CN109490148A - A kind of scan-type substrate surface detection method and device - Google Patents
A kind of scan-type substrate surface detection method and device Download PDFInfo
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- CN109490148A CN109490148A CN201811643903.6A CN201811643903A CN109490148A CN 109490148 A CN109490148 A CN 109490148A CN 201811643903 A CN201811643903 A CN 201811643903A CN 109490148 A CN109490148 A CN 109490148A
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- 239000000758 substrate Substances 0.000 title claims abstract description 252
- 238000001514 detection method Methods 0.000 title claims abstract description 49
- 239000007788 liquid Substances 0.000 claims abstract description 150
- 238000000034 method Methods 0.000 claims abstract description 33
- 230000002209 hydrophobic effect Effects 0.000 claims description 24
- 230000005484 gravity Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 230000029052 metamorphosis Effects 0.000 abstract description 2
- 238000012986 modification Methods 0.000 description 37
- 230000004048 modification Effects 0.000 description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- 238000007385 chemical modification Methods 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 21
- 230000007547 defect Effects 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 239000005357 flat glass Substances 0.000 description 7
- 206010019133 Hangover Diseases 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 238000012512 characterization method Methods 0.000 description 3
- 238000005034 decoration Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 3
- 239000005052 trichlorosilane Substances 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000005661 hydrophobic surface Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- -1 perfluoro Chemical group 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 241001365789 Oenanthe crocata Species 0.000 description 1
- 239000004218 Orcein Substances 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- WOLDFAYTXKMDAQ-UHFFFAOYSA-N chlorotrifluorosilane Chemical compound F[Si](F)(F)Cl WOLDFAYTXKMDAQ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical group 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000813 microcontact printing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 235000019248 orcein Nutrition 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N13/00—Investigating surface or boundary effects, e.g. wetting power; Investigating diffusion effects; Analysing materials by determining surface, boundary, or diffusion effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/22—Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Sampling And Sample Adjustment (AREA)
- Automatic Analysis And Handling Materials Therefor (AREA)
Abstract
The present invention provides a kind of scan-type substrate surface detection method and device, and using drop in the uniformity of the motion detection substrate of substrate surface, method equipment is simple, does not cause to damage to substrate surface, is suitable for the fixed point detection and conventional detection of nucleus.During detection, substrate tilts certain angle, and drop does not slide actively on the surface of substrate, draws liquid drop movement with traction device.During movement, the region detected by needs judges the uniformity of substrate surface by the metamorphosis of drop.
Description
Technical field
The present invention relates to a kind of method and apparatus of scan-type substrate surface detection, utilize drop detection biology, chemistry etc.
The uniformity of field substrate surface, belongs to biochemical field.
Background technique
Various substrates are largely used in the fields such as biochemistry.Substrate of the present invention generally refer to chemistry or
The fields such as biology it is common have surface texture, surface chemical modification, or the substrate without chemical modification.Common substrate ratio
If glass slide, biochemistry chip, semiconductor technology have piece of uniform array, hydrophobic chemical modifies piece, special chemical
Modify sheet glass etc..
All there is stability in the common various chemistry in the surface of substrate or physical modification.For example, biochip
The uniformity of middle point sample, the uniformity of surface etching, the surface uniformity of the substrate of chemical modification in semiconductor chip.Substrate
There are many detection methods for stability.For example, bigger physical imperfection can be repaired with the methods of projection detection, bigger chemistry
The detection of decorations defect can be detected with chemical modification techniques such as fluorescence.Different detection methods can be suitable for different feelings
Condition.The present invention provides a kind of simple detection device and method, using drop substrate surface motion detection substrate it is uniform
Property, method is simple, does not cause to damage to substrate surface, is suitable for the fixed point detection and conventional detection of nucleus.
Summary of the invention
The present invention provides a kind of scan-type substrate surface detection method, which is characterized in that substrate inclination, on the surface of substrate
Add the first liquid drop；Traction device and the first liquid are contacted, the first liquid motion is guided with traction device；Pass through the first liquid
The uniformity of the state-detection substrate surface of body liquid drop movement；Wherein, first liquid drop is not led under gravity
It is dynamic to slide；First liquid drop moves under the action of traction device.
The present invention provides a kind of scan-type substrate surface detection method, includes the following steps, substrate is tilted；Traction is filled
Rest against nearly substrate；Add the first liquid drop to substrate surface by the liquid filling hole on traction device head；With traction device guidance the
One liquid motion；Pass through the uniformity for the state-detection substrate surface that the first liquid drop moves；Wherein, the first liquid liquid
Drop does not slide actively under gravity；First liquid drop moves under the action of traction device.
According to preferred embodiment, the substrate inclination refers to substrate surface horizontal by 30-90 degree angle.
According to preferred embodiment, the substrate inclination refers to substrate surface horizontal by 90-135 degree angle.
According to preferred embodiment, the substrate surface hydrophobic chemical modification.
According to preferred embodiment, first liquid is water.
According to preferred embodiment, first liquid is aqueous liquid.
According to preferred embodiment, the traction device is injection needle, dispensing pipette tips, pipettor gun head or other
Article with sharp head.
According to preferred embodiment, the traction device and the first liquid contact portion Hydrophilic modification
According to preferred embodiment, the amount of first liquid drop is 0.005-0.1mL；It is preferred that 0.005-
0.05mL；More preferable 0.01-0.04mL；More preferable 0.03mL.
According to preferred embodiment, the traction device does not contact the surface of substrate.
According to preferred embodiment, the volume of described first liquid drop is determined according to the hydrophobe situation on surface.One
As substrate need to tilt certain angle, such as 30 degree or 45 degree or 60 degree or 90 degree.When surface modification has fluoro
When the substrate of silane tilts 90 degree, in surface plus about 0.01ml pure water；Under the action of surface tension, water droplet can't be straight
Connect landing substrate surface；Use syringe needle or pipettor gun head as traction device, water droplet can be along the direction of traction
Movement.This movement is gravity and tractive force is coefficient as a result, so whole move downward.When traction device is upward
When movement, water droplet can be detached from traction device.When water droplet is by modifying non-uniform surface, such as hydrophobic modification
There is the defect of a 1mm or so on surface, and water droplet, which has apparent residual phenomena, causes water droplet to become smaller, or entire water droplet cannot continue
Movement.
According to preferred embodiment, then the substrate of non-chemical modification, first progress hydrophobic chemical modification detects substrate
The uniformity on surface.
According to preferred embodiment, the substrate of non-chemical modification, progress hydrophobic chemical modification first, then detect substrate table
The uniformity in face finally removes the chemical modification on surface with plasma.
According to preferred embodiment, the substrate of non-chemical modification modifies perfluoro chlorosilane using the method for CVD；Example
Such as perfluoro capryl trichlorosilane.
According to preferred embodiment, the motion path of traction device is irregular.
According to preferred embodiment, traction device is moved downward.
According to preferred embodiment, the surface of the substrate is uniform hydrophobic modification, and first liquid is water.
According to preferred embodiment, substrate package is formed into chip, chip gripper is mounted on fixed device chip bench, it can
With detection chip surface.
The present invention provides a kind of scan-type substrate surface detection device, including substrate holding apparatus, traction device, the first liquid
Body liquid-adding device；Wherein, substrate is fixed on substrate holding apparatus, and the first liquid liquid-adding device is used to add first to substrate surface
Liquid drop, traction device are used to draw the movement of the first liquid drop.
The present invention provides a kind of scan-type substrate surface detection device, including substrate holding apparatus, traction device, the first liquid
Body liquid-adding device；Wherein, substrate is fixed on substrate holding apparatus；The head of the traction device has liquid filling hole；First liquid
Body liquid-adding device passes through pipeline connection to traction device；First liquid liquid-adding device is used to pass through traction device head to substrate table
Face adds the first liquid drop, and traction device is used to draw the movement of the first liquid drop.
According to preferred embodiment, the traction device includes motor, motor motion control device, contact；Wherein,
The contact moves driven by the motor, motor motion control device for controlling motor, contact and drop contact
Part has contact head, and contact head is for contacting drop and driving liquid drop movement.
According to preferred embodiment, the first liquid liquid-adding device is not connected to traction device.
According to preferred embodiment, which is characterized in that first liquid drop does not slide freely in substrate surface.
According to preferred embodiment, which is characterized in that the substrate holding apparatus fixes substrate inclination.
According to preferred embodiment, which is characterized in that the substrate inclination refers to that substrate surface is in horizontal direction
45-90 degree angle.
According to preferred embodiment, which is characterized in that the substrate surface hydrophobic chemical modification.
Substrate of the present invention refers to substrate in general sense.Such as general biochemical field is common
, chemical modification or non-chemical modification, by or without micro-nano technology form surface micro-structure there is fixed shape
Piece.
The invention discloses a kind of methods that simple, dynamic judges substrate surface uniformity.Pass through the dynamic of contact angle
Variation, can detecte the uniformity in entire piece sublist face.Different from general apparatus for measuring contact angle, method of the present invention
Or device has following characteristics: (1) defect for the detection substrate surface modification that can be pinpointed；(2) according to the property of camera system
Can, it can detecte very small-scale surface property variation on piece.For example, having 200 microns of sizes on the substrate of 25*75
The surface uniformity of the spot of left and right is had any different with other regions, can be detected by the metamorphosis of drop.According to taking the photograph
As the performance and substrate of system and the speed of relative droplet motion, the non-uniform areas of about 100 microns can detecte.
(3) it cannot accurately determine substrate for the contact angle of the first liquid.But it can qualitative comparison.(4) liquid is on the surface of substrate
In hydrophobic state, absorption is not easily caused generally, it will not damaging substrate.
In general biological field, during especially producing, the modification uniformity of substrate surface is very rambunctious.
Such as common gas phase modification or liquid modification, the uniformity on surface has very big difference.Usually, such as one carries
The substrate of slide size, probably due to having the surface modification of the point of the very little of 100 micron levels the reason of dust or cleaning
Existing defects.Conventional characterization method perhaps cannot directly detect this defect or need to pay damage base
The cost of piece；It is not appropriate for comprehensive quality inspection.
Method of the present invention can not accurate detection substrate surface for water or other solution contact angle.But
It is the different surfaces property that method of the present invention can compare identical substrate.Such as identical hydrophobic modification, a base
The surface contact angle of piece is 110 degree, another contact angle is 95 degree.When with the instrument test, pass through the angle of its formation
Degree can be with significant difference.
Detailed description of the invention
A drop is added on Fig. 1 substrate, drop is in substrate surface.
Fig. 2 draws liquid drop movement using traction device, schemes in motion process.
Fig. 3 traction device continues to draw liquid drop movement, schemes in motion process.
Fig. 4 substrate enters the first liquid schematic diagram.
Fig. 5 substrate surface detection system.
The detection of the non-homogeneous modification substrate of Fig. 6.
Fig. 7 uniformly modifies the detection of substrate.
Specific embodiment
The present invention is now used following example as explanation by core content in order to further illustrate the present invention.Embodiment
It is the present invention not to be caused to limit in order to which Summary is explained further.
Substrate belongs to the common substrate of biochemistry perhaps IC industry by or without chemical modification.Substrate has spy
Fixed shape, such as rectangle, it is trapezoidal etc..
Substrate is hydrophobic or hydrophilic modify is common method of modifying.In general, between various modifiers and substrate background,
Hydrophilic and hydrophobic is not complete identical, that is to say, that before and after chemical modification, substrate surface hydrophilic and hydrophobic can change.It is special
It is other, such as biochip, protein-chip, sequence testing chip etc., need array or comprehensive substrate surface is carried out
Modification.Substrate modify result characterization be a very difficult thing, particularly, on some substrate, if exist a little or
The modification defect of person's threadiness is difficult characterization.The method that the present invention provides can be examined on the basis of a large amount of integrated datas
Survey the uniformity of substrate surface modification.
The uniformity of heretofore described substrate refers to the uniformity of substrate entirety.Such as protein uniform array point
Sample chip, which form the hydrophobe of periodic arrangement or hydrophilic difference arrays.For example, substrate surface has micro- hole of array,
1 micron of depth, 1 micron of opening diameter, cylindrical body, Square array, 2 microns of the period, surface process or pungent without perfluor
Base trichlorosilane modification.For example, substrate surface hydrophobic angle is 90 degree, the hydrophobic of array then is prepared with the method for micro-contact printing
Horizontal line, 2 microns of line width, 4 microns of the period.Similar, whole uniform substrate can be carried out detecting.
In general, when one drop water or other liquid drop when substrate surface, meet certain condition can produce it is thin
The effect of water, that is, drop are greater than 90 degree in the contact angle of substrate surface.When substrate tilt to certain angle when
It waits, bigger drop can slide substrate surface, and path is uncontrollable.Even if the chemical modification of substrate surface is very
Uniformly, the motion path of drop can not be controlled.In the present invention, within a certain volume by drop control, inclination is certain
Angle will not autokinetic movement under gravity.Then the traction device of a contact drop is utilized, it can control liquid
The motion path of drop.Generally speaking, this movement is tractive force and the gravity synergy of traction device.Certainly, here
Also it is doped with the influence of surface tension.Under the action of traction device, drop can produce a kind of downward movement.If it is transported
In dynamic track, there is the hydrophobe in region, more precisely, substrate surface has bigger difference for the close and distant property of drop；
It then will appear drop stop motion, hangover etc. significantly to change.Certainly, this variation and the uniformity with substrate surface are to close
Connection.
In general, entire substrate level is placed, and the liquid of substrate surface is in different location when substrate does not tilt
Gravity is identical.In this case, it is the thing being difficult that drop is directly drawn using traction device and carries out movement.Pass through
It is a large amount of to attempt it can be found that general traction device, for example the syringe for protruding into liquid using syringe needle is as traction device
It cannot make liquid motion.For example, the pipette tips of the liquid-transfering gun of head diameter about 1mm, can not draw liquid motion.
In general, under the synergy of gravity, this traction becomes controllable when substrate inclination.
The effect of traction device is exactly to guide liquid drop movement, it is therefore necessary to there is a smaller head, it being capable of Fluid Contacting
Drop forms movement traction by surface tension.According to different drop ingredients, traction device, which generally requires, does different surfaces
Modification.For example, having relatively good effect using the traction device head of non-hydrophobic material when drop is water.If
Head is more sharp, such as syringe needle, and hydrophobic head can also play good effect.
The not stringent limitation of the size of drop.Restriction of the size of drop by two conditions, drop first cannot be too
Greatly, it when substrate tilts certain angle, cannot directly be slid on substrate；Second, cannot be too small, too small drop is led
Draw relatively difficult, and its hangover is also not easy to observe.In general, when substrate is hydrophobic modification, through overtesting, 0.005-
0.1mL is the suitable volume of the rate of exchange.Under this volume, even if certain substrate tilt angles reach 60 degree, drop will not be free
It slides.The size of drop is also limited by surface, and the hydrophilic and hydrophobic on surface also will affect the total volume of liquid.
In general, be added drop every time with identical volume, drop by its trailing length of identical path and size,
Raffinate is also identical.On the surface of even sheet, the shape of drop is also to be basically unchanged in movement.This characteristic makes it can
With the detection for surface quality, if to have chemical modification non-uniform areas or substrate surface to have strong on the surface of substrate
Relief fabric, will lead to movement in drop deformation occurs.
Deformation occurs when the movement of drop, can not directly calculate the degree of irregularity of its chemical modification, but
It is that general range can be determined by the accumulation of experience.It is found through overtesting, when hydrophobic surface is for the average contact angle of water
120 degree, when the contact angle of defect area only has 90 degree or so, this difference can drop run have in shape it is ten clearly demarcated
Aobvious performance.
In general, being conducive to more accurately show the deformation in liquid drop movement using high-resolution quick camera.
In general, can significantly observe the deformation in movement using external camera system.The direction of camera system
Do not need the direction of vertical plate, it has been experienced that, camera system can be in the direction for being more advantageous to shooting region of streaking.
In general, use pipettor as liquid feeding drip apparatus be proper.Pipettor can quantitatively add drop
Enter to substrate surface.
Substrate can be fixed on substrate holding apparatus with common mode.The effect of substrate holding apparatus is so that substrate
It fixes at an angle.It is fixed in general, substrates of different can choose different angle.The fixed angle of substrate is general
It is with level at 45-90 degree angle (90-135 degree angle).When substrate level is placed, the drop of the hydrophobic surface of general material surface
It cannot easily be moved by traction device.Special, such as the material of Teflon plated film, surface hydrophobicity degree is relatively high, utilizes
When water is as drop, 40 degree of angles of inclination or so can make drop be moved by specific traction device.
When substrate is tilted a certain angle, according to the difference of angle, the first liquid of different volumes can choose.As long as
So that the first liquid does not slide actively on the surface of substrate, and can be moved under the action of traction device.For example, one
A substrate surface is covered with cylinder, and 1 micron of diameter, 1 micron of depth, 2 microns of micropore of period is modified with common fluoric silane
After, contact angle can achieve 120 degree or so；When the pure water of 0.01-0.05mL is added as the first liquid, drop is not
It can actively slide, and can be moved under the traction of syringe needle.The volume of drop is limited to tilt angle, surface shape
The many factors such as condition, traction device.
The head of general traction device contacts drop.The head of traction device can not be too big, and in the mistake of traction
Cheng Zhong is not easy to touch the surface of substrate.Even if traction device is similar to syringe needle, in the case where touching substrate surface,
Also it could be formed with the traction of effect, should not also touch substrate surface, avoid damaging.
When traction device uniform motion, the liquid drop movement state on the surface of homogeneous substrate is constant.
Correspondingly, the present invention also provides following technology, as comparing.
The present invention provides a kind of substrate surface detection device, which is characterized in that including mobile device, the first container, and first
Liquid, angle detection device；First liquid containing is in the first container；The mobile device is for making substrate and the first liquid
Body generates relative motion；The angle detection device is used to detect the angle and contact line between the first liquid and substrate.
According to preferred embodiment, the mobile device includes motor, linking arm, fixture；Motor is used to provide power,
Linking arm is used for clamping substrate for connecting motor and fixture, fixture.
According to preferred embodiment, the mobile device includes motor, linking arm, the fixed device of the first container, motor
It is used to provide power, linking arm is for connecting the fixed device of motor and the first container, and the fixed device of the first container is for fixing the
One container.
The present invention provides a kind of substrate surface detection device, which is characterized in that including mobile device, the first container, and first
Liquid, angle detection device；First liquid containing is in the first container；The mobile device is for making substrate and the first liquid
Body generates relative motion；The angle detection device is used to detect the angle between the first liquid and substrate.
Angle between first liquid and substrate refers not only to the folder between the substrate surface of certain point and liquid
Angle, further includes the angle information of difference, and this information can also feed back the contact line between substrate surface and the first liquid.
Common, using motor as power device, i.e. mobile device.Mobile device transmits motion to device end
Connecting plate or other bindiny mechanisms.According to demand, can connect again on the connecting plate of mobile device or other bindiny mechanisms
Connect a linking arm.Linking arm connects or extends directly into substrate and needs fixed position.Substrate is with fixture or bonding
Mode is connected to linking arm.The movement of motor control substrate can thus be used.
Common, using motor as power device, i.e. mobile device.Mobile device is directly or indirectly connected to container
Fixation device.The fixation device can be a pallet, be also possible to bracket.Container is placed on pallet or bracket.It is logical
This connection type is crossed, motor can directly control container together with the movement of liquid therein.
Motor directly controls substrate motion, or it is all feasible for directly controlling container movement.Motor as power device,
Its most important most uses is exactly so that substrate detection liquid corresponding with its (the first liquid) generates relative motion.
When substrate carries out hydrophobic modification, such as perfluor trichlorosilane；Pure water can be used as the first liquid.In first liquid
A small amount of dyestuff can be added, so that better effect of taking pictures is obvious.For example, red ink can be added in the first liquid.
In a reservoir, the liquid level of the first liquid is horizontal stable to first liquid containing.
In the case where special, second liquid can be added simultaneously in a reservoir.Special, using FC70 fluorocarbon oil as the second liquid
Body；Using the water with orchil as the first liquid.FC70 is completely immiscible with water.FC70 density is larger, positioned at the lower section of water,
Very distinct boundary is formed with water.When substrate enters the liquid in container, initially enter water, then by first,
The line of demarcation of second liquid, into FC70.Variation of the substrate for the contact angle of water can be detected first.Substrate can also be detected
The variation of the angle formed on the interface of the first, second liquid.It is special when substrate perfluor is hydride modified.When
When substrate passes through the liquid level of the first liquid, hydrophobic state is presented, forms bigger contact angle；This state is equivalent to substrate
By the interface of air and water.When substrate passes through the interface of the first, second liquid, new contact angle will form.
Special, when substrate pulls out again from the interface；Due to the influence of close and distant change of properties and substrate speed, meeting
Form new angle.Particularly, when not only including the first liquid in the first container further includes second liquid, institute is pulled out
The angle of generation is also significant.
When in container including the first liquid and second liquid.Due to its enter or and pull out the first liquid surface with
And the case where the first second liquid interface, is different, can detect many index simultaneously.Specifically, for example when substrate surface is dredged
When water is modified.It selects pure water as the first liquid, selects FC70 as second liquid.Utilize the first liquid-to-air interface
It can detecte whether substrate has the region not being chemically modified.Using the interface of the first liquid and second liquid, substrate into
When entering and pull out second liquid, the uniformity of substrate surface chemical modification can detecte.
In general, the result of detection may be influenced when the surface of substrate is there are when micro-machined figure.For example, working as
Substrate surface is micro- there are that can generate size about 400 because of the presence of micro-structure when the micro-structure of 100 microns, on interface
Rice liquid level non-uniform phenomenon below.When the size of micro-structure is less than 10 microns, the base in 100 microns of range scale
Originally it can't see error.According to the requirement of microstructure size and the Minimum Area for needing to detect, such case may change.
In general, the rate request that substrate enters liquid is uniform；Into liquid angle can it is slowly varying or
It is constant.The speed that substrate enters liquid can significantly influence the size of contact angle.Substrate can enter liquid at an angle.
Substrate can also enter liquid in rotary manner.As long as uniform contact angle can be generated, then it represents that the certain range of substrate
Inner surface performance is more stable.
In general, heretofore described uniform angle, is not identical contact angle.
In general, caning be found that subtleer surface evenness is distinguished using the picture of amplification.
In general, relatively stable hauling speed can be provided as power device using motor.
In general, using CCD as monitoring device, it can be with the difference of clearer display substrate surface uniformity.
Comparable, there is apparent difference in two kinds of technologies.In above-mentioned technology, it makes use of the water-immersed liquid of substrate
Contact angle judges the quality of surface modification.This technology belongs to the method screened on a large scale, is conducive to large batch of screening.
The detection of the substrate surface detection method of scan-type and device more suitable for nucleus or specific region.Work as base
The detection method being suitable for scan-type of quality testing obviously when piece surface divides different zones, in some region.
Embodiment 1
Glass substrate is provided, the size of substrate is 20*50mm, with a thickness of 1mm.Glass substrate progress surface is repaired first
Decorations.The method of surface modification is stifling for vacuum gas-phase.In a closed container, centrifuge tube is placed, wherein holding 100 microlitres
Trim,ethylchlorosilane.Sheet glass handles surface with plasma in advance.The sheet glass of processing is put into closed container, open from
The lid of heart pipe, vacuumizes, and vacuum pressure reaches 1000pa or less.After 1h, sheet glass is taken out, it is spare.
Substrate is passed through into fixed device, so that it tilts certain angle.As shown in Figure 1, substrate tilts 80 degree of angles.Then
15 microlitres of pure water is added on the surface with liquid-transfering gun.Since substrate surface is hydrophobic, and the influence of surface tension is greater than
The influence of gravity, therefore the not downward free movement of drop.Using syringe as traction device.Syringe needle Fluid Contacting
Drop, but substrate surface is not contacted, mobile syringe needle slowly, drop can move.Syringe needle and substrate table
Face is about at 30 degree of angles.Lower or bottom right, drop can also move the moving direction of syringe needle therewith slightly to the left.Syringe needle
Head probably 0.9mm is thick.With this method, it can detecte the substrate surface modification defect on liquid drop movement path.The present embodiment
In, also introduce photographic device.Photographic device is substantially horizontal positioned.
Referring to Fig. 1-3.Fig. 1, drop is added to substrate surface, stable on the surface, can't freely move downward.
Fig. 2 makes drop mobile, the pre-large post-small form of droplet formation using traction device.Fig. 3, drop continue to move, and process is very long
Path after, the form of drop is basic, and no change has taken place.
Embodiment 2
On the basis of embodiment 1, using macro device.Photographic device is to be conducive to the direction that shooting drop trails
Setting.It is general be shoot from top to bottom, and with vertical direction be in about 45 degree of angles.
Embodiment 3
On the basis of embodiment 1.The head of pipette tips using liquid-transfering gun or so traction device.It is sent out by preliminary experiment
Existing, the liquid-transfering gun pipette tips using 100 microlitres are proper traction devices.
Embodiment 4
On the basis of embodiment 1, substrate is become into the substrate that surface has micro- hole.The shape in micro- hole is cylindrical shape,
Circular diameter is 1 micron, and depth is 1 micron.Surface is covered with micro- hole, Square array, and the spacing between micro- hole is 1 micron.Traction dress
Liquid drop movement can normally be drawn by setting.Special, it can significantly observe, drop in the process of movement, has light
Washmarking hangover.By observation, it is believed that be that water enters micro- hole, when liquid drop movement, the water in micro- hole can't be completely out
Micro- hole.Also, the water in micro- hole volatilizees very rapid since volume is minimum, forms the hangover of light washmarking shape.But this
The hangover trailed with drop is not identical.The hangover of drop is easy to shoot without departing from drop itself.
Embodiment 5
On the basis of embodiment 4, the volume for changing the first liquid drop is 30 microlitres or 40 microlitres the experiment has found that
When 60 degree of angles of inclination, it may be by 10 microlitres of liquid-transfering gun pipette tips and form effective traction.Also, visually observe ratio
Biggish drop can be more convenient.
Comparative example 1
Glass substrate is provided, the size of substrate is 20*50mm, with a thickness of 1mm.Glass substrate progress surface is repaired first
Decorations.The method of surface modification is stifling for vacuum gas-phase.In a closed container, centrifuge tube is placed, wherein holding 100 microlitres
Trim,ethylchlorosilane.Sheet glass handles surface with plasma in advance.The sheet glass of processing is put into closed container, open from
The lid of heart pipe, vacuumizes, and vacuum pressure reaches 1000pa or less.After 1h, sheet glass is taken out, it is spare.The detection of substrate
Method And Principle is as shown in Figure 4.
Device is built: taking motor as power device.As shown in figure 5, a motor is fixed on bracket.Motor falls
It sets, the plate that can control lower end, which is done, accordingly to be moved up and down.A vertical clamping device, clamping device are connected below plate
Be a vertical plate, face paste has double-sided adhesive thereon.It is pasted by double-sided adhesive and is put down in vertical in one end of rectangle substrate
On plate.The substantially vertical placement of substrate.By this device, motor can control substrate and move up and down.Use a 50ML
Centrifuge tube as container.Suitable aqueous dye solutions (i.e. the first solution) is held in container.When substrate enters the first solution
When.A bigger angle is formed between liquid level same substrate, can visually be differentiated.It is found through overtesting, stable substrate
Surface is stable with the angle that the first liquid is formed；This process is continued until that substrate entirely enters in the first liquid.
Test discovery, when substrate surface has modification defect.For example, there have the region of a 1mm diameter not can be carried out to be hydrophobic
Modification.The angle that then substrate is formed with liquid can jump in the position.More specifically, the angle in this position can dash forward
So become smaller.Other positions angle in same horizontal line is then constant.With this method, the modification that can detecte on substrate lacks
It falls into.
Comparative example 2
On the basis of comparative example 1, increase photographic device.The position of suitable camera setting be not it is horizontal or
The vertical direction of person.On the basis of Fig. 5 device.The position of camera is being in about 20-30 degree angle with vertical direction, and is connect
Closely perpendicular to the front of substrate.This position can obtain picture more apparent than more visible and contrast.According to specific need
It asks, picture recognition program can be increased, judge automatically the suddenly change of substrate Yu liquid angle, to reach substrate between machine
Purpose.
Comparative example 3
On the basis of comparative example 1.Substrate clamping device is become larger；Container is changed into the burning of a 500Ml simultaneously
Cup.After clamping device becomes larger, can simultaneously clamping very more substrate.In this way, multiple substrates can be done simultaneously with the system
Surface testing.
Comparative example 4
According to comparative example 1, the substrate of same size is taken.Identical surface modification is done with embodiment 1.Surface modification is complete
Complete substrate measures its contact angle with contact angle instrument.The numerical value of contact angle is about 105 degree or so.Multi-point sampler, contact angle is all
In the range of being 104-106 degree.10 points are tested, cost 2-3 minutes is taken around.Unless fortune is especially good, otherwise it is difficult to send out
The defect on existing surface.
Comparative example 5
Take the substrate of comparative example 4.It is put into instrument described in embodiment 1.The defect of substrate surface is easy to be sent out
It is existing.
Comparative example 6
The substrate for taking two same sizes is cooked surface modification according to method described in comparative example 1.Wherein, substrate A table
The time of face modification is 3min, and the substrate B time is 1h.Surface modification finishes, and measures two substrates relative to water with contact angle instrument
Contact angle.The contact angle of substrate A is 95 degree, and substrate B is 106 degree.By two substrate clampings of A and B in the same measuring instrument
On.It measures.It can be found that substrate A, which contacts the angle generated with the first solution, is less than angle caused by substrate B.
Comparative example 7
According to device described in comparative example 1.Substrate can be fixed on top, by container by being simply transformed
It is fixed on the mobile plate of motor, so that container rises or falls, identical function may be implemented.
Comparative example 8
According to device described in comparative example 1.The clamping direction of substrate and the angle of vertical direction can change.
It is general.Substrate is arranged to the direction with vertical direction in 20-30 degree angle, is more advantageous to the observation of naked eyes.Different clampings
Different shapes or angle are presented from the liquid level of the first liquid in direction, the substrate that can observe.
Comparative example 9
According to device described in comparative example 1 and substrate.When substrate enters the first liquid；Form stable folder
Angle.The position of entire liquid level is radiated at using the light that light source generates.When surface modification is unstable, due to the change of its angle
Change, the light reflected can change significantly.The degree of stability of surface modification can be judged according to this variation.
Comparative example 10
According to device described in comparative example 1.Substrate is taken, trim,ethylchlorosilane hydrophobic modification, central area are around used
Fluoric silane modification.Modification condition is referring to embodiment 1.Substrate fills on detection means, the angle generated when into liquid
As shown in Figure 4.In Fig. 6, square structure above is substrate, is below liquid.It can be seen that when substrate enters liquid,
The outer ring of substrate annular is varied widely with angle caused by internal surface.This variation is exactly surface chemical modification
Caused by uneven.And, it is further seen that the middle position of substrate, angle have unexpected variation, and this variation also illustrates
Interposition is equipped with the non-uniform region of modification.
Comparative example 11
According to device described in comparative example 1 and substrate.Substrate enters the first liquid, forms stable angle.Especially
It should be noted that substrate is to enter liquid with certain speed and angle, although substrate surface produces stable angle,
But this angle can be different in different transverse directions.For example, as shown in fig. 7, substrate two sides are presented slightly upwards
Bending, substrate center have relatively flat region.This two sides tilt, and centre tends to the angle of parallel liquid level, in stable speed
It is stable under degree and uniform substrate conditions.
The embodiment is specific explanations of the invention, specific range of the invention is not caused to limit.
Claims (10)
1. a kind of scan-type substrate surface detection method, which is characterized in that substrate inclination adds the first liquid liquid on the surface of substrate
Drop；Traction device and the first liquid are contacted, the first liquid motion is guided with traction device；It is moved by the first liquid drop
The uniformity of state-detection substrate surface；Wherein, first liquid drop does not slide actively under gravity；Described
One liquid drop moves under the action of traction device.
2. the method according to claim 1, wherein the substrate inclination refer to substrate surface horizontal by
30-90 degree angle；It is preferred that 40-80 degree angle.
3. the method according to claim 1, wherein the substrate surface hydrophobic chemical is modified.
4. according to the method for claim 1, it is characterised in that, first liquid is aqueous liquid.
5. the method according to claim 1, wherein the traction device is injection needle, dispensing pipette tips, liquid relief
Device pipette tips or other articles with sharp head.
6. the method according to claim 1, wherein the amount of first liquid drop is 0.005-0.1mL；It is excellent
Select 0.005-0.05mL；More preferable 0.01-0.04mL；More preferable 0.03mL.
7. a kind of scan-type substrate surface detection method, includes the following steps, substrate inclination；Traction device is close to substrate；Pass through
The liquid filling hole on traction device head adds the first liquid drop to substrate surface；The movement of the first liquid drop is guided with traction device；
Pass through the uniformity for the state-detection substrate surface that the first liquid drop moves；Wherein, first liquid drop is in gravity
It is not slid actively under effect；First liquid drop moves under the action of traction device.
8. a kind of scan-type substrate surface detection device, including substrate holding apparatus, traction device, the first liquid liquid-adding device；
Wherein, substrate is fixed on substrate holding apparatus, and the first liquid liquid-adding device is used to add the first liquid drop to substrate surface, is led
Leading-in device is used to draw the movement of the first liquid drop.
9. a kind of scan-type substrate surface detection device, including substrate holding apparatus, traction device, the first liquid liquid-adding device；
Wherein, substrate is fixed on substrate holding apparatus；The head of the traction device has liquid filling hole；First liquid liquid-adding device is logical
Pipeline connection is crossed to traction device；First liquid liquid-adding device by the liquid filling hole on traction device head to substrate surface for being added
First liquid drop, traction device is for drawing the first liquid movement.
10. the traction device includes motor according to the device of any one of front claim, motor motion control device is connect
Contact element；Wherein, the contact moves driven by the motor, motor motion control device for controlling motor, contact with
The part of drop contact has contact head, and contact head drives liquid drop movement for contacting drop.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110987930A (en) * | 2019-12-21 | 2020-04-10 | 青岛科技大学 | Visual characterization method for self-cleaning behavior of surface of super-hydrophobic high polymer material |
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