CN109530628B - Supersonic nozzle manufacturing method for generating cluster beams - Google Patents
Supersonic nozzle manufacturing method for generating cluster beams Download PDFInfo
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- CN109530628B CN109530628B CN201811492925.7A CN201811492925A CN109530628B CN 109530628 B CN109530628 B CN 109530628B CN 201811492925 A CN201811492925 A CN 201811492925A CN 109530628 B CN109530628 B CN 109530628B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22C—FOUNDRY MOULDING
- B22C9/00—Moulds or cores; Moulding processes
- B22C9/22—Moulds for peculiarly-shaped castings
- B22C9/24—Moulds for peculiarly-shaped castings for hollow articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/04—Influencing the temperature of the metal, e.g. by heating or cooling the mould
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Abstract
The invention provides a supersonic nozzle manufacturing method for generating cluster beams, which is characterized in that a bottom plate with a cone on the top surface is arranged on a heating plate, a mould cylinder with a cylindrical inner cavity coaxial with the cone is arranged on the cone of the bottom plate, fusible metal is filled into the inner cavity of the mould cylinder, the heating plate is heated to melt the fusible metal into fusible metal melt, a metal needle mold is immersed into the fusible metal melt, the metal needle mold, the bottom plate and the mould cylinder are sequentially cooled to the room temperature to crystallize metal melt, and the metal needle mold and the bottom plate are taken out from the mould cylinder to finish the nozzle manufacturing. The method has the advantages of low cost, short time consumption, simple and convenient operation and high precision, the inner surface of the formed nozzle is clean and polished, the aperture can reach 0.02mm, and the shapes or the sizes of the die cylinder, the bottom plate and the metal needle and the types of the fusible metals can be changed according to requirements to form the supersonic nozzle with any ideal geometric shape and material, thereby meeting the requirements of various cluster forming technologies.
Description
Technical Field
The invention relates to a method for manufacturing a supersonic nozzle for generating cluster beams, and belongs to the technical field of cluster ion beams.
Background
The supersonic nozzle is a core component of the ion source device, plays a role in lifting, and the geometrical shape of the supersonic nozzle determines cluster size, beam density, spatial distribution, beam temperature, cluster forming efficiency and the like. Becker et al first proposed using a supersonic nozzle to cluster high pressure gas or compounds, typically with a source pressure of 4-20 bar and a nozzle aperture of 0.1-0.2 mm. The basic process of cluster formation is that a high pressure source gas enters a vacuum through a small hole of a nozzle, adiabatically expands and cools, the adiabatic expansion reduces the relative velocity of the gas atoms, thereby forming clusters, the cooling first results in the supersaturation of the gas, and then the gas condenses and compresses into clusters. All these processes take place at a distance of a few millimetres from the nozzle orifice, so that care needs to be taken especially in the production of the clusters, where the nozzle is located.
There are various nozzles for generating cluster ion beams, and the cone nozzle and the laval nozzle are two kinds of nozzles having the best effect, and both belong to the convergent-divergent supersonic nozzle. Laval nozzles are more suitable for forming a directed parallel gas stream, whereas conical nozzles are used for producing a diverging gas stream. However, the laval nozzle has a more versatile application because of its complex (parabolic) cross-sectional geometry and greater manufacturing difficulties than the conical nozzle.
There are two methods of fabrication currently used for nozzles for generating gas-cluster ion beams. A heating-drawing method, i.e. blowing method, uses quartz glass tube as raw material, heats the quartz glass by hydrogen flame, draws and blows the quartz tube, the heating-softened part of the quartz tube becomes thin in the drawing process, and the small hole of the nozzle is formed after annealing. The method is simple to operate, and the quartz nozzle produced is still chemically inert to the reaction gases, but has low repeatability and low accuracy, making it difficult to form a nozzle of the desired diameter (0.1 mm). In addition, it is difficult to control the geometry of the diverging portion of the quartz nozzle, and it is difficult to form the nozzle with the axis of the orifice and the diverging portion strictly parallel, which tends to affect the alignment of the nozzle with the axis in the vacuum chamber, and greatly affects the alignment of the ion beam.
Another method is mechanical drilling (laser drilling or spark drilling may also be used) which is commonly used to make metal nozzles. Although this method allows the manufacture of nozzles with high precision and repeatability, it requires very precise equipment and high spatial precision, is costly and complicated to operate.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a manufacturing method of a supersonic speed nozzle for generating cluster beams, which is characterized in that a nozzle is formed by heating, melting and rapidly cooling and forming a fusible metal in a cylindrical composite mold. The supersonic nozzle manufacturing method for generating cluster beams provided by the invention has the advantages of low cost, short time consumption, simple and convenient operation and high accuracy, and the formed supersonic nozzle can have any ideal geometric shape and meets the requirements of various cluster forming technologies.
The technical scheme adopted by the invention for solving the technical problem is as follows: a supersonic nozzle fabrication method for generating a cluster beam is provided, comprising the steps of:
(1) a bottom plate with a cone on the top surface is arranged on the heating plate;
(2) a die cylinder with a cylindrical inner cavity and coaxial with the cone is placed on the cone of the bottom plate, and the inner diameter of the die cylinder is larger than or equal to the diameter of the cone on the bottom plate;
(3) filling a cavity of the mold cylinder with fusible metal;
(4) heating the heating plate to melt the fusible metal into a fusible metal melt in the inner cavity of the die cylinder;
(5) immersing a metal needle die into the fusible metal melt, wherein the metal needle die comprises a sealing cover for sealing the inner cavity of the die cylinder and a needle part below the sealing cover; the top point of the needle part is tightly attached to the top end of the upper cone of the bottom plate, and the needle part is coaxial with the upper cone of the bottom plate;
(6) cooling the metal needle mold, the bottom plate and the mold cylinder to room temperature in sequence to crystallize the metal melt;
(7) and (4) taking the metal needle die and the bottom plate out of the die cylinder to finish the manufacture of the nozzle.
The fusible metal is metal or alloy with a melting point of 100-400 ℃.
The die cylinder, the bottom plate and the metal needle are made of materials which have no affinity with fusible metals.
And (5) the needle part is conical, or the outline of the longitudinal section of the needle part is parabolic conical.
And (5) a grabbing part is arranged above the sealing cover of the metal needle mold.
The step (6) specifically comprises the following steps:
(6-1) pouring normal-temperature water to the upper surface of the metal needle mold at a speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 2-5 seconds, and a divergent part of the nozzle is formed;
(6-2) pouring normal-temperature water into the bottom plate at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 4-8 seconds, and a convergence part of the nozzle is formed;
(6-3) pouring normal-temperature water onto the cylindrical mold at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 10-15 seconds, so that the fusible metal melt is fully crystallized until the temperature is cooled to 50 ℃.
The meltable metal is tin-lead solder, and the die cylinder, the bottom plate and the metal needle are made of aluminum materials with natural oxide layers.
The needle part of the metal needle die is formed by grinding and polishing on a chuck of a small drilling machine.
The invention has the beneficial effects based on the technical scheme that:
(1) the cooling process of the supersonic nozzle manufacturing method for generating cluster beams adopts the sequence of cooling the metal needle mold and the bottom plate firstly and cooling the cylindrical mold finally, preferentially crystallizing and molding the divergent part and the convergent part (convergent part) of the nozzle, so that the influence of bubbles overflowing to the surface of the divergent part of the nozzle on the inner surface of the nozzle when the meltable metal melt is crystallized is avoided, and although the bubbles are inevitably formed near the inner surface of the cylinder of the mold when the mold is cooled, only the roughness of the outer surface of the manufactured nozzle is influenced, the inner surface of the nozzle can be ensured to be clean and polished, and the formation of clusters is not influenced;
(2) compared with a quartz nozzle, the supersonic nozzle manufacturing method for generating cluster beams has the advantages that the supersonic nozzle is heated and vertically stretched, repeatability is good, accuracy is high, controllability is good, the supersonic nozzle with any ideal geometric shape can be formed, the inner surface of the formed nozzle is clean and polished, and the aperture can be only 0.02 mm;
(3) compared with a mechanical drilling method (or laser and electric spark drilling), the manufacturing method of the supersonic nozzle for generating cluster beams provided by the invention has the advantages of low cost, low requirement on equipment, simplicity and convenience in operation and short consumed time;
(4) the nozzle aperture of the supersonic nozzle manufacturing method for generating cluster beams is formed by relatively contacting and separating the meltable metal melt by the bottom plate cone and the vertex of the needle part of the metal needle mold, the manufactured nozzle aperture can reach 0.02mm, the smoothness of the inner surface is excellent, and the formation of clusters during gas input in the nozzle using process is obviously improved;
(5) the supersonic nozzle manufacturing method for generating cluster beams provided by the invention has the advantages that the surfaces of all the metal needle dies and the bottom plate which are contacted with molten metal are not melted and adhered with the metal melt, so that the metal needle dies and the bottom plate can be taken out smoothly after the nozzle is formed;
(6) the supersonic nozzle manufacturing method for generating cluster beams can change the shapes or the sizes of the die cylinder, the bottom plate and the metal needle and the types of the fusible metals according to requirements to form the supersonic nozzle with any ideal geometric shape and material, and meets the requirements of various cluster forming technologies.
Drawings
Fig. 1 is a schematic view of a fusible metal filling state in the first embodiment.
FIG. 2 is a schematic view of the molten fusible metal in the first embodiment.
FIG. 3 is a schematic view of the first embodiment of the present invention showing the needle mold immersed in the solution.
FIG. 4 is a schematic view showing a state where the metal pin mold and the base plate are removed in the first embodiment.
FIG. 5 is a schematic view showing the immersion state of the metal needle mold in the second embodiment.
FIG. 6 is a schematic view showing the state where the metal pin mold and the bed plate are taken out in the second embodiment.
In the figure: 1-heating plate, 2-bottom plate, 3-cone, 4-die cylinder, 5-fusible metal, 6-fusible metal melt, 7-metal needle die for forming cone-type supersonic nozzle, 7 '-metal needle die for forming Laval supersonic nozzle, 8-cone-type supersonic nozzle, 8' -Laval supersonic nozzle.
Detailed Description
The invention is further illustrated by the following figures and examples.
The invention provides a method for manufacturing a supersonic nozzle for generating cluster beams, which can form any desired geometric shape (Laval nozzle, cone-type supersonic nozzle), and form the nozzle by heating, melting and rapidly cooling a fusible metal (the melting point is between 100 and 400 ℃) in a composite mold, wherein the prepared nozzle can be suitable for any source gas with low activity, such as Ar, Xe, H2、O2、N2、CO2And the like. The inner surface of the formed nozzle is cleaned and polished, the aperture reaches 0.02mm, and the shapes or the sizes of the die cylinder, the bottom plate and the metal needle can be changed according to requirementsAnd the type of the fusible metal to form the supersonic nozzle with any ideal geometric shape and material, thereby meeting the requirements of various cluster forming technologies.
The first embodiment is as follows:
taking the preparation of a cone-shaped supersonic nozzle as an example, the supersonic nozzle manufacturing method for generating cluster beams provided by the invention comprises the following steps:
(1) referring to fig. 1, a bottom plate 2 having a top surface provided with a cone 3 is installed on a heating plate 1;
(2) a die cylinder 4 with a cylindrical inner cavity coaxial with the cone 3 is arranged on the cone 3 of the bottom plate 2;
(3) filling the cavity of the mold cylinder 4 with a fusible metal 5;
(4) referring to fig. 2, the heating plate 1 is heated, so that the fusible metal 5 is melted into a fusible metal melt 6 in the cavity of the die cylinder;
(5) with reference to fig. 3, a metallic needle mold 7 for forming a conical supersonic nozzle, which includes a cap for sealing an inner cavity of a mold cylinder and a conical needle portion below the cap, is immersed into a fusible metal melt; the top point of the needle part is tightly attached to the top tip of the upper cone of the bottom plate, and the needle part is coaxial with the upper cone of the bottom plate;
the shape of the metal pin die and the base plate determine the shape of the diverging and converging portions of the nozzle and any desired geometry may be designed, the radius of the metal pin tip also determining the aperture of the nozzle. In order to make the divergent part and the convergent part of the nozzle have smooth inner surfaces and smoothly take out the metal needle mold and the bottom plate after the nozzle is finished, the mold cylinder, the bottom plate and the metal needle are made of materials which have no affinity with the fusible metal, the fusible metal in the embodiment adopts tin-lead solder, and the aluminum material with the natural oxide layer is used as the mold cylinder, the bottom plate and the metal needle.
The metal pin die, the bottom plate and the die cylinder can be machined by a lathe, and the metal pin die needs additional surface polishing to form an extremely smooth outer surface, so that the supersonic speed nozzle with a smooth inner surface is ensured. The metal needle tip is sharpened and thinned as much as possible to achieve the minimum aperture required by the nozzle, and the metal needle can be processed by the steps of grinding and polishing clamped on a chuck of a small drilling machine.
(6) Cooling the metal needle mold, the bottom plate and the mold cylinder to room temperature in sequence to crystallize the metal melt;
the cooling process is related to the quality of the nozzle surface, the density of the fusible metal is increased in the crystallization process of the fusible metal, and meanwhile, the metal needle mold, the bottom plate and the cylindrical mold form a closed space, which can cause the formation of bubbles and air bubbles. Once these defects appear on the nozzle surface, a shock wave is generated in the divergent portion of the nozzle, such that the shock wave disrupts cluster formation when source gas is supplied to the nozzle. In order to avoid the generation of defects and reduce the quality of the nozzle, a special cooling mode can be adopted, firstly water is poured on the metal needle to crystallize the metal melt to form a divergent part of the spray pipe, then the bottom plate is cooled to form a convergent part of the spray pipe, and finally the whole cylindrical mold is cooled to completely crystallize the melt at room temperature. The water is injected on the metal needle mold and the bottom plate for cooling, so that the divergent part and the convergent part of the nozzle can be crystallized and formed preferentially, the inner surface of the nozzle is ensured to be clean and polished, and the influence of water bubbles on the inner surface of the nozzle when the metal melt is crystallized is avoided. Finally, the cylindrical mold still forms blisters near its inner surface when it cools, but only affects the outer surface of the nozzle and does not affect cluster formation.
In the embodiment, tin-lead alloy is used as a fusible metal, wherein the content of tin and lead is 40% and 60%, respectively, and an aluminum material with a natural oxidation layer is used as a mold cylinder. Heating the mould cylinder to 300 ℃ to fully melt the tin-lead alloy, cooling the metal needle mould, the bottom plate and the cylindrical mould to room temperature after the metal needle mould and the mould cylinder act together to form a divergent part and a convergent part (convergent part) of the conical nozzle, and crystallizing the melt of the tin-lead alloy. The specific cooling process is as follows:
(6-1) pouring normal-temperature water to the upper surface of the metal needle mold at a speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 2-5 seconds, and a divergent part of the nozzle is formed;
(6-2) pouring normal-temperature water into the bottom plate at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 4-8 seconds, and a convergence part of the nozzle is formed;
(6-3) pouring normal-temperature water onto the cylindrical mold at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 10-15 seconds, so that the fusible metal melt is fully crystallized until the temperature is cooled to 50 ℃.
(7) Referring to fig. 4, the metal needle mold and the bottom plate are removed from the mold cylinder to complete the nozzle 8.
The fusible metal is metal or alloy with a melting point of 100-400 DEG C
The die cylinder, the bottom plate and the metal needle are made of materials which have no affinity with fusible metals.
And (5) a grabbing part is arranged above the sealing cover of the metal needle mold.
As shown in fig. 4, the finally obtained conical supersonic nozzle 8 had a nozzle holder outer diameter D of 33mm, a holder inner diameter D of 13mm, a holder length L of 35mm, a nozzle length L of 30mm, a nozzle divergent portion cone angle α of 10 °, a convergent portion cone angle β of 90 °, and a nozzle hole diameter of 0.05 mm. According to the requirements of experimental results, the conical supersonic nozzle with other internal parameters can be prepared, and the parameter ranges are as follows: the outer diameter D of the nozzle bracket is between 5mm and 50 mm; the inner diameter d of the bracket is between 3mm and 30 mm; the length L of the bracket is between 20mm and 200 mm; the length l of the nozzle is between 15mm and 200 mm; the conical angle alpha of the divergent part of the nozzle is 3-20 degrees; the cone angle beta of the convergence part is 45-180 degrees; the aperture of the nozzle is between 0.02mm and 0.5 mm.
Example two:
referring to fig. 5 and 6, in an example of manufacturing a Laval supersonic nozzle, a method of manufacturing a supersonic nozzle for generating a cluster beam according to the present invention is the same as the example, except that a metal needle mold 7 for forming a conical supersonic nozzle is replaced with a metal needle mold 7 'for forming a Laval supersonic nozzle, and a Laval supersonic nozzle 8' is manufactured by forming a needle portion having a parabolic longitudinal sectional profile. Laval nozzles of various sizes can also be prepared according to the requirements of experimental results, and the parameter ranges are as follows: the outer diameter D' of the nozzle bracket is between 5mm and 50 mm; the inner diameter d' of the bracket is between 3mm and 30 mm; the length L' of the bracket is between 20mm and 200 mm; the nozzle length l' is between 15mm and 200 mm; parabola y ═ ax of nozzle divergent part2The angle a can be any positive number as required, the cone angle β' of the convergence part is 45-180 degrees, and the aperture of the nozzle is 0.02-0.5 mm.
The supersonic nozzle manufacturing method for generating cluster beams, provided by the invention, has the advantages that the nozzle is formed by heating, melting and rapidly cooling and forming the fusible metal in the cylindrical composite die, the manufacturing cost is low, the time consumption is short, the operation is simple and convenient, the precision is high, the inner surface of the formed nozzle is clean and polished, the aperture reaches 0.02mm, the shapes or the sizes of the die cylinder, the bottom plate and the metal needle and the type of the fusible metal can be changed according to requirements, so that the supersonic nozzle with any ideal geometric shape and material quality is formed, and the requirements of various cluster forming technologies are met.
Claims (5)
1. A method of manufacturing a supersonic nozzle for producing a cluster beam, comprising the steps of:
(1) a bottom plate with a cone on the top surface is arranged on the heating plate;
(2) a die cylinder with a cylindrical inner cavity and coaxial with the cone is placed on the cone of the bottom plate, and the inner diameter of the die cylinder is larger than or equal to the diameter of the cone on the bottom plate;
(3) filling a cavity of the mold cylinder with fusible metal; the fusible metal is metal or alloy with a melting point of 100-400 ℃;
(4) heating the heating plate to melt the fusible metal into a fusible metal melt in the inner cavity of the die cylinder;
(5) immersing a metal needle die into the fusible metal melt, wherein the metal needle die comprises a sealing cover for sealing the inner cavity of the die cylinder and a needle part below the sealing cover; the top point of the needle part is tightly attached to the top end of the upper cone of the bottom plate, and the needle part is coaxial with the upper cone of the bottom plate; the die cylinder, the bottom plate and the metal needle are made of materials which have no affinity with fusible metal;
(6) cooling the metal needle mold, the bottom plate and the mold cylinder to room temperature in sequence to crystallize the metal melt, and specifically comprises the following processes:
(6-1) pouring normal-temperature water to the upper surface of the metal needle mold at a speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 2-5 seconds, and a divergent part of the nozzle is formed;
(6-2) pouring normal-temperature water into the bottom plate at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 4-8 seconds, and a convergence part of the nozzle is formed;
(6-3) pouring normal-temperature water onto the cylindrical mold at the speed of 1-3 cubic centimeters per second for cooling, wherein the water injection time is 10-15 seconds, so that the meltable metal melt is crystallized until the temperature is cooled to 50 ℃;
(7) and (4) taking the metal needle die and the bottom plate out of the die cylinder to finish the manufacture of the nozzle.
2. The supersonic nozzle fabrication method for producing a cluster beam of claim 1, wherein: and (5) the needle part is conical, or the outline of the longitudinal section of the needle part is parabolic conical.
3. The supersonic nozzle fabrication method for producing a cluster beam of claim 1, wherein: and (5) a grabbing part is arranged above the sealing cover of the metal needle mold.
4. The supersonic nozzle fabrication method for producing a cluster beam of claim 1, wherein: the meltable metal is tin-lead solder, and the die cylinder, the bottom plate and the metal needle are made of aluminum materials with natural oxide layers.
5. The supersonic nozzle fabrication method for producing a cluster beam of claim 1, wherein: the needle part of the metal needle die is formed by grinding and polishing on a chuck of a small drilling machine.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811492925.7A CN109530628B (en) | 2018-12-07 | 2018-12-07 | Supersonic nozzle manufacturing method for generating cluster beams |
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| CN201811492925.7A CN109530628B (en) | 2018-12-07 | 2018-12-07 | Supersonic nozzle manufacturing method for generating cluster beams |
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| CN109530628B true CN109530628B (en) | 2020-09-29 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH03184867A (en) * | 1989-12-15 | 1991-08-12 | Canon Inc | Cast molding method |
| JPH10180419A (en) * | 1996-12-19 | 1998-07-07 | Koransha Co Ltd | Continuous casting method |
| US8858864B2 (en) * | 2007-07-31 | 2014-10-14 | Tokyo Electron Limited | Nozzle member and process for producing the same |
| US8186418B2 (en) * | 2010-09-30 | 2012-05-29 | General Electric Company | Unidirectional solidification process and apparatus therefor |
| US20120274005A1 (en) * | 2011-04-26 | 2012-11-01 | General Electric Company | Process for preparing for casting |
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