CN109557550B - Three-dimensional solid-state laser radar device and system - Google Patents

Three-dimensional solid-state laser radar device and system Download PDF

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CN109557550B
CN109557550B CN201811590013.3A CN201811590013A CN109557550B CN 109557550 B CN109557550 B CN 109557550B CN 201811590013 A CN201811590013 A CN 201811590013A CN 109557550 B CN109557550 B CN 109557550B
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light source
linear light
dimensional solid
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CN109557550A (en
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徐威
胡攀攀
楚梁
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Wuhan Wanji Information Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements

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  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention provides a three-dimensional solid-state laser radar device and a system, wherein a line light source generating module emits a line light source which is diverged in the horizontal direction, scanning of the line light source in the vertical direction is realized through an MEMS (micro electro mechanical system) vibrating mirror, reflected light is received through an area array photoelectric sensor, and the reflected light is received by corresponding line pixel groups in sequence when the line light source is scanned in the vertical direction. The three-dimensional solid-state laser radar device of this embodiment combines to constitute the surface light source of scanning through line light source and MEMS galvanometer, has satisfied the intensity requirement to the light source, receives reflected light through line pixel group simultaneously, has improved the interference killing feature of range finding, has improved the range finding precision to simple structure, the processing of being convenient for.

Description

Three-dimensional solid-state laser radar device and system
Technical Field
The invention relates to the technical field of laser radars, in particular to a three-dimensional solid-state laser radar device and a three-dimensional solid-state laser radar system.
Background
In recent years, laser detection technology has been widely used in the industrial fields of measurement, protection, unmanned driving and the like due to the advantages of high detection precision, strong environmental anti-interference capability and the like. At present, the laser radar with a large receiving field of view adopts a mechanical rotating structure, utilizes a narrow-field laser pulse light source to be matched with a flexible scanning device to scan a detected object point by point, and restores data into a distance image of a target in sequence. When three-dimensional scanning is carried out, scanning with two dimensions needs to exist, the structure is complex, the cost is high, and the resolution is not high. Therefore, solid-state radars have come into force. The all-solid-state radar has no macroscopic or microscopic moving parts inside, has self-evident advantages of durability and reliability, and conforms to the trends of solid state, miniaturization and low cost of the radar by automatic driving, so the all-solid-state radar becomes the trend of the laser radar for vehicles.
The solid-state laser radar mainly comprises an area array phased array and a FLASH solid-state radar. The area array phased array adopts a plurality of light sources to form the array, and the main light beam which is flexible in angle combination and precise and controllable can be formed by controlling the time difference of the emission of each light source, but side lobes are easy to form, the processing difficulty is high, the manufacturing process difficulty is high, and the area array phased array is still in a laboratory stage at present. The FLASH solid-state radar is divided according to scanning dimensions and can be a two-dimensional lattice FLASH and a three-dimensional area array FLASH, the invention patent CN201810227818 provides that a plurality of transmitting assemblies are spliced with light spots to be matched with one MEMS for two-dimensional scanning, the technical difficulty of realization is high, the scanning efficiency is high, and only the scanning field angle in the splicing direction is increased; the invention patent CN201711082437 proposes that array laser light sources emit light in sequence, scanning is carried out by matching with an entire column of APDs, scanning efficiency is not high, and distance measurement consistency among the light sources is difficult to guarantee.
Disclosure of Invention
The invention provides a three-dimensional solid-state laser radar device and a system, which are used for improving the ranging precision of a solid-state laser radar, and are simple in structure and convenient to process.
A first aspect of the present invention provides a three-dimensional solid-state lidar device comprising: the system comprises a linear light source generating module, an MEMS (micro-electromechanical system) galvanometer and an area array photoelectric sensor;
the linear light source generating module is at least provided with one linear light source used for emitting the linear light source diverged in the horizontal direction;
the number of the MEMS galvanometers is the same as that of the linear light sources, and the scanning of the corresponding linear light sources in the vertical direction is realized through each MEMS galvanometer;
the area array photoelectric sensor is used for receiving the reflected light of the linear light source and sequentially receiving the reflected light by corresponding row pixel groups when the linear light source scans in the vertical direction.
Further, the three-dimensional solid-state lidar device further comprises a gating unit, and the gating unit is used for sequentially gating the corresponding row pixel groups in the area array photoelectric sensor when the line light source scans in the vertical direction.
Furthermore, the number of the line light source generating modules is X, and the X is a positive integer greater than 1 and is arranged in the vertical direction;
the area array photoelectric sensor is divided into X receiving areas in the vertical direction, and each receiving area correspondingly receives the reflected light of a linear light source emitted by the linear light source generating module during scanning in the vertical direction.
Further, when each of the linear light source generating modules scans in the vertical direction, the gating unit gates the corresponding row pixel group in each of the receiving areas at the same time to receive the reflected light of the linear light source emitted by each of the linear light source generating modules.
Further, when each linear light source generating module scans in the vertical direction, each MEMS galvanometer controls the scanning angle of the adjacent linear light sources to maintain a first preset interval, so as to avoid mutual interference.
Further, the area array photosensor has m columns × n rows of pixels, each pixel covering an a ° × b ° field angle;
the linear light source is a linear and uniformly distributed strip light source, the horizontal divergence angle of the strip light source is larger than m multiplied by a degrees, and the vertical divergence angle of the strip light source is larger than b degrees; or
The linear light source is m uniformly distributed strip-shaped light source points, the horizontal divergence angle of each strip-shaped light source point is larger than a degrees, and the vertical divergence angle of each strip-shaped light source point is larger than b degrees.
Further, the linear light source is a solid laser or a semiconductor laser VCSEL which is converted into linear uniformly-distributed strip light sources or uniformly-distributed strip light source points through a binary optical component; and/or
The area array photoelectric sensor is a silicon photomultiplier SiPM array.
A second aspect of the invention provides a three-dimensional solid-state lidar system comprising a plurality of three-dimensional solid-state lidar devices as defined in the first aspect, the plurality of three-dimensional solid-state lidar devices defining a 360-degree horizontal scan field of view.
Further, adjacent three-dimensional solid-state laser radar devices have horizontal field angles which are overlapped with each other.
Further, the scanning angle of the linear light sources in the adjacent three-dimensional solid-state laser radar devices is kept at a second preset interval in the scanning process in the vertical direction, so that mutual interference is avoided.
Further, the adjacent three-dimensional solid-state laser radar devices are subjected to ranging error correction, so that the scanning results of the adjacent three-dimensional solid-state laser radar devices can be spliced conveniently.
The three-dimensional solid-state laser radar device and the system provided by the invention have the advantages that the linear light source generating module emits a linear light source which is diverged in the horizontal direction, the MEMS galvanometer is used for realizing the scanning of the linear light source in the vertical direction, the area array photoelectric sensor is used for receiving the reflected light, and the reflected light is sequentially received by the corresponding line pixel groups when the linear light source is scanned in the vertical direction. The three-dimensional solid-state laser radar device of this embodiment combines to constitute the surface light source of scanning through line light source and MEMS galvanometer, has satisfied the intensity requirement to the light source, receives reflected light through line pixel group simultaneously, has improved the interference killing feature of range finding, has improved the range finding precision to simple structure, the processing of being convenient for.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a three-dimensional solid-state radar apparatus according to an embodiment of the present invention;
fig. 2 is a schematic diagram of a line light source generating module according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a line light source generating module according to another embodiment of the invention;
fig. 4 is a schematic structural diagram of a three-dimensional solid-state radar system according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments of the present invention are only a part of the embodiments of the present invention, and not all of the embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is to be noted that, unless otherwise specified, technical or scientific terms used herein shall have the ordinary meaning as understood by those skilled in the art to which the invention pertains.
In the description of the present application, it is to be understood that the terms "center", "length", "width", "up", "down", "front", "back", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Fig. 1 is a schematic structural diagram of a three-dimensional solid-state lidar apparatus according to an embodiment of the present invention. This implementation provides a three-dimensional solid-state lidar device, three-dimensional solid-state lidar device specifically includes: the device comprises a linear light source generating module, an MEMS (micro-electromechanical systems) galvanometer and an area array photoelectric sensor.
The linear light source generating module is at least provided with one linear light source used for emitting a horizontally divergent linear light source;
the number of the MEMS galvanometers is the same as that of the linear light sources, and the scanning of the corresponding linear light sources in the vertical direction is realized through each MEMS galvanometer;
the area array photoelectric sensor is used for receiving the reflected light of the linear light source and sequentially receiving the reflected light by corresponding row pixel groups when the linear light source scans in the vertical direction.
In this embodiment, the linear light source generating modules may generate linear light sources diverging in a horizontal direction, wherein each of the linear light source generating modules may generate one linear light source, and the linear light sources may be linear and uniformly distributed stripe light sources or uniformly distributed stripe light source points.
The Micro-Electro-Mechanical System (MEMS) galvanometer integrates a Micro-optical reflector and an MEMS driver on a chip through a Micro-electronic process, and the Micro-optical reflector is driven by the MEMS driver to rotate, so that the miniaturization and the electronization of a Mechanical mechanism are realized. In this embodiment, the scanning of the linear light source in the vertical direction is realized by the MEMS galvanometer. In this embodiment, the number of the MEMS mirrors is the same as that of the linear light sources, that is, each MEMS mirror is used to scan one linear light source in the vertical direction.
The area array photoelectric sensor comprises a plurality of independent photoelectric sensors which are arranged in an array mode, and each independent photoelectric sensor forms a pixel. In this embodiment, the area array photosensor may be a silicon photomultiplier SiPM array.
As shown in fig. 1, the three-dimensional solid-state lidar device includes a linear light source generating module 11, a linear light source generating module 12, an MEMS galvanometer 21, an MEMS galvanometer 22, and an area-array photoelectric sensor 30, where the linear light source generating module 11 and the linear light source generating module 12 are arranged in a vertical direction, the MEMS galvanometer 21 is used for scanning the linear light source generating module 11 in the vertical direction, the MEMS galvanometer 22 is used for scanning the linear light source generating module 12 in the vertical direction, and the area-array photoelectric sensor 30 receives reflected light of the linear light source emitted by the linear light source generating module 11 and the linear light source generating module 12. The plurality of line light sources can scan in the vertical direction at the same time, so that the vertical field angle can be increased, and the scanning frequency can be increased.
In addition, the three-dimensional solid-state lidar device may further include a collimating device 40 and a converging device 50, where the collimating device 40 is configured to collimate the outgoing line light source, and the converging device 50 is configured to converge the reflected light.
In this embodiment, the linear light source generating module emits a linear light source diverging in the horizontal direction, and the linear light source is refracted by the MEMS galvanometer, so that the linear light source can scan at a small angle in the vertical direction when the micro-mirror of the MEMS galvanometer rotates. The reflected light is received by the area array photoelectric sensor, because the linear light source is in the horizontal direction, the area array photoelectric sensor only receives the reflected light by one or more rows of pixel groups, when the linear light source scans in the vertical direction, for example, the linear light source scans from top to bottom, the area array photoelectric sensor sequentially receives the reflected light by the corresponding row pixel groups, that is, the area array photoelectric sensor sequentially receives the reflected light by different row pixel groups from top to bottom.
The three-dimensional solid-state laser radar device of this embodiment passes through the line light source and produces the line light source that the module outgoing horizontal direction diverges, realizes the scanning of line light source in the vertical direction through the MEMS galvanometer to receive the reflected light through area array photoelectric sensor, and receive the reflected light with corresponding line pixel group in proper order when the line light source is scanning in the vertical direction. The three-dimensional solid-state laser radar device of this embodiment combines to constitute the surface light source of scanning through line light source and MEMS galvanometer, has satisfied the intensity requirement to the light source, receives reflected light through line pixel group simultaneously, has improved the interference killing feature of range finding, has improved the range finding precision to simple structure, the processing of being convenient for.
Further, as shown in fig. 1, the three-dimensional solid-state lidar device may further include a gating unit 60, where the gating unit 60 is configured to sequentially gate corresponding row pixel groups in the area-array photosensor during scanning of the linear light source in the vertical direction.
In this embodiment, when scanning in the vertical direction, the gating unit 60 gates the corresponding row pixel group in the area array photosensor every time when scanning a resolution, and the other row pixel groups do not operate, so that the false triggering of the other row pixel groups can be avoided, the interference of other external environments can be eliminated, and the precision of the three-dimensional solid-state laser radar device can be improved.
On the basis of the above embodiment, the number of the line light source generating modules is X, and the X is a positive integer greater than 1 and is arranged in the vertical direction;
the area array photoelectric sensor is divided into X receiving areas in the vertical direction, and each receiving area correspondingly receives the reflected light of a linear light source emitted by the linear light source generating module during scanning in the vertical direction.
In this embodiment, a plurality of line light source generating modules are arranged in a vertical direction, for example, two line light source generating modules are arranged in fig. 1, and can scan in the vertical direction at the same time.
Therefore, the area array photoelectric sensor is divided into a plurality of receiving areas with the same number as the linear light source generating modules in the vertical direction, each receiving area correspondingly receives the reflected light of the linear light source generating module, that is, the vertical field angle of the three-dimensional solid-state laser radar device is formed by the scanning angle ranges of the plurality of linear light sources. The plurality of receiving areas can be divided according to the scanning angle range of each line light source, and if the scanning angle ranges of the line light sources are the same, the area array photoelectric sensor is divided into the receiving areas on average.
Further, when each of the linear light source generating modules scans in the vertical direction, the gating unit gates the corresponding row pixel group in each of the receiving areas at the same time to receive the reflected light of the linear light source emitted by each of the linear light source generating modules.
In this embodiment, when each line light source scans in the vertical direction, the gating unit is required to gate the corresponding row pixel group in each receiving area, for example, when the first line light source scans from top to bottom, the gating unit gates the row pixel groups in the first receiving area from top to bottom in sequence, and when the second line light source scans from top to bottom, the gating unit also needs to gate the row pixel groups in the second receiving area from top to bottom in sequence.
Further, when each linear light source generating module scans in the vertical direction, each MEMS galvanometer controls the scanning angle of the adjacent linear light sources to maintain a first preset interval, so as to avoid mutual interference.
In this embodiment, in order to avoid interference between the plurality of linear light source generating modules during scanning in the vertical direction, the scanning angles of the adjacent linear light sources need to maintain a certain interval, and in terms of angle, the gating unit does not gate the row pixel group at the boundary between the two adjacent receiving areas at the same time (for example, the first receiving area and the second receiving area are adjacent, and the row pixel group at the lowest position of the first receiving area and the row pixel group at the highest position of the second receiving area are the row pixel group at the boundary).
On the basis of the above embodiment, the area array photosensor has m columns × n rows of pixels, each pixel covering an a ° × b ° angle of view.
In the present embodiment, the horizontal angle of view of the three-dimensional solid-state lidar device is m × a °, and the vertical angle of view is n × b °.
In an alternative example, as shown in fig. 2, the linear light source is a linear uniformly distributed strip light source, and the horizontal divergence angle of the strip light source is greater than m × a °, and the vertical divergence angle is greater than b °.
In this embodiment, the line light source is a strip light source, and the horizontal divergence angle of the strip light source is to cover a required horizontal field angle m × a °, that is, the horizontal divergence angle of the strip light source is greater than m × a °, so as to cover one row pixel group of the area array photosensor, and the row pixel group can completely receive the reflected light of the strip light source. Preferably, the vertical divergence angle of the strip-shaped light source is 1.2b °.
In another alternative example, as shown in fig. 3, the linear light source is m uniformly distributed stripe-shaped light source points, and the horizontal divergence angle of each stripe-shaped light source point is greater than a ° and the vertical divergence angle is greater than b °.
In this embodiment, the line light source is formed by m strip-shaped light source points, each strip-shaped light source point corresponds to one pixel in a row pixel group of the area array photosensor, a horizontal divergence angle of the strip-shaped light source point is greater than a °, a vertical divergence angle of the strip-shaped light source point is greater than b °, a horizontal divergence angle of the line light source formed by the strip-shaped light source points is greater than m × a °, and a required horizontal field angle m × a ° is covered, so that one row pixel group of the area array photosensor is covered, and the row pixel group can completely receive the reflected light of the strip-shaped light source. Preferably, the horizontal divergence angle of the strip-shaped light source points is 1.2a degrees, and the vertical divergence angle is 1.2b degrees.
Taking fig. 1 as an example, the area array photosensor 30 has 144 × 262 pixels, where one row pixel group has 144 row pixels, and each pixel covers a 0.17 ° × 0.17 ° field angle. That is, the angle of view of the lidar is 24.48 ° × 44.54 °.
The linear light source generating module 11 and the linear light source generating module 12 emit linear light sources with a vertical divergence angle of 0.3 degrees and a horizontal divergence angle of 25 degrees. The line light source can correspond to exactly one of the 262 row pixel groups in the area array photosensor 30.
The scanning angle range of the linear light source generation module 11 in the vertical direction is 22.27 ° by the MEMS galvanometer 21, the upper half of the area array photosensor 30 is a receiving area corresponding to the light source module 11, and includes 131 row pixel groups, and the resolution of each scanning of the MEMS galvanometer 21 is 0.085 °.
The scanning angle range of the linear light source generation module 12 in the vertical direction is 22.27 ° by the MEMS galvanometer 22, the lower half of the area array photosensor 30 is a receiving area corresponding to the light source module 12, and includes 131 row pixel groups, and the resolution of each scanning of the MEMS galvanometer 22 is 0.085 °.
On the basis of the above embodiment, the linear light source is a solid laser or a semiconductor laser VCSEL, and the linear light source or the semiconductor laser VCSEL is converted into a linear uniformly-distributed strip light source or a uniformly-distributed strip light source point through a binary optical component.
That is, in this embodiment, the line light source generating module includes a laser emitter 70 and a binary optical component 80, the laser emitter may be a solid laser or a semiconductor laser VCSEL, and the binary optical component 80 can change a point light source with gaussian intensity distribution into a linear and uniformly distributed stripe light source or a uniformly distributed stripe light source, as shown in fig. 2 and fig. 3, respectively. Of course, other linear light emitting devices are possible.
In this embodiment, the area array photosensor may be a silicon photomultiplier SiPM array.
The three-dimensional solid-state laser radar device of this embodiment passes through the line light source and produces the line light source that the module outgoing horizontal direction diverges, realizes the scanning of line light source in the vertical direction through the MEMS galvanometer to receive the reflected light through area array photoelectric sensor, and receive the reflected light with corresponding line pixel group in proper order when the line light source is scanning in the vertical direction. The three-dimensional solid-state laser radar device of this embodiment combines to constitute the surface light source of scanning through line light source and MEMS galvanometer, has satisfied the intensity requirement to the light source, receives reflected light through line pixel group simultaneously, has improved the interference killing feature of range finding, has improved the range finding precision to simple structure, the processing of being convenient for. And the plurality of line light sources can scan in the vertical direction at the same time, so that the vertical field angle can be increased, and the scanning frequency can be increased.
Fig. 4 is a schematic structural diagram of a three-dimensional solid-state lidar system according to an embodiment of the present invention. The three-dimensional solid-state lidar system comprises a plurality of three-dimensional solid-state lidar devices as described in the above embodiments, which form a 360 ° horizontal scanning field of view.
As shown in fig. 4, the three-dimensional solid-state lidar system includes 4 three-dimensional solid-state lidar devices, and the four three-dimensional solid-state lidar devices are respectively oriented to four directional arrays, that is, the three-dimensional solid-state lidar system includes 4 line light source generating modules 100, 200, 300, 400, 4 MEMS galvanometers, and 4 area array photosensors 500, 600, 700, 800 (as an illustration, the MEMS galvanometers are not drawn in fig. 4, and each three-dimensional solid-state lidar device includes only one line light source generating module), that is, a horizontal field angle of each three-dimensional solid-state lidar device is at least 90 °, and the arrays are combined to form a horizontal scanning field angle of 360 ° to form a 360 ° scanning three-dimensional solid-state lidar system. Of course, the number of the three-dimensional solid-state lidar systems is not limited to 4, and an appropriate number may be selected according to the horizontal field angle of the three-dimensional solid-state lidar, and in addition, if the three-dimensional solid-state lidar system does not need a horizontal scanning field angle of 360 °, for example, a horizontal scanning field angle of 180 °, the three-dimensional solid-state lidar system may be configured by two three-dimensional solid-state lidar devices with horizontal field angles of at least 90 °.
Further, adjacent three-dimensional solid-state laser radar devices have horizontal field angles which are overlapped with each other.
In this embodiment, since a plurality of three-dimensional solid-state lidar devices need to form a horizontal scanning field of view of 360 °, adjacent three-dimensional solid-state lidar devices have horizontal field angles overlapped with each other, so that the splicing of scanning results is facilitated, and a scanning result of 360 ° is formed. Preferably, the horizontal field angles superimposed on each other correspond to a pixel or pixels of the area array photosensor.
Specifically, the area array photosensor has 180 rows × 180 rows of pixels, where one row pixel group has 180 rows of pixel points, and each pixel covers a 0.5 ° × 0.5 ° field angle. The horizontal field angle of the superposition of the adjacent three-dimensional solid-state laser radar devices is 0.5 degrees, namely, the horizontal field angle corresponds to one pixel of the area array photoelectric sensor, and the calculation of the splicing of scanning results can be facilitated.
Further, the scanning angle of the linear light sources in the adjacent three-dimensional solid-state laser radar devices is kept at a second preset interval in the scanning process in the vertical direction, so that mutual interference is avoided.
In this embodiment, since adjacent three-dimensional solid-state lidar devices have horizontal viewing angles that overlap each other, the scanning angles of the respective line light sources are kept at a certain interval as much as possible during scanning in the vertical direction, so as to avoid mutual interference, especially for the overlapping area. The intervals of the scanning angles of the adjacent line light sources in this embodiment may be the same, and of course, may also be different.
More specifically, taking the area array photoelectric sensor with 180 columns × 180 rows of pixels as an example in the above embodiment, each of the area array photoelectric sensors can be divided into 4 sections on average, that is, four sections of columns 180 × rows (0-45), columns 180 × rows (46-90), columns 180 × rows (91-145) and columns 180 × rows (146-180).
The 4 linear light source generating modules work simultaneously, the gating unit controls the 4 MEMS galvanometers to enable the linear light sources of the linear light source generating module 100 to scan from the column 180 multiplied by the row 0 to the column 180 multiplied by the row 45, the linear light sources of the linear light source generating module 200 to scan from the column 180 multiplied by the row 46 to the column 180 multiplied by the row 90, the linear light sources of the linear light source generating module 300 to scan from the column 180 multiplied by the row 90 to the column 180 multiplied by the row 145, and the linear light sources of the linear light source generating module 400 to scan from the column 180 multiplied by the row 145 to the column 180 multiplied by the row 180, so that mutual interference is avoided.
Further, the adjacent three-dimensional solid-state laser radar devices are subjected to ranging error correction, so that the scanning results of the adjacent three-dimensional solid-state laser radar devices can be spliced conveniently.
In this embodiment, since the scanning results of the three-dimensional solid-state lidar devices need to be spliced to form a 360 ° scanning result, the ranging results of adjacent three-dimensional solid-state lidar devices need to be consistent, that is, when the three-dimensional solid-state lidar devices perform ranging on the same object, the ranging results of corresponding pixels should be the same.
The mutual superposition of the 4 linear light source generation modules and the emission field angle can cause the edges of the 4 linear light sources to respectively perform distance measurement on the adjacent edge column pixel groups corresponding to the area array photoelectric sensor: taking a first three-dimensional solid-state laser radar device and a second three-dimensional solid-state laser radar device which are adjacent as an example, 180 points generated by a first line light source generation module, a 180 th pixel point of a row pixel of a first area array photoelectric sensor and a 1 st pixel point of a second area array photoelectric sensor respectively receive ranging signals of the 180 th pixel point and the 1 st pixel point of the first area array photoelectric sensor, and a distance difference D between the two1The difference value corresponding to different columns in sequence is D2,D3,…,D180In this embodiment, the average value of the difference values may be taken
Figure BDA0001920019880000101
The method is used for eliminating the difference of different area array photoelectric sensors in imaging when the image edges are spliced.
The three-dimensional solid-state lidar system provided by the embodiment of the invention comprises a plurality of three-dimensional solid-state lidar devices according to the embodiments, and the implementation principle and the technical effect of each three-dimensional solid-state lidar device can be seen in the embodiments, and are not described herein again.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (8)

1. A three-dimensional solid-state lidar device, comprising: the system comprises a linear light source generating module, an MEMS (micro-electromechanical system) galvanometer and an area array photoelectric sensor;
the linear light source generating module is at least provided with one linear light source used for emitting the linear light source diverged in the horizontal direction;
the number of the MEMS galvanometers is the same as that of the linear light sources, and the scanning of the corresponding linear light sources in the vertical direction is realized through each MEMS galvanometer;
the area array photoelectric sensor is used for receiving the reflected light of the linear light source and sequentially receiving the reflected light by corresponding row pixel groups when the linear light source scans in the vertical direction;
when each linear light source generating module scans in the vertical direction, each MEMS galvanometer controls the scanning angle of the adjacent linear light sources to keep a first preset interval so as to avoid mutual interference;
the device comprises a linear light source, a gating unit and a control unit, wherein the gating unit is used for sequentially gating corresponding row pixel groups in the area array photoelectric sensor when the linear light source scans in the vertical direction;
the line light source generating modules are arranged in X numbers and are arranged in the vertical direction, wherein X is a positive integer greater than 1;
the area array photoelectric sensor is divided into X receiving areas in the vertical direction, and each receiving area correspondingly receives the reflected light of a linear light source emitted by the linear light source generating module during scanning in the vertical direction.
2. The three-dimensional solid-state lidar device of claim 1,
when each linear light source generating module scans in the vertical direction, the gating unit gates the corresponding row pixel group in each receiving area at the same time so as to receive the reflected light of the linear light source emitted by each linear light source generating module.
3. The three-dimensional solid-state lidar device according to claim 1 or 2,
the area array photoelectric sensor is provided with m columns multiplied by n rows of pixels, and each pixel covers a degree of field angle of a degree multiplied by b degrees;
the linear light source is a linear and uniformly distributed strip light source, the horizontal divergence angle of the strip light source is larger than m multiplied by a degrees, and the vertical divergence angle of the strip light source is larger than b degrees; or
The linear light source is m uniformly distributed strip-shaped light source points, the horizontal divergence angle of each strip-shaped light source point is larger than a degrees, and the vertical divergence angle of each strip-shaped light source point is larger than b degrees.
4. The three-dimensional solid-state lidar device according to claim 1 or 2,
the linear light source is a solid laser or a VCSEL (vertical cavity surface emitting laser) which is converted into linear uniformly-distributed strip light sources or uniformly-distributed strip light source points through a binary optical component; and/or
The area array photoelectric sensor is a silicon photomultiplier SiPM array.
5. A three-dimensional solid-state lidar system comprising a plurality of the three-dimensional solid-state lidar devices of any of claims 1-4, wherein the plurality of the three-dimensional solid-state lidar devices define a 360 degree horizontal scan field of view.
6. The three-dimensional solid-state lidar system of claim 5,
and the adjacent three-dimensional solid-state laser radar devices have horizontal field angles which are superposed with each other.
7. The three-dimensional solid-state lidar system according to claim 5 or 6,
and the scanning angle of the linear light sources in the adjacent three-dimensional solid-state laser radar devices keeps a second preset interval in the scanning process in the vertical direction so as to avoid mutual interference.
8. The three-dimensional solid-state lidar system of claim 6,
and the adjacent three-dimensional solid-state laser radar devices are subjected to ranging error correction so as to realize the splicing of the scanning results of the adjacent three-dimensional solid-state laser radar devices.
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