CN109489640B - Line array detector for constant ground element resolution to ground remote sensing - Google Patents

Line array detector for constant ground element resolution to ground remote sensing Download PDF

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CN109489640B
CN109489640B CN201811162535.3A CN201811162535A CN109489640B CN 109489640 B CN109489640 B CN 109489640B CN 201811162535 A CN201811162535 A CN 201811162535A CN 109489640 B CN109489640 B CN 109489640B
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CN109489640A (en
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刘玉娇
李兴隆
张少伟
陈文�
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Shanghai Aerospace Control Technology Institute
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Abstract

A linear array detector for constant ground meta-resolution ground remote sensing is used for reducing optical geometric deformation caused by non-zero optical field of view and curvature of the earth, so that constant ground meta-resolution ground remote sensing is realized, and the linear array detector belongs to the technical field of ground remote sensing detectors. According to the invention, the detector crystal adopts an arc special-shaped photoetching model, so that the problem of collected light energy loss caused by discretization of arc imaging of the conventional area array detector can be effectively solved, and the light energy collecting area is increased, so that the light receiving capacity of the detector is improved; in the whole field of view, the wave aberration of the light wave received by the arc special-shaped detector is uniform, the resolution ratio is the same, and the geometric deformation of the detector during remote sensing imaging can be effectively reduced, so that the geometric correction algorithm is simplified, and the processing speed of the remote sensing image is further improved.

Description

Line array detector for constant ground element resolution to ground remote sensing
Technical Field
The invention relates to a linear detector for constant ground element resolution ground remote sensing, and belongs to the technical field of ground remote sensing detectors.
Background
The space remote sensing satellite can timely acquire optical information of global clouds, fog, haze, wind direction, water vapor, ice, snow, water and land boundaries, ground temperature, ocean surface temperature, soil temperature and humidity, typhoon and the like so as to be used for global disaster prevention and reduction.
The existing large-view-field remote sensing camera for the satellite has the common problem of non-uniform ground resolution of an optical image due to the existence of non-zero optical view field and the curvature of the earth no matter a line array or an area array. Visible/infrared radiometer (VIIRS) in SNPP satellite (PM orbit) in usa, 400m for sub-satellite spot resolution and 800m for scan band edge spatial resolution (value after information processing). The highest resolution of the sub-satellite point of the medium resolution spectrograph in Fengyun III is 250m, but the edge field of view is reduced to about 1500 m.
In view of the common problem of non-uniform ground resolution of optical images, researchers at home and abroad have also conducted a series of exploration and research. In order to reduce the influence of optical distortion, a panchromatic spectrum detector of an agile satellite represented by Freon dorsators (Pleiades) adopts a mode that 5 linear array CCD detectors are obliquely arranged on a focal plane, and a common linear shape arrangement mode is replaced by an arc shape, as shown in figure 7, so that the geometric deformation is effectively reduced. In 2015, a patent of "a rotating arc detector box for X-ray inspection equipment" was applied by the same fang-wei-shi technology limited company, and as shown in fig. 8, the problems of the difference of two-channel indexes, the inconsistency of image deformation processing, simplification of geometric correction and the like can be solved. In the invention, a plurality of detector crystals adopt a structure of being installed side by side, and the effects of reducing scattering and improving the wire resolution are better.
The invention provides a novel line array detector based on an optical imaging system of constant ground element resolution to ground remote sensing from a formation mechanism of non-uniform ground resolution. The method comprises a geometric model of the arc-shaped line array detector, a cutting and expanding method of any imaging azimuth angle, a forming method of the arc-shaped line array detector, an integration method of the detector and a reading circuit and an arrangement technology of the arc-shaped line array detector. According to the invention, the detector crystal adopts an arc special-shaped photoetching model, so that the light energy collecting capability of the detector can be effectively improved. Compared with the prior art, the problem of nonuniform ground resolution of an optical image in the traditional ground remote sensing optical imaging system can be solved in principle, the geometric deformation is effectively reduced, and the geometric correction is simplified.
Disclosure of Invention
The technical problem solved by the invention is as follows: the invention overcomes the defects of the prior art, and provides a linear array detector for constant ground meta-resolution ground remote sensing, which is used for reducing optical geometric deformation caused by non-zero optical field of view and curvature of the earth, thereby realizing the constant ground meta-resolution ground remote sensing.
The technical solution of the invention is as follows: a circular arc special-shaped line array detector for constant ground element resolution ground remote sensing comprises an image sensing element and a reading circuit; the image sensitive elements are imaging elements and are arranged in an arc shape; the image sensing element converts the detected optical signal into an electric signal, and the reading circuit converts the electric signal output by the image sensing element into a digital signal and outputs the digital signal to subsequent processing equipment.
Furthermore, the image sensing elements are provided with a plurality of rows, each row is provided with a plurality of image sensing elements, the geometric shapes, the sizes and the corresponding imaging azimuth angles of the image sensing elements in the same row are the same, and the imaging azimuth angle is an angle formed by the ground imaging area to the optical axis.
Further, the optical path difference between each row of image sensing elements satisfies f | (sec θ |)1-secθm)|<t; where f is the focal length, θ1The inclination angle of visual axis, theta, corresponding to the line 1 image sensormIs the visual axis inclination angle corresponding to the mth row of image sensing elements, and t is the set optical path difference threshold value.
Further, the readout circuit converts the electrical signal output by the image sensor into a digital signal, and includes: and directly outputting the data of each image sensitive element one by one, or combining a plurality of image sensitive elements into a group and outputting the data of the image sensitive elements group by group.
Further, the device also comprises a substrate and a base plate; the image sensing element, the substrate and the reading circuit are sequentially stacked and packaged on the substrate from top to bottom; the substrate is used for providing mechanical support and electrical functions; the substrate is used for forming a packaging structure of the arc-shaped line array detector and providing external electric pins.
Further, the base plate also comprises positioning holes which are uniformly distributed on the base plate along the outer arc and the inner arc of the base plate and are used for providing mechanical fixation and geometric positioning.
Further, the length of the inner arc segment of the image sensitive element is as follows
Figure BDA0001820331260000031
Wherein k is the distance between two positioning holes of the arc-out arc, σ is the imaging azimuth angle, IFOV is the instantaneous field of view of the optical system, and θ is the optical visual axis inclination angle.
Compared with the prior art, the invention has the beneficial effects that:
(1) the detector crystal adopts the arc special-shaped photoetching model, so that the problem of collected light energy loss caused by discretization of arc imaging of the conventional area array detector can be effectively solved, and the light energy collecting area is increased, so that the light receiving capacity of the detector is improved.
(2) The optical path of the imaging area projected to the ground by the arc special-shaped detector is aplanatic, and the geometrical deformation of the remote sensing image caused by the optical path difference can be solved in principle.
(3) In the whole field of view, the wave aberration of the light wave received by the arc special-shaped detector is uniform, the resolution ratio is the same, and the geometric deformation of the detector during remote sensing imaging can be effectively reduced, so that the geometric correction algorithm is simplified, and the processing speed of the remote sensing image is further improved
(4) The invention has compact integral structure, relatively long service life, wide application range and good market application prospect, is suitable for various working environments, and can still well run under complex working conditions.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a diagram illustrating a non-uniform resolution of conventional line-scan imaging;
FIG. 2 is a schematic diagram of a constant ground element resolution imaging system;
FIG. 3 is a schematic diagram of a constant ground element imaging acquired by an area array detector;
FIG. 4 is a diagram of geometrical parameters of a single row arc of a constant ground element resolution detector;
FIG. 5 is a schematic diagram of the image sensor area elevation as a function of imaging azimuth;
FIG. 6 is a schematic diagram showing the variation of the area enhancement retinue resolution of the image sensor;
FIG. 7 is a geometric diagram of a multi-row arc of a constant ground element resolution detector;
FIG. 8 is a schematic diagram of the basic components of a circular arc shaped detector;
FIG. 9 is a schematic view of a focal plane arrangement of Freon host star;
FIG. 10 is a schematic view of a rotating arc detector cassette for use in an X-ray examination apparatus.
Detailed Description
A novel line array detector for constant ground meta-resolution remote sensing can solve the problem of energy loss caused by optical imaging based on constant ground meta-resolution by using a traditional area array detector. When a traditional remote sensing satellite linear detector is used for push-broom imaging, the resolution of an optical image is not uniform, as shown in fig. 1, h is the flight height, S is the resolution right below the detector, and the resolution S' of an edge view field is different from S because the observation inclination angle theta of the edge of the view field is larger than the observation inclination angle of the center of the view field. As shown in fig. 2, assuming that the ground width of the imaging system is D, the optical path from the center of the imaging system to the imaging area is L, the angle of the ground imaging area to the optical axis is defined as the imaging azimuth angle σ, the ground height of the imaging system is h, the focal length of the imaging system is f, and the detector span is D. The optical system adopts a fixed inclination angle theta, and can ensure that optical path differences L from the arc line of the ground imaging area to the optical center are equal, thereby realizing constant ground element resolution.
As shown in fig. 3, when an area array detector with a pixel size b is used to collect an image, two problems are caused due to the inconsistency between the pixel size and the imaging geometry, one is that a plurality of square image sensors cannot completely receive ground radiation, for example, a third row and a second column of image sensors in the figure only receive partial radiation, which causes energy loss; and secondly, when the radiation area only occupies less than 0.5 of the area of the image sensitive element, image information is lost due to threshold setting during image discretization extraction. There is therefore a need to further optimize the geometric model of the detector.
The arc special-shaped linear array detector is based on a constant ground element resolution imaging system, the arc segment image sensitive elements are arranged according to the geometric layout shown in figure 4, the optical axis of the optical system is taken as the circle center, and the radius is r1The arc of the image sensor is uniformly arranged in a radial shape, and the geometric shape, the size and the corresponding instantaneous imaging azimuth angle beta of each image sensor are completely the same. The corresponding length of the inner arc section of each image sensing element is a1The corresponding length of the outer arc section is a2The corresponding length on the radius is b, and the instantaneous imaging azimuth angle is beta. The corresponding length of the inner arc of each image sensing element is as follows: a is1=r1β, the corresponding length of the circular arc in each image sensor is: a is2=r2β, then the area of a single image sensor can be estimated as:
Figure BDA0001820331260000051
the instantaneous imaging azimuth is:
Figure BDA0001820331260000052
the inner diameter of the arc special-shaped linear array detector corresponding to the detector with the width d is as follows:
Figure BDA0001820331260000053
the corresponding inner arc segment is:
Figure BDA0001820331260000054
the outer diameter of the arc special-shaped line array detector corresponding to the detector with the width d is as follows:
Figure BDA0001820331260000055
the corresponding outer arc sections are:
Figure BDA0001820331260000056
the area of the image sensitive element of the arc special-shaped line array detector is as follows:
Figure BDA0001820331260000057
when the number n of the image sensitive elements in each row of the detector is the same, the width d is also the same, the light receiving capacity of the arc special-shaped line array detector is stronger than that of a common area array detector, and the light receiving capacity is mainly reflected in that the light collecting area is further improved. The area array detector with the image sensitive element size b multiplied by b comprises the following components:
Figure BDA0001820331260000058
the area of the image sensitive element of the area array detector is
Figure BDA0001820331260000059
The light receiving area of the image sensor is increased as follows:
Figure BDA00018203312600000510
further simplification yields:
Figure BDA00018203312600000511
because, the imaging azimuth angle of the area array detector is 0<σ<π, therefore have
Figure BDA00018203312600000512
In summary, it can be seen that: delta >0
FIG. 5 shows the variation trend of the imaging azimuth angle σ from 0 to π Δ when the row resolution is 1024; FIG. 6 shows the azimuth angle when imaging
Figure BDA0001820331260000061
The trend of Δ changes as n changes from 256 to 5120.
The method for cutting and expanding any imaging azimuth angle of the arc special-shaped line array detector is characterized in that under the condition of ensuring that optical path differences are the same, an arc section can start from any angle and end at a corresponding angle according to the size of a field angle of an optical system. When the sizes of the image sensitive elements are consistent, the different imaging azimuth angles do not affect the observation resolution of the ground, and only affect the observation width of the ground. The ground imaging azimuth angle corresponding to the circular arc section can reach 2 pi at most, namely: 0< sigma < 2. pi.
The arrangement technology of the arc-shaped line array detector is characterized in that according to the geometric arrangement of a graph 4, the first arc section from the left is defined as the 1 st image sensing element, the second arc section from the left is defined as the 2 nd image sensing element, and the last arc section is defined as the nth image sensing element. The logic is detector output data logic, and corresponds to the image splicing geometrical logic layout when the detector is applied.
The arbitrary imaging multi-row expansion method of the arc special-shaped line array detector is characterized in that an arc segment can expand m rows along the radius direction within the range allowed by the optical path difference, as shown in fig. 7, the imaging azimuth angle of each row is the same, and the imaging azimuth angle expansion method is the same as that described above. The rows are sequentially defined as the 1 st row to the m th row from outside to inside along the radius direction, and each row is sequentially defined as the 1 st pixel to the nth pixel of the ith row from left to right. ATypically, m is much less than n. Assuming that the optical path from the optical axis to the arc-shaped detector is l, the focal length is f, and the visual axis inclination angle is θ, as shown in fig. 2, l is fsec θ. The inclination angle of visual axis corresponding to the 1 st line of image sensitive element is theta1The inclination angle of visual axis corresponding to the m-th row of image sensing elements is thetamIt is required that the optical path difference between the rows of detectors is less than a threshold t, i.e. f | (sec θ)1-secθm)|<t. The multi-line detector can also achieve equal optical path difference
The method for forming the arc-shaped special-shaped linear detector is characterized in that the geometric shape of the image sensing element of the detector prepared according to the invention is arc-shaped. The method can be used for etching a circular crystal grating pattern by adopting a photoetching method, a corresponding mask is manufactured according to the geometric shape of fig. 4, the circle center corresponding to the circular arc is taken as a starting point, cutting is carried out along the radius direction according to the design of the instantaneous azimuth angle, cutting is carried out along the tangent line vertical to the radius direction according to the design of the imaging azimuth angle of the detector, and the manufacturing process flow of the detector is not limited.
The detector reading circuit is characterized in that after the detector is molded, the connection mode of the detector and the reading circuit is not limited, an independent reading circuit is prepared for each image sensitive element, and the pixel values of the ith image sensitive element to the (i + k) th image sensitive element can be output according to requirements. The read-out circuit can adopt logic to read out the 1 st to the nth image sensitive elements at one time, and can also adopt a multi-path parallel output mode to divide the n image sensitive elements into k groups, and each group is
Figure BDA0001820331260000073
The image sensing elements are output from an output channel to increase the readout speed of the detector.
The arc special-shaped detector is characterized by comprising a substrate 2 and a photosensitive wafer fixed on the substrate, wherein an arc special-shaped line single or a plurality of rows of image sensing elements 1 are formed on the wafer through photoetching, a corresponding imaging azimuth angle sigma is formed, and the image sensing elements 1, the substrate 2 and a reading circuit 3 are packaged on a base plate 4 in a stacking mode as shown in figure 8. A plurality of positioning holes 5 for positioning the outer arc and the inner arc are distributed on the substrate 4, and the distance between the two positioning holes in the arc direction is k. If the instantaneous field of view IFOV, focal length f, optical boresight of the optical system is knownAngle theta, then the length of the inner arc segment of the image sensor should be selected to be
Figure BDA0001820331260000071
The arc special-shaped detector.
In order that the manner in which the invention is worked will become more apparent, the invention will be further described with reference to the following description and specific examples taken in conjunction with the accompanying drawings in which:
as shown in FIGS. 1-3, a schematic diagram of an imaging system of a line array detector for constant ground element resolution remote sensing is shown in FIG. 2, and it is assumed that the ground breadth of the imaging system is D and the imaging azimuth angle is D
Figure BDA0001820331260000072
The optical path from the center of the optical system to the imaging area is L, the height of the imaging system to the ground is h, the focal length of the optical system is f, and the detector span is d which is 32.768 mm. The schematic diagram of the optical system ground sampling model with constant ground element resolution is shown in fig. 3, and the sizes and shapes of the ground imaging units equally divided along the circular arc curve are completely the same.
Fig. 9 and 10 are schematic diagrams of a focal plane arrangement of Freon and a rotary arc detector box for an X-ray inspection device, respectively. A circular arc special-shaped linear array detector is based on a constant ground element resolution ground sampling model, single circular arc segment image sensitive elements are arranged according to a geometric layout shown in figure 4, an optical axis of an optical system is taken as a circle center, and the radius is r1Evenly arranged in a radial shape on an arc of 18.2272mm with the outer diameter dimension r218.2336mm, the geometry, size, and corresponding instantaneous imaging azimuth angle of each image sensor are identical. The corresponding length of the inner arc of each image sensing element is a17.45 μm, and the corresponding length of the outer arc is a27.46 μm, corresponding length b of 6.4 μm, total arc image sensitive element number 5120, and instantaneous imaging azimuth angle
Figure BDA0001820331260000081
The area of a single image sensitive element is 47.7 μm2Using the formula
Figure BDA0001820331260000082
The area of a single image sensitive element can be improved by 20.9 percent through calculation, namely, the light receiving capacity of the detector can be improved by 20.9 percent.
The method for forming the arc-shaped line detector cuts a detector sheet by adopting a photoetching method, manufactures a mask by referring to the geometric shape of fig. 4, cuts the detector sheet along the radius direction by taking the circle center corresponding to an arc as a starting point, manufactures the mask according to the parameters obtained by the calculation, and has no limit on the manufacturing process flow of the detector.
After the detector is formed, the detector is glued on the substrate, a separate reading circuit is prepared for each image sensitive element and positioned below the substrate, and the parts are packaged on the substrate. The type of detector, the bonding method, the read-out circuit layout, the packaging material, etc. are not limited.
The detector and read-out circuit integration method, read-out circuit adopt the way of the multi-channel parallel output, divide 5120 image sensing element into 8 groups, 640 image sensing element of each group export from an output channel, the read-out speed of the detector is than reading the output pixel 8 times of the 1 st to 5120 th pixel in turn.
Those skilled in the art will appreciate that the details not described in the present specification are well known.

Claims (5)

1. A circular arc special-shaped line array detector for constant ground meta-resolution ground remote sensing is characterized in that: comprises an image sensing element (1) and a readout circuit (3); the image sensing element (1) is an imaging element and is arranged in an arc shape; the image sensing element (1) converts the detected optical signal into an electric signal, and the reading circuit (3) converts the electric signal output by the image sensing element (1) into a digital signal and outputs the digital signal to subsequent processing equipment;
the imaging azimuth angle is an angle of a ground imaging area to an optical axis;
the length of the inner arc segment of the image sensitive element is
Figure FDA0002898503190000011
Wherein k is the distance between two positioning holes of the arc-out arc, σ is the imaging azimuth angle, IFOV is the instantaneous field of view of the optical system, and θ is the optical visual axis inclination angle.
2. The circular arc special-shaped line array detector for constant ground meta-resolution ground remote sensing according to claim 1, characterized in that: the optical path difference between each row of image sensing elements (1) satisfies f | (sec theta)1-secθm) L is less than t; where f is the focal length, θ1The inclination angle of visual axis, theta, corresponding to the line 1 image sensormIs the visual axis inclination angle corresponding to the mth row of image sensing elements, and t is the set optical path difference threshold value.
3. The circular arc special-shaped line array detector for constant ground meta-resolution ground remote sensing according to claim 1, characterized in that: the reading circuit (3) converts the electric signal output by the image sensing element (1) into a digital signal, and comprises: the data of each image sensitive element (1) is directly output one by one, or a plurality of image sensitive elements (1) are combined into a group, and the data of the image sensitive elements (1) are output one by one.
4. The circular arc special-shaped line array detector for constant ground meta-resolution ground remote sensing according to claim 1, characterized in that: the device also comprises a substrate (2) and a base plate (4); the image sensing element (1), the substrate (2) and the reading circuit (3) are sequentially stacked and packaged on the substrate (4) from top to bottom; the substrate (2) is used for providing mechanical support and electrical functions; the substrate (4) is used for forming a packaging structure of the arc-shaped line array detector and provides external electric pins.
5. The circular arc special-shaped line array detector for constant ground meta-resolution ground remote sensing according to claim 4, characterized in that: the substrate (4) further comprises positioning holes (5), and the positioning holes (5) are uniformly distributed on the substrate (4) along the outer arc and the inner arc of the substrate (4) and used for providing mechanical fixation and geometric positioning.
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