CN109484001A - Glass panel separator and its application method - Google Patents

Glass panel separator and its application method Download PDF

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Publication number
CN109484001A
CN109484001A CN201710823743.2A CN201710823743A CN109484001A CN 109484001 A CN109484001 A CN 109484001A CN 201710823743 A CN201710823743 A CN 201710823743A CN 109484001 A CN109484001 A CN 109484001A
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China
Prior art keywords
glass plate
glass
guide groove
plate
loading
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CN201710823743.2A
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Chinese (zh)
Inventor
陈儒德
陈儒鸿
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Individual
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Individual
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Priority to CN201710823743.2A priority Critical patent/CN109484001A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00Ancillary operations in connection with laminating processes
    • B32B38/10Removing layers, or parts of layers, mechanically or chemically

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

The present invention provides a kind of glass panel separator and its application method, with the glass plate component separation that will be bonded to each other, glass panel separator has an at least plummer and a separation assembly, glass panel separator is characterized in that the corresponding glass plate component of plummer has a guide groove and is provided with placing glass plate component, and guide groove is the deep states sample such as non-, its diameter increases with the area of glass plate component and is increased, guide groove is for making the glass plate component provide deformation space when separating by an inflation element of separation assembly, and glass plate component has two loading plates and a glass plate being bonded to each other, glass plate is located between two loading plates, each loading plate is respectively equipped with a perforation.Guide groove parameter needed for the plate to be separated of corresponding different size can automatically be collected for glass panel separator simultaneously to establish related data library so that subsequent setting adjustment is used, and can further be reached and automatically control the effect of overall process carries out.

Description

Glass panel separator and its application method
Technical field
The present invention relates to a kind of glass panel processing procedure equipments, especially a kind of to execute for the glass panel component of multilayer Detached job, and have high process yield, and collect formed automation selection data glass panel separator and its Application method.
Background technique
Display screen pursues always light, thinning or even curving, flexibleization, therefore the glass substrate that panel factory uses is thick Degree also decreases, such as is decremented to about 0.5mm by 1.1mm.And the most thin glass substrate thickness that panel factory can be used at present For 0.3mm, thickness is too frivolous less than the glass substrate of 0.3mm, fragile and be easily deformed, and can not transmit on the board of panel factory Processing is made into display panel.Therefore to be processed for extremely thin type glass substrate above-mentioned, glass substrate must be pasted on To increase integral thickness on one loading plate, make panel factory that can remove again loading plate after carrying out display processing procedure on glass substrate.
When loading plate to be separated and glass panel, mechanical external force mode or chemical process mode, but it has been observed that glass can be used The thickness of glass plate is minimum, is forcibly separating with mechanical external force and will lead to sheet breakage, therefore can not implement.And with chemical process side Formula is then to be dissolved viscose glue to remove glass plate from loading plate by chemical agent, compares mechanical external force mode and be less susceptible to make Sheet breakage.So, this mode may have risk, chemical agent that may also injure panel using upper chemical agent, and Derivative chemical waste article is not easy to handle, furthermore in mixing of viscose, also often occur dissolution not exclusively cause glass plate without The problem of method is smoothly removed.
Be with the present inventor system propose a kind of device for coming separation of glasses plate and loading plate with airing form, glass plate with Gas is injected between loading plate both to make to reach separation purpose using gas pressure, can refer to the TaiWan, China patent No. the The revealed technology contents of M530415 patent document.However, current display screen specification is mentioned with increase in demand and technology Gradually diversification is risen, in addition to change in size, the lightening development in terms of thickness in response to electronic device is also gradually reduced.In implementation, For the present inventor when the glass plate and loading plate for being directed to various rulers are inflated detached job, discovery can generate glass plate often The case where impaired rupture, output qualification rate is caused to be greatly reduced.Therefore to make separator be applicable to the to be separated of each specification Plate, and then effectively promote the plate qualification rate after separation, the present inventor's assembly knot experience engaged in relevant industries for many years, in this It is proposed a kind of glass panel separator and its application method, in order to promoted separator using upper convenience, rate and Applicability.
Summary of the invention
A purpose of the invention, it is desirable to provide a kind of plummer and its application method of glass panel separator, it can The glass plate for being effectively promoted to multilayered structure utilizes the qualification rate of airing form separation, prevents from leading to glass in gas replenishment process Plate damage, and can further collect and establish relevant data information, to select corresponding pedestal for the glass plate of various specifications, Promote whole applicability and processing procedure rate.
In order to achieve the above object, the present invention proposes a kind of glass panel separator in an embodiment, it is provided with to be bonded to each other Glass plate component separation, there is an at least plummer and a separation assembly, which is provided with placing the glass board group Part, the separation assembly are set to the plummer side and have an at least inflation element, be provided with gas injecting the glass from the perforation Glass plate component, to be isolated, it is characterised in that: the plummer corresponds to the glass plate component with a guide groove, the guiding Groove is the deep states sample such as non-, and its diameter increases with the area of the glass plate component and increased, and the guide groove is for making the glass Board group part provides the glass plate component deformation space when separating by the separation assembly with airing form;The wherein glass plate component With two loading plates and a glass plate being bonded to each other, and the glass plate is located between two loading plates, and respectively the loading plate is distinguished Equipped with a perforation, so that the separation assembly injects a gas between any loading plate and the glass plate.In this way, passing through the guiding Groove can provide glass plate component deformation space, hinder the glass plate component of but three-decker in inflation separation process, can not Deformation and cause damage the phenomenon that.
In an embodiment, the depth capacity of the guide groove is greater than or equal to the thickness of the glass plate, so ensures this There is guide groove enough depth can comply with gas pressure deformation in processing procedure conducive to the glass plate component and separate.
It is by the glass plate and another carrying after any loading plate is separated with the glass plate in an embodiment Plate is oppositely arranged in the plummer, and gas is injected this from the perforation of another loading plate again by the inflation element and is held Between support plate and the glass plate, so that another loading plate is separated with the glass plate.
And preferably, in an embodiment, the depth of the guide groove by its center towards edge decrescence, and the guide groove Area be less than the glass plate component area.And the surface flatness to maintain the guide groove, which can be logical Cross groove-like structure made of throwing milling.
Wherein, the medial surface of the guide groove system can be inclined-plane, or make an arc groove of the guide groove without segment difference, So that the guide groove has smooth inner surface and is conducive to guide the glass plate component.
Preferably has more an at least extracting elements in the separation assembly, is provided with absorption and fixes the loading plate, and to this Absorption removes the loading plate after loading plate and glass plate separation, to be more conducive to processing procedure progress.
In another embodiment, the present invention also discloses a kind of application method of glass panel separator, is provided with being implemented on Glass panel separator above-mentioned, comprising the following steps: set a specification material of the glass plate component;Utilize the separation Component inflates any loading plate and the glass plate, and detects the loading plate and/or the deformation quantity of the glass plate;The loading plate And/or the deformation quantity of the glass plate be greater than a setting value when, record a dimension data of the guide groove of the plummer;And it will The dimension data forms a characteristic value information in conjunction with the specification material.In this way, can collect during the separation process and each specification The relevant guide groove of glass plate component dimension data, using as detached job in the future apply upper selection gist.
Preferably, the specification material is including at least an area value of the glass plate component and the glass plate and any carrying One thickness total value of plate;The dimension data includes at least a maximum depth value and a diameter value for the guide groove.
Wherein, further application can select the corresponding guide groove to be made by this feature value data automation Industry, or display are given operating personnel and are voluntarily selected with sharp operating personnel.Its step is after setting the specification material, if having had pair This feature value data answered then automatically selects the corresponding plummer according to this feature value data and carries out detached job.
In conclusion glass panel separator and its application method that the present invention discloses, rely on the guide groove, make for The glass plate component of multilayered structure, the space that can be certainly provided by the guide groove, by gas pressure when preventing separation Influence and it is damaged, effectively promoted separate qualification rate.And to ensure that the glass plate component can be smoothly detached, also further provide Various restrictive conditions.Furthermore have the plummer of the guide groove, collected using the application method and establish related data money Expect library, except relevant manufactures guide groove applicable by its selection is conducive to, to promote the qualification rate of detached job, and can be into one Step realizes the effect of automated process.
Detailed description of the invention
Fig. 1 is the stereoscopic schematic diagram of first embodiment of the invention.
Fig. 2 is the diagrammatic cross-section of first embodiment of the invention plummer and glass plate component.
Fig. 3 A is the application schematic diagram (one) of first embodiment of the invention.
Fig. 3 B is the application schematic diagram (two) of first embodiment of the invention.
Fig. 4 is the plummer diagrammatic cross-section of another state sample implementation of first embodiment of the invention.
Fig. 5 is the step flow chart of second embodiment of the invention.
Fig. 6 is the step flow chart of another state sample implementation of second embodiment of the invention.
Description of symbols: 1- glass panel separator;10- plummer;101- guide groove;11- separation assembly; 111- inflation element;112- extracting elements;2- glass plate component;20- loading plate;201- perforation;21- glass plate;D- guiding is recessed The depth capacity of slot;The diameter of R- guide groove;The thickness of h- glass plate;S01~S06- step.
Specific embodiment
To enable your juror to have a clear understanding of the contents of the present invention, schema of sincerely arranging in pairs or groups in the following instructions please be refering to.
Discovery is constantly tested through the present inventor, when separating plate, by gas by loading plate perforate injection loading plate with It between glass plate, needs space and loading plate is allowed slightly to deform with glass plate, gas just has space injection loading plate and glass plate Between.In practice, the glass plate of two groups of fitting loading plates can make the membrane transistor TFT element of display respectively and colour is filtered Mating plate element, the contraposition fitting processing procedure group for then carrying out display found into one group of entire panel, form loading plate, one group of complete face The three-decker plate of plate, loading plate, for the plate detached job of this kind of three-decker, deformation space requirement above-mentioned is more attached most importance to It wants.Therefore the present inventor system improves for the separator previously researched and developed, and hopes and effectively solves foregoing problems, to promote separation The scope of application of device with separate qualification rate.Fig. 1, Fig. 2, Fig. 3 A- Fig. 3 B and Fig. 4 are please referred to, is first embodiment of the invention Stereoscopic schematic diagram, plummer and glass plate component diagrammatic cross-section, each application schematic diagram and another state sample implementation carrying Platform diagrammatic cross-section.The present invention proposes a kind of glass panel separator 1, and the glass plate component 2 for being provided with to be bonded to each other divides From with an at least plummer 10 and a separation assembly 11, which is provided with placing the glass plate component 2, the separation Component 11 sets 11 in 10 side of plummer and has an at least inflation element 111, is provided with injecting a gas into the glass plate component 2, to be isolated.The glass panel separator 1 is characterized in that the corresponding glass plate component 2 of the plummer 10 has one to lead Draw groove 101, which is the deep states sample such as non-, and its diameter R increases with the area of the glass plate component 2 and increased, The guide groove 101 is for making the glass plate component 2 provide the glass board group when separating by the separation assembly 11 with airing form 2 deformation space of part;Wherein the glass plate component 2 has two loading plates 20 and a glass plate 21 being bonded to each other, and the glass plate 21 are located between two loading plates 20, and respectively the loading plate 20 is respectively equipped with a perforation 201, so that the separation assembly 11 infuses gas Enter between any loading plate 20 and the glass plate 21.Wherein, preferably, which is a display panel, described this The area of a little loading plates 20 and the glass plate 21 can be big to wait, or the area of these loading plates 20 is made to be greater than the glass plate 21 area all may be used.And an at least extracting elements 112 are had more in the separation assembly 11, be provided with absorption and fix the loading plate 20, and absorption removes the loading plate 20 after the loading plate 20 and the glass plate 21 separation.
In this way, designing, providing using the structure of the guide groove 101 for the glass plate component 2 of tool three-decker The glass plate component 2 inflates enough deformation spaces when stress, prevents the glass plate component 2 by the anti-of 10 surface of plummer To supporting for strength and damaged.The present inventor has found in design process, which is only set and not for being separated The glass plate component 2 carries out corresponding adjustment, can not still solve the problems, such as that plate is damaged in gas replenishment process, is with to can ensure that the glass Glass plate component 2 can really deformation and be separated from each other, the diameter R of the guide groove 101 must be made with the area of the glass plate component 2 Variation, and make the state of the not equal depth of the guide groove 101, even if supplying the glass plate component 2 to avoid enough areas are provided, But it is influenced by equal deep trouths state sample, which still can not be made the glass by 101 edge barrier of guide groove Glass plate component 2 forms slightly curved deformation.
Preferably, the depth capacity D of the guide groove 101 are greater than or equal to the thickness h of the glass plate 21.In addition to above-mentioned Diameter term restriction, for ensure the glass plate component 2 have it is enough can deformation space, the depth capacity D of the guide groove 101 It also is a significant dimensions condition.
In addition, the depth of the guide groove 101, by its center towards edge decrescence, and the area of the guide groove 101 is less than 2 area of glass plate component.To prevent the guide groove 101 that there is excessive depth segment difference, leads to plate still and can not be successfully and is curved Curved change, and more smooth 101 inner surface of guide groove is provided, the excessive segment difference of reason is not counter damages plate.And it is making It makes, which is preferably can also except can certainly process required size by the groove-like structure for throwing milling formation The surface flatness for keeping the guide groove 101 prevents the glass plate component 2 from scraping damage etc. because 101 surface of guide groove generates Situation.
Preferably, which is arc groove namely a camber line aspect is presented in its section system, so also reachable To the effect of making the 101 smooth interior surfaces aspect of guide groove, make the glass plate component 2 that can be more likely formed Bending Deformation.Or such as Shown in Fig. 4, make the medial surface inclined-plane aspect of the guide groove 101, bottom surface is arc aspect, there can also be splendid guiding function Effect.
In application, the corresponding guide groove 101 of the glass plate component 2 is placed in the carrying as shown in Fig. 3 A and Fig. 3 B On platform 10, and make any loading plate 20 towards the separation assembly 11.The separation assembly 11 is i.e. by the inflation element 111 to this The perforation 201 of loading plate 20 is inflated movement, to make the glass plate 21 of the loading plate 20 Yu lower section using gas pressure Separation.At this point, the glass plate 21 of lower section and another loading plate 20 meeting stress are slightly in bending deformation by effects of air pressure, lead to Crossing the guide groove 101 can allow those plates along 101 deformation of guide groove, until the glass of the loading plate 20 and lower section Plate 21 and the separation of another loading plate 20, can be removed the separated loading plate 20 by the extracting elements 112 at this time.Separation After complete any loading plate 20 will the glass plate 21 and the loading plate 20 it is oppositely arranged in the plummer 10, make the loading plate 20 The corresponding separation assembly 11 setting, the inflation element 111 is i.e. again by 201 gas injection of perforation of the loading plate 20 with by the glass Glass plate 21 is separated with the remaining loading plate 20, similarly, the space which can also be provided by the guide groove 101 Stress and deformation, to be smoothly detached the two.Wherein, the deformed state system of the glass plate 21 and the loading plate 20 shown in figure is only It is non-to represent actual deformation aspect conducive to purposes of discussion.
Please continue be refering to Fig. 5 second embodiment of the invention step flow chart.And refering to fig. 1~Fig. 3 the B that please arrange in pairs or groups again. It is influenced by the factors such as panel factory processing procedure and the electronic device of subsequent applications, the glass plate 21 used at present and the loading plate 20 Dimensions is quite a variety of.When carrying out separation process, the glass plate 21 of different size and the loading plate 20, needed for shape Emptying also difference.For can be promoted the applicability of the plummer 10 with to ensure to separate qualification rate, the present invention be to propose in this A kind of application method of glass panel separator is provided with being implemented on the plummer 10 above-mentioned, which includes following Step.
Firstly, setting a specification material (step S01) of the glass plate component 2.Wherein the specification material, which includes at least, is somebody's turn to do The thickness total value of one area value of glass plate component 2 and the glass plate 21 and any loading plate 20.Then, the separation is utilized Component 11 inflates any loading plate 20 and the glass plate 21, and detects the loading plate 21 and/or the deformation of the glass plate 20 It measures (step S02).It has been observed that when injecting gas via the perforation 201 of the loading plate 20 due to the separation assembly 11, the glass Plate 21 and another loading plate 20 or 21 system of glass plate will receive gas pressure and generate deformation with the loading plate with gas injection 20 separation, detect the deformation quantity of the loading plate 20 and the glass plate 21 or the glass plate 21 at this time.In the loading plate 20 and it is somebody's turn to do When the deformation quantity of glass plate 21 is greater than a setting value, a dimension data (step of the guide groove 101 of the plummer 10 is recorded S03).It means in this when the deformation quantity of the loading plate 20 and/or the glass plate 21 can surmount the scheduled setting value, represents this and lead Draw groove 101 to be applicable to separate the glass plate component 2 of the specification, so when can record the ruler of the guide groove 101 Very little data.Wherein, which includes at least a maximum depth value and a diameter value for the guide groove 101.Finally, should Dimension data forms a characteristic value information (step S04) in conjunction with the specification material.By the application method, can divided The glass plate component 2 of each specification applicable 101 type of guide groove is collected when from operation, and then accumulate formation to be provided with joining The data bank with design is examined, achievees the purpose that data collection.And the glass panel separator 1 carries out showing for detached job Meaning can be answered refering to shown in Fig. 3 A- Fig. 3 B.Wherein, the maximum depth value of the guide groove 101 is greater than or equal to the glass plate component 2 The glass plate 21 and any loading plate 20 thickness total value, with reduce the glass plate component 2 in inflation when can not deformation And a possibility that leading to damage.
Please continue be refering to Fig. 6 another state sample implementation of second embodiment of the invention step flow chart.Wherein, one by one After collecting this feature value data, manufacturer can know the glass plate component 2 of each specification when carrying out detached job needs this The dimension data of guide groove 101.Therefore the application method can be further the following steps are included: in setting the specification material Afterwards, if there being corresponding this feature value data, the corresponding plummer 10 is automatically selected according to this feature value data and is carried out Detached job.It in other words, is to judge whether that there is corresponding this feature value data (step S05) after inputting the specification material, If then automatically selecting the corresponding plummer 10 according to this feature value data carries out detached job (step S06);If otherwise into Row step S02~S04.In this way, those characteristic value informations can be used as manufacturer in the plummer 10 for selecting suitable processing procedure and be somebody's turn to do The reference frame of guide groove 101, on the implementation, manufacturer can make the glass panel separator 1 setting have a variety of different rulers The plummer 10 of very little data, or the guide groove 101 for making the single plummer 10 that there are a plurality of different dimension datas, And this feature value data is utilized, the suitable guide groove 101 can be automatically selected, automatically to carry out separation process.
In conclusion glass panel separator and its application method that the present invention discloses, by specific condition limitation The guide groove 101 makes the glass plate component 2 for multilayered structure, the sky that can be certainly provided by the guide groove 101 Between, it deformation and then is separated from each other when inflating separation, prevents damaged by gas pressure influence, effectively promote separation qualification Rate.To ensure that the glass plate component 2 can be smoothly detached, various restrictive conditions are also further provided.And has the guide groove 101 The plummer 10, related data library is collected and established using the application method, except be conducive to relevant manufactures by its select The applicable guide groove 101 is selected, to promote the qualification rate of detached job, and the effect of automated process can be further realized.
Described above to be merely exemplary for the purpose of the present invention, and not restrictive, those of ordinary skill in the art understand, Without departing from the spirit and scope defined by the claims, can many modifications may be made, variation or equivalent, but will all fall Enter the interior of protection scope of the present invention.

Claims (10)

1. a kind of glass panel separator is provided with the glass plate component that will be bonded to each other separation, at least one carrying Platform and a separation assembly, the plummer are provided with placing the glass plate component, which is set to the plummer side and has An at least inflation element is provided with gas injecting the glass plate component from the perforation, to be isolated, it is characterised in that:
The plummer corresponds to the glass plate component with a guide groove, which is the deep states sample such as non-, and its diameter with The area of the glass plate component increases and increases, and the guide groove is for making the glass plate component by the separation assembly with the side of inflation When formula separates, the glass plate component deformation space is provided;Wherein the glass plate component has two loading plates and one being bonded to each other Glass plate, and the glass plate is located between two loading plates, respectively the loading plate is respectively equipped with a perforation, so that the separation assembly will Gas injects between any loading plate and the glass plate.
2. glass panel separator according to claim 1, which is characterized in that the depth capacity of the guide groove is greater than Or the thickness equal to the glass plate.
3. glass panel separator according to claim 1, which is characterized in that in any loading plate and the glass plate It is that the glass plate and another loading plate is oppositely arranged in the plummer after separation, and again by the inflation element by gas Body injects between the loading plate and the glass plate from the perforation of another loading plate, so that another loading plate and the glass plate Separation.
4. glass panel separator according to claim 1, which is characterized in that the depth of the guide groove is by its center Decrescence towards edge, and the area of the guide groove be less than the glass plate component area.
5. glass panel separator according to claim 1 or 2 or 3, which is characterized in that the guide groove is that arc is recessed Slot, or the medial surface of the guide groove is made to be inclined-plane.
6. glass panel separator according to claim 1, which is characterized in that the separation assembly also has at least one suction Element is taken, absorption is provided with and fixes the loading plate, and absorption removes the loading plate after the loading plate and glass plate separation.
7. a kind of application method of glass panel separator is provided with being implemented on glass panel according to claim 1 point From device, comprising the following steps:
Set a specification material of the glass plate component;
Any loading plate and the glass plate are inflated using the separation assembly, and detect the loading plate and/or the glass plate Deformation quantity;
When the deformation quantity of the loading plate and/or the glass plate is greater than a setting value, the one of the guide groove of the plummer is recorded Dimension data;And
The dimension data is formed into a characteristic value information in conjunction with the specification material.
8. application method according to claim 7, which is characterized in that the specification material includes at least the glass plate component One thickness total value of one area value and the glass plate and any loading plate.
9. application method according to claim 8, which is characterized in that the dimension data includes at least the one of the guide groove Maximum depth value and a diameter value.
10. application method according to any one of claims 7 to 9, which is characterized in that after setting the specification material, If there being corresponding this feature value data, the corresponding plummer is automatically selected according to this feature value data and carries out separation work Industry.
CN201710823743.2A 2017-09-13 2017-09-13 Glass panel separator and its application method Withdrawn CN109484001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710823743.2A CN109484001A (en) 2017-09-13 2017-09-13 Glass panel separator and its application method

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Application Number Priority Date Filing Date Title
CN201710823743.2A CN109484001A (en) 2017-09-13 2017-09-13 Glass panel separator and its application method

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Publication Number Publication Date
CN109484001A true CN109484001A (en) 2019-03-19

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1963620A (en) * 2006-11-17 2007-05-16 友达光电股份有限公司 Adsorption apparatus
CN102645780A (en) * 2012-04-27 2012-08-22 深圳市华星光电技术有限公司 Separation method and separation machine platform of liquid crystal panel and lining gasket
KR20130078802A (en) * 2011-12-30 2013-07-10 엘아이지에이디피 주식회사 Substrates detaching apparatus
TW201346046A (en) * 2012-05-14 2013-11-16 Chunghwa Picture Tubes Ltd Glass substrate stacking structure, apparatus and method for film coating process
CN106739424A (en) * 2015-11-20 2017-05-31 财团法人工业技术研究院 Taking-down and bonding device, taking-down method and bonding method using same
CN206416637U (en) * 2017-01-04 2017-08-18 昆山龙腾光电有限公司 Substrate adsorption stripping off device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1963620A (en) * 2006-11-17 2007-05-16 友达光电股份有限公司 Adsorption apparatus
KR20130078802A (en) * 2011-12-30 2013-07-10 엘아이지에이디피 주식회사 Substrates detaching apparatus
CN102645780A (en) * 2012-04-27 2012-08-22 深圳市华星光电技术有限公司 Separation method and separation machine platform of liquid crystal panel and lining gasket
TW201346046A (en) * 2012-05-14 2013-11-16 Chunghwa Picture Tubes Ltd Glass substrate stacking structure, apparatus and method for film coating process
CN106739424A (en) * 2015-11-20 2017-05-31 财团法人工业技术研究院 Taking-down and bonding device, taking-down method and bonding method using same
CN206416637U (en) * 2017-01-04 2017-08-18 昆山龙腾光电有限公司 Substrate adsorption stripping off device

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