CN109557151A - The manufacturing method of sensing unit based on ceramic co-fired technique, the electrochemical gas sensor containing the sensing unit and sensing unit - Google Patents
The manufacturing method of sensing unit based on ceramic co-fired technique, the electrochemical gas sensor containing the sensing unit and sensing unit Download PDFInfo
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Abstract
The manufacturing method of sensing unit based on ceramic co-fired technique, the electrochemical gas sensor containing the sensing unit and sensing unit, is related to electrochemical gas sensor field.It is difficult using the method for conventionally manufactured electrochemical gas sensor in order to solve the problems, such as.Based on the sensing unit of ceramic co-fired technique, electrode layer, electrolytic cell layer, auxiliary electrode layer and extraction layer are from top to bottom cascading；First electrolytic cell through-hole and the second electrolytic cell through-hole constitute electrolysis cell cavity, the electrical connection of the conductive metal of catalysis electrode and the first via hole, the conductive metal of electrode and third via hole is electrically connected, it is electrically connected between first via hole, the second via hole and the 4th hole-through conductive metal, the conductive metal of the electrical connection of the conductive metal of first exit and the 4th via hole, the second exit and third via hole is electrically connected.The present invention realizes variety classes gas detection by injecting different types of electrolyte, different catalytic electrode materials etc..
Description
Technical field
The invention belongs to electrochemical gas sensor technical fields.
Background technique
Electrochemical gas sensor has many advantages, such as that low in energy consumption, output stabilization is widely used in industrial environment, air matter because of it
The detection of the gas concentrations such as amount, closed environment, the CITY company of Britain, FIGARO company, Japan, RAE company, the U.S. etc. are that the world is known
The electrochemical gas sensor manufacturer of name, product cover the detection of tens kinds of gas concentrations, almost occupy world's electricity
Sensor of chemical gas field whole market.
Currently, electrochemical gas sensor is all made of traditional handicraft manufacture, there are manufacturing method difficulty, structure is complicated, body
The big problem of product, it is difficult to realize electrochemical sensor miniaturization, integrated design and manufacture, limit electrochemical gas sensor
Further development.
Summary of the invention
The present invention is to solve the method difficulty using conventionally manufactured electrochemical gas sensor, and the electrification produced
Gas sensor configuration complexity, bulky problem are learned, the sensing unit based on ceramic co-fired technique is now provided, contains the sensing
The electrochemical gas sensor of unit and the manufacturing method of sensing unit.
Sensing unit based on ceramic co-fired technique, comprising: electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and draw
Layer 4 out,
First through hole 1-3, the first electrolytic cell through-hole 1-4, the second through-hole 1-5 are provided on the ceramic substrate of electrode layer 1
It is closed at the first electrolytic cell through-hole 1-4 upper opening to be covered with catalysis electrode 1-2 with the first via hole 1-6, catalysis electrode 1-2's
Upper surface is closed to be covered with ventilated membrane 1-1；It is logical that the second electrolytic cell through-hole 2-1, third are provided on the ceramic substrate of electrolytic cell layer 2
Hole 2-2, fourth hole 2-3 and the second via hole 2-4；Third via hole 3-2 and the 4th mistake are provided on the ceramic substrate of auxiliary electrode layer 3
The ceramic substrate upper surface of hole 3-3, auxiliary electrode layer 3 are equipped with to electrode 3-1；The ceramic substrate for drawing layer 4 is equipped with first and draws
Outlet 4-1 and the second exit 4-2；
Electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and extraction layer 4 are from top to bottom cascading；First electricity
It solves pond through-hole 1-4 and the second electrolytic cell through-hole 2-1 face and is interconnected, collectively forms electrolysis cell cavity, which is used for
Porous carrier is filled, porous carrier is located at the underface of electrolysis cell cavity to electrode 3-1 for containing electrolyte；Second through-hole 1-
5, third through-hole 2-2, the second electrolytic cell through-hole 2-1, fourth hole 2-3 and first through hole 1-3 are sequentially communicated, and collectively form liquid
Flow channel；
It is filled with conductive metal in first via hole 1-6, the second via hole 2-4, the 4th via hole 3-3 and third via hole 3-2, urges
Polarizing electrode 1-2 is electrically connected by the conductive metal of lead and the first via hole 1-6, passes through lead and third via hole to electrode 3-1
The conductive metal of 3-2 is electrically connected, the first via hole 1-6, the second via hole 2-4 and the 4th via hole 3-3 is interconnected and conductive metal
Between be electrically connected, the electrical connection of the conductive metal of the first exit 4-1 and the 4th via hole 3-3, the second exit 4-2 and the
The conductive metal of three via hole 3-2 is electrically connected.
In the above-mentioned sensing unit based on ceramic co-fired technique, the ceramic substrate upper surface of auxiliary electrode layer 3 is additionally provided with ginseng
Than electrode 3-4, the 5th via hole 3-5 is also provided on the ceramic substrate of auxiliary electrode layer 3, the 5th via hole 3-5's is interior filled with conduction
Metal；It draws and is additionally provided with third exit 4-3 on the ceramic substrate of layer 4；
Reference electrode 3-4 is the ring structure with opening, is coaxially located in the ring of reference electrode 3-4 to electrode 3-1；
Reference electrode 3-4 is by the conductive metal electrical connection of lead and the 5th via hole 3-5, third exit 4-3 and the
The conductive metal of five via hole 3-5 is electrically connected.
Above-mentioned electrolyte is organic electrolyte, inorganic electrolyte liquid or ion electrolyte.
The material of above-mentioned catalysis electrode 1-2 is noble metal, metal oxide or metal composite.
Electrochemical gas sensor containing above-mentioned sensing unit, including the total based on ceramics of multiple rectangular arrays arrangement
The sensing unit of firing technique.
The manufacturing method of above-mentioned sensing unit, comprising the following steps:
Step 1: first through hole 1-3, first are prepared on the ceramic substrate of electrode layer 1 respectively using punching techniques
It is logical to prepare the second electrolytic cell on the ceramic substrate of electrolytic cell layer 2 by electrolytic cell through-hole 1-4, the second through-hole 1-5 and the first via hole 1-6
Hole 2-1, third through-hole 2-2, fourth hole 2-3 and the second via hole 2-4 prepare third mistake on the ceramic substrate of auxiliary electrode layer 3
Hole 3-2 and the 4th via hole 3-3；
Using silk screen print method respectively in the first via hole 1-6, the second via hole 2-4, third via hole 3-2 and the 4th via hole 3-3
Interior printing conductive metal；
Lead is printed in the ceramic substrate upper surface of electrode layer 1 respectively using silk screen print method, in auxiliary electrode layer 3
The printing of ceramic substrate upper surface to electrode 3-1 and lead, print the first exit 4- in the ceramic substrate upper surface for drawing layer 4
The 1 and second exit 4-2；
Step 2: electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and extraction layer 4 are stacked gradually and arranges and leads to
Crossing isostatic pressing technology combines adjacent two-layer ceramic substrate, so that electrode layer 1, electrolytic cell layer 2,3 and of auxiliary electrode layer
Layer 4 is drawn in integral structure, the first electrolytic cell through-hole 1-4 and the second electrolytic cell through-hole 2-1 face and is interconnected, collectively forms
Be electrolysed cell cavity, the second through-hole 1-5, third through-hole 2-2, the second electrolytic cell through-hole 2-1, fourth hole 2-3 and first through hole 1-3 according to
Secondary connection, collectively forms liquid flow path, and the first via hole 1-6, the second via hole 2-4 and the 4th via hole 3-3 are interconnected and lead
It is electrically connected between electric metal, the conductive metal electrical connection of the first exit 4-1 and the 4th via hole 3-3, the second exit 4-2
It is electrically connected with the conductive metal of third via hole 3-2；
Step 3: in the intracavitary filling porous carrier slurry of electrolytic cell and by sintering technology porous carrier slurry is burnt
Become the porous carrier with electrolysis cell cavity in integral structure；
Step 4: using silk screen print method, catalysis electrode 1-2 is printed on surface on porous support, and by catalysis electrode 1-2
It is sintered into one structure with porous carrier；
Step 5: injecting electrolyte into liquid flow path using hole filling technology, then with glue by the second through-hole 1-5 and
First through hole 1-3 sealing；
Ventilated membrane 1-1: being covered on the upper surface of catalysis electrode 1-2 by step 6, and blend compounds fix ventilated membrane 1-1, complete
At the manufacture of sensing unit.
Further, in step 1 further include:
The 5th via hole 3-5 is prepared on the ceramic substrate of auxiliary electrode layer 3 using punching techniques,
Reference electrode 3-4, the reference electrode are printed in the ceramic substrate upper surface of auxiliary electrode layer 3 using silk screen print method
3-4 is the ring structure with opening, is coaxially located in the ring of reference electrode 3-4 to electrode 3-1,
Reference electrode 3-4 is electrically connected by the conductive metal of lead and the 5th via hole 3-5.
Further, in step 2, the conductive metal of third exit 4-3 and the 5th via hole 3-5 are electrically connected.
The present invention has the advantages that
Based on the sensing unit of ceramic co-fired technique, including electrode layer, electrolytic cell layer, auxiliary electrode layer and extraction
Layer makes electrolyte flow channel in electrode layer and electrolytic cell layer, the injection of electrolyte is realized, using selective ventilated membrane
Closed covering catalysis electrode.Structure is simple, size is small, by injecting different types of electrolyte, different catalytic electrode materials
Deng realization variety classes gas detection.
The manufacturing method of sensing unit is designed and is manufactured, ceramic co-fired technology master based on ceramic co-fired technology
Include curtain coating, punching, silk-screen printing, lamination, etc. static pressure, cutting, sintering etc., manufacturing process is mature, is easily achieved sensing
The mass production of device, batch consistency, repeatability improve, and are easier to realize the Integration Design production of sensor.
Detailed description of the invention
Fig. 1 is each layer scattering structural representation of the sensing unit based on ceramic co-fired technique described in specific embodiment one
Figure；
Fig. 2 is structural representation when multiple sensing unit rectangular arrays are arranged on substrate in specific embodiment two
Figure.
Specific embodiment
Specific embodiment 1: present embodiment is illustrated referring to Fig.1, based on ceramic co-fired described in present embodiment
The sensing unit of technique, comprising: electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and extraction layer 4,
First through hole 1-3, the first electrolytic cell through-hole 1-4, the second through-hole 1-5 are provided on the ceramic substrate of electrode layer 1
It is closed at the first electrolytic cell through-hole 1-4 upper opening to be covered with catalysis electrode 1-2 with the first via hole 1-6, catalysis electrode 1-2's
Upper surface is closed to be covered with ventilated membrane 1-1, and the material of the catalysis electrode 1-2 is that noble metal, metal oxide or metal are multiple
Close object；
Be provided on the ceramic substrate of electrolytic cell layer 2 second electrolytic cell through-hole 2-1, third through-hole 2-2, fourth hole 2-3 and
Second via hole 2-4；
It is provided with third via hole 3-2, the 4th via hole 3-3 and the 5th via hole 3-5 on the ceramic substrate of auxiliary electrode layer 3, assists
It is the annular with opening that the ceramic substrate upper surface of electrode layer 3, which is equipped with to electrode 3-1 and reference electrode 3-4, reference electrode 3-4,
Structure is coaxially located at electrode 3-1 in the ring of reference electrode 3-4；
The ceramic substrate for drawing layer 4 is equipped with the first exit 4-1, the second exit 4-2 and third exit 4-3；
Electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and extraction layer 4 are from top to bottom cascading；
It first electrolytic cell through-hole 1-4 and the second electrolytic cell through-hole 2-1 face and is interconnected, collectively forms electrolysis cell cavity,
For the electrolysis cell cavity for filling porous carrier, porous carrier is for containing electrolyte, additionally it is possible to be used to support and be covered on electrolytic cell
Catalysis electrode 1-2 on chamber, the electrolyte are organic electrolyte, inorganic electrolyte liquid or ion electrolyte, are located to electrode 3-1
It is electrolysed the underface of cell cavity；
Second through-hole 1-5, third through-hole 2-2, the second electrolytic cell through-hole 2-1, fourth hole 2-3 and first through hole 1-3 according to
Secondary connection, collectively forms liquid flow path；
Filling is set in first via hole 1-6, the second via hole 2-4, the 4th via hole 3-3, third via hole 3-2 and the 5th via hole 3-5
There is conductive metal, catalysis electrode 1-2 is electrically connected by the conductive metal of lead and the first via hole 1-6, to electrode 3-1 by drawing
The conductive metal of line and third via hole 3-2 are electrically connected, and the first via hole 1-6, the second via hole 2-4 and the 4th via hole 3-3 phase interconnect
It is electrically connected between logical and conductive metal, the conductive metal electrical connection of the first exit 4-1 and the 4th via hole 3-3, second draws
The conductive metal of outlet 4-2 and third via hole 3-2 is electrically connected, the conductive metal electricity of third exit 4-3 and the 5th via hole 3-5
Gas connection, reference electrode 3-4 are electrically connected by the conductive metal of lead and the 5th via hole 3-5.
Present embodiment is in practical application, be injected into liquid by the second through-hole 1-5 or first through hole 1-3 for electrolyte
In flow channel and ooze in porous carrier, realizes more empty carriers to the splendid attire of electrolyte.Then with glue to first through hole 1-3
It is sealed with the second through-hole 1-5.Different types of electrolyte can complete different types of electrochemical sensor production.
Catalysis electrode 1-2 is for perceiving object gas and generating corresponding signal, it may be assumed that gas can be spread by ventilated membrane 1-1
To the surface catalysis electrode 1-2, chemical reaction occurs with catalysis electrode 1-2 and generates electric signal.Catalysis electrode 1-2 passes through lead and the
One via hole 1-6, the second via hole 2-4, the 4th via hole 3-3 are sequentially communicated, and finally draw electric signal via the first exit 4-1.And
And the catalysis electrode 1-2 of different materials can complete the selective catalysis to variety classes gas.
The indentation, there of reference electrode 3-4 is for the output to electrode 3-1 signal.In two electrode electro Chemical systems without ginseng
Than electrode 3-4, present embodiment is suitable for other situations except two electrode electro Chemical systems.Layer 4 is drawn to believe for overall structure
Number output and input.
Specific embodiment 2: illustrating present embodiment referring to Fig. 2, contain specific implementation described in present embodiment
The electrochemical gas sensor of sensing unit described in mode one, including the arrangement of multiple rectangular arrays based on ceramic co-fired work
The sensing unit of skill.
In present embodiment, each sensing unit passes through immobilized different types of electrolyte and printing variety classes catalysis electricity
The catalysis electrode of pole material realizes the preparation of multiple gases sensor.
Specific embodiment 3: present embodiment is the manufacturing method of sensing unit described in specific embodiment one, packet
Include following steps:
Step 1: first through hole 1-3, first are prepared on the ceramic substrate of electrode layer 1 respectively using punching techniques
It is logical to prepare the second electrolytic cell on the ceramic substrate of electrolytic cell layer 2 by electrolytic cell through-hole 1-4, the second through-hole 1-5 and the first via hole 1-6
Hole 2-1, third through-hole 2-2, fourth hole 2-3 and the second via hole 2-4 prepare third mistake on the ceramic substrate of auxiliary electrode layer 3
Hole 3-2, the 4th via hole 3-3 and the 5th via hole 3-5；
Using silk screen print method respectively the first via hole 1-6, the second via hole 2-4, third via hole 3-2, the 4th via hole 3-3 and
Conductive metal is printed in 5th via hole 3-5；
Lead is printed in the ceramic substrate upper surface of electrode layer 1 respectively using silk screen print method, in auxiliary electrode layer 3
The printing of ceramic substrate upper surface to electrode 3-1, reference electrode 3-4 and lead, printed in the ceramic substrate upper surface for drawing layer 4
First exit 4-1 and the second exit 4-2, the reference electrode 3-4 is the ring structure with opening, same to electrode 3-1
Axle position is in the ring of reference electrode 3-4；
Step 2: electrode layer 1, electrolytic cell layer 2, auxiliary electrode layer 3 and extraction layer 4 are stacked gradually and arranges and leads to
Crossing isostatic pressing technology combines adjacent two-layer ceramic substrate, so that electrode layer 1, electrolytic cell layer 2,3 and of auxiliary electrode layer
Layer 4 is drawn in integral structure, the first electrolytic cell through-hole 1-4 and the second electrolytic cell through-hole 2-1 face and is interconnected, collectively forms
Be electrolysed cell cavity, the second through-hole 1-5, third through-hole 2-2, the second electrolytic cell through-hole 2-1, fourth hole 2-3 and first through hole 1-3 according to
Secondary connection, collectively forms liquid flow path, and the first via hole 1-6, the second via hole 2-4 and the 4th via hole 3-3 are interconnected and lead
It is electrically connected between electric metal, the conductive metal electrical connection of the first exit 4-1 and the 4th via hole 3-3, the second exit 4-2
It is electrically connected with the conductive metal of third via hole 3-2, reference electrode 3-4 passes through the conductive metal of lead and the 5th via hole 3-5 electricity
The conductive metal of gas connection, third exit 4-3 and the 5th via hole 3-5 are electrically connected, and production reference electrode 3-4 forms electrochemistry
The three-electrode system of gas sensor；
Step 3: in the intracavitary filling porous carrier slurry of electrolytic cell and by sintering technology porous carrier slurry is burnt
Become the porous carrier with electrolysis cell cavity in integral structure；
Step 4: using silk screen print method, catalysis electrode 1-2 is printed on surface on porous support, and by catalysis electrode (1-
2) be sintered into one structure with porous carrier；
Step 5: injecting electrolyte into liquid flow path using hole filling technology, then with glue by the second through-hole 1-5 and
First through hole 1-3 sealing；
Ventilated membrane 1-1: being covered on the upper surface of catalysis electrode 1-2 by step 6, and blend compounds fix ventilated membrane 1-1；
In practical application, be that multiple groups via hole, through-hole and electrolytic cell hole are prepared on one piece of big substrate in step 1,
Every group of via hole, through-hole and electrolytic cell hole can constitute a sensing unit, therefore by step 6, can prepare on one piece of substrate
Obtain multiple sensing units.So further including step 7 in the present embodiment, it may be assumed that dicing technique is utilized, it will be on substrate
Multiple sensing units carry out cutting separation, obtain single sensing unit, complete the manufacture of sensing unit.
The sensing unit produced by the above process contains different types of electrolyte by selection and prints not of the same race
The catalytic electrode material of class realizes perception and identification to gas with various.
Technical process used by present embodiment mainly includes punching technology, silk-screen printing technique, lamination process, cutting
Ceramic co-fired technology including technique etc. has simple process, technology maturation, at low cost, the features such as can be mass, obtains
The sensor and sensing unit arrived has steady performance.It can be applied to the rings such as closed environment, atmospheric environment, underground pipe gallery
Border gas detection.
Claims (8)
1. the sensing unit based on ceramic co-fired technique characterized by comprising electrode layer (1), electrolytic cell layer (2), auxiliary
It helps electrode layer (3) and draws layer (4),
First through hole (1-3), the first electrolytic cell through-hole (1-4), the second through-hole are provided on the ceramic substrate of electrode layer (1)
(1-5) and the first via hole (1-6), it is closed at first electrolytic cell through-hole (1-4) upper opening to be covered with catalysis electrode (1-2), it urges
The upper surface of polarizing electrode (1-2) is closed to be covered with ventilated membrane (1-1)；The second electricity is provided on the ceramic substrate of electrolytic cell layer (2)
Solve Chi Tongkong (2-1), third through-hole (2-2), fourth hole (2-3) and the second via hole (2-4)；The ceramics of auxiliary electrode layer (3)
Third via hole (3-2) and the 4th via hole (3-3) are provided on substrate, the ceramic substrate upper surface of auxiliary electrode layer (3) is equipped with to electricity
Pole (3-1)；The ceramic substrate for drawing layer (4) is equipped with the first exit (4-1) and the second exit (4-2)；
Electrode layer (1), electrolytic cell layer (2), auxiliary electrode layer (3) and extraction layer (4) are from top to bottom cascading；The
It one electrolytic cell through-hole (1-4) and the second electrolytic cell through-hole (2-1) face and is interconnected, collectively forms electrolysis cell cavity, the electrolysis
For cell cavity for filling porous carrier, porous carrier is located at the underface of electrolysis cell cavity to electrode (3-1) for containing electrolyte；
Second through-hole (1-5), third through-hole (2-2), the second electrolytic cell through-hole (2-1), fourth hole (2-3) and first through hole (1-3)
It is sequentially communicated, collectively forms liquid flow path；
Conductive gold is filled in first via hole (1-6), the second via hole (2-4), the 4th via hole (3-3) and third via hole (3-2)
Belong to, catalysis electrode (1-2) is electrically connected by the conductive metal of lead and the first via hole (1-6), passes through lead to electrode (3-1)
It is electrically connected with the conductive metal of third via hole (3-2), the first via hole (1-6), the second via hole (2-4) and the 4th via hole (3-3)
It is interconnected and is electrically connected between conductive metal, the first exit (4-1) and the conductive metal of the 4th via hole (3-3) are electrical
Connection, the conductive metal electrical connection of the second exit (4-2) and third via hole (3-2).
2. the sensing unit according to claim 1 based on ceramic co-fired technique, which is characterized in that auxiliary electrode layer (3)
Ceramic substrate upper surface be additionally provided with reference electrode (3-4), be also provided with the 5th via hole on the ceramic substrate of auxiliary electrode layer (3)
(3-5), the interior of the 5th via hole (3-5) are filled with conductive metal；It draws and is additionally provided with third exit on the ceramic substrate of layer (4)
(4-3)；
Reference electrode (3-4) is the ring structure with opening, is coaxially located in the ring of reference electrode (3-4) to electrode (3-1)；
Reference electrode (3-4) is electrically connected by the conductive metal of lead and the 5th via hole (3-5), third exit (4-3) and
The conductive metal of 5th via hole (3-5) is electrically connected.
3. the sensing unit according to claim 1 or 2 based on ceramic co-fired technique, which is characterized in that electrolyte is to have
Machine electrolyte, inorganic electrolyte liquid or ion electrolyte.
4. the sensing unit according to claim 1 or 2 based on ceramic co-fired technique, which is characterized in that catalysis electrode (1-
2) material is noble metal, metal oxide or metal composite.
5. containing the electrochemical gas sensor of sensing unit of any of claims 1 or 2, which is characterized in that be in including multiple
The sensing unit based on ceramic co-fired technique of rectangular array arrangement.
6. the manufacturing method of sensing unit described in claim 1, which comprises the following steps:
Step 1: first through hole (1-3), first are prepared on the ceramic substrate of electrode layer (1) respectively using punching techniques
Electrolytic cell through-hole (1-4), the second through-hole (1-5) and the first via hole (1-6) prepare second on the ceramic substrate of electrolytic cell layer (2)
Electrolytic cell through-hole (2-1), third through-hole (2-2), fourth hole (2-3) and the second via hole (2-4), the pottery of auxiliary electrode layer (3)
Third via hole (3-2) and the 4th via hole (3-3) are prepared on ceramic chip；
Using silk screen print method respectively in the first via hole (1-6), the second via hole (2-4), third via hole (3-2) and the 4th via hole
Conductive metal is printed in (3-3)；
Lead is printed in the ceramic substrate upper surface of electrode layer (1) respectively using silk screen print method, in auxiliary electrode layer (3)
The printing of ceramic substrate upper surface to electrode (3-1) and lead, drawn in the ceramic substrate upper surface printing first for drawing layer (4)
Hold (4-1) and the second exit (4-2)；
Step 2: by electrode layer (1), electrolytic cell layer (2), auxiliary electrode layer (3) and draw layer (4) stack gradually arrangement,
And adjacent two-layer ceramic substrate is combined by isostatic pressing technology, so that electrode layer (1), electrolytic cell layer (2), auxiliary electricity
Pole layer (3) and extraction layer (4) are in integral structure, the first electrolytic cell through-hole (1-4) and the second electrolytic cell through-hole (2-1) face and phase
It is intercommunicated, collectively form electrolysis cell cavity, the second through-hole (1-5), third through-hole (2-2), the second electrolytic cell through-hole (2-1), the 4th
Through-hole (2-3) and first through hole (1-3) are sequentially communicated, and collectively form liquid flow path, the first via hole (1-6), the second via hole
(2-4) and the 4th via hole (3-3) are interconnected and are electrically connected between conductive metal, the first exit (4-1) and the 4th via hole
The conductive metal of (3-3) is electrically connected, and the conductive metal of the second exit (4-2) and third via hole (3-2) are electrically connected；
Step 3: in the intracavitary filling porous carrier slurry of electrolytic cell and by sintering technology porous carrier slurry is sintered to
It is in the porous carrier of integral structure with electrolysis cell cavity；
Step 4: using silk screen print method surface printing catalysis electrode (1-2) on porous support, and by catalysis electrode (1-2)
It is sintered into one structure with porous carrier；
Step 5: injecting electrolyte into liquid flow path using hole filling technology, then with glue by the second through-hole (1-5) and
One through-hole (1-3) sealing；
Ventilated membrane (1-1): being covered on the upper surface of catalysis electrode (1-2) by step 6, and blend compounds are fixed by ventilated membrane (1-1),
Complete the manufacture of sensing unit.
7. manufacturing method according to claim 6, which is characterized in that in step 1 further include:
The 5th via hole (3-5) is prepared on the ceramic substrate of auxiliary electrode layer (3) using punching techniques,
Reference electrode (3-4) is printed in the ceramic substrate upper surface of auxiliary electrode layer (3) using silk screen print method, the reference electrode
(3-4) is the ring structure with opening, is coaxially located in the ring of reference electrode (3-4) to electrode (3-1),
Reference electrode (3-4) is electrically connected by the conductive metal of lead and the 5th via hole (3-5).
8. manufacturing method according to claim 7, which is characterized in that in step 2, third exit (4-3) and the 5th mistake
The conductive metal in hole (3-5) is electrically connected.
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