CN109500730A - A kind of hydrodynamic bearing support construction for accurate twin grinder - Google Patents
A kind of hydrodynamic bearing support construction for accurate twin grinder Download PDFInfo
- Publication number
- CN109500730A CN109500730A CN201811546582.8A CN201811546582A CN109500730A CN 109500730 A CN109500730 A CN 109500730A CN 201811546582 A CN201811546582 A CN 201811546582A CN 109500730 A CN109500730 A CN 109500730A
- Authority
- CN
- China
- Prior art keywords
- hydrodynamic bearing
- gear
- screw
- box
- bearing seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010276 construction Methods 0.000 title claims abstract description 7
- 239000000446 fuel Substances 0.000 claims abstract description 3
- 238000009434 installation Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 5
- 238000003754 machining Methods 0.000 abstract description 4
- 239000003921 oil Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000003801 milling Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241000237858 Gastropoda Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
Abstract
The invention belongs to semiconductor processing equipment technical field, in particular to a kind of hydrodynamic bearing support construction for accurate twin grinder.Including gear-box；Gear-box is installed on bottom plate, and gear-box side is additionally provided with driving motor, is connected with main pulley on driving motor；The bottom of main shaft is set in gear-box by swivel bearing, and bottom end connects worm gear mechanism, and middle part is externally provided with support sleeve, top connecting trays；Pallet and support inner room are equipped with hydrodynamic bearing seat, and hydrodynamic bearing is installed on hydrodynamic bearing seat；Driven pulley is connected by key the tail end for being mounted on worm screw, and driven pulley is connect with drive pulley by belt；It is provided with interconnected disengaging oilhole on support sleeve and hydrodynamic bearing seat, forms inlet and outlet of fuel channel.For the present invention compared to previous crossed roller bearing, the oil film thickness between this hydrodynamic bearing and hydrodynamic bearing seat is uniform, and stability is good, large carrying capacity, and runs smoothly, and machining accuracy is high.
Description
Technical field
The invention belongs to semiconductor processing equipment technical field, in particular to a kind of dynamic pressure for accurate twin grinder
Bearing support structure.
Background technique
Over this year, with the rapid development of semicon industry, semiconductor chip demand is expanded rapidly, semiconductor machining work
The process equipment of sequence upstream is also rapidly developed.Milling apparatus is as the most important process in semi-conductor silicon chip process
One of, the quality of equipment performance has crucial effect to the quality of finished chip and integrated circuit.Current Domestic high-precision
Precise finiss process equipment depends on import, lacks autonomous milling apparatus and technology.Although Some Domestic enterprise is drawing
Into on the basis of import equipment, independent research milling apparatus is started, but the equipment machining accuracy and stability developed are still
It is to be improved.Many technological difficulties become the large drag forces of home equipment further developed.Such as existing most of grinding
Under equipment abrasive disk body supports using crossed roller bearing structure, but for relatively large milling apparatus, model
Biggish crossed roller bearing does not ensure that good flatness and stability, leads to the flat of the large-sized silicon wafers processed
Face degree cannot be broken through always toward better direction.Although existing other equipment develop hydrostatic bearing to replace, technology is still
So immature, the stability of function is still to be tested.
Summary of the invention
The technical problem to be solved by the present invention is to overcome deficiency in the prior art, provide and a kind of two-sided grind for accurate
The hydrodynamic bearing support construction of grinding machine.
In order to solve the above technical problems, solution of the invention is:
A kind of hydrodynamic bearing support construction for accurate twin grinder, including hydrodynamic bearing, main shaft, worm and gear machine
Structure and gear-box；
Gear-box is installed on bottom plate, and gear-box side is additionally provided with driving motor, is connected with main pulley on driving motor；
The bottom of main shaft is set in gear-box by swivel bearing, and bottom end connects worm gear mechanism, and middle part is externally provided with branch
Support set, top connecting trays；Pallet and support inner room are equipped with hydrodynamic bearing seat, and hydrodynamic bearing is installed on hydrodynamic bearing seat；From
Dynamic belt pulley is connected by key the tail end for being mounted on worm screw, and driven pulley is connect with drive pulley by belt；
It is provided with interconnected disengaging oilhole on support sleeve and hydrodynamic bearing seat, forms inlet and outlet of fuel channel.
As an improvement main pulley is connected by key the output shaft end in driving motor, driving motor passes through screw
It is connected on motor cabinet, motor cabinet, which is connected by screw to, to be fixed on bottom plate.
It is mounted on bottom plate as an improvement gear-box is connected by screw to.
As an improvement being also connected with connecting plate between hydrodynamic bearing seat and pallet.
As an improvement connecting plate is connect by screw with main shaft, pallet is connect by screw with connecting plate.
As an improvement the input terminal of worm gear and main shaft is fixed together by screw, under grind disk by pin with
Pallet connection.
As an improvement support sleeve is connect by screw with gear-box, hydrodynamic bearing seat is connected by screw to installation branch
On support set.
As an improvement worm and gear is double enveloping wormwheel worm screw.
Compared with prior art, the beneficial effect of the invention patent is:
Compared to previous crossed roller bearing, the oil film thickness between this hydrodynamic bearing and hydrodynamic bearing seat is uniform,
Stability is good, large carrying capacity, and runs smoothly, and machining accuracy is high.
Detailed description of the invention
Fig. 1 is whole front view of the invention；
Fig. 2 is cross-sectional view of the invention；
Fig. 3 is the oil inlet circuit of oil circuit of the invention；
Fig. 4 is the oil return line out of oil circuit of the invention.
The label in accompanying drawing is: 1- bottom plate, 2- motor cabinet, 3- driving motor, 4- main pulley, 5- driven pulley, 6-
Worm screw grinds disk, 8- pallet, 9- hydrodynamic bearing seat, 10- support sleeve, 11- gear-box, 12- worm gear, 13- main shaft, 14- connection under 7-
Plate, 15- hydrodynamic bearing, 16- swivel bearing.
Specific embodiment
Present invention is further described in detail with specific embodiment with reference to the accompanying drawing:
A kind of hydrodynamic bearing support construction for accurate twin grinder as shown in Figure 1 to Figure 2, including hydrodynamic bearing
15, main shaft 13, worm gear mechanism and gear-box 11.
Gear-box 11, which is connected by screw to, to be mounted on bottom plate 1, and 11 side of gear-box is additionally provided with driving motor 3, main belt
Wheel 4 is connected by key the output shaft end in driving motor 3, and driving motor 3 is connected by screw on motor cabinet 2, and motor cabinet 2 is logical
Screw is crossed to be fastened on bottom plate 1.
The bottom of main shaft 13 is fixedly arranged in gear-box 11 by swivel bearing 16, and bottom end connects worm gear mechanism, worm gear
12 worm screws 6 belong to 12 worm screw 6 of double enveloping wormwheel.Middle part is externally provided with support sleeve 10, top connecting trays 8.Pallet 8 and support sleeve 10
Between be equipped with hydrodynamic bearing seat 9, hydrodynamic bearing 15 is installed on hydrodynamic bearing seat 9.Driven pulley 5, which is connected by key, is mounted on snail
The tail end of bar 6, driven pulley 5 are connect with drive pulley by belt.The input terminal of worm gear 12 and main shaft 13 passes through screw
It is fixed together, connecting plate 14 is connected by screw to the top for being fixed on main shaft 13, and pallet 8 is connected by screw to and connects
Plate 14 is fixed, under grind disk 7 and connect by pin with pallet 8.
It is provided with oilhole on support sleeve 10 and hydrodynamic bearing seat 9, forms oil circuit, two-way oil inlet, as shown by the arrows in Figure 3, two
Road is fuel-displaced, as shown by the arrows in Figure 4, opens grease pump, will form between the lower end surface and hydrodynamic bearing seat 9 of hydrodynamic bearing 15
Certain thickness stable oil film can grind the operating of disk 7 under gentle support.
The course of work of the invention are as follows: open driving motor 3, worm screw 6 is driven by main pulley 4 and driven pulley 5
Rotation, worm screw 6 drive the worm gear 12 being engaged with to rotate, and worm gear 12 drives the main shaft 13 being attached thereto, and main shaft 13 passes through connection
Plate 14 and pallet 8 grind the rotation of disk 7 under driving.
Finally it should be noted that the above enumerated are only specific embodiments of the present invention.It is clear that the invention is not restricted to
Above embodiments can also have many variations.Those skilled in the art can directly lead from present disclosure
Out or all deformations for associating, it is considered as protection scope of the present invention.
Claims (8)
1. a kind of hydrodynamic bearing support construction for accurate twin grinder, which is characterized in that including hydrodynamic bearing, main shaft,
Worm gear mechanism and gear-box；
The gear-box is installed on bottom plate, and gear-box side is additionally provided with driving motor, is connected with main pulley on driving motor；
The bottom of the main shaft is set in gear-box by swivel bearing, and bottom end connects worm gear mechanism, and middle part is externally provided with branch
Support set, top connecting trays；Pallet and support inner room are equipped with hydrodynamic bearing seat, and hydrodynamic bearing is installed on hydrodynamic bearing seat；From
Dynamic belt pulley is connected by key the tail end for being mounted on worm screw, and driven pulley is connect with drive pulley by belt；
It is provided with interconnected disengaging oilhole on support sleeve and hydrodynamic bearing seat, forms inlet and outlet of fuel channel.
2. structure according to claim 1, which is characterized in that the main pulley is connected by key in driving motor
Output shaft end, driving motor are connected by screw on motor cabinet, and motor cabinet, which is connected by screw to, to be fixed on bottom plate.
3. structure according to claim 1, which is characterized in that the gear-box, which is connected by screw to, is mounted on bottom plate
On.
4. structure according to claim 1, which is characterized in that be also connected with connection between the hydrodynamic bearing seat and pallet
Plate.
5. structure according to claim 1 or 4, which is characterized in that the connecting plate is connect by screw with main shaft, institute
The pallet stated is connect by screw with connecting plate.
6. structure according to claim 1, which is characterized in that the input terminal of the worm gear and main shaft connects by the way that screw is fixed
It is connected together, disk is ground under described and is connect by pin with pallet.
7. structure according to claim 1, which is characterized in that support sleeve is connect by screw with gear-box, hydrodynamic bearing
Seat is connected by screw on installation support sleeve.
8. structure according to claim 1, which is characterized in that the worm and gear is double enveloping wormwheel worm screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811546582.8A CN109500730A (en) | 2018-12-18 | 2018-12-18 | A kind of hydrodynamic bearing support construction for accurate twin grinder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811546582.8A CN109500730A (en) | 2018-12-18 | 2018-12-18 | A kind of hydrodynamic bearing support construction for accurate twin grinder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109500730A true CN109500730A (en) | 2019-03-22 |
Family
ID=65752843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811546582.8A Pending CN109500730A (en) | 2018-12-18 | 2018-12-18 | A kind of hydrodynamic bearing support construction for accurate twin grinder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109500730A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397949A (en) * | 2001-07-17 | 2003-02-19 | 松下电器产业株式会社 | Spindle motor, information recording and reading device with same, and spindle motor mfg. method |
| CN2894939Y (en) * | 2006-04-30 | 2007-05-02 | 赵尧生 | Drive separating device of upper-lower grinding disk for two-side lapping machine |
| CN203738564U (en) * | 2014-03-20 | 2014-07-30 | 江西中航光学设备有限公司 | Two-sided grinding machine with planar hydrodynamic journal bearing |
| JP5935926B1 (en) * | 2015-04-28 | 2016-06-15 | 株式会社Sumco | Wafer double-side polishing equipment |
| CN206344010U (en) * | 2016-12-28 | 2017-07-21 | 浙江晶盛机电股份有限公司 | A kind of accurate twin grinder agent structure of use hydrostatic bearing structure |
| CN207393749U (en) * | 2017-11-09 | 2018-05-22 | 浙江森永光电设备有限公司 | A kind of hydrodynamic kelmet |
| CN209533061U (en) * | 2018-12-18 | 2019-10-25 | 浙江晶盛机电股份有限公司 | Hydrodynamic bearing support construction for accurate twin grinder |
-
2018
- 2018-12-18 CN CN201811546582.8A patent/CN109500730A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1397949A (en) * | 2001-07-17 | 2003-02-19 | 松下电器产业株式会社 | Spindle motor, information recording and reading device with same, and spindle motor mfg. method |
| CN2894939Y (en) * | 2006-04-30 | 2007-05-02 | 赵尧生 | Drive separating device of upper-lower grinding disk for two-side lapping machine |
| CN203738564U (en) * | 2014-03-20 | 2014-07-30 | 江西中航光学设备有限公司 | Two-sided grinding machine with planar hydrodynamic journal bearing |
| JP5935926B1 (en) * | 2015-04-28 | 2016-06-15 | 株式会社Sumco | Wafer double-side polishing equipment |
| CN206344010U (en) * | 2016-12-28 | 2017-07-21 | 浙江晶盛机电股份有限公司 | A kind of accurate twin grinder agent structure of use hydrostatic bearing structure |
| CN207393749U (en) * | 2017-11-09 | 2018-05-22 | 浙江森永光电设备有限公司 | A kind of hydrodynamic kelmet |
| CN209533061U (en) * | 2018-12-18 | 2019-10-25 | 浙江晶盛机电股份有限公司 | Hydrodynamic bearing support construction for accurate twin grinder |
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