CN109520212A - A kind of Minton dryer and its control method - Google Patents
A kind of Minton dryer and its control method Download PDFInfo
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- CN109520212A CN109520212A CN201811642234.0A CN201811642234A CN109520212A CN 109520212 A CN109520212 A CN 109520212A CN 201811642234 A CN201811642234 A CN 201811642234A CN 109520212 A CN109520212 A CN 109520212A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
- F26B5/042—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum for drying articles or discrete batches of material in a continuous or semi-continuous operation, e.g. with locks or other air tight arrangements for charging/discharging
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
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- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Drying Of Solid Materials (AREA)
Abstract
The embodiment of the invention provides a kind of Minton dryer and its control method, which is provided with gas vent and air inlet on the cavity；Vacuum device is connect with the gas vent of the cavity, for vacuumizing to the cavity；Inflation mechanism is connect with the air inlet of the cavity, for the cavity topping up；Positioned at the intracorporal sample fixed mechanism of the chamber, for fixing sample to be dried；And sensor, the test side of the sensor is located in the cavity, for detecting the intracorporal pressure size of the chamber, humidity size and gas content.The embodiment of the present invention can be such that sample to be dried is dried in the environment of specific pressure, humidity and gas content, to in the drying process, the performance for preventing water and active gases in environment from treating drying sample has an impact, and it is dried under specific pressure environment, is conducive to the rate of drying for improving sample to be dried.
Description
Technical field
The present invention relates to fabricating technology field more particularly to a kind of Minton dryer and its control methods.
Background technique
Drying is a kind of moisture reduced in dried object using thermal energy, so that the process that dried object dries out.In general,
The ingredient of liquid vaporizes evolution in dried object in dry process, which can be for example moisture or other are volatilizable
Property liquid component, to obtain the dried object for providing wet component content.Dry purpose be in order to dried object use or
Further processing.
Currently, generalling use the ingredient that centainly dry method removes liquid in dried object.For example, compound semiconductor
Used substrate free of cleaning when the epitaxial growth of material is unfavorable for extension since the surface of the substrate has oxide layer
Growth need to carry out chemical cleaning to the substrate, and could grow epitaxial film after drying.Simultaneously in the process of growth epitaxial film
In, different degrees of oxidation is had on epitaxial film, need to carry out the cleaning of deoxidation, to improve the quality of epitaxial film.Such as with
It, can be with during several nanometers of GaSb underlayer surface of antimony oxide is in High-Temperature Deoxygenation for the cleaning-drying processing of GaSb substrate
GaSb substrate reacts and forms gallium oxide and simple substance antimony, to cause underlayer surface coarse.However, GaSb substrate deoxidation is not thorough
The crystal quality of epitaxial film can be greatly reduced in bottom.It combines by using organic matter cleaning and pickling to reduce GaSb substrate table
Layer oxide is transferred to epitaxial device after chemical cleaning and carries out deoxidation treatment, to improve adverse effect caused by improper deoxidation.
But during transmitting to epitaxial device, the GaSb substrate after making cleaning is contaminated again.In the prior art, pass through
By the way of high pure nitrogen drying, after the GaSb substrate after cleaning is dried, transfer in epitaxial device.
But GaSb substrate quilt can be made using the process of high pure nitrogen drying after the cleaning of GaSb substrate in the prior art
Dust fall in air stains or particle contamination, to influence the performance of GaSb substrate, and then reduces the quality of epitaxial film.
Summary of the invention
The embodiment of the present invention is designed to provide a kind of Minton dryer and its control method, can be in drying process
In, reduce the influence that environment treats drying sample performance.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of Minton dryer, comprising:
Cavity is provided with gas vent and air inlet on the cavity；
Vacuum device is connect with the gas vent of the cavity, for vacuumizing to the cavity；
Inflation mechanism is connect with the air inlet of the cavity, for the cavity topping up；
Positioned at the intracorporal sample fixed mechanism of the chamber, for fixing sample to be dried；
And sensor, the test side of the sensor is located in the cavity, for detecting the intracorporal pressure of the chamber
Size, humidity size and gas content.
As a kind of preferred embodiment of above-mentioned Minton dryer, the cavity includes:
Shedding shell, the gas vent are set on the shedding shell；
The outs open edge of top cover, described top cover one end and the shedding shell is rotatablely connected；The air inlet setting
In on the top cover；
Sealing ring, in the open edge of the shedding shell；The sealing ring is for sealing the top cover and described
Shedding shell；
Closedown structure, for engaging the shedding shell and top cover docking.
As a kind of preferred embodiment of above-mentioned Minton dryer, transparent windows are additionally provided on the top cover；
As a kind of preferred embodiment of above-mentioned Minton dryer, handle is provided on the closedown structure.
As a kind of preferred embodiment of above-mentioned Minton dryer, the sample fixed mechanism includes:
The sample loading end of sample carrier, the sample carrier is provided with multiple jacks；
Multiple support rods, one end of the support rod is corresponding to be inserted into the jack；The other end of the support rod is used for
Carry the sample to be dried.
As a kind of preferred embodiment of above-mentioned Minton dryer, the sample fixed mechanism further include: multiple brackets；
The multiple bracket one end is fixed on the cavity, and the other end of the multiple bracket is fixed on the sample
Product support deviates from the side of the sample loading end；
The length of the multiple bracket is different, so that the bottom surface of the sample carrier and the cavity is in default angle theta；
The value range of the default angle theta are as follows: 0 °≤θ≤90 °.
As a kind of preferred embodiment of above-mentioned Minton dryer, the multiple support rod include multiple first support bars and
Multiple second support bars；In the corresponding jack for being inserted into the sample carrier central area in one end of the first support bar；Described
In the corresponding jack for being inserted into the sample carrier fringe region in one end of two support rods；The side wall of the second support bar and it is described to
The EDGE CONTACT of drying sample；The length that the second support bar stretches out the jack is greater than described in first support bar stretching
The length of jack.
As a kind of preferred embodiment of above-mentioned Minton dryer, vacuum device includes:
Vacuum pump, suction catheters and the first check valve；First check valve is set on the suction catheters；Institute
State the gas vent that vacuum pump is fixedly connected on the cavity by the suction catheters.
As a kind of preferred embodiment of above-mentioned Minton dryer, the inflation mechanism includes:
Gas conduit, intake valve and second one-way valve；
The gas conduit is used to connect the air inlet and caisson of the cavity；
The intake valve is set on the gas conduit, and the second one-way valve is set on the gas conduit described
Intake valve is close to the side of the air inlet.
The control method of Minton dryer of the invention is for controlling above-mentioned Minton dryer, comprising:
S1, sample to be dried is placed on the intracorporal sample fixed mechanism of chamber；
S2, vacuum device is opened, the cavity is vacuumized, and detect that the intracorporal pressure of the chamber exists in sensor
When in the first pre-set pressure range, the vacuum device is closed；
S3, inflation mechanism is opened, is detected in the cavity to the cavity topping up, and in the sensor
Pressure in the second pre-set pressure range when, close the inflation mechanism；
S4, detect that gas content and humidity terminate when presetting in content range in the cavity in the sensor；
Or when the sensor detects the content of the content and humidity of oxygen in the cavity not in default content range, weight
Multiple S2 and S3.
Beneficial effects of the present invention:
The Minton dryer and its control method that the embodiment of the present invention proposes, sample to be dried is placed in cavity,
Cavity is vacuumized respectively by vacuum device and inflation mechanism and topping up, and is examined in real time using sensor
The intracorporal pressure size of chamber, humidity size and gas content are surveyed, so that sample to be dried contains in specific pressure, humidity and gas
It is dried in the environment of amount, so as in the drying process, prevent water in environment and active gases to sample to be dried
The performance of product has an impact, and is dried under specific pressure environment, is conducive to the dry speed for improving sample to be dried
Degree.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of Minton dryer provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of another Minton dryer provided in an embodiment of the present invention；
Fig. 3 is a kind of structural schematic diagram of sample carrier provided in an embodiment of the present invention；
Fig. 4 is a kind of structural schematic diagram of sample fixed mechanism provided in an embodiment of the present invention；
Fig. 5 is a kind of flow chart of the control method of Minton dryer provided in an embodiment of the present invention.
In figure:
1, cavity；2, vacuum device；3, inflation mechanism；4, sample fixed mechanism；5, sample to be dried；6, sensor；
101, gas vent；102, air inlet；11, shedding shell；12, top cover；121, transparent windows；13, sealing ring；
14, closedown structure；141, handle；21, vacuum pump；22, suction catheters；23, the first check valve；31, gas conduit；32, air inlet
Valve；33, second one-way valve；41, sample carrier；401, loading end；411, jack；42, support rod；421, first support bar；422,
Second support bar；43, bracket.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
The present invention provides a kind of Minton dryer, suitable for being dried to by drying sample.Fig. 1 is implementation of the present invention
A kind of structural schematic diagram for Minton dryer that example provides.Such as Fig. 1, Minton dryer 100 includes cavity 1, on the cavity 1
It is provided with gas vent 101 and air inlet 102；Vacuum device 2, the vacuum device 2 are connect with the gas vent 101 of cavity 1, are used
It is vacuumized in cavity 1；Inflation mechanism 3, the inflation mechanism 3 are connect with the air inlet 102 of cavity 1, lazy for supplementing cavity 1
Property gas；Sample fixed mechanism 4 in cavity 1, for fixing sample 5 to be dried；And sensor 6, the sensor 6
Test side be located in cavity 1, for pressure size, humidity size and the gas content in test chamber 1.
Specifically, the cavity 1 of Minton dryer 100 may be constructed closed space, and sample 5 to be dried can be placed in chamber
On sample fixed mechanism 4 in body 1.By vacuum device 2 by the gas vent 101 on cavity 1 to the enclosure space of cavity 1 into
Row vacuumize, and by inflation mechanism 3 by the air inlet 102 on light body 1 to the enclosure space topping up of cavity 1.
Effect to the enclosure space topping up of cavity 1 is that active gases in the enclosure space of cavity 1 is discharged as far as possible, with
Sample 5 to be dried is set to be dried under vacuum conditions.During sample 5 to be dried is dry, sensor 6 can be real-time
Pressure size, humidity size and gas content in the enclosure space of test chamber 1, can know sample 5 to be dried in real time
Pressure size, humidity size and gas content in dry environment, and according to pressure size in 5 dry environment of sample to be dried, wet
Degree size and gas content control vacuum device 2 and inflation mechanism 3 respectively.
Sample to be dried is placed in cavity by the present embodiment, by vacuum device and inflation mechanism respectively to cavity into
Row vacuumizes and topping up, and is contained using the intracorporal pressure size of sensor real-time detection chamber, humidity size and gas
Amount, so that sample to be dried is dried in the environment of specific pressure, humidity size and gas content, so as to dry
During dry, the performance for preventing water and active gases in environment from treating drying sample is had an impact, and is specifically being pressed
It is dried under force environment, is conducive to the rate of drying of sample to be dried.
Wherein, gas vent 101 may be disposed at the position of the bottom of cavity 1, in order to which vacuum device 2 is to the envelope of cavity 1
Space is closed to be vacuumized；Air inlet 102 may be disposed at the top of cavity 1, in order to which closing of the inflation mechanism 3 to cavity 1 is empty
Between topping up.The gas that the inert gas for example can not chemically react for nitrogen, argon gas etc. with sample to be dried
Body.Sensor 6 can be the sensor for integrating pressure detecting, Humidity Detection and gas content detection, also may include pressure
Force detection sensor, moisture detection sensor and gas detection sensor.Meanwhile according in 5 dry environment of sample to be dried
Pressure size, humidity size and gas content control the control mode of vacuum device 2 and inflation mechanism 3 respectively for example can be with
Are as follows: it is sent in controller by the data for detecting sensor 6, controls vacuum device 2 and inflation respectively by controller
Mechanism 3 works；Alternatively, the data that sensor 6 detects are fed directly to vacuum device 2 and inflation mechanism 3, vacuum device
1 and inflation mechanism 3 respectively according to sensor 6 detect data judge whether work；Alternatively, the data that sensor 6 is detected into
The intuitive display of row, the data that staff detects according to sensor 6, implementation open or close vacuum device 2 and inflator
The operation of structure.
Optionally, Fig. 2 is the structural schematic diagram of another Minton dryer provided in an embodiment of the present invention.In conjunction with Fig. 1
And Fig. 2, the cavity 1 of Minton dryer 100 include: shedding shell 11, the gas vent 101 of cavity 1 is set to shedding shell 11
On；The outs open edge of top cover 12,12 one end of top cover and shedding shell 11 is rotatablely connected, and the air inlet 102 of cavity 1 is set to
On top cover 12；Sealing ring 13, in the open edge of shedding shell 11；Sealing ring 13 is used for top pressure closure 12 and shedding shell
11；Closedown structure 14, for engaging shedding shell 11 and the docking of top cover 12.
Specifically, the outs open edge of the shedding shell 11 of cavity 1 and top cover 12 are rotatablely connected, to open in cavity 1
When, the part that shedding shell 11 is not connected with top cover 12 is located remotely from each other, and sample 5 to be dried can be placed in the open shell of cavity 1
The inside of body 11；And when cavity 1 is closed, shedding shell 11 and top cover 12 form enclosed construction, and are open by 13 Duis of sealing ring
Shell 11 forms enclosed construction with top cover 12 and is sealed, and closedown structure 14 forms enclosed construction to shedding shell 11 and top cover 12
Carry out it is sealed, prevent vacuumize or gas replenishment process in 1 gas leakage of cavity, and/or prevent the pressure mistake in gas replenishment process in cavity 1
Greatly, the shedding shell 11 of cavity 1 is caused to separate with top cover 12, to influence the drying process of sample 5 to be dried.In addition, will row
Stomata 101 is set on shedding shell 11, can be conducive to vacuumizing for cavity 1；And air inlet 102 is set to top cover 12
On, it can be conducive to 1 make-up gas of cavity.Wherein, shedding shell 11 is chosen as curved opening structure, to prevent dust granule
Deng aggregation.
Further, transparent windows 121 are additionally provided on the top cover 12 of cavity 1 combined with Figure 1 and Figure 2,.Thoroughly by this
Bright observation window 121 can show that the sample to be dried 5 in the enclosed construction that top cover 12 and shedding shell 11 form, in order to right
The drying regime of sample 5 to be dried is observed.
Further, handle 141 is provided on the closedown structure 14 of cavity 1 combined with Figure 1 and Figure 2,.141 energy of handle
Enough it is convenient for folding of the operator to closedown structure 14.
Optionally, Fig. 3 is a kind of structural schematic diagram of sample carrier provided in an embodiment of the present invention.In conjunction with Fig. 1, Fig. 2 and figure
3, the sample fixed mechanism 4 of Minton dryer 100 includes: sample carrier 41, and the sample loading end 401 of the sample carrier 41 is provided with
Multiple jacks 411；Multiple support rods 42, one end of the support rod 42 is corresponding to be inserted into the jack 11；The support rod 42 it is another
One end is for carrying sample 5 to be dried.
Specifically, the support rod 42 of sample fixed mechanism 4 can be inserted into holding for sample carrier 41 according to the form and dimension of sample
On jack 411 on section 401, on the one hand the sample to different shape and size can be dried, on the other hand be supported
Bar 42 have the characteristics that it is easy to plug, can be convenient for sample 5 to be dried pick-and-place.Wherein, the shape of the outer profile of sample carrier 41 can
Think regular shape, such as rectangular, round, oval etc. or random shape, it is not limited here.
Further, Fig. 4 is a kind of structural schematic diagram of sample fixed mechanism provided in an embodiment of the present invention.In conjunction with Fig. 1,
Fig. 2 and Fig. 4, sample fixed mechanism 4 further include multiple brackets 43；Multiple 43 one end of bracket is fixed on cavity 1, this is more
The other end of a bracket 43 is fixed on the side that sample carrier 41 deviates from sample loading end 401；The length of multiple brackets 43 is different, with
Making the bottom surface of sample carrier 41 and cavity 1 is in default angle theta；The value range of the default angle theta are as follows: 0 °≤θ≤90 °.
Specifically, the bracket 43 of sample mechanism 4 can act on its carrying of sample carrier 41, by that will support different direction
The bracket 43 of sample carrier 41 is set as different length, and sample carrier 41 can be made to show inclined state, and sample carrier 43
Tilt angle for example can be 0 °≤θ≤90 °, thus be conducive to 41 upper support bar 42 of sample carrier support by 5 table of drying sample
The flowing of liquid on face.
Further, in conjunction with Fig. 1, Fig. 2 and Fig. 4, multiple support rods 42 of sample fixed mechanism 4 include multiple first supports
Bar 421 and multiple second support bars 422；One end of first support bar 421 is corresponding to be inserted into inserting for 41 central area of sample carrier
In hole 411；In the jack 411 of corresponding insertion 41 fringe region of sample carrier in one end of second support bar 422；Second support bar 422
Side wall and sample 5 to be dried EDGE CONTACT；The length that second support bar 422 stretches out jack 411 is greater than first support bar 421
Stretch out the length of jack 411.
Specifically, the first support bar 421 of support rod 42 supports the back side of sample 5 to be dried, and second of support rod 42
Strut 422 supports the edge of sample 5 to be dried, and the vibration to prevent vacuumizing or the process of make-up gas generates causes sample to be dried
Product 5 move in cavity 1, cause the breakage of sample 5 to be dried.Therefore, by the way that second support bar 422 is stretched out jack 411
Length is set greater than the length that first support bar 421 stretches out jack 411, can treat drying sample 5 and shield.Its
In, the length of first support bar 421 and second support bar 422 is chosen as being greater than 1cm less than 5cm, to meet Minton dryer
100 small form factor requirements.
Optionally, continuing with reference Fig. 1 and Fig. 2, the vacuum device 2 of Minton dryer 100 includes: vacuum pump
21, suction catheters 22 and the first check valve 23；First check valve 23 is set on suction catheters 22；Vacuum pump 21 passes through pumping
Airway 22 is fixedly connected on the gas vent 101 of cavity 1.
Specifically, the vacuum pump 21 of vacuum device 2 can be connected by the gas vent 101 on suction catheters 22 and cavity 1
It connects, is vacuumized with the enclosure space to cavity 1.The first check valve 23 is provided on suction catheters 22, first check valve
23 pass the gas through suction catheters 22 flows in one direction, with during vacuumizing, or stops vacuumizing outside rear resistance value
Boundary's air enters in the enclosure space of cavity 1.
Optionally, continue to refer to figure 1 and Fig. 2, the inflation mechanism 3 of Minton dryer 100 include: gas conduit 31, into
Air valve 32 and second one-way valve 33；Gas conduit 31 is used for the air inlet 102 and caisson 200 of connection cavity 1；Air inlet
Valve 32 is set on gas conduit 31, and second one-way valve 33 is set to 31 upper inlet valve 32 of gas conduit close to air inlet 102
Side.
Specifically, it also may include gas storage that inflation mechanism 3, which can connect external caisson 200 or inflation mechanism 3,
The technical principle of structure, the two is similar, is illustrated for connecting external caisson 200 by inflation mechanism 3 herein.Inflation
31 one end of gas conduit of structure 3 connect with external caisson 200, the other end of the gas conduit 31 of inflatable structure 3 and
The air inlet 102 of cavity 1 connects.It is provided with intake valve 32 on the gas conduit 31, when intake valve 32 is opened, caisson
The gas stored in 200 flows into cavity 1, to squeeze other active gases in cavity 1, such as steam and oxygen.Meanwhile
Second one-way valve 33 is arranged close to the side of air inlet 102 in 31 upper inlet valve 32 of gas conduit, can prevent the gas in cavity 1
It flows backward in caisson 200, the gas stored in caisson 200 is polluted.In addition, intake valve 32 may also set up in
One end that gas conduit 31 is connect with caisson 200, or be set to gas conduit 31 and connect with the gas vent 102 of cavity 1
One end, technical principle is similar with above-mentioned technical proposal, and details are not described herein.
The embodiment of the present invention also provides a kind of control method of Minton dryer, which is applicable to the present invention
The Minton dryer that embodiment provides.Fig. 5 is a kind of control method of Minton dryer provided in an embodiment of the present invention
Flow chart.In conjunction with Fig. 1 and Fig. 5, the control method of the Minton dryer of the present embodiment includes:
S1, sample 5 to be dried is placed on the sample fixed mechanism 4 in cavity 1；
S2, vacuum device 2 is opened, cavity 1 is vacuumized, and detect the pressure in cavity 1 first in sensor 6
When in pre-set pressure range, vacuum device 2 is closed；
S3, inflation mechanism 3 is opened, detects the pressure in cavity 1 to 1 topping up of cavity, and in sensor 6
When power is in the second pre-set pressure range, inflation mechanism 3 is closed；
S4, detect that gas content and humidity terminate when presetting in content range in the cavity 1 in sensor 6；Or
Person repeats S2 when sensor 6 detects the content of the content and humidity of oxygen in the cavity 1 not in default content range
And S3.
Specifically, S10, opening cavity 1 such as Fig. 5, sample 5 to be dried being fixed on to the cavity 1 of Minton dryer 100
On interior sample fixed mechanism 4；S20, cavity 1 is closed, so that cavity 1 constitutes enclosure space；S30, vacuum device 2 is opened,
The enclosure space of cavity 1 is vacuumized；Pressure size in S40,6 test chamber 1 of sensor, judges the pressure in cavity 1
Whether power is in the first pre-set pressure range, if so, executing S50；S50, vacuum device 2 is closed, opens inflation mechanism 3, it is right
The enclosure space topping up of cavity 1；It is S60, big by the pressure in the enclosure space of 6 examinations cavity 1 of sensor
It is small, the pressure in cavity 1 is judged whether in the second pre-set pressure range, if so, executing S70；S70, inflation mechanism 3 is closed；
The step of repeating S30 and S50, so that gas content prevents cavity 1 in default content range in the enclosure space of cavity 1
Active gases in enclosure space, such as oxygen and/or steam are treated the performance of drying sample 5 and are had an impact；S80, end.
It is vacuumized in enclosure space of the vacuum device 2 to cavity 1 or inflation mechanism 3 is empty to the closing of cavity 1
Between during topping up, pressure size, humidity size in the enclosure space of 6 real-time detection cavity 1 of sensor and
Gas content.When gas content does not drop in default content range, and sample to be dried 5 has been in drying regime, close
Vacuum device 2, and open pressure of 3 topping up of inflation mechanism into cavity 1 close to normal environment pressure, so as to
In the taking-up of sample 5 to be dried.Alternatively, repeating to vacuumize the process with topping up, until the gas content in cavity 1
In default content range, inflation mechanism 3 is closed, vacuum device 2 is opened, cavity 1 is vacuumized, and keep cavity 1
In pressure in the first pre-set pressure range, to improve the rate of drying of sample 5 to be dried；Until sample 5 to be dried is in
After drying regime, be again turned on pressure of 3 topping up of inflation mechanism into cavity 1 close to normal environment pressure.
Wherein, the first pre-set pressure range is chosen as the pressure limit close to vacuum environment；Inert gas for example can be
The inert gas that nitrogen, argon gas etc. do not reflect with sample to be dried；Second pre-set pressure range is chosen as close to normal ring
The pressure limit in border；The default content range of gas content can be for example the content of oxygen and/or steam in lower content
In range, had an impact with the performance for preventing oxygen and/or steam from treating drying sample 5.
The present embodiment by the intracorporal space of chamber carry out repeatedly vacuumize and topping up, and use sensor
The intracorporal pressure size of real-time detection chamber, humidity size and gas content so that sample to be dried certain pressure, humidity and
It is dried in the environment of gas content, so as in the drying process, prevent water in environment and active gases from treating
The performance of drying sample has an impact, and is dried under specific pressure environment, is conducive to the drying of sample to be dried
Speed.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (10)
1. a kind of Minton dryer characterized by comprising
Cavity (1) is provided with gas vent (101) and air inlet (102) on the cavity (1)；
Vacuum device (2) is connect with the gas vent (101) of the cavity (1), for vacuumizing to the cavity (1)；
Inflation mechanism (3) is connect with the air inlet (102) of the cavity (1), for the cavity (1) topping up；
Sample fixed mechanism (4) in the cavity (1), for fixing sample to be dried (5)；
And sensor (6), the test side of the sensor (6) is located in the cavity (1), for detecting the cavity (1)
Interior pressure size, humidity size and gas content.
2. the apparatus according to claim 1, which is characterized in that the cavity (1) includes:
Shedding shell (11), the gas vent (101) are set on the shedding shell (11)；
Top cover (12), the outs open edge rotation connection of described top cover (12) one end and the shedding shell (11)；It is described into
Stomata (102) is set on the top cover (12)；
Sealing ring (13) is located in the open edge of the shedding shell (11)；The sealing ring (13) is for sealing the top
Cover (12) and the shedding shell (11)；
Closedown structure (14), for engaging the shedding shell (11) and the top cover (12) docking.
3. the apparatus of claim 2, which is characterized in that be additionally provided with transparent windows on the top cover (12)
(121)。
4. the apparatus according to claim 1, which is characterized in that be provided with handle (141) on the closedown structure (14).
5. the apparatus according to claim 1, which is characterized in that the sample fixed mechanism (4) includes:
The sample loading end (401) of sample carrier (41), the sample carrier (41) is provided with multiple jacks (411)；
Multiple support rods (42), one end of the support rod (42) is corresponding to be inserted into the jack (411)；The support rod (42)
The other end for carrying the sample to be dried (5).
6. device according to claim 5, which is characterized in that the sample fixed mechanism (4) further include: multiple brackets
(43)；
The multiple bracket (43) one end is fixed on the cavity (1), and the other end of the multiple bracket (43) is fixed
Deviate from the side of the sample loading end (401) in the sample carrier (41)；
The length of the multiple bracket (43) is different, so that the bottom surface of the sample carrier (41) and the cavity (1) is in default folder
Angle θ；
The value range of the default angle theta are as follows: 0 °≤θ≤90 °.
7. device according to claim 5, which is characterized in that the multiple support rod (42) includes multiple first support bars
(421) and multiple second support bars (422)；One end of the first support bar (421) is corresponding to be inserted into the sample carrier (41)
In the jack (411) in heart district domain；Corresponding insertion sample carrier (41) fringe region in one end of the second support bar (422)
In jack (411)；The EDGE CONTACT of the side wall of the second support bar (422) and the sample (5) to be dried；Described second
The length that strut (422) stretches out the jack (411) is greater than the length that the first support bar (421) stretch out the jack (411)
Degree.
8. the apparatus according to claim 1, which is characterized in that vacuum device (2) includes:
Vacuum pump (21), suction catheters (22) and the first check valve (23)；First check valve (23) is set to the pumping
On airway (22)；The vacuum pump (21) is fixedly connected on the gas vent of the cavity (1) by the suction catheters (22)
(101)。
9. the apparatus according to claim 1, which is characterized in that the inflation mechanism (3) includes:
Gas conduit (31), intake valve (32) and second one-way valve (33)；
The gas conduit (31) is used to connect the air inlet (102) and caisson (200) of the cavity (1)；
The intake valve (32) is set on the gas conduit (31), and the second one-way valve (33) is set to the gas and leads
Manage the side of the intake valve (32) close the air inlet (102) on (31).
10. a kind of control method for any one of claim 1~9 Minton dryer characterized by comprising
S1, sample to be dried (5) is placed on the sample fixed mechanism (4) in cavity (1)；
S2, vacuum device (2) are opened, the cavity (1) is vacuumized, and detected in the cavity (1) in sensor (6)
Pressure in the first pre-set pressure range when, close the vacuum device (2)；
S3, inflation mechanism (3) are opened, to the cavity (1) topping up, and detected in the sensor (6) described
When pressure in cavity (1) is in the second pre-set pressure range, the inflation mechanism (3) are closed；
S4, detect that the interior gas content of the cavity (1) and humidity when presetting in content range, are tied in the sensor (6)
Beam；Or the sensor (6) detect the cavity (1) interior oxygen content and humidity content not in default content model
When enclosing interior, S2 and S3 is repeated.
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| CN201811642234.0A CN109520212A (en) | 2018-12-29 | 2018-12-29 | A kind of Minton dryer and its control method |
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| CN201811642234.0A CN109520212A (en) | 2018-12-29 | 2018-12-29 | A kind of Minton dryer and its control method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114893957A (en) * | 2022-04-15 | 2022-08-12 | 四川景恒科技有限公司 | Ultrahigh vacuum degassing and drying method and system |
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| CN201885524U (en) * | 2010-09-03 | 2011-06-29 | 昆山康和电子科技有限公司 | Vacuum drying device |
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| CN205939944U (en) * | 2016-08-19 | 2017-02-08 | 深圳市欧普特工业材料有限公司 | Vacuum drying oven is used in production of two ingredient organosilicon casting glues |
| CN206974004U (en) * | 2017-06-28 | 2018-02-06 | 长沙开元仪器股份有限公司 | One kind vacuumizes gas path device |
| CN209484942U (en) * | 2018-12-29 | 2019-10-11 | 苏州工业园区服务外包职业学院 | A kind of Minton dryer |
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| JP2011228397A (en) * | 2010-04-16 | 2011-11-10 | Hitachi High-Technologies Corp | Vacuum processing apparatus |
| CN201885524U (en) * | 2010-09-03 | 2011-06-29 | 昆山康和电子科技有限公司 | Vacuum drying device |
| CN205939944U (en) * | 2016-08-19 | 2017-02-08 | 深圳市欧普特工业材料有限公司 | Vacuum drying oven is used in production of two ingredient organosilicon casting glues |
| CN206974004U (en) * | 2017-06-28 | 2018-02-06 | 长沙开元仪器股份有限公司 | One kind vacuumizes gas path device |
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| CN114893957A (en) * | 2022-04-15 | 2022-08-12 | 四川景恒科技有限公司 | Ultrahigh vacuum degassing and drying method and system |
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