made to be consistent in certain object distance range, minimum distortion
So that image fault degree substantially reduces, promote its detection accuracy further, following field of industry detection can be fully applicable to
In the middle；The clear aperture of 11 lens used is smaller, can reduce the processing cost of lens, operates with convenience, measurement
Precision is high, has broad application prospects.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of doubly telecentric projection lithography camera lens of the invention；
Fig. 2 is the MTF figure of the doubly telecentric projection lithography camera lens in embodiment；
Fig. 3 is the point range figure of the doubly telecentric projection lithography camera lens in embodiment；
Fig. 4 is the distortion figure of the doubly telecentric projection lithography camera lens in embodiment.
Specific embodiment
See Fig. 1, a kind of doubly telecentric projection lithography camera lens of the invention, before setting gradually from object space 13 to image space 14
Lens group, diaphragm 12, rear lens group；
Front lens group includes setting gradually from object space to image space:
First lens 1, have positive light coke, and the object plane side 101 of the first lens is convex surface, the image planes side 102 of the first lens
For convex surface；
Second lens 2 have negative power, and the object plane side 21 of the second lens is convex surface, and the image planes side 22 of the second lens is
Concave surface；
The third lens 3 have positive light coke, and the object plane side 31 of the third lens is convex surface, and the image planes side 32 of the third lens is
Convex surface；
4th lens 4 have negative power, and the object plane side 41 of the 4th lens is concave surface, and the image planes side 42 of the 4th lens is
Convex surface；
5th lens 5 have negative power, and the object plane side 51 of the 5th lens is concave surface, and the image planes side 52 of the 5th lens is
Convex surface；
Rear lens group includes setting gradually from object space to image space:
6th lens 6 have negative power, and 61 side of object plane of the 6th lens is plane, and the image planes side 62 of the 6th lens is
Concave surface；
7th lens 7 have positive light coke, and the object plane side 71 of the 7th lens is convex surface, and the image planes side 72 of the 7th lens is
Convex surface；
8th lens 8 have positive light coke, and the object plane side 81 of the 8th lens is convex surface, and the image planes side 82 of the 8th lens is
Convex surface；
9th lens 9 have positive light coke, and the object plane side 91 of the 9th lens is convex surface, and the image planes side 92 of the 9th lens is
Convex surface；
Tenth lens 10, have positive light coke, and the object plane side 10-1 of the tenth lens is concave surface, the image planes side of the tenth lens
10-2 is convex surface；
11st lens 11, have negative power, and the object plane side 111 of the 11st lens is plane, the image planes of the tenth lens
Side 112 is concave surface；
Wherein, the 6th lens 6 are close to setting with the optical edge of the 7th lens 7；
Doubly telecentric projection lithography camera lens meets following relationship:
150mm < f1 < 400mm, 20mm < f2 < 200mm,
0.1 < f1/f < 3,0.05 < f2/f < 3,
F1 is the focal length value of front lens group, and f2 is the focal length value of rear lens group, and f is the focal length of doubly telecentric projection lithography camera lens
Value.
In addition, the first lens 1, the second lens 2, the third lens 3, the 4th lens 4, the 5th lens 5, the 6th lens the 6, the 7th
Lens 7, the 8th lens 8, the 9th lens 9, the tenth lens 10, the 11st lens 11 are respectively glass material.
In addition, a kind of doubly telecentric projection lithography camera lens of the invention also meets: diaphragm size is 9.5mm, doubly telecentric projection
The camera lens overall length of photoetching mirror is less than the F number of 36mm. doubly telecentric projection lithography mirror between 4-10, and object distance and image distance are all larger than
60mm。
First lens 1, the second lens 2, the third lens 3, the 4th lens 4, the 5th lens 5, the 6th lens 6, the 7th lens
7, the 8th lens 8, the 9th lens 9, the tenth lens 10, the 11st lens 11 eyeglass bore be respectively less than 80mm.
Specifically, the first lens also meet the following conditions: 1.4 < Nd <, 1.8,50 < Vd < 70；Wherein, Nd is anaclasis
Rate, Vd are Abbe constant；
Second lens also meet the following conditions: 1.3 < Nd <, 1.7,50 < Vd < 70；Wherein, Nd is optical index, and Vd is
Abbe constant；
The third lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, Nd is optical index, and Vd is
Abbe constant；
4th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, Nd is optical index, and Vd is
Abbe constant；
5th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, Nd is optical index, and Vd is
Abbe constant；
6th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, Nd is optical index, and Vd is
Abbe constant；
7th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, Nd is optical index, and Vd is
Abbe constant；
8th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, Nd is optical index, and Vd is
Abbe constant；
9th lens also meet the following conditions: 1.4 < Nd <, 1.8,50 < Vd < 80；Wherein, Nd is optical index, and Vd is
Abbe constant；
Tenth lens also meet the following conditions: 1.4 < Nd <, 1.7,50 < Vd < 80；Wherein, Nd is optical index, and Vd is
Abbe constant；
11st lens also meet the following conditions: 1.5 < Nd <, 1.7,20 < Vd < 40；Wherein, Nd is optical index, Vd
For Abbe constant.
The object plane side of first lens also meets the following conditions: 190mm < R < 220mm, the image planes side of the first lens also meet
The following conditions: 80mm < R < 100mm, wherein R is radius of curvature；
The object plane side of second lens also meets the following conditions: 800mm < R < 850mm, the image planes side of the second lens also meet
The following conditions: 80mm < R < 100mm, wherein R is radius of curvature；
The object plane side of the third lens also meets the following conditions: 150mm < R < 250mm, the image planes side of the third lens also meet
The following conditions: 150mm < R < 200mm, wherein R is radius of curvature；
The object plane side of 4th lens also meets the following conditions: 20mm < R < 50mm, the image planes side of the 4th lens also meet with
Lower condition: 100mm < R < 150mm, wherein R is radius of curvature；
The object plane side of 5th lens also meets the following conditions: 250mm < R < 350mm, the image planes side of the 5th lens also meet
The following conditions: 200mm < R < 250mm, wherein R is radius of curvature；
The image planes side of 6th lens also meets the following conditions: 70mm < R < 100mm, wherein R is radius of curvature；
The object plane side of 7th lens also meets the following conditions: 70mm < R < 100mm, the image planes side of the 7th lens also meet
The following conditions: 70mm < R < 100mm, wherein R is radius of curvature；
The object plane side of 8th lens also meets the following conditions: 200mm < R < 300mm, the image planes side of the 8th lens also meet
The following conditions: 500mm < R < 600mm, wherein R is radius of curvature；
The object plane side of 9th lens also meets the following conditions: 80mm < R < 130mm, the image planes side of the 9th lens also meet
The following conditions: 100mm < R < 150mm, wherein R is radius of curvature；
The object plane side of tenth lens also meets the following conditions: 180mm < R < 220mm, the image planes side of the tenth lens also meet
The following conditions: 20mm < R < 50mm, wherein R is radius of curvature；
The image planes side of 11st lens also meets the following conditions: 30mm < R < 50mm, wherein R is radius of curvature.
Specific embodiment one:
A specific embodiment of doubly telecentric projection lithography camera lens of the invention is given below, meets the parameter of following table:
Table 1
R in table 1 is the radius of curvature on the surface of each optical element, and D is the center thickness of each optical element, and Nd is each light
The refractive index of element is learned, Vd is the Abbe constant of each optical element.
Optic test is carried out to the fiber coupling camera lens in above-described embodiment, Fig. 2 is the doubly telecentric projected light in embodiment
Carve the MTF figure of camera lens；As shown in Figure 2, system mtf value relatively diffraction limit；
Fig. 3 is the point range figure of the doubly telecentric projection lithography camera lens in embodiment, as can be seen from Fig. 3, poly- in the present embodiment
The size of burnt hot spot is small, by system reaches the light of image planes nearly all in Airy range it can be seen from system point range figure in Fig. 3
Interior, RMS RADIUS maximum value 1.159 μm of the telecentric lens under 0 visual field, 0.707 visual field and 1.0 visual fields is less than diffraction pole
3.721 μm of limit value；
Fig. 4 is the distortion figure of the doubly telecentric projection lithography camera lens in embodiment, and the curvature of field corrects within the scope of 0.2mm, is met
Design requirement, although the size that distortion does not influence image quality distortion influences the accuracy of imaging, by correction, system is abnormal
Become below 0.2%, optical system of the invention can be made to control image patch radius under different visual fields at 5 μm or less, and control
Curvature of field aberration processed makes the aberration control of optical system in 0.2% range within the scope of -0.1mm to 0.1mm.
The doubly telecentric projection lithography camera lens of the present embodiment is composed of front lens group and rear lens group, and front lens group
Rear focus and the object focus of rear lens group be completely coincident, aperture diaphragm is placed exactly in bifocal overlapping positions, forms nothing
Burnt system, structure is simple, small volume, has good processing performance, has excellent imaging performance；Telecentric lens are simultaneously
Meet object space, image space doubly telecentric, and object space telecentricity and image space telecentricity can satisfy the standard and tool of general telecentric lens
Standby high telecentricity is horizontal, and 0.02 degree of telecentricity, the depth of field is big, and in certain object distance range the enlargement ratio of image can keep
Unanimously, minimum distortion promotes its detection accuracy further, can be fully applicable to future so that image fault degree substantially reduces
Field of industry detection in；The clear aperture of 11 lens used is smaller, can reduce the processing cost of lens, operation
Easy-to-use, measurement accuracy is high, has broad application prospects.
Claims (8)
1. a kind of doubly telecentric projection lithography camera lens, it is characterised in that: including set gradually from object space to image space front lens group,
Diaphragm, rear lens group；
The front lens group includes setting gradually from object space to image space:
First lens have positive light coke, and the object plane side of first lens is convex surface, and the image planes side of first lens is convex
Face；
Second lens have negative power, and the object plane side of second lens is convex surface, and the image planes side of second lens is recessed
Face；
The third lens have positive light coke, and the object plane side of the third lens is convex surface, and the image planes side of the third lens is convex
Face；
4th lens have negative power, and the object plane side of the 4th lens is concave surface, and the image planes side of the 4th lens is convex
Face；
5th lens have negative power, and the object plane side of the 5th lens is concave surface, and the image planes side of the 5th lens is convex
Face；
The rear lens group includes setting gradually from object space to image space:
6th lens have negative power, and the object plane side of the 6th lens is plane, and the image planes side of the 6th lens is recessed
Face；
7th lens have positive light coke, and the object plane side of the 7th lens is convex surface, and the image planes side of the 7th lens is convex
Face；
8th lens have positive light coke, and the object plane side of the 8th lens is convex surface, and the image planes side of the 8th lens is convex
Face；
9th lens have positive light coke, and the object plane side of the 9th lens is convex surface, and the image planes side of the 9th lens is convex
Face；
Tenth lens have positive light coke, and the object plane side of the tenth lens is concave surface, and the image planes side of the tenth lens is convex
Face；
11st lens, have negative power, and the object plane side of the 11st lens is plane, the image planes side of the tenth lens
For concave surface；
Wherein, the 6th lens are close to setting with the optical edge of the 7th lens；
Doubly telecentric projection lithography camera lens meets following relationship:
150mm < f1 < 400mm, 20mm < f2 < 200mm,
0.1 < f1/f < 3,0.05 < f2/f < 3,
F1 is the focal length value of front lens group, and f2 is the focal length value of rear lens group, and f is the focal length value of doubly telecentric projection lithography camera lens.
2. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: first lens, second
Lens, the third lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens, the tenth lens,
11st lens are respectively glass material.
3. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: the diaphragm size is
8mm—10mm。
4. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: the doubly telecentric projection lithography
The camera lens overall length of mirror is less than 36mm.
5. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: the doubly telecentric projection lithography
The F number of mirror is between 4-10.
6. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: first lens, second
Lens, the third lens, the 4th lens, the 5th lens, the 6th lens, the 7th lens, the 8th lens, the 9th lens, the tenth lens,
The eyeglass bore of 11st lens is respectively less than 80mm.
7. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: first lens also meet
The following conditions: 1.4 < Nd <, 1.8,50 < Vd < 70；Wherein, the Nd is optical index, and the Vd is Abbe constant；
Second lens also meet the following conditions: 1.3 < Nd <, 1.7,50 < Vd < 70；Wherein, the Nd is optical index,
The Vd is Abbe constant；
The third lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is optical index,
The Vd is Abbe constant；
4th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is optical index,
The Vd is Abbe constant；
5th lens also meet the following conditions: 1.3 < Nd <, 1.7,10 < Vd < 40；Wherein, the Nd is optical index,
The Vd is Abbe constant；
6th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is optical index,
The Vd is Abbe constant；
7th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is optical index,
The Vd is Abbe constant；
8th lens also meet the following conditions: 1.5 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is optical index,
The Vd is Abbe constant；
9th lens also meet the following conditions: 1.4 < Nd <, 1.8,50 < Vd < 80；Wherein, the Nd is optical index,
The Vd is Abbe constant；
Tenth lens also meet the following conditions: 1.4 < Nd <, 1.7,50 < Vd < 80；Wherein, the Nd is optical index,
The Vd is Abbe constant；
11st lens also meet the following conditions: 1.5 < Nd <, 1.7,20 < Vd < 40；Wherein, the Nd is anaclasis
Rate, the Vd are Abbe constant.
8. a kind of doubly telecentric projection lithography camera lens according to claim 1, it is characterised in that: the object plane of first lens
Side also meets the following conditions: 190mm < R < 220mm, the image planes side of first lens also meet the following conditions: 80mm < R <
100mm, wherein the R is radius of curvature；
The object plane side of second lens also meets the following conditions: 800mm < R < 850mm, the image planes side of second lens is also
Meet the following conditions: 80mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of the third lens also meets the following conditions: 150mm < R < 250mm, the image planes side of the third lens is also
Meet the following conditions: 150mm < R < 200mm, wherein the R is radius of curvature；
The object plane side of 4th lens also meets the following conditions: 20mm < R < 50mm, the image planes side of the 4th lens are also full
Sufficient the following conditions: 100mm < R < 150mm, wherein the R is radius of curvature；
The object plane side of 5th lens also meets the following conditions: 250mm < R < 350mm, the image planes side of the 5th lens is also
Meet the following conditions: 200mm < R < 250mm, wherein the R is radius of curvature；
The image planes side of 6th lens also meets the following conditions: 70mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of 7th lens also meets the following conditions: 70mm < R < 100mm, the image planes side of the 7th lens is also
Meet the following conditions: 70mm < R < 100mm, wherein the R is radius of curvature；
The object plane side of 8th lens also meets the following conditions: 200mm < R < 300mm, the image planes side of the 8th lens is also
Meet the following conditions: 500mm < R < 600mm, wherein the R is radius of curvature；
The object plane side of 9th lens also meets the following conditions: 80mm < R < 130mm, the image planes side of the 9th lens is also
Meet the following conditions: 100mm < R < 150mm, wherein the R is radius of curvature；
The object plane side of tenth lens also meets the following conditions: 180mm < R < 220mm, the image planes side of the tenth lens is also
Meet the following conditions: 20mm < R < 50mm, wherein the R is radius of curvature；
The image planes side of 11st lens also meets the following conditions: 30mm < R < 50mm, wherein the R is radius of curvature.
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| CN201811635995.3A CN109557641A (en) | 2018-12-29 | 2018-12-29 | A kind of doubly telecentric projection lithography camera lens |
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| CN201811635995.3A CN109557641A (en) | 2018-12-29 | 2018-12-29 | A kind of doubly telecentric projection lithography camera lens |
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| CN201811635995.3A Pending CN109557641A (en) | 2018-12-29 | 2018-12-29 | A kind of doubly telecentric projection lithography camera lens |
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| CN110196487A (en) * | 2019-06-17 | 2019-09-03 | 上海帆声图像科技有限公司 | A kind of telecentric lens |
| WO2022047981A1 (en) * | 2020-09-03 | 2022-03-10 | 诚瑞光学(深圳)有限公司 | Optical camera lens |
| CN114879303A (en) * | 2022-03-07 | 2022-08-09 | 上海大学 | Objective lens for large-section optical fiber bundle imaging system |
| CN114924396A (en) * | 2022-05-20 | 2022-08-19 | 南京华群光电技术有限公司 | Large-target-surface double-telecentric lens |
| CN114967062A (en) * | 2022-06-22 | 2022-08-30 | 浙江大学 | Large-relative-aperture wide-spectrum optical system |
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| CN110196487A (en) * | 2019-06-17 | 2019-09-03 | 上海帆声图像科技有限公司 | A kind of telecentric lens |
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| CN114967062A (en) * | 2022-06-22 | 2022-08-30 | 浙江大学 | Large-relative-aperture wide-spectrum optical system |
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