CN109505009A - A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus - Google Patents
A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus Download PDFInfo
- Publication number
- CN109505009A CN109505009A CN201811532862.3A CN201811532862A CN109505009A CN 109505009 A CN109505009 A CN 109505009A CN 201811532862 A CN201811532862 A CN 201811532862A CN 109505009 A CN109505009 A CN 109505009A
- Authority
- CN
- China
- Prior art keywords
- support plate
- flange
- debugging
- pressure sensor
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention belongs to dynamic balancing debugging apparatus fields in single crystal growing furnace, more particularly, to a kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus.Including dynamic balance measuring instrument, dynamic balance measuring instrument includes support plate, support plate top edge is equipped with retaining ring, circumferential uniformly distributed multiple pressure sensor mechanisms at the top of support plate, debugging flange is equipped at the top of pressure sensor mechanism, the circumferentially uniformly distributed multiple hold-down mechanisms in flange upper surface are debugged, uniformly distributed multiple semi-spherical grooves on the circumferential direction circumference of flange lower end surface are debugged；Support plate top center is equipped with bellows；Bellows of transferring is set to support plate center；Regulating mechanism is set to support plate bottom surrounding.The centering of present invention guarantee single crystal growing furnace lifting head；Debugging flange is set to be constantly in suitable position by steel ball, structure is simple, manufacturing cost is cheap, high without additionally increasing other labyrinths, adjustment accuracy, can be debugged under use environment.
Description
Technical field
The invention belongs to dynamic balancing debugging apparatus fields in single crystal growing furnace, more particularly, to a kind of single crystal growing furnace lifting head dynamic balancing
Debugging apparatus.
Background technique
It is also original higher for the required precision of single crystal furnace equipment with the development of semicon industry, and for single crystal growing furnace
The dynamic balancing debugging of lifting head is just particularly important, and is not carried out dynamic balancing debugging to single crystal growing furnace lifting head, be will lead to monocrystalline and exist
Occurs brilliant rolling in straight pulling process, crystalline substance, which shakes, can increase the risk that monocrystalline falls, and in turn result in the damage of the injures and deaths or equipment of personnel.
In dynamic balancing debugging apparatus field, it is difficult for the technology of dynamic balancing debugging apparatus always that dynamic balancing debugging is carried out to spin rotation mechanism
Point in the prior art, has lacked a kind of single crystal growing furnace lifting simultaneously as single crystal growing furnace lifting head is operation under vacuum conditions
Head dynamic balancing debugging apparatus.
Summary of the invention
The technical problem to be solved by the present invention is to overcome deficiency in the prior art, it is dynamic to provide a kind of single crystal growing furnace lifting head
Balance adjustment device.
In order to solve the above technical problems, the solution that the present invention uses is:
A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus, including dynamic balance measuring instrument, switching bellows and adjusting are provided
Mechanism；
Dynamic balance measuring instrument includes support plate, and support plate top edge is equipped with retaining ring, is circumferentially evenly distributed at the top of support plate multiple
Pressure sensor mechanism, pressure sensor mechanism top are equipped with debugging flange, and debugging flange upper surface is circumferentially evenly distributed with multiple compressions
Uniformly distributed multiple semi-spherical grooves on the circumferential direction circumference of flange lower end surface are debugged by mechanism；Support plate top center is equipped with bellows；
Bellows of transferring is set to support plate center；
Regulating mechanism is set to support plate bottom surrounding, including support column, and side, which is equipped with, at the top of support column adjusts bolt, adjusts
Bolt is equipped with locking nut.
As an improvement pressure sensor mechanism includes pressure sensor；Pressure head, pressure head are equipped at the top of pressure sensor
It is externally provided with sleeve, steel ball is equipped at the top of pressure head, steel ball insertion is debugged in the semi-spherical grooves of flange.
As an improvement hold-down mechanism includes clamping seats, pressing plate is equipped at the top of clamping seats.
Compared with prior art, the solution have the advantages that:
Single crystal growing furnace lifting head dynamic balancing debugging apparatus of the present invention, by debugging flange to pressure sensor mechanism
Pressure change amplitude embodies unbalance dynamic surplus of single crystal growing furnace lifting head during spinning；By regulating mechanism to dynamic
Balance performance monitor centering, to guarantee the centering of single crystal growing furnace lifting head；Debugging flange is constantly in properly by steel ball
Position, structure is simple, manufacturing cost is cheap, high without additionally increasing other labyrinths, adjustment accuracy, can be in use environment
Under debugged.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is sectional view of the invention；
Fig. 3 is the positive view of the pressure sensor mechanism in the present invention.
In figure: 1- dynamic balance measuring instrument, 101- support plate, 102- pressure sensor mechanism, 1021- pressure sensor,
1022- pressure head, 1023- sleeve, 1024- steel ball, 103- hold-down mechanism, 1031- clamping seats, 1032- pressing plate, 104- bellows,
105- debugs flange, 106- retaining ring, 2- switching bellows, 3- regulating mechanism, 301- support column, 302- and adjusts bolt, 303- lock
Tight nut.
Specific embodiment
With reference to the accompanying drawing, specific embodiments of the present invention will be described in detail.
As shown in Figs. 1-2, a kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus, including dynamic balance measuring instrument 1, switching ripple
Pipe 2 and regulating mechanism 3；
Dynamic balance measuring instrument 1 includes support plate 101, and 101 top edge of support plate is equipped with retaining ring 106,101 top of support plate
Three pressure sensor mechanisms 102 circumferentially are laid with, as shown in figure 3, pressure sensor mechanism 102 includes pressure sensor
1021；Pressure head 1022 is equipped at the top of pressure sensor 1021, pressure head 1022 is externally provided with sleeve 1023, is equipped with steel at the top of pressure head 1022
Pearl 1024, the insertion of steel ball 1024 are debugged in the semi-spherical grooves of flange 105.
Debugging flange 105 is equipped at the top of pressure sensor mechanism 102, there are three debugging 105 upper surface of flange is circumferentially uniformly distributed
Hold-down mechanism 103, hold-down mechanism 103 include clamping seats 1031, are equipped with pressing plate 1032 at the top of clamping seats 1031.
Debug uniformly distributed three semi-spherical grooves on 105 lower end surface circumferential direction circumference of flange；101 top center of support plate is equipped with ripple
Pipe 104；
Bellows 2 of transferring is set to 101 center of support plate；
Regulating mechanism 3 is set to 101 bottom surrounding of support plate, including support column 301, and 301 top side of support column, which is equipped with, adjusts
Bolt is saved, bolt is adjusted and is equipped with locking nut.
Use process of the invention are as follows:
Single crystal growing furnace lifting head is placed on 105 top of debugging flange, compresses single crystal growing furnace lifting head by hold-down mechanism 103, adjusts
Examination 105 bottom of flange sets there are three semi-spherical grooves and inlays with steel ball 1024, so that debugging flange 105 be allow to be constantly in conjunction
Suitable position.The position of support plate 101 is pushed away by the adjusting bolt 302 of four 301 top sides of support column, to guarantee monocrystalline
The centering of furnace lifting head.
By single crystal growing furnace lifting head spinning, so that debugging flange 105 generates dynamic tilt, flange 105 is debugged to pressure
The power that sensor mechanism 102 applies produces dynamic change, to measure dynamic value variation model by pressure sensor mechanism 102
It encloses, and then dynamic balancing debugging is carried out to single crystal growing furnace lifting head.
It is finally noted that the above enumerated are only specific embodiments of the present invention.It is clear that the invention is not restricted to
Upper embodiment can also have many variations.Those skilled in the art can from present disclosure directly export or
All deformations associated, are considered as protection scope of the present invention.
Claims (3)
1. a kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus, which is characterized in that including dynamic balance measuring instrument, switching bellows with
Regulating mechanism；
The dynamic balance measuring instrument includes support plate, and support plate top edge is equipped with retaining ring, is circumferentially evenly distributed at the top of support plate multiple
Pressure sensor mechanism, pressure sensor mechanism top are equipped with debugging flange, and debugging flange upper surface is circumferentially evenly equipped with multiple pressures
Uniformly distributed multiple semi-spherical grooves on the circumferential direction circumference of flange lower end surface are debugged by tight mechanism；The support plate top center is equipped with bellows；
The switching bellows is set to support plate center；
The regulating mechanism is set to support plate bottom surrounding, including support column, and side, which is equipped with, at the top of the support column adjusts bolt,
The adjusting bolt is equipped with locking nut.
2. the apparatus according to claim 1, which is characterized in that the pressure sensor mechanism includes pressure sensor；Institute
It states and is equipped with pressure head at the top of pressure sensor, pressure head is externally provided with sleeve, and steel ball is equipped at the top of pressure head, and steel ball is embedded in the half of debugging flange
In spherical groove.
3. the apparatus according to claim 1, which is characterized in that the hold-down mechanism includes clamping seats, the clamping seats top
Portion is equipped with pressing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811532862.3A CN109505009A (en) | 2018-12-14 | 2018-12-14 | A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811532862.3A CN109505009A (en) | 2018-12-14 | 2018-12-14 | A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109505009A true CN109505009A (en) | 2019-03-22 |
Family
ID=65753432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811532862.3A Pending CN109505009A (en) | 2018-12-14 | 2018-12-14 | A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109505009A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285891A (en) * | 1990-03-31 | 1991-12-17 | Ntn Corp | Crustal pulling-up apparatus |
| CN2604675Y (en) * | 2003-03-12 | 2004-02-25 | 浙江大学 | Dynamic balancing machine mechanical apparatus |
| CN201321507Y (en) * | 2008-12-30 | 2009-10-07 | 北京京仪世纪自动化设备有限公司 | Total excursion dynamic balanced lifting-and-pulling head part of crystal growth furnace |
| CN101713097A (en) * | 2009-12-18 | 2010-05-26 | 江苏华盛天龙光电设备股份有限公司 | Automatic balancing compensation lifting device used for silicon single crystal growth |
| CN102359848A (en) * | 2011-09-06 | 2012-02-22 | 上海福伊特水电设备有限公司 | Water turbine rotating wheel three-fulcrum weighing static balance device and static balance technology thereof |
| CN103014841A (en) * | 2012-12-14 | 2013-04-03 | 福建福晶科技股份有限公司 | Device for clamping and centering seed rod by using upper weighing and pulling method |
| CN108072490A (en) * | 2016-11-08 | 2018-05-25 | 阿克隆特种机械公司 | Dynamic balancer |
| CN207775387U (en) * | 2018-01-04 | 2018-08-28 | 浙江中晶科技股份有限公司 | A kind of single crystal growing furnace lifting head dynamic balance check device |
-
2018
- 2018-12-14 CN CN201811532862.3A patent/CN109505009A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03285891A (en) * | 1990-03-31 | 1991-12-17 | Ntn Corp | Crustal pulling-up apparatus |
| CN2604675Y (en) * | 2003-03-12 | 2004-02-25 | 浙江大学 | Dynamic balancing machine mechanical apparatus |
| CN201321507Y (en) * | 2008-12-30 | 2009-10-07 | 北京京仪世纪自动化设备有限公司 | Total excursion dynamic balanced lifting-and-pulling head part of crystal growth furnace |
| CN101713097A (en) * | 2009-12-18 | 2010-05-26 | 江苏华盛天龙光电设备股份有限公司 | Automatic balancing compensation lifting device used for silicon single crystal growth |
| CN102359848A (en) * | 2011-09-06 | 2012-02-22 | 上海福伊特水电设备有限公司 | Water turbine rotating wheel three-fulcrum weighing static balance device and static balance technology thereof |
| CN103014841A (en) * | 2012-12-14 | 2013-04-03 | 福建福晶科技股份有限公司 | Device for clamping and centering seed rod by using upper weighing and pulling method |
| CN108072490A (en) * | 2016-11-08 | 2018-05-25 | 阿克隆特种机械公司 | Dynamic balancer |
| CN207775387U (en) * | 2018-01-04 | 2018-08-28 | 浙江中晶科技股份有限公司 | A kind of single crystal growing furnace lifting head dynamic balance check device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201876396U (en) | Measuring device of static normal direction contact stiffness of junction plane | |
| CN107121111A (en) | Bearing projection measuring devices and bearing protrusion measuring equipment | |
| CN105486582A (en) | Rock tensile tester provided with automatic rectification devices | |
| CN109505009A (en) | A kind of single crystal growing furnace lifting head dynamic balancing debugging apparatus | |
| CN205915304U (en) | Ball valve equipment workstation that shifts | |
| CN106441898B (en) | A kind of test device of rolling bearing rotating accuracy | |
| CN207816586U (en) | Million unit water circulating pump disk spring detection instruments | |
| CN206450233U (en) | A kind of open type angular encoder pedestal assembly guiding structure | |
| CN108458639A (en) | A kind of aircraft attachment axial gap measuring device and axial gap measurement method | |
| CN209512785U (en) | A kind of bearing holder (housing, cover) size detecting device facilitating clamping | |
| CN208833157U (en) | A kind of cross axle symmetry test measuring device | |
| CN208270353U (en) | Synchrotron radiation vacuum/high pressure width-adjustable in situ fatigue test machine and its component | |
| CN206450401U (en) | A kind of rolling angle measurement device of non-axis symmetry model in wind tunnel | |
| CN206740292U (en) | A kind of residual stress detects strain rosette | |
| CN206504935U (en) | A kind of high-temperature extensometer mounting seat | |
| CN108489592A (en) | A kind of automatic quadrangle output error update the system of parallel beam load cell | |
| CN108478235A (en) | A kind of movably connected Neurology clinical diagnosis device | |
| CN205120019U (en) | A appurtenance for detecting machined surface plane degree | |
| CN203587431U (en) | Upper pressure plate ball head pair structure of pressure testing machine | |
| CN208043229U (en) | A kind of automatic quadrangle output error update the system of parallel beam load cell | |
| CN206648886U (en) | A kind of device for preventing that loaded area slides when four-point bending amount of deflection is excessive | |
| CN208458601U (en) | A kind of differential mechanism sphere diameter and pulsation measurement device | |
| CN207007620U (en) | A kind of modulus of elasticity of concrete analyzer | |
| CN207272890U (en) | A kind of bistrique angle adjusting mechanism for being used for accurate double-ended grinding machine | |
| CN110081797A (en) | For the detection device and detection method of hole, axis band slightly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190322 |
|
| WD01 | Invention patent application deemed withdrawn after publication |